JP5355900B2 - Flat panel display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flat display device of which the display panel is mounted on a mounting frame with an extremely simple structure and besides without increasing in the number of components to be used. <P>SOLUTION: This is the flat display device which is formed by joining a cathode panel CP equipped with electron emitting regions arrayed in a two-dimensional matrix on a support body, and an anode panel AP in which phosphor regions and anode electrodes are formed on a substrate, at the outer peripheral part via a joint member 40, and in which the display panel DP kept in vacuum is mounted on the mounting frame in a space formed between the cathode panel CP and the anode panel AP through the joint member 40. A display panel mounting part 43 extendedly existing from the joint member 40 and protruding from the display panel DP is equipped, and the display panel DP is mounted on the mounting frame via the display panel mounting part 43. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a flat display device.

  In the field of display devices used in television receivers and information terminal equipment, the flat panel type (flat panel) that can meet the demands of thinner, lighter, larger screens and higher definition than the conventional mainstream cathode ray tube (CRT). Type) display devices are rapidly moving. Examples of such a flat display device include a liquid crystal display (LCD), an electroluminescence display (ELD), a plasma display (PDP), and a cold cathode field emission display (FED: field emission display). Can do. Among these, liquid crystal display devices are widely used as display devices for information terminal equipment, but for application to stationary television receivers, there are still problems with high brightness and high-speed response. Yes. On the other hand, a cold cathode field emission display is a cold cathode field emission device (hereinafter, field emission) capable of emitting electrons from a solid into a vacuum based on the quantum tunnel effect without depending on thermal excitation. In some cases, it is called an element), and is attracting attention in terms of high brightness, high-speed response, and low power consumption.

  FIG. 5 shows a schematic partial end view of a cold cathode field emission display device (hereinafter sometimes referred to as a display device) provided with a field emission element, when the cathode panel CP and the anode panel AP are disassembled. FIG. 6 shows a schematic exploded perspective view of a part of the cathode panel CP and the anode panel AP. The field emission device shown in the figure is a so-called Spindt type field emission device having a conical electron emission portion. The field emission device includes a cathode electrode 11 formed on a support 10, an insulating layer 12 formed on the support 10 and the cathode electrode 11, a gate electrode 13 formed on the insulating layer 12, a gate An opening 14 provided in the electrode 13 and the insulating layer 12 and a conical electron emission portion 15 formed on the cathode electrode 11 located at the bottom of the opening 14 are configured. In general, the cathode electrode 11 and the gate electrode 13 are each formed in a band shape in a direction in which the projected images of these two electrodes are orthogonal to each other, and an area where the projected images of these two electrodes overlap (for one subpixel). In general, a plurality of field emission elements are provided in this region (hereinafter referred to as an electron emission region EA). Further, the electron emission areas EA are usually arranged in a two-dimensional matrix within the effective area EF (area that functions as an actual display portion) of the cathode panel CP. An interlayer insulating layer 16 is formed on the insulating layer 12, and a focusing electrode 17 is formed on the interlayer insulating layer 16.

  On the other hand, the anode panel AP includes a substrate 20, a phosphor region 22 formed on the substrate 20 and having a predetermined pattern, and an anode electrode 24 formed thereon. One sub-pixel (sub-pixel) faces a group of field emission elements provided in an overlapping area (electron emission area EA) between the cathode electrode 11 and the gate electrode 13 on the cathode panel side, and a group of these field emission elements. And the phosphor region 22 on the anode panel side. In the effective area EF, such pixels are arranged on the order of several hundred thousand to several million, for example. A light absorption layer (black matrix) 23 is formed on the substrate 20 between the phosphor region 22 and the phosphor region 22. In the figure, reference numeral 21 represents a partition, reference numeral 25 represents a spacer holding portion, reference numeral 26 represents a spacer extending in the row direction (X direction), and reference numeral 140 represents a joining member. Here, in FIG. 6, illustration of a partition and a spacer is abbreviate | omitted.

  The anode panel AP and the cathode panel CP are arranged so that the electron emission region EA and the phosphor region 22 face each other, and are joined to each other through the joining member 140 at the peripheral portion, whereby the display panel DP of the display device is obtained. Can be produced. A through-hole for evacuation (not shown) is provided in the invalid region NF (in the illustrated example, the invalid region NF of the cathode panel CP) that surrounds the valid region EF and has peripheral circuits for selecting pixels. An exhaust pipe (not shown) sealed after evacuation is connected to the periphery of the through hole. That is, the space SP surrounded by the anode panel AP, the cathode panel CP, and the bonding member 140 is in a vacuum. The display panel DP is attached to an attachment frame (not shown) provided in the display device.

  A method of attaching a display panel to a display device is disclosed in, for example, Japanese Patent Application Laid-Open Nos. 2003-216057 and 2006-018027. Here, the technique disclosed in Japanese Patent Application Laid-Open No. 2003-216057 has a structure in which a display panel (vacuum container) is sandwiched between a front cover and a hollow frame via a cushioning material. In the technique disclosed in Japanese Patent Laid-Open No. 2006-018027, a display panel (envelope) is fixed by a reinforcing frame and accompanying parts.

JP2003-216057 JP 2006-018027 A

  However, a large number of parts are required for mounting the display panel disclosed in these patent publications, the structure is complicated, the component cost of the flat display device is increased, the assembly cost is increased, the flat display device There is a problem in that the weight of the flat panel display device is increased and the thickness of the flat display device is increased.

  Accordingly, an object of the present invention is to provide a flat display device in which a display panel is attached to a mounting frame with an extremely simple structure and without causing an increase in the number of parts used as in the conventional flat display device. It is to provide.

In order to achieve the above object, a flat display device according to the present invention includes a cathode panel having electron emission regions arranged in a two-dimensional matrix on a two-dimensional matrix support on the support, and a fluorescent light on the substrate. A display panel in which a body region and an anode panel provided with an anode electrode are joined to each other at a peripheral portion via a joining member, and a space sandwiched between the cathode panel, the anode panel, and the joining member is maintained in a vacuum. Is a flat display device attached to a mounting frame,
Has a bent portion at the tip as well as extending from each corner of the junction member, e Bei the display panel mounting portion protruding from the display panel,
The joining member is located in the first plane, and the bent portion of the display panel mounting portion is located in a second plane different from the first plane,
Support constituting the cathode panel and the joining member is joined with the first seal member,
The substrate constituting the anode panel and the joining member are joined using the second seal member ,
A flat display device in which a bent portion of a display panel mounting portion is attached to a mounting frame .

  In the flat display device of the present invention, the display panel mounting portion, more specifically, for example, the outer edge of the display panel mounting portion may be provided with a reinforcing rib to form the display panel. This is desirable from the viewpoint of increasing the rigidity of the mounting portion. The reinforcing rib can be provided, for example, by bending the outer edge of the display panel mounting portion upward, or by welding the rib to the upper surface (anode panel side) of the display panel mounting portion. be able to. In addition, you may provide the rib for a reinforcement also in a joining member. However, in this case, it is necessary to provide the reinforcing rib at a position that does not interfere with the joining of the cathode panel and the anode panel.

  In the flat display device of the present invention including the above-described preferred embodiment, the support and the joining member constituting the cathode panel are joined using the first seal member, and the substrate and the joining member constituting the anode panel are joined. It can be set as the structure joined using the 2nd sealing member. In this case, the first seal member is made of a heat-resistant resin, frit glass, or a low-melting point metal material, and the second seal member is made of a heat-resistant resin, frit glass, or a low-melting point metal material. It can be configured. The first seal member and the second seal member may be the same material or different materials.

More specifically, examples of the material constituting the first seal member and the second seal member include heat-resistant resins such as polyimide resins, and materials obtained by mixing glass fillers with heat-resistant resins, and B Examples thereof include frit glass such as ₂ O ₃ —PbO-based frit glass and SiO ₂ —B ₂ O ₃ —PbO-based frit glass. Further, as a low melting point metal material having a melting point of about 120 to 400 ° C., In (indium: melting point 157 ° C.); indium-gold based low melting point alloy; Sn ₈₀ Ag ₂₀ (melting point 220 to 370 ° C.), Sn ₉₅ Tin (Sn) high-temperature solder such as Cu ₅ (melting point 227 to 370 ° C); Pb _97.5 Ag _2.5 (melting point 304 ° C), Pb _94.5 Ag _5.5 (melting point 304 to 365 ° C), Pb _97.5 Ag _1.5 Sn _1.0 (melting point 309 ° C.) lead (Pb) high temperature solder; Zn ₉₅ Al ₅ (melting point 380 ° C.) zinc (Zn) high temperature solder; Sn ₅ Pb ₉₅ (melting point 300-314 ° C.), Illustrate Sn-Pb standard solder such as Sn ₂ Pb ₉₈ (melting point: 316 to 322 ° C); brazing material such as Au ₈₈ Ga ₁₂ (melting point: 381 ° C) (the above subscripts all represent atomic%) Can do.

Furthermore, in the flat type display device of the present invention including the preferred embodiment and configuration described above, the linear expansion coefficient at 20 ° C. of the material constituting the joining member is α ₀ , and the support constituting the cathode panel the linear expansion coefficient at 20 ° C alpha _C, the linear expansion coefficient at 20 ° C of the substrate constituting the anode panel when the alpha _a of
| Α ₀ −α _C | ≦ 2 × 10 ⁻⁶ / ° C
| Α ₀ −α _A | ≦ 2 × 10 ⁻⁶ / ° C
It is desirable from the viewpoint of preventing breakage of the display panel and occurrence of warping and twisting in the display panel.

  In the flat display device of the present invention including the preferred embodiments and configurations described above, the joining member is a metal or alloy, specifically, titanium (Ti), tungsten (W), tantalum (Ta), iron. A metal such as (Fe), an iron (Fe) alloy containing 42% by weight of nickel (Ni), an iron (Fe) alloy containing 50% by weight of nickel (Ni), and 52% by weight of nickel (Ni) Iron (Fe) alloy, iron (Fe) alloy containing 42% by weight of nickel (Ni) and 6% by weight of chromium (Cr), 28% by weight of nickel (Ni), also called Kovar or Fernico, and cobalt (Co) It is preferably made of an alloy such as an iron (Fe) alloy containing 18% by weight. An insulating film may be formed on the surface of the joining member made of metal or alloy. The display panel mounting portion may be integrated with the joining member, or the display panel mounting portion and the joining member may be separately manufactured and integrated by welding or using bolts and nuts. . The display panel mounting portion and the joining member can be manufactured by, for example, sheet metal pressing a plate member made of a metal or an alloy.

Furthermore, in the flat display device of the present invention including the preferred embodiment and configuration described above,
The support includes a first surface facing the anode panel, a second surface facing the first surface, and four end surfaces.
The electron emission region provided in the cathode panel is connected to an external circuit by an extraction wiring extending from the outer peripheral portion of the first surface of the support to the second surface through the end surface,
It is preferable from the viewpoint of simplifying the structure that an integrated circuit chip (driving driver) for driving the electron emission region is disposed in the portion of the extraction wiring located on the end face.

  As the integrated circuit chip, a well-known integrated circuit chip (driver for driving) can be used, and the external circuit may be constituted by a well-known circuit. In addition, the extraction wiring may be constituted by, for example, a flexible printed wiring board, and a well-known method may be adopted for the arrangement of the integrated circuit chip on the extraction wiring. For the connection between the extended portion (peripheral circuit) of the electron emission region and the extraction wiring, for example, a known method such as a method using an anisotropic conductive film (ACF) may be employed. When the extraction wiring or the extended portion of the electron emission region or the connection portion between the extraction wiring and the extended portion of the electron emission region is located immediately below the bonding member, these are insulated from the bonding member as necessary. Therefore, a known method may be employed.

  Mounting frame for mounting a display panel in the flat display device of the present invention including the preferred embodiments and configurations described above (hereinafter, these may be collectively referred to simply as “the present invention”). May have a known configuration and structure, or may be made of a known material. The display panel may be attached to the attachment frame using, for example, bolts and nuts, and in some cases, using a spacer member. The display panel mounting portion protrudes from the display panel, but the position and number of protrusions are essentially arbitrary. For example, the display panel mounting portion can be illustrated as protruding from four corners.

  In the present invention, cold cathode field emission devices (hereinafter abbreviated as field emission devices), metal / insulating film / metal type devices (MIM devices), surface conduction electron emission are used as the electron emission devices constituting the electron emission region. An element can be mentioned. Further, as a flat display device, a flat display device (cold cathode field electron emission display device) provided with a cold cathode field emission device, a flat display device incorporating an MIM element, and a surface conduction electron emission device are incorporated. And a flat display device.

In the present invention, the substrate constituting the cathode panel or the substrate constituting the anode panel only needs to be formed of an insulating member on the surface where they face each other, and the insulating film is formed on the glass substrate and the surface. Examples thereof include a formed glass substrate, a quartz substrate, a quartz substrate having an insulating film formed on the surface, and a semiconductor substrate having an insulating film formed on the surface. From the viewpoint of reducing the manufacturing cost, a glass substrate, or It is preferable to use a glass substrate having an insulating film formed on the surface. As glass substrates, high strain point glass, low alkali glass, soda glass (Na ₂ O · CaO · SiO ₂ ), borosilicate glass (Na ₂ O · B ₂ O ₃ · SiO ₂ ), forsterite (2MgO · SiO ₂₎ ), Lead glass (Na ₂ O · PbO · SiO ₂ ), and alkali-free glass.

  In the cathode panel according to the present invention, the electron emission regions are arranged in a two-dimensional matrix, but the projection image in the row direction (X direction) and the projection image in the column direction (Y direction) in which the electron emission regions are arranged. It is preferable from the viewpoint of simplifying the structure of the flat display device that they are orthogonal, that is, the row direction and the column direction are orthogonal. Alternatively, in the cathode panel, the projected image of the cathode electrode and the projected image of the gate electrode are preferably orthogonal from the viewpoint of simplifying the structure of the cold cathode field emission display. Here, for example, the gate electrode may extend in the row direction (X direction), and the cathode electrode may extend in the column direction (Y direction).

  In the present invention, as combinations (M, N) of the number of columns (M) and the number of rows (N), specifically, VGA (640, 480), S-VGA (800, 600), XGA (1024) 768), APRC (1152,900), S-XGA (1280,1024), U-XGA (1600,1200), HD-TV (1920,1080), Q-XGA (2048,1536), ( Some of the image display resolutions such as 1920, 1035), (720, 480), and (1280, 960) can be exemplified, but are not limited to these values.

Here, in the case where the flat display device is a cold cathode field emission display device including a cold cathode field emission device (abbreviated as field emission device), the field emission device is
(A) a strip-shaped cathode electrode formed on a support;
(B) an insulating layer formed on the support and the cathode electrode;
(C) a strip-shaped gate electrode formed on the insulating layer;
(D) an opening provided in a portion of the gate electrode and the insulating layer located in an overlapping region where the cathode electrode and the gate electrode overlap, and an exposed portion of the cathode electrode at the bottom; and
(E) an electron emission portion provided on the cathode electrode exposed at the bottom of the opening, the electron emission being controlled by application of a voltage to the cathode electrode and the gate electrode;
Consists of.

  The type of the field emission device is not particularly limited, and a Spindt-type field emission device (a field emission device in which a conical electron emission portion is provided on the cathode electrode positioned at the bottom of the opening) or a flat type field emission device An element (a field emission element in which a substantially planar electron emission portion is provided on a cathode electrode positioned at the bottom of an opening) can be given. In the cathode panel, an overlapping region where the gate electrode and the cathode electrode overlap constitutes an electron emission region, and the electron emission region is arranged in a two-dimensional matrix in the effective region of the cathode panel. Each electron emission region is provided with one or a plurality of field emission elements.

  In the cold cathode field emission display, a strong electric field generated by the voltage applied to the gate electrode and the cathode electrode is applied to the electron emission portion, and as a result, electrons are emitted from the electron emission portion by the quantum tunnel effect. . The electrons are attracted to the anode panel by the anode electrode provided on the anode panel, and collide with the phosphor region. As a result of the collision of electrons with the phosphor region, the phosphor region emits light and can be recognized as an image.

  Here, the effective area is a central display area that performs a display function that is a practical function as a flat display device, and the ineffective area is located outside the effective area, and the effective area is framed. Besieged.

In a cold cathode field emission display, a cathode electrode is connected to a cathode electrode control circuit (corresponding to an external circuit), a gate electrode is connected to a gate electrode control circuit (corresponding to an external circuit), and an anode electrode is an anode electrode Connected to the control circuit. Note that these control circuits can be constituted by known circuits. During display operation, the voltage (anode voltage) V _A applied to the anode electrode from the anode electrode control circuit is normally constant, and can be set to, for example, 5 to 15 kilovolts. Alternatively, when the distance between the anode panel and the cathode panel is d ₀ (where 0.5 mm ≦ d ₀ ≦ 10 mm), the value of V _A / d ₀ (unit: kilovolt / mm) is 0. It is desirable to satisfy 5 or more and 20 or less, preferably 1 or more and 10 or less, and more preferably 4 or more and 8 or less. At the time of display operation of the cold cathode field emission display device, for example, with respect to the voltage V _C applied to the cathode electrode and the voltage V _G applied to the gate electrode, a voltage modulation method or a pulse width modulation method is adopted as a gradation control method. be able to.

A field emission device can be generally manufactured by the following method.
(1) forming a cathode electrode on a support;
(2) forming an insulating layer on the entire surface (on the support and the cathode electrode);
(3) forming a gate electrode on the insulating layer;
(4) forming an opening in a portion of the gate electrode and the insulating layer in a region where the cathode electrode and the gate electrode overlap, and exposing the cathode electrode at the bottom of the opening;
(5) A step of forming an electron emission portion on the cathode electrode located at the bottom of the opening.

Alternatively, the field emission device can be manufactured by the following method.
(1) forming a cathode electrode on a support;
(2) forming an electron emission portion on the cathode electrode;
(3) forming an insulating layer on the entire surface (on the support and the electron emission portion or on the support, the cathode electrode and the electron emission portion);
(4) forming a gate electrode on the insulating layer;
(5) A step of forming an opening in a portion of the gate electrode and the insulating layer in the overlapping region of the cathode electrode and the gate electrode, and exposing the electron emission portion at the bottom of the opening.

  In the present invention, when a focusing electrode (focus electrode) is provided, a structure in which an interlayer insulating layer is further provided on the gate electrode and the insulating layer, and a focusing electrode is provided on the interlayer insulating layer, or A focusing electrode can be provided above the gate electrode. Here, the focusing electrode is an electrode for converging the trajectory of emitted electrons that are emitted from the opening and directed toward the anode electrode, thereby improving the luminance and preventing optical crosstalk between adjacent pixels. It is. In a so-called high voltage type cold cathode field emission display, the potential difference between the anode electrode and the cathode electrode is on the order of several kilovolts or more and the distance between the anode electrode and the cathode electrode is relatively long. The electrode is particularly effective. A relatively negative voltage (for example, 0 volts) is applied to the focusing electrode from the focusing electrode control circuit. The focusing electrode does not necessarily have to be individually formed so as to surround each of the electron emission portion or the electron emission region provided in the overlapping region where the cathode electrode and the gate electrode overlap, for example, the electron emission portion or The electron emission regions may be extended along a predetermined arrangement direction, or the electron emission portion or the electron emission region may be surrounded by a single convergence electrode (that is, the convergence electrode may be formed in the entire effective region). In this case, a single sheet-like structure covering the plurality of electron emission portions or electron emission regions can be provided with a common convergence effect. Note that an opening (third opening) is provided in the focusing electrode and the interlayer insulating layer.

As constituent materials of the cathode electrode, the gate electrode, and the focusing electrode, chromium (Cr), aluminum (Al), tungsten (W), niobium (Nb), tantalum (Ta), molybdenum (Mo), copper (Cu), gold ( Various metals including metals such as Au), silver (Ag), titanium (Ti), nickel (Ni), cobalt (Co), zirconium (Zr), iron (Fe), platinum (Pt), zinc (Zn); Alloys (for example, MoW) or compounds (for example, TiW; nitrides such as TiN and WN; silicides such as WSi ₂ , MoSi ₂ , TiSi ₂ , and TaSi ₂ ); semiconductors such as silicon (Si); Examples thereof include carbon thin films such as diamond; conductive metal oxides such as ITO (indium oxide-tin), indium oxide, and zinc oxide. The gate electrode, the cathode electrode, and the focusing electrode can have a single layer structure or a stacked structure of these materials. In addition, as a method for forming these electrodes, for example, various physical vapor deposition methods (PVD methods) including vacuum deposition methods such as electron beam deposition method and hot filament deposition method, sputtering methods, ion plating methods, and laser ablation methods. Various chemical vapor deposition methods (CVD method); various printing methods including screen printing method, ink jet printing method, metal mask printing method; plating method (electroplating method and electroless plating method); lift-off method; sol-gel The method etc. can be mentioned, The combination of these methods and an etching method can also be mentioned. Here, by appropriately selecting the formation method, it is possible to directly form a patterned strip-shaped cathode electrode, gate electrode, and focusing electrode.

  In the Spindt-type field emission device, as the material constituting the electron emission portion, molybdenum, molybdenum alloy, tungsten, tungsten alloy, titanium, titanium alloy, niobium, niobium alloy, tantalum, tantalum alloy, chromium, chromium alloy, and And at least one material selected from the group consisting of silicon (polysilicon and amorphous silicon) containing impurities. The electron emission portion of the Spindt-type field emission device can be formed by various PVD methods such as a sputtering method and a vacuum deposition method, and various CVD methods.

In the flat field emission device, it is preferable that the material constituting the electron emission portion is composed of a material having a work function Φ smaller than that of the material constituting the cathode electrode. What is necessary is just to determine based on the work function of the material which comprises a cathode electrode, the electric potential difference between a gate electrode and a cathode electrode, the magnitude | size of the emission electron current density requested | required, etc. Alternatively, the material constituting the electron emission portion may be appropriately selected from materials in which the secondary electron gain δ of the material is larger than the secondary electron gain δ of the conductive material constituting the cathode electrode. Good. In the flat type field emission device, carbon, more specifically, amorphous diamond or graphite, a carbon nanotube structure (carbon nanotube and / or graphite nanofiber), as a particularly preferable constituent material of the electron emission portion, Examples thereof include ZnO whiskers, MgO whiskers, SnO ₂ whiskers, MnO whiskers, Y ₂ O ₃ whiskers, NiO whiskers, ITO whiskers, In ₂ O ₃ whiskers, and Al ₂ O ₃ whiskers. In addition, the material which comprises an electron emission part does not necessarily need to be provided with electroconductivity.

  Planar shape of the first opening (opening formed in the gate electrode) or the second opening (opening formed in the insulating layer) (shape when the opening is cut in a virtual plane parallel to the support surface) ) Can be any shape such as a circle, an ellipse, a rectangle, a polygon, a rounded rectangle, a rounded polygon. The formation of the first opening can be performed by, for example, anisotropic etching, isotropic etching, a combination of anisotropic etching and isotropic etching, or, depending on the method of forming the gate electrode, The first opening can also be formed directly. The second opening can also be formed by, for example, anisotropic etching, isotropic etching, or a combination of anisotropic etching and isotropic etching. The formation of the third opening provided in the focusing electrode and the interlayer insulating layer can be performed in the same manner.

  In the field emission device, depending on the structure of the field emission device, one electron emission portion may exist in one opening, or a plurality of electron emission portions may exist in one opening. In addition, a plurality of first openings are provided in the gate electrode, one second opening communicating with the first opening is provided in the insulating layer, and one or more are provided in one second opening provided in the insulating layer. There may be an electron emission portion.

In the field emission device, a resistor thin film may be formed between the cathode electrode and the electron emission portion. By forming the resistor thin film, the operation of the field emission device can be stabilized, the electron emission characteristics can be made uniform, and the leakage current between the cathode electrode and the gate electrode can be suppressed. As a material constituting the resistor thin film, a carbon resistor material such as silicon carbide (SiC) or SiCN, a semiconductor resistor material such as SiN or amorphous silicon, a high melting point such as ruthenium oxide (RuO ₂ ), tantalum oxide, or tantalum nitride. Examples thereof include metal oxides and refractory metal nitrides. Examples of the method for forming the resistor thin film include a sputtering method, various CVD methods, and a screen printing method. The electric resistance value per one electron emitting portion may be about 1 × 10 ⁵ to 1 × 10 ¹¹ Ω, preferably several MΩ to several tens of gigaΩ.

Insulating layer, as a constituent material of the interlayer insulating _{layer, SiO 2, BPSG, PSG,} BSG, AsSG, PbSG, SiON, SOG ( spin on glass), low-melting glass, SiO ₂ based materials such glass paste; SiN-based materials; polyimide These insulating resins can be used alone or in appropriate combination. For forming the insulating layer and the interlayer insulating layer, known processes such as various CVD methods, coating methods, sputtering methods, and screen printing methods can be used.

In the flat display device, as a configuration example of the anode electrode and the phosphor region,
(1) A configuration in which an anode electrode is formed on a substrate and a phosphor region is formed on the anode electrode. (2) A configuration in which a phosphor region is formed on the substrate and an anode electrode is formed on the phosphor region. Can be mentioned. In the configuration (1), a so-called metal back film that is electrically connected to the anode electrode may be formed on the phosphor region. In the configuration (2), a metal back film may be formed on the anode electrode. The metal back film can also serve as the anode electrode.

The anode electrode may be composed of one anode electrode as a whole, or may be composed of a plurality of anode electrode units. In the latter case, it is preferable that the anode electrode unit and the anode electrode unit are electrically connected by an anode electrode resistor layer. The material constituting the anode electrode resistor layer includes carbon-based materials such as carbon, silicon carbide (SiC), and SiCN; SiN-based materials; ruthenium oxide (RuO ₂ ), tantalum oxide, tantalum nitride, chromium oxide, titanium oxide, and the like. Examples thereof include melting point metal oxides and high melting point metal nitrides; semiconductor materials such as amorphous silicon; ITO. It is also possible to realize a stable desired sheet resistance value by combining a plurality of films such as laminating a carbon thin film having a low resistance value on the SiC resistance film. Examples of the sheet resistance value of the anode electrode resistor layer include 1 × 10 ⁻¹ Ω / □ to 1 × 10 ¹⁰ Ω / □, preferably 1 × 10 ³ Ω / □ to 1 × 10 ⁸ Ω / □. it can. The number of anode electrode units [UN] may be two or more. For example, when the total number of phosphor regions arranged in a straight line is [un], [UN] = [un], or , [Un] = u · [UN] (u is an integer of 2 or more, preferably 10 ≦ u ≦ 100, more preferably 20 ≦ u ≦ 50), or spacers arranged at a constant interval. The number of pixels can be a number obtained by adding 1, or the number of pixels or the number of subpixels can be matched, or the number of pixels or the number of subpixels can be an integer. The size of each anode electrode unit may be the same regardless of the position of the anode electrode unit, or may vary depending on the position of the anode electrode unit. An anode electrode resistor layer may be formed on one anode electrode as a whole. As described above, if the anode electrode is divided into anode electrode units having a smaller area, instead of being formed over almost the entire effective area, the static electricity between the anode electrode unit and the electron emission area is formed. The electric capacity can be reduced. As a result, the occurrence of discharge can be reduced, and the occurrence of damage to the anode electrode and the electron emission region due to the discharge can be effectively reduced.

  When the anode electrode is composed of an anode electrode unit and a partition wall (described later) is formed, the anode electrode unit may be formed so as to extend from each phosphor region to the partition wall side surface. it can. The anode electrode unit may be formed from each phosphor region to the middle of the side wall of the partition wall.

The anode electrode (including the anode electrode unit) may be formed using a conductive material layer. As a method for forming the conductive material layer, for example, vacuum deposition methods such as electron beam deposition method and hot filament deposition method, various PVD methods such as sputtering method, ion plating method and laser ablation method; various CVD methods; various methods including screen printing method Examples thereof include printing method; metal mask printing method; lift-off method; sol-gel method. That is, a conductive material layer is formed, and based on lithography technology and etching technology, this conductive material layer can be patterned to form an anode electrode. Alternatively, the anode electrode can be obtained by forming a conductive material based on various PVD methods or various printing methods through a mask or screen having an anode electrode pattern. The anode electrode resistor layer can also be formed by the same or similar method as the anode electrode. That is, an anode electrode resistor layer may be formed from a resistor material, and the anode electrode resistor layer may be patterned based on a lithography technique and an etching technique, or a mask or a screen having an anode electrode resistor layer pattern. The anode electrode resistor layer can be obtained by forming the resistor material through various PVD methods and various printing methods. 3 × 10 ⁻⁸ m (30 nm) to 1 as the average thickness of the anode electrode on the substrate (or above the substrate) (when the partition is provided as described later, the average thickness of the anode electrode on the top surface of the partition) Examples include x10 ⁻⁶ m (1 μm), preferably 5 × 10 ⁻⁸ m (50 nm) to 5 × 10 ⁻⁷ m (0.5 μm).

As the constituent material of the anode electrode, aluminum (Al), molybdenum (Mo), chromium (Cr), tungsten (W), niobium (Nb), tantalum (Ta), gold (Au), silver (Ag), titanium (Ti ), Cobalt (Co), zirconium (Zr), iron (Fe), platinum (Pt), zinc (Zn), etc .; alloys or compounds containing these metal elements (for example, nitrides such as TiN, WSi ₂ , MoSi ₂ , TiSi ₂ , TaSi _2, etc.); silicon (Si), semiconductors; diamond, graphite and other carbon thin films; ITO (indium oxide-tin), indium oxide, zinc oxide, etc., conductive metal oxides Can be illustrated. When the anode electrode resistor layer is formed, the anode electrode is preferably made of a conductive material that does not change the electric resistance value of the anode electrode resistor layer. For example, the anode electrode resistor layer is made of silicon carbide (SiC). When comprised, it is preferable to comprise an anode electrode from molybdenum (Mo) or aluminum (Al).

  The phosphor region may be composed of monochromatic phosphor particles or may be composed of three primary color phosphor particles. The arrangement pattern of the phosphor regions is, for example, a dot shape. Specifically, when the flat display device is a color display, examples of the arrangement and arrangement of the phosphor regions include a delta arrangement, a stripe arrangement, a diagonal arrangement, and a rectangle arrangement. That is, one row of the phosphor regions arranged in a straight line is occupied by the row occupied by the red light emitting phosphor region, the row occupied by the green light emitting phosphor region, and the blue light emitting phosphor region. May be composed of a row in which a red light-emitting phosphor region, a green light-emitting phosphor region, and a blue light-emitting phosphor region are sequentially arranged. Here, the phosphor region is defined as a phosphor region that generates one bright spot on the anode panel. One pixel (one pixel) is composed of a set of one red light emitting phosphor region, one green light emitting phosphor region, and one blue light emitting phosphor region, and one subpixel is one phosphor. The region is composed of one red light emitting phosphor region, one green light emitting phosphor region, or one blue light emitting phosphor region. A gap between adjacent phosphor regions may be filled with a light absorption layer (black matrix) for the purpose of improving contrast.

  For the phosphor region, a luminescent crystal particle composition prepared from luminescent crystal particles is used. For example, a red photosensitive luminescent crystal particle composition (red light-emitting phosphor slurry) is applied to the entire surface and exposed. And developing to form a red light emitting phosphor region, and then applying a green photosensitive luminescent crystal particle composition (green light emitting phosphor slurry) to the entire surface, exposing and developing, and then producing a green light emitting phosphor. A region is formed, and further, a blue photosensitive luminescent crystal particle composition (blue light emitting phosphor slurry) is coated on the entire surface, exposed and developed to form a blue light emitting phosphor region. be able to. Alternatively, each phosphor region may be formed by a screen printing method, an ink jet printing method, a float coating method, a sedimentation coating method, a phosphor film transfer method, or the like. Although the average thickness of the phosphor region on the substrate is not limited, it is desirably 3 μm to 20 μm, preferably 5 μm to 10 μm. The phosphor material constituting the luminescent crystal particles can be appropriately selected from conventionally known phosphor materials. In the case of color display, a phosphor material whose color purity is close to the three primary colors specified by NTSC, white balance is achieved when the three primary colors are mixed, the afterglow time is short, and the afterglow time of the three primary colors is almost equal. It is preferable to combine them.

  It is preferable from the viewpoint of improving the contrast of the display image that the light absorption layer that absorbs light from the phosphor region is formed between adjacent phosphor regions or between a partition wall and a substrate described later. Here, the light absorption layer functions as a so-called black matrix. As a material constituting the light absorption layer, it is preferable to select a material that absorbs 90% or more of light from the phosphor region. Such materials include carbon, metal thin films (eg, chromium, nickel, aluminum, molybdenum, etc., or alloys thereof), metal oxides (eg, chromium oxide), metal nitrides (eg, chromium nitride), heat resistance Materials such as photosensitive organic resins, glass pastes, glass pastes containing conductive particles such as black pigments and silver, and specifically, photosensitive polyimide resins, chromium oxides, and chromium oxide / chromium laminated films Can be illustrated. In the chromium oxide / chromium laminated film, the chromium film is in contact with the substrate. The light absorption layer depends on the material used, for example, a combination of a vacuum deposition method, a sputtering method and an etching method, a combination of a vacuum deposition method, a sputtering method, a spin coating method and a lift-off method, various printing methods, a lithography technique, etc. Thus, it can be formed by a method selected as appropriate.

  In order to prevent an electron recoiled from the phosphor region or a secondary electron emitted from the phosphor region from entering another phosphor region, so-called optical crosstalk (color turbidity) is generated. It is preferable to provide a partition wall. Examples of the partition wall forming method include a screen printing method, a dry film method, a photosensitive method, a casting method, and a sandblast forming method. Here, in the screen printing method, an opening is formed in a portion of the screen corresponding to a portion where a partition is to be formed, and the partition forming material on the screen is passed through the opening using a squeegee, and the partition is formed on the substrate. In this method, after the formation material layer is formed, the partition wall formation material layer is fired. The dry film method is a method of laminating a photosensitive film on a substrate, removing the photosensitive film at the part where the partition wall is to be formed by exposure and development, embedding the partition wall forming material in the opening generated by the removal, and baking. . The photosensitive film is burned and removed by baking, and the partition wall-forming material embedded in the openings remains to form partition walls. The photosensitive method is a method in which a barrier rib-forming material layer having photosensitivity is formed on a substrate, the barrier rib-forming material layer is patterned by exposure and development, and then fired (cured). The casting method (embossing molding method) refers to a method for forming a partition wall forming material layer by extruding a partition wall forming material layer made of a paste-like organic material or inorganic material onto a substrate from a mold (cast). In this method, the partition wall forming material layer is fired. The sand blast forming method is, for example, forming a partition wall forming material layer on a substrate using a screen printing or metal mask printing method, a roll coater, a doctor blade, a nozzle discharge type coater, etc. In this method, the part of the partition wall forming material layer to be covered is covered with a mask layer, and then the exposed part of the partition wall forming material layer is removed by sandblasting. After the partition wall is formed, the partition wall may be polished to flatten the top surface of the partition wall.

  As a planar shape of the part surrounding the phosphor region in the partition wall (corresponding to the inner contour line of the projected image of the partition wall side surface and a kind of opening region), a rectangular shape, a circular shape, an elliptical shape, an oval shape, a triangular shape, Examples include pentagonal or more polygonal shapes, rounded triangular shapes, rounded rectangular shapes, rounded polygons, etc., and linear shapes extending parallel to two sides of the phosphor region (Rod-like shape). By arranging these planar shapes (planar shapes of the opening regions) in a two-dimensional matrix, a lattice-like partition is formed. This two-dimensional matrix-like arrangement may be arranged, for example, like a cross or like a zigzag.

Examples of the partition wall forming material include photosensitive polyimide resin, lead glass colored with a metal oxide such as cobalt oxide, SiO ₂ , and a low melting point glass paste. A protective layer (for example, made of SiO ₂ , SiON, or AlN) is provided on the surface (top surface and side surface) of the partition wall to prevent an electron beam from colliding with the partition wall and releasing gas from the partition wall. It may be formed.

  The cathode panel, the anode panel, and the joining member are joined. The three members may be joined at the same time, or in the first stage, either the cathode panel or the anode panel and the joining member are joined. In the second stage, the other of the cathode panel or the anode panel and the joining member may be joined. If the three-party simultaneous bonding or the second stage bonding is performed in a high vacuum atmosphere, the space surrounded by the cathode panel, the anode panel, and the bonding member becomes a vacuum simultaneously with the bonding. Alternatively, after the three members are joined, the space surrounded by the cathode panel, the anode panel, and the joining member can be evacuated to create a vacuum. When exhausting after joining, the atmosphere pressure during joining may be either normal pressure or reduced pressure, and the gas constituting the atmosphere may be nitrogen gas or a gas belonging to Group 0 of the periodic table (for example, Ar gas) ) Is preferable, but it can also be performed in the atmosphere.

  When exhaust is performed, the exhaust can be performed through an exhaust pipe called a tip pipe connected in advance to the cathode panel and / or the anode panel. The exhaust pipe is typically a glass pipe, or a metal or alloy having a low coefficient of thermal expansion [for example, an iron (Fe) alloy containing 42 wt% nickel (Ni), 42 wt% nickel (Ni), A hollow tube made of an iron (Fe) alloy containing 6 wt% chromium (Cr)], and the above-mentioned frit glass or After being joined using a low melting point metal material and the space has reached a predetermined degree of vacuum, it is sealed off by thermal fusion or sealed by crimping. In addition, if the whole flat display device is once heated and then cooled before sealing, it is preferable because residual gas can be released into the space, and this residual gas can be removed out of the space by exhaust. .

Since the space sandwiched between the cathode panel and the anode panel is kept in a vacuum state, a local area between the cathode panel and the anode panel is prevented so that the cold cathode field emission display is not damaged by atmospheric pressure. In particular, it is preferable to provide a spacer. The spacer can be made of ceramics or glass material, for example. When the spacer is made of ceramics, the ceramics include aluminum silicate compounds such as mullite, aluminum oxide such as alumina, barium titanate, lead zirconate titanate, zirconia (zirconium oxide), cordiolite, barium borosilicate, silicic acid. Examples thereof include iron, glass ceramic materials, titanium oxide, chromium oxide, magnesium oxide, iron oxide, vanadium oxide, nickel oxide added thereto, and the like. For example, in Japanese translations of PCT publication No. 2003-524280 The materials described can also be used. In this case, the spacer can be manufactured by forming a so-called green sheet, firing the green sheet, and cutting the green sheet fired product. Glass materials include high strain point glass, low alkali glass, non-alkali glass, soda glass (Na ₂ O · CaO · SiO ₂ ), borosilicate glass (Na ₂ O · B ₂ O ₃ · SiO ₂ ), Examples thereof include stellite (2MgO · SiO ₂ ), lead glass (Na ₂ O · PbO · SiO ₂ ), and crystalline glass. In addition, it is preferable to chamfer the end portion of the spacer to remove the protruding portion. For example, the spacer may be fixed by being sandwiched between partition walls provided in the anode panel, or, for example, a spacer holding portion may be formed on the anode panel and / or the cathode panel and fixed by the spacer holding portion. do it.

An antistatic film, a resistor film, or the like may be provided on the side surface of the spacer. The material constituting the antistatic film preferably has a secondary electron emission coefficient close to 1. As the material constituting the antistatic film, a semiconductor such as Si or Ge, a semimetal such as graphite, an oxide, or a boride , Carbides, sulfides, nitrides, and the like can be used. Specifically, for example, compounds containing a metalloid element such as a semi-metal and MoSe _x such as _{graphite, CrO x, NdO x, CrAl} x O y, manganese _{oxide, La x Ba 2-x CuO} 4, La x Y Oxides such as _1-x CrO ₃ , borides such as AlB _x and TiB _x , carbides such as SiC, sulfides such as MoS _x and WS _x , and compounds of tungsten nitride and germanium nitride, BN, TiN, AlN In addition, for example, materials described in JP-T-2004-500688 and the like can also be used. Examples of the material constituting the resistor film include ruthenium oxide (RuO _x ) and cermet. The film provided on the surface of the spacer such as an antistatic film may be made of a single type of material or may be made of a plurality of types of materials. For example, the film may have a single-layer structure, and the layer may be composed of a plurality of types of materials, or the film is formed by laminating a plurality of layers, and each layer is composed of different materials. Also good. These films can be formed by well-known methods such as various PVD methods such as sputtering and vacuum deposition, various CVD methods, and screen printing methods. Moreover, what is necessary is just to set arbitrarily the film thickness of these films | membranes as needed.

  In the present invention, a display panel mounting portion extending from the joining member and protruding from the display panel is provided, and the display panel is mounted to the mounting frame via the display panel mounting portion. Here, the joining member itself is a member conventionally used in a flat display device. Therefore, no new parts are used in the present invention. In addition, since the display panel may be attached to the mounting frame via the display panel mounting portion, the structure is extremely simple, the parts cost of the flat display device is increased, the assembly cost is increased, and the flat display device is There is no increase in weight and thickness of the flat display device. In addition, since the force or impact applied to the mounting frame or the like is not directly applied to the support or the substrate, a flat display device having high reliability can be provided.

  Hereinafter, the present invention will be described based on examples with reference to the drawings. Prior to that, a common outline of flat-type display devices in examples 1 to 2 will be described below. Here, the flat display devices in Examples 1 and 2 are cold cathode field emission display devices (hereinafter, abbreviated as display devices). In the display devices according to the first and second embodiments, the strip-shaped gate electrode (for example, scanning electrode) 13 extends in the row direction (X direction), and the strip-shaped cathode electrode (for example, data electrode) 11 extends in the column direction (Y Direction).

  A schematic partial end view of the display device in the embodiment is the same as that shown in FIG. 5, and a schematic exploded perspective view of a part of the cathode panel CP and the anode panel AP when the cathode panel CP and the anode panel AP are disassembled. The figure is similar to that shown in FIG. That is, in the display device according to the embodiment, the display panel DP is attached to the attachment frame as will be described later. The display panel DP includes a cathode panel CP having electron emission regions EA arranged in a two-dimensional matrix along the row direction (X direction) and the column direction (Y direction) on the support 10, and a substrate. An anode panel AP having a phosphor region 22 and an anode electrode 24 provided on 20 is joined to the outer peripheral portion via a joining member (described later). The cathode panel CP, the anode panel AP, and the joining member The sandwiched space SP is kept in a vacuum.

Here, the display device according to the embodiment includes an effective area EF and an invalid area NF surrounding the effective area EF. The effective area EF is a display area located substantially in the center that performs a practical image display function as a display device. The effective area EF is surrounded by an ineffective area NF that surrounds the frame. The space SP sandwiched between the cathode panel CP, the anode panel AP, and the joining member is held in a vacuum (pressure: for example, 10 ⁻³ Pa or less). The ineffective area NF of the cathode panel CP is provided with a through hole (not shown) for evacuation, and an exhaust pipe (not shown) called a tip pipe that is sealed after evacuation is provided around the through hole. Is attached.

In the embodiment, the field emission element constituting the electron emission region is constituted by, for example, a Spindt type field emission element. Spindt-type field emission devices
(A) a strip-shaped cathode electrode 11 formed on the support 10;
(B) an insulating layer 12 formed on the support 10 and the cathode electrode 11;
(C) a strip-shaped gate electrode 13 formed on the insulating layer 12;
(D) An opening 14 (provided in the gate electrode 13) provided in a portion of the gate electrode 13 and the insulating layer 12 located in the overlapping region where the cathode electrode 11 and the gate electrode 13 overlap, with the cathode electrode 11 exposed at the bottom. 14A of 1st opening parts, 2nd opening part 14B provided in the insulating layer 12, and,
(E) an electron emitting portion 15 provided on the cathode electrode 11 exposed at the bottom of the opening 14 and whose electron emission is controlled by applying a voltage to the cathode electrode 11 and the gate electrode 13;
It is composed of Here, the shape of the electron emission portion 15 is a conical shape. An interlayer insulating layer 16 is formed on the insulating layer 12, and a focusing electrode 17 is formed on the interlayer insulating layer 16.

  In the display device of the embodiment, the cathode electrode 11 and the gate electrode 13 are each formed in a strip shape in a direction (column direction and row direction) in which the projected images of the electrodes 11 and 13 are orthogonal to each other. A plurality of field emission elements are provided in a region where the projected images of both electrodes overlap (corresponding to a region corresponding to one sub-pixel (sub-pixel), which is an electron emission region EA). For simplification of the drawing, FIG. 5 shows two electron emission portions 15 in each electron emission area EA. The electron emission areas EA are usually arranged in a two-dimensional matrix as described above in the effective area EF (area that functions as an actual display portion) of the cathode panel CP.

  The anode panel AP includes a substrate 20, a phosphor region 22 formed on the substrate 20 and having a predetermined pattern, and an anode electrode 24 formed thereon. One sub-pixel (one sub-pixel) includes an electron emission area EA and a phosphor area 22 on the anode panel side facing the electron emission area EA. In the effective area EF, the sub-pixels are arranged on the order of several hundred thousand to several million, for example. A light absorption layer (black matrix) 23 is formed on the substrate 20 between the phosphor region 22 and the phosphor region 22 in order to prevent color turbidity of the display image and occurrence of optical crosstalk. ing. The anode electrode 24 is made of aluminum (Al) having a thickness of about 0.3 μm, is in the form of a thin sheet that covers the effective region EF, and is provided so as to cover the phosphor region 22. In FIG. 6, illustration of the partition walls, the spacers, and the spacer holding portions is omitted. In the case of a color display device, one pixel (one pixel) is composed of a set of one red light emitting phosphor region 22R, one green light emitting phosphor region 22G, and one blue light emitting phosphor region 22B. Has been. A grid-like partition wall 21 surrounding each phosphor region 22 is formed on the substrate 20. Each phosphor region 22 is surrounded by a partition wall 21. The planar shape (corresponding to the inner contour line of the projected image of the partition wall side surface and a kind of opening region) of the portion surrounding the phosphor region 22 in the lattice-shaped partition wall 21 is a rectangular shape (rectangle), and these planes The shape (planar shape of the opening region) is arranged in a two-dimensional matrix (more specifically, a cross beam), and a lattice-like partition wall 21 is formed. A part of the partition functions as the spacer holding part 25.

In the display device according to the embodiment, a plurality of columns of flat spacers 26 extending in the row direction (X direction) are arranged between the cathode panel CP and the anode panel AP. In addition, several tens to several hundreds of gate electrodes 13 are sandwiched between the spacers 26 and 26. The top surface and the bottom surface of the spacer 26 are parallel to the XY plane, the side surfaces are parallel to the XZ plane, and the end surfaces are parallel to the YZ plane. The spacer body 26A constituting the spacer 26 is made of, for example, aluminum oxide (Al ₂ O ₃ ), and the resistance value between the top surface and the bottom surface of the spacer 26 is about 1 × 10 ¹⁰ Ω (about ¹⁰ GΩ). On the side surface of the spacer body 26A, for example, an antistatic film 26B made of chromium oxide (CrO _x ) having a thickness of 4 nm is formed based on an RF sputtering method. Chromium oxide has a relatively small secondary electron emission coefficient and is a very preferable material for the antistatic film under the condition that the spacer 26 is positively charged. Further, an end electrode layer 26C made of platinum (Pt) is formed on the top and bottom surfaces of the spacer body 26A. Alternatively, a nickel-vanadium alloy can be used as a material constituting the end electrode layer 26C.

In the display device in the embodiment, the cathode electrode 11 is connected to a cathode electrode control circuit 31 (corresponding to an external circuit), the gate electrode 13 is connected to a gate electrode control circuit 32 (corresponding to an external circuit), and the focusing electrode is If provided, the focusing electrode is connected to a focusing electrode control circuit (not shown), and the anode electrode 24 is connected to the anode electrode control circuit 33. At the time of display operation of the display device, the anode voltage V _A applied from the anode electrode control circuit 33 to the anode electrode 24 is normally constant, for example, 5 to 15 kilovolts, specifically, for example, 9 kilovolts ( For example, d ₀ = 2.0 mm). On the other hand, regarding the voltage V _C applied to the cathode electrode 11 and the voltage V _G applied to the gate electrode 13 during the display operation of the display device,
(1) A method in which the voltage V _C applied to the cathode electrode 11 is constant and the voltage V _G applied to the gate electrode 13 is changed. (2) The voltage V _C applied to the cathode electrode 11 is changed and applied to the gate electrode 13. changing the voltage V _C is applied the voltage V _G to the method (3) a cathode electrode 11, fixed to, and, any method to change the voltage V _G applied to the gate electrode 13 may be employed but, In the display device in the embodiment, the above-described method (2) is adopted.

That is, during display operation of the display device, a relatively negative voltage (V _C ) is applied to the cathode electrode 11 from the cathode electrode control circuit 31, and a relatively positive voltage (V _G ) is applied to the gate electrode 13. When a focusing electrode is provided from the control circuit 32, for example, 0 V is applied to the focusing electrode from the focusing electrode control circuit, and a positive voltage (anode) higher than the gate electrode 13 is applied to the anode electrode 24. _A voltage V _A ) is applied from the anode electrode control circuit 33. In such a display device, when an image is displayed by a line sequential driving method, for example, a video signal is input from the cathode electrode control circuit 31 to the cathode electrode 11 and a scanning signal is input from the gate electrode control circuit 32 to the gate electrode 13. . When the cathode electrode 11 is a scan electrode and the gate electrode 13 is a data electrode, a scan signal is input from the cathode electrode control circuit 31 to the cathode electrode 11 and a video signal is input from the gate electrode control circuit 32 to the gate electrode 13. You can enter. Electrons are emitted from the electron emitter 15 based on the quantum tunnel effect due to an electric field generated when a voltage is applied between the cathode electrode 11 and the gate electrode 13, and the electrons are attracted to the anode electrode 24. It passes through and collides with the phosphor region 22. As a result, the phosphor region 22 is excited to emit light, and a desired image can be obtained. That is, the operation of this display device is basically controlled by the voltage V _G applied to the gate electrode 13 and the voltage V _C applied to the cathode electrode 11. The cathode electrode 11 is driven by a cathode electrode driver (integrated circuit chip 61), and the gate electrode 13 is driven by a gate electrode driver (integrated circuit chip 61). The cathode electrode control circuit 31, the gate electrode control circuit 32, the anode electrode control circuit 33, and the drive driver (integrated circuit chip 61) can be composed of known circuits.

  Example 1 relates to a flat display device of the present invention. FIG. 1A shows a schematic plan view of a display panel in the display device of Example 1, and FIG. 1B shows a schematic plan view of a joining member and a display panel mounting portion. 2A and 2B are end views in which a part of the member and the display panel mounting portion are cut out. 2A and 2B are end views taken along arrows AA and BB in FIG. 1A, respectively.

  The display device according to the first embodiment includes a display panel mounting portion 43 that extends from the joining member 40 and protrudes from the display panel DP. Here, the display panel mounting portion 43 is specifically composed of an extending portion of the joining member 40. That is, the display panel mounting portion 43 is made integrally with the joining member 40. More specifically, the display panel mounting portion 43 protrudes from the four corners of the display panel DP. That is, the display panel mounting portion 43 protrudes from the four corners of the frame-shaped joining member 40. The joining member 40 and the display panel mounting portion 43 are located in the same plane. The display panel mounting portion 43 is provided with a mounting hole 44.

The joining member 40 and the display panel mounting portion 43 are integrally made of an iron (Fe) alloy containing 1.95 mm in thickness, 42% by weight of nickel (Ni), and 6% by weight of chromium (Cr). . The width of the joining member 40 is 10 mm. The linear expansion coefficient at 20 ° C. of the material constituting the joining member is α ₀ , the linear expansion coefficient at 20 ° C. of the support (comprising high strain point glass) constituting the cathode panel is α _C , and the anode panel is When the linear expansion coefficient at 20 ° C. of the constituting substrate (made of high strain point glass) is α _A ,
α ₀ = about 9.1 × 10 ⁻⁶ / ° C
α _C = α _A = about 8.3 × 10 ⁻⁶ / ° C
And
| Α ₀ −α _C | ≦ 2 × 10 ⁻⁶ / ° C
| Α ₀ −α _A | ≦ 2 × 10 ⁻⁶ / ° C
Is satisfied.

Here, the support body 10 and the joining member 40 constituting the cathode panel CP are joined together using the first seal member 41, and the substrate 20 and the joining member 40 constituting the anode panel AP are secondly attached. The sealing member 42 is used. Here, the first seal member 41 and the second seal member 42 are specifically frit glass (more specifically, B ₂ O ₃ —PbO-based frit glass mixed with a ceramic filler). Consists of.

  The display panel DP is attached to the attachment frame 50 (only a part is shown in FIG. 2A) via the display panel attachment portion 43. Specifically, the display panel mounting portion 43 is bolted 52 to the mounting hole 44 provided in the display panel mounting portion 43 and the hole 51 formed in the mounting frame 50 having a known configuration and structure. And the nut 53 and the spacer member 54.

  The support 10 constituting the cathode panel CP includes a first surface 10A facing the anode panel AP, a second surface 10B facing the first surface 10A, and four end surfaces 10C, 10D, 10E, and 10F (in FIG. 1). (See (A)). FIG. 2B shows one end face 10C of the four end faces. The electron emission area EA provided in the cathode panel CP is connected to the cathode electrode control circuit 31 or the like by an extraction wiring 60 extending from the outer peripheral portion of the first surface 10A of the support 10 to the second surface 10B via the end surface 10C. An integrated circuit chip (driving driver) 61 for driving the electron emission area EA is disposed in a portion of the extraction wiring 60 that is connected to an external circuit such as the gate electrode control circuit 32 and is located on the end face 10C. Yes.

  Here, the integrated circuit chip 61 is composed of a well-known integrated circuit chip (driver for driving), and external circuits such as the cathode electrode control circuit 31 and the gate electrode control circuit 32 are also composed of well-known circuits. In addition, the extraction wiring 60 is formed of a flexible printed wiring board, and the extending portion of the electron emission area EA (peripheral circuit that is the extending portion of the cathode electrode 11 and the extending portion of the gate electrode 13) and the extraction wiring 60 are included. Is connected using an anisotropic conductive film (not shown). In addition, when the connection part of the extension part of the extraction wiring 60 and the electron emission area | region EA is located directly under the joining member 40, in order to insulate these from the joining member 40 as needed, if an insulating film is formed Good.

The display device of Example 1 can be manufactured by the following method. That is, the cathode panel CP and the anode panel AP are manufactured by a known method. On the other hand, uncured first sealing member 41 and second sealing member 42 are applied to the surface, and a pre-fired joining member 40 is prepared. Then, the joining member 40 is placed on the outer peripheral portion of the anode panel AP, the spacer 26 is sandwiched between the spacer holding portions 25 provided on the anode panel AP, and the phosphor region 22 and the electron emission region EA are opposed to each other. The cathode panel CP is placed on the joining member 40 and the spacer 26. Then, the first seal member 41 and the second seal member 42 are baked in a state where a force is applied between the anode panel AP and the cathode panel CP, so that the cathode panel CP and the anode panel AP are outer peripheral. Are joined via the joining member 40. Thereafter, the space SP surrounded by the anode panel AP, the cathode panel CP, and the joining member 40 is exhausted through a through hole and an exhaust pipe (not shown), and when the pressure of the space SP reaches about 10 ⁻⁴ Pa, the exhaust pipe is exhausted. Is sealed by heat melting or pressure welding. Thus, the space SP surrounded by the anode panel AP, the cathode panel CP, and the joining member 40 can be evacuated. Thereafter, as described above, the wiring with the external circuit is taken out via the wiring 60, and the display device of Example 1 can be completed.

  In the first embodiment, the display panel mounting portion 43 that extends from the joining member 40 and protrudes from the display panel DP is provided as described above, and the display panel DP includes the display panel mounting portion. Although it is attached to the attachment frame 50 via 43, the joining member itself is a member conventionally used in display devices. Therefore, it is not necessary to use new parts for attaching the display panel DP to the attachment frame 50. In addition, since the display panel DP may be attached to the mounting frame 50 via the display panel attachment portion 43, the structure is extremely simple, the parts cost of the display device is increased, the assembly cost is increased, and the display device weight is increased. Increase in the thickness of the display device.

  The second embodiment is a modification of the first embodiment. In Example 1, the joining member 40 including the display panel mounting portion 43 was flat. That is, the joining member 40 and the display panel mounting portion 43 are located in the same plane. On the other hand, as shown in FIG. 3A, a partial schematic plan view is shown, and in FIG. 3B, a schematic partial end view is shown. A portion of the portion 73 is bent toward the mounting frame 50, and the cross-sectional shape of the display panel mounting portion 73 is a shape in which substantially “L” shapes are combined. As a result, the display panel DP is attached to the attachment frame 50 (only part of the display panel DP is shown in FIG. 3A) via the display panel attachment portion 73. Specifically, The display panel mounting portion 73 is fixed to the mounting hole 74 provided in the display panel mounting portion 73 and the hole 51 formed in the mounting frame 50 by using bolts 52 and nuts 53. Unlike the first embodiment, the spacer member is unnecessary.

  Except for the difference in the structure of the display panel mounting portion 73 as described above, the configuration and structure of the display device of the second embodiment can be the same as the configuration and structure of the display device of the first embodiment. The detailed explanation is omitted.

  Hereinafter, referring to FIGS. 7A to 7C and FIGS. 8A to 8B which are schematic partial end views of the substrate 20 and the like constituting the anode panel AP, the anode panel AP will be described. The manufacturing method will be described.

[Step-A1]
First, a grid-like partition wall 21 is formed on the substrate 20 (see FIG. 7A). The partition wall 21 also functions as the spacer holding part 25. Specifically, after forming the photosensitive polyimide resin layer on the substrate 20 based on the coating method, the photosensitive polyimide resin layer is selectively removed by photolithography technique and development, and then the remaining photosensitive polyimide resin layer Is fired to form a grid-like partition wall 21 and a spacer holding portion 25. The size of the opening region of the partition wall 21 was approximately vertical × horizontal × height = 280 μm × 100 μm × 40 μm. Before forming the partition walls 21, it is preferable to form a light absorption layer (black matrix) 23 made of, for example, chromium oxide on the surface of the portion of the substrate 20 where the partition walls 21 are to be formed. Specifically, a low melting point glass paste colored black with a metal oxide such as cobalt oxide is printed on the substrate 20 by a screen printing method, and then the low melting point glass paste is baked to form a lattice-shaped light. The absorption layer 23 may be formed. In addition, the thickness of the light absorption layer 23 was about 8 μm.

[Step-A2]
Next, the phosphor region 22 is formed on the portion of the substrate 20 surrounded by the partition wall 21 (see FIG. 7B). Specifically, in order to form the red light emitting phosphor region 22R, for example, a red light emitting phosphor slurry in which red light emitting phosphor particles are dispersed in, for example, polyvinyl alcohol (PVA) resin and water and ammonium dichromate is further added. Then, the red light emitting phosphor slurry is dried. Thereafter, the portion of the red light emitting phosphor slurry in which the red light emitting phosphor region 22R is to be formed is irradiated with ultraviolet rays from the substrate side to expose the red light emitting phosphor slurry. The red light emitting phosphor slurry is gradually cured from the substrate side. The thickness of the red light-emitting phosphor region 22R to be formed is determined by the amount of ultraviolet light applied to the red light-emitting phosphor slurry. Here, for example, the irradiation time of the ultraviolet light with respect to the red light emitting phosphor slurry is adjusted so that the thickness of the red light emitting phosphor region 22R is about 8 μm. Thereafter, the red light-emitting phosphor region 22R can be formed in a predetermined region by developing the red light-emitting phosphor slurry. Hereinafter, the green light emitting phosphor region 22G is formed by performing the same process on the green light emitting phosphor slurry, and further, the blue light emitting phosphor region 22B is formed by performing the same process on the blue light emitting phosphor slurry. Form. The method for forming the phosphor region is not limited to the method described above, and each phosphor region may be formed by, for example, a screen printing method.

[Step-A3]
Thereafter, a resin layer 80 is formed on the top surface of the partition wall 21 and on the phosphor region 22 (see FIG. 7C). Specifically, the resin layer 80 can be formed based on a metal mask printing method or a screen printing method. Next, the resin layer 80 is dried. That is, the substrate 20 is carried into a drying furnace and dried at a predetermined temperature. The drying temperature of the resin layer 80 is preferably in the range of 50 ° C. to 90 ° C., for example, and the drying time of the resin layer 80 is preferably in the range of several minutes to several tens of minutes, for example. Of course, as the drying temperature increases and decreases, the drying time decreases.

[Step-A4]
After that, an anode electrode 24 that covers the display region is formed (see FIG. 8A). Specifically, the anode electrode 24 made of aluminum (Al) is formed by various vapor deposition methods or sputtering methods so as to cover the resin layer 80 formed on the top surface of the partition wall 21 and the phosphor region 22. . The thickness of the formed anode electrode 24 was about 0.3 μm.

[Step-A5]
Next, the heat treatment is performed to remove the resin layer 80 (see FIG. 8B). Specifically, the resin layer 80 is baked at about 400 ° C. By this baking treatment, the resin layer 80 is burned and burned, and the anode electrode 24 made of aluminum (Al) is left on the phosphor region 22 and the partition wall 21. The gas generated by the combustion of the resin layer 80 is discharged to the outside through, for example, fine holes generated in the anode electrode 24. Since the holes are fine, they do not seriously affect the structural strength and image display characteristics of the anode electrode 24. Through the above steps, the anode panel AP can be completed.

  9A and 9B and FIGS. 10A and 10B, which are schematic partial end views of the support 10 and the like constituting the cathode panel. A description will be given with reference to B). In the method described below, the description of the process of forming the interlayer insulating layer 16 and the focusing electrode 17 is omitted.

  This Spindt-type field emission device can be basically obtained by a method of forming the conical electron emission portion 15 by vertical vapor deposition of a metal material. That is, the vapor deposition particles are perpendicularly incident on the first opening 14A provided in the gate electrode 13, but use the shielding effect by the overhanging deposit formed near the opening end of the first opening 14A. Thus, the amount of vapor deposition particles reaching the bottom of the second opening 14B is gradually reduced, and the electron emission portion 15 that is a conical deposit is formed in a self-aligning manner. Here, a method of forming the separation layer 18 in advance over the gate electrode 13 and the insulating layer 12 in order to facilitate removal of unnecessary overhang-like deposits will be described. In the drawing for explaining the method of manufacturing the field emission device, only one electron emission portion is shown.

[Step-B0]
First, a cathode electrode conductive material layer made of, for example, polysilicon is formed on the support 10 made of, for example, a glass substrate by a plasma CVD method, and then the cathode electrode conductive material layer is formed based on a lithography technique and a dry etching technique. Is patterned to form a strip-like cathode electrode 11. Thereafter, an insulating layer 12 made of SiO _{2 is} formed on the entire surface by a CVD method.

[Step-B1]
Next, a gate electrode conductive material layer (for example, a TiN layer) is formed on the insulating layer 12 by sputtering, and then the gate electrode conductive material layer is patterned by a lithography technique and a dry etching technique. Thus, the strip-shaped gate electrode 13 can be obtained. The strip-shaped cathode electrode 11 extends in the left-right direction in the drawing, and the strip-shaped gate electrode 13 extends in the direction perpendicular to the drawing.

  The gate electrode 13 is formed by a well-known thin film such as a PVD method such as a vacuum evaporation method, a CVD method, a plating method such as an electroplating method or an electroless plating method, a screen printing method, a laser ablation method, a sol-gel method, a lift-off method. You may form by the combination of formation and an etching technique as needed. According to the screen printing method or the plating method, for example, a strip-shaped gate electrode can be directly formed.

[Step-B2]
Thereafter, a resist layer is formed again, the first opening 14A is formed in the gate electrode 13 by etching, the second opening 14B is formed in the insulating layer, and the cathode electrode 11 is formed at the bottom of the second opening 14B. Then, the resist layer is removed. Thus, the structure shown in FIG. 9A can be obtained.

[Step-B3]
Next, nickel (Ni) is obliquely deposited on the insulating layer 12 including the gate electrode 13 while rotating the support 10, thereby forming a release layer 18 (see FIG. 9B). At this time, by selecting a sufficiently large incident angle of the vapor deposition particles with respect to the normal of the support 10 (for example, an incident angle of 65 to 85 degrees), nickel is hardly deposited on the bottom of the second opening 14B. A release layer 18 can be formed on the gate electrode 13 and the insulating layer 12. The release layer 18 protrudes in a bowl shape from the opening end of the first opening 14A, whereby the diameter of the first opening 14A is substantially reduced.

[Step-B4]
Next, for example, molybdenum (Mo) is vertically deposited as an electrically conductive material on the entire surface (incident angle: 3 to 10 degrees). At this time, as shown in FIG. 10A, as the conductive member layer 19 having an overhang shape grows on the release layer 18, the substantial diameter of the first opening 14A is gradually reduced. The vapor deposition particles that contribute to the deposition at the bottom of the second opening 14B are gradually limited to those that pass near the center of the first opening 14A. As a result, a conical deposit is formed at the bottom of the second opening 14 </ b> B, and this conical deposit becomes the electron emission portion 15.

[Step-B5]
Thereafter, as shown in FIG. 10B, the peeling layer 18 is peeled off from the surfaces of the gate electrode 13 and the insulating layer 12 by a lift-off method, and the conductive member layer 19 above the gate electrode 13 and the insulating layer 12 is selected. To remove. Thus, a cathode panel in which a plurality of Spindt type field emission devices are formed can be obtained. After that, it is preferable to perform isotropic etching to retract the side wall surface of the insulating layer 12 in the opening 14 so that the end of the gate electrode 13 protrudes in the first opening of the gate electrode 13. .

  As mentioned above, although this invention was demonstrated based on the preferable Example, this invention is not limited to these Examples. The configurations and structures of the flat display device, the cathode panel and the anode panel, the cold cathode field emission display device and the cold cathode field emission device described in the embodiments are examples, and can be changed as appropriate. The display device has been described by taking color display as an example, but it may also be a single color display.

  For example, reinforcing ribs may be provided on the outer edges of the display panel mounting portions 43 and 73, more specifically, for example, on the display panel mounting portions 43 and 73, whereby the display panel mounting portions 43 and 73 are provided. The rigidity of can be increased. The reinforcing rib 45 can be provided, for example, by bending the outer edges of the display panel mounting portions 43 and 73 upward (see FIGS. 4A and 4B), or alternatively, the display panel. It can be provided by welding a rib to the upper surface (anode panel side) of the attachment portions 43 and 73. Moreover, you may provide the rib 46 for reinforcement in the joining member 40 (refer FIG.4 (C)). However, in this case, it is necessary to provide the reinforcing rib at a position that does not get in the way when the cathode panel CP and the anode panel AP are joined.

  In the field emission device, a mode in which one electron emission portion corresponds to one opening has been described. However, depending on the structure of the field emission device, a mode in which a plurality of electron emission portions correspond to one opening. Alternatively, one electron emission portion may correspond to a plurality of openings. Alternatively, a plurality of first openings may be provided in the gate electrode, a second opening connected to the plurality of first openings related to the insulating layer may be provided, and one or a plurality of electron emission portions may be provided. .

The electron emission region can also be constituted by an electron emission element commonly called a surface conduction electron emission element. This surface conduction electron-emitting device is formed on a support made of glass, for example, tin oxide (SnO ₂ ), gold (Au), indium oxide (In ₂ O ₃ ) / tin oxide (SnO ₂ ), carbon, palladium oxide ( A pair of electrodes made of a conductive material such as (PdO), having a very small area and arranged with a predetermined gap (gap) are formed in a matrix. A carbon thin film is formed on each electrode. The row direction wiring is connected to one electrode (for example, the first electrode) of the pair of electrodes, and the column direction wiring is connected to the other electrode (for example, the second electrode) of the pair of electrodes. It has a configuration. By applying a voltage to the pair of electrodes (first electrode and second electrode), an electric field is applied to the carbon thin films facing each other across the gap, and electrons are emitted from the carbon thin film. By causing the electrons to collide with the phosphor region on the anode panel, the phosphor region is excited to emit light, and a desired image can be obtained. Alternatively, the electron emission region can be formed from a metal / insulating film / metal type element.

FIGS. 1A and 1B are a schematic plan view of a display panel and a schematic plan view of a joining member and a display panel mounting portion in the flat display device of Example 1, respectively. . 2 (A) and 2 (B) are each a cutaway view of the flat display device of Example 1 along arrows AA and BB in FIG. 1 (A). It is an end view. 3A and 3B are respectively a schematic plan view of a part of the flat display device according to the second embodiment, and an implementation similar to that taken along the arrow AA in FIG. 6 is an end view in which a part of the flat display device of Example 2 is cut away. FIG. 4A, 4 </ b> B, and 4 </ b> C are respectively a schematic plan view of a modified example of the joining member and the display panel mounting portion in the flat display device of Example 1, and an arrow B−. It is typical sectional drawing which followed B and CC. FIG. 5 is a schematic partial end view of a cold cathode field emission display device having a Spindt type cold cathode field emission device as a flat display device. 6 is a schematic exploded perspective view of a part of the cathode panel and the anode panel when the cathode panel and the anode panel constituting the cold cathode field emission display shown in FIG. 5 are disassembled. 7A to 7C are schematic partial end views of a substrate and the like for explaining a method of manufacturing an anode panel constituting the flat display device of the example. 8A to 8B are schematic partial end faces of a substrate and the like for explaining a method for manufacturing an anode panel constituting the flat display device of the embodiment, following FIG. 7C. FIG. FIGS. 9A and 9B are schematic partial end views of a support and the like for explaining a method of manufacturing a Spindt-type cold cathode field emission device. FIGS. 10A and 10B are schematic partial end views of a support and the like for explaining the manufacturing method of the Spindt-type cold cathode field emission device following FIG. 9B. .

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Support body, 10A ... 1st surface of a support body, 10B ... 2nd surface of a support body, 10C, 10D, 10E, 10F ... End surface of a support body, 11 ... Cathode electrode , 12 ... insulating layer, 13 ... gate electrode, 14, 14A, 14B ... opening, 15 ... electron emission part, 16 ... interlayer insulating layer, 17 ... converging electrode, 18 ... Peeling layer, 19 ... Conductive member layer, 20 ... Substrate, 21 ... Partition wall, 22,22R, 22G, 22B ... Phosphor region, 23 ... Light absorption layer (black matrix) ) 24... Anode electrode 25. Spacer holding portion 26. Spacer 26 A. Spacer body 26 B Antistatic film 26 C End electrode layer 31.・ Cathode electrode control circuit, 32... Gate electrode control circuit, 33. Control electrode, 40... Joining member, 41... First sealing member, 42... Second sealing member, 43 and 73. -Mounting holes, 45, 46 ... Ribs, 50 ... Mounting frames, 51 ... Holes, 52 ... Bolts, 53 ... Nuts, 54 ... Spacer members, 60 ... Extraction wiring, 61 ... Integrated circuit chip (driver for driving), 80 ... Resin layer, DP ... Display panel, CP ... Cathode panel, AP ... Anode panel, EA ... Electronics Emission area, EF ... Effective area, NF ... Invalid area

Claims (6)

A cathode panel provided with electron emission regions arranged in a two-dimensional matrix on a support and an anode panel provided with a phosphor region and an anode electrode on a substrate are joined via a joining member at the outer periphery. Te made, the cathode panel and the display panel space between the anode panel and by said joining member held in vacuum, a flat display device attached to the mounting frame,
Has a bent portion at the tip as well as extending from each corner of the joining member, Bei give a display panel mounting portion protruding from the display panel,
The joining member is located in a first plane, and the bent portion of the display panel mounting portion is located in a second plane different from the first plane,
And the support and the joint member constituting the cathode panel is joined with the first seal member,
And the joining member and the substrate constituting the anode panel is joined with the second seal member,
The flat display device , wherein the bent portion of the display panel mounting portion is attached to the mounting frame . Wherein the display panel mounting portion, the flat display device according to 請 Motomeko 1 rib for reinforcement that is provided. It said first seal member, the heat-resistant resin, frit glass, or consist of the low melting point metal material,
Said second sealing member is heat-resistant resin, frit glass, or flat-panel display according to 請 Motomeko 1 or 2 Ru formed of a low melting point metal material. ₀ linear expansion coefficient alpha of 20 ° C of the material constituting the joining member, wherein a linear expansion coefficient at 20 ° C of the support constituting the cathode panel alpha _C, of the substrate constituting the anode panel 20 When the linear expansion coefficient at ° C is α _A ,
| Α ₀ −α _C | ≦ 2 × 10 ⁻⁶ / ° C
| Α ₀ −α _A | ≦ 2 × 10 ⁻⁶ / ° C
A display device according to any one of 請 Motomeko 1 to 3 you satisfied. The joining member, flat-panel display according to any one of 請 Motomeko 1 to 4 that have been made from a metal or alloy. Said support has a first surface facing the anode panel, the second surface facing the first surface, and comprises four end faces,
The electron emission regions provided on the cathode panel, the output interconnection extending into the second surface via the end surface from the outer periphery of the first surface of the support is connected to an external circuit,
The said portion of the output interconnection located on the end face, flat-panel display according to any one of 請 Motomeko 1 to 5 integrated circuit chips that are disposed for driving the electron-emitting region.

Images