JP3481216B2 - Wear-resistant film-coated tools - Google Patents
Wear-resistant film-coated toolsInfo
- Publication number
- JP3481216B2 JP3481216B2 JP2001140906A JP2001140906A JP3481216B2 JP 3481216 B2 JP3481216 B2 JP 3481216B2 JP 2001140906 A JP2001140906 A JP 2001140906A JP 2001140906 A JP2001140906 A JP 2001140906A JP 3481216 B2 JP3481216 B2 JP 3481216B2
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- Prior art keywords
- coating
- wear
- cutting
- tool
- coated
- Prior art date
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Description
【0001】[0001]
【発明が属する技術分野】本発明は、高硬度鋼の高速切
削加工に使用される硬質皮膜被覆工具に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard coating tool used for high speed cutting of high hardness steel.
【0002】[0002]
【従来の技術】金属加工の高能率化を目的とした調質鋼
の直切削においては、特開昭62−56565号公報、
特開平2−194159号公報に代表されるTiAlN
皮膜が開発され切削工具に適用されている。TiAlN
皮膜は、TiN、TiCNに比べ耐酸化性が優れるた
め、刃先が高温に達する調質鋼の切削においては、切削
工具の性能を著しく向上させるものである。2. Description of the Related Art In the direct cutting of heat-treated steel for the purpose of improving the efficiency of metal working, JP-A-62-56565,
TiAlN typified by JP-A-2-194159
A coating has been developed and applied to cutting tools. TiAlN
Since the coating has better oxidation resistance than TiN and TiCN, it significantly improves the performance of the cutting tool in the cutting of heat-treated steel whose cutting edge reaches a high temperature.
【0003】しかしながら、近年では更なる加工の高能
率、高精度化の要求を満たす為、切削速度の高速化に加
え、環境問題及び加工コスト低減の観点から乾式での切
削加工が重要視されている。こうような切削環境下にお
いては、切削工具表面に被覆される耐摩耗皮膜と切削さ
れる材料(以下、被削材と称す。)との溶着現象が切削
性能に大きな影響を及ぼすとともに、切削温度がより高
温になりTiAlN系皮膜でも耐酸化が十分ではない状
況にある。すなわち、従来までの前記TiN、TiCN
およびTiAlN皮膜はこのような苛酷な切削環境下に
おいては、被削材との溶着現象等に起因した摩擦抵抗の
増加及び酸化の進行により、十分な切削性能を得られな
く、また酸化による摩耗進行を十分に抑制できていなく
なったのが現状である。However, in recent years, in order to meet the demands for higher efficiency and higher accuracy of machining, dry machining is regarded as important in view of environmental problems and machining cost reduction in addition to high cutting speed. There is. In such a cutting environment, the welding phenomenon between the wear-resistant film coated on the surface of the cutting tool and the material to be cut (hereinafter referred to as the work material) has a great influence on the cutting performance and the cutting temperature. However, even with a TiAlN-based coating, the oxidation resistance is not sufficient. That is, the conventional TiN and TiCN
In such a severe cutting environment, the TiAlN coating cannot obtain sufficient cutting performance due to the increase in frictional resistance due to the welding phenomenon with the work material and the progress of oxidation, and the progress of wear due to oxidation. The current situation is that we have not been able to sufficiently suppress this.
【0004】このような問題を解決する為に、耐溶着性
を改善する観点より特表平11−502775号公報に
示される二硫化モリブデンや、特開平7−164211
号公報に示される炭化タングステンおよびダイヤモンド
ライクカーボンからなる潤滑性皮膜を硬質皮膜最表面に
積層した切削工具が開発されているが、いずれも硬質皮
膜との密着性が悪く、皮膜そのものが非常に脆い上耐酸
化性に乏しく、切削時に剥離または破壊、酸化摩滅など
により上記切削環境下においては十分対応できてはいな
い。In order to solve such a problem, from the viewpoint of improving the welding resistance, molybdenum disulfide disclosed in Japanese Patent Publication No. 11-502775 and JP-A No. 7-164211 are disclosed.
Although a cutting tool has been developed in which a lubricative coating consisting of tungsten carbide and diamond-like carbon is laminated on the outermost surface of the hard coating as disclosed in Japanese Patent Publication, the adhesion to the hard coating is poor and the coating itself is very brittle. It is poor in oxidation resistance and cannot be sufficiently dealt with under the above cutting environment due to peeling or destruction during cutting, oxidative abrasion and the like.
【0005】また、耐酸化性を改善する観点から特開平
7−237010号公報や特開平10−130620号
公報に代表されるようにTiAlNに第3成分を添加す
る事例があるものの、第3成分の添加によるだけでは十
分に満足される耐酸化性の向上は実現されていないのが
実状である。また特開平8−118106号公報にはT
iSiNの事例も提案されているが、単なるTiSiN
では耐酸化性を改善するには至っていない。From the viewpoint of improving the oxidation resistance, there are cases in which a third component is added to TiAlN as typified by JP-A-7-237010 and JP-A-10-130620, but the third component is used. It is the actual situation that the satisfactory improvement of the oxidation resistance is not realized only by the addition of. Further, in Japanese Patent Application Laid-Open No. 8-118106, T
Although a case of iSiN has been proposed, it is simply TiSiN
Has not yet improved the oxidation resistance.
【0006】また特開平11−138038号公報にみ
られるように硬質皮膜内部にSi3N 4粒等を介在させ
る事例もみられるがSi3N4粒界を介して酸化が進行
するため十分な耐酸化性を付与するに至っていない。Also, see Japanese Patent Laid-Open No. 11-138038.
Inside the hard coatingThreeN FourIntervening grains
There are some cases of SiThreeNFourOxidation progresses through grain boundaries
Therefore, sufficient oxidation resistance has not been imparted yet.
【0007】[0007]
【発明が解決しようとする課題】本発明はこうした事情
に鑑み、切削加工の乾式化、高速化に対応可能な、即
ち、耐酸化性に優れるとともに被削材との溶着性が少な
い硬質層を提案し、耐酸化及び耐溶着性を同時に実現
し、高硬度鋼を乾式で高速切削出来うる耐摩耗皮膜被覆
工具を提供することを課題とする。In view of the above circumstances, the present invention provides a hard layer which is capable of coping with dry machining and high speed machining, that is, having a high oxidation resistance and a low weldability to a work material. It is an object of the present invention to provide a wear-resistant film-coated tool that has been proposed and is capable of simultaneously achieving oxidation resistance and welding resistance and capable of high-speed dry cutting of high-hardness steel.
【0008】[0008]
【課題を解決するための手段】本発明者は、硬質皮膜の
耐摩耗性と様々な被削材と摩擦抵抗の低減に及ぼす影響
および皮膜の層構造について詳細な検討を行った結果、
耐溶着性を付与する(CraSi1−a)(NxB1−
x)、但し、0.5≦a<1.0、0.5≦x≦1.0
で示される化学組成からなるA層を被覆することにより
耐溶着性を改善し、さらにその結晶形態を制御すること
により、耐酸化性及び耐摩耗性を同時に付与された硬質
皮膜被覆工具とする事により、高硬度鋼の乾式高速切削
加工において切削工具の性能が極めて良好となることを
見出し本発明に到達した。また、A層は一般的なTiA
lN系硬質皮膜等との組み合わせにより、より密着性の
優れた被覆工具を実現するものである。また上記耐摩耗
皮膜は、物理蒸着法により被覆されることが望ましい。Means for Solving the Problems The present inventor has made a detailed study on the wear resistance of hard coatings and their effects on various work materials and reduction of frictional resistance, and the layer structure of coatings.
Addition of welding resistance (Cr a Si 1 - a ) (N x B 1-
x ), where 0.5 ≦ a <1.0, 0.5 ≦ x ≦ 1.0
By improving the welding resistance by coating the A layer having the chemical composition shown in, and further controlling the crystal morphology thereof, it is possible to obtain a hard coating tool having both oxidation resistance and wear resistance. As a result, they have found that the performance of the cutting tool is extremely good in the dry high-speed cutting of high hardness steel, and have reached the present invention. In addition, the A layer is a general TiA
By combining with an IN hard coating or the like, a coated tool with more excellent adhesion is realized. Further, it is desirable that the abrasion resistant film is coated by a physical vapor deposition method.
【0009】[0009]
【作用】はじめにA層に関して、その各構成の作用につ
いて詳しく述べる。元来CrNは潤滑性を有する皮膜と
して知られており、その摩擦係数は0.6前後である。
(CraSi1−a)(NxB1−x)、但し、0.5
≦a<1.0、0.5≦x≦1.0、で示される化学組
成からなるCrとSiより構成される窒化物もしく窒硼
化物は、大気中、室温における鋼との摩擦係数が従来の
TiAl窒化物皮膜の0.8、CrNの0.6に比べ、
0.4と低摩擦を示すが、特に高温下ではその数値がさ
らに0.2前後に激減する。これは高温下で皮膜内のS
iが切粉との間の反応により皮膜表面に内部拡散し、皮
膜表面で低融点のSi酸化物を形成することに起因する
ことが確認された。First, the operation of each component of the layer A will be described in detail. CrN is originally known as a film having lubricity, and its friction coefficient is around 0.6.
(Cr a Si 1 - a ) (N x B 1 -x ), provided that 0.5
A nitride or boride nitride composed of Cr and Si having a chemical composition represented by ≦ a <1.0 and 0.5 ≦ x ≦ 1.0 has a coefficient of friction with steel at room temperature in the atmosphere. Compared with 0.8 of the conventional TiAl nitride film and 0.6 of CrN,
Although it shows a low friction of 0.4, the value further decreases to around 0.2 especially at high temperatures. This is S in the film at high temperature
It was confirmed that i was caused by the internal diffusion of i on the surface of the coating due to the reaction with the chips and the formation of a low-melting point Si oxide on the surface of the coating.
【0010】この低融点のSi酸化物により(CraS
i1−a)(NxB1−x)皮膜はCrNそのものが有
する潤滑特性にさらに潤滑性が付与され、著しく特性の
優れた潤滑皮膜として機能し、溶着による切削抵抗の増
大を抑制する作用を有するものであることが確認され
た。さらに硼素の添加により、硼素が皮膜内部でBN相
を形成し、このBN相の有する潤滑性の作用により、よ
り一層潤滑性が向上することが明らかとなった。With this low melting point Si oxide (Cr a S
i 1 - a) (N x B 1 - x) film is further lubricity imparted to the lubricating characteristic of the CrN itself, acts as an excellent lubricating film significantly characteristics, suppresses the increase in the cutting resistance due to the welding action Was confirmed to have Further, it was clarified that the addition of boron forms BN phase inside the film, and the lubricity of the BN phase further improves the lubricity.
【0011】耐酸化性の向上に対し、本発明者らは鋭意
検討した結果、(CraSi1−a)(NxB1−x)
相の結晶形態が耐酸化性に大きく影響を及ぼし、結晶形
態を制御することにより、一般的に耐酸化性が優れると
言われる(TiAl)N系皮膜より優れる耐酸化性を持
たせることができるという驚くべき知見を得るに至っ
た。(CraSi1−a)(NxB1−x)相は被覆時
のイオンエネルギーにより結晶形態が異なり、イオンエ
ネルギーが低い場合は全体的に柱状結晶を呈し、その中
にSi3N4粒子が介在した形態となる。イオンエネル
ギーが高い場合は、全体的にアモルファス状に近い状態
となり、CrNBの中にSiとNの結合が確認される状
態となる。イオンエネルギーが中程度であり、かつ被覆
温度が550℃以上の場合は完全アモルファスのCrS
iBN相が微細結晶で存在し、このCrSiBN相のS
i含有量は、マトリックスとなるCrSiBN相のSi
量より富む形態となることが確認された。温度が低いと
イオンエネルギーが高い場合と同様の結晶形態を呈する
ことが確認された。温度、イオンエネルギーと結晶形態
との相関理由は今後の物理学的研究が必要である。As a result of intensive studies made by the present inventors to improve the oxidation resistance, (Cr a Si 1 - a ) (N x B 1 -x )
The crystal morphology of the phase has a great influence on the oxidation resistance, and by controlling the crystal morphology, it is possible to provide the oxidation resistance superior to that of the (TiAl) N-based coating, which is generally said to have excellent oxidation resistance. It came to the surprising finding that. (Cr a Si 1 - a) (N x B 1 - x) phase have different crystal form by ion energy during coating, if a low ion energy exhibited an overall columnar crystals, Si 3 N 4 therein The form is such that particles intervene. When the ion energy is high, the state is almost amorphous as a whole, and the state where the bond between Si and N is confirmed in CrNB is obtained. Completely amorphous CrS when the ion energy is medium and the coating temperature is 550 ° C or higher
The iBN phase exists in the form of fine crystals, and S of this CrSiBN phase
The i content is the Si of the CrSiBN phase that becomes the matrix.
It was confirmed that the form became richer than the amount. It was confirmed that when the temperature was low, it exhibited the same crystal morphology as when the ion energy was high. The reason for the correlation between temperature, ion energy and crystal morphology needs further physical research.
【0012】中でも完全アモルファスCrSiBN相が
微細結晶で存在する場合結晶粒界が非常に整合した粒界
となり、欠陥が少なく、酸素の粒界での拡散を著しく抑
制し、非常に優れた耐酸化性を有することが確認され
た。同時に微細結晶で介在することにより、マトリック
スを格子歪強化し、硬度が向上し結果耐摩耗性をも向上
することになった。さらに最表面には1〜5nmのCr
の安定酸化層が形成されより一層優れた耐酸化性を有す
る結果となった。[0012] Above all, when the completely amorphous CrSiBN phase is present as fine crystals, the crystal grain boundaries become very aligned grain boundaries, there are few defects, the diffusion of oxygen at the grain boundaries is remarkably suppressed, and very excellent oxidation resistance. It was confirmed to have. At the same time, by interposing fine crystals, the lattice strain of the matrix is strengthened, the hardness is improved, and the wear resistance is also improved. Furthermore, 1 to 5 nm of Cr on the outermost surface
As a result, a stable oxide layer was formed, resulting in further excellent oxidation resistance.
【0013】被覆条件としては比較的イオンエネルギー
が中程度となる、−100V〜−150Vの印荷バイア
ス、反応圧力は1Pa〜5Pa程度、被覆温度は550
℃以上が好ましい範囲である。As coating conditions, the ion energy is relatively medium, a load bias of -100 V to -150 V, a reaction pressure of 1 Pa to 5 Pa, and a coating temperature of 550.
C. or higher is a preferable range.
【0014】本発明の硬質皮膜を構成するA層の金属元
素の組成は、(CraSi1−a)において、aの値が
0.5≦a<1.0という式を満足させることが必要で
ある。aの値が0.5未満の場合、Si含有量が多くな
りすぎて、皮膜そのものの靭性が劣化し、乾式高速切削
において皮膜の内部破壊や破壊にともなう皮膜の剥離が
顕著となり、十分な性能を発揮できない。[0014] The composition of the metal elements A layer constituting the hard coating of the present invention, (Cr a Si 1 - a ) in the value of a is be satisfied the expression 0.5 ≦ a <1.0 is necessary. When the value of a is less than 0.5, the Si content becomes too large and the toughness of the coating itself deteriorates, and internal fracture of the coating and peeling of the coating due to the fracture become noticeable in dry high speed cutting, resulting in sufficient performance. Can't exert.
【0015】また、上記A層に係る窒化物もしくは窒硼
化物の場合、NxB1−xで0.5≦x≦1.0を満足
することが必要であり、xの値が0.5未満の場合は、
皮膜の硬度が著しく上昇し、残留圧縮応力が増大し、皮
膜の密着性が劣化するため十分な切削性能を示さない。[0015] In the case of nitrides or窒硼product according to the A layer, N x B 1 - and must be able to satisfy 0.5 ≦ x ≦ 1.0 in x, the value of x is 0. If less than 5,
The hardness of the coating increases significantly, the residual compressive stress increases, and the adhesion of the coating deteriorates, resulting in insufficient cutting performance.
【0016】アモルファスCrSiBN相の微細結晶粒
径は500nmを越えると格子歪の効果が少なく、皮膜
の硬度向上寄与が低下するため、500nm以下である
方がより好ましい。A層は、静的および動的条件下にお
いて優れた密着性、低摩擦、高耐酸化性を有すものの、
HRCが60を越えるような高硬度鋼の乾式高速切削加
工には、単一皮膜では密着性が十分でなく剥離が発生す
る場合がある。そこで、優れた耐密着性並びに耐摩耗性
を有した(TiAl)N層等と積層することが、このよ
うな高硬度鋼切削ではより好ましい結果となる。If the fine crystal grain size of the amorphous CrSiBN phase exceeds 500 nm, the effect of lattice distortion is small and the contribution to improving the hardness of the coating is reduced. Therefore, it is more preferably 500 nm or less. Although the layer A has excellent adhesion, low friction and high oxidation resistance under static and dynamic conditions,
In high-speed dry cutting of high hardness steel having an HRC of more than 60, adhesion may not be sufficient with a single coating and peeling may occur. Therefore, stacking with a (TiAl) N layer or the like having excellent adhesion resistance and wear resistance is a more preferable result in such high hardness steel cutting.
【0017】ここで用いられる(TiAl)N層は場合
によっては第3の金属成分を添加されたものでも同様の
作用が期待されることは、言うまでもないことである。It goes without saying that the (TiAl) N layer used here is expected to have the same function even if the third metal component is added in some cases.
【0018】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性等を考慮
した場合、比較的低温で被覆でき、被覆した皮膜に圧縮
応力が残留するアーク放電方式イオンプレーティング、
もしくはスパッタリング等の被覆基体側にバイアス電圧
を印加する物理蒸着法であることが望ましい。The coating method of the hard coating tool of the present invention is not particularly limited, but in consideration of the thermal influence on the coating base material, the fatigue strength of the tool, the adhesion of the coating, etc., Arc discharge type ion plating that can be coated at a relatively low temperature and compressive stress remains in the coated film,
Alternatively, a physical vapor deposition method such as sputtering in which a bias voltage is applied to the coated substrate side is desirable.
【0019】[0019]
【実施例】以下本発明を実施例に基づいて説明する。ア
ークイオンプレーティング装置を用い、金属成分の蒸発
源である各種合金製ターゲット、ならびに反応ガスであ
るN 2ガスから目的の皮膜が得られるものを選択し、被
覆基体温度600℃、反応ガス圧力3.0Paの条件下
にて、被覆基体である外径10mmの超硬合金製2枚刃
エンドミル、および超硬合金製インサートに−130V
の電位を印加し、全皮膜総厚みが3μmとなるように成
膜した。また硼素、Siは蒸発源であるターゲットに必
要量添加した。試作した本発明例並びに比較例を表1に
示す。尚多層の場合はA層の総厚1.5μ、他層の総厚
1.5μとなるよう均等に被覆した。EXAMPLES The present invention will be described below based on examples. A
Evaporation of metal components using the Quark ion plating device
The target made of various alloys and the reaction gas
N TwoSelect the gas that gives the desired film and select
Conditions for covering substrate temperature 600 ° C. and reaction gas pressure 3.0 Pa
, 2 blades made of cemented carbide with an outer diameter of 10 mm, which is a coated substrate
-130V for end mills and cemented carbide inserts
Voltage is applied so that the total thickness of all coatings is 3 μm.
Filmed Also, boron and Si are essential for the target that is the evaporation source.
The required amount was added. Prototypes of the present invention and comparative examples are shown in Table 1.
Show. In the case of multiple layers, the total thickness of layer A is 1.5μ and the total thickness of other layers.
It was evenly coated to a thickness of 1.5μ.
【0020】[0020]
【表1】 [Table 1]
【0021】得られた硬質皮膜被覆エンドミルおよび硬
質皮膜被覆インサートを用い切削試験を行った。工具寿
命は刃先の欠けないしは摩耗等により工具が切削不能と
なった時の切削長とした。得られた結果を表1に併記す
る。切削諸元を次に示す。A cutting test was conducted using the obtained hard film-coated end mill and hard film-coated insert. The tool life was defined as the cutting length when the tool could not be cut due to chipping or wear of the cutting edge. The obtained results are also shown in Table 1. The cutting specifications are shown below.
【0022】2枚刃超硬エンドミルの切削条件は、側面
切削ダウンカット、被削材S50C(硬さHB22
0)、切り込みAd10mm×Rd1mm、切削速度2
50m/min、送り0.06mm/tooth、エア
ーブロー使用、とした。The cutting conditions for the 2-flute carbide end mill are as follows: side surface cutting down cut, work material S50C (hardness HB22
0), cut Ad 10 mm x Rd 1 mm, cutting speed 2
50 m / min, feed 0.06 mm / tooth, air blow used.
【0023】インサート切削条件は、工具形状SEE4
2TN、巾100mm×長さ250mmの面取り加工、
被削材SKD61(硬さHRC45)、切り込み2.0
mm、切削速度150m/min、送り0.15mm/
rev、乾式切削とした。表1に試験結果を併記する。The insert cutting conditions are the tool shape SEE4.
2TN, chamfering of width 100mm x length 250mm,
Work Material SKD61 (Hardness HRC45), Notch 2.0
mm, cutting speed 150 m / min, feed 0.15 mm /
Rev and dry cutting. The test results are also shown in Table 1.
【0024】耐酸化性はそれぞれ5μの皮膜を被覆し9
00℃大気中で1時間保持した時に形成される酸化層の
厚さで評価した。摩擦係数は600℃においてSKD6
1のボールを用い、一般的なボールオンディスク法によ
り測定した。それらの結果を表2に示す。Oxidation resistance is 9 μm by coating a film of 5 μm each.
It was evaluated by the thickness of the oxide layer formed when it was held in the atmosphere at 00 ° C. for 1 hour. Friction coefficient is SKD6 at 600 ℃
The ball No. 1 was used and the measurement was performed by a general ball-on-disk method. The results are shown in Table 2.
【0025】[0025]
【表2】 [Table 2]
【0026】比較例16、17はSiもしくは硼素の量
が多すぎる場合の比較例であり、静的評価数値は満足す
るものの密着性が十分ではなく工具寿命が短い結果であ
る。比較例13、14、15は、TiAlN系皮膜に第
3成分を添加した事例であり、耐酸化性は改善はされる
ものの、本発明例と比べれば改善効果が少ない。Comparative Examples 16 and 17 are comparative examples in the case where the amount of Si or boron is too large, and the results show that the static evaluation values are satisfied but the adhesion is insufficient and the tool life is short. Comparative Examples 13, 14, and 15 are examples in which the third component was added to the TiAlN-based coating, and although the oxidation resistance was improved, the improvement effect was less than that of the inventive examples.
【0027】これらに対し本発明例は、静的評価特性に
優れると同時に、密着性にも優れ、溶着現象に起因した
異常摩耗や皮膜の酸化摩耗、皮膜剥離が進行することも
なく、総合して工具寿命が著しく向上する。従って、本
発明は高硬度鋼の乾式高速切削加工に十分対応するもの
である。On the other hand, the examples of the present invention are excellent in static evaluation characteristics and at the same time are excellent in adhesiveness, and the abnormal wear due to the welding phenomenon, the oxidative wear of the coating, and the peeling of the coating do not proceed, and the results are comprehensive. Tool life is significantly improved. Therefore, the present invention is sufficiently applicable to dry high speed cutting of high hardness steel.
【0028】[0028]
【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた高密着性、低摩擦、高
耐酸化性を同時に有すことから、乾式高速切削加工にお
いて格段に長い工具寿命が得られ、切削加工における生
産性の向上に極めて有効であるものである。As described above, the hard coating tool of the present invention has excellent adhesion, low friction and high oxidation resistance at the same time as compared with the conventional coated tool, so that it is remarkably effective in dry high speed cutting. It has a very long tool life and is extremely effective in improving productivity in cutting.
【図1】図1は、本発明例の(CraSi1−a)(N
xB1−x)マトリックス内に介在する微細アモルファ
ス結晶(CraSi1−a)(NxB1−x)のTEM
像を示す。FIG. 1 is a schematic diagram of (Cr a Si 1-a ) (N of the present invention.
x B 1-x) fine amorphous crystals interposed in the matrix (Cr a Si 1-a) TEM of (N x B 1-x)
Show the image.
【図2】図2は、図1中のスポット1に対応する(Cr
aSi1−a)(NxB1−x)マトリックスの極微電
子線回折像を示す。FIG. 2 corresponds to spot 1 in FIG. 1 (Cr
shows the a Si 1-a) (N x B 1-x) nanobeam electron diffraction image of the matrix.
【図3】図3は、図1中のスポット2に対応する(Cr
aSi1−a)(NxB1−x)微細アモルファス結晶
(TiaSi1−a)(NxB1−x)の極微電子線回
折像を示す。FIG. 3 corresponds to spot 2 in FIG. 1 (Cr
shows the a Si 1-a) (N x B 1-x) fine amorphous crystal (Ti a Si 1-a) (N x nanobeam electron diffraction image of B 1-x).
Claims (4)
1−a)(NxB1−x)、但し、0.5≦a<1、
0.5≦x≦1、で示される化学組成からなるA層を少
なくとも1層被覆された耐摩耗皮膜被覆工具において、
該A層が相対的にSiに富むCrSi(NxB1−x)
相と、相対的にSiの少ないCrSi(NxB1− x)
相とから構成されることを特徴とする耐摩耗皮膜被覆工
具。1. A hard film, (CraSi
1−a) (NxB1−x), Where 0.5 ≦ a <1,
A layer having a chemical composition represented by 0.5 ≦ x ≦ 1
In a wear-resistant coating tool coated with at least one layer,
The A layer is CrSi (NxB1−x)
Phase and CrSi (NxB1− x)
Wear-resistant film coating characterized by being composed of
Ingredient
て、該相対的にSiに富むCrSi(NxB1−x)相
がアモルファス相であることを特徴とする耐摩耗皮膜被
覆工具。2. The wear resistant film coated tool according to claim 1, wherein the relatively Si-rich CrSi (N x B 1 -x ) phase is an amorphous phase.
において、該相対的にSiに富むCrSi(NxB1−
x)相の結晶粒径が500nm以下であることを特徴と
する耐摩耗皮膜被覆工具。3. The wear resistant film coated tool according to claim 1, wherein the relatively Si-rich CrSi (N x B 1-
x ) A crystal grain size of the phase is 500 nm or less, an abrasion resistant coating tool.
において、該A層とTiとAlを主成分とする窒化物、
炭窒化物、窒酸化物、窒硼化物層が2層以上積層された
ことを特徴とする耐摩耗皮膜被覆工具。4. A tool coated with an abrasion resistant film according to claim 1, wherein the A layer and a nitride containing Ti and Al as main components,
A wear-resistant film-coated tool characterized in that two or more layers of carbonitride, oxynitride, and oxyboride are laminated.
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JP4038448B2 (en) | 2003-03-25 | 2008-01-23 | 株式会社神戸製鋼所 | Hard coating |
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WO2023136212A1 (en) * | 2022-01-11 | 2023-07-20 | 三菱マテリアル株式会社 | Surface-coated cutting tool |
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