JP6128284B2 - Vibrating body and tactile display keyboard - Google Patents

Description

  The present invention relates to a vibrating body including a film that expands and contracts in a plane direction when a voltage is applied, and a diaphragm.

  In recent years, for example, a vibrating body including a film (hereinafter simply referred to as a piezoelectric film) that expands and contracts in a plane direction when a voltage is applied, and a diaphragm is known.

  For example, Patent Document 1 describes a vibrating body (speaker) in which an exciter film is stretched between both ends of a curved diaphragm. A piezoelectric film is attached to the exciter film. When an AC voltage is applied to the electrodes formed on both main surfaces of the piezoelectric film, the piezoelectric film and the exciter film repeatedly expand and contract in the surface direction. The diaphragm vibrates in the normal direction of the main surface as the piezoelectric film and the exciter film expand and contract.

International Publication No. 2012/157691

  However, in the vibrating body disclosed in Patent Document 1, the entire diaphragm is curved and not flat. In particular, in a haptic presentation device that provides feedback of an input operation by vibrating a vibrating body when an input operation is received, it is desirable that the diaphragm disposed on the side on which the input operation is performed is flat.

  In the structure shown in Patent Document 1, the vibration of the diaphragm is large at the antinode (center side of the diaphragm) and small at the nodes (both ends of the diaphragm). That is, in the structure shown in Patent Document 1, the vibration of the diaphragm varies in size in the direction connecting both ends. Then, the user feels uncomfortable because the magnitude of the feedback of the input operation varies.

  If the voltage applied to the piezoelectric film is made different in the direction connecting both ends of the diaphragm, the magnitude of the vibration can be made uniform. However, in order to obtain the voltage to be applied, it is necessary to arrange a plurality of sensors for detecting vibrations in a direction connecting both ends of the diaphragm. That is, the structure becomes complicated.

  Moreover, in order to manufacture the vibrating body shown in Patent Document 1, it is necessary to attach a piezoelectric film in a state where the vibrating plate is bent with tension. However, since the side to be attached is long, it is difficult to attach the piezoelectric film while the same magnitude of tension is applied to the entire diaphragm. If the tension varies, an in-plane variation of the vibration of the diaphragm occurs.

  Accordingly, an object of the present invention is to provide a vibrating body that vibrates in the normal direction of the main surface even with a smaller piezoelectric film and that has a flat main surface.

  The vibrating body of the present invention has a pair of cuts formed at both ends in a predetermined direction, a diaphragm having a flat part and a curved part through each cut, and expands and contracts in a plane direction when a voltage is applied, and the pair of the curved parts. And a film stretched over the section.

  As the film, an electrostrictive film, an electret film, a composite film in which piezoelectric particles are dispersed in a polymer, or an electroactive polymer film can be used. Moreover, the aspect formed by adhere | attaching on an exciter film may be sufficient as a film. Furthermore, even if the film itself does not expand and contract in the plane direction, for example, a bonded piezoelectric ceramic may extend the film in the plane direction.

  In the configuration of the present invention, the diaphragm has a shape in which a part (a pair of curved parts) is bent and the other part (a flat part) is flat. That is, the curved portion and the flat portion are integrated at a portion other than the cut so as to constitute one diaphragm.

  For example, when the diaphragm is viewed in plan, a pair of cuts are formed on the left and right sides of the diaphragm, and the upper part of each cut is bent. The direction of bending is the upper surface side or the lower surface side of the diaphragm. Then, left and right music parts (a pair of music parts) are formed. However, the upper portion may be bent from the left cut and the lower portion may be bent from the right cut to form a pair of bent portions.

  For example, the end portion of the piezoelectric film is fixed to the outer end portion of each curved portion. Electrodes are formed on both main surfaces of the piezoelectric film. When an AC voltage is applied to the electrodes on both main surfaces of the piezoelectric film, the piezoelectric film repeatedly expands and contracts along a predetermined direction. Then, the degree of bending of the pair of curved portions increases or decreases as the piezoelectric film expands and contracts. The diaphragm vibrates in the normal direction of the main surface by increasing or decreasing the bending degree of the curved portion. This vibration is transmitted to the flat part integrated with the curved part at the part other than the notch.

  Accordingly, it is possible to realize a vibrating body in which a part (flat portion) of the diaphragm has a flat shape while vibrating in the normal direction of the main surface of the diaphragm.

  In the vibrating body of the present invention, the piezoelectric film is stretched only on the pair of curved portions, not on the entire main surface of the diaphragm. Therefore, the vibrating body of the present invention can be realized even if a smaller piezoelectric film is used.

  Moreover, in the flat part of the diaphragm, the in-plane distribution of the magnitude of vibration can be made uniform.

  The film may be stretched in a state where bending stress is applied to the curved portion.

  In this way, when the piezoelectric film is stretched on the diaphragm in a state where bending stress is generated in the curved portion, a tensile force is applied to the piezoelectric film in the direction from the central portion to both end portions. Thereby, since the piezoelectric film becomes easy to expand | extend, the curved part of a diaphragm comes to vibrate efficiently.

  The vibrating body may include a flat plate that abuts on a main surface of the diaphragm opposite to the film. Thereby, the surface on the opposite side to the film of a vibrating body becomes flat in the whole area | region.

  Further, the piezoelectric resin may be made of polyvinylidene fluoride. In addition, the piezoelectric resin may be made of a chiral polymer, and the chiral polymer may be polylactic acid.

  Since the piezoelectric properties of chiral polymers are attributed to the molecular structure, they do not have a pyroelectric effect compared to ferroelectric polymers such as polyvinylidene fluoride. Therefore, a piezoelectric film made of a chiral polymer is suitable as a device (for example, a keyboard) that transmits the temperature of a finger.

  According to this invention, since only the curved portion is bent and the film is stretched only on the curved portion, it is possible to realize a vibrating body having a flat shape that vibrates even with a smaller film and is flat. it can. In addition, the in-plane distribution of vibration is made uniform in the flat portion, and when a flat plate is provided on the main surface opposite to the film, uniform vibration can be generated in the entire region.

(A) is an external perspective view from the upper surface side of the vibrating body according to the first embodiment, and (B) is an external perspective view from the lower surface side of the vibrating body. It is a top view of a vibrating body. (A) is AA sectional drawing, (B) is BB sectional drawing, (C) is the figure which expanded the cross section of the piezoelectric film. It is a block diagram which shows a part of structure of a vibration apparatus. (A) And (B) is a side view for demonstrating the vibration of a vibrating body, respectively. FIG. 3 is an exploded perspective view of a tactile presentation keyboard including the vibrator according to the first embodiment. (A) is an external appearance perspective view from the upper surface side of the vibrating body which concerns on the modification 1 of Embodiment 1, (B) is an external appearance perspective view from the lower surface side of the said vibrating body. 6 is a side view of a vibrating body according to a first modification of the first embodiment. FIG. 6 is a side view of a vibrating body according to a second modification of the vibrating body according to the first embodiment. FIG. 6 is an external perspective view from the upper surface side of a vibrating body according to Embodiment 2. FIG. FIG. 10 is an external perspective view from the upper surface side of a vibrating body according to a third embodiment. (A) is an external appearance perspective view from the upper surface side of the vibrating body which concerns on Embodiment 4, (B) is an external appearance perspective view from the lower surface side of the said vibrating body.

  The vibrating body according to Embodiment 1 will be described with reference to FIGS. 1A, 1B, 2, 3A, 3B, and 3C. 1A is an external perspective view from the upper surface side of the vibrating body, and FIG. 1B is an external perspective view from the lower surface side of the vibrating body. FIG. 2 is a top view of the vibrating body. 3A is a cross-sectional view taken along the line AA, FIG. 3B is a cross-sectional view taken along the line BB, and FIG. 3C is an enlarged view of the cross section of the piezoelectric film. 1A and 1B, a surface in the height direction of the vibrating body 100 is an upper surface and a surface opposite to the height direction is a lower surface.

  The vibrating body 100 vibrates according to a drive signal. The vibrating body 100 is used for a vibrating device such as a speaker device or a tactile sense presentation device that provides feedback of an input operation by vibration.

  As shown in FIGS. 1A and 1B, the vibrating body 100 according to the present embodiment has a substantially thin plate shape, and includes the vibrating plate 10 and the piezoelectric film 20.

  As shown in FIG. 1A, the diaphragm 10 has a thin plate shape that is longer in the width direction than in the depth direction, for example. The diaphragm 10 is made of acrylic resin PMMA, for example. The diaphragm 10 may use other materials such as a metal plate (for example, a stainless plate and a copper plate), PET, polycarbonate (PC), a glass epoxy resin plate, and glass.

  The diaphragm 10 includes a flat portion 5, a central portion 4, and a flat portion 6. As shown in FIGS. 1A and 2, the flat portion 5, the central portion 4, and the flat portion 6 are each long in the width direction, for example. The flat part 5, the center part 4, and the flat part 6 are arranged in order along the depth direction. The flat portion 5, the central portion 4, and the flat portion 6 are arranged with reference to a plurality of cuts formed in the diaphragm 10.

  However, the diaphragm 10 and the piezoelectric film 20 are not limited to the shapes shown in FIG. 1 (A), FIG. 1 (B), and FIG. For example, the diaphragm 10 may be longer in the depth direction than in the width direction. When the piezoelectric film 20 is stretched in the longitudinal direction of the diaphragm 10, the piezoelectric film 20 becomes long, so that the driving voltage (see FIG. 4) of the piezoelectric film 20 may be low. When the drive voltage is lowered, the resonance frequency is lowered. For this reason, when the resonance frequency is increased in a state where there is a restriction such as size, the piezoelectric film 20 is stretched in the short direction of the diaphragm 10, and each notch is formed according to the length of the piezoelectric film 20. That's fine.

  More specifically, as shown in FIGS. 1A and 2, the diaphragm 10 has two pairs of cuts at both ends in the width direction. The first pair of cuts consists of a cut 800 and a cut 801. The second pair of cuts consists of cuts 802 and cuts 803. The second pair of cuts are formed in the depth direction from the first pair of cuts.

  The cut 800 and the cut 802 are formed at the end of the diaphragm 10 in the direction opposite to the width direction. The cut 801 and the cut 803 are formed at the end in the width direction of the diaphragm 10.

  As shown in FIG. 2, the notch 800, the notch 801, the notch 802, and the notch 803 are each formed so as to be parallel to the width direction. The positions in the depth direction are adjusted so that the first pair of cuts (cuts 800 and 801) are arranged on the same line parallel to the width direction. The positions of the second pair of cuts (cuts 802 and 803) are adjusted in the depth direction so as to be arranged on the same line parallel to the width direction.

  As shown in FIGS. 1A and 2, the central portion 4 is aligned with the flat portion 5 via a line passing through the notches 800 and 801 in the diaphragm 10. The flat portion 6 is arranged in the central portion 4 via a line passing through the notches 802 and 803.

  However, in this embodiment, it is not an essential configuration that the cut 800 and the cut 801 are arranged on the same line. Similarly, in this embodiment, it is not an essential configuration that the notches 802 and 803 are arranged on the same line. Further, the cuts 800 to 803 are not limited to a straight line parallel to the width direction, but may be a curved line along the width direction.

  As shown in FIG. 1A, the flat portion 5 and the flat portion 6 have a flat shape as a whole.

  As shown in FIGS. 1A and 1B, the center portion 4 has both end portions in the width direction curved to the lower surface side. In other words, the central portion 4 has a central portion in the width direction that protrudes from the both end portions to the upper surface side. More specifically, the central portion 4 includes a bending portion 1, a base portion 3, and a bending portion 2, as shown in FIGS. 1 (A) and 2. The bending portion 1, the base portion 3, and the bending portion 2 are arranged in order in the width direction. The bending portion 1 and the bending portion 2 correspond to a pair of bending portions of the present invention.

  As shown in FIG. 2, the bending portion 1 passes through the flat portion 5 and the cut 800, and passes through the flat portion 6 and the cut 802. As shown in FIG. 2, the bending portion 2 is provided with the flat portion 5 and the cut 801, and the flat portion 6 and the cut 803.

  As shown in FIG. 1A, the base 3 has a flat shape and is integrated with the flat portion 5 and the flat portion 6. Thereby, the bending part 1 and the bending part 2 are united with the flat part 5 and the flat part 6 via the base 3 of a flat shape.

  The piezoelectric film 20 is stretched on the lower surface of the central portion 4 as shown in FIGS. 1 (B), 3 (A), and 3 (B). One end of the piezoelectric film 20 is fixed to an end portion in the direction opposite to the width direction of the bending portion 1, and the other end is fixed to an end portion in the width direction of the bending portion 2. That is, the piezoelectric film 20 is stretched around the bending portion 1 and the bending portion 2. However, the piezoelectric film 20 should just be fixed to the curved part in the curved part 1 and the curved part 2, not only each edge part.

  The piezoelectric film 20 is long in the width direction as shown in FIG. 1 (B) and FIG. 3 (B). As shown in the enlarged view of FIG. 3C, the piezoelectric film 20 has electrodes 21 and 22 formed on both main surfaces of the base film 23. The electrodes 21 and 22 are preferably aluminum evaporated electrodes. The electrodes 21 and 22 are preferably composed mainly of indium tin oxide (ITO), zinc oxide (ZnO), and polythiophene when translucency is required. Moreover, the electrode 21 and the electrode 22 which have translucency are also realizable by using a silver nanowire electrode. A lead wire conductor (not shown) is connected to the electrode 21 and the electrode 22, and a drive signal is applied to the electrode 21 and the electrode 22 through the lead wire conductor.

  The base film 23 of the piezoelectric film 20 partially includes a resin of a piezoelectric material such as polyvinylidene fluoride (PVDF) or a chiral polymer. If PVDF is used as the material of the base film 23, the piezoelectric constant becomes the highest. If polylactic acid (PLA) is used as the material of the base film 23, the piezoelectric constant is high and the translucency is high. When using PLA as the material of the base film 23, it is desirable to use uniaxially stretched PLLA as the material. In the case of using PLA, the vibration body 100 having high translucency in almost the entire surface in plan view can be realized by using a material having high translucency for the other configurations (the diaphragm 10 and the electrodes 21 and 22). it can.

  In addition, since the piezoelectric properties of the chiral polymer are attributed to the molecular structure, there is no pyroelectric effect compared to ferroelectric polymers such as polyvinylidene fluoride. Therefore, the chiral polymer is suitable as a configuration of a device (for example, a keyboard) that is touched by a user and transmits the temperature of a finger.

  The piezoelectric film 20 stretched around the central portion 4 may be an electrostrictive film, an electret film, a composite film in which piezoelectric particles are dispersed in a polymer, or an electroactive polymer film. Moreover, the aspect formed by affixing on these exciter films stretched at the both ends of the center part 4 of the diaphragm 10 may be sufficient as these films. Furthermore, even if the film itself does not expand and contract in the plane direction, for example, a bonded piezoelectric ceramic may extend the film in the plane direction.

  Next, FIG. 4 is a block diagram illustrating a part of the configuration of the vibration device. FIGS. 5A and 5B are side views for explaining the vibration of the vibrating body.

  As shown in FIG. 4, the vibration device includes a drive unit 30 and a vibrating body 100. The base film 23 of the piezoelectric film 20 repeats expansion and contraction in the width direction when a drive signal from the drive unit 30 is applied to the electrodes 21 and 22 on both main surfaces. In order to prepare the base film 23 that expands and contracts in the width direction, for example, when the material is PLLA, the base film 23 is cut so that the direction that forms an angle of about 45 ° with respect to the stretching direction is the width direction.

  When the piezoelectric film 20 contracts from both ends toward the center along the width direction as indicated by the white arrow in FIG. 5 (A), the base 3 is indicated as indicated by the black arrow in FIG. 5 (A). The height of the protrusion to the upper surface side (hereinafter referred to as the amount of protrusion) increases. However, the protruding amount of the base portion 3 is based on the bending portion 1 and the fixing portion between the bending portion 2 and the piezoelectric film 20. 5B, when the piezoelectric film 20 extends from the central portion toward both ends along the width direction, as indicated by the black arrows in FIG. 5B, The amount of protrusion of the base 3 is reduced. When the piezoelectric film 20 repeatedly expands and contracts, the amount of protrusion of the base 3 repeatedly increases and decreases. That is, the base 3 vibrates along the normal direction of the main surface of the diaphragm 10.

  The vibration of the base portion 3 is transmitted to the flat portion 5 and the flat portion 6 integrated with the base portion 3. Accordingly, the flat portion 5 and the flat portion 6 also vibrate along the normal direction of the main surface of the diaphragm 10 with the vibration of the base portion 3.

  In the vibrating body 100 according to the present embodiment, the flat portion 5, the flat portion 6, and the base portion 3 have a flat shape while vibrating along the normal direction of the main surface of the diaphragm 10.

  Further, since the flat portion 5 and the flat portion 6 vibrate with the vibration of the base portion 3, the in-plane distribution of the magnitude of vibration in the flat portion 5, the flat portion 6, and the base portion 3 is made uniform. Accordingly, the vibrating body 100 according to the present embodiment can feel the same magnitude of vibration even when the user touches any one of the flat portion 5, the flat portion 6, and the base portion 3.

  Further, in the vibrating body 100 according to the present embodiment, the piezoelectric film 20 is stretched only at the central portion 4. Therefore, the vibrating body 100 is economical because the piezoelectric film can be smaller than when the piezoelectric film is stretched over the entire surface of the diaphragm 10.

  In the present embodiment, the piezoelectric film 20 is stretched around the central portion 4 of the diaphragm 10 in a state where bending stress is applied. The bending stress is applied to the lower surface side at both end portions in the width direction of the central portion 4 as indicated by white arrows 901 in FIG. That is, the bending stress 901 is applied to the lower surface side at the end of the bending portion 1 and the bending portion 2 opposite to the base portion 3. Due to the bending stress 901, the piezoelectric film 20 is pulled at both ends from the center in the width direction, as indicated by the white arrow 902 in FIG.

  The pulling force 902 due to the bending stress 901 makes the bending portion 1 and the bending portion 2 close to a flat shape when the piezoelectric film 20 extends in the width direction. That is, the pulling force 902 makes it easy to reduce the amount of protrusion of the base 3. Thereby, the base 3 comes to vibrate more greatly. However, it is not essential to stretch the piezoelectric film 20 on the central portion 4 in a state where the bending stress 901 is applied. For example, the vibrating body 100 may be configured to include a curved diaphragm that is not subjected to bending stress.

  The pair of bending portions 1 and 2 need not be arranged in parallel in the width direction via the base 3. For example, the bending portion 2 may be flattened, and the end portion in the width direction of the flat portion 5 may be bent, and the piezoelectric film 20 may be stretched between the bending portion 1. In this way, a pair of curved portions may be formed obliquely in the width direction.

  The vibrating body 100 that vibrates in the normal direction of the flat portion as described above is used, for example, in a tactile presentation keyboard that provides tactile feedback by transmitting vibration when a user touches a key.

  For example, as shown in the exploded perspective view of FIG. 6, the tactile sense presentation keyboard 200 includes a keyboard unit 210, a vibrating body 100, and a frame unit 220. The keyboard unit 210 is disposed so as to contact the upper surface of the vibrating body 100. The keyboard unit 210 includes a base unit 211 and a plurality of touch sensors 212 (corresponding to keys). The plurality of touch sensors 212 are respectively disposed on the upper surface of the base portion 211, for example. Each touch sensor 212 detects a user's touch operation. The frame unit 220 includes, for example, a driving unit 30 that applies a driving signal to the piezoelectric film 20, a specifying unit that specifies which touch sensor 212 is touched, an output unit that outputs key information corresponding to the specified touch sensor 212, Built-in electric circuit module that realizes.

  When the user touches any touch sensor 212, the tactile sense keyboard 200 identifies the touch sensor 212 that has been touched, and outputs key information corresponding to the identified touch sensor 212 to an external information processing apparatus. When the touch sensor 212 touched is specified, the drive unit 30 outputs a drive signal and vibrates the vibrating body 100. The vibration of the vibrating body 100 is transmitted to the finger that has performed the touch operation via the base portion 211. Thus, the tactile sense presentation keyboard 200 can make the user feel the vibration of the vibrating body 100 when the user touches any one of the touch sensors 212. In addition, since the vibrating body 100 that is in contact via the base portion 211 has a flat portion (the base portion 3 and the central portions 5 and 6), the user is conscious of bending when the touch sensor 212 is touched. It becomes difficult.

  Next, Modification 1 of the vibrating body 100 according to the first embodiment will be described with reference to FIGS. 7A, 7B, and 8. FIG. 7A is an external perspective view from the upper surface side of the vibrating body 100A according to Modification 1 of Embodiment 1, and FIG. 7B is an external perspective view from the lower surface side of the vibrating body 100A. . FIG. 8 is a side view of the vibrating body 100A.

  The vibrating body 100 </ b> A is different from the vibrating body 100 in that the flat plate 11 is disposed on the upper surface of the vibration plate 10. A description of the same configuration as that of the vibrating body 100 is omitted.

  As shown in FIGS. 7A, 7 </ b> B, and 8, the flat plate 11 is disposed so as to contact a flat portion of the diaphragm 10. Specifically, the flat plate 11 is in contact with the flat portion 5, the flat portion 6, and the base portion 3 of the central portion 4 of the diaphragm 10. The vibration of the base 3 accompanying the expansion and contraction of the piezoelectric film 20 is transmitted to the flat plate 11 that contacts the flat portion of the vibration plate 10.

  In the vibration body 100 </ b> A, the flat plate 11 having a flat entire area is disposed on the upper surface of the vibration plate 10, so that the entire area of the main surface can be flattened.

  Furthermore, since the flat plate 11 vibrates with the vibration of the flat portion 5, the flat portion 6 and the base portion 3 of the vibration plate 10, the in-plane distribution of the magnitude of vibration is made uniform also in the flat plate 11. Accordingly, the vibrating body 100A can make the user feel a vibration having the same magnitude regardless of which region of the main surface of the vibrating body 100A is touched by the user.

  Here, the shape of the diaphragm 10 is not limited to the shape shown in the above example. For example, as shown in the side view of FIG. 9, the vibration plate 10 </ b> B and the piezoelectric film 20 </ b> B of the vibrating body 100 </ b> B may be formed such that the length of the central portion 4 </ b> B in the width direction is shorter than the central portion 4. The diaphragm of the vibrating body and the piezoelectric film may be formed so that the length of the central portion in the direction is longer than that of the central portion 4. Further, the length of the central portion in the depth direction of the diaphragm 10 may be longer or shorter than the length of the central portion 4. Thus, by changing the shape of the central portion 4, it is possible to obtain a vibrating body that vibrates at a desired resonance frequency without changing the size of the entire diaphragm.

  The diaphragm may include a plurality of central portions that mainly vibrate. For example, as shown in the external perspective view of FIG. 10, the vibrating body 100 </ b> C according to the second embodiment is different from the vibrating body 100 in that the diaphragm 10 </ b> C includes a plurality of central portions.

  That is, the diaphragm 10C includes a flat part 5C, a central part 4C1, a flat part 7, a central part 4C2, and a central part 6C arranged in order along the depth direction.

  The piezoelectric film 20C1 is stretched over the central portion 4C1 on the lower surface side of the diaphragm 10C. The piezoelectric film 20C2 is stretched around the central portion 4C2 on the lower surface side of the diaphragm 10C.

  In this example, the center part 4C1 is longer in the width direction than the center part 4C2. The central portion 4C1 has a length in the depth direction equal to the length in the depth direction of the central portion 4C2. However, the length of the central part 4C1 and the central part 4C2 is not limited to the example shown in FIG.

  Of course, the present invention is not limited to an example in which a plurality of central portions having different lengths in the width direction are formed, and a plurality of central portions having different lengths in the depth direction may be formed. By forming a plurality of central portions having different shapes, a vibrating body that vibrates at a plurality of resonance frequencies can be obtained. Thereby, various feedbacks can be given to the user.

  In the above-described example, the vibration portion of the diaphragm is mainly located at the center in the depth direction of the diaphragm, but is not limited to the example located at the center.

  FIG. 11 is an external perspective view of the vibrating body 100D according to the third embodiment as viewed from the upper surface side.

  Diaphragm 10D of vibration body 100D has vibration part 4D along the width direction at the end in the direction opposite to the depth direction in the depth direction. The diaphragm 10D has a flat portion 8 along the width direction at the end in the depth direction.

  The vibration part 4D is different from the central part 4 according to the first embodiment in that the vibration part 4D is located at the end of the vibration plate 10D opposite to the depth direction.

  The vibration part 4D is integrated with the flat part 8 at the center part in the width direction of the flat shape. The piezoelectric film 20D is stretched over the vibration part 4D on the lower surface side of the vibration plate 10D.

  In this way, even if the portion that vibrates mainly is located at a position other than the central portion in the depth direction, the vibration of the vibrating portion 4D is transmitted to the flat portion 8 and vibrates the flat portion 8 in the main surface normal direction.

  Moreover, as shown in FIG. 11, if the vibration part 4D is arrange | positioned in the one end of the depth direction, the flat part 8 can be ensured more widely from the other end. Thereby, it becomes easy to arrange a key touch part such as a membrane switch on the flat part 8 secured more widely. Therefore, the structure shown in FIG. 11 can arrange the key touch part without providing the flat plate 11 shown in FIG.

  Next, a vibrating body 100E according to the fourth embodiment will be described with reference to FIGS. 12 (A) and 12 (B). 12A is an external perspective view from the upper surface side of the vibrating body 100E, and FIG. 12B is an external perspective view from the lower surface side of the vibrating body 100E.

  As shown in FIGS. 12 (A) and 12 (B), the vibrating body 100E is the first embodiment in that the center portion 4E that mainly vibrates is composed of a bent portion 1E, a base portion 3, and a bent portion 2E. This is different from the vibrator 100 according to FIG. That is, a bending portion 1E and a bending portion 2E are formed in the vibration plate 10E instead of the bending portion 1 and the bending portion 2.

  Even if the diaphragm 10E is configured in this way, the central portion 4E vibrates in the normal direction of the main surface of the diaphragm 10E as the piezoelectric film 20 expands and contracts in the width direction.

DESCRIPTION OF SYMBOLS 1,1A, 1B ... Bending part 1E ... Bending part 2, 2A, 2B ... Bending part 2E ... Bending part 3, 3A ... Base part 4, 4A, 4B, 4C1, 4C2, 4E ... Center part 4D ... Vibrating part 5 , 5A, 5C ... flat part 6, 5A, 6C ... flat part 7, 8 ... flat part 10, 10A, 10B, 10C, 10D, 10E ... diaphragm 11 ... flat plate 20, 20B, 20C1, 20C2, 20D ... piezoelectric film 21, 22 ... Electrode 23 ... Base film 30 ... Drive unit 100, 100A, 100B, 100C, 100D, 100E ... Vibrating body 200 ... Tactile presentation keyboard 210 ... Keyboard unit 211 ... Base unit 212 ... Touch sensor 220 ... Frame unit

Claims (7)

A pair of notches formed at both ends in a predetermined direction, and one diaphragm having a flat portion and a curved portion through each notch;
A film that expands and contracts in the surface direction when voltage is applied, and is stretched between the pair of curved portions;
With
The flat portion and the curved portion are a vibrating body in which the portions other than the respective cuts are integrated . The film is stretched in a state where bending stress is applied to the curved portion,
The vibrating body according to claim 1. A flat plate in contact with the main surface of the diaphragm opposite to the film;
The vibrating body according to claim 1 or 2. The vibrating body according to any one of claims 1 to 3, wherein the film is made of polyvinylidene fluoride. The vibrator according to claim 1, wherein the film is made of a chiral polymer.   The vibrator according to claim 5, wherein the chiral polymer is polylactic acid. A vibrating body according to any one of claims 1 to 6,
A detection unit for detecting a touch operation;
When the detection unit detects the touch operation, a driver for applying a driving signal to said vibrating body,
An output unit that outputs key information corresponding to the touch operation detected by the detection unit;
Tactile presentation keyboard equipped with.

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