JP5817717B2 - Positive radiation-sensitive composition, interlayer insulating film for display element, and method for forming the same - Google Patents

Description

  The present invention relates to a positive radiation sensitive composition, an interlayer insulating film for display elements, and a method for forming the same.

  The display element is generally provided with an interlayer insulating film for the purpose of insulating between wirings arranged in layers. As the material for forming the interlayer insulating film, positive radiation-sensitive compositions are widely used because the number of steps for obtaining a necessary pattern shape is small and a material having sufficient flatness is preferable.

  As such a display element, for example, a display element such as a TFT type liquid crystal display element using an interlayer insulating film includes a step of forming a transparent electrode film on the interlayer insulating film and further forming a liquid crystal alignment film thereon. It is manufactured after. In this case, since the interlayer insulating film is exposed to high temperature conditions in the process of forming the transparent electrode film, sufficient heat resistance is required.

  In recent years, TFT-type liquid crystal display elements have been increased in screen size, brightness, definition, speed response, thickness, and the like, and wiring patterns have been made finer. In connection with this, in addition to the improvement of transparency and refractive index, the improvement of the refinement | miniaturization technique of a resist pattern is desired. When the resist pattern is miniaturized, if the processing time is slightly longer than the optimum time in the dry etching process using an etching gas, the resist is likely to be scraped or peeled off. Furthermore, in order to uniformly process the entire surface to be processed due to the increase in size of the display device including the display element, it is necessary to lengthen the dry etching processing time or increase the concentration of the etching gas. Improvement of dry etching resistance and surface hardness of an interlayer insulating film with respect to severe dry etching conditions is required.

  In order to realize such high performance, for example, an acrylic polymer that generates a carboxyl group, a polymer having a functional group that reacts with the carboxyl group (see JP 2009-98673 A), a polysiloxane material in an acrylic resin, and the like. A technique (see Japanese Patent Application Laid-Open No. 2009-98661 and Japanese Patent Application Laid-Open No. 2009-116223) using the added material as a component of the radiation-sensitive resin composition has been proposed.

  However, in these technologies, in addition to high dry etching resistance, it is possible to form an interlayer insulating film for display elements having good heat resistance, transparency, surface hardness, refractive index, and radiation sensitivity with sufficient radiation sensitivity. The resin composition has not been obtained yet.

JP 2009-98673 A JP 2009-98661 A JP 2009-116223 A

  The present invention has been made based on the above circumstances, and its purpose is an interlayer insulating film for a display element having high dry etching resistance in addition to sufficient surface hardness, refractive index, heat resistance and transparency. And a positive radiation sensitive composition having sufficient radiation sensitivity, an interlayer insulating film for display elements formed from the composition, and a method for forming the same.

（式（１）中、Ｒ^１及びＲ^２は、それぞれ独立して水素原子、アルキル基、シクロアルキル基又はアリール基である。但し、上記アルキル基、シクロアルキル基及びアリール基が有する水素原子の一部又は全部は、置換されていてもよい。また、Ｒ^１及びＲ^２が共に水素原子である場合はない。Ｒ^３は、アルキル基、シクロアルキル基、アラルキル基、アリール基又は−Ｍ（Ｒ^３ｍ）_３で表される基である。このＭは、Ｓｉ、Ｇｅ又はＳｎである。Ｒ^３ｍは、それぞれ独立してアルキル基である。また、Ｒ^１とＲ^３とが連結して環状エーテル構造を形成してもよい。但し、Ｒ^３で表されるこれらの基が有する水素原子の一部又は全部は、置換されていてもよい。）The invention made to solve the above problems is
[A] A polymer comprising a structural unit (I) having a group represented by the following formula (1) and an epoxy group-containing structural unit (II) in the same or different polymer molecules (hereinafter referred to as “[A] Also referred to as "polymer"),
[B] A positive-type radiation-sensitive composition containing a siloxane polymer and [C] a photoacid generator.

(In formula (1), R ¹ and R ² are each independently a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group, provided that the hydrogen atom of the alkyl group, cycloalkyl group and aryl group is A part or all of them may be substituted, and R ¹ and R ² are not both hydrogen atoms, and R ³ is an alkyl group, a cycloalkyl group, an aralkyl group, an aryl group, or —M ( R ^3m ) is a group represented by _3. M is Si, Ge or Sn, each R ^3m is independently an alkyl group, and R ¹ and R ³ are linked to form a ring. An ether structure may be formed, provided that a part or all of the hydrogen atoms of these groups represented by R ³ may be substituted.)

  The positive radiation sensitive composition can ensure sufficient radiation sensitivity by blending [B] siloxane polymer in addition to the [A] polymer and [C] photoacid generator of the above specific structure, It is possible to form a cured film such as an interlayer insulating film that satisfies the surface hardness, refractive index, heat resistance and transparency in a well-balanced manner and has high dry etching resistance.

（式（２）中、Ｒ^４は、炭素数１〜２０の非加水分解性の有機基である。Ｒ^５は、炭素数１〜４のアルキル基である。ｎは、０から３の整数である。但し、Ｒ^４及びＲ^５が複数の場合、複数のＲ^４及びＲ^５はそれぞれ同一であっても異なっていてもよい。）[B] The siloxane polymer is preferably a hydrolysis-condensation product of a hydrolyzable silane compound represented by the following formula (2).

(In Formula (2), R ⁴ is a non-hydrolyzable organic group having 1 to 20 carbon atoms. R ⁵ is an alkyl group having 1 to 4 carbon atoms. N is an integer of 0 to 3) it is. However, if R ⁴ and R ⁵ is plural, may be different even plurality of R ⁴ and R ⁵ are identical.)

  In the positive-type radiation-sensitive composition, by using a hydrolysis condensate of the hydrolyzable silane compound represented by the above formula (2) as the [B] siloxane polymer, the surface is secured while ensuring sufficient radiation sensitivity. An interlayer insulating film for a display element with further improved hardness and dry etching resistance can be formed.

  In the positive radiation sensitive composition, the mass ratio of the [A] polymer to the total of the [A] polymer and the [B] siloxane polymer is preferably 5% by mass or more and 95% by mass or less. By setting the mass ratio of [A] polymer to the total of [A] polymer and [B] siloxane polymer within the specific range, a positive radiation-sensitive composition having higher radiation sensitivity can be obtained, As a result, an interlayer insulating film for a display element having higher refractive index, transparency, and dry etching resistance can be formed.

  The positive radiation-sensitive composition is suitable as a material for forming an interlayer insulating film for display elements. Further, the present invention suitably includes an interlayer insulating film for a display element formed from the positive radiation sensitive composition.

The method for forming an interlayer insulating film for a display element according to the present invention includes:
(1) The process of forming the coating film of the said positive type radiation sensitive composition on a board | substrate,
(2) A step of irradiating at least a part of the coating film with radiation,
(3) a step of developing the coating film irradiated with the radiation; and (4) a step of heating the developed coating film.

  In this method, the positive radiation sensitive composition has good radiation sensitivity, and the formed interlayer insulating film for display elements has high dry etching resistance, so that a large dry etching margin can be secured. Even if it is a display element interlayer insulation film for a large display device that has been difficult to process uniformly and in a short time in the past, an interlayer insulation film for a display element having a fine and elaborate pattern is easily formed. can do. Furthermore, it is possible to obtain an interlayer insulating film for a display element that satisfies a good balance of surface hardness, refractive index, heat resistance and transparency.

  As described above, the positive radiation sensitive composition of the present invention has sufficient radiation sensitivity by containing the [A] polymer, the [B] siloxane polymer, and the [C] photoacid generator. . In addition, it is possible to form an interlayer insulating film for a display element that satisfies heat resistance, transparency, surface hardness, and refractive index in a well-balanced manner and has high dry etching resistance.

<Positive radiation sensitive composition>
The positive radiation sensitive composition of the present invention contains a [A] polymer, a [B] siloxane polymer, and a [C] photoacid generator. Moreover, the said positive type radiation sensitive composition may contain [D] surfactant and [E] adhesion | attachment adjuvant, a [F] basic compound, and a [G] quinonediazide compound as a suitable component. Furthermore, other optional components may be contained as long as the effects of the present invention are not impaired. Hereinafter, each component will be described in detail.

<[A] polymer>
[A] The polymer contains the structural unit (I) and the epoxy group-containing structural unit (II) in the same or different polymer molecules. Moreover, the other structural unit may be included as needed. The embodiment of the [A] polymer containing the structural unit (I) and the epoxy group-containing structural unit (II) is not particularly limited. For example, (i) containing the structural unit (I) and the epoxy group in the same polymer molecule When both of the structural units (II) are contained and [A] one polymer molecule is present in the polymer;
(Ii) The structural unit (I) is contained in one polymer molecule, and the epoxy group-containing structural unit (II) is contained in a polymer molecule different from the structural unit (I). When coalesced molecules are present;
(Iii) The polymer unit includes both the structural unit (I) and the epoxy group-containing structural unit (II) in one polymer molecule, and includes the structural unit (I) in a different polymer molecule. When the epoxy group-containing structural unit (II) is contained in different polymer molecules, and [A] three kinds of polymer molecules are present in the polymer;
(Iv) In addition to the polymer molecules specified in (i) to (iii), there may be mentioned a case where [A] the polymer further contains one or more polymer molecules. In either case, the effects of the present invention can be enjoyed. In addition, the [A] polymer may contain 2 or more types of each structural unit. Hereinafter, each structural unit will be described in detail.

[Structural unit (I)]
In the structural unit (I), the group represented by the above formula (1) exists as a group (acid dissociable group) that dissociates in the presence of an acid to generate a polar group. C] The acid-dissociable group is dissociated by the acid generated from the photoacid generator, and as a result, the [A] polymer which is insoluble in alkali becomes alkali-soluble. The acid dissociable group has an acetal structure or a ketal structure that is relatively stable with respect to an alkali, and these are dissociated by the action of an acid.

In said formula (1), R < ¹ > and R < ² > are respectively independently a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group. However, one part or all part of the hydrogen atom which the said alkyl group, a cycloalkyl group, and an aryl group have may be substituted. Further, there is no case where R ¹ and R ² are both hydrogen atoms. R ³ is an alkyl group, a cycloalkyl group, an aralkyl group, an aryl group, or a group represented by —M (R ^3m ) ₃ . This M is Si, Ge, or Sn. R ^3m is each independently an alkyl group. R ¹ and R ³ may be linked to form a cyclic ether structure. However, one part or all part of the hydrogen atom which these groups represented by R < ³ > have may be substituted.

Examples of the alkyl group represented by R ¹ and R ² include linear and branched alkyl groups having 1 to 30 carbon atoms. The alkyl chain may have an oxygen atom, a sulfur atom, or a nitrogen atom. Examples of the linear and branched alkyl group having 1 to 30 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, and an n-octyl group. , N-dodecyl group, n-tetradecyl group, n-octadecyl group and other linear alkyl groups, i-propyl group, i-butyl group, t-butyl group, neopentyl group, 2-hexyl group, 3-hexyl group And a branched alkyl group such as.

Examples of the cycloalkyl group represented by R ¹ and R ² include a cycloalkyl group having 3 to 20 carbon atoms. Moreover, this C3-C20 cycloalkyl group may be polycyclic and may have an oxygen atom in the ring. Examples of the cycloalkyl group having 3 to 20 carbon atoms include a cyclopropyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a bornyl group, a norbornyl group, an adamantyl group, and the like.

Examples of the aryl group represented by R ¹ and R ² include an aryl group having 6 to 14 carbon atoms. The aryl group having 6 to 14 carbon atoms may be a single ring, a structure in which single rings are connected, or a condensed ring. Examples of the aryl group having 6 to 14 carbon atoms include a phenyl group and a naphthyl group.

Examples of the optionally substituted alkyl group, cycloalkyl group and aryl group represented by R ¹ and R ² include a halogen atom, a hydroxyl group, a nitro group, a cyano group, a carboxyl group, a carbonyl group, a cyclo group. An alkyl group (eg, cyclopropyl group, cyclopentyl group, cyclohexyl group, cycloheptyl, cyclooctyl, bornyl group, norbornyl group, adamantyl group, etc.), aryl group (eg, phenyl group, naphthyl group, etc.), alkoxy group (eg, methoxy group) , An ethoxy group, a propoxy group, an n-butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group and the like, and an acyl group (for example, an acetyl group and a propionyl group). , Butyryl group, i-butyryl group and the like having 2 to 20 carbon atoms A siloxy group), an acyloxy group (for example, an acetoxy group, an ethylyloxy group, a butyryloxy group, a t-butyryloxy group, a t-amylyloxy group, etc., an acyloxy group having 2 to 10 carbon atoms), an alkoxycarbonyl group (for example, a methoxycarbonyl group) C2-C20 alkoxycarbonyl groups such as ethoxycarbonyl group and propoxycarbonyl group), haloalkyl groups (for example, methyl group, ethyl group, n-propyl group, n-butyl group, n-pentyl group, n-hexyl group) , N-octyl group, n-dodecyl group, n-tetradecyl group, n-octadecyl group and the like linear alkyl group, i-propyl group, i-butyl group, t-butyl group, neopentyl group, 2-hexyl group Alkyl groups such as branched alkyl groups such as 3-hexyl group; cyclopropyl group, cyclobutyl group, A group in which part or all of the hydrogen atoms of a cycloalkyl group such as a cyclopentyl group, a norbornyl group, and an adamantyl group are substituted with a halogen atom).

As the alkyl group, cycloalkyl group, and aryl group represented by R ³ , for example, the groups exemplified for R ¹ and R ² can be applied. As the substituent for these groups, for example, the groups exemplified as the substituents for the optionally substituted alkyl group, cycloalkyl group and aryl group represented by R ¹ and R ² can be applied. Examples of the aralkyl group represented by R ³ include an aralkyl group having 7 to 20 carbon atoms. Examples of the aralkyl group having 7 to 20 carbon atoms include a benzyl group, a phenethyl group, a naphthylmethyl group, and a naphthylethyl group.

Examples of the group represented by -M (R ^3m ) ₃ include a trimethylsilanyl group and a trimethylgermyl group. As the substituent which may substitute part or all of the hydrogen atoms of the aralkyl group represented by R ³ or the group represented by —M (R ^3m ) ₃ , the above substituents are preferably employed. be able to. As the substituent of this group, for example, the groups exemplified as the substituents of the optionally substituted alkyl group, cycloalkyl group and aryl group represented by R ¹ and R ² can be applied.

Examples of the group having a cyclic ether structure that may be formed by linking R ¹ and R ³ include 2,2-oxetanediyl group, 2,2-tetrahydrofurandiyl group, 2-tetrahydropyrandiyl group, 2 -A dioxane diyl group etc. are mentioned.

  The structural unit (I) can have an acetal structure or a ketal structure by having a functional group that should have an acetal structure or a ketal structure by bonding to another carbon atom.

  Examples of the functional group that should have an acetal structure by bonding to the other carbon atom include 1-methoxyethoxy group, 1-ethoxyethoxy group, 1-n-propoxyethoxy group, 1-i-propoxyethoxy. Group, 1-n-butoxyethoxy group, 1-i-butoxyethoxy group, 1-sec-butoxyethoxy group, 1-t-butoxyethoxy group, 1-cyclopentyloxyethoxy group, 1-cyclohexyloxyethoxy group, 1- Norbornyloxyethoxy group, 1-bornyloxyethoxy group, 1-phenyloxyethoxy group, 1- (1-naphthyloxy) ethoxy group, 1-benzyloxyethoxy group, 1-phenethyloxyethoxy group, (cyclohexyl) (Methoxy) methoxy group, (cyclohexyl) (ethoxy) methoxy group (Cyclohexyl) (n-propoxy) methoxy group, (cyclohexyl) (i-propoxy) methoxy group, (cyclohexyl) (cyclohexyloxy) methoxy group, (cyclohexyl) (phenoxy) methoxy group, (cyclohexyl) (benzyloxy) methoxy group , (Phenyl) (methoxy) methoxy group, (phenyl) (ethoxy) methoxy group, (phenyl) (n-propoxy) methoxy group, (phenyl) (i-propoxy) methoxy group, (phenyl) (cyclohexyloxy) methoxy group , (Phenyl) (phenoxy) methoxy group, (phenyl) (benzyloxy) methoxy group, (benzyl) (methoxy) methoxy group, (benzyl) (ethoxy) methoxy group, (benzyl) (n-propoxy) methoxy group, Benzyl) (i-propo Ii) methoxy group, (benzyl) (cyclohexyloxy) methoxy group, (benzyl) (phenoxy) methoxy group, (benzyl) (benzyloxy) methoxy group, 2-tetrahydrofuranyloxy group, 2-tetrahydropyranyloxy group, 1 -A trimethylsilanyloxyethoxy group, 1-trimethylgermyloxyethoxy group, etc. are mentioned.

  Of these, 1-ethoxyethoxy group, 1-cyclohexyloxyethoxy group, 2-tetrahydropyranyloxy group, 1-n-propoxyethoxy group, and 2-tetrahydropyranyloxy group are preferable.

  Examples of the functional group that should have a ketal structure by bonding to the other carbon atom include 1-methyl-1-methoxyethoxy group, 1-methyl-1-ethoxyethoxy group, 1-methyl-1 -N-propoxyethoxy group, 1-methyl-1-i-propoxyethoxy group, 1-methyl-1-n-butoxyethoxy group, 1-methyl-1-i-butoxyethoxy group, 1-methyl-1-sec -Butoxyethoxy group, 1-methyl-1-t-butoxyethoxy group, 1-methyl-1-cyclopentyloxyethoxy group, 1-methyl-1-cyclohexyloxyethoxy group, 1-methyl-1-norbornyloxyethoxy 1-methyl-1-bornyloxyethoxy group, 1-methyl-1-phenyloxyethoxy group, 1-methyl-1- (1-naphth Ruoxy) ethoxy group, 1-methyl-1-benzyloxyoxyethoxy group, 1-methyl-1-phenethyloxyethoxy group, 1-cyclohexyl-1-methoxyethoxy group, 1-cyclohexyl-1-ethoxyethoxy group, 1- Cyclohexyl-1-n-propoxyethoxy group, 1-cyclohexyl-1-i-propoxyethoxy group, 1-cyclohexyl-1-cyclohexyloxyethoxy group, 1-cyclohexyl-1-phenoxyethoxy group, 1-cyclohexyl-1-benzyl Oxyethoxy group, 1-phenyl-1-methoxyethoxy group, 1-phenyl-1-ethoxyethoxy group, 1-phenyl-1-n-propoxyethoxy group, 1-phenyl-1-i-propoxyethoxy group, A phenyl-1-cyclohexyloxyethoxy group, -Phenyl-1-phenyloxyethoxy group, 1-phenyl-1-benzyloxyethoxy group, 1-benzyl-1-methoxyethoxy group, 1-benzyl-1-ethoxyethoxy group, 1-benzyl-1-n-propoxy Ethoxy group, 1-benzyl-1-i-propoxyethoxy group, 1-benzyl-1-cyclohexyloxyethoxy group, 1-benzyl-1-phenyloxyethoxy group, 1-benzyl-1-benzyloxyethoxy group, 2- (2-Methyl-tetrahydrofuranyl) oxy group, 2- (2-methyl-tetrahydropyranyl) oxy group, 1-methoxy-cyclopentyloxy group, 1-methoxy-cyclohexyloxy group and the like can be mentioned.

  Of these, a 1-methyl-1-methoxyethoxy group and a 1-methyl-1-cyclohexyloxyethoxy group are preferable.

  Examples of the structural unit (I) having the acetal structure or ketal structure include structural units represented by the following formulas (1-1) to (1-3).

In the above formulas (1-1) to (1-3), R ′ is a hydrogen atom or a methyl group. R ¹ , R ² and R ³ have the same meaning as in the above formula (1).

Examples of the monomer that gives the structural unit (I) represented by the above formulas (1-1) to (1-3) include 1-alkoxyalkyl (meth) acrylate, 1- (cycloalkyloxy) alkyl (meta ) Acrylate, 1- (haloalkoxy) alkyl (meth) acrylate, 1- (aralkyloxy) alkyl (meth) acrylate, (meth) acrylate acetal structure-containing monomers such as tetrahydropyranyl (meth) acrylate;
2,3-di (1- (trialkylsilanyloxy) alkoxy) carbonyl) -5-norbornene, 2,3-di (1- (trialkylgermyloxy) alkoxy) carbonyl) -5-norbornene, 2, 3-di (1-alkoxyalkoxycarbonyl) -5-norbornene, 2,3-di (1- (cycloalkyloxy) alkoxycarbonyl) -5-norbornene, 2,3-di (1- (aralkyloxy) alkoxycarbonyl ) Norbornene-based acetal structure-containing monomers such as -5-norbornene;
Examples thereof include styrene acetal structure-containing monomers such as 1-alkoxyalkoxystyrene, 1- (haloalkoxy) alkoxystyrene, 1- (aralkyloxy) alkoxystyrene, and tetrahydropyranyloxystyrene.

  Among these, 1-alkoxyalkyl (meth) acrylate, tetrahydropyranyl (meth) acrylate, 1-alkoxyalkoxystyrene, and tetrahydropyranyloxystyrene are preferable, and 1-alkoxyalkyl (meth) acrylate is more preferable.

Specific monomers that give the structural unit (I) represented by the above formulas (1-1) to (1-3) include, for example, 1-ethoxyethyl methacrylate, 1-methoxyethyl methacrylate, 1-n- Butoxyethyl methacrylate, 1-isobutoxyethyl methacrylate, 1-t-butoxyethyl methacrylate, 1- (2-chloroethoxy) ethyl methacrylate, 1- (2-ethylhexyloxy) ethyl methacrylate, 1-n-propoxyethyl methacrylate, 1 -Methacrylate acetal structure-containing monomers such as cyclohexyloxyethyl methacrylate, 1- (2-cyclohexylethoxy) ethyl methacrylate, 1-benzyloxyethyl methacrylate, 2-tetrahydropyranyl methacrylate;
1-ethoxyethyl acrylate, 1-methoxyethyl acrylate, 1-n-butoxyethyl acrylate, 1-isobutoxyethyl acrylate, 1-t-butoxyethyl acrylate, 1- (2-chloroethoxy) ethyl acrylate, 1- (2 -Ethylhexyloxy) ethyl acrylate, 1-n-propoxyethyl acrylate, 1-cyclohexyloxyethyl acrylate, 1- (2-cyclohexylethoxy) ethyl acrylate, 1-benzyloxyethyl acrylate, 2-tetrahydropyranyl acrylate, etc. Acetal structure-containing monomer;
2,3-di (1- (trimethylsilanyloxy) ethoxy) carbonyl) -5-norbornene, 2,3-di (1- (trimethylgermyloxy) ethoxy) carbonyl) -5-norbornene, 2,3- Di (1-methoxyethoxycarbonyl) -5-norbornene, 2,3-di (1- (cyclohexyloxy) ethoxycarbonyl) -5-norbornene, 2,3-di (1- (benzyloxy) ethoxycarbonyl) -5 A monomer containing a norbornene-based acetal structure such as norbornene;
p or m-1-ethoxyethoxystyrene, p or m-1-methoxyethoxystyrene, p or m-1-n-butoxyethoxystyrene, p or m-1-isobutoxyethoxystyrene, p or m-1- ( 1,1-dimethylethoxy) ethoxystyrene, p or m-1- (2-chloroethoxy) ethoxystyrene, p or m-1- (2-ethylhexyloxy) ethoxystyrene, p or m-1-n-propoxyethoxy Styrene acetal structure-containing monomers such as styrene, p or m-1-cyclohexyloxyethoxystyrene, p or m-1- (2-cyclohexylethoxy) ethoxystyrene, p or m-1-benzyloxyethoxystyrene, etc. Can be mentioned. These monomers can be used alone or in combination of two or more.

  Among these, as the monomer giving the structural unit (I), 1-ethoxyethyl methacrylate, 1-n-butoxyethyl methacrylate, 2-tetrahydropyranyl methacrylate, and 1-benzyloxyethyl methacrylate are preferable.

  As the monomer that gives the structural unit (I), a commercially available monomer may be used, or a monomer synthesized by a known method may be used. For example, the monomer that gives the structural unit (I) represented by the above formula (1-1) is synthesized by reacting (meth) acrylic acid with vinyl ether in the presence of an acid catalyst as shown in the following formula. can do.

In the above formulas, R ', ^{R 1} and ^{R 3} is as defined in the above formula (1-1). R ²¹ and R ²² are the same as R ² in the above formula (1-1) as —CH (R ²¹ ) (R ²² ).

  [A] The content of the structural unit (I) in the polymer is not particularly limited as long as the polymer [A] is alkali-soluble by an acid and exhibits the desired heat resistance of the cured film. When the polymer molecule contains both the structural unit (I) and the epoxy group-containing structural unit (II), the monomer charge ratio with respect to all structural units contained in the [A] polymer is 5% by mass or more and 70% by mass. % By mass or less is preferable, 10% by mass to 60% by mass is more preferable, and 20% by mass to 50% by mass is particularly preferable.

  On the other hand, when one polymer molecule contains the structural unit (I) and the other polymer molecule contains the epoxy group-containing structural unit (II), the one polymer molecule having the structural unit (I) The content of the structural unit (I) in is preferably 40% by mass or more and 99% by mass or less, more preferably 50% by mass or more and 98% by mass with respect to the total structural units contained in the polymer molecule. % Or less is more preferable, and 55 mass% or more and 95 mass% or less are especially preferable.

[Epoxy group-containing structural unit (II)]
The epoxy group-containing structural unit (II) is not particularly limited as long as it is a structural unit derived from an epoxy group-containing monomer. [A] When the polymer contains the epoxy group-containing structural unit (II) in the molecule, the surface hardness and heat resistance of the cured film obtained from the positive radiation-sensitive composition can be further increased. In addition, the epoxy group of this specification is a concept including an oxiranyl group (1,2-epoxy structure) and an oxetanyl group (1,3-epoxy structure).

Examples of the monomer that gives the epoxy group-containing structural unit (II) include glycidyl (meth) acrylate, 3,4-epoxybutyl (meth) acrylate, 3-methyl-3,4-epoxybutyl acrylate, methacryl 3-ethyl-3,4-epoxybutyl acid, 5,6-epoxyhexyl (meth) acrylate, 5-methyl-5,6-epoxyhexyl methacrylate, 5-ethyl-5,6-epoxyhexyl methacrylate, (Meth) acrylic acid 6,7-epoxyheptyl, 3,4-epoxycyclohexyl methacrylate, 3,4-epoxycyclohexylmethyl methacrylate, 3,4-epoxycyclohexylethyl (meth) acrylate, methacrylic acid 3,4-epoxycyclohexylpropyl, 3,4-epoxycyclohexylbutyl methacrylate, 3,4-epoxycyclohexylhexyl (meth) acrylate, 3,4-epoxycyclohexylmethyl acrylate, 3,4-epoxycyclohexylethyl acrylate, 3,4-epoxycyclohexylpropyl acrylate, acrylic Oxiranyl group-containing (meth) acrylic compounds such as acid 3,4-epoxycyclohexylbutyl and 3,4-epoxycyclohexylhexyl acrylate;
o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, p-vinyl benzyl glycidyl ether, α-methyl-o-vinyl benzyl glycidyl ether, α-methyl-m-vinyl benzyl glycidyl ether, α-methyl-p-vinyl Vinyl benzyl glycidyl ethers such as benzyl glycidyl ether;
vinyl phenyl glycidyl ethers such as o-vinyl phenyl glycidyl ether, m-vinyl phenyl glycidyl ether, p-vinyl phenyl glycidyl ether;
3-acryloyloxymethyloxetane, 3-acryloyloxymethyl-3-methyloxetane, 3-acryloyloxymethyl-3-ethyloxetane, 3-acryloyloxymethyl-3-phenyloxetane, 3- (2-acryloyloxyethyl) oxetane 3- (2-acryloyloxyethyl) -3-ethyloxetane, 3- (2-acryloyloxyethyl) -3-ethyloxetane, 3- (2-acryloyloxyethyl) -3-phenyloxetane, 3-methacryloyloxy Methyl oxetane, 3-methacryloyloxymethyl-3-methyloxetane, 3-methacryloyloxymethyl-3-ethyloxetane, 3-methacryloyloxymethyl-3-phenyloxetane, 3- (2-methacryloyloxye) Oxetane, 3- (2-methacryloyloxyethyl) -3-ethyloxetane, 3- (2-methacryloyloxyethyl) -3-ethyloxetane, 3- (2-methacryloyloxyethyl) -3-phenyloxetane, 2 -Acryloyloxymethyloxetane, 2-acryloyloxymethyl-2-methyloxetane, 2-acryloyloxymethyl-2-ethyloxetane, 2-acryloyloxymethyl-2-phenyloxetane, 2- (2-acryloyloxyethyl) oxetane, 2- (2-acryloyloxyethyl) -2-ethyloxetane, 2- (2-acryloyloxyethyl) -2-ethyloxetane, 2- (2-acryloyloxyethyl) -2-phenyloxetane, 2-methacryloyloxymethyl Oh Cetane, 2-methacryloyloxymethyl-2-methyloxetane, 2-methacryloyloxymethyl-2-ethyloxetane, 2-methacryloyloxymethyl-2-phenyloxetane, 2- (2-methacryloyloxyethyl) oxetane, 2- (2 -Methacryloyloxyethyl) -2-ethyloxetane, 2- (2-methacryloyloxyethyl) -2-ethyloxetane, 2- (2-methacryloyloxyethyl) -2-phenyloxetane, and other oxetanyl group-containing (meth) acrylic compounds Compounds and the like. These monomers can be used alone or in combination of two or more.

  Among these monomers, glycidyl methacrylate, 2-methylglycidyl methacrylate, methacrylic acid-3,4-epoxycyclohexyl, methacrylic acid-3,4-epoxycyclohexylmethyl, 3- (methacryloyloxymethyl) -3 -Methyl oxetane and 3- (methacryloyloxymethyl) -3-ethyl oxetane are preferable from the viewpoint of copolymerization reactivity with other monomers and developability of the positive radiation-sensitive composition.

  [A] The content of the epoxy group-containing structural unit (II) in the polymer is not particularly limited as long as the desired heat resistance of the interlayer insulating film for display elements is exhibited, and the structural unit ( When I) and the epoxy group-containing structural unit (II) are included, the monomer charge ratio is preferably 10% by mass or more and 60% by mass or less with respect to all the structural units contained in the [A] polymer. More preferably, the content is greater than or equal to 55% and less than or equal to 55% by weight, particularly preferably greater than or equal to 20% and less than or equal to 50%.

  On the other hand, when one polymer molecule has the structural unit (I) and the other polymer molecule contains the epoxy group-containing structural unit (II), another polymer containing the epoxy group-containing structural unit (II) The content of the epoxy group-containing structural unit (II) with respect to all the structural units contained in the molecule is preferably 20% by mass to 80% by mass, more preferably 30% by mass to 70% by mass, as a monomer charge ratio. Preferably, 35 mass% or more and 65 mass% or less are especially preferable.

[Other structural units]
[A] The polymer may contain other structural units other than the structural unit (I) and the structural unit (II) as long as the effects of the present invention are not impaired.

  Examples of the monomer that gives other structural units include a carboxyl group or a derivative thereof, and a monomer having a hydroxyl group.

  Examples of the monomer having a carboxyl group or a derivative thereof include acrylic acid, methacrylic acid, crotonic acid, 2-acryloyloxyethyl succinic acid, 2-methacryloyloxyethyl succinic acid, 2-acryloyloxyethyl hexahydrophthalic acid, Examples thereof include monocarboxylic acids such as 2-methacryloyloxyethyl hexahydrophthalic acid; dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; and acid anhydrides of the above dicarboxylic acids.

  Examples of the monomer having a hydroxyl group include acrylic acid-2-hydroxyethyl ester, acrylic acid-3-hydroxypropyl ester, acrylic acid-4-hydroxybutyl ester, acrylic acid-4-hydroxymethylcyclohexylmethyl ester, and the like. Acrylic acid hydroxyalkyl ester; methacrylic acid-2-hydroxyethyl ester, methacrylic acid-3-hydroxypropyl ester, methacrylic acid-4-hydroxybutyl ester, methacrylic acid-5-hydroxypentyl ester, methacrylic acid-6-hydroxyhexyl ester And methacrylic acid hydroxyalkyl esters such as methacrylic acid-4-hydroxymethyl-cyclohexylmethyl ester.

  Among these monomers having a hydroxyl group, from the viewpoint of copolymerization reactivity with other monomers and the heat resistance of the obtained interlayer insulating film for display elements, acrylic acid-2-hydroxyethyl ester, acrylic acid- 3-hydroxypropyl ester, acrylic acid-4-hydroxybutyl ester, methacrylic acid-2-hydroxyethyl ester, methacrylic acid-4-hydroxybutyl ester, acrylic acid-4-hydroxymethyl-cyclohexylmethyl ester, methacrylic acid-4- Hydroxymethyl-cyclohexylmethyl ester is preferred.

Examples of other monomers include acrylic acid alkyl esters such as methyl acrylate and i-propyl acrylate;
Alkyl methacrylates such as methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, sec-butyl methacrylate, t-butyl methacrylate;
Cyclohexyl acrylate, acrylate-2-methylcyclohexyl, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl acrylate, acrylate-2- (tricyclo [5.2.1.0 ^{2, 6} ] Acrylic alicyclic alkyl ester such as decan-8-yloxy) ethyl, isobornyl acrylate;
Cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate, methacrylic acid-2- (tricyclo [5.2.1.0 ^{2, 6} ] decano-8-yloxy) ethyl, methacrylic acid alicyclic alkyl esters such as isobornyl methacrylate;
Aryl esters of acrylic acid such as phenyl acrylate and benzyl acrylate and aralkyl esters of acrylic acid;
Aryl esters of methacrylic acid such as phenyl methacrylate and benzyl methacrylate and aralkyl esters of methacrylic acid;
Dicarboxylic acid dialkyl esters such as diethyl maleate, diethyl fumarate, diethyl itaconate;
Unsaturated 5-membered ring methacrylates and unsaturated 6-membered ring methacrylates containing 1 atom of oxygen such as tetrahydrofurfuryl methacrylate, tetrahydrofuryl methacrylate, tetrahydropyran-2-methyl methacrylate;
4-methacryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-methacryloyloxymethyl-2-methyl-2-isobutyl-1,3-dioxolane, 4-methacryloyloxymethyl-2-cyclohexyl- 2 oxygen atoms such as 1,3-dioxolane, 4-methacryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-methacryloyloxymethyl-2-methyl-2-isobutyl-1,3-dioxolane Unsaturated heterocyclic 5-membered methacrylates containing:
4-acryloyloxymethyl-2,2-dimethyl-1,3-dioxolane, 4-acryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-acryloyloxymethyl-2, 2-diethyl- 1,3-dioxolane, 4-acryloyloxymethyl-2-methyl-2-isobutyl-1,3-dioxolane, 4-acryloyloxymethyl-2-cyclopentyl-1,3-dioxolane, 4-acryloyloxymethyl-2- Cyclohexyl-1,3-dioxolane, 4-acryloyloxyethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-acryloyloxypropyl-2-methyl-2-ethyl-1,3-dioxolane, 4- Acryloyloxybutyl-2-methyl-2-ethyl-1,3-dioxola Unsaturated five-membered heterocyclic acrylic acid esters containing oxygen 2 atoms and the like;
Vinyl aromatic compounds such as styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, p-methoxystyrene, 4-isopropenylphenol;
N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimidocaproate, N-succinimidyl-3 -N-substituted maleimides such as maleimide propionate, N- (9-acridinyl) maleimide;
Conjugated diene compounds such as 1,3-butadiene, isoprene and 2,3-dimethyl-1,3-butadiene;
Other unsaturated compounds such as acrylonitrile, methacrylonitrile, acrylamide, methacrylamide, vinyl chloride, vinylidene chloride and vinyl acetate can be mentioned.

Among these other monomers, styrene, 4-isopropenylphenol, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate, tetrahydrofurfuryl methacrylate, 1,3-butadiene 4-acryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, N-cyclohexylmaleimide, N-phenylmaleimide, and benzyl methacrylate are copolymerized with monomers having the above reactive functional groups This is preferable in terms of reactivity and developability of the positive radiation-sensitive composition.

[A] Polystyrene conversion weight average molecular weight (Mw) by gel permeation chromatography (GPC) of the polymer is preferably 2.0 × 10 ^{3 to} 1.0 × 10 ⁵ , more preferably 5.0 × 10. ^{3 to} 5.0 × 10 ⁴ . [A] By setting the Mw of the polymer within the specific range, the radiation sensitivity of the positive radiation-sensitive composition and the surface hardness of the interlayer insulating film for display elements formed from the composition can be increased. .

[A] The number average molecular weight (Mn) in terms of polystyrene by GPC of the polymer is preferably 2.0 × 10 ^{3 to} 1.0 × 10 ⁵ , more preferably 5.0 × 10 ^{3 to} 5.0 × 10. ⁴ . [A] By making Mn of a polymer into the said specific range, the cure reactivity at the time of hardening of the coating film of the said positive type radiation sensitive composition can be improved.

  [A] The molecular weight distribution (Mw / Mn) of the polymer is preferably 3.0 or less, more preferably 2.6 or less. [A] By setting Mw / Mn of the polymer to 3.0 or less, the developability of the obtained interlayer insulating film for display elements can be enhanced. [A] The positive-type radiation-sensitive composition containing a polymer can easily form a desired pattern shape without causing a development residue during development.

In addition, Mw and Mn of this specification were measured by GPC under the following conditions.
Apparatus: GPC-101 (made by Showa Denko)
Column: GPC-KF-801, GPC-KF-802, GPC-KF-803 and GPC-KF-804 are combined Mobile phase: Tetrahydrofuran Column temperature: 40 ° C
Flow rate: 1.0 mL / min Sample concentration: 1.0% by mass
Sample injection volume: 100 μL
Detector: Differential refractometer Standard material: Monodisperse polystyrene

<[A] Polymer Synthesis Method>
[A] The polymer can be synthesized by radical copolymerization of monomers giving the above structural units. For example, when synthesizing a polymer [A] containing both the structural unit (I) and the epoxy group-containing structural unit (II) in the same polymer molecule, a monomer and an epoxy group that give the structural unit (I) What is necessary is just to copolymerize using the mixture containing the monomer which gives containing structural unit (II). On the other hand, when the [A] polymer having the structural unit (I) in one polymer molecule and the epoxy group-containing structural unit (II) in a different polymer molecule is synthesized, the structural unit (I The polymer solution containing the monomer that gives the epoxy group-containing structural unit (II) is obtained by radically polymerizing a polymerizable solution containing the monomer that gives the structural unit (I) to obtain a polymer molecule having the structural unit (I). May be radically polymerized to obtain a polymer molecule having an epoxy group-containing structural unit (II), and finally, both may be mixed to obtain a polymer [A].

  [A] Examples of the solvent used in the polymerization reaction of the polymer include the solvents exemplified in the section of preparation of the composition described later.

  As the polymerization initiator used in the polymerization reaction, those generally known as radical polymerization initiators can be used. For example, 2,2′-azobisisobutyronitrile, 2,2′-azobis- ( 2,4-Dimethylvaleronitrile), 2,2′-azobis- (4-methoxy-2,4-dimethylvaleronitrile), azo compounds such as 2,2′-azobis (methyl 2-methylpropionate); benzoyl Organic peroxides such as peroxide, lauroyl peroxide, t-butylperoxypivalate, 1,1′-bis- (t-butylperoxy) cyclohexane; hydrogen peroxide and the like. Of these, azo compounds are preferable, and 2,2'-azobis- (2,4-dimethylvaleronitrile) and 2,2'-azobis- (methyl 2-methylpropionate) are more preferable. When a peroxide is used as the radical polymerization initiator, the peroxide may be used together with a reducing agent to form a redox initiator.

  [A] In the polymerization reaction of the polymer, a molecular weight modifier may be used to adjust the molecular weight. Examples of the molecular weight modifier include halogenated hydrocarbons such as chloroform and carbon tetrabromide; mercaptans such as n-hexyl mercaptan, n-octyl mercaptan, n-dodecyl mercaptan, t-dodecyl mercaptan, and thioglycolic acid; Xanthogens such as xanthogen sulfide and diisopropylxanthogen disulfide; terpinolene, α-methylstyrene dimer and the like.

<[B] Siloxane polymer>
[B] The siloxane polymer is not particularly limited as long as it is a polymer having a siloxane bond. This [B] siloxane polymer forms a cured product by self-condensation by heating.

  [B] The siloxane polymer is preferably a hydrolysis-condensation product of a hydrolyzable silane compound represented by the above formula (2). In the positive-type radiation-sensitive composition, by using a hydrolysis condensate of the hydrolyzable silane compound represented by the above formula (2) as the [B] siloxane polymer, the surface is secured while ensuring sufficient radiation sensitivity. An interlayer insulating film for a display element with further improved hardness and dry etching resistance can be formed. The hydrolyzable silane compound in the present specification is usually hydrolyzed by heating within the temperature range of room temperature (about 25 ° C.) to about 100 ° C. in the presence of non-catalyst and excess water. A silane compound having a hydrolyzable group capable of generating a silanol group or a silane compound having a hydrolyzable group capable of forming a siloxane condensate. On the other hand, a non-hydrolyzable group refers to a group that does not cause hydrolysis or condensation and exists stably under such hydrolysis conditions.

  In the hydrolysis reaction of the hydrolyzable silane compound represented by the above formula (2), some hydrolyzable groups may remain in an unhydrolyzed state. The hydrolyzable condensate of the hydrolyzable silane compound refers to a hydrolyzed condensate obtained by reacting and condensing some silanol groups of the hydrolyzed silane compound.

In said formula (2), R < ⁴ > is a C1-C20 nonhydrolyzable organic group. R ⁵ is an alkyl group having 1 to 4 carbon atoms. n is an integer of 0 to 3. However, when R ⁴ and R ⁵ is plural, a plurality of R ⁴ and R ⁵ may each be the same or different.

The non-hydrolyzable organic group having 1 to 20 carbon atoms represented by R ⁴ is an unsubstituted alkyl group having 1 to 12 carbon atoms (vinyl group, (meth) acryloyl group, or epoxy group having one or more). Which may be substituted), an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 12 carbon atoms are preferred. R ⁴ may contain a structural unit having a hetero atom. Examples of such a structural unit include ether, ester, sulfide and the like.

As a C1-C4 alkyl group represented by said R < ⁵ >, a methyl group, an ethyl group, n-propyl group, i-propyl group, a butyl group etc. are mentioned, for example. Among these, a methyl group and an ethyl group are preferable from the viewpoint of easy hydrolysis. n is preferably an integer of 0 to 2, more preferably 0 or 1, and particularly preferably 1. When n is an integer of 0 to 2, the hydrolysis / condensation reaction proceeds more easily, and as a result, the speed of the curing reaction due to the self-condensation of [B] siloxane polymer is further increased, and thus the obtained display. The surface hardness and heat resistance of the element interlayer insulating film can be further improved.

  The hydrolyzable silane compound represented by the above formula (2) is a silane compound substituted with four hydrolyzable groups, substituted with one non-hydrolyzable group and three hydrolyzable groups. Silane compound substituted with two non-hydrolyzable groups and two hydrolyzable groups, substituted with three non-hydrolyzable groups and one hydrolyzable group Examples thereof include a silane compound or a mixture thereof.

Examples of the hydrolyzable silane compound represented by the above formula (2) include tetramethoxysilane, tetraethoxysilane, tetrabutoxysilane, tetraphenoxy, as silane compounds substituted with four hydrolyzable groups, for example. Silane, tetrabenzyloxysilane, tetra-n-propoxysilane, tetra-i-propoxysilane and the like;
As a silane compound substituted with one non-hydrolyzable group and three hydrolyzable groups, chlorotrimethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, methyltri-i-propoxysilane, methyltributoxy Silane, ethyltrimethoxysilane, ethyltriethoxysilane, ethyltri-i-propoxysilane, ethyltributoxysilane, butyltrimethoxysilane, phenyltrimethoxysilane, phenyltriethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltri -N-propoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, 3-acryloxypropyltriethoxysilane Emissions, .gamma.-glycidoxypropyltrimethoxysilane, .gamma.-glycidoxypropyl triethoxy silane, beta-(3,4-epoxycyclohexyl) ethyltrimethoxysilane and the like;
Examples of silane compounds substituted with two non-hydrolyzable groups and two hydrolyzable groups include dichlorodimethoxysilane, dimethyldimethoxysilane, diphenyldimethoxysilane, dibutyldimethoxysilane and the like;
Examples of the silane compound substituted with three non-hydrolyzable groups and one hydrolyzable group include trichloromethoxysilane, tributylmethoxysilane, trimethylmethoxysilane, trimethylethoxysilane, and tributylethoxysilane.

  Of these, silane compounds substituted with 4 hydrolyzable groups, 1 silane compound substituted with 1 non-hydrolyzable group and 3 hydrolyzable groups are preferred, and 1 non-hydrolyzed group More preferred is a silane compound substituted with a functional group and three hydrolyzable groups, tetraethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, methyltri-i-propoxysilane, methyltributoxysilane, phenyltrimethoxy. Silane, ethyltrimethoxysilane, ethyltriethoxysilane, ethyltriisopropoxysilane, ethyltributoxysilane, butyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacrylic Roxypropyltriethoxysilane is particularly preferred, Trimethoxysilane, phenyl trimethoxysilane, .gamma.-glycidoxypropyltrimethoxysilane, 3-methacryloxypropyl trimethoxysilane is most preferable. Such hydrolyzable silane compounds may be used alone or in combination of two or more.

As a condition for hydrolyzing and condensing the hydrolyzable silane compound represented by the above formula (2), at least a part of the hydrolyzable silane compound represented by the above formula (2) is hydrolyzed and hydrolyzed. Although it does not specifically limit as long as it converts a functional group into a silanol group and causes a condensation reaction, for example, it is used for hydrolysis and condensation of the hydrolyzable silane compound represented by the above formula (2) The water to be used is preferably water purified by a method such as reverse osmosis membrane treatment, ion exchange treatment or distillation. By using such purified water, side reactions can be suppressed and the reactivity of hydrolysis can be improved. As the usage-amount of water, Preferably it is 0.1 mol-3 mol with respect to 1 mol of total amounts of the hydrolysable group (-OR < ⁵ >) of the hydrolysable silane compound represented by the said Formula (2), More preferably, it is 0.3 mol-2 mol, Most preferably, it is 0.5 mol-1.5 mol. By using such an amount of water, the hydrolysis / condensation reaction rate can be optimized.

  The solvent that can be used for hydrolysis / condensation of the hydrolyzable silane compound represented by the above formula (2) is usually the same as the solvent used for the preparation of the positive radiation sensitive composition described later. Can be used. As such a solvent, ethylene glycol monoalkyl ether acetates, diethylene glycol dialkyl ethers, propylene glycol monoalkyl ethers, propylene glycol monoalkyl ether acetates, propionic acid esters are preferable, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, Propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monomethyl ether acetate, and methyl 3-methoxypropionate are more preferable.

  The hydrolysis / condensation reaction of the hydrolyzable silane compound represented by the above formula (2) is preferably an acid catalyst (for example, hydrochloric acid, sulfuric acid, nitric acid, formic acid, oxalic acid, acetic acid, trifluoroacetic acid, trifluoromethanesulfonic acid, Phosphoric acid, acidic ion exchange resins, various Lewis acids), basic catalysts (eg, nitrogen-containing compounds such as ammonia, primary amines, secondary amines, tertiary amines, pyridine; basic ion exchange resins; sodium hydroxide It is carried out in the presence of a catalyst such as a carbonate such as potassium carbonate; a carboxylate such as sodium acetate; various Lewis bases; or an alkoxide (eg, zirconium alkoxide, titanium alkoxide, aluminum alkoxide). For example, as the aluminum alkoxide, tri-i-propoxyaluminum, tetra-i-propoxyaluminum, or the like can be used. As a usage-amount of a catalyst, from a viewpoint of acceleration | stimulation of hydrolysis and a condensation reaction, Preferably it is 0.5 mass part or less with respect to 100 mass parts of hydrolysable silane compounds, More preferably, it is 0.00001 mass part- 0.3 parts by mass.

  The reaction temperature in the hydrolysis / condensation of the hydrolyzable silane compound represented by the above formula (2) is preferably 40 ° C to 200 ° C, more preferably 50 ° C to 150 ° C. The reaction time is preferably 30 minutes to 24 hours, more preferably 1 hour to 12 hours. By setting such reaction temperature and reaction time, the hydrolysis / condensation reaction can be performed most efficiently. In this hydrolysis / condensation, the reaction may be carried out in one step by adding the hydrolyzable silane compound, water and catalyst to the reaction system at one time, or the hydrolyzable silane compound, water and catalyst may be added several times. The hydrolysis and condensation reaction may be carried out in multiple stages by adding them separately in the reaction system. In addition, after the hydrolysis / condensation reaction, a dehydrating agent is added, and then water and generated alcohol can be removed from the reaction system by evaporation. The dehydrating agent used at this stage generally has a positive radiation-sensitive composition because excess water is adsorbed or included to completely consume the dehydrating capacity or is removed by evaporation. It does not fall within the category of [I] dehydrating agent to be added later.

As Mw of the hydrolysis condensate of the hydrolyzable silane compound represented by the above formula (2), 5.0 × 10 ^{2 to} 1.0 × 10 ⁴ is usually preferable, and 1.0 × 10 ^{3 to} 5. 0 × 10 ³ is more preferable. By setting Mw to 5.0 × 10 ² or more, the film formability of the coating film of the positive radiation sensitive composition can be improved. On the other hand, by setting Mw to 1.0 × 10 ⁴ or less, it is possible to prevent a decrease in radiation sensitivity of the positive radiation sensitive composition.

  In the positive radiation sensitive composition, the mass ratio of the [A] polymer to the total of the [A] polymer and the [B] siloxane polymer is preferably 5% by mass or more and 95% by mass or less. By setting the mass ratio of [A] polymer to the total of [A] polymer and [B] siloxane polymer within the specific range, a positive radiation-sensitive composition having higher radiation sensitivity can be obtained, As a result, an interlayer insulating film for a display element having higher refractive index, transparency, and dry etching resistance can be formed. Moreover, 5 mass% or more and 85 mass% or more are more preferable from a viewpoint of surface hardness in addition to dry etching resistance.

<[C] Photoacid generator>
[C] The photoacid generator is a compound that generates an acid upon irradiation with radiation. As the radiation, for example, visible light, ultraviolet light, far ultraviolet light, electron beam, X-ray or the like can be used. The positive-type radiation-sensitive composition contains an [A] polymer having an acid-dissociable group and a [C] photoacid generator, so that the positive-type radiation-sensitive composition has a positive-type radiation-sensitive property. Can be demonstrated. [C] The inclusion form of the photoacid generator in the positive radiation-sensitive composition is a compound form as described later (hereinafter also referred to as “[C] photoacid generator” where appropriate). It may be in the form of acid generating groups incorporated as part of a polymer or other polymer, or both forms.

  [C] Examples of the photoacid generator include onium salts, trihalomethyltriazine compounds, diazomethane compounds, sulfone compounds, sulfonic acid ester compounds, phosphorus oxo acid ester compounds, sulfonimide compounds, sulfonebenzotriazole compounds, and oxime sulfonate compounds. . In addition, each of these [C] photo-acid generators can be used individually or in combination of 2 or more types. [C] The photoacid generator does not contain a quinonediazide compound.

[Onium salt]
Examples of the onium salt include diphenyliodonium salt, triphenylsulfonium salt, sulfonium salt, benzothiazonium salt, ammonium salt compound, phosphonium salt compound, and tetrahydrothiophenium salt.

  Examples of the diphenyliodonium salt include diphenyliodonium tetrafluoroborate, diphenyliodonium hexafluorophosphonate, diphenyliodonium hexafluoroarsenate, diphenyliodonium trifluoromethanesulfonate, diphenyliodonium trifluoroacetate, diphenyliodonium-p-toluenesulfonate, diphenyliodonium. Butyltris (2,6-difluorophenyl) borate, 4-methoxyphenylphenyliodonium tetrafluoroborate, bis (4-t-butylphenyl) iodonium tetrafluoroborate, bis (4-t-butylphenyl) iodonium hexafluoroarsenate Bis (4-t-butylphenyl) iodonium trifluorome Sulphonate, bis (4-t-butylphenyl) iodonium trifluoroacetate, bis (4-t-butylphenyl) iodonium-p-toluenesulfonate, bis (4-t-butylphenyl) iodonium camphorsulfonic acid, etc. .

  Examples of the triphenylsulfonium salt include triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium camphorsulfonic acid, triphenylsulfonium tetrafluoroborate, triphenylsulfonium trifluoroacetate, triphenylsulfonium-p-toluenesulfonate, triphenylsulfonium. And butyl tris (2,6-difluorophenyl) borate.

  Examples of the sulfonium salt include alkylsulfonium salts, benzylsulfonium salts, dibenzylsulfonium salts, substituted benzylsulfonium salts and the like.

  Examples of the alkylsulfonium salt include 4-acetoxyphenyldimethylsulfonium hexafluoroantimonate, 4-acetoxyphenyldimethylsulfonium hexafluoroarsenate, dimethyl-4- (benzyloxycarbonyloxy) phenylsulfonium hexafluoroantimonate, dimethyl-4- (Benzoyloxy) phenylsulfonium hexafluoroantimonate, dimethyl-4- (benzoyloxy) phenylsulfonium hexafluoroarsenate, dimethyl-3-chloro-4-acetoxyphenylsulfonium hexafluoroantimonate and the like can be mentioned.

  Examples of the benzylsulfonium salt include benzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, benzyl-4-hydroxyphenylmethylsulfonium hexafluorophosphate, 4-acetoxyphenylbenzylmethylsulfonium hexafluoroantimonate, benzyl-4-methoxyphenyl. Methylsulfonium hexafluoroantimonate, benzyl-2-methyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, benzyl-3-chloro-4-hydroxyphenylmethylsulfonium hexafluoroarsenate, 4-methoxybenzyl-4-hydroxyphenyl Examples include methylsulfonium hexafluorophosphate.

  Examples of the dibenzylsulfonium salt include dibenzyl-4-hydroxyphenylsulfonium hexafluoroantimonate, dibenzyl-4-hydroxyphenylsulfonium hexafluorophosphate, 4-acetoxyphenyl dibenzylsulfonium hexafluoroantimonate, and dibenzyl-4-methoxyphenylsulfonium. Hexafluoroantimonate, dibenzyl-3-chloro-4-hydroxyphenylsulfonium hexafluoroarsenate, dibenzyl-3-methyl-4-hydroxy-5-t-butylphenylsulfonium hexafluoroantimonate, benzyl-4-methoxybenzyl- Examples include 4-hydroxyphenylsulfonium hexafluorophosphate.

  Examples of substituted benzylsulfonium salts include p-chlorobenzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, p-nitrobenzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, and p-chlorobenzyl-4-hydroxyphenylmethyl. Sulfonium hexafluorophosphate, p-nitrobenzyl-3-methyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 3,5-dichlorobenzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, o-chlorobenzyl-3- Examples include chloro-4-hydroxyphenylmethylsulfonium hexafluoroantimonate.

  Examples of the benzothiazonium salt include 3-benzylbenzothiazonium hexafluoroantimonate, 3-benzylbenzothiazonium hexafluorophosphate, 3-benzylbenzothiazonium tetrafluoroborate, and 3- (p-methoxybenzyl). ) Benzothiazonium hexafluoroantimonate, 3-benzyl-2-methylthiobenzothiazonium hexafluoroantimonate, 3-benzyl-5-chlorobenzothiazonium hexafluoroantimonate, and the like.

  Examples of the ammonium salt compound include tetrabutylammonium tetrafluoroborate, tetrabutylammonium hexafluorophosphate, tetrabutylammonium hydrogen sulfate, tetraethylammonium tetrafluoroborate, tetraethylammonium p-toluenesulfonate, N, N-dimethyl-N-benzyl. Anilinium hexafluoroantimonate, N, N-dimethyl-N-benzylanilinium tetrafluoroborate, N, N-dimethyl-N-benzylpyridinium hexafluoroantimonate, N, N-diethyl-N-benzyltrifluoromethanesulfonate, N, N-dimethyl-N- (4-methoxybenzyl) pyridinium hexafluoroantimonate, N, N-diethyl-N (4-methoxybenzyl) preparative Luigi hexafluoroantimonate and the like.

  Examples of the phosphonium salt compound include ethyltriphenylphosphonium hexafluoroantimonate and tetrabutylphosphonium hexafluoroantimonate.

  Examples of the tetrahydrothiophenium salt include 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium trifluoromethanesulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium nona. Fluoro-n-butanesulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium-1,1,2,2-tetrafluoro-2- (norbornan-2-yl) ethanesulfonate, 1 -(4-n-Butoxynaphthalen-1-yl) tetrahydrothiophenium-2- (5-t-butoxycarbonyloxybicyclo [2.2.1] heptan-2-yl) -1,1,2,2 -Tetrafluoroethanesulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydride Thiophenium-2- (6-t-butoxycarbonyloxybicyclo [2.2.1] heptan-2-yl) -1,1,2,2-tetrafluoroethanesulfonate, 4,7-di-n-butoxy- Examples include 1-naphthyltetrahydrothiophenium trifluoromethanesulfonate.

[Trihalomethyltriazine compound]
Examples of the trihalomethyltriazine compound include haloalkyl group-containing hydrocarbon compounds and haloalkyl group-containing heterocyclic compounds.

[Diazomethane compounds]
Examples of the diazomethane compound include bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (phenylsulfonyl) diazomethane, bis (p-tolylsulfonyl) diazomethane, bis (2,4-xylylsulfonyl) diazomethane, Bis (p-chlorophenylsulfonyl) diazomethane, methylsulfonyl-p-toluenesulfonyldiazomethane, cyclohexylsulfonyl (1,1-dimethylethylsulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, phenylsulfonyl (benzoyl) diazomethane, etc. Is mentioned.

[Sulfone compound]
Examples of the sulfone compounds include β-ketosulfone compounds, β-sulfonylsulfone compounds, diaryldisulfone compounds, and the like.

[Sulfonic acid ester compounds]
Examples of the sulfonic acid ester compounds include alkyl sulfonic acid esters, haloalkyl sulfonic acid esters, aryl sulfonic acid esters, and imino sulfonates.

[Linoxo acid ester compound]
Phosphooxoester compounds include, for example, trialkyl phosphate esters, triaryl phosphate esters, dialkyl phosphate esters, monoalkyl phosphate esters, trialkyl phosphite esters, triaryl phosphite esters, dialkyl phosphite esters. , Monoalkyl phosphites, hypophosphites and the like.

[Sulfonimide compound]
Examples of the sulfonimide compound include N- (trifluoromethylsulfonyloxy) succinimide, N- (camphorsulfonyloxy) succinimide, N- (4-methylphenylsulfonyloxy) succinimide, N- (2-trifluoromethylphenylsulfonyloxy). ) Succinimide, N- (4-fluorophenylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) phthalimide, N- (camphorsulfonyloxy) phthalimide, N- (2-trifluoromethylphenylsulfonyloxy) phthalimide, N -(2-fluorophenylsulfonyloxy) phthalimide, N- (trifluoromethylsulfonyloxy) diphenylmaleimide, N- (camphorsulfonyloxy) diphenyl monomer Imido, 4-methylphenylsulfonyloxy) diphenylmaleimide, N- (2-trifluoromethylphenylsulfonyloxy) diphenylmaleimide, N- (4-fluorophenylsulfonyloxy) diphenylmaleimide, N- (4-fluorophenylsulfonyloxy) Diphenylmaleimide, N- (phenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] Hept-5-ene-2,3-dicarboxylimide, N- (trifluoromethanesulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (nonafluorobutane Sulfonyloxy) bicyclo [2.2.1] Pto-5-ene-2,3-dicarboxylimide, N- (camphorsulfonyloxy) bicyclo [2.2.1] hept-5-en-2,3-dicarboxylimide, N- (camphorsulfonyloxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (trifluoromethylsulfonyloxy) -7-oxabicyclo [2.2.1] hept-5 -Ene-2,3-dicarboxylimide, N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (4-methylphenyl) Sulfonyloxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (2-trifluoromethylphenylsulfonyl) Ruoxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (2-trifluoromethylphenylsulfonyloxy) -7-oxabicyclo [2.2.1] hept- 5-ene-2,3-dicarboxylimide, N- (4-fluorophenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (4-fluoro Phenylsulfonyloxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (trifluoromethylsulfonyloxy) bicyclo [2.2.1] heptane-5 , 6-oxy-2,3-dicarboxylimide, N- (camphorsulfonyloxy) bicyclo [2.2.1] heptane-5,6-oxy-2,3-di Ruboxylimide, N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] heptane-5,6-oxy-2,3-dicarboxylimide, N- (2-trifluoromethylphenylsulfonyloxy) bicyclo [2.2.1] Heptane-5,6-oxy-2,3-dicarboxylimide, N- (4-fluorophenylsulfonyloxy) bicyclo [2.2.1] heptane-5,6-oxy-2 , 3-dicarboxylimide, N- (trifluoromethylsulfonyloxy) naphthyl dicarboxylimide, N- (camphorsulfonyloxy) naphthyl dicarboxylimide, N- (4-methylphenylsulfonyloxy) naphthyl dicarboxylimide, N- (Phenylsulfonyloxy) naphthyl dicarboxylimide, N- 2-trifluoromethylphenylsulfonyloxy) naphthyl dicarboxylimide, N- (4-fluorophenylsulfonyloxy) naphthyl dicarboxylimide, N- (pentafluoroethylsulfonyloxy) naphthyl dicarboxylimide, N- (heptafluoropropylsulfonyl) Oxy) naphthyl dicarboxylimide, N- (nonafluorobutylsulfonyloxy) naphthyl dicarboxylimide, N- (ethylsulfonyloxy) naphthyl dicarboxylimide, N- (propylsulfonyloxy) naphthyl dicarboxylimide, N- (butylsulfonyl) Oxy) naphthyl dicarboxylimide, N- (pentylsulfonyloxy) naphthyl dicarboxylimide, N- (hexylsulfonyloxy) naphthyl dicarbo Xylimide, N- (heptylsulfonyloxy) naphthyl dicarboxylimide, N- (octylsulfonyloxy) naphthyl dicarboxylimide, N- (nonylsulfonyloxy) naphthyl dicarboxylimide, and the like.

[Sulfonebenzotriazole compound]
Examples of the sulfonebenzotriazole compound include 1-trifluoromethanesulfonyloxybenzotriazole, 1-nonafluorobutylsulfonyloxybenzotriazole, 1- (4-methylphenylsulfonyloxy) -benzotriazole, and the like.

[Oxime sulfonate compound]
As the oxime sulfonate compound, for example, a compound containing an oxime sulfonate group represented by the following formula (3) is preferable.

In said formula (3), R ^<C1> is a linear or branched alkyl group, a cycloalkyl group, or an aryl group. However, in these groups, some or all of the hydrogen atoms may be substituted.

The linear or branched alkyl group represented by R ^C1 is preferably a linear or branched alkyl group having 1 to 10 carbon atoms. The linear or branched alkyl group having 1 to 10 carbon atoms may be substituted. Examples of the substituent include an alkoxy group having 1 to 10 carbon atoms and 7,7-dimethyl-2-oxonorbornyl. And an alicyclic group containing a bridged alicyclic group such as a group. A preferred alicyclic group is a bicycloalkyl group. The aryl group represented by R ^C1 is preferably an aryl group having 6 to 11 carbon atoms, and more preferably a phenyl group or a naphthyl group. The aryl group may be substituted, and examples of the substituent include an alkyl group having 1 to 5 carbon atoms, an alkoxy group, and a halogen atom.

  As the compound containing an oxime sulfonate group represented by the above formula (3), for example, an oxime sulfonate compound represented by the following formula (4) is preferable.

In said formula (4), R ^<C1> is synonymous with said formula (3). X is an alkyl group, an alkoxy group, or a halogen atom. m is an integer of 0-3. However, when there are a plurality of Xs, the plurality of Xs may be the same or different.

  The alkyl group that can be represented by X is preferably a linear or branched alkyl group having 1 to 4 carbon atoms. The alkoxy group represented by X is preferably a linear or branched alkoxy group having 1 to 4 carbon atoms. The halogen atom represented by X is preferably a chlorine atom or a fluorine atom. As m, 0 or 1 is preferable. In the above formula (4), a compound in which m is 1, X is a methyl group, and the substitution position of X is ortho is preferable.

  Examples of the oxime sulfonate compound represented by the above formula (4) include compounds represented by the following formulas (4-1) to (4-5).

  Compound (4-1) (5-propylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile, Compound (4-2) (5-octylsulfonyloxyimino-5H-thiophene- 2-Ilidene)-(2-methylphenyl) acetonitrile, Compound (4-3) (camphorsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile, Compound (4-4) (5 -P-toluenesulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile and compound (4-5) (5-octylsulfonyloxyimino)-(4-methoxyphenyl) acetonitrile are commercially available. Available as a product.

  [C] The photoacid generator is preferably an oxime sulfonate compound or an onium salt from the viewpoints of sensitivity and solubility. As the oxime sulfonate compound, a compound represented by the above formula (3) is more preferable, a compound represented by the above formula (4) is particularly preferable, and the above-described formulas (4-1) to (-4) are available as commercially available products. The compound represented by 4-5) is most preferable. As the onium salt, tetrahydrothiophenium salt and benzylsulfonium salt are more preferable, 4,7-di-n-butoxy-1-naphthyltetrahydrothiophenium trifluoromethanesulfonate, benzyl-4-hydroxyphenylmethylsulfonium hexafluorophosphate Is particularly preferred.

  The content of the [C] photoacid generator in the composition is the sum of the [A] polymer and the [B] siloxane polymer when the [C] photoacid generator is a [C] photoacid generator. Preferably they are 0.1 mass part-10 mass parts with respect to 100 mass parts, More preferably, they are 1 mass part-5 mass parts. [C] By setting the content of the photoacid generator within the above specified range, a positive radiation-sensitive composition having good radiation sensitivity can be obtained, whereby sufficient surface hardness is maintained while maintaining transparency. It is possible to form an interlayer insulating film for a display element having

<[D] Surfactant>
[D] A surfactant can be added to improve the coating property of the positive radiation-sensitive composition, reduce coating unevenness, and improve film thickness uniformity. [D] Examples of the surfactant include a fluorine-based surfactant, a silicone-based surfactant, and a nonionic surfactant. These [D] surfactants can be used individually or in combination of 2 or more types.

  As the fluorosurfactant, a compound having a fluoroalkyl group and / or a fluoroalkylene group at at least one of the terminal, main chain and side chain is preferable. For example, 1,1,2,2-tetrafluoro n- Octyl (1,1,2,2-tetrafluoro n-propyl) ether, 1,1,2,2-tetrafluoro n-octyl (n-hexyl) ether, hexaethylene glycol di (1,1,2,2 , 3,3-hexafluoro n-pentyl) ether, octaethylene glycol di (1,1,2,2-tetrafluoro n-butyl) ether, hexapropylene glycol di (1,1,2,2,3,3) -Hexafluoro n-pentyl) ether, octapropylene glycol di (1,1,2,2-tetrafluoro n-butyl) ether, Sodium fluoro n-dodecanesulfonate, 1,1,2,2,3,3-hexafluoro n-decane, 1,1,2,2,3,3,9,9,10,10-decafluoro n- Dodecane, sodium fluoroalkylbenzenesulfonate, sodium fluoroalkylphosphate, sodium fluoroalkylcarboxylate, diglycerin tetrakis (fluoroalkylpolyoxyethylene ether), fluoroalkylammonium iodide, fluoroalkylbetaine, fluoroalkylpolyoxyethylene ether, Fluoroalkyl polyoxyethanol, perfluoroalkyl alkoxylate, carboxylic acid fluoroalkyl ester and the like can be mentioned.

  Examples of commercially available fluorosurfactants include BM-1000, BM-1100 (above, manufactured by BM CHEMIE), MegaFuck F142D, F172, F173, F183, F178, F191, F191, and F471. F476 (above, manufactured by Dainippon Ink and Chemicals), Florard FC-170C, FC-171, FC-430, FC-431 (above, manufactured by Sumitomo 3M), Surflon S-112, S-113, S-131, S-141, S-145, S-382, SC-101, SC-102, SC-103, SC-104, SC-105, SC-105, SC-106 (and above) Asahi Glass Co., Ltd.), F-top EF301, EF303, EF352 (above, manufactured by Shin-Akita Kasei), Footent FT-100, FT-110, FT-140A, FT-150, FT-250, FT-251, FT-300, FT-310, FT-400S, FTX-218, FT-251 (above, Neos), etc. Is mentioned.

  Examples of commercially available silicone surfactants include Torresilicone DC3PA, DC7PA, SH11PA, SH21PA, SH28PA, SH29PA, SH30PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190, SH-8400 FLUID (made by Toray Dow Corning Silicone), TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, TSF-4442 (Above, GE Toshiba Silicone), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.) and the like.

  Nonionic surfactants include, for example, polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether; polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, and the like. Polyoxyethylene aryl ethers; polyoxyethylene dialkyl esters such as polyoxyethylene dilaurate and polyoxyethylene distearate; (meth) acrylic acid copolymers and the like. As a commercial product of nonionic surfactant, Polyflow No. 57, 95 (manufactured by Kyoeisha Chemical) and the like.

  The content of the [D] surfactant in the positive radiation sensitive composition is preferably 0.01 parts by mass or more and 10 parts by mass with respect to 100 parts by mass in total of the [A] polymer and the [B] siloxane polymer. It is not more than part by mass, and more preferably not less than 0.05 part by mass and not more than 5 parts by mass. [D] By setting the content of the surfactant in the specific range, the coating property of the positive radiation-sensitive composition can be optimized.

<[E] Adhesion aid>
In the positive-type radiation-sensitive composition, in order to improve the adhesion between an inorganic material serving as a substrate, for example, a silicon compound such as silicon, silicon oxide and silicon nitride, a metal such as gold, copper and aluminum, and an insulating film [ E] Adhesion aids can be used. As such an adhesion assistant, a functional silane coupling agent is preferably used. Examples of functional silane coupling agents include silane coupling agents having reactive substituents such as carboxyl groups, methacryloyl groups, isocyanate groups, epoxy groups (preferably oxiranyl groups), thiol groups, and the like. These [E] adhesion assistants can be used alone or in combination of two or more.

  Examples of the functional silane coupling agent include trimethoxysilylbenzoic acid, γ-methacryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatopropyltriethoxysilane, γ-glycidoxypropyltri Examples include methoxysilane, γ-glycidoxypropylalkyldialkoxysilane, γ-chloropropyltrialkoxysilane, γ-mercaptopropyltrialkoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, and the like. Of these, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropylalkyldialkoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, and γ-methacryloxypropyltrimethoxysilane are preferred. .

  The content of the [E] adhesion assistant in the positive radiation sensitive composition is preferably 0.5 parts by mass or more and 20 parts by mass with respect to a total of 100 parts by mass of the [A] polymer and the [B] siloxane polymer. It is used in an amount of 1 part by mass or less and more preferably 10 parts by mass or less. [E] By making the amount of the adhesion assistant in the above specific range, the adhesion between the formed interlayer insulation film for display elements and the substrate is improved.

<[F] Basic compound>
When the positive radiation-sensitive composition contains the [F] basic compound, the diffusion length of the acid generated from the [C] photoacid generator by exposure can be appropriately controlled, and the pattern developability can be improved. Can be good. The basic compound can be arbitrarily selected from those used in chemically amplified resists, and examples thereof include aliphatic amines, aromatic amines, heterocyclic amines, quaternary ammonium hydroxides, and carboxylic acid quaternary ammonium salts. Can be mentioned. These [F] basic compounds can be used alone or in combination of two or more.

  Examples of the aliphatic amine include trimethylamine, diethylamine, triethylamine, di-n-propylamine, tri-n-propylamine, di-n-pentylamine, tri-n-pentylamine, diethanolamine, triethanolamine, dicyclohexylamine, Examples include dicyclohexylmethylamine.

  Examples of the aromatic amine include aniline, benzylamine, N, N-dimethylaniline, diphenylamine and the like.

  Examples of the heterocyclic amine include pyridine, 2-methylpyridine, 4-methylpyridine, 2-ethylpyridine, 4-ethylpyridine, 2-phenylpyridine, 4-phenylpyridine, N-methyl-4-phenylpyridine, 4 -Dimethylaminopyridine, imidazole, benzimidazole, 4-methylimidazole, 2-phenylbenzimidazole, 2,4,5-triphenylimidazole, nicotine, nicotinic acid, nicotinamide, quinoline, 8-oxyquinoline, pyrazine, pyrazole , Pyridazine, purine, pyrrolidine, piperidine, piperazine, morpholine, 4-methylmorpholine, 1,5-diazabicyclo [4,3,0] -5-nonene, 1,8-diazabicyclo [5,3,0] -7undecene Etc.

  Examples of the quaternary ammonium hydroxide include tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetra-n-butylammonium hydroxide, and tetra-n-hexylammonium hydroxide.

  Examples of the carboxylic acid quaternary ammonium salt include tetramethylammonium acetate, tetramethylammonium benzoate, tetra-n-butylammonium acetate, and tetra-n-butylammonium benzoate.

  [F] The basic compound is preferably a heterocyclic amine, more preferably 4-dimethylaminopyridine or 1,5-diazabicyclo [4,3,0] -5-nonene.

  As content of the [F] basic compound in the said positive type radiation sensitive composition, 0.001 mass part-1 mass part are with respect to a total of 100 mass parts of a [A] polymer and a [B] siloxane polymer. Preferably, 0.005 mass part-0.2 mass part is more preferable. [F] By making content of a basic compound into the said specific range, pattern developability improves more.

<[G] quinonediazide compound>
[G] A quinonediazide compound is a compound that generates a carboxylic acid upon irradiation with radiation. As the quinonediazide compound, a condensate of a phenolic compound or an alcoholic compound (hereinafter also referred to as “mother nucleus”) and 1,2-naphthoquinonediazidesulfonic acid halide can be used. These [G] quinonediazide compounds can be used alone or in combination of two or more.

  Examples of the mother nucleus include trihydroxybenzophenone, tetrahydroxybenzophenone, pentahydroxybenzophenone, hexahydroxybenzophenone, (polyhydroxyphenyl) alkane, and other mother nuclei.

  Examples of trihydroxybenzophenone include 2,3,4-trihydroxybenzophenone and 2,4,6-trihydroxybenzophenone. Examples of tetrahydroxybenzophenone include 2,2 ′, 4,4′-tetrahydroxybenzophenone, 2,3,4,3′-tetrahydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2,3 , 4,2′-tetrahydroxy-4′-methylbenzophenone, 2,3,4,4′-tetrahydroxy-3′-methoxybenzophenone, and the like. Examples of pentahydroxybenzophenone include 2,3,4,2 ', 6'-pentahydroxybenzophenone. Examples of hexahydroxybenzophenone include 2,4,6,3 ', 4', 5'-hexahydroxybenzophenone and 3,4,5,3 ', 4', 5'-hexahydroxybenzophenone. Examples of (polyhydroxyphenyl) alkanes include bis (2,4-dihydroxyphenyl) methane, bis (p-hydroxyphenyl) methane, tris (p-hydroxyphenyl) methane, 1,1,1-tris (p-hydroxy). Phenyl) ethane, bis (2,3,4-trihydroxyphenyl) methane, 2,2-bis (2,3,4-trihydroxyphenyl) propane, 1,1,3-tris (2,5-dimethyl-) 4-hydroxyphenyl) -3-phenylpropane, 4,4 ′-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol, bis (2,5-dimethyl) -4-hydroxyphenyl) -2-hydroxyphenylmethane, 3,3,3 ', 3'-tetramethyl-1,1'-spirobiy Den -5,6,7,5 ', 6', 7'-hexanol, 2,2,4-trimethyl -7,2 ', 4'-trihydroxy flavan like. As other mother nucleus, for example, 2-methyl-2- (2,4-dihydroxyphenyl) -4- (4-hydroxyphenyl) -7-hydroxychroman, 1- [1- (3- {1- (4- Hydroxyphenyl) -1-methylethyl} -4,6-dihydroxyphenyl) -1-methylethyl] -3- (1- (3- {1- (4-hydroxyphenyl) -1-methylethyl} -4, 6-dihydroxyphenyl) -1-methylethyl) benzene and 4,6-bis {1- (4-hydroxyphenyl) -1-methylethyl} -1,3-dihydroxybenzene.

  Among these mother nuclei, 2,3,4,4′-tetrahydroxybenzophenone, 1,1,1-tri (p-hydroxyphenyl) ethane, 4,4 ′-[1- [4- [1- [ 4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol is preferred.

  As the 1,2-naphthoquinone diazide sulfonic acid halide, 1,2-naphthoquinone diazide sulfonic acid chloride is preferable. Examples of 1,2-naphthoquinonediazide sulfonic acid chloride include 1,2-naphthoquinonediazide-4-sulfonic acid chloride, 1,2-naphthoquinonediazide-5-sulfonic acid chloride, and the like. Of these, 1,2-naphthoquinonediazide-5-sulfonic acid chloride is preferred.

  As a condensate of a phenolic compound or an alcoholic compound and 1,2-naphthoquinone diazide sulfonic acid halide, 1,1,1-tri (p-hydroxyphenyl) ethane and 1,2-naphthoquinone diazide-5-sulfonic acid Condensate with chloride, 4,4 '-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol and 1,2-naphthoquinonediazide-5-sulfonic acid chloride A condensate with is preferred.

  In the condensation reaction of a phenolic compound or alcoholic compound (mother nucleus) and 1,2-naphthoquinonediazide sulfonic acid halide, preferably 30 mol% to 85 mol based on the number of OH groups in the phenolic compound or alcoholic compound. 1,2-naphthoquinonediazide sulfonic acid halide corresponding to mol%, more preferably 50 mol% to 70 mol% can be used. The condensation reaction can be carried out by a known method.

  Examples of the quinonediazide compound include 1,2-naphthoquinonediazidesulfonic acid amides in which the ester bond of the mother nucleus exemplified above is changed to an amide bond, such as 2,3,4-triaminobenzophenone-1,2-naphthoquinonediazide- 4-sulfonic acid amide and the like are also preferably used.

  The amount of the [G] quinonediazide compound used is preferably such that the sum of the [C] photoacid generator and the [G] quinonediazide compound is 0 with respect to the total of 100 parts by mass of the [A] polymer and the [B] siloxane polymer. .1 part by mass to 30 parts by mass, more preferably 1 part by mass to 20 parts by mass.

<Other optional components>
In addition to the above-mentioned [A] to [G] components, the positive radiation-sensitive composition is [H] a heat-sensitive acid generator or a heat-sensitive base generator, as needed, within a range not impairing the effects of the present invention [I] You may contain other arbitrary components, such as a dehydrating agent.

<[H] heat-sensitive acid generator or heat-sensitive base generator>
[H] The heat-sensitive acid generator or the heat-sensitive base generator is heated to convert the [B] siloxane polymer (preferably a hydrolysis-condensation product of the hydrolyzable silane compound represented by the above formula (2)) to self. It is defined as a compound capable of releasing an acidic active substance or a basic active substance that acts as a catalyst for condensation / curing. By using such a [H] heat-sensitive acid generator or heat-sensitive base generator, the surface hardness and heat resistance of the obtained interlayer insulating film for display elements can be further improved. [H] The heat-sensitive acid generator or the heat-sensitive base generator is an acidic active substance or a pre-baking at a relatively low temperature (for example, 70 ° C. to 120 ° C.) in the coating film forming step of the positive radiation sensitive composition. Those which do not release a basic active substance and have a property of releasing an acidic active substance or a basic active substance during post-baking at a relatively high temperature (for example, 120 ° C. to 250 ° C.) in a heating step after development are preferable. These [H] heat-sensitive acid generators or heat-sensitive base generators can be used alone or in combination of two or more.

  [H] As the heat-sensitive acid generator, the compounds listed in the description of the [C] photoacid generator can be suitably applied. Whether light or heat is sensitive can be selected by adjusting the exposure amount and temperature.

  Examples of the [H] heat-sensitive base generator include 2-nitrobenzylcyclohexyl carbamate, [[(2,6-dinitrobenzyl) oxy] carbonyl] cyclohexylamine, N- (2-nitrobenzyloxycarbonyl) pyrrolidine, bis [ [(2-nitrobenzyl) oxy] carbonyl] hexane-1,6-diamine, triphenylmethanol, O-carbamoylhydroxyamide, O-carbamoyloxime, 4- (methylthiobenzoyl) -1-methyl-1-morpholinoethane, (4-morpholinobenzoyl) -1-benzyl-1-dimethylaminopropane, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone, hexaamminecobalt (III) tris (triphenylmethylborate) Etc. . Of these [H] heat-sensitive base generators, 2-nitrobenzylcyclohexyl carbamate and O-carbamoylhydroxyamide are preferable from the viewpoint of improving the surface hardness and heat resistance of the obtained interlayer insulating film for display element.

  [H] The amount of the heat-sensitive acid generator or heat-sensitive base generator used is preferably 0.1 to 20 parts by mass with respect to 100 parts by mass of the total of [A] polymer and [B] siloxane polymer. More preferably, it is 1 mass part-10 mass parts. [H] Positive radiation-sensitive composition excellent in surface hardness and heat resistance of interlayer insulating film for display element to be formed by adjusting usage amount of heat-sensitive acid generator or heat-sensitive base generator within the above specified range. In addition, it is possible to prevent the formation of precipitates in the coating film forming process and facilitate the coating film formation.

<[I] dehydrating agent>
[I] A dehydrating agent is defined as a substance that can convert water into a substance other than water by a chemical reaction or trap water by physical adsorption or inclusion. As a result of the positive radiation-sensitive composition containing [I] dehydrating agent, moisture entering from the environment or the result of condensation of [B] siloxane polymer in the heating step after development of the positive radiation-sensitive composition The generated moisture can be reduced. As a result, the storage stability of the composition can be improved. Furthermore, it is considered that the condensation reactivity of the [B] siloxane polymer can be increased and the heat resistance of the positive radiation-sensitive composition can be improved. Examples of such [I] dehydrating agents include carboxylic acid esters, acetals (including ketals), carboxylic acid anhydrides, and the like.

  As the carboxylic acid ester, orthocarboxylic acid ester and carboxylic acid silyl ester are preferable. Examples of the orthocarboxylic acid ester include methyl orthoformate, ethyl orthoformate, propyl orthoformate, butyl orthoformate, methyl orthoacetate, ethyl orthoacetate, propyl orthoacetate, butyl orthoacetate, methyl orthopropionate, ethyl orthopropionate, etc. Is mentioned. Of these orthocarboxylic esters, orthoformates such as methyl orthoformate are preferred. Examples of the carboxylic acid silyl ester include trimethylsilyl acetate, tributylsilyl acetate, trimethylsilyl formate, and trimethylsilyl oxalate.

  As acetals, the reaction product of ketones and alcohol, the reaction product of ketones and dialcohol, and ketene silyl acetals are preferable. Examples of the reaction product of ketones and alcohol include dimethyl acetal, diethyl acetal, dipropyl acetal, and the like.

  Examples of the carboxylic acid anhydride include formic anhydride, acetic anhydride, succinic anhydride, maleic anhydride, phthalic anhydride, benzoic anhydride, and acetic acid benzoic anhydride. Of these carboxylic acid anhydrides, acetic anhydride and succinic anhydride are preferred from the viewpoint of dehydration effect.

  [I] The amount of the dehydrating agent to be used is preferably 0.001 to 10 parts by mass, more preferably 0.001 part by mass with respect to a total of 100 parts by mass of the [A] polymer and [B] siloxane polymer. It is 01 mass part-5 mass parts, Most preferably, it is 0.03 mass part-1 mass part. [I] The storage stability of a positive radiation sensitive composition can be improved by making the usage-amount of a dehydrating agent into the said specific range.

<Preparation method of positive radiation sensitive composition>
The positive-type radiation-sensitive composition is dissolved by mixing [A] polymer, [B] siloxane polymer, [C] photoacid generator, a suitable component as necessary, and other optional components in a solvent. Alternatively, it is prepared in a dispersed state. For example, the positive radiation-sensitive composition can be prepared by mixing each component at a predetermined ratio in a solvent.

  As the solvent, a solvent in which each component is uniformly dissolved or dispersed and does not react with each component is preferably used. Examples of the solvent include alcohols, ethers, glycol ethers, ethylene glycol alkyl ether acetates, diethylene glycol alkyl ether, propylene glycol monoalkyl ether, propylene glycol monoalkyl ether acetates, propylene glycol monoalkyl ether propionate, aromatic Examples include hydrocarbons, ketones, and other esters. In addition, these solvents can be used alone or in combination of two or more.

  Examples of alcohols include methanol, ethanol, benzyl alcohol, 2-phenylethyl alcohol, 3-phenyl-1-propanol and the like.

  Examples of ethers include tetrahydrofuran.

  Examples of glycol ethers include ethylene glycol monomethyl ether and ethylene glycol monoethyl ether.

  Examples of the ethylene glycol alkyl ether acetates include methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, and ethylene glycol monoethyl ether acetate.

  Examples of the diethylene glycol alkyl ether include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and diethylene glycol ethyl methyl ether.

  Examples of the propylene glycol monoalkyl ether include propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether and the like.

  Examples of propylene glycol monoalkyl ether acetates include propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate and the like.

  Examples of the propylene glycol monoalkyl ether propionate include propylene monoglycol methyl ether propionate, propylene glycol monoethyl ether propionate, propylene glycol monopropyl ether propionate, propylene glycol monobutyl ether propionate and the like. .

  Examples of aromatic hydrocarbons include toluene and xylene.

  Examples of ketones include methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone and the like.

  Examples of other esters include methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, hydroxy Methyl acetate, ethyl hydroxyacetate, butyl hydroxyacetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, butyl 3-hydroxypropionate Methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, propyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, propyl ethoxyacetate, butyl ethoxyacetate, Methyl ropoxyacetate, ethyl propoxyacetate, propylpropoxyacetate, butyl propoxyacetate, methyl butoxyacetate, ethyl butoxyacetate, propylbutoxyacetate, butylbutoxyacetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, 2-methoxypropionate Propyl acid, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, 2-butoxypropionic acid Ethyl, propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3-methyl Butyl xylpropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, propyl 3-ethoxypropionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, 3-propoxy Examples include propyl propionate, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, and butyl 3-butoxypropionate.

  Among these solvents, from the viewpoint of excellent solubility or dispersibility, non-reactivity with each component, and ease of coating film formation, ethers such as dialkyl ethers, diethylene glycol alkyl ethers, Ethylene glycol alkyl ether acetates, propylene glycol monoalkyl ethers, propylene glycol monoalkyl ether acetates, ketones and esters are preferred, especially diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, methyl cellosolve acetate, ethyl cellosolve Acetate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monomethyl ether Cetate, propylene glycol monoethyl ether acetate, cyclohexanone, propyl acetate, i-propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate , Methyl lactate, ethyl lactate, propyl lactate, butyl lactate, butyl methoxyacetate, methyl 2-methoxypropionate and ethyl 2-methoxypropionate are preferred.

  In addition to the above solvents, benzyl ethyl ether, dihexyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, acetonyl acetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-octanol High-boiling solvents such as nonanol, benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, phenyl cellosolve acetate, carbitol acetate and the like can also be used in combination.

  The solid content concentration of the positive radiation-sensitive composition can be arbitrarily set according to the purpose of use and desired film thickness, but is preferably 10% by mass or more and 70% by mass or less, more preferably 30% by mass. % To 60% by mass.

<Method for forming interlayer insulating film for display element>
The positive radiation-sensitive composition is suitable as a material for forming an interlayer insulating film for display elements. Further, the present invention suitably includes an interlayer insulating film for a display element formed from the positive radiation sensitive composition.

The method for forming an interlayer insulating film for a display element according to the present invention includes:
(1) The process of forming the coating film of the said positive type radiation sensitive composition on a board | substrate,
(2) A step of irradiating at least a part of the coating film with radiation,
(3) a step of developing the coating film irradiated with the radiation; and (4) a step of heating the developed coating film.

  In this method, the positive radiation sensitive composition has good radiation sensitivity, and the formed interlayer insulating film for display elements has high dry etching resistance, so that a large dry etching margin can be secured. Even if it is a display element interlayer insulation film for a large display device that has been difficult to process uniformly and in a short time in the past, an interlayer insulation film for a display element having a fine and elaborate pattern is easily formed. can do. Furthermore, it is possible to obtain an interlayer insulating film for a display element that satisfies a good balance of surface hardness, refractive index, heat resistance and transparency. Hereinafter, each process is explained in full detail.

[Step (1)]
In this step, after applying the positive radiation-sensitive composition solution or dispersion onto the substrate, the coating surface is preferably removed by pre-baking the coating surface to form a coating film. Examples of the coating method include spraying, roll coating, spin coating (spin coating), slit die coating, and bar coating. Of these, the spin coating method and the slit die coating method are preferable, and the slit die coating method is more preferable.

  Examples of the substrate include glass, quartz, silicone, and resin. Examples of the resin include polyethylene terephthalate, polybutylene terephthalate, polyethersulfone, polycarbonate, polyimide, a ring-opening polymer of cyclic olefin, and a hydrogenated product thereof. As prebaking conditions, although it changes also with kinds, compounding ratios, etc. of each component, it can be set as 70 degreeC-120 degreeC, about 1 minute-10 minutes.

[Step (2)]
In this step, at least a part of the formed coating film is exposed to radiation and exposed. When exposing, it exposes normally through the photomask which has a predetermined pattern. As the radiation used for exposure, the radiation used for the [C] photoacid generator is suitable. Among these radiations, radiation having a wavelength in the range of 190 nm to 450 nm is preferable, and radiation containing ultraviolet light of 365 nm is more preferable. Energy of exposure intensity at the wavelength 365nm radiation, by the value measured by luminometer (OAI model356, OAI Optical Ltd. ^Associates), is preferably ^{300J / m 2 ~3,000J / m 2} , 300J / m 2 ~2 1,000 J / m ² is more preferable, and 400 J / m ^{2 to} 1,000 J / m ² is particularly preferable.

[Step (3)]
In this step, the coating film irradiated with the radiation is developed. By developing the coated film after exposure, unnecessary portions (radiation irradiated portions) are removed to form a predetermined pattern. As the developer used in the development step, an alkaline aqueous solution is preferable. Examples of the alkali include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia; quaternary ammonium salts such as tetramethylammonium hydroxide and tetraethylammonium hydroxide. .

  An appropriate amount of a water-soluble organic solvent such as methanol or ethanol, or a surfactant can be added to the alkaline aqueous solution. The concentration of alkali in the aqueous alkali solution is preferably from 0.1% by mass to 5% by mass from the viewpoint of obtaining appropriate developability. Examples of the developing method include a liquid piling method, a dipping method, a rocking dipping method, and a shower method. The development time varies depending on the composition of the positive radiation sensitive composition, but is about 10 seconds to 180 seconds. Subsequent to such development processing, for example, washing with running water is performed for 30 seconds to 90 seconds, and then a desired pattern can be formed by, for example, air drying with compressed air or compressed nitrogen.

[Step (4)]
In this step, the developed coating film is heated. A heating device such as a hot plate or an oven is used for heating, and the patterned thin film is heated to accelerate the curing reaction of the [A] polymer and [B] siloxane polymer, thereby obtaining a cured product. it can. As heating temperature, it is about 120 to 250 degreeC, for example. The heating time varies depending on the type of heating device, but for example, it is about 5 to 30 minutes for a hot plate and about 30 to 90 minutes for an oven. Moreover, the step baking method etc. which perform a heating process 2 times or more can also be used. In this way, a patterned thin film corresponding to the target display element interlayer insulating film can be formed on the surface of the substrate. Note that the use of the cured film is not limited to the interlayer insulating film for display elements, and can also be used as a spacer or a protective film.

  The film thickness of the formed interlayer insulation film for display elements is preferably 0.1 μm to 8 μm, more preferably 0.1 μm to 6 μm, and particularly preferably 0.1 μm to 4 μm.

  EXAMPLES Hereinafter, although this invention is explained in full detail based on an Example, this invention is not interpreted limitedly based on description of this Example.

<Synthesis of [A] Component>
[Synthesis Example 1]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 5 parts by weight of methacrylic acid, 40 parts by weight of 1-ethoxyethyl methacrylate, 5 parts by weight of styrene, 40 parts by weight of glycidyl methacrylate, 10 parts by weight of 2-hydroxyethyl methacrylate, and 3 parts by weight of α-methylstyrene dimer were charged. After that, stirring was started gently. The temperature of the solution was raised to 70 ° C., and this temperature was maintained for 5 hours to obtain a polymer solution containing the polymer (A-1). Mw of the polymer (A-1) was 9,000. The solid content concentration of the polymer solution was 32.1% by mass.

[Synthesis Example 2]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 5 parts by mass of methacrylic acid, 40 parts by mass of 2-tetrahydropyranyl methacrylate, 5 parts by mass of styrene, 40 parts by mass of glycidyl methacrylate, 10 parts by mass of 2-hydroxyethyl methacrylate and 3 parts by mass of α-methylstyrene dimer were charged. After that, stirring was started gently. The temperature of the solution was raised to 70 ° C., and this temperature was maintained for 5 hours to obtain a polymer solution containing the polymer (A-2). Mw of the polymer (A-2) was 9,000. The solid content concentration of the polymer solution was 31.3% by mass.

[Synthesis Example 3]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (methyl 2-methylpropionate) and 200 parts by mass of propylene glycol monomethyl ether acetate. Subsequently, 67 parts by mass of 1-n-butoxyethyl methacrylate, 23 parts by mass of benzyl methacrylate, and 10 parts by mass of methacrylic acid were charged and purged with nitrogen, and then gently stirred. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (a-1). Mw of the polymer (a-1) was 9,000. The solid content concentration of the polymer solution was 30.3% by mass.

[Synthesis Example 4]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (methyl 2-methylpropionate) and 200 parts by mass of propylene glycol monomethyl ether acetate. Subsequently, after 90 parts by mass of 1-benzyloxyethyl methacrylate, 6 parts by mass of 2-hydroxyethyl methacrylate and 4 parts by mass of methacrylic acid were charged and purged with nitrogen, stirring was started gently. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (a-2). Mw of the polymer (a-2) was 9,000. The solid content concentration of the polymer solution was 31.2% by mass.

[Synthesis Example 5]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (methyl 2-methylpropionate) and 200 parts by mass of propylene glycol monomethyl ether acetate. Subsequently, 85 parts by mass of 2-tetrahydropyranyl methacrylate, 7 parts by mass of 2-hydroxyethyl methacrylate and 8 parts by mass of methacrylic acid were charged and purged with nitrogen, and then gently stirring was started. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (a-3). Mw of the polymer (a-3) was 10,000. The solid content concentration of the polymer solution was 29.2% by mass.

[Synthesis Example 6]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, after 52 parts by mass of glycidyl methacrylate and 48 parts by mass of benzyl methacrylate were charged and purged with nitrogen, stirring was started gently. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (aa-1). Mw of the polymer (aa-1) was 10,000. The solid content concentration of the polymer solution was 32.3% by mass.

[Synthesis Example 7]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 45 parts by mass of 3,4-epoxycyclohexylmethyl methacrylate, 45 parts by mass of benzyl methacrylate, and 10 parts by mass of methacrylic acid were charged and purged with nitrogen, and then gently agitated. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (aa-2). Mw of the polymer (aa-2) was 10,000. The solid content concentration of the polymer solution was 33.2% by mass.

[Synthesis Example 8]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 35 parts by mass of 1-n-butoxyethyl methacrylate, 35 parts by mass of benzyl methacrylate and 30 parts by mass of glycidyl methacrylate were charged and purged with nitrogen, and then gently stirring was started. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (aa-3). Mw of the polymer (aa-3) was 10,000. The solid content concentration of the polymer solution was 32.3% by mass.

[Synthesis Example 9]
A flask equipped with a condenser and a stirrer was charged with 5 parts by mass of 2,2′-azobis (isobutyronitrile), 5 parts by mass of t-dodecanethiol, and 150 parts by mass of propylene glycol monomethyl ether acetate. Thereafter, 30 parts by mass of methacrylic acid, 35 parts by mass of benzyl methacrylate, and 35 parts by mass of tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate were charged and stirred for a while at room temperature. After the replacement, the mixture was stirred with heating at 70 ° C. for 5 hours. Next, 15 parts by mass of glycidyl methacrylate, 1 part by mass of dimethylbenzylamine and 0.2 part by mass of p-methoxyphenol were added to the obtained solution, and the mixture was heated and stirred at 100 ° C. for 4 hours to obtain a polymer (CA-1). A solution was obtained. Mw of the polymer (CA-1) was 5,000, and Mw / Mn was 2. The solid content concentration of the polymer solution was 38.0% by mass.

<[B] Synthesis of Siloxane Polymer>
[Synthesis Example 10]
In a container equipped with a stirrer, 25 parts by mass of propylene glycol monomethyl ether was charged, followed by 30 parts by mass of methyltrimethoxysilane, 23 parts by mass of phenyltrimethoxysilane and 0.5 parts by mass of oxalic acid, and the solution temperature was 60 ° C. Heated until. After the solution temperature reached 60 ° C., 18 parts by mass of ion-exchanged water was charged, heated to 75 ° C. and held for 3 hours. Next, 28 parts by mass of methyl orthoformate was added as a dehydrating agent and stirred for 1 hour. Furthermore, the solution temperature was set to 40 ° C., and evaporation was performed while maintaining the temperature, thereby removing ion-exchanged water and methanol generated by hydrolysis and condensation. Thus, a hydrolysis-condensation product (B-1) was obtained. Mw of the obtained hydrolysis-condensation product (B-1) was 3,000, and Mw / Mn was 2. The solid content concentration of the hydrolysis-condensation product (B-1) was 40.5% by mass.

[Synthesis Example 11]
In a vessel equipped with a stirrer, 25 parts by mass of propylene glycol monomethyl ether was charged, followed by 22 parts by mass of methyltrimethoxysilane, 12 parts by mass of γ-glycidoxypropyltrimethoxysilane, 20 parts by mass of phenyltrimethoxysilane and tetra- 0.1 parts by mass of i-propoxyaluminum was charged and operated in the same manner as in Synthesis Example 10 to obtain a hydrolysis-condensation product (B-2). Mw of the obtained hydrolysis-condensation product (B-2) was 3,200, and Mw / Mn was 2. The solid content concentration of the hydrolysis-condensation product (B-2) was 39.8% by mass.

[Synthesis Example 12]
In a vessel equipped with a stirrer, 25 parts by mass of propylene glycol monomethyl ether was charged, followed by 22 parts by mass of methyltrimethoxysilane, 12 parts by mass of 3-methacryloxypropyltrimethoxysilane, 20 parts by mass of phenyltrimethoxysilane and 0 oxalic acid. .5 mass parts was charged, and it operated similarly to the synthesis example 10, and obtained the hydrolysis-condensation product (B-3). Mw of the obtained hydrolysis-condensation product (B-3) was 2,400, and Mw / Mn was 2. The solid content concentration of the hydrolysis-condensation product (B-3) was 41.0% by mass.

<Preparation of positive radiation sensitive composition>
Hereinafter, the components used for the preparation of the positive radiation sensitive compositions of Examples and Comparative Examples will be described in detail.

[C] Photoacid generator C-1: 4,7-di-n-butoxy-1-naphthyltetrahydrothiophenium trifluoromethanesulfonate C-2: benzyl-4-hydroxyphenylmethylsulfonium hexafluorophosphate C-3: (5-Propylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile (Ciba Specialty Chemicals, IRGACURE PAG 103)
C-4: (5-octylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile (manufactured by Ciba Specialty Chemicals, IRGACURE PAG 108)
C-5: (5-p-toluenesulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile (manufactured by Ciba Specialty Chemicals, IRGACURE PAG 121)
C-6: (camphorsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile (CGI 1380, manufactured by Ciba Specialty Chemicals)
C-7: (5-octylsulfonyloxyimino)-(4-methoxyphenyl) acetonitrile (manufactured by Ciba Specialty Chemicals, CGI725)

[D] Surfactant D-1: Silicone surfactant (manufactured by Toray Dow Corning Silicone, SH 8400 FLUID)
D-2: Fluorosurfactant (manufactured by Neos, Factent FTX-218)

[E] Adhesion aid E-1: γ-glycidoxypropyltrimethoxysilane E-2: β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane E-3: γ-methacryloxypropyltrimethoxysilane

[F] Basic compound F-1: 4-Dimethylaminopyridine F-2: 1,5-diazabicyclo [4,3,0] -5-nonene

[G] Quinonediazide compound G-1: 1,1,1-tri (p-hydroxyphenyl) ethane (1.0 mol) and 1,2-naphthoquinonediazide-5-sulfonic acid chloride (2.0 mol) Condensate

[Example 1]
[A] 70 parts by mass of a solution containing (A-1) as a polymer (an amount corresponding to the solid content), [B] 30 parts by mass of (B-1) as a siloxane polymer, [C] a photoacid generator (C-1) 4 parts by mass as [D] Surfactant (D-1) 0.20 part by mass and [E] (E-1) 3.0 parts by mass as adhesion aid Then, a positive radiation sensitive composition was prepared by filtering through a membrane filter having a pore diameter of 0.2 μm.

[Examples 2 to 14 and Comparative Examples 1 to 6]
Each positive-type radiation-sensitive composition was prepared in the same manner as in Example 1 except that the types and blending amounts of each component were as described in Table 1. In Table 1, “-” indicates that the corresponding component was not used.

<Evaluation>
The following evaluation was implemented using each prepared positive radiation sensitive composition. The results are shown in Table 1.

[Radiation sensitivity (J / m ² )]
Hexamethyldisilazane (HMDS) was applied on a 550 × 650 mm chromium-deposited glass and heated at 60 ° C. for 1 minute. Each positive radiation sensitive composition is applied onto the chromium-deposited glass after the HMDS treatment using a slit die coater (manufactured by Tokyo Ohka Kogyo Co., Ltd., TR6322105-CL), and the ultimate pressure is set to 100 Pa under vacuum. After removing the solvent at, the film was further pre-baked at 90 ° C. for 2 minutes to form a coating film having a thickness of 3.0 μm. Subsequently, using an exposure machine (manufactured by Canon, MPA-600FA), the coating film was irradiated with radiation with a variable exposure amount through a mask having a 60 μm line and space (10: 1) pattern. . Then, it developed for 80 second at 25 degreeC with 0.4 mass% tetramethylammonium hydroxide aqueous solution. Next, washing with running ultrapure water for 1 minute was performed, followed by drying to form a pattern on the chromium-deposited glass substrate after the HMDS treatment. At this time, the exposure amount necessary for completely dissolving the 6 μm space pattern was defined as radiation sensitivity (J / m ² ). When this value was 500 (J / m ² ) or less, it was judged that the sensitivity was good.

[surface hardness]
A cured film was formed on the silicon substrate in the same manner as in the evaluation of the radiation sensitivity except that the exposure was not performed through a mask. The pencil hardness (surface hardness) of the cured film was measured by the 8.4.1 pencil scratch test of JIS K-5400-1990. When this value is 3H or more, it can be said that the surface hardness as the interlayer insulating film for display elements is good, and it has sufficient curability.

[Refractive index (%)]
By operating in the same manner as the evaluation of the surface hardness, a cured film is formed on the silicon substrate, and the refractive index (%) of the obtained cured film is measured using an Auto EL IV NIR III (Rudolf Research) ellipsometer. Measurements were taken at 633 nm. When this value was 1.50 or more, it was determined that the refractive index as the interlayer insulating film for display elements was at a level causing no practical problem.

[Heat-resistant(%)]
By operating in the same manner as the evaluation of the surface hardness, a cured film was formed on the silicon substrate, and the thickness (T2) of the obtained cured film was measured. Next, the silicon substrate on which this cured film was formed was additionally baked in a clean oven at 240 ° C. for 1 hour, and then the thickness (t2) of the cured film was measured. The rate (%) was calculated and used as heat resistance (%).
Heat resistance (%) = (| t2-T2 | / T2) × 100
When this value was 3% or less, the heat resistance was judged to be good.

[Transmissivity (%)]
A cured film was formed on the glass substrate in the same manner as in the evaluation of the surface hardness except that a glass substrate (Corning 7059, manufactured by Corning) was used instead of the silicon substrate. The light transmittance (%) of the glass substrate having this cured film was measured at a wavelength in the range of 400 nm to 800 nm using a spectrophotometer (150-20 type double beam, manufactured by Hitachi, Ltd.). When the minimum light transmittance was 95% or more, it was judged that the transmittance was good.

[Dry etching resistance (μm)]
By operating in the same manner as the evaluation of the surface hardness, a cured film is formed on a silicon substrate, and using a dry etching apparatus (CDE-80N, manufactured by Shibaura Mechatronics), etching gas CF ₄ 50 mL / min, O ₂ 10 mL / min. Then, dry etching was performed under conditions of an output of 400 mW and an etching time of 90 seconds, and the film thickness (μm) before and after the treatment was measured. When the film thickness reduction amount was 1.0 μm or less, it was judged that the dry etching resistance was good.

  As is clear from the results in Table 1, a cured film formed from a positive radiation-sensitive composition containing all of [A] polymer, [B] siloxane polymer, and [C] photoacid generator is a comparative example. It was found that the dry etching resistance was improved as compared with the cured film obtained from the composition. In addition, it has been found that a cured film sufficiently satisfying heat resistance, transparency, surface hardness and refractive index can be formed. Moreover, the cured film formed from the said positive radiation sensitive composition is compared with the cured product formed from the composition of the comparative example containing a [G] quinonediazide compound instead of a [C] photo-acid generator. It was also found that the dry etching resistance was excellent. Furthermore, the positive radiation sensitive compositions of Examples 1 to 10 in which the mass ratio of the [A] polymer to the total of the [A] polymer and the [B] siloxane polymer is 5% by mass or more and 95% by mass or less. It was found that the cured film formed in (1) had higher resistance to dry etching and higher refractive index than the cured films obtained from the compositions of Examples 11 to 14 outside the above specific range. Thereby, it turned out that it is preferable that the mass ratio of the [A] polymer with respect to the sum total of the [A] polymer and the [B] siloxane polymer is 5 mass% or more and 95 mass% or less.

  The positive radiation-sensitive composition of the present invention can form an interlayer insulating film for display elements having high dry etching resistance. Further, the positive radiation sensitive composition of the present invention has a sufficient radiation sensitivity and can form an interlayer insulating film for a display element that sufficiently satisfies heat resistance, transparency, surface hardness and refractive index. Therefore, the positive radiation sensitive composition is suitably used for forming a display element interlayer insulating film for a display element.

Claims (5)

[A] A polymer comprising a structural unit (I) having a group represented by the following formula (1) and an epoxy group-containing structural unit (II) in the same or different polymer molecules,
[B] a siloxane polymer, and [C] a photoacid generator,
The mass ratio of the [A] polymer to the total of the [A] polymer and the [B] siloxane polymer is 5% by mass to 95% by mass,
[C] photoacid generator is an onium salt, trihalomethyl-triazine compounds, diazomethane compounds, Li N'okiso ester compounds, sulfonimide compounds, sulfone benzotriazole compounds, oxime sulfonate compound or a positive-type radiation-sensitive composition is a combination of these object.

(In formula (1), R ¹ and R ² are each independently a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group, provided that the hydrogen atom of the alkyl group, cycloalkyl group and aryl group is A part or all of them may be substituted, and R ¹ and R ² are not both hydrogen atoms, and R ³ is an alkyl group, a cycloalkyl group, an aralkyl group, an aryl group, or —M ( R ^3m ) is a group represented by _3. M is Si, Ge or Sn, each R ^3m is independently an alkyl group, and R ¹ and R ³ are linked to form a ring. An ether structure may be formed, provided that a part or all of the hydrogen atoms of these groups represented by R ³ may be substituted.) [B] The positive radiation sensitive composition according to claim 1, wherein the siloxane polymer is a hydrolysis condensate of a hydrolyzable silane compound represented by the following formula (2).

(In Formula (2), R ⁴ is a non-hydrolyzable organic group having 1 to 20 carbon atoms. R ⁵ is an alkyl group having 1 to 4 carbon atoms. N is an integer of 0 to 3) it is. However, if R ⁴ and R ⁵ is plural, may be different even plurality of R ⁴ and R ⁵ are identical.)   The positive radiation-sensitive composition according to claim 1, which is used for forming an interlayer insulating film for a display element. (1) The process of forming the coating film of the positive radiation sensitive composition of Claim 3 on a board | substrate,
(2) A step of irradiating at least a part of the coating film with radiation,
(3) A method of forming an interlayer insulating film for a display element, comprising: a step of developing the coating film irradiated with the radiation; and (4) a step of heating the developed coating film.   The interlayer insulation film for display elements formed from the positive radiation sensitive composition of Claim 3.