JPH0480052U - - Google Patents

Info

Publication number: JPH0480052U
Authority: JP; Japan
Prior art keywords: tweezers; dust; view; free paper; featuring
Prior art date: 1990-11-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP12560490U

Other languages

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-11-27

Filing date

1990-11-27

Publication date

1992-07-13

1990-11-27 Application filed filed Critical

1990-11-27 Priority to JP12560490U priority Critical patent/JPH0480052U/ja

1992-07-13 Publication of JPH0480052U publication Critical patent/JPH0480052U/ja

Status Pending legal-status Critical Current

Landscapes

Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

JP12560490U 1990-11-27 1990-11-27 Pending JPH0480052U (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP12560490U JPH0480052U (fr)	1990-11-27	1990-11-27

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP12560490U JPH0480052U (fr)	1990-11-27	1990-11-27

Publications (1)

Publication Number	Publication Date
JPH0480052U true JPH0480052U (fr)	1992-07-13

Family

ID=31873196

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12560490U Pending JPH0480052U (fr)	1990-11-27	1990-11-27

Country Status (1)

Country	Link
JP (1)	JPH0480052U (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2005036623A1 (fr) *	2003-10-08	2005-04-21	Zao Nikon Co., Ltd.	Appareil et procede de transport de substrat, appareil et procede d'exposition, et procede de production de dispositif
US20130271945A1 (en)	2004-02-06	2013-10-17	Nikon Corporation	Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US9341954B2 (en)	2007-10-24	2016-05-17	Nikon Corporation	Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en)	2003-10-28	2016-08-23	Nikon Corporation	Illumination optical apparatus and projection exposure apparatus
US9678332B2 (en)	2007-11-06	2017-06-13	Nikon Corporation	Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US9678437B2 (en)	2003-04-09	2017-06-13	Nikon Corporation	Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885872B2 (en)	2003-11-20	2018-02-06	Nikon Corporation	Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US9891539B2 (en)	2005-05-12	2018-02-13	Nikon Corporation	Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en)	2007-10-12	2018-10-16	Nikon Corporation	Illumination optical apparatus, exposure apparatus, and device manufacturing method

1990
- 1990-11-27 JP JP12560490U patent/JPH0480052U/ja active Pending

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9678437B2 (en)	2003-04-09	2017-06-13	Nikon Corporation	Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885959B2 (en)	2003-04-09	2018-02-06	Nikon Corporation	Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
WO2005036623A1 (fr) *	2003-10-08	2005-04-21	Zao Nikon Co., Ltd.	Appareil et procede de transport de substrat, appareil et procede d'exposition, et procede de production de dispositif
US9423698B2 (en)	2003-10-28	2016-08-23	Nikon Corporation	Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en)	2003-10-28	2017-09-12	Nikon Corporation	Illumination optical apparatus and projection exposure apparatus
US10281632B2 (en)	2003-11-20	2019-05-07	Nikon Corporation	Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction
US9885872B2 (en)	2003-11-20	2018-02-06	Nikon Corporation	Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US20130271945A1 (en)	2004-02-06	2013-10-17	Nikon Corporation	Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10241417B2 (en)	2004-02-06	2019-03-26	Nikon Corporation	Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10234770B2 (en)	2004-02-06	2019-03-19	Nikon Corporation	Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10007194B2 (en)	2004-02-06	2018-06-26	Nikon Corporation	Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US9891539B2 (en)	2005-05-12	2018-02-13	Nikon Corporation	Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en)	2007-10-12	2018-10-16	Nikon Corporation	Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9857599B2 (en)	2007-10-24	2018-01-02	Nikon Corporation	Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en)	2007-10-24	2016-05-17	Nikon Corporation	Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9678332B2 (en)	2007-11-06	2017-06-13	Nikon Corporation	Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method

Publication	Publication Date	Title
JPH0480052U (fr)	1992-07-13
JPH0480042U (fr)	1992-07-13
JPH04537U (fr)	1992-01-06
JPS62133631U (fr)	1987-08-22
JPH0414943U (fr)	1992-02-06
JPH0417790U (fr)	1992-02-14
JPS6386638U (fr)	1988-06-06
JPH0440779U (fr)	1992-04-07
JPH0211326U (fr)	1990-01-24
JPH0313259U (fr)	1991-02-12
JPH0392494U (fr)	1991-09-20
JPH01115407U (fr)	1989-08-03
JPH03113149U (fr)	1991-11-19
JPH0251806U (fr)	1990-04-12
JPH02120511U (fr)	1990-09-28
JPH0469095U (fr)	1992-06-18
JPH02145191U (fr)	1990-12-10
JPH02134952U (fr)	1990-11-08
JPS6368906U (fr)	1988-05-09
JPH03123450U (fr)	1991-12-16
JPH0477013U (fr)	1992-07-06
JPS6187587U (fr)	1986-06-07
JPH0379286U (fr)	1991-08-13
JPH0345719U (fr)	1991-04-26
JPS63199797U (fr)	1988-12-22