JP5448423B2 - Tactile sensor and manufacturing method thereof - Google Patents

Description

  The present invention relates to a tactile sensor that is used for artificial skin of a robot and the like and detects a load input from a contact object, and a manufacturing method thereof.

  For example, when a gripping object is gripped with a robot hand, if the gripping force is too large, the gripping object may be damaged by the gripping force. On the other hand, if the gripping force is too small, the gripping target may slide off from the robot hand. Thus, in the robot hand, precise control of the gripping force is necessary. When gripping the gripping object with the robot hand, a load is input from the gripping object to the robot hand as a reaction force of the gripping force. The load is decomposed into a compressive force and a shearing force (force applied in the “sliding direction” or “slipping direction”). The compressive force is input in a substantially normal direction on the surface of the robot hand. The shearing force is input in a substantially plane development direction on the surface of the robot hand.

In order to detect the load input from the object to be gripped by decomposing the force into a compression force and a shear force, Patent Document 1 discloses deformation of the pressure receiving column due to the load for the X direction, the Y direction, and the Z direction. The contact sensor which detects by three sets of strain gauges is disclosed. Patent Document 2 discloses a tactile sensor that detects deformation of a diaphragm due to a load by a gauge resistance. Patent Document 3 discloses a tactile sensor that captures an image change of an acrylic plate (light guide plate) due to a load with a CCD camera. Patent Document 4 discloses a tactile sensor that electrically detects a change in a signal waveform of a piezoelectric element due to a load.
Japanese Patent Laid-Open No. 3-113334 JP 63-113326 A JP-A-7-128163 JP 2002-31574 A

  However, according to the sensors of Patent Documents 1 to 4, all of them are a single sensor element for detecting a load (a pressure receiving column in the sensor of Patent Document 1, a diaphragm in the sensor of Patent Document 2, and a sensor of Patent Document 3). An acrylic plate, a piezoelectric element in the sensor of Patent Document 4) is commonly used for compressive force detection and shear force detection. Therefore, a special structure (three sets of strain gauges in the sensor of Patent Document 1 and gauge resistance in the sensor of Patent Document 2) is separately used to decompose the load input from the object to be gripped into compression force and shear force. The image processing device in the sensor of Patent Document 3 and the signal waveform processing circuit in the sensor of Patent Document 4) are required.

  The tactile sensor and the manufacturing method thereof according to the present invention have been completed in view of the above problems. Therefore, an object of the present invention is to provide a tactile sensor that can easily decompose a load input from a contact object into a compressive force and a shear force. Moreover, an object of this invention is to provide the manufacturing method of the tactile sensor which can manufacture the said tactile sensor easily.

(1) In order to solve the above-described problem, the tactile sensor of the present invention has an input surface to which a load is input from a contact object, and a shear force applied to the load in a substantially surface deployment direction of the input surface; A tactile sensor which can be detected by being decomposed into a compressive force applied in a substantially normal direction of the input surface, and includes a front electrode layer for detecting a shear force, a back electrode layer for detecting a shear force, and a sensor for detecting the shear force An elastomeric shearing force detection dielectric layer interposed between the front electrode layer and the shearing force detection backside electrode layer, and the shearing force detection dielectric layer is elastically deformed by the shearing force. Thus, the effective electrode area formed by overlapping the front electrode layer for shear force detection and the back electrode layer for shear force detection in the front and back direction changes, and the capacitance changes due to the change in the effective electrode area. A shearing force detection unit capable of detecting a change in the shearing force, and a compression force detection A compressive force detecting dielectric layer interposed between the side electrode layer, the compressive force detecting back electrode layer, the compressive force detecting front electrode layer and the compressive force detecting back electrode layer; The compressive force detecting dielectric layer is elastically deformed by the compressive force, whereby the thickness of the compressive force detecting dielectric layer is changed, and the capacitance is changed by the change of the layer thickness. A compression force detection unit capable of detecting a change in the compression force, and interposed between the shear force detection unit and the compression force detection unit, the shear force detection unit and the compression force detection unit, an insulating layer to ensure insulation between you and characterized in that it comprises a. Here, the “elastomer” includes a material in which an additive, a filler or the like is blended with an elastomer as a base material.

  The tactile sensor of the present invention includes a shearing force detection unit and a compression force detection unit independently. In the shearing force detection unit, the shearing force is detected from the load input from the contact object. Specifically, when a shear force is applied to the shear force detection unit, the effective electrode area changes. When the effective electrode area changes, the capacitance of the shear force detection unit changes. A shear force is detected based on the change in capacitance. Moreover, in the compressive force detection part, compressive force is detected among the loads input from the contact target object. Specifically, when a compressive force is applied to the compressive force detector, the thickness of the compressive force detecting dielectric layer changes. When the layer thickness changes, the capacitance of the compressive force detector changes. A compressive force is detected based on the change in capacitance. Thus, according to the tactile sensor of the present invention, the load input from the contact object can be easily decomposed into a shearing force and a compressive force.

(2) Preferably, in the configuration of (1), the insulating layer includes a blocking layer that suppresses an increase in capacitance between the shearing force detection unit and the compression force detection unit. If it is not good.

  For example, when a shearing force detection unit is arranged on the front side and a compression force detection unit is arranged on the back side, a shearing force detection backside electrode layer of the shearing force detection unit, and a compressive force detection frontside electrode layer of the compression force detection unit, In the meantime, a capacitor may be formed in a pseudo manner. Similarly, when a compressive force detection unit is arranged on the front side and a shearing force detection unit is arranged on the back side, a compression force detection backside electrode layer of the compression force detection unit, and a shearing force detection front side electrode layer of the shearing force detection unit , There is a possibility that a capacitor is formed in a pseudo manner. In this case, the electrostatic capacity accumulated in the pseudo capacitor acts as noise, and there is a possibility that the detection accuracy of the shearing force and the compressive force is lowered. In this regard, according to the present configuration, the blocking layer is disposed on the insulating layer. For this reason, it is possible to suppress an increase in the capacitance accumulated in the pseudo capacitor.

(3) Preferably, in the configuration of (1) or (2), the shearing direction spring constant of the shearing force detection dielectric layer is smaller than the compression direction spring constant of the shearing force detection dielectric layer, and the compression direction spring constant of compression force detecting dielectric layer is not good is better to smaller configuration than the compression direction spring constant of the shear force detecting dielectric layer.

The capacitance of the capacitor is calculated from equation (1).

  In formula (1), C is a capacitance, ε is a dielectric constant, S is an area of opposing electrodes (effective electrode area in the present invention), and d is a distance between a pair of electrodes.

  When a load is input to the input surface from an oblique direction, the effective electrode area S of the shear force detector changes due to the shear force. That is, the capacitance C changes. In addition, due to the compressive force, the distance d between the shearing force detection front electrode layer and the shearing force detection back electrode layer of the shearing force detection unit is reduced. That is, the capacitance C increases. For this reason, it becomes difficult to determine whether the change in the apparent capacitance C of the shearing force detection unit is caused by the shearing force or the compression force.

  In this regard, according to the present configuration, the spring constant of the shearing force detecting dielectric layer has anisotropy. That is, the shearing force detecting dielectric layer is easily deformed in the shearing direction and hardly deformed in the compression direction. For this reason, the detection accuracy of the shear force is improved.

  The compression direction spring constant of the compressive force detecting dielectric layer is set to be smaller than the compression direction spring constant of the shearing force detecting dielectric layer. For this reason, the compressive force detecting dielectric layer is more easily deformed in the compressing direction than the shearing force detecting dielectric layer. Therefore, the detection accuracy of the compression force is improved.

(4) Preferably, in any one of the constitutions (1) to (3), the surface area of the shearing force detecting dielectric layer and the surface area of the compressive force detecting dielectric layer are substantially the same. , and the thickness of the shear force detecting dielectric layer, than the layer thickness of the compressive force detecting dielectric layer, it is not good for a thin structure.

As an example, a case where the dielectric layer is a rectangular parallelepiped having a square cross section will be described. The relationship between the ratio of the shear direction spring constant of the dielectric layer and the compression direction spring constant and the shape of the dielectric layer is expressed by Equation (2). expressed.

  In Equation (2), ks is a shear direction spring constant, kc is a compression direction spring constant, and F is a form factor.

The form factor F is calculated from the equation (3).

  In Expression (3), a is the full length in the vertical direction and the full length in the horizontal direction of the rectangular parallelepiped, and h is the thickness of the dielectric layer.

  As can be seen from Equation (2), the larger the form factor F, the smaller the shear direction spring constant ks when the compression direction spring constant kc is constant. That is, the dielectric layer is easily deformed in the shear direction. For this reason, it is better that the shape factor F is larger in the dielectric layer for detecting the shear force.

  Conversely, the smaller the form factor F, the smaller the compression direction spring constant kc when the shear direction spring constant ks is constant. That is, the dielectric layer is easily deformed in the compression direction. For this reason, in the compressive force detection dielectric layer, it is preferable that the form factor F is small.

  As can be seen from Equation (3), in order to increase the shape factor F, the layer thickness h may be reduced with respect to the area s. On the contrary, in order to reduce the form factor F, the layer thickness h may be increased with respect to the area s.

  In this respect, according to the present configuration, the thickness of the shearing force detecting dielectric layer is thinner than that of the compressive force detecting dielectric layer. For this reason, the dielectric layer for detecting a shear force can be preferentially deformed in the shear direction. Therefore, the detection accuracy of the shear force is improved. The compressive force detecting dielectric layer can be preferentially deformed in the compression direction. Therefore, the detection accuracy of the compression force is improved.

(5) Preferably, in any one of the configurations (1) to (4), the front electrode layer for detecting a shear force and the back electrode layer for detecting a shear force are arranged so as to be shifted from each other when viewed from the front and back directions. it is not good to be a configuration that is.

  According to this configuration, the direction of the shearing force applied to the shearing force detection unit can be easily detected. The reason will be described below.

  FIG. 1A is a schematic diagram in a no-load state of a shear force detection unit in which the front electrode layer for shear force detection and the back electrode layer for shear force detection are completely overlapped when viewed from the front and back directions. Show. FIG. 1B is a schematic diagram showing a state in which a shearing force is applied in the left-to-right direction of the shearing force detection unit. FIG. 1C shows a schematic diagram in a state where a shearing force is applied in the right-to-left direction of the shearing force detection unit. 1A, 1B, and 1C are schematic diagrams for explaining the operation of the present configuration, in which the shape, the arrangement direction, the layer thickness of each layer, The arrangement, deformation state, etc. are not limited at all.

  As shown in FIG. 1A, in a no-load state, the shearing force detection front electrode layer 101 and the shearing force detection backside electrode layer 102 are completely overlapped when viewed in the vertical direction (front and back direction). .

  As shown in FIG. 1B, when a shearing force is applied in the right direction, the shearing force detecting dielectric layer 100 is tilted in the right direction. For this reason, the front electrode layer 101 for shear force detection is shifted to the right with respect to the back electrode layer 102 for shear force detection. Therefore, the effective electrode area S in which the front electrode layer 101 for shear force detection and the back electrode layer 102 for shear force detection are formed overlapping in the vertical direction is reduced. As can be seen from the above equation (1), the capacitance C decreases as the effective electrode area S decreases.

  On the other hand, as shown in FIG. 1C, when a shearing force is applied in the left direction, the shearing force detecting dielectric layer 100 is tilted in the left direction. For this reason, the front electrode layer 101 for detecting a shear force is shifted leftward with respect to the back electrode layer 102 for detecting a shear force. Therefore, the effective electrode area S in which the front electrode layer 101 for shear force detection and the back electrode layer 102 for shear force detection are formed overlapping in the vertical direction is reduced. As can be seen from the above equation (1), the capacitance C decreases as the effective electrode area S decreases.

  Thus, it can be seen from the change in the capacitance C that a shear force is applied to the shear force detector. However, the direction of the shear force is unknown. The reason is that the effective electrode area S, that is, the capacitance C, is small whether the shearing force is applied in the right direction (FIG. 1B) or in the left direction (FIG. 1C). Because it becomes.

  In this respect, according to the present configuration, the shearing force detection front electrode layer and the shearing force detection back electrode layer are arranged so as to be shifted from the front and back directions. FIG. 2A shows a schematic diagram in a no-load state of the shearing force detection unit of this configuration. FIG. 2B shows a schematic diagram in a state where a shearing force is applied in the left-to-right direction of the shearing force detection unit. FIG. 2C shows a schematic diagram in a state where a shearing force is applied in the right-to-left direction of the shearing force detection unit. 2 (a), 2 (b), and 2 (c) are schematic diagrams for explaining the operation of the present configuration. The shape of the shearing force detection unit, the arrangement direction, the layer thickness of each layer, The arrangement, deformation state, etc. are not limited at all.

  As shown in FIG. 2A, in a no-load state, the shearing force detection front electrode layer 101 and the shearing force detection backside electrode layer 102 are viewed in the left-right direction (surface development) when viewed from the up-down direction (front-back direction). Direction).

  As shown in FIG. 2B, when a shearing force is applied in the right direction, the shearing force detecting dielectric layer 100 is tilted in the right direction. Therefore, the shearing force detection front electrode layer 101 moves to the right with respect to the shearing force detection back electrode layer 102. Therefore, the effective electrode area S in which the front electrode layer 101 for shear force detection and the back electrode layer 102 for shear force detection are formed overlapping in the vertical direction is increased. As can be seen from the above equation (1), as the effective electrode area S increases, the capacitance C increases.

  On the other hand, as shown in FIG. 2C, when a shearing force is applied in the left direction, the shearing force detecting dielectric layer 100 is tilted in the left direction. Therefore, the shearing force detection front electrode layer 101 moves leftward with respect to the shearing force detection back electrode layer 102. Therefore, the effective electrode area S in which the front electrode layer 101 for shear force detection and the back electrode layer 102 for shear force detection are formed overlapping in the vertical direction is reduced. As can be seen from the above equation (1), the capacitance C decreases as the effective electrode area S decreases.

  Thus, it can be seen from the change in the capacitance C that a shear force is applied to the shear force detector. Moreover, when the electrostatic capacitance C becomes large, it turns out that the shear force is added to the right direction. Moreover, when the electrostatic capacitance C becomes small, it turns out that the shear force is added to the left direction. That is, according to this configuration, the direction of the shearing force applied to the shearing force detection unit can be easily detected from the change (increase / decrease) direction of the capacitance C.

(6) Preferably, in the configuration of any one of (1) to (5), the front electrode layer for detecting a shear force detects an X-direction component force applied to the X direction out of the shear force. A front-side electrode layer, and a Y-direction front-side electrode layer that detects a Y-direction component force applied in the Y-direction substantially orthogonal to the X-direction among the shear forces, and the back-side electrode layer for shear-force detection is An X-direction back electrode layer for detecting the X-direction component force, and a Y-direction back electrode layer for detecting the Y-direction component force, the X-direction front electrode layer and the X-direction back electrode. The layer has an elongated shape in which the Y-direction overall length is longer than the X-direction overall length, and the Y-direction front-side electrode layer and the Y-direction back-side electrode layer are in the X-direction overall length rather than the Y-direction overall length. If you make a configuration in which more of is the shape of a long elongated shape it is not good.

  FIG. 3A is a schematic diagram viewed from the front and back directions of the shearing force detection unit of this configuration in a no-load state. FIG. 3B is a schematic diagram viewed from the front and back directions (front and back directions of the front electrode layer for X direction and the back electrode layer for X direction) in a state where a shear force is applied in the Y direction of the shear force detection unit. Show. FIG. 3C is a schematic diagram viewed from the front and back directions in a state where a shear force is applied in the X direction of the shear force detector. 3A, 3B, and 3C are schematic diagrams for explaining the operation of the present configuration, and the shapes of the front electrode layer for X direction and the back electrode layer for X direction are shown. There is no limitation on the arrangement, overlapping state, and the like.

  As shown in FIG. 3A, in the no-load state, the X-direction front electrode layer 101X and the X-direction back electrode layer 102X are completely overlapped when viewed from the front and back directions. That is, the effective electrode area S (shown by hatching for convenience of description) is secured by the front electrode layer 101X for X direction and the back electrode layer 102X for X direction. The effective electrode area S is the X direction total length A1 of the X direction front electrode layer 101X and the X direction back electrode layer 102X, and the Y direction total length A2 of the X direction front electrode layer 101X and the X direction back electrode layer 102X (> A1).

  As shown in FIG. 3B, when a shearing force is applied in the Y direction, the X-direction front electrode layer 101X moves in the Y direction by a displacement amount ΔA with respect to the X-direction back electrode layer 102X. Therefore, the effective electrode area S is reduced.

  Similarly, as shown in FIG. 3C, when a shearing force is applied in the X direction, the front electrode layer 101X for X direction is displaced by a displacement amount ΔA in the X direction with respect to the back electrode layer 102X for X direction. Moving. Therefore, the effective electrode area S is reduced.

  Here, the total Y-direction length A2 of the X-direction front electrode layer 101X and the X-direction back electrode layer 102X is longer than the X-direction total length A1 of the X-direction front electrode layer 101X and the X-direction back electrode layer 102X. For this reason, even if the amount of displacement in both the X and Y directions is ΔA, the amount of change in the effective electrode area S is greater when shear force is applied in the X direction than when shear force is applied in the Y direction. large. Therefore, the X-direction component force of the shearing force can be accurately detected by the X-direction front electrode layer 101X and the X-direction back electrode layer 102X.

  On the other hand, in the front-side electrode layer for Y direction and the back-side electrode layer for Y direction, the displacement amount in both the X direction and the Y direction is ΔA, as can be seen from replacing the X direction and the Y direction of the coordinates in FIG. However, the amount of change in the effective electrode area S is larger when the shear force is applied in the Y direction than when the shear force is applied in the X direction. Therefore, the Y-direction component force of the shearing force can be accurately detected by the Y-direction front electrode layer and the Y-direction back electrode layer.

  (6-1) Preferably, the configuration of (6) above and the configuration of (5) above are combined. That is, the front electrode layer for X direction and the back electrode layer for X direction may be arranged so as to be shifted in the X direction when viewed from the front and back directions. Further, the front electrode layer for Y direction and the back electrode layer for Y direction may be shifted in the Y direction when viewed from the front and back directions. In this way, the X direction component force and the Y direction component force can be detected with high accuracy.

(7) Preferably, in any one of the constitutions (1) to (6), the shearing force detection front electrode layer is covered from the outside to ensure insulation between the shearing force detection front electrode layer and the outside. If you configured to have a protective layer is not good. According to this structure, it can suppress that the front side electrode layer for shear force detection and the exterior are conduct | electrically_connected.

(8) Preferably, in any one of the constitutions (1) to (7), the insulating layer is made of an elastomer, and the front electrode layer for shear force detection and the back electrode layer for shear force detection are Each of which is made of an elastomer, and further includes an elastomeric shearing force detection surface wiring connected to the shearing force detection front electrode layer, and an elastomeric shearing force connected to the shearing force detection backside electrode layer. It has a detection backside wiring, a, and a the shear force detection front lines and the shear force detection backside wiring, have good better be configured to detect a change in capacitance.

  According to this configuration, the insulating layer, the shearing force detection front electrode layer, the shearing force detection backside electrode layer, the shearing force detection front side wiring, and the shearing force detection backside wiring are all made of elastomer. That is, these members are easily elastically deformed. For this reason, there is little possibility that these members will regulate the elastic deformation of the dielectric shear force detection dielectric layer.

(9) Moreover, in order to solve the said subject, the manufacturing method of the tactile sensor of this invention is a manufacturing method of the tactile sensor of said (8), Comprising: On the surface of the said insulating layer, the said back side wiring for shear force detection And the back electrode layer for detecting shear force, printing the dielectric layer for detecting shear force on the surface of the back electrode layer for detecting shear force, and detecting the shear force on the surface of the dielectric layer for detecting shear force by printing use front side wiring and the said shearing force detecting surface side electrode layer, you characterized by having a shear force detector producing step of producing said shearing force detector.

  According to the method for manufacturing a tactile sensor of the present invention, the shearing force detection unit can be manufactured by a simple method of printing. In addition, the positioning of the shearing force detection backside wiring, the shearing force detection backside electrode layer, the shearing force detection dielectric layer, the shearing force detection front side wiring, and the shearing force detection front side electrode layer is performed with accuracy. Can be done well.

  (9-1) Preferably, the configuration of (9) above, the configuration of (8) above, and the configuration of (4) above are combined. According to this configuration, a relatively thin dielectric layer for detecting a shearing force can be easily produced by printing. In addition, it is possible to suppress variation in the layer thickness in the portion between the shearing force detection front electrode layer and the shearing force detection back electrode layer of the shearing force detection dielectric layer.

  ADVANTAGE OF THE INVENTION According to this invention, the tactile sensor which can decompose | disassemble the load input from the contact target object easily into a compressive force and a shearing force can be provided. According to the present invention, the tactile sensor can be easily manufactured.

  Hereinafter, embodiments of the tactile sensor of the present invention and the manufacturing method thereof will be described.

<First embodiment>
[Configuration of tactile sensor]
First, the configuration of the tactile sensor of this embodiment will be described. FIG. 4A shows a cross-sectional view in the vertical direction (front and back direction) of the tactile sensor of the present embodiment. FIG. 4B shows a top view of the tactile sensor. In FIG. 4A, the thickness in the vertical direction of the tactile sensor is shown with emphasis. In FIG.4 (b), it permeate | transmits and shows an upper side protective layer. Moreover, in FIG.4 (b), the back side electrode layer for shear force detection is shown with a dotted line. In FIG. 4B, the effective electrode area is hatched. In FIG. 4B, the shearing force detection front side wiring 23 and the compressive force detection front side wiring 33 are omitted.

  As shown in FIGS. 4A and 4B, the tactile sensor 1 according to the present embodiment includes a shear force detection unit 2, a compression force detection unit 3, an insulating layer 4, an upper protective layer 5, and A lower protective layer 6.

  The insulating layer 4 is made of polyurethane and has a square plate shape. The vertical layer thickness of the insulating layer 4 is 2 mm. The insulating layer 4 is included in the blocking layer of the present invention.

  The shearing force detection unit 2 includes a shearing force detection front electrode layer 20, a shearing force detection backside electrode layer 21, a shearing force detection dielectric layer 22, a shearing force detection front side wiring 23, and a shearing force detection backside. Wiring 24. The shearing force detection unit 2 is disposed on the upper surface (surface) of the insulating layer 4.

  The shearing force detection back side wiring 24 is formed including polyurethane and silver particles. The back side wiring 24 for detecting a shearing force has a linear shape with a width of 1 mm. The shearing force detection back side wiring 24 is printed on the upper surface of the insulating layer 4. The layer thickness in the vertical direction of the back side wiring 24 for detecting the shearing force is 0.03 mm.

  The shearing force detection back electrode layer 21 is formed including acrylic rubber and conductive carbon black. The back electrode layer 21 for detecting a shearing force has a rectangular thin film shape. The shearing force detection backside electrode layer 21 is printed on the upper surface of the insulating layer 4 so as to partially overlap the shearing force detection backside wiring 24. The vertical thickness of the back electrode layer 21 for detecting a shear force is 0.05 mm.

  The shearing force detecting dielectric layer 22 is made of acrylic rubber and has a square thin film shape. The shearing force detection dielectric layer 22 includes an upper surface of the shearing force detection backside electrode layer 21, an upper surface of the shearing force detection backside wiring 24 (excluding a portion where the shearing force detection backside electrode layer 21 is printed), an insulating layer 4 is printed on the upper surface (excluding the portion where the shearing force detection backside electrode layer 21 and the shearing force detection backside wiring 24 are printed). The maximum value of the vertical layer thickness of the shearing force detecting dielectric layer 22 is 0.15 mm. The vertical layer thickness (hereinafter referred to as “interelectrode layer thickness”) between the shearing force detection front electrode layer 20 and the shearing force detection backside electrode layer 21 in the shearing force detection dielectric layer 22 is as follows. 0.1 mm.

  The front side wiring 23 for shearing force detection is formed including polyurethane and silver particles. The front-side wiring 23 for detecting the shearing force has a linear shape with a width of 1 mm. The shearing force detection front side wiring 23 is printed on the upper surface of the shearing force detection dielectric layer 22. The layer thickness in the vertical direction of the front-side wiring 23 for detecting the shearing force is 0.03 mm.

  The front-side electrode layer 20 for detecting a shear force is formed including acrylic rubber and conductive carbon black. The front-side electrode layer 20 for detecting a shearing force has a rectangular thin film shape. The shearing force detection front electrode layer 20 is printed on the upper surface of the shearing force detection dielectric layer 22 so as to partially overlap the shearing force detection front side wiring 23.

  The shearing force detection front electrode layer 20 and the shearing force detection back electrode layer 21 are arranged so as to be shifted in the left-right direction when viewed from above. Specifically, the shearing force detection front side electrode layer 20 is shifted to the right side by a predetermined amount with respect to the shearing force detection backside electrode layer 21. The vertical thickness of the front electrode layer 20 for detecting the shear force is 0.05 mm. The portion where the shearing force detection front electrode layer 20 and the shearing force detection backside electrode layer 21 overlap in the vertical direction is the effective electrode area S1 of the shearing force detection unit 2. A predetermined applied voltage can be applied between the shearing force detection front electrode layer 20 and the shearing force detection back electrode layer 21 by closing a switch of an electric circuit (not shown).

  The compressive force detector 3 includes a compressive force detecting front electrode layer 30, a compressive force detecting back electrode layer 31, a compressive force detecting dielectric layer 32, a compressive force detecting front wiring 33, and a compressive force detecting back side. Wiring 34. The compressive force detector 3 is disposed on the lower surface (back surface) of the insulating layer 4.

  The compressive force detecting dielectric layer 32 is made of urethane foam and has a square thin film shape. The vertical thickness of the compressive force detecting dielectric layer 32 is 1 mm.

  The compressive force detecting front-side wiring 33 is formed to include polyurethane and silver particles. The compressive force detection front wiring 33 has a linear shape with a width of 1 mm. The compressive force detection front side wiring 33 is printed on the upper surface of the compressive force detection dielectric layer 32. The vertical thickness of the compressive force detection front-side wiring 33 is 0.03 mm.

  The compressive force detection back side wiring 34 is formed to include polyurethane and silver particles. The back wiring 34 for detecting the compressive force has a linear shape with a width of 1 mm. The compressive force detecting backside wiring 34 is printed on the lower surface of the compressive force detecting dielectric layer 32. The vertical layer thickness of the back side wiring 34 for detecting the compressive force is 0.03 mm.

  The compressive force detecting front electrode layer 30 is formed to include acrylic rubber and conductive carbon black. The compressive force detecting front electrode layer 30 has a square thin film shape. The compressive force detecting front electrode layer 30 is fixed to the upper surface of the compressive force detecting dielectric layer 32 so as to partially overlap the compressive force detecting front wiring 33. In addition, the compressive force detecting front electrode layer 30 is fixed to the lower surface of the insulating layer 4. The vertical thickness of the compressive force detecting front electrode layer 30 is 0.05 mm.

  The back side electrode layer 31 for compressive force detection is formed including acrylic rubber and conductive carbon black. The back electrode layer 31 for detecting compressive force has a square thin film shape. The compressive force detecting back electrode layer 31 is fixed to the lower surface of the compressive force detecting dielectric layer 32 so as to partially overlap the compressive force detecting back wiring 34. The vertical thickness of the back electrode layer 31 for detecting the compressive force is 0.05 mm. A predetermined applied voltage can be applied between the compressive force detecting front electrode layer 30 and the compressive force detecting back electrode layer 31 by closing a switch of an electric circuit (not shown).

  The upper protective layer 5 is formed including acrylic rubber. The upper protective layer 5 has a square thin film shape. The upper protective layer 5 covers the shearing force detection unit 2 from above. The upper protective layer 5 is included in the protective layer of the present invention. On the upper surface of the upper protective layer 5, an input surface 50 for inputting a load from the contact object is disposed. The lower protective layer 6 is formed including acrylic rubber. The lower protective layer 6 has a square thin film shape. The lower protective layer 6 covers the compressive force detector 3 from below.

[Tactile sensor movement]
Next, the movement of the tactile sensor 1 of the present embodiment will be described. A predetermined applied voltage is applied between the front electrode layer 20 for detecting a shear force and the back electrode layer 21 for detecting a shear force by an electric circuit (not shown). In addition, a predetermined applied voltage is applied between the compressive force detecting front electrode layer 30 and the compressive force detecting back electrode layer 31 by an electric circuit (not shown).

  First, as shown in FIG. 4A, a case where a load F1 is input from the contact target to the input surface 50 in the direction from the upper left to the lower right will be described. The load F1 can be decomposed into a shearing force F1s in the surface development direction (left-right direction) of the input surface 50 and a compressive force F1c in the normal direction (up-down direction) of the input surface 50.

  FIG. 5A is a vertical sectional view of the tactile sensor according to the present embodiment in a state where a load is input in a direction from the upper left to the lower right. FIG. 5B shows a top view of the tactile sensor in a state where a load is input in a direction from the upper left to the lower right. In FIG. 5A, the thickness in the vertical direction of the tactile sensor is shown with emphasis. In FIG.5 (b), it penetrates and shows an upper side protective layer. Moreover, in FIG.5 (b), the back side electrode layer for shear force detection is shown with a dotted line. Further, in FIG. 5B, the effective electrode area is hatched. In FIG. 5B, the shearing force detection front side wiring 23 and the compressive force detection front side wiring 33 are omitted.

  As shown in FIGS. 5A and 5B, the shearing force detecting dielectric layer 22 is deformed rightward by the shearing force F1s. Specifically, the upper surface is shifted rightward with respect to the lower surface of the shearing force detecting dielectric layer 22. For this reason, the shearing force detection front electrode layer 20 is shifted to the right with respect to the shearing force detection backside electrode layer 21. Therefore, the effective electrode area S1 is reduced. As the effective electrode area S1 decreases, the capacitance C decreases (see the above formula (1)). From the change in the capacitance C, the magnitude and direction of the shearing force F1s are calculated by a calculation unit (not shown).

  Further, as shown in FIG. 5A, the compressive force detecting dielectric layer 32 is compressed in the vertical direction by the compressive force F1c. For this reason, the space | interval (henceforth "interelectrode distance") T1 between the front side electrode layer 30 for compressive force detection and the back side electrode layer 31 for compressive force detection becomes small. As the inter-electrode distance T1 decreases, the capacitance C increases (see the above formula (1)). From the change in the capacitance C, the magnitude of the compression force F1c is calculated by a calculation unit (not shown).

  Next, a case where a load is input from the left and right opposite directions with respect to the load F1 of FIG. FIG. 6A is a vertical cross-sectional view of the tactile sensor according to the present embodiment in a state where a load is input in a direction from the upper right to the lower left. FIG. 6B shows a top view of the tactile sensor in a state where a load is input in a direction from the upper right to the lower left. In FIG. 6A, the thickness in the vertical direction of the tactile sensor is shown with emphasis. In FIG.6 (b), it permeate | transmits and shows an upper side protective layer. Moreover, in FIG.6 (b), the back side electrode layer for shear force detection is shown with a dotted line. Further, in FIG. 6B, the effective electrode area is hatched. In FIG. 6B, the shearing force detection front side wiring 23 and the compressive force detection front side wiring 33 are omitted. As in FIG. 4, the load can be decomposed into a shearing force in the surface development direction (left-right direction) of the input surface 50 and a compressive force in the normal direction (up-down direction) of the input surface 50.

  As shown in FIGS. 6A and 6B, the shearing force detecting dielectric layer 22 is deformed leftward by the shearing force. Specifically, the upper surface is shifted leftward with respect to the lower surface of the shearing force detecting dielectric layer 22. For this reason, the shearing force detection front electrode layer 20 is shifted leftward with respect to the shearing force detection backside electrode layer 21. Therefore, the effective electrode area S1 is increased. As the effective electrode area S1 increases, the capacitance C increases (see the above formula (1)). From the change in the capacitance C, the magnitude and direction of the shearing force are calculated by a calculation unit (not shown).

  Further, as shown in FIG. 6A, the compressive force detecting dielectric layer 32 is compressed in the vertical direction by the compressive force. The calculation method of the compressive force is the same as in the case of FIG. 5A (when the load F1 is input from the contact object to the input surface 50 in the direction from the upper left to the lower right). Therefore, explanation is omitted here.

[Manufacturing method of tactile sensor]
Next, a method for manufacturing the tactile sensor 1 of the present embodiment will be described. The manufacturing method of the tactile sensor 1 of the present embodiment includes a paint preparation step, a shearing force detection unit manufacturing step, an upper protective layer manufacturing step, a compressive force detection unit manufacturing step, a lower protective layer manufacturing step, and a detection unit. A laminating process.

(Paint adjustment process)
In the paint preparation step, a wiring paint, an electrode layer paint, a dielectric layer paint, and a protective layer paint are prepared. The electrode layer paint is prepared by the following procedure. First, 100 parts by mass of a polymer (acrylic rubber, trade name: Nipol (registered trademark) AR51, manufactured by Nippon Zeon Co., Ltd.), a vulcanization aid (stearic acid, trade name: Lunac (registered trademark) S30, manufactured by Kao Corporation) 00 parts by mass, vulcanization accelerator (zinc dimethyldithiocarbamate, trade name: Noxeller (registered trademark) PZ, manufactured by Ouchi Shinsei Chemical Co., Ltd.) 2.50 parts by mass, vulcanization accelerator (ferric dimethyldithiocarbamate, commodity Name: Noxeller TTFE (manufactured by Ouchi Shinsei Chemical Co., Ltd.) 0.50 part by mass is weighed and rubber is kneaded using a roll. Then, a rubber compound is prepared. Subsequently, the prepared rubber compound is immersed in 1500 parts by mass of an organic solvent (methyl ethyl ketone, Sankyo Chemical Co., Ltd.), the organic solvent is stirred, and a solution in which the rubber compound is uniformly dissolved in the organic solvent is obtained. Then, 22.86 parts by mass of conductive carbon black (Ketjen Black, trade name: EC300J, manufactured by Lion Corporation) is added to the solution. Then, a MEK (methyl ethyl ketone) solution having a solid content of about 7.8% by mass is obtained. Then, the MEK solution is milled to improve the dispersibility of the conductive carbon black in the MEK solution. Specifically, the MEK solution is put into a dyno mill rotating at 3200 rpm, and the MEK solution is circulated about 40 times. Thereafter, 686.7 parts by mass of a printing solvent (diethylene glycol monobutyl ether acetate, manufactured by Sankyo Chemical Co., Ltd.) is added to the milled MEK solution. Then, the MEK solution to which the printing solvent is added is transferred to a container having a wide mouth in order to widen the area in contact with the atmosphere. Then, the MEK solution is allowed to stand for about one day with occasional stirring to sufficiently evaporate MEK having a low boiling point. Thus, an electrode layer coating material is prepared. The boiling point of the printing solvent is 200 ° C. or higher. For this reason, the volatilization of the printing solvent is negligible.

  The protective layer coating and the dielectric layer coating are prepared by the following procedure. First, 100 parts by mass of a polymer (acrylic rubber, trade name: Nipol AR51, manufactured by Nippon Zeon), vulcanization aid (stearic acid, trade name: Lunac S30, manufactured by Kao Corporation), 1.00 parts by weight, vulcanization accelerator (Zinc dimethyldithiocarbamate, trade name: Noxeller PZ, manufactured by Ouchi Shinsei Chemical) 2.50 parts by mass, vulcanization accelerator (Ferric dimethyldithiocarbamate, trade name: Noxeller TTFE, manufactured by Ouchi Shinsei Chemical) 0.50 part by mass is weighed, and rubber kneading is performed using a roll. Then, a rubber compound is prepared. Subsequently, the prepared rubber compound is immersed in 300 parts by mass of a printing solvent (ethylene glycol monobutyl ether acetate, manufactured by Daicel Chemical Industries, Ltd.), and stirred to make it uniform. In this way, a protective layer coating and a dielectric layer coating are prepared.

  The wiring paint is prepared by the following procedure. First, 333 parts by mass of polymer (polyurethane dissolved in MEK / toluene / isopropyl alcohol, trade name: NIPPOLAN (registered trademark) 5230, manufactured by Nippon Polyurethane Industry Co., Ltd.) (the solid content of the polymer is 30% by mass, so 333 mass of polymer) Part corresponds to 100 parts by mass of polyurethane), 10 μm flaky silver particles (trade name: FA-D-4, manufactured by DOWA Electronics) 400 parts by mass, 1 μm spherical silver particles (trade names: AG2-1C, DOWA) 400 parts by mass of Electronics Co., Ltd.) and 150 parts by mass of a printing solvent (butyl carbitol, Sankyo Chemical Co., Ltd.) are weighed and stirred to homogenize. Then, the solution after stirring is transferred to a container having a wide mouth in order to widen the area in contact with the atmosphere. Then, the solution is allowed to stand for about a day with occasional stirring to sufficiently evaporate MEK, toluene and isopropyl alcohol having a low boiling point. In this way, a wiring paint is prepared.

(Shearing force detector production process)
In the shearing force detection unit manufacturing process, the wiring paint, electrode layer paint, and dielectric layer paint prepared in the paint preparation process are stacked on the insulating layer 4 by printing. In FIG. 7, the schematic diagram of the 1st step of the shearing force detection part preparation process of the manufacturing method of the tactile sensor of this embodiment is shown. In FIG. 8, the schematic diagram of the 2nd step of the same process is shown. In FIG. 9, the schematic diagram of the 3rd step of the same process is shown. FIG. 10 shows a schematic diagram of the fourth stage of the process.

  As shown in FIG. 7, a screen printer 9 is used for printing the wiring paint, electrode layer paint, and dielectric layer paint. The screen printing machine 9 includes a table 90, a frame 91, a screen mask 92, and a squeegee 93. The screen mask 92 is disposed above the table 90. The screen mask 92 is stretched around a frame-shaped frame 91. A hole 920 is formed in the screen mask 92 corresponding to the position of the shearing force detection back electrode layer 21. On the upper surface of the screen mask 92, an electrode layer paint 21a is stacked. The squeegee 93 is disposed above the screen mask 92.

  In this step, first, the insulating layer 4 is placed on the upper surface of the table 90 as shown in FIG. A shearing force detection backside wiring 24 is disposed on the upper surface of the insulating layer 4 in advance. The back side wiring 24 for detecting the shearing force is formed by printing the wiring paint prepared in the paint preparation process on the upper surface of the insulating layer 4, heating and vulcanizing. Next, as shown in FIG. 8, the squeegee 93 is lowered and the squeegee 93 is brought into contact with the upper surface of the screen mask 92. Further, the lower surface of the screen mask 92 is pressed against the upper surface of the insulating layer 4. Then, as shown in FIG. 9, the squeegee 93 is moved in the left-right direction. By moving the squeegee 93, the electrode layer paint 21 a is pushed into the hole 920. The pressed electrode layer paint 21 a is transferred to a predetermined position on the upper surface of the insulating layer 4. In this way, the shearing force detection backside electrode layer 21 is formed on the upper surface of the insulating layer 4 so as to partially overlap the shearing force detection backside wiring 24. Then, the back electrode layer 21 for detecting shear force is heated and vulcanized.

  Subsequently, the dielectric layer coating material prepared in the coating material preparation step is printed from above the shearing force detection backside electrode layer 21 using the screen printer 9. That is, the shearing force detection dielectric layer 22 is formed on the upper surface of the shearing force detection backside electrode layer 21 and the upper surface of the insulating layer 4 (except for the portion where the shearing force detection backside electrode layer 21 is printed). Then, the dielectric layer 22 for detecting the shear force is heated and vulcanized.

  Subsequently, the wiring coating material prepared in the coating material preparation step is printed from above the shearing force detecting dielectric layer 22 by using the screen printer 9. That is, the shearing force detection front side wiring 23 is formed on the upper surface of the shearing force detection dielectric layer 22. Then, the front-side wiring 23 for detecting the shearing force is heated and vulcanized.

  Then, the electrode layer coating material prepared in the coating material preparation step is printed from above the shearing force detecting dielectric layer 22 using the screen printer 9. That is, the shearing force detection front electrode layer 20 is formed on the upper surface of the shearing force detection dielectric layer 22 so as to partially overlap the shearing force detection front side wiring 23. Then, the front electrode layer 20 for detecting shearing force is heated and vulcanized.

(Upper protective layer manufacturing process)
In the upper protective layer preparation step, the protective layer paint prepared in the paint preparation step is printed from above the shearing force detection front electrode layer 20 using the screen printer 9. That is, the upper surface of the shearing force detection front electrode layer 20, the upper surface of the shearing force detection front side wiring 23 (excluding the portion where the shearing force detection front electrode layer 20 is printed), and the upper surface of the shearing force detection dielectric layer 22 The upper protective layer 5 is formed on the surface electrode layer 20 for detecting shearing force and the surface side wiring 23 for detecting shearing force are removed. Then, the upper protective layer 5 is heated and vulcanized.

(Compression force detector manufacturing process)
In the compressive force detecting portion manufacturing step, first, the screen coating machine 9 is used to print the wiring paint prepared in the paint preparing step on the upper surface of the compressive force detecting dielectric layer 32. That is, the compression force detection front-side wiring 33 is formed on the upper surface of the compression force detection dielectric layer 32. Then, the compressive force detection front wiring 33 is heated and vulcanized. Subsequently, the electrode layer paint prepared in the paint preparation process is printed from above the compressive force detecting dielectric layer 32 using the screen printer 9. That is, the compressive force detecting front electrode layer 30 is formed on the upper surface of the compressive force detecting dielectric layer 32 so as to partially overlap the compressive force detecting front wiring 33. Then, the compressive force detecting front electrode layer 30 is heated and vulcanized.

  In this step, the screen coating machine 9 is used to print the wiring coating prepared in the coating preparation step on the lower surface of the compressive force detecting dielectric layer 32. That is, the compressive force detecting back side wiring 34 is formed on the lower surface of the compressive force detecting dielectric layer 32. Then, the compressive force detection backside wiring 34 is heated and vulcanized. Subsequently, the electrode layer paint prepared in the paint preparation step is printed from below the compressive force detecting dielectric layer 32 using the screen printer 9. That is, the compressive force detecting back electrode layer 31 is formed on the lower surface of the compressive force detecting dielectric layer 32 so as to partially overlap the compressive force detecting back wiring 34. Then, the compressive force detecting back electrode layer 31 is heated and vulcanized.

(Lower protective layer manufacturing process)
In the lower protective layer preparation step, the protective layer paint prepared in the paint preparation step is printed from below the compressive force detecting back electrode layer 31 using the screen printer 9. That is, the lower surface of the compressive force detection back electrode layer 31, the lower surface of the compressive force detection back wire 34 (excluding the portion where the compressive force detection back electrode layer 31 is printed), and the lower surface of the compressive force detection dielectric layer 32. The lower protective layer 6 is formed (excluding the portion where the compressive force detecting back electrode layer 31 and the compressive force detecting back wiring 34 are printed). Then, the lower protective layer 6 is heated and vulcanized.

(Detector stacking process)
In the detection unit laminating step, a laminate of the insulating layer 4, the shear force detecting unit 2, and the upper protective layer 5 manufactured through the shearing force detecting unit manufacturing step and the upper protective layer manufacturing step, and a compressive force detecting unit The laminated body of the compressive force detection unit 3 and the lower protective layer 6 manufactured through the manufacturing process and the lower protective layer manufacturing process is joined. In this way, the tactile sensor 1 of the present embodiment is manufactured.

[Function and effect]
Next, the effect of the touch sensor 1 of this embodiment and its manufacturing method will be described. The tactile sensor 1 of the present embodiment includes a shearing force detection unit 2 and a compression force detection unit 3 independently of each other. Further, the shearing force detector 2 and the compressive force detector 3 are arranged in series in the vertical direction (front and back direction). In the shearing force detector 2, the shearing force F1s is detected from the load F1 input from the contact object. Moreover, in the compressive force detection part 3, the compressive force F1c is detected among the loads F1 input from the contact target object. For this reason, the load F1 input from the contact object can be easily decomposed into the shearing force F1s and the compression force F1c.

  Further, according to the tactile sensor 1 of the present embodiment, the insulating layer 4 is interposed between the shearing force detection unit 2 and the compression force detection unit 3. The vertical layer thickness of the insulating layer 4 is 2 mm. That is, the layer thickness of the insulating layer 4 is sufficiently larger than the layer thickness of the shearing force detecting dielectric layer 22 and the compressing force detecting dielectric layer 32. Therefore, a pseudo capacitor is formed between the shearing force detection back electrode layer 21 of the shearing force detection unit 2 and the compression force detection front electrode layer 30 of the compression force detection unit 3. However, it is possible to suppress an increase in the capacitance accumulated in the capacitor. Therefore, according to the tactile sensor 1 of the present embodiment, the detection accuracy of the shear force F1s and the compression force F1c is high.

Further, according to the tactile sensor 1 of the present embodiment, the ratio (ks / kc) between the shear direction spring constant ks and the compression direction spring constant kc of the shear force detection dielectric layer 22 is the shear force detection front electrode layer 20. When the longitudinal length (= full length in the left-right direction) a of the back side electrode layer 21 for shear force detection is 10 mm and the inter-electrode layer thickness h of the shear force detection dielectric layer 22 is 0.1 mm, 2.4 × 10 ^{− 4} (see the above formulas (2) and (3)). That is, the shear direction spring constant ks is sufficiently smaller than the compression direction spring constant kc. For this reason, the shearing force detecting dielectric layer 22 is easily deformed in the shearing direction and is not easily deformed in the compression direction. Therefore, the detection accuracy of the shear force F1s is high.

  According to the tactile sensor 1 of the present embodiment, the surface area of the shearing force detecting dielectric layer 22 and the surface area of the compressive force detecting dielectric layer 32 are substantially the same, and the shearing force detecting dielectric layer. The layer thickness 22 is thinner than the compressive force detecting dielectric layer 32. For this reason, the shearing force detecting dielectric layer 22 can be preferentially deformed in the shearing direction. Therefore, the detection accuracy of the shear force F1s is high. The compressive force detecting dielectric layer 32 can be preferentially deformed in the compression direction. Therefore, the detection accuracy of the compression force F1c is high.

  Further, according to the tactile sensor 1 of the present embodiment, the shearing force detection front electrode layer 20 and the shearing force detection back electrode layer 21 are arranged so as to be shifted in the left-right direction when viewed from the up-down direction. Therefore, as can be seen by comparing FIG. 5 and FIG. 6, not only the magnitude of the shearing force F1s but also the direction can be detected. Further, the magnitude and direction of the load F1 can be calculated from the shearing force F1s and the compression force F1c.

  Moreover, according to the tactile sensor 1 of the present embodiment, the upper protective layer 5 covers the shearing force detection unit 2 from above. For this reason, it can suppress that the front side electrode layer 20 for shear force detection conduct | electrically_connects with the exterior.

  Moreover, according to the tactile sensor 1 of the present embodiment, the lower protective layer 6 covers the compressive force detector 3 from below. For this reason, it can suppress that the back side electrode layer 31 for compressive force detection conduct | electrically_connects with the exterior.

  Moreover, according to the manufacturing method of the tactile sensor 1 of this embodiment, the shearing force detection part 2 is produced by screen printing. Therefore, the shearing force detection backside wiring 24, the shearing force detection backside electrode layer 21, the shearing force detection dielectric layer 22, the shearing force detection frontside wiring 23, the shearing force detection front side electrode layer 20, Can be accurately aligned.

  Moreover, according to the manufacturing method of the touch sensor 1 of this embodiment, the shearing force detection part 2 is arrange | positioned in the insulating layer 4 by screen printing. For this reason, alignment with the insulating layer 4 and the back side electrode layer 21 for shear force detection can be performed accurately.

  Moreover, according to the manufacturing method of the touch sensor 1 of this embodiment, the compressive force detection part 3 is produced by screen printing. For this reason, the compression force detection back electrode layer 31, the compression force detection back wire 34, the compression force detection dielectric layer 32, the compression force detection front wire 33, the compression force detection front electrode layer 30, Can be accurately aligned.

  Moreover, according to the manufacturing method of the touch sensor 1 of this embodiment, the upper side protective layer 5 is arrange | positioned at the shearing force detection part 2 by screen printing. For this reason, alignment with the shearing force detection part 2 and the upper side protective layer 5 can be performed accurately.

  Moreover, according to the manufacturing method of the tactile sensor 1 of the present embodiment, the lower protective layer 6 is disposed on the compressive force detection unit 3 by screen printing. For this reason, alignment with the compressive force detection part 3 and the lower side protective layer 6 can be performed accurately.

  In addition, the vertical layer thickness of the shearing force detecting dielectric layer 22 of the tactile sensor 1 of the present embodiment is very thin. According to the manufacturing method of the tactile sensor 1 of the present embodiment, the shearing force detecting dielectric layer 22 is screen-printed by the upper surface of the shearing force detecting backside electrode layer 21 and the upper surface of the insulating layer 4 (shearing force detecting backside electrode). (Except where the layer 21 is printed). For this reason, the thin shearing force detecting dielectric layer 22 can be easily arranged. In addition, it is possible to suppress the thickness of the dielectric layer 22 for detecting the shear force from varying in the portion between the front electrode layer 20 for detecting the shear force and the back electrode layer 21 for detecting the shear force. Thus, screen printing is suitable for reducing the thickness of the shearing force detecting dielectric layer 22 in the vertical direction. Screen printing is suitable for making the layer thickness uniform.

<Second embodiment>
The difference between the tactile sensor of the present embodiment and the manufacturing method thereof and the tactile sensor of the first embodiment and the manufacturing method thereof is that the shear force can be detected by breaking down into the X direction component force and the Y direction component force. Is a point. Therefore, here, the difference will be mainly described.

[Configuration of tactile sensor]
First, the configuration of the tactile sensor of this embodiment will be described. FIG. 11 is a vertical sectional view of the tactile sensor of the present embodiment. FIG. 12 shows a top view of the tactile sensor. FIG. 13 is a cross-sectional view in the XIII-XIII direction of FIG. In FIG. 11, the vertical thickness of the tactile sensor is highlighted. In FIG. 12, the upper protective layer is shown through. Moreover, in FIG. 12, the back side electrode layer for shearing force detection is shown with a dotted line. In FIG. 12, the effective electrode area is hatched. In FIG. 13, the back side electrode layer for compressive force detection is indicated by a dotted line. Further, in FIG. 13, the effective electrode area is shown by hatching. Moreover, in FIGS. 11-13, about the site | part corresponding to FIG. 4 (a) and FIG.4 (b), it shows with the same code | symbol. In FIG. 11 and subsequent figures, for convenience of explanation, the shearing force detection front side wiring, the shearing force detection backside wiring, the compression force detection front side wiring, and the compression force detection backside wiring are omitted.

  As shown in FIGS. 11 to 13, the tactile sensor 1 according to the present embodiment includes a shear force detection unit 2, a compression force detection unit 3, an insulating layer 4, an upper protection layer 5, and a lower protection layer 6. It is equipped with.

  The shearing force detection unit 2 includes a shearing force detection front electrode layer 20, a shearing force detection backside electrode layer 21, and a shearing force detection dielectric layer 22.

  The shearing force detection front electrode layer 20 includes 42 X-direction (left-right direction) front-side electrode layers 20X and 42 Y-direction (front-rear direction) front-side electrode layers 20Y. Each of the 42 X-direction front-side electrode layers 20X and the 42 Y-direction front-side electrode layers 20Y is connected to a shear-force detecting front-side wiring (not shown). The front electrode layer 20X for X direction has a strip shape long in the front-rear direction. The front electrode layer 20Y for Y direction has a long strip shape in the left-right direction. That is, the longitudinal direction of the front electrode layer 20X for X direction and the longitudinal direction of the front electrode layer 20Y for Y direction are substantially orthogonal to each other. The X-direction front electrode layer 20X and the Y-direction front electrode layer 20Y are arranged in a lattice pattern. That is, the 42 X-direction front electrode layers 20X are arranged in a state in which the unit rows formed by the six X-direction front electrode layers 20X arranged in the front-rear direction are juxtaposed in the left-right direction. ing. In addition, the 42 Y-direction front electrode layers 20Y are arranged in a state in which seven rows of unit rows formed from the six Y-direction front electrode layers 20Y arranged in the left-right direction are juxtaposed in the front-rear direction. ing.

  The shearing force detection back-side electrode layer 21 includes 42 X-direction (left-right direction) back-side electrode layers 21X and 42 Y-direction (front-rear direction) back-side electrode layers 21Y. Each of the 42 X-direction back-side electrode layers 21X and the 42 Y-direction back-side electrode layers 21Y is connected to a shear-force detecting back-side wiring (not shown). The shape and arrangement of the back electrode layer 21X for X direction are the same as the shape and arrangement of the front electrode layer 20X for X direction. The shape and arrangement of the Y-direction back electrode layer 21Y are the same as those of the Y-direction front electrode layer 20Y.

  The front electrode layer for X direction 20X and the back electrode layer for X direction 21X are arranged so as to be shifted in the left-right direction when viewed from above. Specifically, the X-direction front electrode layer 20X is shifted to the left with respect to the X-direction back electrode layer 21X. A portion where the X-direction front electrode layer 20X and the X-direction back electrode layer 21X overlap in the left-right direction when viewed from above corresponds to the effective electrode area S2 for X-direction component force detection.

  The front-side electrode layer 20Y for Y direction and the back-side electrode layer 21Y for Y direction are arranged so as to be shifted in the front-rear direction when viewed from above. Specifically, the Y-direction front side electrode layer 20Y is shifted to the rear side with respect to the Y-direction back side electrode layer 21Y. When viewed from above, the portion where the Y-direction front electrode layer 20Y and the Y-direction back electrode layer 21Y overlap in the front-rear direction corresponds to the effective electrode area S3 for Y-direction component force detection.

  The compressive force detecting front electrode layer 30 has a strip shape that is long in the front-rear direction. Six compressive force detection front electrode layers 30 are juxtaposed in the left-right direction. Each of the six compression force detection front electrode layers 30 is connected to a compression force detection front wiring (not shown). The back electrode layer 31 for compressive force detection has a strip shape that is long in the left-right direction. Six backside electrode layers 31 for detecting compressive force are juxtaposed in the front-rear direction. Each of the six compression force detection back side electrode layers 31 is connected to a compression force detection back side wiring (not shown). The compressive force detecting front electrode layer 30 and the compressive force detecting back electrode layer 31 are arranged in a lattice shape when viewed from above. The intersection of the compressive force detecting front electrode layer 30 and the compressive force detecting back electrode layer 31 corresponds to the effective electrode area S4 for detecting compressive force.

[Tactile sensor movement]
Next, the movement of the tactile sensor 1 of the present embodiment will be described. As shown in FIG. 12, it is assumed that a load F2 is input to the right front portion of the tactile sensor 1 from the right front direction. FIG. 14 shows an enlarged view in a circle XIV in FIG. The load F2 includes a shearing force F2s in the surface development direction (right front-left rear direction) of the input surface 50 (see FIG. 11), a compressive force in the normal direction (vertical direction) of the input surface 50 (see FIG. 11), Can be broken down into

  First, a method for detecting the X-direction component force F2sX out of the shear force F2s will be described. When the shearing force F2s is input, the shearing force detecting dielectric layer 22 is deformed in the left rear direction. For this reason, the front electrode layer 20X for X direction moves to the left rear direction, as shown with a dashed-dotted line frame in FIG. Here, the front electrode layer 20X for X direction has a strip shape long in the front-rear direction. For this reason, the effective electrode area S2 for X direction component force detection hardly changes in the front-back direction. The effective electrode area S2 greatly changes (decreases) in the left-right direction. Therefore, from the change in the effective electrode area S2 (specifically, from the change in the capacitance between the front electrode layer 20X for the X direction and the back electrode layer 21X for the X direction), the X direction component of the shear force F2s. The force F2sX can be detected.

  Then, the detection method of Y direction component force F2sY is demonstrated among shearing force F2s. When the shearing force F2s is input, the shearing force detecting dielectric layer 22 is deformed in the left rear direction. For this reason, the front electrode layer 20Y for Y direction moves to the left rear direction, as shown with a dashed-dotted line frame in FIG. Here, the Y-direction front electrode layer 20Y has a strip shape that is long in the left-right direction. For this reason, the effective electrode area S3 for Y direction component force detection hardly changes in the left-right direction. The effective electrode area S3 changes greatly (becomes smaller) in the front-rear direction. Therefore, from the change in the effective electrode area S3 (specifically, from the change in the capacitance between the Y-direction front electrode layer 20Y and the Y-direction back electrode layer 21Y), the shear force F2s includes the Y-direction component. The force F2sY can be detected.

  The compression force detection method is the same as the compression force detection method of the first embodiment (see FIGS. 4 to 6). Therefore, explanation is omitted here. Moreover, the manufacturing method of the tactile sensor 1 is the same as the manufacturing method of the tactile sensor of the first embodiment. Therefore, explanation is omitted here.

[Function and effect]
Next, the effect of the touch sensor 1 of this embodiment and its manufacturing method will be described. The touch sensor 1 and the manufacturing method thereof according to the present embodiment have the same functions and effects as the touch sensor according to the first embodiment and the manufacturing method thereof with respect to parts having the same configuration.

  Further, according to the tactile sensor 1 of the present embodiment, the X-direction component force F2sX and the Y-direction component force F2sY can be detected from the shear force F2s. Further, the magnitude and direction of the shearing force F2s can be calculated from the X-direction component force F2sX and the Y-direction component force F2sY. Further, the magnitude and direction of the load F2 can be calculated from the shearing force F2s and the compressive force.

  Further, according to the tactile sensor 1 of the present embodiment, it is analyzed which part of the capacitance changes among the 42 effective electrode areas S2, the 42 effective electrode areas S3, and the 36 effective electrode areas S4. By doing so, the position (coordinates) to which the load F2 is input and the load distribution can be calculated.

<Third embodiment>
The difference between the tactile sensor of this embodiment and the manufacturing method thereof and the tactile sensor of the first embodiment and manufacturing method thereof is that an upper sheet and a lower sheet are arranged instead of the upper protective layer and the lower protective layer. It is a point that has been. Therefore, here, the difference will be mainly described.

[Configuration of tactile sensor]
First, the configuration of the tactile sensor of this embodiment will be described. FIG. 15 shows a cross-sectional view in the vertical direction of the tactile sensor of this embodiment. Parts corresponding to those in FIG. 4A are denoted by the same reference numerals. As shown in FIG. 15, the tactile sensor 1 of the present embodiment includes a shearing force detection unit 2, a compression force detection unit 3, an insulating layer 4, an upper sheet 7, and a lower sheet 8. . The lower sheet 8 is formed including acrylic rubber. The lower sheet 8 has a rectangular plate shape. A compressive force detector 3 is fixed to the upper surface of the lower sheet 8.

  The upper sheet 7 is formed including acrylic rubber. The upper sheet 7 has a rectangular plate shape. The upper sheet 7 is disposed above the lower sheet 8. The left and right edges of the upper sheet 7 and the left and right edges of the lower sheet 8 are joined. That is, the upper sheet 7 and the lower sheet 8 are joined so as to be united into a cylindrical shape. The shearing force detection unit 2 is fixed to the lower surface of the upper sheet 7. The movement of the tactile sensor of this embodiment is the same as the movement of the tactile sensor of the first embodiment. Therefore, explanation is omitted here.

[Manufacturing method of tactile sensor]
Next, a method for manufacturing the tactile sensor 1 of the present embodiment will be described. The manufacturing method of the tactile sensor 1 of the present embodiment includes a paint preparation step, a shearing force detection unit manufacturing step, a compressive force detection unit manufacturing step, and a sheet bonding step.

(Paint adjustment process)
In the paint preparation step, a wiring paint, an electrode layer paint, and a dielectric layer paint are prepared. The adjustment method is the same as the paint adjustment step of the manufacturing method of the touch sensor according to the first embodiment. Therefore, explanation is omitted here.

(Shearing force detector production process)
In the shearing force detection unit manufacturing process, the wiring paint, electrode layer paint, and dielectric layer paint prepared in the paint preparation process are laminated on the lower surface of the upper sheet 7 using a screen printer (FIGS. 7 to 7). 10). First, the upper sheet 7 is turned upside down and placed on the table of the screen printing machine. Next, the shearing force detection front wiring (not shown) is printed on the upper sheet 7, and the shearing force detection front wiring after printing is heated and vulcanized. Subsequently, the shearing force detection front electrode layer 20 is printed on the upper sheet 7 so as to partially overlap the shearing force detection front wiring, and the printed shearing force detection front electrode layer 20 is heated and vulcanized. Let Subsequently, the front-side electrode layer 20 for detecting a shear force, the front-side wiring for detecting a shearing force (the portion where the front-side electrode layer 20 for detecting a shearing force is not disposed), and the upper sheet 7 (the front-side wiring for detecting a shearing force and for detecting the shearing force) The shearing force detecting dielectric layer 22 is printed on a portion where the front electrode layer 20 is not disposed), and the printed shearing force detecting dielectric layer 22 is heated and vulcanized. Subsequently, the shearing force detection backside wiring is printed on the shearing force detection dielectric layer 22, and the shearing force detection backside wiring after printing is heated and vulcanized. Then, the shearing force detection backside electrode layer 21 is printed on the shearing force detection dielectric layer 22 so as to partially overlap the shearing force detection backside wiring, and the printed shearing force detection backside electrode layer 21 is heated. Vulcanize. In this way, the shear force detection unit 2 is formed on the lower surface of the upper sheet 7.

(Compression force detector manufacturing process)
In the compressive force detector manufacturing process, the compressive force detector 3 manufactured in the same procedure as the compressive force detector manufacturing process of the tactile sensor manufacturing method of the first embodiment is fixed to the upper surface of the lower sheet 8. Further, the insulating layer 4 is fixed to the upper surface of the compressive force detector 3.

(Sheet bonding process)
In the sheet bonding step, first, the left and right edges of the lower surface of the upper sheet 7 and the left and right edges of the upper surface of the lower sheet 8 are bonded together. By bonding, the lower surface of the shearing force detection back electrode layer 21 and the upper surface of the insulating layer 4 face each other in the vertical direction. Subsequently, the lower surface of the shearing force detection back-side electrode layer 21 and the upper surface of the insulating layer 4 are joined. In this way, the tactile sensor 1 of the present embodiment is manufactured.

[Function and effect]
Next, the effect of the touch sensor 1 of this embodiment and its manufacturing method will be described. The touch sensor 1 and the manufacturing method thereof according to the present embodiment have the same functions and effects as the touch sensor according to the first embodiment and the manufacturing method thereof with respect to parts having the same configuration. Like the tactile sensor 1 of the present embodiment, the shear force detection unit 2 may be printed on the lower surface of the upper sheet 7 instead of the upper surface of the insulating layer 4.

<Fourth embodiment>
The tactile sensor of this embodiment is the same in structure as the tactile sensor of the third embodiment. The manufacturing method of the tactile sensor of the present embodiment includes a paint preparation step, a shearing force detection unit manufacturing step, a compressive force detection front side electrode layer forming step, a compressive force detection back side electrode layer forming step, a joining step, have. Hereinafter, each step will be described with reference to FIG.

[Paint adjustment process], [Shearing force detector manufacturing process]
The paint preparation process and the shearing force detection unit production process of the present embodiment are the same as the paint preparation process and the shearing force detection part production process of the third embodiment. Therefore, explanation is omitted here.

[Formation process of front side electrode layer for detecting compressive force]
In the compressive force detection front electrode layer forming step, the compressive force detection front wiring and the compressive force detection front electrode layer 30 are printed on the lower surface of the insulating layer 4 by a screen printer.

[Backside electrode layer forming process for compressive force detection]
In the compressive force detection back side electrode layer forming step, the compressive force detection back side wiring and the compressive force detection back side electrode layer 31 are printed on the upper surface of the lower sheet 8 by a screen printer.

[Jointing process]
In the joining step, first, the upper sheet 7 on which the shearing force detection unit 2 is arranged, the insulating layer 4 on which the compressive force detection front-side wiring and the compressive force detection front-side electrode layer 30 are arranged, and the compression force produced in advance. The detection dielectric layer 32 and the lower sheet 8 on which the compression force detection backside wiring and the compression force detection backside electrode layer 31 are arranged are stacked in the vertical direction and bonded to each other. Next, the left and right edges of the lower surface of the upper sheet 7 and the left and right edges of the upper surface of the lower sheet 8 are bonded together. In this way, the tactile sensor 1 of the present embodiment is manufactured.

[Function and effect]
Next, the effect of the manufacturing method of the touch sensor 1 of this embodiment is demonstrated. The method for manufacturing the tactile sensor 1 according to the present embodiment has the same operational effects as the method for manufacturing the tactile sensor according to the third embodiment with respect to parts having the same configuration. Like the tactile sensor 1 of the present embodiment, the compressive force detection front side wiring and the compressive force detection front side electrode layer 30 may be printed on the lower surface of the insulating layer 4. In addition, the back side wiring for detecting the compressive force and the back side electrode layer 31 for detecting the compressive force may be printed on the upper surface of the lower sheet 8.

<Others>
The embodiments of the tactile sensor and the manufacturing method thereof according to the present invention have been described above. However, the embodiment is not particularly limited to the above embodiment. Various modifications and improvements that can be made by those skilled in the art are also possible.

  For example, in the tactile sensor 1 and the manufacturing method thereof according to the above-described embodiment, the insulating layer 4 is increased in thickness in the vertical direction so that the shearing force detection back-side electrode layer 21 and the compressive force detection front-side electrode layer 30 are separated from each other. The increase in the capacitance of the pseudo capacitor was suppressed. However, an increase in the capacitance may be suppressed by interposing an electrically conductive layer having a high conductivity in the middle of the insulating layer 4 in the vertical direction so as to release charges. That is, a conductive layer may be disposed as the blocking layer of the present invention. For example, the conductive layer may be formed by blending an elastomer with a conductive filler, metal powder, or the like.

  The material of the insulating layer 4 is not particularly limited. It may be made of an elastomer. Examples of the elastomer for the insulating layer 4 include silicone rubber, ethylene-propylene copolymer rubber, natural rubber, styrene-butadiene copolymer rubber, acrylic rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, chlorinated polyethylene, and urethane rubber. It is done. Preferably, an elastomer excellent in adhesiveness with the front electrode layer 30 for detecting a compressive force is preferable. Urethane rubber, acrylic rubber and hydrin rubber are preferred.

  The insulating layer 4 is preferably elastically deformable by a load input from the contact object. The reason is that the load input from the contact object is easily transmitted from the shear force detection unit 2 to the compression force detection unit 3 or from the compression force detection unit 3 to the shear force detection unit 2.

  Further, the shear direction spring constant and the compression direction spring constant of the shear force detecting dielectric layer 22 and the compressive force detecting dielectric layer 32 may be adjusted by the material forming the dielectric layer, that is, by the Young's modulus of the dielectric layer. Good.

  In the tactile sensor 1 and the manufacturing method thereof according to the second embodiment, the compression force detection backside wiring and the compression force detection backside electrode layer 31 are printed on the lower surface of the compression force detection dielectric layer 32. However, the compression force detection backside wiring and the compression force detection backside electrode layer 31 may be printed on the upper surface of the lower protective layer 6.

  Moreover, in the tactile sensor 1 and the manufacturing method thereof according to the above embodiment, the shearing force detection front electrode layer 20, the shearing force detection backside electrode layer 21, the compressive force detection frontside electrode layer 30, and the compressive force detection backside electrode layer. 31 was formed including acrylic rubber and conductive carbon black. However, an elastomer other than acrylic rubber and a conductive filler other than conductive carbon black may be included.

  Examples of the elastomer for the electrode layer (shearing force detection front electrode layer 20, shearing force detection backside electrode layer 21, compressive force detection frontside electrode layer 30, compressive force detection backside electrode layer 31) include silicone rubber, Examples include ethylene-propylene copolymer rubber, natural rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, acrylic rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, chlorinated polyethylene, and urethane rubber.

  Examples of the conductive filler for the electrode layer include carbon nanotubes, carbon nanotube derivatives, graphite, and conductive carbon fibers in addition to the conductive carbon black.

  In the tactile sensor 1 and the manufacturing method thereof according to the above-described embodiment, the shearing force detecting dielectric layer 22 is made of acrylic rubber, and the compressive force detecting dielectric layer 32 is made of urethane foam rubber. However, the elastomer for forming the shearing force detecting dielectric layer 22 and the compressive force detecting dielectric layer 32 is not particularly limited. It can be appropriately selected from rubber and thermoplastic elastomer. For example, from the viewpoint of increasing the capacitance, one having a high relative dielectric constant is desirable. From this point of view, it is desirable that the relative dielectric constant at room temperature is 3 or more, more preferably 5 or more. For example, an elastomer having a polar functional group such as an ester group, a carboxyl group, a hydroxyl group, a halogen group, an amide group, a sulfone group, a urethane group, or a nitrile group, or an elastomer added with a polar low molecular weight compound having these polar functional groups Is preferably used. The elastomer may or may not be cross-linked. Moreover, what is necessary is just to adjust the load detection sensitivity and the detection range according to a use by adjusting the Young's modulus of an elastomer. In particular, when the load input from the contact object is small, it is preferable to use a foam as the elastomer. The reason is that since the foam has a small Young's modulus, the shear force detecting dielectric layer 22 and the compressive force detecting dielectric layer 32 are sufficiently deformed even when the load of the measurement object is small. That is, the load can be reliably detected. Examples of suitable elastomers include silicone rubber, acrylonitrile-butadiene copolymer rubber, acrylic rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, chlorinated polyethylene, and urethane rubber.

  Moreover, in the touch sensor 1 of the said embodiment and its manufacturing method, the upper side protective layer 5, the lower side protective layer 6, the upper side sheet | seat 7, and the lower side sheet | seat 8 were formed including acrylic rubber. However, it may be formed including an elastomer other than acrylic rubber.

  Examples of the elastomer for the protective layer (upper protective layer 5, lower protective layer 6) and sheet (upper sheet 7, lower sheet 8) include urethane rubber, silicone rubber, ethylene propylene copolymer rubber, natural rubber, Examples thereof include styrene-butadiene rubber, acrylonitrile butadiene rubber, epichlorohydrin rubber, chlorosulfonated polyethylene, and chlorinated polyethylene rubber.

  The same type of elastomer may be used for the electrode layer and the dielectric layer (shearing force detecting dielectric layer 22 and compressive force detecting dielectric layer 32). This improves the adhesion between the dielectric layer and the electrode layer. For this reason, durability becomes high. Further, the followability of the electrode layer with respect to the deformation of the dielectric layer is improved.

  Furthermore, the elastomer for the protective layer or the sheet and the elastomer for the electrode layer and the dielectric layer may be the same type. This improves the adhesion between the dielectric layer, the electrode layer, and the protective layer or sheet. For this reason, durability becomes high. Further, the followability of the electrode layer, the protective layer or the sheet with respect to the deformation of the dielectric layer is improved.

  In the tactile sensor 1 and the manufacturing method thereof according to the above embodiment, the compressive force detector 3 is disposed on the back side of the shear force detector 2. However, the shearing force detection unit 2 may be disposed on the back side of the compression force detection unit 3. Further, the number of arrangement of the shear force detection unit 2 and the compression force detection unit 3 is not particularly limited.

  Moreover, in the manufacturing method of the tactile sensor 1 of the first embodiment, the compressive force detection unit manufacturing step and the lower protective layer manufacturing step were executed after the shearing force detection unit manufacturing step and the upper protective layer manufacturing step. However, the compressive force detection unit manufacturing step and the lower protective layer manufacturing step may be executed before the shearing force detection unit manufacturing step and the upper protective layer manufacturing step. Moreover, you may perform in parallel a shearing force detection part preparation process, an upper side protective layer preparation process, a compressive force detection part preparation process, and a lower side protective layer preparation process. That is, the shear force detection unit 2 and the compressive force detection unit 3 need only be prepared before the detection unit stacking step.

  In addition, the number of times of applying the electrode layer coating material and the dielectric layer coating material in the shearing force detection unit manufacturing process of the manufacturing method of the touch sensor 1 of the above embodiment is not particularly limited. By increasing or decreasing the number of times of coating, it is possible to adjust the layer thickness of the shearing force detection front electrode layer 20, the shearing force detection backside electrode layer 21, and the shearing force detection dielectric layer 22.

  Moreover, the compression force detection part preparation process of the manufacturing method of the tactile sensor 1 of the said embodiment can also be performed in the following procedures. First, the compressive force detection front-side wiring and the compressive force detection front-side electrode layer 30 are printed on the lower surface of the insulating layer 4. Further, the compression force detection backside wiring and the compression force detection backside electrode layer 31 are printed on the upper surface of another insulating layer. Subsequently, the dielectric layer 32 is sandwiched between the upper insulating layer 4 and another lower insulating layer from above and below. In this way, the compressive force detector 3 may be produced. In this case, the conduction between the compression force detection backside wiring and the compression force detection backside electrode layer 31 and the outside can be blocked by another insulating layer.

  Moreover, the compression force detection part preparation process of the manufacturing method of the tactile sensor 1 of 3rd embodiment can also be performed in the following procedures. First, the front side wiring for shear force detection, the front side electrode layer 20 for shear force detection, the dielectric layer 22 for shear force detection, the back side electrode layer 21 for shear force detection, and the back side wiring for shear force detection are printed on the lower surface of the upper sheet 7 A laminated upper sheet-shear force detector laminate is prepared. In addition, an insulating layer-front electrode layer stack in which the compressive force detection front-side wiring and the compressive force detection front-side electrode layer 30 are printed on the lower surface of the insulating layer 4 is produced. Further, a lower sheet-back electrode layer laminate in which the compressive force detection back wiring and the compressive force detection back electrode layer 31 are printed on the upper surface of the lower sheet 8 is produced. Further, the compressive force detecting dielectric layer 32 is produced. Subsequently, the upper sheet-shearing force detector laminate, the insulating layer-front electrode layer laminate, the compressive force detection dielectric layer 32, and the lower sheet-back electrode layer laminate are formed from these members in the direction from top to bottom. Laminate and join in order of body. In this way, the compressive force detector 3 may be produced.

  Moreover, the printing method in the manufacturing method of the touch sensor 1 is not specifically limited. In addition to screen printing, inkjet printing, flexographic printing, gravure printing, pad printing, lithography, or the like may be used.

(A) is a schematic diagram in a no-load state of a shearing force detection unit in which a shearing force detection front electrode layer and a shearing force detection backside electrode layer are completely overlapped when viewed from the front and back directions. (B) is a schematic diagram in a state where a shearing force is applied in the left-to-right direction of the shearing force detection unit. (C) is a schematic diagram in a state where a shearing force is applied in the right-to-left direction of the shearing force detection unit. (A) is a schematic diagram in the no-load state of a shear force detection part. (B) is a schematic diagram in a state where a shearing force is applied in the left-to-right direction of the shearing force detection unit. (C) is a schematic diagram in a state where a shearing force is applied in the right-to-left direction of the shearing force detection unit. (A) is the schematic diagram seen from the front and back direction in the no-load state of a shear force detection part. (B) is the schematic diagram seen from the front and back direction in the state in which the shear force is added to the Y direction of the shear force detection part. (C) is the schematic diagram seen from the front and back direction in the state in which the shear force is added to the X direction of the shear force detection part. (A) is an up-down direction sectional view of a tactile sensor of a first embodiment. (B) is a top view of the tactile sensor. (A) is an up-down direction sectional view in the state where a load was inputted in the direction from the upper left to the lower right of the tactile sensor. (B) is a top view of the tactile sensor in a state where a load is input in a direction from the upper left to the lower right. (A) is the up-down direction sectional view in the state where the load was inputted to the direction from the upper right to the lower left of the tactile sensor. (B) is a top view of the tactile sensor in a state where a load is input in a direction from the upper right to the lower left. It is a schematic diagram of the 1st step of the shear force detection part preparation process of the manufacturing method of the tactile sensor. It is a schematic diagram of the 2nd step of the process. It is a schematic diagram of the 3rd step of the process. It is a schematic diagram of the 4th step of the same process. It is an up-down direction sectional view of a tactile sensor of a second embodiment. It is a top view of the tactile sensor. It is a XIII-XIII direction sectional view of Drawing 11. It is an enlarged view in the circle XIV of FIG. It is an up-down direction sectional view of a tactile sensor of a third embodiment.

Explanation of symbols

1: tactile sensor, 2: shearing force detecting unit, 3: compressive force detecting unit, 4: insulating layer (blocking layer), 5: upper protective layer (protective layer), 6: lower protective layer, 7: upper sheet, 8: Lower sheet, 9: Screen printer.
20: Front electrode layer for detecting shear force, 20X: Front electrode layer for X direction, 20Y: Front electrode layer for Y direction, 21: Back electrode layer for detecting shear force, 21X: Back electrode layer for X direction, 21Y: Y Back electrode layer for direction, 21a: electrode layer paint, 22: dielectric layer for detecting shear force, 23: front wire for detecting shear force, 24: back wire for detecting shear force, 30: front electrode layer for detecting compressive force, 31 : Back side electrode layer for detecting compressive force, 32: dielectric layer for detecting compressive force, 33: front side wire for detecting compressive force, 34: back side wire for detecting compressive force, 50: input surface, 90: table, 91: frame, 92 : Screen mask, 93: Squeegee.
100: Dielectric layer for detecting shear force, 101: Front electrode layer for detecting shear force, 101X: Front electrode layer for detecting X direction, 102: Back electrode layer for detecting shear force, 102X: Back electrode layer for detecting X direction, 920: Hole .
ΔA: Displacement amount, A1: Total length in X direction, A2: Full length in Y direction, F1: Load, F1c: Compression force, F1s: Shear force, F2: Load, F2s: Shear force, F2sX: Component force in X direction, F2sY: Y Directional component force, S: effective electrode area, S1 to S4: effective electrode area, T1: distance between electrodes.

Claims (15)

An input surface to which a load is input from a contact object is provided, and the load is decomposed into a shearing force applied in a substantially plane developing direction of the input surface and a compressive force applied in a substantially normal direction of the input surface. A tactile sensor that can be detected
Shear force detection front electrode layer, shear force detection back electrode layer, and shear force detection front electrode layer and elastomeric shear force detection interposed between the shear force detection back electrode layer And the shearing force detection dielectric layer is elastically deformed by the shearing force, so that the shearing force detection front electrode layer and the shearing force detection backside electrode layer overlap in the front-back direction. The effective electrode area formed by the change, and by using the change in capacitance due to the change in the effective electrode area, a shear force detection unit capable of detecting the change in the shear force,
Compressive force detection front electrode layer, compressive force detection back electrode layer, and compression force detection front electrode layer and elastomeric compression force detection interposed between the compressive force detection back electrode layer And the dielectric layer for detecting the compressive force is elastically deformed by the compressive force, whereby the layer thickness of the dielectric layer for detecting the compressive force changes, and the capacitance is changed by the change in the layer thickness. A compressive force detector capable of detecting a change in the compressive force by utilizing the change;
An insulating layer interposed between the shearing force detection unit and the compressive force detection unit to ensure insulation between the shearing force detection unit and the compression force detection unit;
Ri name with a,
The insulating layer is made of an elastomer,
The shear force detection front electrode layer and the shear force detection back electrode layer are each made of elastomer,
In addition, an elastomeric shear force detection front wiring connected to the shear force detection front electrode layer and an elastomer shearing power detection back wiring connected to the shear force detection back electrode layer are provided. A tactile sensor, wherein a change in capacitance is detected from the front-side wiring for shearing force detection and the back-side wiring for shearing force detection .   An input surface to which a load is input from a contact object is provided, and the load is decomposed into a shearing force applied in a substantially plane developing direction of the input surface and a compressive force applied in a substantially normal direction of the input surface. A tactile sensor that can be detected
  Shear force detection front electrode layer, shear force detection back electrode layer, and shear force detection front electrode layer and elastomeric shear force detection interposed between the shear force detection back electrode layer And the shearing force detection dielectric layer is elastically deformed by the shearing force, so that the shearing force detection front electrode layer and the shearing force detection backside electrode layer overlap in the front-back direction. The effective electrode area formed by the change, and by using the change in capacitance due to the change in the effective electrode area, a shear force detection unit capable of detecting the change in the shear force,
  Compressive force detection front electrode layer, compressive force detection back electrode layer, and compression force detection front electrode layer and elastomeric compression force detection interposed between the compressive force detection back electrode layer And the dielectric layer for detecting the compressive force is elastically deformed by the compressive force, whereby the layer thickness of the dielectric layer for detecting the compressive force changes, and the capacitance is changed by the change in the layer thickness. A compressive force detector capable of detecting a change in the compressive force by utilizing the change;
  An insulating layer interposed between the shearing force detection unit and the compressive force detection unit to ensure insulation between the shearing force detection unit and the compression force detection unit;
With
  The tactile sensor according to claim 1, wherein the insulating layer has a larger thickness than the shear force detecting dielectric layer and the compressive force detecting dielectric layer.   The tactile sensation according to claim 1, wherein the insulating layer has a conductive blocking layer that suppresses an increase in capacitance between the shearing force detection unit and the compression force detection unit. Sensor.   The shearing direction spring constant of the shearing force detecting dielectric layer is smaller than the compressing direction spring constant of the shearing force detecting dielectric layer, and the compressing direction spring constant of the compressing force detecting dielectric layer is the shearing force detecting The tactile sensor according to claim 1, wherein the tactile sensor is smaller than a compression direction spring constant of the dielectric layer for use.   The area of the surface of the dielectric layer for detecting the shear force and the area of the surface of the dielectric layer for detecting the compressive force are substantially the same,
  The tactile sensor according to any one of claims 1 to 4, wherein a layer thickness of the shearing force detecting dielectric layer is thinner than a layer thickness of the compressive force detecting dielectric layer.   The tactile sensor according to any one of claims 1 to 5, wherein the shearing force detection front electrode layer and the shearing force detection back electrode layer are arranged so as to be shifted from the front and back directions.   The front electrode layer for shear force detection is applied to the front electrode layer for X direction that detects the X direction component force applied in the X direction out of the shear force, and the Y direction that is substantially orthogonal to the X direction out of the shear force. A Y-direction front electrode layer for detecting a Y-direction component force,
  The shearing force detection backside electrode layer has an X direction backside electrode layer that detects the X direction component force, and a Y direction backside electrode layer that detects the Y direction component force,
  The front electrode layer for X direction and the back electrode layer for X direction have a long shape in which the total length in the Y direction is longer than the total length in the X direction,
  The front side electrode layer for Y direction and the back side electrode layer for Y direction have a long shape in which the total length in the X direction is longer than the total length in the Y direction. Tactile sensor.   The tactile sensor according to claim 1, further comprising a protective layer that covers the shearing force detection front electrode layer from the outside and secures insulation between the shearing force detection front electrode layer and the outside.   The tactile sensor according to claim 8, wherein the protective layer is made of an elastomer.   The front electrode layer for detecting shear force, the back electrode layer for detecting shear force, the dielectric layer for detecting shear force, the front electrode layer for detecting compressive force, the back electrode layer for detecting compressive force, the dielectric for detecting compressive force The tactile sensor according to claim 9, wherein the layer, the insulating layer, and the protective layer all contain the same elastomer.   11. The shearing force detection front electrode layer, the shearing force detection dielectric layer, and the shearing force detection back electrode layer are fixed to each other so as not to slip between the layers. The tactile sensor described in 1.   In an unloaded state, the effective electrode area for detecting the shear force, wherein the front electrode layer for detecting the shear force and the back electrode layer for detecting the shear force are overlapped in the front and back direction,
  In the no-load state, the compressive force detecting effective electrode area formed by overlapping the compressive force detecting front electrode layer and the compressive force detecting back electrode layer in the front and back directions;
The tactile sensor according to any one of claims 1 to 11, wherein the tactile sensor is arranged so as not to overlap in the front and back direction.   In the no-load state, the plurality of effective electrode areas for detecting the shear force in which the plurality of shear force detecting front electrode layers and the plurality of shear force detecting back electrode layers are formed to overlap in the front-back direction are The tactile sensor according to claim 1, wherein the tactile sensor is arranged in a lattice shape when viewed from the front side.   The tactile sensor according to any one of claims 1 to 13, wherein the shearing force detection unit is disposed on the front side of the insulating layer, and the compressive force detection unit is disposed on the back side of the insulating layer.   A method for manufacturing a tactile sensor according to claim 1,
  Printing the shearing force detection backside wiring and the shearing force detection backside electrode layer on the surface of the insulating layer; printing the shearing force detection dielectric layer on the surface of the shearing force detection backside electrode layer; Having a shearing force detection unit preparation step of preparing the shearing force detection unit by printing the shearing force detection front side wiring and the shearing force detection front side electrode layer on the surface of the shearing force detection dielectric layer; A method of manufacturing a tactile sensor characterized by the above.

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