JP4811116B2 - Semiconductor laser device - Google Patents

Description

  The present invention relates to a semiconductor laser device used as a light source for optical information processing or high-speed optical communication, and more particularly to a technique for uniformizing light output characteristics of a plurality of semiconductor laser devices.

  In the technical fields such as optical communication and optical recording, interest in a surface-emitting semiconductor laser (Vertical-Cavity Surface-Emitting Laser diode: hereinafter referred to as VCSEL) is increasing. VCSELs are not available in edge-emitting semiconductor lasers that have low threshold currents, low power consumption, can easily obtain a circular light spot, and can be evaluated in a wafer state or a two-dimensional array of light sources. Has excellent features. Taking advantage of these features, demand as a light source in the communication field is particularly expected.

  When a VCSEL is used as a light source in the communication field or the like, it is necessary to output light above a certain level in order to suppress communication errors and the like. On the other hand, it is necessary to suppress the light output below a certain level from the viewpoint of eye safety. There are two types of VCSEL driving methods, constant current driving (ACC) and constant power driving (APC). The ACC drive stabilizes the oscillation of the laser beam because the drive current is constant, but has the disadvantage that the light output fluctuates due to a temperature change. APC driving is usually used for temperature compensation of a VCSEL because the optical output is constant. That is, in the APC drive, when the VCSEL temperature rises, the light output decreases, so the drive current is increased to increase the light output, and when the temperature decreases, the light output increases, so the drive current is decreased to reduce the light output. Drive control that lowers the output is performed.

  Such a technique related to APC driving is disclosed in Patent Document 1, for example. According to this document, a semiconductor laser device has a light receiving element that receives reflected light reflected by a window glass out of light emitted from a semiconductor laser element, and controls drive current based on the output of the light receiving element. Yes.

JP2004-72072A

  As with other semiconductor laser devices, the VCSEL has variations in individual light output characteristics in the manufacturing process. If the variation is remarkably large, it is determined as a defective product. That is, if the light output is higher than a certain level, there is a problem from the viewpoint of eye-safety, and if the light output is too lower than the certain level, the frequency response is lowered. As shown in Patent Document 1, even if a VCSEL having variations is driven by APC, it cannot be corrected if it exceeds the allowable range of the drive circuit. If a VCSEL with a wide variation can be used as a non-defective product, the manufacturing yield can be dramatically improved and the manufacturing cost can be greatly reduced.

  The present invention solves such a problem, and an object of the present invention is to provide a semiconductor laser device capable of adjusting variations in light output characteristics of semiconductor laser elements, improving yield, and reducing costs. And

  The semiconductor laser device according to the present invention includes a semiconductor laser element, a mounting means for mounting the semiconductor laser element, and a sealing means for sealing the semiconductor laser element, and the sealing means includes the semiconductor laser element. And a variable density filter including a plurality of regions having different light transmittances so as to cover the light emitting region.

  Preferably, the variable density filter includes a rotation type density filter capable of changing a light transmittance with respect to a laser beam passing through the light emitting region by rotating around a rotation axis, and having a selected light transmittance region. Align to the light exit area. The variable density filter includes a slide-type density filter that can be linearly slid to vary the light transmittance of the laser light passing through the light emitting region, and the selected light transmittance region is positioned in the light emitting region. Match. The variable density filter includes regions having different transmittances in stages, and includes a region having a concentration gradient continuously.

  More preferably, the semiconductor laser device controls the driving of the semiconductor laser element based on the light receiving element that receives the laser light reflected from the density filter among the laser light emitted from the semiconductor laser element, and the output from the light receiving element. And a lens that enters the laser beam that has passed through the variable density filter. The semiconductor laser element is a surface emitting semiconductor laser element.

  According to the present invention, since the variable density filter is provided so as to cover the light emission region of the semiconductor laser device, the variation in the light output characteristics is adjusted. The yield of the apparatus can be improved and the manufacturing cost can be reduced.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is a top view and a side sectional view showing a schematic configuration of a semiconductor laser device 10 according to an embodiment of the present invention. The semiconductor laser device 10 according to the present embodiment includes a metal disc-like stem 100, a VCSEL 110 and a light receiving element 120 mounted on the stem 100, a cap 130 covering the stem 100, and a plurality of pieces attached to the stem 100. It includes lead terminals 140, 142, 144 made of conductive metal, and a rotary density filter 150 having a plurality of density filters having different light transmittances.

  A VCSEL 110 is fixed to the center of the stem 100 via a submount 102. As shown in FIG. 2, the VCSEL 110 includes an n-side electrode 220 on the back surface of an n-type GaAs substrate 210, and a lower portion made of an n-type GaAs buffer layer 224 and an n-type AlGaAs semiconductor multilayer film on the substrate 210. DBR (Distributed Bragg Reflector) 226, active region 228, current confinement layer 230 formed by oxidizing the outer edge of p-type AlAs, upper DBR 232 formed by a p-type AlGaAs semiconductor multilayer film, p A semiconductor layer including a type GaAs contact layer 234 is stacked. A ring-shaped groove 236 having a depth reaching the lower DBR 226 from the contact layer 234 is formed in the substrate 210, and the cylindrical post P and a pad forming region 238 that are laser light emitting portions are formed by the groove 236. Is prescribed. A p-side electrode 242 that is ohmic-connected to the contact layer 234 is provided on the top of the post P, and a circular emission port 244 that defines a laser beam emission region is formed at the center of the p-side electrode 242. Yes. A circular electrode pad 246 is formed in the pad formation region 238 via the interlayer insulating film 240, and the electrode pad 246 is electrically connected to the p-side electrode 242. The VCSEL 110 thus formed emits a laser having a wavelength of about 850 nm from the emission port 244 of the post P.

  Returning to FIG. 1, a plurality of through holes (not shown) are formed in the stem 100, and lead terminals 140, 142, 144 are inserted into the respective through holes. The leads 140, 142, 144 are electrically insulated from the stem 100 in the through hole by glass resin or the like. The n-side electrode 220 of the VCSEL 110 is fixed on the submount 102 via a conductive adhesive or the like, and the submount 102 is electrically connected to the lead 142. The electrode pad 246 connected to the p-side electrode 242 is electrically connected to the lead terminal 140 by the bonding wire 112. By applying a drive voltage between the lead terminals 140 and 142, the VCSEL 110 is driven, laser light is emitted from the exit port 244 of the post P, and the emitted laser light passes through the rotary density filter 150 from the center of the cap 130. Output to the outside.

  The light receiving element 120 is attached at a position separated from the VCSEL 110 by a certain distance. The light receiving element 120 receives part of the laser light reflected by the rotary density filter 150 from the laser light emitted from the VCSEL 110. The light receiving element 120 is composed of, for example, a photodiode or a phototransistor. The cathode electrode of the light receiving element 120 is electrically connected to the lead terminal 142, and the anode electrode is electrically connected to the lead terminal 144. The output signal of the light receiving element 120 is output between the lead terminals 142 and 144 and used for APC driving.

  The cap 130 is a circular metal member, and a leg portion 134 at the periphery thereof is fixed to the stem 100 by welding or the like. The VCSEL 110 and the light receiving element 120 are sealed in the internal space of the cap 130. Note that the sealing does not need to be completely airtight.

  A circular window 132 is formed at the upper center of the cap 130, and a circular rotary density filter 150 having a rotation shaft 152 at a position offset from the center of the window 132 is provided. The rotary type density filter 150 includes four density filters 150a, 150b, 150c, and 150d having different light transmittances. For example, the density density filter 150 has four stages of 15%, 20%, 25%, and 30% with respect to a laser beam having a wavelength of 850 nm. With a light transmittance of. Each density filter 150 a, 150 b, 150 c, and 150 d includes a region whose interior angle is uniformly 90 degrees, and the region is large enough to cover the window 132. Thereby, the density filter having the selected light transmittance can cover the window 132. Laser light emitted from the surface of the VCSEL 110 passes through the window 132, passes through the rotary density filter 150, and is emitted to the outside. Here, an example in which the rotary density filter 150 includes a plurality of density filters having different light transmittances is shown. Of course, the rotary density filter 150 is a variable density filter whose light transmittance changes continuously. Also good.

  Next, in the first embodiment, a method for adjusting the light transmittance by the rotary density filter 150 will be described with reference to the flowchart of FIG. 3 and the application example of FIG. First, in the manufacturing process of the VCSEL 110, probe pins are brought into contact with terminals of many VCSELs 110 manufactured on the wafer, and the light output characteristics of each VCSEL 110 are measured (step S101). Each VCSEL 110 on the wafer is sorted into four stages according to the measured light output characteristics (step S102). The selected result is stored in a memory in correspondence with the position of the VCSEL 110 on the wafer, or can be identified by marking on the chip. Next, the VCSEL 110 on the wafer is cut into individual chips, and each VCSEL 110 is packaged with a cap 130 including a rotary density filter 150 (step S103). Next, according to the selected four stages, adjustment is performed by the rotary density filter 150 of each semiconductor laser device 10 (step S104). Next, the surface emitting laser device is APC driven (step S105).

  For example, as shown in FIG. 4, the optical output characteristics of the VCSEL 110 are selected in four stages of 0.9 (mW), 1.08 (mW), 1.35 (mW), and 1.8 (mW). Is adjusted so that the light output characteristic becomes 270 (μW). In the case of the VCSEL 110 selected as the light output characteristic of 0.9 (mW), a density filter having a light transmittance of 30% is selected as the rotary density filter 150, and this is matched with the window 132. If the light output characteristic is 1.08 (mW), a density filter with a light transmittance of 25% is selected. If the light output characteristic is 1.35 (mW), a density filter with a light transmittance of 20% is selected. If the light output characteristic is 1.8 (mW), a density filter having a light transmittance of 15% is selected, and this is matched with the window 132. Thus, the optical output emitted from the VCSEL 110 is adjusted to 270 (μW). Thus, even if the light is emitted from the VCSEL 110 having variations in the light output characteristics, the light output characteristics can be adjusted by passing through the variable density filter.

  Further, in the first embodiment, as shown in FIG. 5, a polarization direction indicating marker bezel 170 for indicating the light polarization direction of the VCSEL 110 is attached to the outside of the rotary density filter 150, and these rotate independently. A mechanism may be provided. The rotational density filter 150 can adjust the variation in light output, and the polarization indicator 172 can indicate the polarization direction of the VCSEL 110.

  Next, a semiconductor laser device according to a second embodiment of the present invention will be described. In the second embodiment, a slide type density filter 160 is used instead of the rotary type density filter 150. FIG. 6 is a top view and a side sectional view showing a schematic configuration of the semiconductor laser device 12 according to the second embodiment. Portions common to the first embodiment are given the same numbers. A rectangular slide type density filter 160 is provided on the top of the cap 130 so as to cover the window 132. The sliding density filter 160 is supported by a pair of parallel linear guides 162 and 164 at a position close to the window 132. The slide type density filter 160 is composed of four density filters 160a, 160b, 160c, and 160d having different light transmittances as in the rotary density filter 150 of the first embodiment, and can be arbitrarily set by changing the slide position. Can be selected. The laser light emitted from the surface of the VCSEL 110 passes through the window 132 and passes through the slide density filter, thereby adjusting the light output characteristics for each lot and keeping the light output characteristics within the allowable range of the APC drive circuit. it can.

  Next, a semiconductor laser device 14 according to a third embodiment of the present invention is described. In the third embodiment, as shown in FIG. 7, a ball lens 180 is fixed to the opening at the upper center of the cap 130. In this case, a structure in which the rotary density filter 150 is installed between the VCSEL 110 and the ball lens 180 may be used. A part of the outer edge of the rotary density filter 150 protrudes outward from the opening on the side surface of the cap 130, and an arbitrary light transmittance is selected by rotating the protruding portion. At this time, the optical axis of the ball lens 180 is positioned so as to substantially coincide with the center of the VCSEL 110. The laser light emitted from the VCSEL 110 passes through the rotary density filter 150, enters the ball lens 180, and is emitted to the outside.

  FIG. 8 is a cross-sectional view showing a configuration when the semiconductor laser device shown in FIG. 7 is applied to an optical transmitter. The optical transmission device 400 includes a cylindrical casing 410 fixed to the stem 100, a sleeve 420 integrally formed on an end surface of the casing 410, a ferrule 430 held in an opening 422 of the sleeve 420, and a ferrule 430. The optical fiber 440 to be held is included. An end of the housing 410 is fixed to a flange 332 formed in the circumferential direction of the stem 330. The ferrule 430 is accurately positioned in the opening 422 of the sleeve 420 and the optical axis of the optical fiber 440 is aligned with the optical axis of the ball lens 460. The core wire of the optical fiber 440 is held in the through hole 432 of the ferrule 430.

  Laser light emitted from the surface of the VCSEL 110 is collected by the ball lens 180, and the collected light is incident on the core of the optical fiber 440 and transmitted. Although the ball lens 460 is used in the above example, other lenses such as a biconvex lens and a plano-convex lens can be used. Further, the optical transmission device 400 may include a drive circuit for applying an electrical signal to the leads 140, 142, 144. Furthermore, the optical transmission device 400 may include a reception function for receiving an optical signal via the optical fiber 440.

  FIG. 9 is a diagram showing a configuration when used in a spatial transmission system. The spatial transmission system 500 includes the semiconductor laser device 10 shown in FIG. 1, a condenser lens 510, a diffusion plate 520, and a reflection mirror 530. The light condensed by the condenser lens 510 is reflected by the diffusion plate 520 through the opening 532 of the reflection mirror 530, and the reflected light is reflected toward the reflection mirror 530. The reflection mirror 530 reflects the reflected light in a predetermined direction and performs optical transmission.

  FIG. 10 is a diagram illustrating a configuration example of an optical transmission system using a VCSEL as a light source. The optical transmission system 600 receives a light source 610 including a chip 310 on which a VCSEL is formed, an optical system 620 that collects laser light emitted from the light source 610, and the laser light output from the optical system 620. A light receiving unit 630 and a control unit 640 that controls driving of the light source 610 are included. The control unit 640 supplies a drive pulse signal for driving the VCSEL to the light source 610. Light emitted from the light source 610 is transmitted to the light receiving unit 630 via an optical system 620 by an optical fiber, a reflection mirror for spatial transmission, or the like. The light receiving unit 630 detects the received light with a photodetector or the like. The light receiving unit 630 can control the operation of the control unit 640 (for example, the start timing of optical transmission) by the control signal 650.

  Next, the configuration of an optical transmission device used in the optical transmission system will be described. FIG. 11 is a diagram illustrating an external configuration of the optical transmission apparatus, and FIG. 12 is a diagram schematically illustrating an internal configuration thereof. The optical transmission device 700 includes a case 710, an optical signal transmission / reception connector joint 720, a light emitting / receiving element 730, an electric signal cable joint 740, a power input unit 750, an LED 760 indicating that an operation is in progress, an LED 770 indicating occurrence of an abnormality, and a DVI. A connector 780 and a transmission circuit board / reception circuit board 790 are provided.

  A video transmission system using the optical transmission apparatus 700 is shown in FIG. In these drawings, the video transmission system 800 uses the optical transmission device shown in FIG. 10 to transmit the video signal generated by the video signal generation device 810 to the image display device 820 such as a liquid crystal display. That is, the video transmission system 800 includes a video signal generation device 810, an image display device 820, a DVI electric cable 830, a transmission module 840, a reception module 850, a video signal transmission optical signal connector 860, an optical fiber 870, and a control signal electrical. A cable connector 880, a power adapter 890, and an electric cable 900 for DVI are included.

  In the video transmission system described above, electrical signals are transmitted between the video signal generation device 810 and the transmission module 840, and between the reception module 850 and the image display device 820 using the electrical cables 830 and 900. Transmission between these signals is an optical signal. It is also possible to do this. For example, a signal transmission cable including an electrical / optical conversion circuit and an optical / electrical conversion circuit in a connector may be used instead of the electrical cables 830 and 900.

  The above-described embodiments are illustrative, and the scope of the present invention should not be construed as being limited thereto, and can be realized by other methods within the scope satisfying the constituent requirements of the present invention. Needless to say.

  The semiconductor laser device according to the present invention can be used in the fields of optical information processing and optical high-speed data communication.

1A and 1B are a schematic top view and a cross-sectional view of a semiconductor laser device according to a first embodiment of the invention. It is sectional drawing which shows the structure of VCSEL of FIG. It is a flowchart which shows the light transmittance adjustment of the semiconductor laser apparatus based on the Example of this invention. It is an application example of a semiconductor laser device according to an embodiment of the present invention. FIG. 2 is a schematic top view of a surface emitting semiconductor laser device in which a polarization direction indicating marker bezel is provided on the outer edge of the rotary density filter of FIG. 1. It is the schematic top view and sectional drawing of the semiconductor laser apparatus concerning the 2nd Example of this invention. It is the schematic top view and sectional drawing of a semiconductor laser apparatus concerning the 3rd example of the present invention. It is sectional drawing which shows the structure of the optical transmission device using the semiconductor laser apparatus shown in FIG. It is a figure which shows the structure of a spatial transmission system. It is a block diagram which shows the structure of an optical transmission system. It is a figure which shows the external appearance structure of an optical transmission apparatus. The internal structure of the optical transmission device is shown, FIG. 5A shows the internal structure when the top surface is cut off, and FIG. 4B shows the internal structure when the side surface is cut off. It is a figure which shows the video transmission system using the optical transmission apparatus of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10: Semiconductor laser apparatus 100: Stem 110: VCSEL 112: Bonding wire 120: Light receiving element 130: Cap 132: Window 140, 142, 144: Lead terminal 150: Rotary type density filter 150a-150d: Density filter 152: Rotating shaft 160 : Slide type density filters 160a to 160d: Density filters 162, 164: Linear guide 170: Polarization direction indication marker bezel 172: Polarization indication marker 180: Ball lens

Claims (13)

A surface emitting semiconductor laser element marked so that the measurement result of the light output characteristic can be identified ;
Mounting means for mounting the surface emitting semiconductor laser element;
Sealing means for sealing the surface emitting semiconductor laser element,
The sealing means has a light emission region that allows a laser beam emitted from the surface-emitting type semiconductor laser element to pass therethrough, and a variable density filter including a plurality of regions having different light transmittances covers the light emission region. Provided,
The variable density filter has a rotation axis at a position offset from the light emitting region, and the variable density filter is rotated around the rotation axis, thereby depending on the measurement result identified from the marking. A region of light transmittance selected from a plurality of regions having different light transmittances can be aligned with the light emitting region.
Semiconductor laser device. The sealing means includes a cap formed with a leg fixed to the mounting means on the periphery, the light emitting area is formed on an upper surface of the cap, and the rotation is performed at a position offset from the light emitting area. The semiconductor laser device according to claim 1, wherein an axis is formed, and the variable density filter is attached to an upper surface of the cap. A surface emitting semiconductor laser element marked so that the measurement result of the light output characteristic can be identified;
  Mounting means for mounting the surface emitting semiconductor laser element;
  Sealing means for sealing the surface emitting semiconductor laser element,
  The sealing means has a light emission region that allows a laser beam emitted from the surface-emitting type semiconductor laser element to pass therethrough, and a variable density filter including a plurality of regions having different light transmittances covers the light emission region. Provided,
  The variable density filter includes a slide type density filter capable of varying a light transmittance with respect to a laser beam that linearly slides and passes through the light emitting region,
By sliding the variable density filter, a light transmittance region selected from a plurality of regions having different light transmittances according to the measurement result identified from the marking can be aligned with the light emitting region. A semiconductor laser device. 4. The marking according to claim 1, wherein the marking identifies a result measured during a manufacturing process, and the marking makes it possible to identify a sorting result from a plurality of stages according to the measured result. The semiconductor laser device described in 1. The variable density filter comprises a stepwise transmittance different regions, the semiconductor laser device according to any one claims 1 to 4. Wherein the variable density filter is continuously comprises a region of gradient, the semiconductor laser device according to any one claims 1 to 4. The semiconductor laser device further includes a light receiving element that receives laser light reflected from the density filter among laser light emitted from the semiconductor laser element, and a drive control circuit that controls driving of the semiconductor laser element based on an output from the light receiving element including bets, semiconductor laser device according to any one claims 1 to 6. The semiconductor laser device further comprises a lens for the incident laser light transmitted through the variable density filter, the semiconductor laser device according to any one claims 1 to 7. 2. The semiconductor laser device according to claim 1, further comprising a polarization direction indicating marker bezel that is rotatable independently of the variable density filter and that indicates a light polarization direction, outside the variable density filter. A semiconductor laser device according to 9 any one claims 1, and a transmitting means for transmitting through an optical medium with a laser beam emitted from the semiconductor laser device, an optical transmission device. A semiconductor laser device according to 9 any one claims 1, and a transmitting means for wireless transmission of the laser light emitted from the semiconductor laser device, an optical space transmission device. A semiconductor laser device according to 9 any one claims 1, and a transmitting means for transmitting the laser light emitted from the semiconductor laser device, an optical transmission system. A semiconductor laser device according to 9 any one claims 1, and a transmission means for the laser beam emitted from the semiconductor laser device for spatial transmission, optical space transmission system.

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