JP6825173B2 - Analytical element - Google Patents

Description

Embodiments of the present invention relate to analytical elements.

For example, there is an analytical element that analyzes an analysis target by measuring a current flowing through a liquid (sample solution) containing particles (molecules, etc.) to be analyzed. It is desired to improve the analysis accuracy of the analysis element.

Special Table 2017-515131

An embodiment of the present invention provides an analytical element capable of improving analytical accuracy.

According to an embodiment of the present invention, the analytical element includes a first member, a first film, first to third wall portions, and first to third electrodes. The direction from the first member to the first film is along the first direction. The first film contains the first to third pores. The first wall portion is provided between the first member and the first film in the first direction and extends in a second direction intersecting the first direction. The second wall portion is provided between the first member and the first film in the first direction and extends in the second direction. The third direction from the second wall portion to the first wall portion intersects the plane including the first direction and the second direction. The third wall portion is provided between the first member and the first film in the first direction, and is provided between the first wall portion and the second wall portion in the third direction. .. The third wall portion includes the first to seventh parts. The direction from the first portion to the fourth portion is along the second direction. The second portion is provided between the first portion and the fourth portion. The third portion is provided between the second portion and the fourth portion. The fifth portion is provided between the second portion and the first wall portion in the third direction, and between the third portion and the first wall portion in the third direction. The fifth portion is connected to the second portion and the third portion. The sixth portion is provided between the first portion and the second wall portion in the third direction, and between the second portion and the second wall portion in the third direction. The sixth portion is connected to the first portion and the second portion. The seventh portion is provided between the third portion and the second wall portion in the third direction, and between the fourth portion and the second wall portion in the third direction. The seventh portion is connected to the third portion and the fourth portion. The first to third electrodes are provided between the first member and the first film in the first direction. The first electrode is provided between the first portion and the second portion in the second direction, and is provided between the first wall portion and the sixth portion in the third direction. The second electrode is provided between the second portion and the third portion in the second direction, and is provided between the second wall portion and the fifth portion in the third direction. The third electrode is provided between the third portion and the fourth portion in the second direction, and is provided between the first wall portion and the seventh portion in the third direction.

1 (a) and 1 (b) are schematic plan views illustrating the analytical element according to the first embodiment. FIG. 2 is a schematic perspective view illustrating the analytical element according to the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating the analytical element according to the first embodiment. 4 (a) and 4 (b) are schematic plan views illustrating the analytical element according to the first embodiment. 5 (a) and 5 (b) are schematic plan views illustrating the analytical element according to the second embodiment. 6 (a) and 6 (b) are schematic plan views illustrating the analytical element according to the second embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between the parts, etc. are not always the same as the actual ones. Even if the same part is represented, the dimensions and ratios of the parts may be different depending on the drawing.
In the present specification and each figure, the same elements as those described above with respect to the above-mentioned figures are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate.

(First Embodiment)
1 (a) and 1 (b) are schematic plan views illustrating the analytical element according to the first embodiment.
FIG. 2 is a schematic perspective view illustrating the analytical element according to the first embodiment.
FIG. 3 is a schematic cross-sectional view illustrating the analytical element according to the first embodiment.
1 (a) and 1 (b) are plan views seen from the arrow AR of FIG. In FIGS. 1 (a) and 1 (b), some elements are omitted to make the figure easier to see. FIG. 3 is a sectional view taken along line A1-A2 of FIG.

As shown in FIG. 3, the analysis element 110 according to the embodiment includes a first member 51, a first film 21, a plurality of wall portions 10s, and a plurality of electrodes 30E.

As shown in FIGS. 2 and 3, for example, the first film 21 is provided on the first member 51. In this example, the first member 51 is provided with a groove 51T. The portion of the first member 51 excluding the groove portion 51T is the convex portion 51p. A frame portion 52 is provided on a part of the convex portion 51p. The first film 21 is provided between the convex portion 51p and the frame portion 52. The first film 21 has a plurality of holes 21h. The first film 21 is separated from the groove 51T (bottom) of the first member 51. A plurality of wall portions 10s are provided between the first member 51 and the first film 21. The plurality of wall portions 10s are in contact with, for example, the first member 51 and the first film 21.

A plurality of electrodes 30E are provided between the plurality of wall portions 10s. On the other hand, another electrode (detection electrode 30F) is provided. In this example, the detection electrode 30F is provided on the frame portion 52. The sample liquid 81 is introduced (for example, dropped) into the frame portion 52. The sample liquid 81 is introduced between the first film 21 and the first member 51 (groove 51T or recess) through the plurality of holes 21h. The plurality of electrodes 30E and the detection electrode 30F are electrically connected to the detection unit 70. At least a part of the circuit included in the detection unit 70 may be integrated with the analysis element 110. The sample liquid 81 has conductivity. Conductivity is based, for example, on dissolved ions.

The particles (for example, molecules or cells) contained in the sample solution 81 move toward the pores 21h. The transfer is based on diffusion or electrophoresis. Depending on the characteristics of the grains (eg size and shape), the grains pass through the holes 21h. An electrical signal corresponding to the passage of the grain holes 21h is detected by the detection unit 70. For example, at least one of the intensity and time width of the electrical signal (pulse) depends on the characteristics of the grain (eg, size, shape and charge, etc.). The analysis element 110 is, for example, a micro analysis chip.

As shown in FIG. 2, in this example, the frame portion 53 and the frame portion 54 are provided above the groove portion 51T. The above-mentioned frame portion 52 is provided between the frame portion 53 and the frame portion 54. As described above, the sample solution 81 is introduced into the frame portion 52. On the other hand, for example, the electrolytic solution 82 is introduced into the frame portion 53. The frame portion 54 functions as, for example, an inlet or an outlet drain.

For example, the direction from the first member 51 to the first film 21 is along the first direction (see FIG. 3).

The first direction is the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

Hereinafter, an example of arranging the plurality of wall portions 10s, the plurality of electrodes 30E, and the plurality of holes 21h of the first film 21 will be described.
In FIG. 1A, the first film 21 is omitted. FIG. 1B shows an example of the position of the hole 21h of the first film 21. 1 (a) and 1 (b) exemplify a portion corresponding to a plurality of electrodes 30E in a 3 × 3 matrix.

As shown in FIG. 1A, the plurality of wall portions 10s include the first to third wall portions 11 to 13. In this example, a fourth wall portion 14, a fifth wall portion 15, and the like are further provided. The number of the plurality of wall portions 10s is arbitrary. As described above, the plurality of wall portions 10s (first to fifth wall portions 11 to 15, etc.) are provided between the first member 51 and the first film 21 in the first direction (Z-axis direction). Be done.

As shown in FIG. 1A, the first wall portion 11 extends in the second direction, for example. The second direction intersects the first direction (Z-axis direction). The second direction is, for example, the X-axis direction.

The second wall portion 12 also extends in the second direction (for example, the X-axis direction). The third direction from the second wall portion 12 to the first wall portion 11 intersects a plane (ZX plane) including the first direction (Z-axis direction) and the second direction (for example, the X-axis direction). The third direction is, for example, the Y-axis direction.

The third wall portion 13 is provided between the first wall portion 11 and the second wall portion 12 in the third direction (Y-axis direction). The third wall portion 13 includes the first to seventh portions p01 to p07.

The direction from the first portion p01 to the fourth portion p04 is along the second direction (for example, the X-axis direction). The second portion p02 is provided between the first portion p01 and the fourth portion p04 in the second direction. The third portion p03 is provided between the second portion p02 and the fourth portion p04 in the second direction.

The fifth portion p05 is located between the second portion p02 and the first wall portion 11 in the third direction (for example, the Y-axis direction), and with the third portion p03 and the first wall portion 11 in the third direction. It is provided between. The fifth portion p05 is connected to the second portion p02 and the third portion p03.

The sixth portion p06 is between the first portion p01 and the second wall portion 12 in the third direction (for example, the Y-axis direction), and the second portion p02 and the second wall portion 12 in the third direction. It is provided between. The sixth portion p06 is connected to the first portion p01 and the second portion p02.

The seventh portion p07 is between the third portion p03 and the second wall portion 12 in the third direction (for example, the Y-axis direction), and the fourth portion p04 and the second wall portion 12 in the third direction. It is provided between. The seventh portion p07 is connected to the third portion p03 and the fourth portion p04.

For example, the first to fourth portions p01 to p04 are portions extending in the Y-axis direction. The fifth to seventh portions p05 to p07 are portions extending in the X-axis direction.

The plurality of electrodes 30E include, for example, first to third electrodes 31 to 33. The plurality of electrodes 30E may further include, for example, the fourth to sixth electrodes 34 to 36. The number of plurality of electrodes 30E is arbitrary.

As described above, the plurality of electrodes 30E (first to sixth electrodes 31 to 36, etc.) are provided between the first member 51 and the first film 21 in the first direction (Z-axis direction) (the first member 51 and the first film 21). (See FIG. 3).

The first electrode 31 is provided between the first portion p01 and the second portion p02 in the second direction (for example, the X-axis direction). The first electrode 31 is provided between the first wall portion 11 and the sixth portion p06 in the third direction (for example, the Y-axis direction).

The second electrode 32 is provided between the second portion p02 and the third portion p03 in the second direction. The second electrode 32 is provided between the second wall portion 12 and the fifth portion p05 in the third direction.

The third electrode 33 is provided between the third portion p03 and the fourth portion p04 in the second direction. The third electrode 33 is provided between the first wall portion 11 and the seventh portion p07 in the third direction.

As described above, the first film 21 has a plurality of holes 21h. As shown in FIG. 3, the plurality of holes 21h include, for example, first to third holes 21a to 21c. The plurality of holes 21h may further include, for example, the fourth to sixth holes 21d to 21f. The number of the plurality of holes 21h is arbitrary. A plurality of first holes 21a may be provided. A plurality of second holes 21b may be provided. A plurality of third holes 21c may be provided. A plurality of fourth holes 21d may be provided. A plurality of fifth holes 21e may be provided. A plurality of sixth holes 21f may be provided.

For example, the position of the first hole 21a in the second direction is provided between the position of the first portion p01 in the second direction and the position of the second portion p02 in the second direction. The position of the first hole 21a in the third direction is provided between the position of the first wall portion 11 in the third direction and the position of the sixth portion p06 in the third direction.

For example, the position of the second hole 21b in the second direction is provided between the position of the second portion p02 in the second direction and the position of the third portion p03 in the second direction. The position of the second hole 21b in the third direction is provided between the position of the second wall portion 12 in the third direction and the position of the fifth portion p05 in the third direction.

For example, the position of the third hole 21c in the second direction is provided between the position of the third portion p03 in the second direction and the position of the fourth portion p04 in the second direction. The position of the third hole 21c in the third direction is provided between the position of the first wall portion 11 in the third direction and the position of the seventh portion p07 in the third direction.

For example, as shown in FIG. 3, the first hole 21a overlaps with the first electrode 31 in the first direction (Z-axis direction). The second hole 21b overlaps with the second electrode 32 in the first direction. The third hole 21c overlaps with the third electrode 33 in the first direction.

According to the analysis element 110 according to the embodiment, the analysis accuracy can be improved. For example, as described below, crosstalk between a plurality of electrodes 30E can be suppressed.

For example, in the analysis element 110, the first space sp1 is formed by the first member 51, the first film 21, the first wall portion 11, and the fifth portion p05. The second space sp2 is formed by the first member 51, the first film 21, the first portion p01, the second portion p02, and the sixth portion p06. A third space sp3 is formed by the first member 51, the first film 21, the third portion p03, the fourth portion p04, and the seventh portion p07. The first space sp1 is connected to the second space sp2. The first space sp1 is connected to the third space sp3.

On the other hand, the fourth space sp4 is formed by the first member 51, the first film 21, the second wall portion 12, the sixth portion p06, and the seventh portion p07. The fifth space sp5 is formed by the first member 51, the first film 21, the second portion p02, the third portion p03, and the fifth portion p05. The fourth space sp4 is connected to the fifth space sp5.

For example, the first space sp1 forms the first path 18a. The first path 18a is connected to the second space sp2 and is connected to the third space sp3. The first electrode 31 is provided in the second space sp2. A third electrode 33 is provided in the third space sp3. On the other hand, the second path 18b is formed by the fourth space sp4. The second path 18b is connected to the fifth space sp5. A third electrode 33 is provided in the fifth space sp5. The first path 18a is separated from the second path 18b. Therefore, crosstalk between the first electrode 31 and the second electrode 32 is suppressed. Crosstalk between the third electrode 31 and the third electrode 33 is suppressed. Further, although the second space sp2 and the third space sp3 are connected by the first path 18a, the distance along the path between the second space sp2 and the third space sp3 is long. In this example, a fifth space sp5 is provided between the second space sp2 and the third space sp3. Therefore, crosstalk between the first electrode 31 in the second space sp2 and the third electrode 31 in the third space sp3 can also be suppressed.

Thus, in the embodiment, the crosstalk between the plurality of electrodes 30E is suppressed. For example, the analysis accuracy can be improved.

As shown in FIG. 1A, in this example, a part pp05 of the fifth part p05 is located between the sixth part p06 and the first wall portion 11 in the third direction (for example, the Y-axis direction). It is provided. For example, the above partial pp05 is a protruding portion. At least a part of the first electrode 31 is provided between the above-mentioned part pp05 of the fifth part p05 and the sixth part p06 in the third direction. As a result, the opening 31o of the second space sp2 can be made smaller. As a result, crosstalk can be further suppressed.

As shown in FIG. 1A, in this example, a part pp06 of the sixth part p06 is located between the fifth part p05 and the second wall portion 12 in the third direction (for example, the Y-axis direction). Provided. The above-mentioned partial pp06 is a protruding portion of the sixth portion p06. At least a part of the second electrode 32 is provided between the above-mentioned part pp06 of the sixth part p06 and the fifth part p05 in the third direction. As a result, the opening 32o of the fifth space sp5 can be made smaller. For example, a configuration in which four or more electrodes are arranged along the X-axis direction can be considered. Even in such a configuration, crosstalk can be further suppressed.

As shown in FIG. 1 (a), in this example, a part pp07 of the seventh portion p07 is located between the fifth portion p05 and the second wall portion 12 in the third direction (for example, the Y-axis direction). Provided. The above-mentioned partial pp07 is a protruding portion of the seventh portion p07. At least a part of the second electrode 32 is provided between the above-mentioned part pp07 of the seventh part p07 and the fifth part p05 in the third direction. As a result, the opening 33o of the third space sp3 can be made smaller. As a result, crosstalk can be further suppressed.

As shown in FIG. 1 (a), in this example, another part pq05 of the fifth portion p05 is a third portion (for example, the Y-axis direction) of the seventh portion p07 and the first wall portion 11. It is provided between them. The above partial pq05 is another part of the fifth portion p05. At least a part of the third electrode 33 is provided between the above-mentioned other part pq05 of the fifth portion p05 and the seventh portion p05 in the third direction. The opening 31o of the second space sp2 can be made smaller. As a result, crosstalk can be further suppressed.

As shown in FIG. 1 (a), the fifth portion p05 includes a first end portion pe01 and a second end portion pe02. The direction from the first end portion pe01 to the second end portion pe02 is along the second direction (for example, the X-axis direction). The first end portion p01 is separated from the first portion p01. The second end portion p02 is separated from the fourth portion p04. The opening 31o is formed by the first end portion p01. The opening 33o is formed by the second end portion p02. The opening 31o serves as a path for the second space sp2 (first electrode 31). The opening 33o serves as a path for the third space sp3 (third electrode 33).

As shown in FIG. 1 (a), in this example, the third wall portion 13 further includes an eighth portion p08. The eighth portion p08 is provided between the sixth portion p06 and the first wall portion 11 in the third direction (for example, the Y-axis direction). The eighth portion p08 extends, for example, in the X-axis direction. A part of the first electrode 31 is provided between the eighth portion p08 and the sixth portion p06 in the third direction (Y-axis direction). The eighth portion p08 is separated from, for example, the first end portion p01. The opening 31o is between the eighth portion p08 and the first end portion p01.

As shown in FIG. 1 (a), in this example, the sixth portion p06 includes the third end portion p03. A part of the second electrode 32 is provided between the third end portion p03 and the fifth portion p05 in the third direction (for example, the Y-axis direction). For example, the distance along the X-axis direction between the third end portion p03 and the third portion p03 is shorter than the distance along the X-axis direction between the second portion p02 and the third portion p03. For example, the opening 32o can be made smaller.

As shown in FIG. 1 (a), in this example, the seventh portion p07 includes the fourth end portion pe04. A part of the second electrode 32 is provided between the fourth end portion p04 and the fifth portion p05 in the third direction (for example, the Y-axis direction). For example, the distance along the X-axis direction between the fourth end portion p04 and the second portion p02 is shorter than the distance along the X-axis direction between the second portion p02 and the third portion p03. For example, the opening 32o can be made smaller.

In the embodiment, the distance (opening distance) in the path between the opening 31o and the opening 33o is longer than the pitch (pitch in the X-axis direction) of the first to third electrodes 31 to 33. For example, the opening distance is 1.5 times or more the pitch. The opening distance may be 1.8 times or more the pitch.

As shown in FIG. 1A, the analysis element 110 is further provided with the fourth to sixth electrodes 34 to 36, the fourth wall portion 14, and the fifth wall portion 15. An example of these arrangements will be described below. The fourth and fifth wall portions 14 and 15 (plurality of wall portions 10s) are also provided between the first member 51 and the first film 21 in the first direction (Z-axis direction) (see FIG. 3).

As shown in FIG. 1A, the fourth wall portion 14 extends in the second direction (for example, the X-axis direction). In the third direction (for example, the Y-axis direction), the second wall portion 12 is provided between the third wall portion 13 and the fourth wall portion 14.

The fifth wall portion 15 is provided between the second wall portion 12 and the fourth wall portion 14 in the third direction (for example, the Y-axis direction). The fifth wall portion 15 includes the ninth to fifteenth portions p09 to p15.

The direction from the ninth portion p09 to the twelfth portion p12 is along the second direction (for example, the X-axis direction). The tenth portion p10 is provided between the ninth portion p09 and the twelfth portion p12 in the second direction. The eleventh portion p11 is provided between the tenth portion p10 and the twelfth portion p12 in the second direction.

The thirteenth portion p13 is between the tenth portion p10 and the second wall portion 12 in the third direction (for example, the Y-axis direction), and the eleventh portion p11 and the second wall portion 12 in the third direction. It is provided between. The thirteenth portion p13 is connected to the tenth portion p10 and the eleventh portion p11.

The 14th portion p14 is between the 9th portion p09 and the 4th wall portion 14 in the 3rd direction (for example, the Y-axis direction), and the 10th portion p10 and the 4th wall portion 14 in the 3rd direction. It is provided between. The 14th portion p14 is connected to the 9th portion p09 and the 10th portion p10.

The fifteenth portion p15 is between the eleventh portion p11 and the fourth wall portion 14 in the third direction (for example, the Y-axis direction), and the twelfth portion p12 and the fourth wall portion 14 in the third direction. It is provided between. The fifteenth portion p15 is connected to the eleventh portion p11 and the twelfth portion p12.

As described above, the fourth to fifth electrodes 34 to 36 (plurality of electrodes 30E) are provided between the first member 51 and the first film 21 in the first direction (Z-axis direction) (FIG. 3).

As shown in FIG. 1A, the fourth electrode 34 is provided between the ninth portion p09 and the tenth portion p10 in the second direction (for example, the X-axis direction). The fourth electrode 34 is provided between the second wall portion 12 and the 14th portion p14 in the third direction (for example, the Y-axis direction).

The fifth electrode 35 is provided between the tenth portion p10 and the eleventh portion p11 in the second direction (for example, the X-axis direction). The fifth electrode 35 is provided between the fourth wall portion 14 and the thirteenth portion p13 in the third direction (for example, the Y-axis direction).

The sixth electrode 36 is provided between the eleventh portion p11 and the twelfth portion p12 in the second direction (for example, the X-axis direction). The sixth electrode 36 is provided between the second wall portion 12 and the fifteenth portion p15 in the third direction (for example, the Y-axis direction).

As described above, the first film 21 further includes the fourth to sixth holes 21d to 21f. As shown in FIG. 1B, the fourth hole 21d overlaps with the fourth electrode 34 in the first direction (Z-axis direction). The fifth hole 21e overlaps with the fifth electrode 35 in the first direction. The sixth hole 21f overlaps with the sixth electrode 36 in the first direction.

The third path 18c is formed by the first member 51, the first film 21, the second wall portion 12, and the thirteenth portion p13. The third path 18c is connected to the space where the fourth electrode 34 is provided through the opening 34o. The third path 18c is connected to the space where the sixth electrode 36 is provided through the opening 36o.

On the other hand, the fourth path 18d is formed by the first member 51, the first film 21, the fourth wall portion 14, the 14th portion p14, and the 15th portion p15. The fourth path 18d is connected to the space where the fifth electrode 35 is provided through the opening 36o.

The third path 18c and the fourth path 18d are separated. Further, the distance along the path between the opening 34o and the opening 36o is long. Crosstalk is also suppressed at the 4th to 6th electrodes 34 to 36.

Hereinafter, another example of the analytical element according to the present embodiment will be described.
4 (a) and 4 (b) are schematic plan views illustrating the analytical element according to the first embodiment.
FIG. 4 (a) and FIG. 4 (b) correspond to the plan view seen from the arrow AR of FIG. In FIGS. 4 (a) and 4 (b), some elements are omitted.

The analytical elements 111 exemplified in these figures also include a first member 51, a first film 21, a plurality of wall portions 10s (for example, first to fifth wall portions 11 to 15 and the like), and a plurality of electrodes 30E (for example, for example. The first to sixth electrodes 31 to 36 and the like) are included. The configurations of the first to third wall portions 11 to 13 and the first to third electrodes 31 to 33 in the analysis element 111 are the same as those of the analysis element 110, for example. Hereinafter, examples of the fourth and fifth wall portions 14 and 15 and the fourth to sixth electrodes 34 to 36 in the analysis element 111 will be described.

As shown in FIG. 4A, the fourth wall portion 14 extends in the second direction (for example, the X-axis direction). In the third direction (for example, the Y-axis direction), the second wall portion 12 is provided between the third wall portion 13 and the fourth wall portion 14.

The fifth wall portion 15 is provided between the second wall portion 12 and the fourth wall portion 14 in the third direction (for example, the Y-axis direction). The fifth wall portion 15 includes the ninth to fifteenth portions p09 to p15.

The direction from the ninth portion p09 to the twelfth portion p12 is along the second direction (for example, the X-axis direction). The tenth portion p10 is provided between the ninth portion p09 and the twelfth portion p12 in the second direction. The eleventh portion p11 is provided between the tenth portion p10 and the twelfth portion p12 in the second direction.

The thirteenth portion p13 is between the tenth portion p10 and the fourth wall portion 14 in the third direction (for example, the Y-axis direction), and the eleventh portion p11 and the fourth wall portion 14 in the third direction. It is provided between. The thirteenth portion p13 is connected to the tenth portion p10 and the eleventh portion p11.

The 14th portion p14 is between the 9th portion p09 and the 2nd wall portion 12 in the 3rd direction (for example, the Y-axis direction), and the 10th portion p10 and the 2nd wall portion 12 in the 3rd direction. It is provided between. The 14th portion p14 is connected to the 9th portion p09 and the 10th portion p10.

The fifteenth portion p15 is between the eleventh portion p11 and the second wall portion 12 in the third direction (for example, the Y-axis direction), and the twelfth portion p12 and the second wall portion 12 in the third direction. It is provided between. The fifteenth portion p15 is connected to the eleventh portion p11 and the twelfth portion p12.

The fourth to sixth electrodes 34 to 36 (plurality of electrodes 30E) are provided between the first member 51 and the first film 21 in the first direction (Z-axis direction) . As shown in FIG. 4A , the fourth electrode 34 is provided between the ninth portion p09 and the tenth portion p10 in the second direction (for example, the X-axis direction). The fourth electrode 34, in the third direction (e.g. Y-axis direction), is provided between the fourth wall portion 1 4 and the 14 portion p14.

The fifth electrode 35 is provided between the tenth portion p10 and the eleventh portion p11 in the second direction (for example, the X-axis direction). The fifth electrode 35, in the third direction (e.g. Y-axis direction), is provided between the second wall portion 1 2 and the second 13 portion p13.

The sixth electrode 36 is provided between the eleventh portion p11 and the twelfth portion p12 in the second direction (for example, the X-axis direction). Sixth electrode 36, in the third direction (e.g. Y-axis direction), is provided between the fourth wall portion 1 4 and the 15 portion p15.

As shown in FIG. 4B, the fourth hole 21d overlaps with the fourth electrode 34 in the first direction (Z-axis direction). The fifth hole 21e overlaps with the fifth electrode 35 in the first direction. The sixth hole 21f overlaps with the sixth electrode 36 in the first direction.

In the analysis element 111, the third path 18c is formed by the first member 51, the first film 21, the second wall portion 12, the 14th portion p14, and the 15th portion p15. The third path 18c is connected to the space where the fifth electrode 35 is provided through the opening 35o.

On the other hand, the fourth path 18d is formed by the first member 51, the first film 21, the fourth wall portion 14, and the thirteenth portion p13. The fourth path 18d is connected to the space where the fourth electrode 34 is provided through the opening 34o. The fourth path 18d is connected to the space where the sixth electrode 36 is provided through the opening 36o.

The third path 18c and the fourth path 18d are separated. Further, the distance along the path between the opening 34o and the opening 36o is long. Crosstalk is also suppressed at the 4th to 6th electrodes 34 to 36.

In the analysis elements 110 and 111, for example, the position of the first hole 21a in the second direction may be between the position of the first portion p01 in the second direction and the position of the second portion p02 in the second direction. The position of the second hole 21b in the second direction may be between the position of the second portion p02 in the second direction and the position of the third portion p03 in the second direction. The position of the third hole 21c in the second direction may be between the position of the third portion p03 in the second direction and the position of the fourth portion p04 in the second direction.

In the analysis elements 110 and 111, for example, the position of the first hole 21a in the third direction may be between the position of the first wall portion 11 in the third direction and the position of the sixth portion p06 in the third direction. .. The position of the second hole 21b in the third direction may be between the position of the fifth portion p05 in the third direction and the position of the second wall portion 12 in the third direction. The position of the third hole 21c in the third direction may be between the position of the first wall portion 11 in the third direction and the position of the seventh portion p07 in the third direction.

In the analysis elements 110 and 111, for example, the position of the fourth hole 21d in the second direction may be between the position of the ninth portion p09 in the second direction and the position of the tenth portion p10 in the second direction. The position of the fifth hole 21e in the second direction may be between the position of the tenth portion p10 in the second direction and the position of the eleventh portion p11 in the second direction. The position of the sixth hole 21f in the second direction may be between the position of the eleventh portion p11 in the second direction and the position of the twelfth portion p12 in the second direction.

In the analysis elements 110 and 111, for example, the position of the fourth hole 21d in the third direction may be between the position of the second wall portion 12 in the third direction and the position of the 14th portion p14 in the third direction. .. The position of the fifth hole 21e in the third direction may be between the position of the thirteenth portion p13 in the third direction and the position of the fourth wall portion 14 in the third direction. The position of the sixth hole 21f in the third direction may be between the position of the second wall portion 12 in the third direction and the position of the fifteenth portion p15 in the third direction.

(Second Embodiment)
Hereinafter, the description of the same configuration as that of the first embodiment will be omitted as appropriate.
5 (a) and 5 (b) are schematic plan views illustrating the analytical element according to the second embodiment.
5 (a) and 5 (b) correspond to the plan view seen from the arrow AR of FIG. In FIGS. 5 (a) and 5 (b), some elements are omitted.

The analytical elements 120 exemplified in these figures also include a first member 51, a first film 21, a plurality of wall portions 10s (for example, first to fifth wall portions 11 to 15 and the like), and a plurality of electrodes 30E (for example, for example. The first to sixth electrodes 31 to 36 and the like) are included. The configuration of the plurality of wall portions 10s in the analysis element 120 is different from the configuration in the first embodiment.

Also in the analysis element 120, the first wall portion 11 and the second wall portion 12 (plurality of wall portions 10s) are provided between the first member 51 and the first film 21 in the first direction (Z-axis direction). (See Fig. 3). For example, the first wall portion 11 and the second wall portion 12 (plurality of wall portions 10s) are in contact with the first member 51 and the first film 21. The first to sixth electrodes 31 to 36 (plurality of electrodes 30E) are provided between the first member 51 and the first film 21 in the first direction (Z-axis direction) (see FIG. 3).

As shown in FIG. 5A, the first wall portion 11 includes the first to fifth portions p01 to p05. The fifth portion p05 is along a second direction (eg, the X-axis direction) that intersects the first direction.

The direction from the first portion p01 to the fourth portion p04 is along the second direction. The second portion p02 is provided between the first portion p01 and the fourth portion p04 in the second direction. The third portion p03 is provided between the second portion p02 and the fourth portion p04 in the second direction. The first to fourth portions p11 to p14 are connected to the fifth portion p05, respectively.

The second wall portion 12 includes the sixth to tenth portions p06 to p10. The tenth portion p10 is along the second direction (for example, the X-axis direction). In the third direction, the first to fourth portions p01 to p04 and the fifth to ninth portions p05 to p09 are provided between the fifth portion p05 and the tenth portion p10. The third direction intersects a plane (eg, a ZX plane) that includes the first and second directions. The third direction is, for example, the Y-axis direction.

The direction from the sixth portion p06 to the ninth portion p09 is along the second direction (for example, the X-axis direction). The seventh portion p07 is provided between the sixth portion p06 and the ninth portion p09 in the second direction. The eighth portion p08 is provided between the seventh portion p07 and the ninth portion p09. In the second direction, a sixth portion p06 and a seventh portion p07 are provided between the first portion p01 and the second portion p02. In the second direction, an eighth portion p08 and a ninth portion p09 are provided between the third portion p03 and the fourth portion p04. The sixth to ninth portions p06 to p09 are connected to the tenth portion p10.

The first electrode 31 is provided between the sixth portion p06 and the seventh portion p07 in the second direction (for example, the X-axis direction). The first electrode 31 is provided between the tenth portion p10 and the fifth portion p05 in the third direction (for example, the Y-axis direction).

The second electrode 32 is provided between the second portion p02 and the third portion p03 in the second direction (for example, the X-axis direction). The second electrode 32 is provided between the tenth portion p10 and the fifth portion p05 in the third direction (for example, the Y-axis direction).

The third electrode 33 is provided between the eighth portion p08 and the ninth portion p08 in the second direction (for example, the X-axis direction). The third electrode 33 is provided between the tenth portion p10 and the fifth portion p05 in the third direction (for example, the Y-axis direction).

For example, the position of the first hole 21a in the second direction is provided between the position of the sixth portion p06 in the second direction and the position of the seventh portion p07 in the second direction. The position of the first hole 12a in the third direction is provided between the position of the tenth portion p10 in the third direction and the position of the fifth portion p05 in the third direction.

For example, the position of the second hole 21b in the second direction is provided between the position of the second portion p02 in the second direction and the position of the third portion p03 in the second direction. The position of the second hole 21b in the third direction is provided between the position of the tenth portion p10 in the third direction and the position of the fifth portion p05 in the third direction.

For example, the position of the third hole 21c in the second direction is provided between the position of the eighth portion p08 in the second direction and the position of the ninth portion p09 in the second direction. The position of the third hole 21c in the third direction is provided between the position of the tenth portion p10 in the third direction and the position of the fifth portion p05 in the third direction.

As shown in FIG. 5B, the first hole 21a overlaps with the first electrode 31 in the first direction. In the first direction, the second hole 21b overlaps the second electrode 32. In the first direction, the third hole 21c overlaps the third electrode 33.

In the analysis element 120, the first path 18a is formed by the first member 51, the first film 21, the first wall portion 11, and the second wall portion 12. The first path 18a and the space where the first electrode 31 is provided are connected by the opening 31o. The first path 18a and the space where the second electrode 32 is provided are connected by the opening 32o. The first path 18a and the space where the third electrode 33 is provided are connected by the opening 33o. The opening 31o is located between the first electrode 31 and the fifth portion p05. The opening 32o is located between the second electrode 32 and the tenth portion p10. The opening 33o is located between the third electrode 33 and the fifth portion p05.

The distance between the opening 31o and the opening 32o along the first path 18a is long. The distance between the opening 32o and the opening 33o along the first path 18a is long.

In the present embodiment, the distance (opening distance) in the path between the opening 31o and the opening 32o is longer than the pitch (pitch in the X-axis direction) of the first to third electrodes 31 to 33. For example, the opening distance is 1.5 times or more the pitch.

As a result, crosstalk between the plurality of electrodes 30E can be suppressed. For example, an analytical element capable of improving analysis accuracy can be provided.

As shown in FIG. 5A, the first wall portion 11 may include the eleventh portion p11. The eleventh portion p11 is provided between the tenth portion p10 and the fifth portion p05 in the third direction (for example, the Y-axis direction). The eleventh portion p11 is connected to the second portion p02 or the third portion p03. In this example, the eleventh portion p11 is connected to the second portion p02. In this example, the first wall portion 11 includes the 14th portion p14. The 14th portion p14 is provided between the 10th portion p10 and the 5th portion p05 in the third direction. The 14th portion p14 is connected to the 3rd portion p03. The 14th part p14 may be regarded as the 11th part p11.

At least a part of the second electrode 32 is provided between the eleventh portion p11 and the fifth portion p05 in the third direction (for example, the Y-axis direction). At least a part of the second electrode 32 may be provided between the 14th portion p14 and the 5th portion p05 in the third direction.

As shown in FIG. 5A, the second wall portion 12 may include a twelfth portion p12. The twelfth portion p12 is provided between the tenth portion p10 and the fifth portion p05 in the third direction (for example, the Y-axis direction). The twelfth part p12 is connected to the sixth part p06 or the seventh part p07. In this example, the twelfth portion p12 is connected to the seventh portion p07. In this example, the second wall portion 12 includes a fifteenth portion p15. The fifteenth portion p15 is provided between the tenth portion p10 and the fifth portion p05 in the third direction. The fifteenth portion p15 is connected to the sixth portion p06. The fifteenth portion p15 may be regarded as the twelfth portion p12.

At least a part of the first electrode 31 is provided between the twelfth portion p12 and the tenth portion p10 in the third direction (for example, the Y-axis direction). At least a part of the second electrode 32 may be provided between the 15th portion p15 and the 10th portion p10 in the third direction.

As shown in FIG. 5A, the second wall portion 12 may include the thirteenth portion p13. The thirteenth portion p13 is provided between the tenth portion p10 and the fifth portion p05 in the third direction (for example, the Y-axis direction). The thirteenth portion p13 is connected to the eighth portion p08 or the ninth portion p09. In this example, the thirteenth portion p13 is connected to the eighth portion p08. In this example, the second wall portion 12 includes the 16th portion p16. The 16th portion p16 is provided between the 10th portion p10 and the 5th portion p05 in the third direction. The 16th portion p16 is connected to the 9th portion p09. The 16th part p16 may be regarded as the 13th part p13.

At least a part of the third electrode 33 is provided between the thirteenth portion p13 and the tenth portion p10 in the third direction (for example, the Y-axis direction). At least a part of the third electrode 33 may be provided between the 16th portion p16 and the 10th portion p10 in the third direction.

As shown in FIGS. 5 (a) and 5 (b), in the analysis element 120, the first wall portion 11, the second wall portion 12, and the first to third electrodes 31 to 33 form one set. .. A plurality of sets may be arranged in the Y-axis direction.

6 (a) and 6 (b) are schematic plan views illustrating the analytical element according to the second embodiment.
6 (a) and 6 (b) correspond to the plan view seen from the arrow AR of FIG. In FIGS. 5 (a) and 5 (b), some elements are omitted.

The analytical elements 121 exemplified in these figures also include a first member 51, a first film 21, a plurality of wall portions 10s (for example, first to fifth wall portions 11 to 15 and the like), and a plurality of electrodes 30E (for example,). The first to sixth electrodes 31 to 36 and the like) are included.

Also in the analysis element 121, the first wall portion 11, the second wall portion 12, and the first to third electrodes 31 to 33 form a set. A plurality of sets may be arranged in the Y-axis direction. In the analysis element 121, a plurality of sets arranged in the Y-axis direction are alternately inverted (mirror inversion). The analysis element 121 can also provide an analysis element capable of improving analysis accuracy.

An example of the elements included in the analytical element according to the above embodiment will be described. The first member 51 includes, for example, silicon oxide provided on a silicon substrate. The first film 21 includes, for example, at least one selected from the group consisting of silicon oxide, silicon nitride and silicon oxynitride. The plurality of electrodes 30E include, for example, at least one selected from the group consisting of Au, Pt, Cu, Ag, Cl, Cu, W and Mo. The plurality of electrodes 30E may include a film containing an Ag film and an AgCl film (for example, a laminated film). The plurality of wall portions 10s include, for example, at least one selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride. The plurality of wall portions 10s may include a first region and a second region (thin film). The first region comprises at least one selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride. The second region is provided around at least a part of the first region. The second region contains, for example, at least one of aluminum oxide and titanium oxide (titanium dioxide). For example, surface hydrophilicity is improved. For example, the surface charge is controlled.

The length (height) of the plurality of wall portions 10s along one Z-axis direction is, for example, 0.5 μm or more and 100 μm or less. One width (length in the direction orthogonal to the extending direction) of the plurality of wall portions 10s is, for example, 1 μm or more and 5 μm or less. One width of the plurality of wall portions 10s (the length in the direction orthogonal to the extending direction) is, for example, 0 of the interval between one of the plurality of wall portions 10s and another one of the plurality of wall portions 10s. It is .005 times or more and 0.5 times or less. As a result, an appropriate strength of the plurality of wall portions 10s, an appropriate path size (cross-sectional area), and an appropriate electrical resistance in the path can be obtained.

For example, in the first embodiment, the width of the first wall portion 11 along the third direction (Y-axis direction) is the distance (interval) along the third direction between the first wall portion 11 and the fifth portion p05. It is 0.005 times or more and 0.1 times or less of. For example, in the second embodiment, the width of the first portion p01 along the second direction (Y-axis direction) is 0.005 times the distance along the second direction between the first portion p01 and the sixth portion p06. It is 0.5 times or more and 0.5 times or less.

The diameter of one of the plurality of holes 21h of the first film 21 is, for example, 0.1 μm or more and 10 μm or less.

The granules contained in the sample solution 81 include, for example, at least one selected from the group consisting of bacteria, viruses, cells and inorganic polymer compounds.

The embodiment may include the following configuration (technical proposal).
(Structure 1)
With the first member
The first film including the first to third pores, and the direction from the first member to the first film is along the first direction with the first film.
A first wall portion provided between the first member and the first film in the first direction and extending in the second direction intersecting the first direction, and
A second wall portion provided between the first member and the first film in the first direction and extending in the second direction, and a third direction from the second wall portion to the first wall portion. With the second wall portion intersecting the plane including the first direction and the second direction.
A third wall portion provided between the first member and the first film in the first direction and between the first wall portion and the second wall portion in the third direction. The third wall portion includes the first to seventh portions, the direction from the first portion to the fourth portion is along the second direction, and the second portion is the same as the first portion. The third portion is provided between the fourth portion and the third portion, and the fifth portion is provided between the second portion and the fourth portion in the third direction. It is provided between the first wall portion and between the third portion and the first wall portion in the third direction, and the fifth portion is connected to the second portion and the third portion. The sixth portion is provided between the first portion and the second wall portion in the third direction, and between the second portion and the second wall portion in the third direction. The sixth part is connected to the first part and the second part, and the seventh part is between the third part and the second wall part in the third direction and in the third direction. The third wall portion is provided between the fourth portion and the second wall portion, and the seventh portion is connected to the third portion and the fourth wall portion.
The first to third electrodes are provided between the first member and the first film in the first direction, and the first electrode is the first portion and the second electrode in the second direction. The second electrode is provided between the first wall portion and the sixth portion in the third direction, and the second electrode is provided between the second portion and the third portion in the second direction. The third electrode is provided between the second wall portion and the fifth portion in the third direction, and the third electrode is provided between the third portion and the fourth portion in the second direction. The first to third electrodes provided between the first wall portion and the seventh portion in the third direction, and the third electrode.
Analytical element equipped with.
(Structure 2)
The position of the first hole in the second direction is provided between the position of the first portion in the second direction and the position of the second portion in the second direction.
The position of the first hole in the third direction is provided between the position of the first wall portion in the third direction and the position of the sixth portion in the third direction.
The position of the second hole in the second direction is provided between the position of the second portion in the second direction and the position of the third portion in the second direction.
The position of the second hole in the third direction is provided between the position of the second wall portion in the third direction and the position of the fifth portion in the third direction.
The position of the third hole in the second direction is provided between the position of the third portion in the second direction and the position of the fourth portion in the second direction.
The position of the third hole in the third direction is provided between the position of the first wall portion in the third direction and the position of the seventh portion in the third direction. Analytical element.
(Structure 3)
In the first direction, the first hole overlaps with the first electrode,
In the first direction, the second hole overlaps with the second electrode,
The analytical device according to configuration 1, wherein the third hole overlaps with the third electrode in the first direction.
(Structure 4)
A part of the fifth portion is provided between the sixth portion and the first wall portion in the third direction.
The analysis according to any one of configurations 1 to 3, wherein at least a part of the first electrode is provided between the part of the fifth part and the sixth part in the third direction. element.
(Structure 5)
A part of the sixth portion is provided between the fifth portion and the second wall portion in the third direction.
The analysis according to any one of configurations 1 to 4, wherein at least a part of the second electrode is provided between the part of the sixth part and the fifth part in the third direction. element.
(Structure 6)
A part of the seventh portion is provided between the fifth portion and the second wall portion in the third direction.
The analysis according to any one of configurations 1 to 5, wherein at least a part of the second electrode is provided between the part of the seventh part and the fifth part in the third direction. element.
(Structure 7)
A part of the fifth portion is provided between the seventh portion and the first wall portion in the third direction.
The analysis according to any one of configurations 1 to 3, wherein at least a part of the third electrode is provided between the part of the fifth part and the seventh part in the third direction. element.
(Structure 8)
The fifth portion includes a first end portion and a second end portion, and the direction from the first end portion to the second end portion is along the second end portion.
The analytical device according to any one of configurations 1 to 7, wherein the first end portion is separated from the first portion and the second end portion is separated from the fourth portion.
(Structure 9)
The third wall portion further includes an eighth portion.
The eighth portion is provided between the sixth portion and the first wall portion in the third direction.
A part of the first electrode is provided between the eighth part and the sixth part in the third direction.
The analytical element according to configuration 8, wherein the eighth portion is separated from the first end portion.
(Structure 10)
The sixth portion includes the third end and includes the third end.
The analytical element according to any one of configurations 1 to 9, wherein a part of the second electrode is provided between the third end portion and the fifth portion in the third direction.
(Structure 11)
The seventh part includes the fourth end.
The analytical element according to any one of configurations 1 to 9, wherein a part of the second electrode is provided between the fourth end portion and the fifth portion in the third direction.
(Structure 12)
The first member, the first film, the first wall portion, and the first space formed by the fifth portion are the first member, the first film, the first portion, the second portion, and the sixth portion. Connected to the second space by
The first space is connected to the first member, the first film, the third part, the fourth part, and the third space by the seventh part.
The first member, the first film, the second wall portion, the sixth portion, and the fourth space formed by the seventh portion are the first member, the first film, the second portion, and the third portion. The analytical element according to any one of configurations 1 to 11, which is connected to the fifth space by the fifth part.
(Structure 13)
A fourth wall portion provided between the first member and the first film in the first direction and extending in the second direction, the third wall portion and the fourth wall portion in the third direction. The fourth wall portion provided with the second wall portion and
A fifth wall portion provided between the first member and the first film in the first direction and between the second wall portion and the fourth wall portion in the third direction. The fifth wall portion includes the ninth to fifteenth portions, the direction from the ninth portion to the twelfth portion is along the second direction, and the tenth portion is the ninth portion. The eleventh part is provided between the tenth part and the twelfth part, and the thirteenth part is provided between the tenth part and the twelfth part in the third direction. It is provided between the second wall portion and between the eleventh portion and the second wall portion in the third direction, and the thirteenth portion is connected to the tenth portion and the eleventh portion. The 14th portion is provided between the 9th portion and the 4th wall portion in the 3rd direction, and between the 10th portion and the 4th wall portion in the 3rd direction. The 14th part is connected to the 9th part and the 10th part, and the 15th part is between the 11th part and the 4th wall part in the 3rd direction and in the 3rd direction. Is provided between the twelfth portion and the fourth wall portion, and the fifteenth portion is connected to the eleventh portion and the twelfth portion.
The fourth to sixth electrodes are provided between the first member and the first film in the first direction, and the fourth electrode is the ninth portion and the tenth electrode in the second direction. The fifth electrode is provided between the second wall portion and the 14th portion in the third direction, and the fifth electrode is provided between the tenth portion and the eleventh portion in the second direction. The sixth electrode is provided between the fourth wall portion and the thirteenth portion in the third direction, and the sixth electrode is provided between the eleventh portion and the twelfth portion in the second direction. The fourth to sixth electrodes, which are provided between the two electrodes and are located between the second wall portion and the fifteenth portion in the third direction.
With more
The first film further includes 4th to 6th pores and includes
The fourth hole overlaps with the fourth electrode in the first direction.
The fifth hole overlaps with the fifth electrode in the first direction.
The analytical element according to any one of configurations 1 to 12, wherein the sixth hole overlaps with the sixth electrode in the first direction.
(Structure 14)
A fourth wall portion provided between the first member and the first film in the first direction and extending in the second direction, the third wall portion and the fourth wall portion in the third direction. The fourth wall portion provided with the second wall portion and
A fifth wall portion provided between the first member and the first film in the first direction and between the second wall portion and the fourth wall portion in the third direction. The fifth wall portion includes the ninth to fifteenth portions, the direction from the ninth portion to the twelfth portion is along the second direction, and the tenth portion is the same as the first portion. The eleventh part is provided between the tenth part and the twelfth part, and the thirteenth part is provided between the tenth part and the twelfth part in the third direction. It is provided between the fourth wall portion and between the eleventh portion and the fourth wall portion in the third direction, and the thirteenth portion is connected to the tenth portion and the eleventh portion. The 14th portion is provided between the 9th portion and the 2nd wall portion in the 3rd direction, and between the 10th portion and the 2nd wall portion in the 3rd direction. The 14th part is connected to the 9th part and the 10th part, and the 15th part is between the 11th part and the 2nd wall part in the 3rd direction and in the 3rd direction. The twelfth part and the second wall part are provided in the above, and the fifteenth part is connected to the eleventh part and the twelfth part.
The fourth to fifth electrodes are provided between the first member and the first film in the first direction, and the fourth electrode is the ninth portion and the tenth electrode in the second direction. The fifth electrode is provided between the second wall portion and the 14th portion in the third direction, and the fifth electrode is provided between the tenth portion and the eleventh portion in the second direction. The fifth electrode is provided between the fourth wall portion and the thirteenth portion in the third direction, and the fifth electrode is provided between the eleventh portion and the twelfth portion in the second direction. The fourth to fifth electrodes, which are provided between the second wall portion and the fifteenth portion in the third direction.
With more
The first film further includes the fourth hole to the sixth hole.
The fourth hole overlaps with the fourth electrode in the first direction.
The fifth hole overlaps with the fifth electrode in the first direction.
The analytical element according to any one of configurations 1 to 12, wherein the sixth hole overlaps with the sixth electrode in the first direction.
(Structure 15)
The width of the first wall portion along the third direction is 0.00 times or more and 0.5 times or less the distance between the first wall portion and the fifth portion along the third direction. The analytical element according to any one of configurations 1 to 14.
(Structure 16)
With the first member
The first film including the first to third pores, and the direction from the first member to the first film is along the first direction with the first film.
A first wall portion provided between the first member and the first film in the first direction, the first wall portion includes first to fifth portions, and the fifth portion is The direction from the first part to the fourth part is along the second direction along the second direction intersecting with the first direction, and the second part is the first part and the fourth part. The third portion is provided between the second portion and the fourth portion, and the first to fourth portions are connected to the fifth portion, respectively. 1 wall and
A second wall portion provided between the first member and the first film in the first direction, the second wall portion includes sixth to tenth portions, and the tenth portion includes the sixth to tenth portions. The first to fourth parts and the first part are between the fifth part and the tenth part in a third direction along the second direction and intersecting the plane including the first direction and the second direction. 5-The ninth portion is provided, the direction from the sixth portion to the ninth portion is along the second direction, and the seventh portion is between the sixth portion and the ninth portion. The eighth portion is provided between the seventh portion and the ninth portion, and in the second direction, the sixth portion and the sixth portion are provided between the first portion and the second portion. The 7 parts are provided, and in the 2nd direction, the 8th part and the 9th part are provided between the 3rd part and the 4th part, and the 6th to 9th parts are said. With the second wall part connected to the tenth part,
The first to third electrodes are provided between the first member and the first film in the first direction, and the first electrode is the sixth portion and the seventh electrode in the second direction. It is provided between the portions and is provided between the tenth portion and the fifth portion in the third direction, and the second electrode is provided between the second portion and the third portion in the second direction. The third electrode is provided between the tenth portion and the fifth portion in the third direction, and the third electrode is provided between the eighth portion and the ninth portion in the second direction. The first to third electrodes, which are provided between the tenth portion and the fifth portion in the third direction,
Analytical element equipped with.
(Structure 17)
The position of the first hole in the second direction is provided between the position of the sixth portion in the second direction and the position of the seventh portion in the second direction.
The position of the first hole in the third direction is provided between the position of the tenth portion in the third direction and the position of the fifth portion in the third direction.
The position of the second hole in the second direction is provided between the position of the second portion in the second direction and the position of the third portion in the second direction.
The position of the second hole in the third direction is provided between the position of the tenth portion in the third direction and the position of the fifth portion in the third direction.
The position of the third hole in the second direction is provided between the position of the eighth portion in the second direction and the position of the ninth portion in the second direction.
The position of the third hole in the third direction is provided between the position of the tenth portion in the third direction and the position of the fifth portion in the third direction, according to the configuration 1. Analytical element.
(Structure 18)
In the first direction, the first hole overlaps with the first electrode,
In the first direction, the second hole overlaps with the second electrode,
16. The analytical device according to configuration 16, wherein the third hole overlaps with the third electrode in the first direction.
(Structure 19)
The first wall portion includes an eleventh portion, and the eleventh portion is provided between the tenth portion and the fifth portion, and is connected to the second portion or the third portion.
The analytical element according to any one of configurations 16 to 18, wherein at least a part of the second electrode is provided between the eleventh portion and the fifth portion in the third direction.
(Structure 20)
The second wall portion includes a twelfth portion, the twelfth portion is provided between the tenth portion and the fifth portion, and is connected to the sixth portion or the seventh portion.
The analytical element according to any one of configurations 16 to 19, wherein at least a part of the first electrode is provided between the twelfth portion and the tenth portion in the third direction.
(Structure 21)
The second wall portion includes a thirteenth portion, the thirteenth portion being provided between the tenth portion and the fifth portion, and connected to the eighth portion or the ninth portion.
The analytical element according to any one of configurations 16 to 20, wherein at least a part of the third electrode is provided between the thirteenth portion and the tenth portion in the third direction.
(Structure 22)
The width of the first portion along the second direction is 0.5 times or more and 50 times or less the distance along the second direction between the first portion and the sixth portion, configurations 16 to 21. The analytical element according to any one of.
(Structure 23)
The analytical element according to any one of configurations 1 to 22, wherein the first wall portion and the second wall portion are in contact with the first member and in contact with the first film.
(Structure 24)
The analytical device according to any one of configurations 1 to 23, further comprising a detection electrode.
(Structure 25)
The analytical element according to configuration 23, further comprising the first to third electrodes and a detection unit electrically connected to the detection electrode.

According to the embodiment, it is possible to provide an analytical element capable of improving analytical accuracy.

The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific configuration of each element such as the first member, the first film, the wall portion, the electrode, and the control portion included in the analysis element, the present invention can be obtained by appropriately selecting from a range known to those skilled in the art. It is included in the scope of the present invention as long as it can be carried out in the same manner and the same effect can be obtained.

Further, a combination of any two or more elements of each specific example to the extent technically possible is also included in the scope of the present invention as long as the gist of the present invention is included.

In addition, all analytical elements that can be appropriately designed and implemented by those skilled in the art based on the analytical elements described above as embodiments of the present invention also belong to the scope of the present invention as long as the gist of the present invention is included. ..

In addition, within the scope of the idea of the present invention, those skilled in the art can come up with various modified examples and modified examples, and it is understood that these modified examples and modified examples also belong to the scope of the present invention. ..

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof.

10s ... wall part, 11-15 ... first to fifth wall parts, 18a to 18d ... first to fourth paths, 21 ... first film, 21a to 21f ... first to sixth holes, 21h ... holes, 30E ... Electrode, 30F ... Detection electrode, 31-36 ... First to sixth electrodes, 31o to 36o ... Opening, 51 ... First member, 51T ... Groove, 51p ... Convex, 52 to 54 ... Frame, 70 ... Detection unit, 81 ... Sample solution, 82 ... Electrolytic solution, 110, 111, 120, 121 ... Analytical element, AR ... Arrow, p01 to p16 ... 1st to 16th parts, pe01 to pe04 ... 1st to 4th ends Part, pp05, pp06, pp07, pq05 ... Partial, sp1 to sp5 ... 1st to 5th spaces

Claims (11)

With the first member
The first film including the first to third pores, and the direction from the first member to the first film is along the first direction with the first film.
A first wall portion provided between the first member and the first film in the first direction and extending in the second direction intersecting the first direction, and
A second wall portion provided between the first member and the first film in the first direction and extending in the second direction, and a third direction from the second wall portion to the first wall portion. With the second wall portion intersecting the plane including the first direction and the second direction.
A third wall portion provided between the first member and the first film in the first direction and between the first wall portion and the second wall portion in the third direction. The third wall portion includes the first to seventh portions, the direction from the first portion to the fourth portion is along the second direction, and the second portion is the same as the first portion. The third portion is provided between the fourth portion and the third portion, and the fifth portion is provided between the second portion and the fourth portion in the third direction. It is provided between the first wall portion and between the third portion and the first wall portion in the third direction, and the fifth portion is connected to the second portion and the third portion. The sixth portion is provided between the first portion and the second wall portion in the third direction, and between the second portion and the second wall portion in the third direction. The sixth part is connected to the first part and the second part, and the seventh part is between the third part and the second wall part in the third direction and in the third direction. The third wall portion is provided between the fourth portion and the second wall portion, and the seventh portion is connected to the third portion and the fourth wall portion.
The first to third electrodes are provided between the first member and the first film in the first direction, and the first electrode is the first portion and the second electrode in the second direction. The second electrode is provided between the first wall portion and the sixth portion in the third direction, and the second electrode is provided between the second portion and the third portion in the second direction. The third electrode is provided between the second wall portion and the fifth portion in the third direction, and the third electrode is provided between the third portion and the fourth portion in the second direction. The first to third electrodes provided between the first wall portion and the seventh portion in the third direction, and the third electrode.
Equipped with a,
An analytical element capable of measuring the current flowing through a conductive sample solution containing particles to be analyzed. The position of the first hole in the second direction is provided between the position of the first portion in the second direction and the position of the second portion in the second direction.
The position of the first hole in the third direction is provided between the position of the first wall portion in the third direction and the position of the sixth portion in the third direction.
The position of the second hole in the second direction is provided between the position of the second portion in the second direction and the position of the third portion in the second direction.
The position of the second hole in the third direction is provided between the position of the second wall portion in the third direction and the position of the fifth portion in the third direction.
The position of the third hole in the second direction is provided between the position of the third portion in the second direction and the position of the fourth portion in the second direction.
The position of the third hole in the third direction is provided between the position of the first wall portion in the third direction and the position of the seventh portion in the third direction, claim 1. The analytical element described. A part of the fifth portion is provided between the sixth portion and the first wall portion in the third direction.
The analytical element according to claim 1 or 2, wherein at least a part of the first electrode is provided between the part of the fifth part and the sixth part in the third direction. A part of the sixth portion is provided between the fifth portion and the second wall portion in the third direction.
The invention according to any one of claims 1 to 3, wherein at least a part of the second electrode is provided between the part of the sixth part and the fifth part in the third direction. Analytical element. A part of the seventh portion is provided between the fifth portion and the second wall portion in the third direction.
The invention according to any one of claims 1 to 4, wherein at least a part of the second electrode is provided between the part of the seventh part and the fifth part in the third direction. Analytical element. A part of the fifth portion is provided between the seventh portion and the first wall portion in the third direction.
The third aspect of the invention, wherein at least a part of the third electrode is provided between the part of the fifth part and the seventh part in the third direction, according to any one of claims 1 to 3. Analytical element. The first member, the first film, the first wall portion, and the first space formed by the fifth portion are the first member, the first film, the first portion, the second portion, and the sixth portion. Connected to the second space by
The first space is connected to the first member, the first film, the third part, the fourth part, and the third space by the seventh part.
The first member, the first film, the second wall portion, the sixth portion, and the fourth space formed by the seventh portion are the first member, the first film, the second portion, and the third portion. The analytical element according to any one of claims 1 to 6, which is connected to the fifth space according to the fifth part. A fourth wall portion provided between the first member and the first film in the first direction and extending in the second direction, the third wall portion and the fourth wall portion in the third direction. The fourth wall portion provided with the second wall portion and
A fifth wall portion provided between the first member and the first film in the first direction and between the second wall portion and the fourth wall portion in the third direction. The fifth wall portion includes the ninth to fifteenth portions, the direction from the ninth portion to the twelfth portion is along the second direction, and the tenth portion is the ninth portion. The eleventh part is provided between the tenth part and the twelfth part, and the thirteenth part is provided between the tenth part and the twelfth part in the third direction. It is provided between the second wall portion and between the eleventh portion and the second wall portion in the third direction, and the thirteenth portion is connected to the tenth portion and the eleventh portion. The 14th portion is provided between the 9th portion and the 4th wall portion in the 3rd direction, and between the 10th portion and the 4th wall portion in the 3rd direction. The 14th part is connected to the 9th part and the 10th part, and the 15th part is between the 11th part and the 4th wall part in the 3rd direction and in the 3rd direction. Is provided between the twelfth portion and the fourth wall portion, and the fifteenth portion is connected to the eleventh portion and the twelfth portion.
The fourth to sixth electrodes are provided between the first member and the first film in the first direction, and the fourth electrode is the ninth portion and the tenth electrode in the second direction. The fifth electrode is provided between the second wall portion and the 14th portion in the third direction, and the fifth electrode is provided between the tenth portion and the eleventh portion in the second direction. The sixth electrode is provided between the fourth wall portion and the thirteenth portion in the third direction, and the sixth electrode is provided between the eleventh portion and the twelfth portion in the second direction. The fourth to sixth electrodes, which are provided between the two electrodes and are located between the second wall portion and the fifteenth portion in the third direction.
With more
The first film further includes 4th to 6th pores and includes
The fourth hole overlaps with the fourth electrode in the first direction.
The fifth hole overlaps with the fifth electrode in the first direction.
The analytical element according to any one of claims 1 to 7, wherein the sixth hole overlaps with the sixth electrode in the first direction. A fourth wall portion provided between the first member and the first film in the first direction and extending in the second direction, the third wall portion and the fourth wall portion in the third direction. The fourth wall portion provided with the second wall portion and
A fifth wall portion provided between the first member and the first film in the first direction and between the second wall portion and the fourth wall portion in the third direction. The fifth wall portion includes the ninth to fifteenth portions, the direction from the ninth portion to the twelfth portion is along the second direction, and the tenth portion is the ninth portion. The eleventh part is provided between the tenth part and the twelfth part, and the thirteenth part is provided between the tenth part and the twelfth part in the third direction. It is provided between the fourth wall portion and between the eleventh portion and the fourth wall portion in the third direction, and the thirteenth portion is connected to the tenth portion and the eleventh portion. The 14th portion is provided between the 9th portion and the 2nd wall portion in the 3rd direction, and between the 10th portion and the 2nd wall portion in the 3rd direction. The 14th part is connected to the 9th part and the 10th part, and the 15th part is between the 11th part and the 2nd wall part in the 3rd direction and in the 3rd direction. The twelfth part and the second wall part are provided in the above, and the fifteenth part is connected to the eleventh part and the twelfth part.
The fourth to sixth electrodes are provided between the first member and the first film in the first direction, and the fourth electrode is the ninth portion and the tenth electrode in the second direction. It is provided between the portions, and is provided between the fourth wall portion and the 14th portion in the third direction, and the fifth electrode is provided between the tenth portion and the eleventh portion in the second direction. The sixth electrode is provided between the second wall portion and the thirteenth portion in the third direction, and the sixth electrode is provided between the eleventh portion and the twelfth portion in the second direction. The fourth to sixth electrodes provided between the fourth wall portion and the fifteenth portion in the third direction, and the fourth to sixth electrodes.
With more
The first film further includes holes 4 to 6, and the first film further includes holes 4 to 6.
The fourth hole overlaps with the fourth electrode in the first direction.
The fifth hole overlaps with the fifth electrode in the first direction.
The analytical element according to any one of claims 1 to 7, wherein the sixth hole overlaps with the sixth electrode in the first direction. With the first member
The first film including the first to third pores, and the direction from the first member to the first film is along the first direction with the first film.
A first wall portion provided between the first member and the first film in the first direction, the first wall portion includes first to fifth portions, and the fifth portion is The direction from the first part to the fourth part is along the second direction along the second direction intersecting with the first direction, and the second part is the first part and the fourth part. The third portion is provided between the second portion and the fourth portion, and the first to fourth portions are connected to the fifth portion, respectively. 1 wall and
A second wall portion provided between the first member and the first film in the first direction, the second wall portion includes sixth to tenth portions, and the tenth portion includes the sixth to tenth portions. The first to fourth parts and the first part are between the fifth part and the tenth part in a third direction along the second direction and intersecting the plane including the first direction and the second direction. 5-The ninth portion is provided, the direction from the sixth portion to the ninth portion is along the second direction, and the seventh portion is between the sixth portion and the ninth portion. The eighth portion is provided between the seventh portion and the ninth portion, and in the second direction, the sixth portion and the sixth portion are provided between the first portion and the second portion. The 7 parts are provided, and in the 2nd direction, the 8th part and the 9th part are provided between the 3rd part and the 4th part, and the 6th to 9th parts are said. With the second wall part connected to the tenth part,
The first to third electrodes are provided between the first member and the first film in the first direction, and the first electrode is the sixth portion and the seventh electrode in the second direction. It is provided between the portions and is provided between the tenth portion and the fifth portion in the third direction, and the second electrode is provided between the second portion and the third portion in the second direction. The third electrode is provided between the tenth portion and the fifth portion in the third direction, and the third electrode is provided between the eighth portion and the ninth portion in the second direction. The first to third electrodes, which are provided between the tenth portion and the fifth portion in the third direction,
Equipped with a,
An analytical element capable of measuring the current flowing through a conductive sample solution containing particles to be analyzed. The position of the first hole in the second direction is provided between the position of the sixth portion in the second direction and the position of the seventh portion in the second direction.
The position of the first hole in the third direction is provided between the position of the tenth portion in the second direction and the position of the fifth portion in the second direction.
The position of the second hole in the second direction is provided between the position of the second portion in the second direction and the position of the third portion in the second direction.
The position of the second hole in the third direction is provided between the position of the tenth portion in the third direction and the position of the fifth portion in the third direction.
The position of the third hole in the second direction is provided between the position of the eighth portion in the second direction and the position of the ninth portion in the second direction.
10. The position of the third hole in the third direction is provided between the position of the tenth portion in the third direction and the position of the fifth portion in the third direction. Analytical element.

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