JP5561222B2 - CUTTING DEVICE, CUTTING METHOD USING CUTTING DEVICE, AND PRODUCT MANUFACTURING METHOD - Google Patents

Description

  The present invention relates to a cutting device, a cutting method using the cutting device, and a method for manufacturing a component.

  Conventionally, when a plate material such as a wafer is cut with a cutting device such as a dicing saw, depending on the material and thickness of the material, the processing load on the blade (for example, a blade) becomes too large, and the blade is damaged or its life It may be difficult to cut at a time in order to shorten the length significantly. As a countermeasure, in order to reduce the processing load, cutting is performed in stages in a plurality of stages in the thickness direction.

Further, when the processing load of each stage at the time of multi-stage cutting becomes unbalanced, not only the cutting performance of the blade is deteriorated, but also the risk of deterioration of the processing quality and blade breakage is increased. Therefore, it is desirable to make the load at each stage uniform and keep the maximum processing load as low as possible.
Conventionally, it is common to make the depth of cutting at each stage uniform.

  For example, when an SiC wafer having a thickness of 0.4 mm is to be cut in two stages, a general idea is to cut the wafer thickness in two stages by half of the wafer thickness (0.2 mm) to measure the load evenly. .

JP 2001-345287 A JP 2006-59914 A JP 2006-286694 A JP 2008-130929 A

  However, the load on each stage is not necessarily uniform only by making the depth of cut in each stage uniform. For example, in the case of the above SiC wafer having a thickness of 0.4 mm, it is necessary to cut the tape to hold the wafer in the actual full cut, and a cutting load is applied to the tape in the second stage cut. . Also, there are wafers with a plurality of metals such as Au and Al on the front and back surfaces of the wafer, and the processing load varies greatly depending on the combination of the presence or absence and the film thickness. Due to these various factors, it is not easy to equalize the actual machining load at the time of cutting each stage only by making the depth of cut at each stage uniform.

  In view of the above points, an object of the present invention is to make a processing load at the time of cutting each step closer to a uniform level in the technique of dividing a plate material into a plurality of steps in the thickness direction and cutting it stepwise.

  The invention described in claim 1 for achieving the above object is a cutting apparatus that uses a rotary blade (15) and can cut the plate material (W1) into a plurality of stages in the thickness direction in a stepwise manner. A detection circuit (22) for detecting a current value or a power value supplied to a motor for rotating the cutting tool (15), and a depth of cutting in the thickness direction of each of the plurality of stages by the cutting tool (15) And a control device (23) for controlling the cut amount, wherein the control device (23) is configured to set the current value or the power value detected by the detection circuit (22) when each of the plurality of stages is cut. Based on the amount of deviation (G) of the machining load equivalent value between the identified stages, the machining load equivalent value to the cutting tool (15) at the time of cutting each stage of the plurality of stages is specified. To the cutting tool (15) when cutting each step As close a machining load uniformly, a cutting device and correcting the depth of cut of the respective stages.

  Thus, by correcting the cutting amount of each stage based on the amount reflecting the machining load on the cutting tool (15) such as the current value or the power value detected at the time of cutting each stage, The processing load can be made more uniform than before.

Further, in the invention described in claim 1 , in addition to the plurality of stages, the control device (23) cuts the base material (W2) for holding the plate material (W1) at the time of cutting and the plate material (W1). It is characterized in that an additional step of cutting is performed without cutting .

Generally, at the time of cutting the plate material (W1), a part of the base material (W2) holding the plate material (W1) is also cut, but the amount of cut into the base material (W2) is large, and the base material (W2) ) material of and the hardness of the influence of such that the substrate (W2) reduces the induced cutting resistance clogging of the cutting tool to melt during cutting (15), the proportion of the processing load of the base material (W2) If the processing load is increased and the machining load at each stage is made uniform, the cutting amount at the final stage may become very small. However, as described above, by cutting the base material (W2) and performing an additional stage cut that does not cut the plate material (W1), the amount of incision can be achieved even in the equalization of machining loads in a plurality of stages other than this stage. Can be very unbalanced.

Further, the invention according to claim 2 is based on the current value or power value detected by the detection circuit (22) when the control device (23) cuts only the base material (W2). Specify the machining load equivalent value to the cutting tool (15) at the time of cutting only the base material (W2), and based on the identified machining load equivalent value is larger than a threshold, to perform the cutting of the additional stage, Cutting the plate (W1) and the base material (W2) at the last stage of the plurality of stages without performing the cutting of the additional stage based on the specified processing load equivalent value being smaller than the threshold value. a cutting apparatus according to claim 1, wherein. By doing in this way, according to the processing load at the time of cutting of a base material (W2), execution of a cut of an additional step and non-execution can be adjusted.

Further, in the invention according to claim 3 , the control device (23) is configured such that the current value or power value detected by the detection circuit (22) at the time of cutting each stage as the machining load equivalent value of each stage. a cutting apparatus according to claim 1 or 2, characterized by using a maximum value of. By doing in this way, since it becomes feedback control based on the maximum processing load, the risk of cutting tool breakage due to overload can be reduced.

According to a fourth aspect of the present invention, the control device (23) uses the current value or power value detected by the detection circuit (22) at the time of cutting each stage as the machining load equivalent value of each stage. a cutting apparatus according to claim 1 or 2, characterized by using a mean value.

  By doing so, since the variation in machining load in one stage is averaged and corrected, the correction accuracy is improved, and the machining load can be made sufficiently uniform with a small number of feedbacks.

The invention according to claim 5 is a cutting method in which a rotary blade (15) is used to cut the plate material (W1) into a plurality of stages in the thickness direction and cut stepwise. Based on the current value or the electric power value supplied to the motor that rotates the cutting tool (15) at the time of cutting each stage, the processing load on the cutting tool (15) at the time of cutting each stage of the plurality of stages is made to approach evenly. The cutting amount of each step is corrected , and in addition to the plurality of steps, the base material (W2) for holding the plate material (W1) at the time of cutting is cut, and the additional step is cut without cutting the plate material (W1). It is the cutting method characterized by performing .

  As described above, by correcting the cutting amount of each stage based on the amount of current value or power value detected at the time of cutting each stage, which reflects the machining load on the cutting tool (15), The processing load can be made more uniform than before.

The invention described in claim 6 is a manufacturing method for manufacturing a part from the plate material (W1), and includes a step of cutting the plate material by the cutting method according to claim 5. It is.

  In addition, the code | symbol in the bracket | parenthesis in the said and the claim shows the correspondence of the term described in the claim, and the concrete thing etc. which illustrate the said term described in embodiment mentioned later. .

It is a perspective view showing appearance of cutting device 1 concerning an embodiment of the present invention. It is a figure which shows the structure for control of the cutting device. It is a figure which shows the structure of the to-be-cut object W1, W2, and the mode of a cut. It is a figure which shows the cutting line of the to-be-cut object W. FIG. It is a figure which shows the cut line of the to-be-cut object W. FIG. It is a flowchart of the cut process which a control apparatus performs. It is a figure which illustrates the cutting amounts F and S in the case of cutting in two steps. It is a figure which illustrates cutting amount P, Q, and T in the case of cutting in three steps. It is an example of transition of the detected current value 31 for one cut line when cut in two stages. It is an example of transition of the detected current value 31 for one cut line when cut in three stages. It is a figure which illustrates the waveform of the detection electric current value before and behind correction | amendment of cutting amount. It is a figure which illustrates the waveform of the detection electric current value before and behind correction | amendment of cutting amount. It is a figure which illustrates the waveform of a detection electric current value. It is a figure which illustrates the waveform of the detection electric current value at the time of self-generated blade 41 generation | occurrence | production. It is a figure which illustrates the waveform of the detected electric current value at the time of self-generated blades 42 and 43 generating.

  Hereinafter, an embodiment of the present invention will be described. In FIG. 1, the external appearance of the cutting device 1 which concerns on this embodiment is shown. The cutting device 1 is a device that cuts a workpiece W to be cut in a plurality of stages, and includes a base 11, a movable stage 12, a chuck table 13, a blade drive unit 14, a blade 15, and the like.

  A movable stage 12 that is movable in the X direction along the table 11a is attached to a table 11a formed at the center of the base 11. The position of the movable stage 12 in the X direction is controlled by a table driving mechanism (not shown) inside the base 11.

  A chuck table 13 for holding the workpiece W is attached to the movable stage 12. The chuck table 13 is driven by a chuck rotation mechanism (not shown) inside the base 11 and is rotatable about the Z direction.

  The position and posture of the workpiece W on the chuck table 13 can be controlled by moving the movable stage 12 in the X direction and rotating the chuck table 13 around the Z direction. Between the chuck table 13 and the workpiece W, a tape holding frame 16 that holds the workpiece W (specifically, the tape W2 to which the plate material W1 is attached) is disposed.

  The blade drive unit 14 for holding and rotating the blade 15 includes an air spindle motor (not shown) for rotating the blade 15 around the Y direction and a casing for housing the air spindle motor. , Projecting from the lateral wall 11b standing perpendicular to the base 11a. The blade 15 is driven by a blade position adjusting mechanism (not shown) inside the base 11 and can move in the Y direction and the Z direction.

  The blade 15 is a rotary cutting tool for cutting the workpiece W. By the movement of the blade driving unit 14 in the Y direction and the Z direction, the position of the blade 15 with respect to the workpiece W and the cutting amount of the workpiece W (cutting depth in the thickness direction) can be adjusted.

  Thus, the relative position of the workpiece W with respect to the blade 15 can be controlled by controlling the table driving mechanism, the chuck rotating mechanism, and the blade position adjusting mechanism.

  FIG. 2 shows a configuration for controlling the cutting apparatus 1. The cutting device 1 includes a power supply circuit 21, a current value detection circuit 22, a control device 23, an actuator group 24 (the above-described table drive mechanism, chuck rotation mechanism, air spindle motor, blade position adjustment mechanism, etc.) in the base 11. )have.

  The power supply circuit 21 is a circuit that supplies electric power for rotation to the air spindle motor, and its operation is controlled by the control device 23. The current value detection circuit 22 is a circuit that detects a current value supplied from the power supply circuit 21 to the air spindle motor and outputs a detection current value as a detection result to the control device 23.

  The control device 23 is a device that controls the power supply circuit 21 and the actuator group 24 based on the detected current value and the like output from the current value detection circuit 22. Specifically, it has a function as correction detection means 23a for detecting an amount corresponding to the machining load on the blade 15 based on the detected current value output from the current value detection circuit 22, and corresponds to the detected machining load. In accordance with the amount, correction control for controlling the actuator group 24 to change the cutting amount (cutting depth in the thickness direction) of each step in order to make the processing load between the cuts of the blade 15 uniform evenly. It has a function as means 23b.

  As such a control device 23, for example, a well-known microcomputer that includes a CPU and a storage medium and that executes a program recorded in the nonvolatile storage medium is employed. Hereinafter, processing executed by the CPU will be described as processing executed by the control device 23.

  The workpiece W is a plate material W1 (workpiece) mainly composed of a difficult-to-cut material such as SiC (silicon carbide), and a tape that is interposed between the chuck table 13 and the plate material W1 and holds the plate material W1. Consists of W2. More specifically, as shown in FIG. 3, the plate material W1 is made of two surface electrodes W11, W12 made of Ti, Al, Ni, Au, etc., an SiC layer W13, Ti, Ni, Au, etc. Two layers of backside electrodes W14 and W15 are laminated in this order, and a tape W2 is interposed between the layer W15 and the chuck table 13.

  Here, the operation of cutting the workpiece W by the cutting apparatus 1 having the above configuration will be described. As shown in FIG. 4, the workpiece W is cut with a plurality of (for example, 11) cut lines in the horizontal direction in FIG. 5 and a plurality of (for example, 11) cut lines in the vertical direction. It comes to cut. Hereinafter, the horizontal cut line is referred to as a first channel, and the vertical cut line is referred to as a second channel.

  The cutting apparatus 1 is basically used for a purpose of cutting the workpiece W in one step (full cut) in the thickness direction (Z direction) of the workpieces W1 and W2 at each cut line. However, in this embodiment, when the cutting is performed in one step, the processing load is high. If there is a processing quality aspect or the risk of blade breakage if the cutting is performed as it is, the processing load is divided and reduced. Then, when one-stage cutting is performed and the load becomes a certain level or when the operator selects to perform a multi-stage cutting arbitrarily, in the thickness direction (Z direction) of the workpieces W1 and W2 at each cutting line Cut in stages by dividing into multiple stages (for example, 2 stages or 3 stages).

  For example, when cutting in two stages, first, as shown in FIG. 5A, in the first stage cut, the blade 15 is used to cut the upper part of the plate material W1 (for example, the entire layers W11 and W12 and a part of the layer 13 ) Along the cut line, and then in the second cut, as shown in FIG. 5B, along the same cut line, the lower part of the plate material W1 (for example, a part of the layer W13 and the layer) W14, 15) and the upper portion of the tape W2 is cut by the blade 15.

  The cut amount F of the first-stage cut (that is, the depth of cut in the thickness direction; the same applies hereinafter) and the cut amount S of the second-stage cut are sequentially corrected by feedback control in this embodiment. It has become.

  Various methods can be adopted as to how the cut lines and steps are cut for one workpiece W. For example, after cutting the first and second steps (and the third step if any) of one cut line continuously, the first and second steps (and the third step) of the next cut line The first channel and the second channel may be cut by adopting a method (hereinafter referred to as a line-by-line cutting procedure) in which a procedure for continuously cutting is repeated.

  Alternatively, first cut only the first step for all cut lines of the first channel, then cut only the second step for all cut lines of the first channel, and then if there is a third step, the first channel Cut only the third step for all the cut lines in the first channel, and after cutting all the steps for all the cut lines in the first channel, cut only the first step for all the cut lines in the second channel. Then, only the second stage is cut for all cut lines of the second channel, and if there is a third stage, only the third stage is cut for all cut lines of the second channel (hereinafter referred to as channel). You may employ | adopt every cutting procedure. In the above description, the procedure for cutting the second channel after cutting the first channel has been described. However, a method of cutting the first channel after cutting the second channel may be employed.

  Below, it demonstrates taking an example of the cut procedure for every line. FIG. 6 shows a flowchart of the cutting process realized by the control device 23 executing the program. In this cutting process, the cutting load at each stage is corrected by feedback control, so that the machining load on the blade at the time of the first stage cut and the machining load on the blade at the time of the second stage cut are made close to each other. .

  Specifically, the correction of the cutting amount is performed by correcting the cutting amount every time each stage of one cut line is cut, and applying the corrected cutting amount at the time of cutting the next cut line, The user can arbitrarily select and set the ch mode in which the cut amount is corrected after cutting all the stages of all the cut lines for the channel, and the corrected cut amount is applied when the next channel is cut. The selection of the cut amount correction mode (L mode, ch mode) is input by a user operating an operation unit (not shown) provided in the cutting device 1, and the control device 23 outputs the input result. Hold it on a storage medium.

  Note that the control device 23 performs the first and second cut amounts F and S when the cut line is cut in two stages, and the first and second cuts when the cut line is cut in three stages. The values of the third-stage cutting amounts P, Q, and R are stored in a storage medium.

  The initial values of the cutting amounts F, S, P, Q, and R (values at the start of the first use of the cutting device 1 or when the cutting amount is reset) may be any value. For example, the cutting material F1 The thickness h and the cutting amount T of the tape W2 are determined in advance, the initial values of the cutting amounts F and S are both (h + T) / 2 (see FIG. 7), and the initial values of the cutting amounts P, Q, and R are set as the initial values. These may be h / 2, h / 2, and T, respectively (see FIG. 8).

  Hereinafter, the operation of the cutting apparatus 1 will be described in accordance with the processing of FIG. First, in step 105, the control device 23 determines whether the setting of the cut amount correction mode is the L mode or the ch mode. If it is determined that the setting is the L mode, the control device 23 proceeds to step 110.

  In step 110, a process for cutting the first line (first cut line) of the workpiece W is executed. Specifically, the power supply circuit 21 is controlled to supply power from the power supply circuit 21 to the air spindle motor of the blade drive unit 14, thereby rotating the blade 15. Then, the table driving mechanism, chuck rotating mechanism, blade position adjusting mechanism, and the like of the actuator group 24 are controlled to cut each stage in order from the first stage. The number of steps for cutting the first line may be determined in advance to be two or may be determined to be three.

  Since how to control the position of the blade 15 by controlling the table driving mechanism, the chuck rotating mechanism, and the blade position adjusting mechanism at the time of cutting each stage is well known, detailed description thereof will be omitted.

  Briefly, in order to cut a certain cut line, the position of the blade 15 is adjusted to the cut line by controlling the chuck rotating mechanism and the blade position adjusting mechanism, and at the time of cutting each stage of the cut line, The blade position adjustment mechanism is controlled so that the cut amount of the step recorded in the storage medium (F and S for the second step, P, Q and R for the third step) is realized as the cut amount of the current step. Then, the height (position in the Z direction) of the blade 15 is adjusted, and the workpiece W is fed in the X direction along the current cut line by controlling the table driving mechanism while maintaining the height. When channel switching is necessary, the chuck rotating mechanism is controlled to rotate the chuck table 13 so that the cut line to be cut is parallel to the X direction. In the present embodiment, at the time of cutting, the feed speed of the workpiece W in the X direction and the rotation speed of the blade 15 are constant regardless of the workpiece W, channels, lines, and steps.

  At the time of cutting each stage, the detected current value is constantly output from the current value detection circuit 22, but the control device 23 changes the detected current value in time series (for example, at a predetermined sampling rate). Record on a storage medium.

  FIG. 9 illustrates the transition of the detected current value 31 for one cut line when cut in two stages. In the figure, the vertical direction indicates the current value, and the horizontal direction indicates time. In this figure, from time t1 to t2 is the detected current value at the time of the first stage cut, and from time t2 to t3 is the detected current value at the time of the second stage cut.

  The detection current value of the second cut once increases by the value C2, then further increases to E2, then decreases to C2, and then reaches the lowest value (detection current value when the blade 15 is idle). It has come to decrease. The time zone in which the current value is C2 is a time zone in which the blade 15 cuts only the tape W2. As shown in FIG. 2 and FIG. 3, the tape W2 is arranged in a wider range than the plate material W1, so when viewed on one cut line, there is an excess cut portion near the start and end of the cut. There is a time zone in which only the tape W2 is cut.

  FIG. 10 illustrates the transition of the detected current value 32 for one cut line when cut in three stages. In the figure, the vertical direction indicates the current value, and the horizontal direction indicates time. In this figure, from time t4 to t5 is the detected current value at the time of the first stage cut, from time t5 to t6 is the detected current value at the time of the second stage cut, and from time t6 to t7. This is the detected current value at the time of the third cut.

  When the cutting of the first line is completed, the process proceeds to step 115, and the representative current value at the time of cutting of each stage of the first line is specified based on the transition of the detected current value recorded in step 110. More specifically, when the cut is performed in two stages, the first-stage representative current value D2 and the second-stage representative current value E2 are specified. When the cut is performed in three stages, the first-stage representative current value D3, The second stage representative current value E3 and the third stage representative current value C3 are detected.

  For example, the maximum value of the detected current value at the time of cutting of each stage may be set as the representative current value of the stage. In the case where the cutting is performed in two stages in Step 110, the representative current value C2 (for example, the maximum value) in the time zone in which only the tape W2 is cut at the time of the second stage cutting is specified. The control device 23 can distinguish the time zone in which only the tape W2 is cut from the time zone in which only the tape W2 is cut when cutting in the second stage of the two stages as follows. .

  As shown in FIG. 9, there are time zones β1 and β2 in which only the tape W2 is cut before and after the time zone α including the plate material W1, but the detected current value rapidly increases before and after the time zone β1. The detected current value suddenly drops before and after the time zone β2. Therefore, at the time of the second stage cut, the absolute value of the time derivative of the detected current value first becomes larger than the first predetermined reference value and then becomes smaller than the second predetermined reference value (smaller than the first predetermined reference value). Based on the fact that the time zone β1 has started, and then the absolute value of the time derivative of the detected current value is greater than the first predetermined reference value and then smaller than the second predetermined reference value, It is determined that the time zone β1 has ended. Third, based on the fact that the absolute value of the time derivative of the detected current value becomes larger than the first predetermined reference value and then becomes smaller than the second predetermined reference value, it is determined that the time zone β2 has started, When the absolute value of the time derivative of the detected current value becomes larger than the first predetermined reference value and then becomes smaller than the second predetermined reference value, it is determined that the time zone β2 has ended.

  Note that the representative current value C2 may be calculated only for the time zone β1, or the representative current value C2 may be calculated only for the time zone β2, or both the time zones β1 and β2 may be calculated. The representative current value C2 may be calculated.

  Subsequently, at step 120, the absolute value G (| D2-E2 |) of the difference between the representative current value (D2 or D3) at the first stage specified at step 115 and the representative current value (E2 or E3) at the second stage. It is determined whether or not | D3-E3 |) is equal to or greater than a predetermined reference value (specifically, 0.1 ampere in this example). If the value G is equal to or greater than the reference value, the cutting amount (F , S or P, Q), go to step 125. If the value G is not equal to or greater than the reference value, it is considered that the load is equalized at each stage, the cut amount is not corrected, and the process proceeds to the next line cut.

  Generally, when the processing load on the blade 15 at the time of cutting increases, the current value supplied to the air spindle motor that rotates the blade 15 also increases. Therefore, the representative current values D and E are processing load equivalent values to the blade 15 at the time of cutting. Therefore, the greater the value G representing the amount of divergence between the representative current values D and E, the greater the degree of unbalance between the first and second machining loads. In the present embodiment, this is used to correct the cut amount when the value G is equal to or larger than the reference value, and the cut amount is not corrected when the value G is smaller than the reference value.

  In step 180, a cut process for the next cut line is executed. Specifically, as in step 110, the blade 15 is rotated and the actuator group 24 is controlled to cut each stage in order from the first stage of the cut line. The number of cut stages is the same as that at the time of the previous cut line unless there is a change process, but if there is a change, it follows the change result. Similarly to step 110, when each stage is cut, the transition of the detected current value from the current value detection circuit 22 is recorded in the storage medium in time series.

  When the cut of the cut line is completed in step 180, the process returns to step 115, and based on the transition of the detected current value recorded in the previous step 180, the method of each stage of the cut line is performed by the method described above. A representative current value at the time of cutting (D2, E2 or D3, E3, C3, corresponding to a machining load equivalent value) is specified. Further, when the cutting is performed in two steps in the immediately preceding step 180, the representative current value C2 (for example, the maximum value) in the time zone in which only the tape W2 is cut is specified.

  As described above, while the value G does not exceed the reference value, the cut amount is not corrected and the processes of steps 115, 120, and 180 are repeated, and the work W is cut along the cut line by the number of repetitions. It will be done.

  In step 125, which is executed when it is determined in step 120 that the value G is greater than or equal to the reference value, whether the setting of the tape cutting load exclusion correction mode is on, off, or auto, Is identified. In the tape cutting load exclusion correction mode, the number of cut stages is added (for example, to the third stage), and only the tape W2 is cut at the third stage (additional stage), whereby the tape W2 is cut in the second stage cut. This mode excludes the load, and the user can arbitrarily select and set on, off, and auto. The selection of the tape cutting load exclusion correction mode is input by a user operating an operation unit (not shown) provided in the cutting device 1, and the control device 23 holds the input result in a storage medium. .

  First, the case where the tape cutting load exclusion correction mode is set to off will be described. In this case, the process proceeds to step 130 and the number of cut stages is set to two. Subsequently, in step 135, a first cut correction determination is performed. Specifically, the representative current value at the first stage cut (D2 or D3; described as D in FIG. 6) and the representative current value at the second stage cut (E2 or E3) specified in the immediately preceding step 115. 6), if the representative current value of the first stage is equal to or greater than the representative current value of the second stage, the process proceeds to step 140 and the representative current value of the first stage is two stages. If it is smaller than the representative current value of the eye, the process proceeds to step 145.

  In step 140, the result of subtracting the positive predetermined amount X (see FIG. 7) from the current first-stage cut amount F is recorded on the storage medium as a new first-stage cut amount F. The result of adding the predetermined amount X to the cut amount S of the stage is recorded on the storage medium as a new cut amount S of the second stage. That is, by reducing the first-stage cut amount F and increasing the second-stage cut amount S by the reduced amount, the overall cut amount F + S = h + T is not changed, and the first and second-stage cut amounts F are increased. The processing load of is close to equalization. The predetermined amount X may be within a range of 5% to 20% (for example, 10%) of the plate thickness h of the plate material W1.

  In step 145, the result of adding the positive predetermined amount X (see FIG. 7) to the current first stage cut amount F is recorded on the storage medium as a new first stage cut amount F, and the current A result obtained by subtracting the predetermined amount X from the second-stage cutting amount S is recorded as a new second-stage cutting amount S on the storage medium. In other words, by increasing the first-stage cutting amount F and decreasing the second-stage cutting amount S by the increased amount, the overall cutting amount F + S = h + T is not changed, and the first and second-stage cutting amounts S are changed. The processing load of is close to equalization. Following steps 140 and 145, the process proceeds to step 180.

  As a result, in step 180, when the number of cut steps is two in both the previous time and this time, the first and second steps are cut with the corrected cut amounts F and S. As shown in FIG. The next cut line (N + 1 line) after the correction is performed, based on the difference G1 between the representative current values of the first stage (time t1 to t2) and the second stage (time t2 to t3) for the line (N line). The difference G2 between the representative current values of the first stage (time t4 to t5) and the second stage (time t5 to t6) for the eye) is smaller. In addition, when the number of cut steps is three in both the previous time and the current time, the first step, the second step, and the third step are cut with the corrected cut amounts P, Q, and T, as shown in FIG. The first and second stages for the next cut line after the correction (N + 1 line) than the difference G3 between the first and second stage representative current values for the cut line (N line). The difference G4 in the representative current value becomes smaller. By repeating such correction for each cut line, it is reduced to the extent that the unbalance between the first and second processing loads does not become a problem.

  In Steps 140 and 145 immediately after the number of cut stages is changed from three to two, initial values are adopted as the cutting amounts F and S for the first and second stages, and the initial values are used as current values. The cut amounts F and S may be stored in a storage medium. Alternatively, when the tape cutting load exclusion correction mode is off, if the cutting is performed in two steps even in step 110, the number of cutting steps is performed unless the user performs an operation to switch the tape cutting load exclusion correction mode. No switching occurs.

  Next, a case where the tape cutting load exclusion correction mode is set to ON will be described. When cutting in two stages, the ratio of the processing load (corresponding to the value C in FIG. 9) of the tape W2 due to the fact that the cutting amount T into the tape W2 is large and the material of the tape W2 is relatively hard Is increased, the cut division ratio (F: S) of the plate material W1 is attempted to make the first stage processing load (corresponding to the value D2) and the second stage processing load (corresponding to the value E2) uniform. -T) becomes unbalanced (departs more than 1). In order to prevent such a situation, a cut having an additional stage for cutting only the tape W2 is performed by the tape cutting load exclusion correction.

  Specifically, when the tape cutting load exclusion correction mode is set to ON, the process proceeds from step 125 to step 150, and the number of cut stages is set to 3. Subsequently, in step 155, a second cut correction determination is performed.

Specifically, when the number of steps of the previous cut is three, the representative current value D3 at the first step cut specified in the immediately preceding step 115 is compared with the representative current value E3 at the second step cut. If the first-stage representative current value D3 is smaller than the second-stage representative current value E3, the process proceeds to step 165. If the representative current value D3 is greater than the representative current value E3 , the process proceeds to step 160 .

  Further, when the number of steps of the previous cut is two, the representative current value C2 at the time of cutting only the tape W2 at the second step is subtracted from the representative current value E2 at the second step cut specified at the immediately preceding step 115. The calculated value E2-C2 is calculated. Then, the representative current value D2 at the time of the first stage cut is compared with the subtraction value E2-C2, and if the former D2 is smaller than the latter E2-C2, the process proceeds to step 165, where the former D2 is larger than the latter E2-C2. If yes, go to Step 160.

  In step 160, when the number of steps of the previous cut is 3, the result of subtracting the positive predetermined amount X (see FIG. 8) from the current cut amount P of the first step is the new cut of the first step. The amount P is recorded on the storage medium, and the result obtained by adding the predetermined amount X to the current second stage cut amount Q is recorded on the storage medium as a new second stage cut amount Q. That is, by reducing the first-stage cut amount P and increasing the second-stage cut amount Q by the decrease, the sum P + Q = h of the first-stage and second-stage cut amounts is not changed. The processing load of the first stage and the second stage is brought close to uniformity. Note that the cutting amount R at the third stage is a predetermined fixed value T. Also, if the number of steps of the previous cut is two in step 160, the first-stage cut amount F for the two-stage cut is substituted into the first-stage cut amount P for the three-stage cut. After substituting the value obtained by subtracting the fixed value T (the cut amount of the tape W2) from the second cut amount S for cutting into the second cut amount Q for the three-stage cut, the above processing is performed.

In step 165, the positive predetermined amount X (see FIG. 8) is added to the current first-stage cutting amount P.
Is recorded on the storage medium as a new first-stage cut amount P, and the result obtained by subtracting the predetermined amount X from the current second-stage cut amount Q is a new second-stage cut amount. Record as Q on the storage medium. That is, by increasing the first-stage cut amount P and decreasing the second-stage cut amount Q by the increment, the sum P + Q = h of the first-stage and second-stage cut amounts is not changed. The processing load of the first stage and the second stage is brought close to uniformity. Note that the cutting amount R at the third stage is a predetermined fixed value T. Even when the number of steps of the previous cut is two in step 165, the first-stage cut amount F for the two-stage cut is substituted into the first-stage cut amount P for the three-stage cut. After substituting the value obtained by subtracting the fixed value T (the cut amount of the tape W2) from the second cut amount S for cutting into the second cut amount Q for the three-stage cut, the above processing is performed.

  As a result, in step 180, the first, second, and third cuts are performed with the corrected cut amounts P, Q, and R (= T), so the first and second cuts for a certain cut line. The difference G2 between the representative current values of the first and second stages for the next cut line is smaller than the difference G1 between the representative current values of the eyes. By repeating such correction for each cut line, it is reduced to the extent that the unbalance between the first and second processing loads does not become a problem. Similarly, since the processing load of the tape W2 is excluded from the processing load of the second stage, even if the processing loads of the first stage and the second stage are equalized, the cut amounts of the first stage and the second stage are undefined. It's never too balanced.

  Also, by excluding the processing load of the tape W2 from the processing load of the second stage, the processing load of the tape cutting is excluded from the entire processing load, so that both the processing loads of the first stage and the second stage are reduced. can do. As a result, a margin can be provided up to the blade machining load limit, so that the feed speed at the time of cutting the first stage and the second stage can be increased accordingly. Also, when cutting the third stage (when only tape W2 is cut), there is little effect on the processing quality, so by increasing the feed speed from here alone, there is a time disadvantage due to the increased number of cut stages. Minimized. In this way, by providing the third stage for cutting only the tape W2, the cutting condition can be set and the processing speed can be increased.

  In Steps 140 and 145 immediately after the number of cut stages is changed from 2 to 3, the initial values are adopted as the cutting amounts P and Q for the first and second stages, and the initial values are used as current values. The cut amounts P and Q may be stored in a storage medium. Alternatively, when the tape cutting load exclusion correction mode is off, the number of cut stages is determined unless the user performs an operation to switch the tape cutting load exclusion correction mode if the cutting is performed in three stages in step 110 as well. No switching occurs.

  Next, a case where the tape cutting load exclusion correction mode is set to auto will be described. When the tape cutting load exclusion correction mode is auto, the process proceeds from step 125 to step 170. In step 170, the value C detected in the previous step 115 (equivalent value for the processing load when cutting the tape W2) is a predetermined threshold value. It is determined whether or not it exceeds. This predetermined threshold value may be a fixed value determined in advance, or may be a value obtained by multiplying the representative current value E at the time of the previous second stage cut by a predetermined coefficient (for example, 0.5). Good.

  If exceeded, it is considered that the processing load at the time of cutting the tape W2 is high, and the same processing as when the tape cutting load exclusion correction mode is on is performed. If not exceeded, it is considered that the processing load at the time of cutting the tape W2 is not high, and the same processing as that in the case where the tape cutting load exclusion correction mode is OFF is performed. By doing in this way, according to the processing load at the time of cutting of tape W2, the number of steps of a cut can be adjusted automatically.

  Here, the case where it is determined in step 105 that the ch mode is selected will be described. Also in this case, the same operation as in steps 110 to 180 in the L mode is performed. However, steps 110 and 180 differ in that not only one cut line but all cut lines for one channel are cut.

  As described above, the cutting device 1 applies the blade 15 to the blade 15 at the time of cutting each of the plurality of stages based on the current value detected by the current value detection circuit 22 at the time of cutting each of the plurality of stages (two stages). Each stage (one stage) is specified so that the machining load equivalent value is specified, and the machining load on the cutting tool 15 at the time of the cutting of each stage is made to be uniform based on the deviation amount G between the specified machining load equivalent values of each stage. First, second stage) is corrected.

  As described above, the cutting amount at each step is corrected by correcting the cutting amount at each step based on the amount of current value or power value detected at the time of cutting at each step, which reflects the machining load on the blade 15. The load can be made more uniform than before.

  Further, in addition to the plurality of steps (two steps), an additional step (third step) cut (cut that cuts the tape W2 for holding the plate material W1 at the time of cutting and does not cut the plate material W1) is executed.

  In general, when the plate material W1 is cut, a part of the base material W2 holding the plate material W1 is also cut. However, the amount of cutting into the base material W2 is large, the material of the base material W2 is relatively hard, and the like. Due to the influence, the ratio of the processing load of the base material W2 increases, and if the processing load at each stage is made uniform, the cutting amount at the final stage may become very small. However, as described above, by performing the step of cutting the base material W2 and not cutting the plate material W1, the amount of cutting becomes very unbalanced even in the equalization of processing loads in a plurality of steps other than this step. The possibility of being lost can be reduced.

  Further, based on the current value detected by the current value detection circuit 22 when only the tape W2 is cut, a processing load equivalent value to the blade 15 at the time of cutting only the tape W2 is specified, and the specified processing load equivalent value is determined. The additional stage is executed based on the fact that it is larger than the threshold value, and the cutting of the additional stage is not executed based on the specified machining load equivalent value being smaller than the threshold value. The plate material W1 and the tape W2 are cut. By doing in this way, execution and non-execution of an additional stage can be adjusted according to the processing load at the time of cutting of a substrate (W2).

  In the above embodiment, the control device 23 functions as an example of the correction detection unit 23a by executing Step 115, and functions as an example of the correction control unit 23b by executing Steps 125 to 180. Further, the process of cutting the plate material W1 is included in the manufacturing process of a plurality of components (for example, semiconductor components such as integrated circuits) made from the cut plate material W1.

(Other embodiments)
As mentioned above, although embodiment of this invention was described, the scope of the present invention is not limited only to the said embodiment, The various form which can implement | achieve the function of each invention specific matter of this invention is included. It is. For example, the following forms are also acceptable.

  (1) In the above embodiment, in step 115 of FIG. 6, the representative current values D and E at each stage are the processing load equivalent values to the blade 15, and the maximum value of the detected current value at the time of cutting at each stage Is adopted.

  In the actual cutting, due to factors such as deterioration of the blade 15, as shown in FIG. 13, from the start of cutting (ta, tc) to the end of cutting (tb, td) in each stage of one line, respectively. The current detection value increases by H1 and H2, or conversely, as shown in FIGS. 14 and 15, the cutting force of the blade is recovered by the blade's self-generated blades 41 to 43 during the cutting, and the current value starts from the middle. May decrease. In this case, the representative current value may be the maximum value in each fluctuation range as in the above embodiment, but an average value in each fluctuation range H1 and H2 may be adopted. Which one to employ may be selected in advance by the user using the operation unit of the cutting apparatus 1.

  As an advantage of adopting the maximum value, feedback control is performed based on the maximum machining load of the cut line to be cut, so that the risk of blade 15 breakage due to overload can be reduced. On the other hand, the merit of adopting the average value is that the variation within the fluctuation ranges H1 and H2 is averaged and corrected, so that the correction accuracy is improved and the machining load can be made sufficiently uniform with a small number of feedbacks. There is something.

  Variations in the fluctuation ranges H1 and H2 vary depending on the material of the workpiece W, the type of blade, and the cutting conditions. Therefore, since the user can arbitrarily select and set the adoption of the maximum value and the average value, correction control suitable for the purpose such as emphasizing correction accuracy, avoiding the risk of blade breakage, and extending the blade life can be performed. In addition, the user can switch between the maximum value and the average value depending on the cut result according to the cut result, so that further optimum correction can be performed.

  (2) In the above embodiment, the representative value (representative current value) of the detected current value at the time of cutting of each stage is adopted as the machining load equivalent value of each stage specified in step 115. As the machining load equivalent value, the representative value of the detection voltage value applied from the current value detection circuit 22 to the air spindle motor may be used instead of the representative value of the detection current value. It may be a representative value of the supplied detection power value. That is, the machining load equivalent value at each stage specified in step 115 may be an electrical amount related to power supply from the current value detection circuit 22 to the air spindle motor.

  (3) The motor for rotating the blade 15 is not limited to the air spindle motor, and any motor may be used.

  (4) In the above-described embodiment, the control device 23 automatically performs feedback correction of the cutting amount based on the machining load equivalent value of each stage. It may be interposed. For example, the control device 23 (or data logger) displays the detected current value at the time of machining at each stage to the user, and the user determines the correction amount for the cut amount at each stage based on the displayed detected current value. By inputting the determined user correction amount to the control device 23, the control device 23 may realize the correction amount.

  (5) In the above embodiment, the predetermined amount X used for correcting the cutting amount is a fixed value, but the predetermined amount X may be variable. For example, it may be gradually increased with time. This is because the processing load increases as the blade 15 wears. For example, the predetermined amount X may be reduced as the value G decreases.

  (6) In the above embodiment, when the number of cut stages is two, the representative current value C at the time of cutting only the tape W2 is specified from the detected current value at the time of the second stage cut. . This representative current value C is specified by using the load at the timing when only the tape is cut at the surplus cut portions on both sides of the workpiece W in one cut line. However, the surplus cut length is short. If the detected current value at the time of cutting the tape W2 is buried in the detected current value at the time of cutting the plate material W1 and a clear difference cannot be detected, the tape-only portion on the outer periphery of the wafer pasting portion is cut in advance and the detected value is It is good also as C value.

  (7) Moreover, in the said embodiment, based on the machining load equivalent value of each step in a certain (one or several) cut line of one to-be-cut object W, the cutting amount of each step is correct | amended, The cut amount after correction is reflected in the cuts of other cut lines of the same workpiece W.

  (8) However, in the case of mass production of the same kind of product, this is not necessarily the case. For example, each of the workpieces in one (one or more) cut lines of one workpiece W The cut amount of each step may be corrected based on the machining load equivalent value of the step, and the corrected cut amount may be reflected in the cut of the cut line of another workpiece W of the same type. In the case of the same kind of workpiece W, since the structure in the thickness direction is substantially the same, even if the correction amount using the cutting result of the other workpiece W is applied to the cut of a certain workpiece W, The processing load of the step can be made close to uniform.

  (9) When the workpiece W is a wafer or the like, it is almost the case that the load imbalance between the paths reoccurs after it is once determined that the value G is smaller than the reference value in Step 120 of the above embodiment. In the case of, it is considered to be an accident (some kind of sudden abnormality). In particular, when the representative current value at the time of cutting at each stage is the maximum current value detected at the time of cutting at that stage, a sudden and noisy value is easily detected as the representative current value. Therefore, once it is determined in step 120 that the value G is smaller than the reference value, the process proceeds to step 125 only if it is determined in step 120 that the value G is equal to or greater than the reference value twice. May proceed to step 180.

  (10) Moreover, in the said embodiment, in each stage (1st stage, 2nd stage) cut at the time of cutting the board | plate material W1 in multiple steps, based on the processing load equivalent value at the time of each stage cut, The cut amount of the step is corrected, but instead of the cut amount of each step, the feed rate of each step (the relative feed rate along the cut line with respect to the blade 15 of the plate material W1) is corrected. It may be. Specifically, the “cutting amount” in the above embodiment may be replaced with “the relative feed speed along the cut line of the plate material W1 with respect to the blade 15”. At this time, the entire machining time can be kept constant by reducing the feed speed in order to reduce the load of the stage with a high machining load and increasing the feed speed of the stage with a low machining load. In this case, the positive predetermined amount X is replaced with a negative correction amount Y. For example, the negative correction amount Y may be a value obtained by inverting the sign of the current feed rate and multiplying the inverted value by 0.1. In this case, the cut amount at each stage may be fixed without correction.

  In this way, it is possible to control the relative feed speed along the cutting line of the plate material W1 with respect to the blade 15 so that the processing load at the time of cutting at each stage can be made to be uniform. The method of controlling the cutting amount so as to make the machining load at the time of cutting at each stage uniform is advantageous in that the fluctuation of the time taken for cutting is reduced (stability of the machining time).

  (11) In the above embodiment, the machining load equivalent value of each stage is specified based on the detected current value detected by the current value detection circuit 22 when each stage is cut. The detection circuit 22 is replaced with a power value detection circuit (a circuit that detects the power value supplied from the power supply circuit 21 to the air spindle motor and outputs the detected power value of the detection result to the control device 23). The machining load equivalent value at each stage may be specified based on the detected current value. At this time, the control device 23 may perform an operation in which “current” is replaced with “electric power” in the above embodiment.

  (12) Even when the control device 23 automatically corrects the cut amount, the detected current value output by the current value detection circuit 22 may be displayed to the user.

  (13) In the above-described embodiment, the plate material W1 is always cut in two stages in one cut line, but the plate material W1 may be cut in three or more stages. In that case, the cutting amount at that stage may be corrected based on the machining load equivalent value at each stage so that the machining load becomes uniform at each of the three or more stages.

  (14) In the above embodiment, when cutting is performed in three stages, the end position on the tape W2 side in the depth direction of the second-stage cut Q (see FIG. 8) is the boundary between the plate material W1 and the tape W2. In some cases, the boundary between the plate material W1 and the tape W2 is not necessarily required. Specifically, the end position may be a position that is slightly cut into the tape W2. This is because, if the end position of the second-stage cut Q is close to the boundary, it becomes a cutting edge as to whether or not the plate material W1 is almost cut off, which causes a deterioration in processing quality on the back side such as chipping.

  In this case, when the case where only the tape W2 is cut in the second stage of the two stages is compared with the case where only the tape W2 is cut in the third stage of the three stages, the former cuts from the upper end of the tape W2. On the other hand, the latter is different in that the upper end of the tape W2 is partly cut in the former.

  (15) The tape W2 of the above embodiment may be replaced with a sheet. That is, the tape W2 may be anything as long as it is a sheet-like base material to which an adhesive is attached to hold the plate material W1.

  (16) In the above embodiment, each function realized by the controller 23 executing the program is hardware having those functions (for example, an FPGA capable of programming a circuit configuration). It may be realized by using.

DESCRIPTION OF SYMBOLS 1 Cutting device 11 Base 12 Movable stage 13 Chuck table 14 Blade drive part 15 Blade 16 Tape holding frame 21 Power supply circuit 22 Current value detection circuit 23 Control device 23a Correction detection means 23b Correction control means 24 Actuator group

Claims (6)

A cutting device that uses a rotary blade (15), and cuts the plate (W1) in a plurality of stages in the thickness direction in stages,
A detection circuit (22) for detecting a current value or a power value supplied to a motor for rotating the blade (15);
A control device (23) for controlling a cutting amount which is a depth of cutting in the thickness direction of each of the plurality of steps by the cutting tool (15),
The control device (23) is configured to control the cutting tool (15) at the time of cutting each of the plurality of stages based on the current value or power value detected by the detection circuit (22) at the time of cutting each of the plurality of stages. ) Is specified, and the processing load on the cutting tool (15) at the time of cutting at each stage of a plurality of stages is determined based on the deviation (G) between the specified machining load equivalent values at each stage. Correct the amount of cut at each step so that
In addition to the plurality of steps, the control device (23) cuts the base material (W2) for holding the plate material (W1) at the time of cutting and performs an additional step cut that does not cut the plate material (W1). A cutting device characterized by the above. The control device (23) is configured to cut only the base material (W2) based on the current value or the power value detected by the detection circuit (22) when only the base material (W2) is cut. The machining load equivalent value to the cutting tool (15) is specified, and the additional machining is performed based on the identified machining load equivalent value being larger than the threshold value, and the identified machining load equivalent value is smaller than the threshold value. based on, without executing a cut of the additional stage, cutting apparatus according to claim 1, characterized in that cutting the last stage plate (W1) and said base material (W2) of said plurality of stages . The control device (23) employs the maximum value of the current value or power value detected by the detection circuit (22) at the time of cutting each stage as the machining load equivalent value of each stage. The cutting device according to claim 1 or 2 . The control device (23) employs an average value of the current value or power value detected by the detection circuit (22) at the time of cutting each stage as the machining load equivalent value of each stage. The cutting device according to claim 1 or 2 . A cutting method in which a rotary blade (15) is used and the plate material (W1) is divided into a plurality of stages in the thickness direction and cut stepwise.
Based on the current value or the power value supplied to the motor that rotates the blade tool (15) at the time of cutting each of the plurality of stages, the processing load on the blade tool (15) at the time of cutting each of the plurality of stages is determined. Correct the depth of cut at each step so that they are close to uniform ,
In addition to the plurality of steps, the cutting method is characterized in that the base material (W2) for holding the plate material (W1) at the time of cutting is cut and an additional step cut is performed without cutting the plate material (W1) . A manufacturing method for manufacturing a part from a plate material (W1),
The manufacturing method characterized by including the process of cutting the said board | plate material with the cutting method of Claim 5 .

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