JP7189311B2 - Liquid ejection head and liquid ejection device - Google Patents

Description

The embodiments of the present invention relate to liquid ejection heads and liquid ejection apparatuses.

In a shared-mode shared-wall type liquid ejection head having a plurality of pressure chambers, there is a configuration in which a plurality of pressure chambers communicating with nozzles and air chambers disposed between the pressure chambers are provided alternately in a predetermined direction. Are known. In such a liquid ejection head, a common electrode to be grounded is formed in each of the pressure chambers and an individual electrode is formed in each of the air chambers in order to prevent problems caused by current flowing through the liquid. A configuration is known in which individual electrodes are mounted on a drive circuit.

JP 2013-10211 A

SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid ejection head and a liquid ejection apparatus capable of simplifying wiring.

A liquid ejection head according to one embodiment forms a common chamber between a base having a plurality of grooves arranged in a first direction, a nozzle plate arranged to face the plurality of grooves of the base, and the base. and a frame member, wherein the plurality of grooves have grooves having individual electrodes and grooves having a common electrode, and extend from the individual electrodes to one side in a second direction intersecting the first direction. a common wiring extending from the common electrode to the other side in the second direction; a connection wiring connected to the common wiring on the other side in the second direction and reaching the one side; wherein the plurality of grooves extend in the second direction, alternate grooves among the plurality of grooves are covered at both ends in the second direction to form air chambers, and other grooves form a pressure chamber communicating with the common chamber. The base has a substrate and a piezoelectric body having a plurality of grooves arranged in a first direction, and the frame member is provided between the nozzle plate and the substrate.

1 is a perspective view of an inkjet head according to a first embodiment; FIG. FIG. 2 is a perspective view showing the internal structure of the inkjet head with a part broken away; Explanatory drawing of the same inkjet head. Explanatory drawing of the same inkjet head. FIG. 2 is an explanatory diagram showing the configuration of an inkjet printer using the same inkjet head. Explanatory drawing which shows operation|movement of the same inkjet head. Explanatory drawing which shows operation|movement of the same inkjet head. FIG. 4 is an explanatory diagram of an inkjet head according to another embodiment; FIG. 4 is an explanatory diagram of an inkjet head according to another embodiment; FIG. 4 is an explanatory diagram of an inkjet head according to another embodiment; FIG. 4 is an explanatory diagram of an inkjet head according to another embodiment;

The configurations of an inkjet head 1 as a liquid ejection head and an inkjet printer 100 as a liquid ejection device according to the first embodiment will be described below with reference to FIGS. 1 to 7. FIG. In each figure, for the sake of explanation, the configuration is shown enlarged, reduced, or omitted as appropriate. Arrows X, Y, and Z in the drawing indicate three directions orthogonal to each other. In this embodiment, the first direction of the inkjet head 1 is the X axis, the second direction is the Y axis, and the third direction is the Z axis.

FIG. 1 is a perspective view of the inkjet head 1, and FIG. 2 is an explanatory diagram showing a part of the inkjet head 1. As shown in FIG. 3 is a side view from one main surface of the base 10, and FIG. 4 is a side view from the other main surface of the base 10. FIG.

The ink jet head 1 shown in FIGS. 1 to 4 is a so-called end shooter type share mode share wall type ink jet head.

The inkjet head 1 includes a base 10 , a nozzle plate 20 having a plurality of nozzles 21 , a cover plate 30 as a cover, and a case member 40 .

The base 10 includes a substrate 12 and a laminated piezoelectric body 13 as a piezoelectric portion.

The substrate 12 is configured in a rectangular plate shape. Substrate 12 is preferably constructed of PZT, ceramics, glass, machinable ceramics, or materials containing these. A laminated piezoelectric body 13 is connected to the edge of the substrate 12 on the nozzle plate 20 side.

The laminated piezoelectric member 13 is configured by laminating two piezoelectric members. The piezoelectric member is made of, for example, a PZT (lead zirconate titanate) piezoelectric ceramic material. In addition, lead-free piezoelectric ceramics such as KNN (sodium potassium niobate) may be used as the piezoelectric member in consideration of the environment. The two piezoelectric members are polarized so that their polarization directions are opposite to each other, and are adhered via an adhesive layer.

A groove row 14A having a plurality of grooves 14 arranged in the first direction is formed on the end face of the laminated piezoelectric body 13 facing the nozzle plate 20 . The plurality of grooves 14 are bottomed slits that are open on the nozzle plate 20 side and have a predetermined depth. A cross section along the XZ plane of the laminated piezoelectric body 13 has a comb shape. A pillar-like portion formed between adjacent grooves 14 constitutes a laminated piezoelectric element 15 that serves as a driving portion for changing the volume of the grooves 14 .

That is, on one end side of the base 10, a plurality of elongated laminated piezoelectric elements 15 are arranged side by side in the first direction with a plurality of grooves 14 interposed therebetween. The laminated piezoelectric element 15 is provided by laminating a first piezoelectric element 15a and a second piezoelectric element 15b, and the second piezoelectric element 15b is continuous on the bottom side of the groove .

The plurality of grooves 14 includes a plurality of first grooves 14a arranged in the first direction, a plurality of second grooves 14b arranged between the plurality of first grooves 14a, and arranged at both ends of the groove row 14A. and a plurality of third grooves 14c formed by The plurality of grooves 14a, 14b, 14c extend along second and third directions orthogonal to the first direction, respectively, and are formed parallel to each other. The grooves 14a, 14b, 14c are formed over the entire length of the base 10 in the second direction.

A common electrode 16a is formed on the inner wall of the first groove 14a. The common electrode 16a is, for example, a metal film formed on the bottom and side walls of the first trench 14a. The common electrode 16a is connected to a common pattern 17a formed on the other main surface 10a of the base 10. As shown in FIG. Both ends of the first groove 14a in the second direction are open inside the frame member 40a and communicate with the common chamber C3. A nozzle 21 is provided at a position facing the first groove 14a. That is, the first groove 14a constitutes a pressure chamber C1 communicating with the nozzle 21 as well as communicating with the common chamber C3.

A pair of individual electrodes 16b are formed on the inner wall of the second groove 14b. The pair of individual electrodes 16b are connected to individual patterns 17b formed on one main surface 10b of the base 10. As shown in FIG. Both ends of the second groove 14b in the second direction are covered with the cover plate 30 inside the frame member 40a. The second groove 14b is closed to form an air chamber C2 separated from the common chamber C3 and the pressure chamber C1.

A connection electrode 16c is formed on the inner wall of the third groove 14c. The connection electrode 16 c is connected to the common pattern 17 a on the other side of the base 10 and the connection pattern 17 c on the one side of the base 10 .

Predetermined wiring patterns 17 (wiring electrodes) are formed on the pair of main surfaces 10 a and 10 b of the base 10 . The wiring pattern 17 includes a common pattern 17a, an individual pattern 17b, and a connection pattern 17c.

The common pattern 17a is a metal film formed on the other main surface 10a of the base 10, and has a predetermined wiring pattern connected to a plurality of parallel common electrodes 16a and connection electrodes 16c arranged at the ends. Common wiring 17d formed from the inner walls of the plurality of first grooves 14a to the other main surface 10a of the base 10 is formed by the plurality of common electrodes 16a and the common pattern 17a.

The plurality of individual patterns 17b are metal films formed on one main surface 10b of the base 10, and have predetermined wiring patterns connected to the plurality of individual electrodes 16b, respectively. The individual pattern 17b extends outside the frame member 40a on the other main surface 10a and is connected to the drive circuit 52 via the flexible substrate 51. As shown in FIG. The individual pattern 17b and the individual electrode 16b constitute an individual wiring 17e formed from the inner walls of the plurality of second grooves 14b to the one main surface 10b of the base 10. As shown in FIG.

The pair of connection patterns 17c are metal films formed on one main surface 10b of the base 10, and have predetermined wiring patterns connected to the pair of connection electrodes 16c, respectively. The connection pattern 17c extends outside the frame member 40a on one main surface 10b and is grounded. The connection pattern 17c is connected to the common pattern 17a on the other principal surface 10a via the connection electrode 16c, and the connection electrode 16c and the connection pattern 17c form a connection wiring 17f extending from the other side to the one principal surface 10b.

The common electrode 16a, the individual electrode 16b, the connection electrode 16c, the common pattern 17a, the individual pattern 17b, and the connection pattern 17c are formed by, for example, a vacuum deposition method or an electroless nickel plating method, and are formed into a predetermined shape by etching or laser processing. patterned to

The nozzle plate 20 is configured in a rectangular plate shape with a thickness of about 10 μm to 100 μm. A nozzle row having a plurality of nozzles 21 penetrating in the thickness direction is formed in the nozzle plate 20 . The nozzle plate 20 is arranged to face the opening of the groove row 14A on one end side of the base 10 . The nozzles 21 are provided at positions corresponding to the plurality of pressure chambers C1. That is, the nozzle plate 20 has a nozzle 21 communicating with the pressure chamber C1 formed by the first groove 14a and closes the openings of the second groove 14b and the third groove 14c.

The cover plate 30 is made of a material such as ceramics or glass. The cover plate 30 is a square plate member having a plurality of notches 31 . The cover plate 30 covers a predetermined area including the opening at the end of the second groove 14b. The notch 31 is formed through in the thickness direction. Since the notch 31 corresponds to the positions of the first groove 14a and the third groove 14c, both ends of the first groove 14a and the third groove 14c in the second direction are not covered with the cover plate 30. , the inside of the frame member 40a is open. Therefore, the pressure chamber C1 formed by the first groove 14a communicates with the common chamber C3 formed outside the cover plate 30, and liquid such as ink flows into the pressure chamber C1 through the notch 31. As shown in FIG. On the other hand, the openings at both ends of the second groove 14b in the second direction are closed by the cover plate 30 to prevent the inflow of ink.

That is, at one end of the base 10, pressure chambers C1 communicating with the common chamber C3 and closed air chambers C2 are alternately arranged, and connection electrodes 16c are formed at both ends of the groove row 14A. A third groove 14c is provided.

The case member 40 integrally includes a frame member 40a having a rectangular frame shape and a plate-like lid member 40b that closes an opening of the frame member 40a. The frame member 40 a surrounds the outer periphery of the base 10 and covers the outer periphery of a part of the base 10 . Specifically, the frame member 40a has a pair of plate-like first frame pieces 41 joined to the end face of the base 10 in the first direction, and the main surfaces 10a and 10b, which are the outer surfaces of the base 10, separated by a predetermined distance. and a pair of plate-shaped second frame pieces 42 arranged in parallel. Between the frame member 40a and the base 10 covered with the cover plate 30, a common chamber C3 is formed. The common chamber C3 communicates with the pressure chamber C1 through the notch 31 of the cover plate 30. As shown in FIG. The frame member 40a functions as a guide for guiding liquid such as ink. An opening edge on one side of the frame member 40a is joined to the outer periphery of the nozzle plate 20, and a lid member 40b is provided on an opening edge on the other side of the frame member 40a.

The lid member 40b is constructed integrally with the frame member 40a and the lid member 40b. The lid member 40b is a rectangular plate-like member having a supply port through which ink flows into the common chamber C3 from the outside and a discharge port through which ink is discharged from the common chamber C3 to the outside. A supply channel 133a is connected to the supply port, and a recovery channel 133b is connected to the discharge port. The lid member 40b closes one side of the opening of the frame member 40a to form a common chamber C3.

That is, the nozzle plate 20, the frame member 40a, and the lid member 40b cover the actuator portion, which is the portion of the base 10 on the nozzle plate 20 side. Various electronic components such as a drive circuit are mounted on the wiring pattern 17 of the portion of the base 10 opposite to the nozzle plate 20 and extending outside the frame member 40a and the lid member 40b.

Inside the frame member 40a of the inkjet head 1 configured as described above, there are a plurality of pressure chambers C1 communicating with the nozzles 21, a plurality of air chambers C2 closed by the cover plate 30, and a plurality of pressure chambers. A common chamber C3 communicating with C1 is formed. The ink jet head 1 circulates ink in a channel passing through pressure chambers C1 and common chambers C3 formed therein.

An inkjet printer 100 having the inkjet head 1 will be described below with reference to FIG. FIG. 5 is an explanatory diagram showing the configuration of the inkjet printer 100. As shown in FIG. As shown in FIG. 5, the inkjet printer 100 includes a housing 111, a medium supply section 112, an image forming section 113, a medium discharge section 114, a conveying device 115, and a control section .

The inkjet printer 100 conveys a recording medium, such as paper P, which is an object to be ejected, along a predetermined conveyance path A1 from a medium supply unit 112 through an image formation unit 113 to a medium discharge unit 114, while feeding ink or the like. It is a liquid ejection device that performs an image forming process on a sheet of paper P by ejecting liquid.

The medium supply unit 112 includes a plurality of paper feed cassettes 112a. The medium ejection unit 114 includes a paper ejection tray 114a. The image forming section 113 includes a support section 117 that supports a sheet, and a plurality of head units 130 arranged above the support section 117 so as to face each other.

The support portion 117 includes a conveying belt 118 provided in a loop shape in a predetermined area for image formation, a support plate 119 supporting the conveying belt 118 from the back side, and a plurality of belt rollers 120 provided on the back side of the conveying belt 118 . , provided.

The head unit 130 includes a plurality of inkjet heads 1, a plurality of ink tanks 132 as liquid tanks mounted on each inkjet head 1, a connection flow path 133 connecting the inkjet heads 1 and the ink tanks 132, and a circulation pump 134 that is a circulation unit. The head unit 130 is a circulation type head unit that circulates liquid.

In the present embodiment, the ink jet heads 1C, 1M, 1Y, and 1K of four colors of cyan, magenta, yellow, and black are used as the ink jet head 1, and ink tanks 132C and 132M are used as the ink tanks 132 that respectively contain the inks of these colors. , 132Y, 132K. The ink tank 132 is connected to the inkjet head 1 by a connection channel 133 . The connection channel 133 includes a supply channel 133 a connected to the supply port of the inkjet head 1 and a recovery channel 133 b connected to the discharge port of the inkjet head 1 .

The ink tank 132 is also connected to a negative pressure control device such as a pump (not shown). By controlling the negative pressure inside the ink tank 132 by means of a negative pressure control device in accordance with the head value of the ink jet head 1 and the ink tank 132, the ink supplied to each nozzle of the ink jet head 1 is formed into a predetermined shape. A meniscus is formed.

The circulation pump 134 is, for example, a liquid feed pump configured by a piezoelectric pump. The circulation pump 134 is provided in the supply channel 133a. The circulation pump 134 is connected to the drive circuit of the controller 116 by wiring, and is configured to be controllable under the control of a CPU (Central Processing Unit) 116a. A circulation pump 134 circulates the liquid in a circulation channel including the inkjet head 1 and the ink tank 132 .

The transport device 115 transports the paper P along the transport path A1 from the paper feed cassette 112 a of the medium supply unit 112 to the paper discharge tray 114 a of the medium discharge unit 114 through the image forming unit 113 . The conveying device 115 includes a plurality of guide plate pairs 121a to 121h arranged along the conveying path A1 and a plurality of conveying rollers 122a to 122h.

The control unit 116 includes a CPU (Central Control Unit) 116a that is a controller, a ROM (Read Only Memory) that stores various programs, and a RAM (Random Access Memory) that temporarily stores various variable data and image data. Memory), and an interface unit for inputting data from the outside and outputting data to the outside.

When the inkjet head 1 and the inkjet printer 100 are driven to eject liquid from the nozzles 21, the control unit 116 applies a driving voltage via the plurality of individual wirings 17e by the driving circuit 52. FIG. When a potential difference is applied between the electrodes in the pressure chamber C1 driven by voltage application and the electrodes in the air chambers C2 on both sides, the first piezoelectric element 15a and the second piezoelectric element 15b are deformed in the opposite directions to each other. The deformation of the element bends and deforms the driving element. For example, as shown in FIG. 6, first, the pressure chamber C1 to be driven is deformed in the opening direction to create a negative pressure in the pressure chamber C1, thereby introducing the ink into the pressure chamber C1 through the notch 31. As shown in FIG. Subsequently, as shown in FIG. 7, the pressure chamber C1 is deformed in a closing direction to pressurize the inside of the pressure chamber C1, thereby ejecting an ink droplet from the nozzle 21. As shown in FIG.

The inkjet head 1 and the inkjet printer 100 according to this embodiment draw out the individual pattern 17b and the common pattern 17a on one side and the other side in the second direction from the pressure chambers C1 and the air chambers C2 that are alternately arranged. , simplifies wiring and implementation. That is, the individual pattern 17b and the common pattern 17a are led out to the opposite side, and the plurality of common patterns 17a led out to the other side are combined to reduce the number of terminals and widen the wiring pitch. Further, by extending the connection pattern 17c connected to the common pattern 17a to the same surface as the individual pattern 17b, a configuration with high mountability can be obtained. Further, the common wiring 17d formed in the pressure chamber C1 into which ink flows is grounded, and the individual wiring 17e to which a voltage is applied is formed in the closed air chamber C2, so that current flows through the conductive water-based ink. It is possible to prevent the ejection failure caused by the ink.

In addition, the third groove 14c can be formed in the same end face at the same time in the groove forming process of forming the first groove 14a and the second groove 14b, and connection can be made simultaneously with the process of forming the individual electrode 16b and the common electrode 16a. Since the electrode 16c can be formed and the connection pattern 17c can be formed simultaneously in the process of forming the common pattern 17a and the individual patterns 17b, manufacturing is easy.

It should be noted that the present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying constituent elements without departing from the scope of the present invention at the implementation stage.

In the above-described embodiment, an example in which the laminated piezoelectric body 13 having the row of grooves 14A is arranged on the edge portion of the substrate 12 is shown, but the present invention is not limited to this. Also, the number of nozzle rows is not limited to that in the above embodiment, and may be configured to have two or more rows.

For example, an inkjet head 201 according to another embodiment has a laminated piezoelectric body 213 formed on a substrate 212, as shown in FIG. The inkjet head 201 includes a base 210 , a nozzle plate 220 having a plurality of nozzles 221 and a frame member 240 .

The base 210 includes a substrate 212 and a laminated piezoelectric body 213 provided on the substrate 212 . The laminated piezoelectric body 213 has two groove rows 214A each having a first groove 214a and a second groove 214b, and has a plurality of piezoelectric element portions 215 arranged in the first direction.

The substrate 212 is a rectangular plate member having a supply port 218a through which ink flows into the common chamber C3 from the outside and a discharge port 218b through which ink is discharged from the common chamber C3 to the outside. A nozzle plate 220 is arranged to face the base 210 , and a frame member 240 is arranged between the base 210 and the nozzle plate 220 to form a common chamber C<b>3 within the inkjet head 201 .

The first groove 214a is open at both ends in the Y direction, which is the second direction, and forms a pressure chamber C1 communicating with the common chamber C3. The second groove 214b is closed at both ends in the Y direction to form an air chamber C2. A common electrode is formed on the inner wall of the first groove 214a, and an individual electrode is formed on the inner wall of the second groove 214b.

In this embodiment, a common wiring 217d having a common electrode and a common pattern 217a extends from the first groove 214a on the substrate 212 to the other side. An individual wiring 217e composed of an individual electrode and an individual pattern 217b extends from the second groove 214b on the substrate 212 to one side. Also, the connection wiring 217f having the connection pattern 217c is connected to the common wiring 217d on the other side of the groove row 214A and is led out to one side of the groove row 214A. That is, the common electrode is pulled out to the same side as the individual wiring 217e by the common pattern 217a and the connection pattern 217c. Other configurations are the same as those of the inkjet head 1 according to the first embodiment. For example, the inkjet head 201 is provided in the inkjet printer 100 shown in FIG. 5, the supply port 218a is connected to the supply channel 133a, and the discharge port 218b is connected to the recovery channel 133b.

In this embodiment, as in the first embodiment, by extending the individual electrodes on one side of the groove row 214A and the common electrode on the other side, the common patterns 217a can be grouped together to reduce the number of terminals. In addition, the wiring pitch can be widened. In addition, the mounting is facilitated by leading the common electrode to the same side as the individual electrodes through the end of the groove row 214A by means of the common pattern 217a and the connection wiring 217f. In addition, by disposing a grounded common electrode in the pressure chamber C1 into which the ink flows, and by forming an individual electrode to which a voltage is applied in the closed air chamber C2, problems caused by the current flowing through the ink can be avoided. can be prevented.

In the above embodiment, the so-called end shooter type inkjet head 1 is exemplified, but the present invention is not limited to this. For example, it may be applied to a side shooter type inkjet head 301 shown in FIG. 9 as another embodiment. The inkjet head 301 has a nozzle plate having nozzles 321 arranged at the end in the Y direction. Other configurations are the same as those of the inkjet head 1 according to the first embodiment. Also in this embodiment, the same effects as in the first embodiment can be obtained.

In the above-described embodiment, the configuration in which the connection wiring 17f is connected through the third grooves 14c formed two each at each end of the groove row 14A is illustrated, but the configuration is not limited to this. The third groove 14c may be formed only on one end side of the groove row 14A, or may be formed by one or three or more. For example, as another embodiment, an inkjet head 401 shown in FIG. 10 has only one third groove 14c at one end of the groove row 14A. For example, the dimensions such as the width of the connection wiring 17f are appropriately adjusted depending on the number and position of the grooves. The same effects as in the first embodiment can be obtained in this embodiment as well.
Further, the structure in which the wiring on the common side is led out to one side is not limited to the groove 14c, and may be a structure in which the wiring is led out through a through hole or a through via, for example. For example, an inkjet head 501 shown in FIG. 11 as another embodiment has a through hole 514c penetrating through the base 10 in the second direction. The inkjet head 501 has a connection electrode 16c formed in a through hole 514c and a connection wiring 17f extending from the other side to one side through the through hole 514c. is similar to The same effects as in the first embodiment can be obtained in this embodiment as well.

Further, in the above embodiment, the base 10 having the laminated piezoelectric member 13 made of a piezoelectric member on the substrate 12 is illustrated, but the present invention is not limited to this. For example, the base 10 may be formed only by a piezoelectric member without using a substrate. Also, instead of using two piezoelectric members, one piezoelectric member may be used.

Additionally, while several embodiments of the invention have been described, these embodiments have been presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and modifications can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the scope of the invention described in the claims and equivalents thereof. The invention described in the original claims of the present application is appended below.
(1)
a base having a plurality of first grooves arranged in a first direction and a plurality of second grooves arranged in the first direction and arranged between the plurality of first grooves;
an individual wiring having an individual electrode formed in the second groove and extending to one side in a second direction intersecting the first direction;
a common wiring having a common electrode formed in the first groove and extending to the other side in the second direction;
a connection wiring connected to the common wiring on the other side in the second direction and reaching the one side;
a nozzle plate having nozzles communicating with the first grooves of the base;
a liquid ejection head.
(2)
the plurality of first grooves and the plurality of second grooves are formed along the second direction on an end face on one end side of the base,
The individual wiring is formed from the end face to one main surface of the base in the second direction, the common wiring is formed from the end face to the other main surface of the base in the second direction, and the connection wiring is , from the common wiring through a third groove formed in the second direction at the end of the groove row having the first groove and the second groove on the end surface of the base, The liquid ejection head according to (1), which is formed up to the surface.
(3)
the first groove and the second groove are formed along the second direction on an end face on one end side of the base;
The individual wiring is formed from the end face to one main surface of the base in the second direction, the common wiring is formed from the end face to the other main surface of the base in the second direction, and the connection wiring is , the liquid ejection head according to (1), wherein the one main surface is formed from the common wiring through a through-hole penetrating through the base in the second direction.
(4)
a groove row having the first groove and the second groove is formed on the base;
the individual wiring extends laterally on one side of the groove row,
the common wiring extends laterally on the other side of the groove row,
The liquid ejection head according to (1), wherein the connection wiring extends from the other side of the groove row to the other side through the end of the groove row in the first direction.
(5)
a frame member having a frame piece facing the outer surface of the base and forming a common chamber between itself and the base;
a cover that covers an opening at the end of the second groove in the second direction;
with
the first groove constitutes a pressure chamber communicating with the nozzle and communicating with the common chamber;
the second groove defines an air chamber adjacent to the pressure chamber and separated from the common chamber by the cover;
The liquid ejection head according to any one of (1) to (4).
(6)
a liquid ejection head according to any one of (1) to (5);
a transport device that transports a medium along a predetermined transport path;
A liquid ejection device comprising:

REFERENCE SIGNS LIST 1 inkjet printer (liquid ejection device) 1 (1C, 1K, 1M, 1Y) inkjet head (liquid ejection head) 10 base 12 substrate 13 laminated piezoelectric body 14 groove 14A groove Column 14a First groove 14b Second groove 14c Third groove 15 Laminated piezoelectric element 16a Common electrode 16b Individual electrode 16c Connection electrode 17 Wiring pattern 17a Common pattern 17b Individual pattern 17c Connection pattern 17d Common wiring 17e Individual wiring 17f Connection wiring 20 Nozzle plate 21 Nozzle 30 Cover plate 31 Notch 32 Ink tank 40 Case member 40a Frame member 41 Frame piece 42 Frame piece 40b Lid member 51 Flexible substrate 52 Drive circuit 100 Inkjet printer 111 Housing 112 MEDIUM SUPPLY UNIT 112a Paper feed cassette 113 Image forming unit 114 Medium discharge unit 114a Discharge tray 115 Conveying device 116 Control unit 116a CPU 117 Supporting unit 118 Conveyance belt 119 support plate 120 belt roller 121a to 121h guide plate pair 122a to 122h conveying roller 130 head unit 132 (132K, 132Y, 132C, 132M ink tank 133 connecting flow Path 133a Supply channel 133b Recovery channel 134 Circulation pump 201 Ink jet head 210 Base 212 Substrate 213 Laminated piezoelectric body 214A Groove row 214a Groove 214b Groove , 215 Piezoelectric element portion 217a Common pattern 217b Individual pattern 217c Connection pattern 217d Common wiring 217e Individual wiring 217f Connection wiring 218a Supply port 218b Discharge port 220 Nozzle Plate 221 Nozzle 240 Frame member 301 Inkjet head 321 Nozzle 401 Inkjet head 501 Inkjet head 514c Through hole A1 Conveyance path C1 Pressure chamber C2 Air chamber C3...Common room.

Claims (3)

a base having a plurality of grooves aligned in a first direction;
a nozzle plate arranged to face the plurality of grooves of the base;
a frame member forming a common chamber between the base and
the plurality of grooves have a groove having an individual electrode and a groove having a common electrode;
an individual wiring extending from the individual electrode to one side in a second direction intersecting with the first direction;
a common wiring extending from the common electrode to the other side in the second direction;
a connection wiring connected to the common wiring on the other side in the second direction and extending to the one side;
The plurality of grooves extend in the second direction, the grooves arranged alternately among the plurality of grooves constitute an air chamber by being covered at both ends in the second direction, and the other grooves are common to the above. forming a pressure chamber communicating with the chamber ,
the base has a substrate and a piezoelectric body having a plurality of grooves arranged in a first direction;
the frame member is provided between the nozzle plate and the substrate;
liquid ejection head. 2. The liquid ejection head according to claim 1 , wherein a plurality of groove rows each having a plurality of grooves arranged in the first direction are provided. A liquid ejection head according to claim 1 or 2 ;
a transport device that transports a medium along a predetermined transport path;
A liquid ejection device comprising:

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