JP5313626B2 - 電子部品内蔵基板及びその製造方法 - Google Patents
電子部品内蔵基板及びその製造方法 Download PDFInfo
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- JP5313626B2 JP5313626B2 JP2008275290A JP2008275290A JP5313626B2 JP 5313626 B2 JP5313626 B2 JP 5313626B2 JP 2008275290 A JP2008275290 A JP 2008275290A JP 2008275290 A JP2008275290 A JP 2008275290A JP 5313626 B2 JP5313626 B2 JP 5313626B2
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- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
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Description
本実施形態の電子部品内蔵基板の製造方法を説明する前に、本発明に関連する関連技術の問題点について説明する。図1〜図3は関連技術の電子部品内蔵基板の製造方法を示す断面図である。
図4〜図12は本発明の第1実施形態の電子部品内蔵基板の製造方法を示す断面図、図13は同じく電子部品内蔵基板を示す断面図である。
図15及び図16は本発明の第2実施形態の電子部品内蔵基板の製造方法を示す断面図、図17は同じく電子部品内蔵基板を示す断面図である。第2実施形態の特徴は、半導体チップの上側角部をカットすることによって実装時の応力発生を緩和することにある。第2実施形態では、第1実施形態と同一工程の説明を省略すると共に、同一要素については同一符号付してその説明を省略する。
Claims (9)
- 配線層を備えた配線基板と、
接続パッドが上側になった状態で前記配線基板の上に実装された電子部品と、
前記配線基板の上に形成されて、前記電子部品の側面を覆って当該電子部品を埋め込む絶縁層と、
前記接続パッドに接続されて前記電子部品の上面に接触して形成され、下地金属パターン層とその上に形成された導電パターン層とから構成されるチップ内配線部と、前記チップ内配線部に繋がって前記絶縁層の上に延びて形成され、前記導電パターン層と同一層から形成された延出配線部とを含む上側配線層とを有し、
前記下地金属パターン層は前記電子部品の上面のみに配置されていることを特徴とする電子部品内蔵基板。 - 前記導電パターン層は、下から順に、シード層及び金属めっき層から構成されることを特徴とする請求項1に記載の電子部品内蔵基板。
- 前記延出配線部は、前記絶縁層に設けられたビアホールを介して前記配線基板の前記配線層に接続されていることを特徴とする請求項1に記載の電子部品内蔵基板。
- 前記電子部品は半導体チップであり、前記下地金属パターン層の下に、前記接続パッド上に開口部が設けられた保護絶縁層が形成されていることを特徴とする請求項1に記載の電子部品内蔵基板。
- 前記下地金属パターン層は、下から順に、チタン層/銅層、及びクロム層/銅層のいずれかの積層膜から形成されることを特徴とする請求項1に記載の電子部品内蔵基板。
- 接続パッドと、該接続パッドを被覆して一面全体に形成された金属保護層とを備えた電子部品を、前記接続パッドを上側に向けて配線基板の上に実装する工程と、
前記配線基板及び前記電子部品の上に絶縁層を形成することにより、前記絶縁層で前記電子部品を埋め込む工程と、
前記絶縁層を厚み方向に加工することにより、前記電子部品の側方に前記絶縁層を残すと共に、前記電子部品の前記金属保護層を露出させる工程と、
前記電子部品の前記金属保護層及び前記絶縁層の上にシード層を形成する工程と、
前記シード層の上に、上側配線層が形成される部分に開口部が設けられためっきレジストを形成する工程と、
前記シード層をめっき給電経路に利用する電解めっきにより、前記めっきレジストの開口部に金属めっき層を形成する工程と、
前記めっきレジストを除去する工程と、
前記金属めっき層をマスクにして前記シード層をエッチングし、続いて前記電子部品の前記金属保護層をエッチングすることにより、前記上側配線層を形成する工程とを有し、
前記上側配線層は、
前記金属保護層がパターン化された下地金属パターン層とその上の前記シード層及び前記金属めっき層とから形成されて、前記接続パッドに接続されるチップ内配線部と、
前記チップ内配線部に繋がって前記絶縁層の上に延びて形成され、前記前記シード層及び前記金属めっき層と同一層からなる延出配線部とを含み、
前記下地金属パターン層は前記電子部品の上面のみに配置されることを特徴とする電子部品内蔵基板の製造方法。 - 前記絶縁層は樹脂層からなり、
前記電子部品の前記金属保護層を露出させる工程において、酸素プラズマによって前記樹脂層をエッチングすることを特徴とする請求項6に記載の電子部品内蔵基板の製造方法。 - 前記電子部品の前記金属保護層を露出させる工程の後に、
前記絶縁層を加工することにより、前記配線基板の配線層に到達するビアホールを形成する工程をさらに有し、
前記上側配線層を形成する工程において、前記延出配線部は前記ビアホールを介して前記配線基板の前記配線層に接続されることを特徴とする請求項6に記載の電子部品内蔵基板の製造方法。 - 前記電子部品は半導体チップであり、
前記半導体チップは、
前記接続パッドを備えた半導体ウェハを用意する工程と、
前記接続パッドを被覆して前記半導体ウェハの一面全体を被覆する金属保護層を形成する工程と、
前記半導体ウェハの背面を研削して薄型化する工程と、
前記半導体ウェハを切断することにより、前記金属保護層を備えた前記半導体チップを得る工程とを含む方法によって得られることを特徴とする請求項6に記載の電子部品内蔵基板の製造方法。
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