JP4669137B2 - Dividable electrode and plasma processing apparatus using the electrode - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor manufacturing apparatus, and more particularly to an apparatus for processing an object to be processed using plasma such as a plasma etching apparatus or a plasma CVD apparatus.
[0002]
[Prior art]
Conventionally, in a semiconductor manufacturing process, for example, when etching is performed, a process gas (hereinafter referred to as a gas) is introduced into a processing chamber by a gas introduction mechanism, plasma is generated, and the plasma is used to process the object. A plasma processing apparatus for processing a certain wafer is used.
[0003]
In a plasma processing apparatus, for example, a parallel plate type plasma etching apparatus having two high-frequency power supplies, a gas introduction mechanism is configured such that a gas supplied from a gas supply source is once introduced into a hollow portion and then opposed to a wafer. A mechanism for introducing from one or more electrodes having one or more gas ejection holes is used, wherein the gas ejection holes are provided perpendicular to the electrode surface.
[0004]
[Problems to be solved by the invention]
However, in the electrode of the gas introduction mechanism in the conventional plasma processing apparatus, the plasma generated between the upper electrode and the lower electrode enters further into the electrode through the gas ejection hole, and the electrode support member, for example, a cooling plate made of aluminum is sputtered. That was the cause of metal contamination.
[0005]
In order to prevent the plasma from entering the inside of the electrode through the gas ejection hole, for example, in Japanese Patent Laid-Open No. 9-275093, the gas ejection hole can be seen from one opening end of the gas ejection hole to the other opening end. Although there is no structure, there is a problem that the cost is high due to the processing of the gas ejection holes and the life of the electrodes.
[0006]
[Means for Solving the Problems]
Therefore, the electrode of the present invention comprises an upper plate having one or more gas passage holes and a lower plate having one or more gas ejection holes, and the upper plate and the lower plate can be divided vertically. By doing so, the gas passage hole of the upper plate and the gas ejection hole of the lower plate can be processed separately, and the processing can be performed with high accuracy and at low cost. Furthermore, it becomes possible to replace only the portion that is easily eroded by the plasma, for example, only the lower plate, and the life of the electrode becomes longer than that of the conventional one.
[0007]
In addition, one or both of the gas passage hole of the upper plate and the gas ejection hole of the lower plate are provided partly or entirely obliquely with respect to the electrode surface, or part thereof is provided parallel to the electrode surface. Thus, the plasma generated between the upper electrode and the lower electrode can be prevented from entering the inside of the electrode through the gas ejection hole and the gas passage hole. For this reason, metal contamination which occurs when plasma sputters an electrode support member, for example, a cooling plate made of aluminum, can be prevented.
[0008]
In addition, by sliding one of the upper plate and the lower plate from the first fixed position fixed to the other and fixing at the second fixed position, the vicinity of the joint surface between the upper plate and the lower plate It becomes possible to use while changing the portion that is easily eroded by the plasma, and the life of the electrode becomes longer than that of the conventional one.
[0009]
In addition, one or both of the upper plate and the lower plate are reversed 180 degrees, and both surfaces thereof can be used. After one surface is used toward the plasma generation region side, it is reversed 180 degrees, The other surface can be used toward the plasma generation region side, and the life of the electrode becomes longer than that of the conventional one.
[0010]
In addition, by making a part of one or both of the upper plate and the lower plate separable, the eroded portion can be replaced efficiently, and the life of the electrode is longer than that of the conventional one.
[0011]
Further, the electrode has an upper plate having one or more gas passage holes, a lower plate having a surface that has one or more gas ejection holes and is cut to be parallel to the electrode surface, A spacer having one or more gas passage holes and having a thickness corresponding to the thickness of the lower plate having the scraped surface, wherein the spacer includes the upper plate and the scraped surface. The lower plate can be used between the lower plates or between the electrode support member and the upper plate, so that the lower plate can be reused without changing the thickness of the entire electrode portion, and the life of the electrode can be reduced. Longer than the conventional one.
[0012]
In addition, the electrode has one or more gas ejection holes and an electrode having a surface cut so as to be a plane parallel to the electrode surface; and one or more gas passage holes; A spacer having a thickness corresponding to the thickness of the electrode having the scraped surface, and the spacer is usable by being sandwiched between the electrode support member and the electrode having the scraped surface, The electrode can be reused without changing the thickness of the entire electrode portion, and the life of the electrode becomes longer than that of the conventional one.
[0013]
In addition, the thickness of the electrode that has been scraped off so that the surface of the electrode becomes a plane parallel to the electrode surface, and one or more gas passage holes, and the thickness of the electrode that has been processed by the scraping step. By replacing the electrode of the plasma processing apparatus by a method including a step of attaching a spacer having a thickness as a part of the electrode, the electrode can be reused without changing the thickness of the entire electrode part. The service life is longer than the conventional one.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment in which the present invention is applied to a parallel plate plasma etching apparatus having two high-frequency power sources will be described.
[0015]
In the parallel plate type plasma etching apparatus 1 having two high-frequency power sources shown in FIG. 1, a processing chamber 3 is formed in a processing container 2 kept airtight, and the processing container 2 is connected by a ground wire 4. Grounded. An insulating support plate 5 is provided at the bottom of the processing container 2. Then, the wafer W is loaded from the gate valve 6, and the wafer W is placed on the insulating support plate 5, and the susceptor 7 serving as the lower electrode is disposed.
[0016]
The susceptor 7 is supported by a lifting shaft 8 penetrating the insulating support plate 5 and the bottom of the processing container 2 so as to be movable up and down. The elevating shaft 8 has a structure that can be moved up and down by a drive motor 9 installed outside the processing container 2. Further, between the susceptor 7 and the insulating support plate 5, a bellows 10 that is a stretchable airtight member is provided so as to surround the outer periphery of the lifting shaft 8, and is configured to keep the processing chamber 3 airtight. ing.
[0017]
The susceptor 7 is provided with a temperature adjusting mechanism (not shown) and a temperature sensor (not shown). Accordingly, during processing, the wafer W can be maintained at a predetermined temperature via the susceptor 7. Furthermore, an electrostatic chuck 11 for attracting and holding the wafer W is provided on the susceptor 7. When a predetermined high voltage is applied to the electrostatic chuck 11 from the high-voltage DC power source 12 installed outside the processing container 2, the wafer W is attracted to and held on the upper surface of the electrostatic chuck 11 by Coulomb force. It has become.
[0018]
A focus ring 13 for effectively allowing etchant ions in the plasma to enter the wafer W is disposed on the outer periphery of the electrostatic chuck 11 and surrounding the periphery of the susceptor 7.
[0019]
A substantially disk-shaped upper electrode support member 15 made of, for example, aluminum is provided on the upper portion of the processing chamber 3 via an insulating support member 14. A hollow portion 16 is formed inside the upper electrode support member 15, and a gas introduction pipe 17 is connected to the hollow portion 16. Further, a gas supply source 20 is connected to the gas introduction pipe 17 via a valve 18 and a mass flow controller 19.
[0020]
One or more gas supply holes 21 are formed in the upper electrode support member 15 at a position corresponding to the lower portion of the hollow portion 16. Further, the upper electrode 22 is attached in close contact with the lower surface of the upper electrode support member 15, and the upper electrode 22 is disposed to face the susceptor 7.
[0021]
Further, the upper electrode 22 has a substantially disk shape made of a conductive material, for example, silicon, and has an upper plate 22a and a lower plate 22b, and can be divided vertically. The upper plate 22a is provided with one or more gas passage holes 23, and the lower plate 22b is provided with one or more gas ejection holes 23b. Therefore, the gas passage hole 23a of the upper plate 22a and the gas ejection hole 23b of the lower plate 22b can be processed separately, and the processing can be performed with high accuracy and at low cost. Furthermore, it becomes possible to replace only the portion that is easily eroded by the plasma, for example, only the lower plate 22b, and the life of the electrode becomes longer than that of the conventional one.
[0022]
Further, a gas passage hole 23a of the upper plate 22a is formed at a position corresponding to the gas supply hole 21 of the upper electrode support member 15, and a position of the lower plate 22b is formed at a position corresponding to the gas passage hole 23a of the upper plate 22a. A gas ejection hole 23b is formed. Accordingly, the gas supplied from the gas supply source 20 is once introduced into the hollow portion 16 and then uniformly supplied onto the wafer W through the gas supply hole 21, the gas passage hole 23a, and the gas ejection hole 23b. .
[0023]
A shield ring 24 is attached to the periphery of the upper electrode 22. The shield ring 24 is provided to prevent plasma diffusion and to form plasma having a desired plasma density in the plasma generation region.
[0024]
An exhaust pipe 25 for exhausting the gas in the processing chamber 3 is connected to the lower wall of the processing container 2, and a vacuuming mechanism (vacuum pump) 26 is connected to the exhaust pipe 25. . Therefore, during processing, the processing chamber 3 can be evacuated to a predetermined reduced pressure atmosphere by operating the vacuuming mechanism (vacuum pump) 26. A slit-like exhaust plate 27 is provided at a portion where the exhaust pipe 25 and the processing chamber 3 communicate with each other.
[0025]
The upper electrode 22 is connected to a first high frequency power supply 29a via an upper matching member 28a composed of an upper electrode support member 15 and a matching circuit. On the other hand, a second high frequency power supply 29b is connected to the susceptor 7 via a lower matching unit 28b made of a matching circuit. Accordingly, at the time of processing, the wafer W is first placed on the susceptor 7 and the inside of the processing chamber 3 is maintained in a predetermined reduced pressure atmosphere by introducing gas and evacuating. Thereafter, when a predetermined high frequency power is applied to the upper electrode 22 from the first high frequency power supply 29a, plasma is excited in the processing chamber 3, and further, a predetermined high frequency power is applied to the susceptor 7 from the second high frequency power supply 29b. The excited plasma is effectively drawn into the surface to be processed of the wafer W. As a result, the wafer W can be subjected to a desired etching process.
[0026]
Further, an optical surface sensor (not shown) is provided outside the processing container 2, and this optical surface sensor is composed of a light emitting side optical system and a light receiving side optical system (not shown) and a CPU. Therefore, the upper electrode 22 is irradiated with light from the light emitting side optical system, the reflected light is sensed by the light receiving side optical system, the surface state of the upper electrode 22 is detected, and the upper electrode 22 before being eroded by plasma by the CPU. By comparing with the surface state, it is possible to determine whether the upper electrode 22 has a lifetime.
[0027]
Here, the means for detecting the surface state of the upper electrode 22 is not limited to the optical surface sensor. For example, any means may be used as long as the life of the upper electrode 22 can be determined, such as an electromagnetic surface sensor or a means for determining the life of the upper electrode 22 from the processing time and the number of processing.
[0028]
Next, attachment of the upper electrode 22 to which the present invention is applied will be described.
[0029]
The plasma processing apparatus 30 shown in FIG. 2 shows a state before the upper plate 22a and the lower plate 22b, the shield ring 24, the upper electrode screw 31a, and the shield ring screw 31b are attached.
[0030]
When the upper electrode 22 is attached, the upper plate 22a and the lower plate 22b are fixed to the upper electrode support member 15 together with the upper electrode screw 31a from the state shown in FIG. Further, the periphery of the upper electrode 22 is covered with a shield ring 24, and the shield ring 24 is fixed with a shield ring screw 31b.
[0031]
Next, a detailed configuration of the upper electrode 22 in a portion surrounded by a broken line in the parallel plate type plasma etching apparatus 1 having two high-frequency power sources shown in FIG. 1 will be described.
[0032]
An enlarged view of the upper electrode 22 shown in FIG. 3 (portion surrounded by a broken line in FIG. 1) shows the first embodiment of the present invention. The upper electrode 22 includes an upper plate 22a and a lower plate 22b. The gas passage holes 23a of the upper plate 22a are all provided obliquely toward the center of the upper plate 22a with respect to the electrode surface 22s. Here, the electrode surface 22 s is a portion facing the plasma generation region of the upper electrode 22. Accordingly, it is possible to prevent plasma generated between the upper electrode 22 and the susceptor 7 (see FIG. 1) from entering the inside of the electrode through the gas ejection holes 23b of the lower plate 22b and the gas passage holes 23a of the upper plate 22a. . For this reason, metal contamination which occurs when the upper electrode support member 15, for example, a cooling plate made of aluminum is sputtered can be prevented.
[0033]
The enlarged view of the upper electrode 22 shown in FIG. 4 shows the erosion portion 32 when the upper electrode 22 of the first embodiment shown in FIG. In addition, since it hits the side surface 23s of the gas passage hole 23a of the upper plate 22a, it does not enter further into the electrode, and the eroded portion 32 does not reach the upper electrode support member 15.
[0034]
An enlarged view of the upper electrode 22 shown in FIG. 5 shows a second embodiment of the present invention. The upper electrode 22 has an upper plate 22a and a lower plate 22b, and a gas passage in the upper plate 22a. The portion of the hole 23a facing the lower plate 22b is provided in parallel to the electrode surface 22s. Therefore, plasma generated between the upper electrode 22 and the susceptor 7 can be prevented from entering the inside of the electrode through the gas ejection holes 23b of the lower plate 22b and the gas passage holes 23a of the upper plate 22a. For this reason, metal contamination which occurs when the upper electrode support member 15, for example, a cooling plate made of aluminum is sputtered can be prevented.
[0035]
In addition, the upper electrode 22 of the second embodiment shown in FIG. 5 can be fixed at the second fixed position by sliding the lower plate 22b from the first fixed position fixed to the upper plate 22a by rotation. It has a structure. Accordingly, since the position of the side surface 23s of the gas passage hole 23a of the upper plate 22a to which the plasma hits can be changed, the life of the electrode becomes longer than that of the conventional one.
[0036]
The enlarged view of the upper electrode 22 shown in FIG. 6 shows that the upper electrode 22 of the second embodiment shown in FIG. 5 is eroded by plasma when the lower plate 22b is used while being slid by rotation. The erosion portion 32 of the upper plate 22a is shown in black, and since the plasma hits the side surface 23s of the gas passage hole 23a of the upper plate 22a, the erosion portion 32 does not enter further inside the electrode. Since the position of the side surface 23s of the gas passage hole 23a of the upper plate 22a to which the plasma hits is changed, the portion of the side surface 23s of the gas passage hole 23a facing the lower plate 22b of the upper plate 22a is eroded at a plurality of locations. ing.
[0037]
Here, the structure in which one of the upper plate 22a and the lower plate 22b is slid from the first fixed position fixed to the other and can be fixed at the second fixed position is limited to that according to the present embodiment. Is not to be done. For example, the upper plate 22a is not limited to the lower plate 22b, and the upper plate 22a may be slid by rotation. When an LCD glass substrate is used as an object to be processed, a fixed position or electrode is provided at the end of the upper plate 22a. It may be slid linearly while sandwiching a spacer for adjusting the width of. As described above, any structure may be used as long as one of the upper plate 22a and the lower plate 22b is slid from the first fixed position fixed to the other and fixed at the second fixed position.
[0038]
An enlarged view of the upper electrode 22 shown in FIG. 7 shows a third embodiment of the present invention. The upper electrode 22 has an upper plate 22a and a lower plate 22b, and a gas passage in the upper plate 22a. The hole 23a has a portion facing the upper electrode support member 15 and a portion facing the lower plate 22b provided in parallel to the electrode surface 22s. Therefore, plasma generated between the upper electrode 22 and the susceptor 7 can be prevented from entering the inside of the electrode through the gas ejection holes 23b of the lower plate 22b and the gas passage holes 23a of the upper plate 22a. For this reason, metal contamination which occurs when the upper electrode support member 15, for example, a cooling plate made of aluminum is sputtered can be prevented.
[0039]
The upper electrode 22 of the third embodiment shown in FIG. 7 can be fixed at the second fixed position by sliding the lower plate 22b from the first fixed position fixed to the upper plate 22a by rotation. In addition to the structure, the upper plate 22a is inverted 180 degrees so that both surfaces thereof can be used. Therefore, the position of the side surface 23s of the gas passage hole 23a of the upper plate 22a to which the plasma hits can be changed, and after using one surface of the upper plate 22a toward the plasma generation region side, the upper plate 22a is moved 180 degrees. Inverted and can be used with the other surface facing the plasma generation region side, so that the life of the electrode is significantly longer than that of the conventional one.
[0040]
The enlarged view of the upper electrode 22 shown in FIG. 8 shows that the upper electrode 22 of the third embodiment shown in FIG. 7 rotates the lower plate 22b with one surface of the upper plate 22a facing the plasma generation region side. After being used while being slid and changed, when the upper plate 22a is inverted 180 degrees and the other surface is used facing the plasma generation region side, the eroded portion 32 when eroded by the plasma is shown in black. Since the plasma hits the side surface 23s of the gas passage hole 23a of the upper plate 22a, it does not enter further into the electrode, and the eroded portion 32 does not reach the upper electrode support member 15 and hits the plasma. Since the position of the side surface 23s of the gas passage hole 23a of the upper plate 22a changes and the upper plate 22a is inverted 180 degrees, it faces the upper electrode support member 15 of the upper plate 22a. Side 23s of the portion of the gas passage holes 23a are a plurality of locations eroded.
[0041]
Here, one or both of the upper plate 22a and the lower plate 22b are reversed 180 degrees so that both surfaces can be used are not limited to those according to the present embodiment. For example, the lower plate 22b provided with the gas ejection holes 23b perpendicular to the electrode surface 22s may be used, or the entire gas passage hole 23a may be the electrode surface as in the upper plate 22a of the first embodiment shown in FIG. It may be provided obliquely with respect to 22s. As described above, one or both of the upper plate 22a and the lower plate 22b may be any one as long as the both sides can be used by inverting 180 degrees.
[0042]
An enlarged view of the upper electrode 22 shown in FIG. 9 shows a fourth embodiment of the present invention. The upper electrode 22 has an upper plate 22a and a lower plate 22b, and a gas passage in the upper plate 22a. A portion of the hole 23a facing the lower plate 22b is provided in parallel to the electrode surface 22s, and a part of the upper plate 22a along the side surface 23s of the gas passage hole 23a of the portion provided in parallel is separated. For example, the cartridge 33 is made of silicon. Therefore, plasma generated between the upper electrode 22 and the susceptor 7 can be prevented from entering the inside of the electrode through the gas ejection holes 23b of the lower plate 22b and the gas passage holes 23a of the upper plate 22a. For this reason, metal contamination which occurs when the upper electrode support member 15, for example, a cooling plate made of aluminum is sputtered can be prevented. Further, it becomes possible to efficiently replace the portion eroded by the plasma, and the life of the electrode is longer than that of the conventional one.
[0043]
Further, the upper electrode 22 of the fourth embodiment shown in FIG. 9 can be fixed at the second fixed position by sliding the lower plate 22b by rotation from the first fixed position fixed to the upper plate 22a. It has a structure. Accordingly, since the position of the side surface 23s of the gas passage hole 23a of the upper plate 22a to which the plasma hits can be changed, the life of the electrode becomes longer than that of the conventional one.
[0044]
Here, the configuration in which a part of one or both of the upper plate 22a and the lower plate 22b is separable is not limited to that according to the present embodiment. For example, the cartridge 33 may be provided on a portion of the lower plate 22b facing the plasma generation region side. As described above, any configuration may be used as long as a part of one or both of the upper plate 22a and the lower plate 22b that are easily eroded by plasma is separable.
[0045]
An enlarged view of the upper electrode 22 shown in FIG. 10 shows a fifth embodiment of the present invention. In the upper electrode 22 eroded by the plasma shown in FIG. 4, the lower plate 22b eroded by the plasma is shown. The surface of the lower plate 22b is polished and scraped so that a part thereof becomes a plane parallel to the electrode surface 22s before being eroded by the plasma, and the upper plate 22a and the lower plate 22b are inverted 180 degrees and scraped off. A state in which a spacer 34 made of, for example, silicon having a thickness corresponding to the thickness of the lower plate 22b having the cut surface is sandwiched between the upper plate 22a and the lower plate 22b having the cut surface is shown. ing. Therefore, the lower plate 22b can be reused without changing the thickness of the entire upper electrode portion, and the life of the electrode is longer than that of the conventional one.
[0046]
Here, the method of scraping the surface of the lower plate 22b so as to be parallel to the electrode surface 22s is not limited to polishing. For example, cutting may be used. As described above, any method may be used as long as the surface of the lower plate 22b is scraped so as to be parallel to the electrode surface 22s.
[0047]
An enlarged view of the upper electrode 22 shown in FIG. 11 shows a sixth embodiment of the present invention. In the conventional upper electrode eroded by plasma, a part of the conventional upper electrode eroded by plasma is shown. The surface of the conventional upper electrode is polished and scraped so as to be parallel to the electrode surface 22s before being eroded by the plasma, and the scraped thickness of the conventional upper electrode having the scraped surface The figure shows a state in which a spacer made of, for example, silicon, having a thickness of 1 minute is sandwiched between an upper electrode support member 15 and a conventional upper electrode having a scraped surface. Therefore, the conventional upper electrode can be reused without changing the thickness of the entire upper electrode portion, and the life of the electrode is longer than that of the conventional one.
[0048]
Here, in FIG. 11, the scraped conventional upper electrode is shown as the lower plate 22b, and the spacer is shown as the upper plate 22a.
[0049]
Here, the method of scraping the surface of the conventional upper electrode so as to be parallel to the electrode surface 22s is not limited to polishing. For example, cutting may be used. Thus, any method may be used as long as the surface of the conventional upper electrode is scraped off so as to be parallel to the electrode surface 22s.
[0050]
Next, the upper plate 22a when one of the upper plate 22a and the lower plate 22b is slid from the first fixed position fixed to the other and fixed at the second fixed position will be described.
[0051]
The upper plate 22a shown in FIG. 12 is a plan view showing a case where the entire upper plate 22a of the second embodiment shown in FIG. 5 is viewed from the plasma generation region side, and the gas passage hole 23a is the first plate. A portion facing the lower plate 22b is concentrically provided in a substantially arcuate shape (slit) so that it can be slid in the circumferential direction by rotation from the fixed position and fixed at the second fixed position. It is provided symmetrically about the center point so that both sides can be used by reversing the degree.
[0052]
Here, the upper plate 22a when one of the upper plate 22a and the lower plate 22b is slid from the first fixed position fixed to the other and can be fixed at the second fixed position is as described above. It is not limited to. For example, when an LCD glass substrate is used as the object to be processed, the gas passage hole 23a can be linearly slid at the end of the upper plate 22a with a spacer for adjusting the fixing position and the electrode width interposed therebetween. What is necessary is just to provide the part which faces the lower board 22b in substantially linear form. In this way, if the upper plate 22a has a structure in which one of the upper plate 22a and the lower plate 22b is slid from the first fixed position fixed to the other and can be fixed at the second fixed position, Something like that.
[0053]
As described above, in the embodiment of the present invention, the embodiment in which the present invention is applied to the parallel plate type plasma etching apparatus having two high-frequency power sources has been described. However, the present invention is not limited to such an apparatus. The present invention can be applied to various plasma processing apparatuses, and a glass substrate for LCD, for example, can be used instead of a wafer as an object to be processed.
[0054]
【The invention's effect】
As is clear from the above description, according to the upper electrode of the present invention, processing can be performed with high accuracy and at low cost, and the lifetime of the electrode is remarkably increased as compared with the conventional one.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a parallel plate type plasma etching apparatus having two high-frequency power sources to which the present invention is applied.
FIG. 2 is a perspective view showing a plasma processing apparatus in a state before an upper electrode to which the present invention is applied is attached.
3 is an enlarged view of an upper electrode (portion surrounded by a broken line in FIG. 1) showing the first embodiment of the present invention in the parallel plate type plasma etching apparatus having two high frequency power sources shown in FIG. 1; is there.
4 is an enlarged view of the upper electrode when the upper electrode shown in FIG. 3 is eroded by plasma. FIG.
FIG. 5 is an enlarged view of an upper electrode showing a second embodiment of the present invention in the parallel plate type plasma etching apparatus having two high frequency power sources shown in FIG. 1;
6 is an enlarged view of the upper electrode when the upper electrode shown in FIG. 5 is used while being changed by sliding the lower plate 22b by rotation.
7 is an enlarged view of an upper electrode showing a third embodiment of the present invention in the parallel plate type plasma etching apparatus having two high-frequency power sources shown in FIG. 1;
FIG. 8 is an enlarged view of the upper electrode when the upper electrode shown in FIG. 7 is used while the lower plate 22b is slid and changed by rotation and then the upper plate is inverted 180 degrees.
FIG. 9 is an enlarged view of an upper electrode showing a fourth embodiment of the present invention in the parallel plate type plasma etching apparatus having two high frequency power sources shown in FIG. 1;
10 is an enlarged view of an upper electrode showing a fifth embodiment of the present invention in the parallel plate type plasma etching apparatus having two high frequency power sources shown in FIG. 1; FIG.
11 is an enlarged view of an upper electrode showing a sixth embodiment of the present invention in the parallel plate type plasma etching apparatus having two high frequency power sources shown in FIG. 1; FIG.
12 is a plan view showing a case where the entire upper plate of the second embodiment shown in FIG. 5 is viewed from the plasma generation region side. FIG.
[Explanation of symbols]
1 Parallel plate type plasma etching system
2 processing container
3 treatment room
4 Grounding wire
5 Insulation support plate
6 Gate valve
7 Susceptor (lower electrode)
8 Lifting shaft
9 Drive motor
10 Bellows
11 Electrostatic chuck
12 High voltage DC power supply
13 Focus ring
14 Insulating support member
15 Upper electrode support member
16 Hollow part
17 Gas introduction pipe
18 Valve
19 Mass Flow Controller
20 Gas supply source
21 Gas supply hole
22 Upper electrode
22a Upper plate
22b Lower plate
22s electrode surface
23a Gas passage hole
23b Gas outlet
Side surface of 23s gas passage hole
24 Shield Ring
25 Exhaust pipe
26 Vacuuming mechanism (vacuum pump)
27 Exhaust plate
28a Upper matcher
28b Lower matcher
29a First high frequency power supply
29b Second high frequency power supply
30 Plasma processing equipment
31a Upper electrode screw
31b Shield ring screw
32 Erosion part
33 cartridges
34 Spacer
W wafer

Claims (12)

An electrode having one or more gas ejection holes arranged in a processing container kept airtight in a plasma processing apparatus and arranged to face a mounting table on which an object to be processed is mounted,
The electrode has an upper plate having one or more gas passage holes;
A lower plate having one or more gas ejection holes,
The upper plate and the lower plate can be divided into upper and lower parts, and one of the upper plate and the lower plate is released from the first fixed position fixed to the other and rotated to rotate. The electrode is configured to be slid to a second fixed position and fixed at the second fixed position.   2. The electrode according to claim 1, wherein one or both of the gas passage hole of the upper plate and the gas ejection hole of the lower plate are partially or entirely provided obliquely with respect to the electrode surface. .   2. The electrode according to claim 1, wherein one or both of the gas passage hole of the upper plate and the gas ejection hole of the lower plate are provided in parallel to the electrode surface.   2. The electrode according to claim 1, wherein one or both of the upper plate and the lower plate are inverted 180 degrees so that both surfaces thereof can be used.   2. The electrode according to claim 1, wherein a portion of the upper plate facing the lower plate of the gas passage hole is constituted by a separable member. The electrode has an upper plate having one or more gas passage holes;
A lower plate having a surface that has one or more gas ejection holes and is scraped to become a plane parallel to the electrode surface;
A spacer having one or more gas passage holes and having a thickness corresponding to the scraped thickness;
2. The electrode according to claim 1, wherein the spacer can be used by being sandwiched between the upper plate and the lower plate having the surface to be scraped or between the electrode support member and the upper plate. In a plasma processing apparatus provided in a processing container kept airtight, and provided with a mounting table on which an object to be processed is mounted, and an electrode having one or more gas ejection holes arranged to face the mounting table ,
The electrode has an upper plate having one or more gas passage holes;
A lower plate having one or more gas ejection holes,
The upper plate and the lower plate can be divided into upper and lower parts, and one of the upper plate and the lower plate is released from the first fixed position fixed to the other and rotated to rotate. A plasma processing apparatus characterized in that it is slid to a second fixed position and can be fixed at the second fixed position.   8. The plasma according to claim 7, wherein one or both of the gas passage hole of the upper plate and the gas ejection hole of the lower plate are partly or entirely provided obliquely with respect to the electrode surface. Processing equipment.   8. The plasma processing apparatus according to claim 7, wherein one or both of a gas passage hole of the upper plate and a gas ejection hole of the lower plate are provided in parallel to the electrode surface. .   8. The plasma processing apparatus according to claim 7, wherein one or both of the upper plate and the lower plate are inverted 180 degrees so that both surfaces thereof can be used.   The plasma processing apparatus according to claim 7, wherein a portion of the upper plate facing the lower plate of the gas passage hole is constituted by a separable member. The electrode has an upper plate having one or more gas passage holes;
A lower plate having a surface that has one or more gas ejection holes and is scraped to become a plane parallel to the electrode surface;
A spacer having one or more gas passage holes and having a thickness corresponding to the scraped thickness,
The plasma processing apparatus according to claim 7, wherein the spacer is usable by being sandwiched between the upper plate and the lower plate having the surface to be scraped or between the electrode support member and the upper plate.

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