JPH0429844U

JPH0429844U -

Info

Publication number: JPH0429844U
Application number: JP7042290U
Authority: JP
Priority date: 1990-07-02
Filing date: 1990-07-02
Publication date: 1992-03-10

Description

[Brief explanation of the drawing]

第１図乃至第４図は本考案の一実施例に係わる
光スペクトラム分析装置を示すものであり、第１
図は上盤上に配設された各光学部材を示す図、第
２図ａはホルダを示す斜視図、第２図ｂおよび第
３図はそれぞれホルダの構造を示す断面図、第４
図はデータ処理装置の概略構成を示すブロツク図
であり、第５図は従来の光スペクトラム分析装置
の概略構成を示す透視図であり、第６図は一般的
なダブルグレーテング型の分光器の分光特性を示
す図である。２１……上盤、２２……入出力ホルダ、２２ａ
……第１のコリメータ、２３……回折格子ホルダ
、２３ａ……第１の回折格子、２３ｂ……第２の
回折格子、２４……平面鏡ホルダ、２４ａ……第
１の平面鏡、２４ｂ……第２の平面鏡、２５……
コリメータホルダ、２５ａ……第１のカメラ鏡、
２５ｂ……第２のコリメータ、２６……中間スリ
ツトホルダ、２６ａ……第１のコーナ鏡、２６ｂ
……第２のコーナ鏡、２６ｃ……中間スリツト、
２７ｂ……第２のカメラ鏡、２８……入射スリツ
ト、２９……出射スリツト、３１……受光器、３
８，５２，５３……モータ、４１……データ処理
装置、４３……ＣＰＵ、４６……ＣＲＴ表示装置
。 FIGS. 1 to 4 show an optical spectrum analyzer according to an embodiment of the present invention, and FIG.
The figures show each optical member disposed on the upper board, Figure 2a is a perspective view of the holder, Figures 2b and 3 are cross-sectional views showing the structure of the holder, and Figure 4 is a perspective view of the holder.
The figure is a block diagram showing the schematic structure of a data processing device, FIG. 5 is a perspective view showing the schematic structure of a conventional optical spectrum analyzer, and FIG. 6 is a diagram of a general double grating type spectrometer. FIG. 3 is a diagram showing spectral characteristics. 21... Upper panel, 22... Input/output holder, 22a
...first collimator, 23...diffraction grating holder, 23a...first diffraction grating, 23b...second diffraction grating, 24...plane mirror holder, 24a...first plane mirror, 24b...th 2 plane mirror, 25...
Collimator holder, 25a...first camera mirror,
25b...Second collimator, 26...Intermediate slit holder, 26a...First corner mirror, 26b
...Second corner mirror, 26c...Middle slit,
27b... Second camera mirror, 28... Entrance slit, 29... Output slit, 31... Light receiver, 3
8, 52, 53...Motor, 41...Data processing device, 43...CPU, 46...CRT display device.

Claims

[Claims for Utility Model Registration] A first diffraction grating 23a that separates the input light to be measured, and a second diffraction grating that further separates the light that has been separated by the first diffraction grating and passed through the intermediate slit. 23b, a light receiver 31 that receives the light separated by the second diffraction grating through an output slit and outputs a light intensity signal, and the first and second diffraction gratings are rotated in conjunction with each other. and a data processing device 41 that detects a light intensity signal output from the light receiver at each rotation angle and calculates wavelength/spectrum characteristics of the light to be measured. a first collimator 22a that collimates the measurement light into the first diffraction grating; and a camera mirror that guides the light separated by the first diffraction grating to the intermediate slit via a first corner mirror. 2
5a, a first plane mirror 24a inserted in the optical path from the first diffraction grating to the camera mirror, and a first plane mirror 24a that diffracts the light emitted from the intermediate slit through the second corner mirror. a second collimator 25b that allows collimated light to enter the grating; a second plane mirror 24b inserted in the optical path from the second collimator to the second diffraction grating;
a diffraction grating holder 23 that holds the diffraction gratings in common;
A diffraction grating holder rotating mechanism 38 that rotates this diffraction grating holder, a plane mirror holder 24 that commonly holds the first and second plane mirrors, and a common unit that holds the camera mirror and the second collimator. A collimator holder 25 for holding, an intermediate slit holder 26 for holding the first and second corner mirrors and the intermediate slit in common, and the plane mirror holder, the collimator holder, the intermediate slit holder, and the diffraction grating holder rotation mechanism are attached. An optical spectrum analyzer equipped with a surface plate 21.