JP3185595B2 - Load storage equipment with board sorting equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load storage facility provided with a substrate sorting apparatus installed in a clean room of a semiconductor factory such as an LCD (liquid crystal display).

[0002]

2. Description of the Related Art In semiconductor factories such as LCD (liquid crystal),
When manufacturing a liquid crystal substrate or the like, a plurality of identical circuit patterns are formed on a large-sized substrate (for example, a glass substrate), and the substrate is diced (cut) to obtain a desired circuit substrate. to be sending. However, since the manufacturing process of the circuit pattern becomes complicated and the scale of the circuit becomes large, a defect occurs in many circuits. If the circuit-defective substrate is sent to the next bonding step as it is, the bonding step is wasted, so that the function test of each circuit pattern is performed before dicing the substrate in order to minimize the loss. Then, based on the test results, the type of the defective circuit on the board is classified according to the existence position, and the board is returned to repair the defective circuit,
Alternatively, after cutting, the circuit board having the defect is discarded.

[0003] In the above-described sorting by type, a worker at present works to prepare a storage box for sorting.

[0004]

However, in a clean room of a semiconductor factory such as an LCD (liquid crystal), there is no worker serving as a source of dust, which is one of measures for improving the yield. This is contrary to the measure, and the worker needs to be careful in handling the substrate storage box so as not to damage the substrate, which is a burden on the worker.

The present invention solves the above problems,
It is an object of the present invention to provide a load storage facility provided with a substrate sorting device capable of achieving unmanned operation and improving the yield.

[0006]

According to a first aspect of the present invention, there is provided a cargo storage facility provided with a substrate sorting apparatus for sorting a plurality of substrates of different types by type based on information on each of the substrates. A load storage facility comprising a sorting device, a shelf having a plurality of cassette storage sections for storing cassettes for storing the substrates, and a loading / unloading device for loading and unloading the cassettes, wherein the substrate sorting device is sorted. A sorter stage on which a real cassette containing a plurality of substrates of different types to be mounted thereon and a plurality of type sort stages for mounting empty cassettes to be sorted by type, and the real cassette from, based substrate on said information of each substrate was composed of a substrate loading and unloading apparatus sorting the empty cassette, by the unloading device, specifications
Sorting cassettes that are full of separated substrates
From the sorting stage by IP to the cassette storage section on the shelf
Empty cassette from the cassette storage section of the shelf
It is characterized by being replenished to the type-specific sorting stage .

A load storage facility provided with a substrate sorting apparatus according to the second invention is a load storage facility provided with the substrate sorting apparatus according to the first invention, wherein the substrate type is located at a position of a defective circuit.
It is characterized by being set more . Further, the substrate of the third invention
Load storage facilities equipped with sorting equipment
Boards are classified by type based on the information of these boards.
Substrate sorting device and cassette for storing the substrate
A shelf having a plurality of cassette storage sections for storing
A loading / unloading device for loading and unloading sets, and
An inspection device that performs a strike is an adjacent cargo storage facility,
By the loading / unloading device, the cassette is transported from the inspection device.
The position to be sent, the cassette storage section of the shelf, and the substrate sorting
Loading and unloading of the cassette with the storage device
And Also, a load storage provided with the substrate sorting apparatus of the fourth invention.
The facility can handle multiple boards of different types,
A board sorting device that sorts by type based on information;
A plurality of cassettes for storing a cassette for accommodating the substrate
A shelf having an accommodating portion, a board sorting device, and a shelf
Loading and unloading for transporting the cassette to and from the set storage
Equipment, and directly from the inspection equipment for testing the substrate
From the real cassette that received the substrate and stored the substrate,
Based on the information of each board of the test to the board sorting device
The substrate is further sorted. Also the fifth
The cargo storage facility equipped with the board sorting device of
A cargo container provided with the substrate sorting apparatus according to any one of the first to fourth inventions.
In a tube facility, a cassette is placed above the substrate sorting device.
A plurality of cassette storage sections for storing are provided.
You.

[0008]

According to the structure of the first aspect of the invention, the actual cassette and the empty cassette are supplied to the respective stages by the loading / unloading device from the cassette storage section of the shelf, and the substrate of the actual cassette is
The board loading / unloading device sorts by type based on the pass / fail judgment information of each circuit, and the sorted boards are full.
Sorting cassettes that have become shelves from sorting stages by type
Transported to and stored in the cassette storage section of the cassette
Empty cassettes are added to the sorting stage according to type from the storage section
Is done .

According to the second aspect of the present invention, the substrate tie
The loop is set by the location of the defective circuit . Third invention
According to the configuration, the position at which the cassette is transported from the inspection device is
Between the cassette storage section of the storage and shelf and the substrate sorting device.
Units are loaded and unloaded, and are delivered directly from inspection equipment.
Loading and unloading of sets is automated. Also, in the configuration of the fourth invention,
According to the inspection, it is received directly from the inspection equipment that performs the board test.
Also, from the actual cassette containing the substrates,
The board is sorted by the board sorter based on the information
Can be Further, according to the configuration of the fifth invention, the substrate sorting apparatus
There are multiple cassette storage sections for storing cassettes above
A storage space for cassettes is increased.

[0010]

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view of a load storage facility provided with a substrate sorting apparatus according to one embodiment of the present invention, FIG. 2 is a front view of the load storage facility, and FIG. 3 is a side view of the same load storage facility.

As shown in FIG. 4, a load storage facility 1 stores a cassette 3 for horizontally storing a plurality of glass substrates 2 on which four circuits are formed in a pattern, stores the cassettes in and out of the cassettes, and locates a defective circuit. This is a facility provided with a substrate sorting device for sorting the glass substrates 2 into another type, and a storage space 4A for the plurality of cassettes 3 is formed in a vertical direction and a left and right direction by a vertical support and an arm attached to the support. Barcode reader 5 that reads a barcode consisting of a cassette ID attached to a cassette 3 to be stored
And a first receiving tray 6 that forms the entrance of the cassette 3
A second receiving tray 8 forming an outlet of the cassette 3 to be unloaded, a substrate sorting device 9 (to be described in detail later) provided opposite the shelf 4, a shelf 4 and a substrate sorting device 9
The cassette 3 is configured to be able to travel along a fixed path 10 along the loading / unloading surface (front surface) of the cassette 3 and is provided with a vertically movable body which can be vertically moved up and down. A loading / unloading device (a loading / unloading device) 11 provided with a loading / unloading tool (fork) for the cassette 3 which can be moved in and out of the first and second receiving trays 6 and 8; a substrate sorting device 9 and a loading / unloading device 11; Is formed from a controller 12 (which will be described in detail later).

The code (cassette ID) of the cassette 3 read by the bar code reader 5 provided on the first receiving tray 6 is input to the controller 12. Further, a host computer 13 for managing the manufacturing process of the glass substrate 2 is provided. The host computer 13 has, for each cassette storage space of the shelf 4, the presence or absence of the cassette 3 and, if there is a cassette 3, a cassette ID. The presence or absence of the glass substrate 2 is stored. In addition, for a cassette (hereinafter, referred to as an actual cassette) 3A in which the tested glass substrates 2 are stored, a test result (hereinafter, referred to as glass information) of each glass substrate 2 is stored.

In the glass information, as shown in FIG. 5, types A to F are set according to the position of the defective (NG) circuit. On the first and second receiving trays 6, 8, a table 14, on which the cassette 3 is placed and which is slid
The tables 14 and 15 are provided with a pedestal for positioning the cassette 3 as well as allowing the loading / unloading device of the loading / unloading device 11 to freely move in and out below the cassette 3.

On the back of the shelf 4, a clean air supply unit (cleaning device) 16 is provided.
11 is supplying clean air. Note that clean air is supplied to the entire load storage facility 1 from the ceiling of the clean room. As shown in FIG. 2, a signal lamp 17 is provided on the side of the shelf 4 to notify the worker that an empty cassette (hereinafter referred to as an empty cassette) 3B needs to be refilled.

As shown in FIGS. 6 to 8, the substrate sorting apparatus 9 includes a sorting source stage 21 on which the actual cassette 3A is placed.
And a pedestal 23 in which a plurality of type-specific sorting stages 22 on which the empty cassettes 3B to be sorted by the types A to F are placed are arranged in a line, and a fixed path along the stages 21 and 22.
The glass substrate 2 can be moved freely in and out of the actual cassette 3A and the empty cassette 3B (fork).
Transfer robot 25 that forms a substrate loading / unloading device equipped with
And a transparent plate 26 that can be freely opened and closed around the periphery.

The sorting stage 21 of the pedestal 23 has a pedestal 27 for positioning the cassette 3 and a moving arm 28 for sandwiching the real cassette 3A mounted on the pedestal 27 from the left and right directions. A centering device 29 for aligning the position of the substrate 2 at the center is provided, and a sorting stage for each type is provided.
The base 22 is provided with a pedestal 30 for positioning the cassette 3. Each of the stages 21 and 22 is provided with a loading / unloading device insertion port 31 for allowing the loading / unloading device of the loading / unloading device 11 to be freely inserted and removed below the cassette 3.

FIG. 9 shows a control configuration diagram of the load storage facility 1. As shown in FIG. The controller 41 of the device 11 to the controller 12
And controller of centering device 29 and transfer robot 25
42 are connected and control the operation of these devices.

First, the operation of the controller 42 of the transfer robot 25 will be described with reference to FIGS. [Operation of Transfer Robot] As shown in FIG. 11, a memory corresponding to all cassettes 3 placed on the sorting source stage 21 and the type-specific sorting stages 22 of A to F is provided.
Every time the glass substrate 2 is transferred (sorted) from the actual cassette 3A, the glass ID is buried from the uppermost row (No. 1), and the glass ID is stored in the lowermost row (No. 25). In the initial state, all the cassettes 3 mounted on the type-specific sorting stages 22 A to F have glass substrates 2.
Are stored in a state where they are not stored, and the maximum number of glass substrates 2 that can be stored is 25.

First, the controller 12 controls the cassette ID of the actual cassette 3A placed on the sorting source stage 21, the ID of the glass substrate 2 in the cassette, and the glass information (A
To F) and the sorting information including the cassette IDs placed on the sorting stages 22 for types A to F (Step-1), the sorting information is stored (Step-1).
2) Then, the glass ID and the glass information are searched from the n-th stage (1 ≦ n ≦ 25) of the actual cassette 3A (Step-3,
4) A transfer command for transferring the n-stage glass substrate 2 to the empty cassette 3B of the type-specific sorting stage 22 of the glass information (A to F) is output to the transfer robot 25 (step 1).
5). Then, when a transfer end signal is input from the transfer robot 25 (step-6), as described above, the memory of the transfer destination cassette 3B is updated (step-7).

Next, the cassette 3 whose memory is updated
It is checked whether or not B is full (the glass ID is stored up to the bottom) (step-8). If it is full, the transfer is stopped, and the glass information (location information) and the cassette I
A full signal comprising a list of D and the stored glass ID is output to the controller 12 (step-9). When the cassette 3 of the location information is unloaded and the cassette ID of the next empty cassette is input (step-10), the memory of this location is initialized, and the cassette ID is set.
Is stored (step-11), and the transfer of the next glass substrate 2 is restarted.

Steps -4 to 13 are repeated until the 25 glass substrates 2 are transferred.
When the transfer (sorting) from the actual cassette 3A is completed (step-13), a sorting end signal is output to the controller 12 (step-14), and the process ends.

Next, the detailed operation of the controller 12 will be described with reference to FIG.
This will be described with reference to the flowchart shown in FIG. [Storing operation] (see FIG. 12) First, the barcode reader 5 provided on the first receiving tray 6
When the code (cassette ID) read by is input (step-1), the cassette ID is output to the host computer 13 (step-2). When the host computer 13 inputs the cassette ID and the storage information including the location information of the cassette storage space for storing the cassette 3 to be stored (including the empty cassette replenishment information when the empty cassette 3B is required) (step-).
3), store the storage information (step-4), output the location information to the loading / unloading device 10, and temporarily store the actual cassette 3 in the cassette storage space (step-4).
5). Next, when the empty cassette replenishment information is included in the storage information (step-6), the signal lamp 17 is turned on (step-7), and when it is not included, the signal lamp 17 is turned off (step-6). 8). Then, when a storage end signal is input from the loading / unloading device 10 (step-
9) Output the cassette ID and the input end signal to the host computer 13 (step-10). [Sorting Operation] (See FIGS. 13 and 14) The cassette ID and location information of the empty cassette 3B output from the host computer 13 to the type-specific sorting stage 22 of A to F, and the cassette ID of the actual cassette 3A to be sorted are displayed. When location information, glass information (six types) of the glass substrates 2 stored in the cassette, and sorting information including a glass ID are input (step-1), the sorting information is stored (step-2), and a loading / unloading device is provided. When the location information of the empty cassette 3B to be output to the type-specific sorting stage 22 of A to F is output to step 11 (step-3) and the output end signal to the type-specific sorting stage 22 of A to F is input from the loading / unloading device 11, (Step-4), storing the cassette ID placed on the type-specific sorting stage 22 of A to F (Step-5). Next, the location information of the actual cassette 3A to be sorted first is output to the loading / unloading device 11 (steps-6, 7), and an output end signal from the loading / unloading device 11 to the sorting source stage 21 is input (step-8). Then, the cassette ID placed on the sorting source stage 21 is stored (step-9).

Next, a drive command signal for the moving arm 28 is output to the centering device 29 (step-10), and a drive end signal is input from the centering device 29 (step-11).
The glass information (6) of the glass substrate 2 stored in the actual cassette 3A placed on the sorting source stage 21 is sent to a controller (hereinafter, referred to as a transfer controller) 42 of the transfer robot 25.
Type), the glass ID, and the cassette ID of the empty cassette 3B placed on the type-specific sorting stage 22 of A to F.
Is output (step-12).

When the full information (cassette ID) is input from the transport controller 42 (step-13),
The full cassette to the host computer 13
A request signal for requesting the location information for moving the sorting cassette 3) and the location information of the empty cassette 3B to be prepared next (step-14). When these information are input from the host computer 13 (step-
15) First, storage information consisting of the location information of the sorting cassette 3 and the location information of the cassette storage space of the shelf 4 for storing the sorting cassette 3 is output to the loading / unloading device 11 (step-16). When the end signal is input (step 17), the empty cassette 3B
Is output (step-18), and the movement end signal is input from the loading / unloading device 11 (step-19). The information of the moved empty cassette 3B is stored (step-20), and information including the cassette ID of the empty cassette 3B is output to the transport controller 42 (step-21).

When a sorting end signal is input from the transport controller 42 (step-22), a request signal for requesting location information for moving the empty cassette 3 which has been sorted and becomes an empty cassette 3B is output to the host computer 13. (Step 23). When this information is input from the host computer 13 (step 24), the storage information including the location information of the sorting source stage 21 and the location information of the cassette storage space of the shelf 4 for storing the sorted cassettes 3 is sent to the loading / unloading device 11. When the output is performed (step-25) and a storage end signal is input from the loading / unloading device 11 (step-26), the next actual cassette 3A is sorted (steps-27, 28). When all sorting is completed (step-28), the host computer
A sort end signal is output to 13 (step-29). [Retrieving Operation] (see FIG. 15) When the retrieval information including the cassette ID and the location information of the cassette storage space for storing the cassette 3 to be retrieved is input from the host computer 13 (step-
1), store the retrieval information (step-2), output the location information to the loading / unloading device 10, temporarily release the cassette 3 to the second receiving tray 8 (step-3), and terminate the retrieval from the loading / unloading device 10. When a signal is input (step-4), a cassette ID and an input end signal are output to the host computer 13 (step-5).

The movement operation of the cassette 3 having the above configuration is illustrated.
This is explained according to 16. When the cassette 3 is placed on the first receiving tray 6 and its cassette ID is read by the bar code reader, the cassette 3 is stored in the cassette storage space 4A of the shelf 4 based on the storage information of the host computer 13. Based on the sorting information of the host computer 13, the empty cassette 3B is moved to the type-based sorting stage 22, and the actual cassette 3A to be sorted is moved to the sorting source stage 21. Next, based on the sorting information of the host computer 13,
The glass substrate 2 of the actual cassette 3A is transferred to the empty cassette 3B of the type-specific sorting stage 22. The full sorting cassette 3 is the host computer
Based on the storage information of 13, the cassettes are stored in the cassette storage space of the shelf 4, and the empty cassettes 3 </ b> B are refilled to the type-specific sorting stage 22. The sorted cassettes 3 having been sorted are stored in the cassette storage space of the shelf 4 based on the movement information of the host computer 13, and the next actual cassette 3A is moved to the sorting source stage 21. The sorting cassette 3 is delivered to the second receiving tray 8 based on the delivery information of the host computer 13.

The sorting cassette 3 may be directly discharged from the type-specific sorting stage 22 to the second receiving tray 8. Thus, the actual cassette 3A and the empty cassette 3B
Are supplied to the stages 21 and 22 by the loading / unloading device 11, respectively. The glass substrates 2 of the actual cassette 3A are sorted by type based on the glass information by the transfer robot 25, and the glass substrates 2 of the actual cassette 3A are sorted. When the process is completed, the glass substrate 2 on which the empty cassette 3B is sorted
When it is full, it is replaced by the loading / unloading device 11.
Therefore, it is possible to eliminate the presence of a worker who is a source of dust in the clean room, and to eliminate the damage of the glass substrate 2 by the worker by automating the handling of the cassette 3 of the glass substrate 2. In addition, work errors can be eliminated, and information on the glass substrate 2 and the cassette 3 can be automatically managed.

Also, the actual cassette 3A, the empty cassette 3B, and the sorting cassette 3 are stored and stored in the cassette storage space of the shelf 4 and supplied to the stages 21 and 22, so that the sorting operation can be performed quickly. Thus, the overall manufacturing efficiency can be improved, and the storage space for the cassettes 3 can be reduced by providing the shelves 4. Further, since the clean air is supplied to the shelf 4 and the loading / unloading device 11, the cassette 3 can be supplied and stored in a clean state.

FIG. 17 shows another configuration of the load storage facility. An inspection device 51 for testing the glass substrate 2 is adjacent thereto, and a roller conveyor device for transporting the cassette 3 from the inspection device 51
The terminal end of 52 is disposed directly in the load storage facility 1, and an ascending and descending sorting stage 21 ′ is provided at the terminal position, and the actual cassette 3 conveyed by the roller conveyor device 52 is provided.
A is configured to be mounted on a pedestal.

When the actual cassette 3A is directly loaded from the inspection device 51 via the conveyor device 52, the controller 12
Transfer to the pedestal of the sorting source stage 21 ', and transfer robot 25
Stage 22 according to type based on glass information
The glass substrates 2 are sorted into empty cassettes 3B. Of course, the same operation as the operation of the embodiment described with reference to FIGS. 10 to 16 can also be executed.

With this configuration, the loading of the actual cassette 3A can be automated, a more rapid sorting operation can be performed, and the overall manufacturing efficiency can be improved. In the above embodiment, the upper part of the gantry 23 is not used as a shelf, but it can be formed as a shelf, and the storage space of the cassette 3 can be increased. Conversely, the shelf 4 can be moved to the space of the gantry 23 and a part of the shelf 4 can be used as the gantry 23, so that the installation space as equipment can be reduced and the space in the factory can be used effectively. be able to.

As described above, according to the first aspect of the invention, the actual cassette and the empty cassette are supplied to each stage by the loading / unloading device, and the substrate of the actual cassette is loaded by the substrate loading / unloading device based on the information of each substrate. Sorting cassettes sorted by type and filled with sorted substrates
Conveyed from type-specific sorting stage to cassette storage section on shelf
Empty cassette from the cassette storage section of the shelf.
By replenishing to the type-specific sorting stage, it is possible to eliminate the presence of workers in the board sorting work, thereby eliminating the source of dust in the clean room, and by automating cassette handling. In addition, it is possible to prevent the damage of the substrate by the operator, eliminate the operation error, and automatically manage the information of the substrate and the cassette. Further, by providing shelves, the storage space for cassettes can be reduced.

According to the second invention, the type of the substrate is not
It is set by the position of a good circuit, and by the position of a bad circuit.
Substrates can be sorted . According to the third invention,
If the cassette is transported from the inspection device and the cassette
Loading and unloading of cassettes between the cassette storage section and the board sorting device
Is carried out, it is received directly from the inspection device
Loading and unloading of cassettes can be automated. The fourth
According to the present invention, a direct input from an inspection apparatus for testing a substrate is provided.
From the actual cassette containing the substrates,
The board is sorted by the board sorting apparatus based on the information of the board.
Automated loading of actual cassettes by sorting
Can be performed more quickly,
Overall manufacturing efficiency can be improved. Also the fifth
According to Ming, cassettes are stored above the substrate sorting device
With a plurality of cassette storage sections
The storage space of the set can be increased.

[Brief description of the drawings]

FIG. 1 is a plan view of a load storage facility provided with a substrate sorting apparatus according to an embodiment of the present invention.

FIG. 2 is a front view of the same load storage facility.

FIG. 3 is a side view of the same load storage facility.

FIG. 4 is an explanatory diagram of a cassette and a glass substrate housed in the same load storage facility.

FIG. 5 is an explanatory diagram of a type of a glass substrate stored in the same load storage facility.

FIG. 6 is a plan view of a substrate sorting apparatus of the same load storage facility.

FIG. 7 is a substrate sorting apparatus (FIG. 6) AA of the same load storage facility.
It is an arrow view.

FIG. 8 is a substrate sorting apparatus (FIG. 6) BB of the same storage facility.
It is an arrow view.

FIG. 9 is a control configuration diagram of the same load storage facility.

FIG. 10 is an operation flowchart of a transfer robot controller of the substrate sorting device of the same load storage facility.

FIG. 11 is a memory map of a transfer robot controller of the substrate sorting apparatus of the same load storage facility.

FIG. 12 is an operation flowchart of a controller of the same load storage facility.

FIG. 13 is an operation flowchart of a controller of the same load storage facility.

FIG. 14 is an operation flowchart of a controller of the same load storage facility.

FIG. 15 is an operation flowchart of a controller of the same load storage facility.

FIG. 16 is an explanatory diagram of the operation of the same load storage facility.

FIG. 17 is a configuration diagram of a load storage facility provided with a substrate sorting device according to another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Load storage equipment 2 Glass substrate 3 Cassette 3A Actual cassette 3B Empty cassette 4 Shelf 5 Barcode reader 6,8 Loading table 9 Substrate sorting device 10 Constant path 11 Loading / unloading device (loading / unloading device) 12 Controller 16 Clean air supply unit (clean) Equipment) 21 Sorting stage 22 Sorting stage by type 23 Mount 24 Constant path 25 Transfer robot (substrate loading / unloading device) 27,30 Base 29 Centering device 42 Transfer robot controller 51 Inspection device 52 Roller conveyor device

Continuation of the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) B65G 1/00-1/20 B07C 1/00-9/00 H01L 21/68

Claims (5)

(57) [Claims] 1. A substrate sorting apparatus for sorting a plurality of substrates of different types by type based on information on each of the substrates, a shelf having a plurality of cassette storage sections for storing cassettes for storing the substrates, and the cassette A loading / unloading device provided with a loading / unloading device for loading / unloading a substrate, wherein the substrate sorting device comprises: a sorting source stage on which a real cassette containing a plurality of substrates of different types serving as sorting sources is placed; A gantry on which a plurality of type-specific sorting stages for placing empty cassettes to be sorted are arranged; and a substrate loading / unloading device for sorting substrates from the actual cassette into the empty cassettes based on information on the respective substrates. The loading / unloading device is filled with the sorted substrates.
Sorting cassette is before the type sorting stage.
Transported to the cassette storage section of the shelf,
Empty cassettes are added to the sorting stage by type
A load storage facility provided with a substrate sorting device, characterized by being filled . 2. The type of substrate depends on the location of the defective circuit.
Load storage facility with a substrate sorting apparatus according to claim 1, wherein the set. 3. A plurality of substrates of different types,
Board sorting equipment that sorts by type based on board information
And a plurality of cassettes for storing cassettes for storing the substrates.
A shelf having a set storage section and a loading / unloading of the cassette are performed.
Inspection device that has a loading / unloading device and tests the substrate
Is an adjacent cargo storage facility, and the cassette is carried by the carry-in / out device from the inspection device.
The position to be sent, the cassette storage section of the shelf, and the substrate sorting
Loading and unloading of the cassette with the storage device
Storage equipment equipped with a substrate sorting device. Wherein different types of the plurality of substrates, each of these
Board sorting equipment that sorts by type based on board information
And a plurality of cassettes for storing cassettes for storing the substrates
A shelf having a storage section, between the substrate sorting apparatus and a cassette storage section of the shelf;
It has a carry-in / out device for carrying the cassette, and is directly stored from an inspection device for testing the substrate,
From the actual cassette containing the substrates,
The board is sorted by the board sorting apparatus based on the board information.
Package equipped with a substrate sorting device characterized by being separated
Storage equipment. 5. A cassette is held above a substrate sorting apparatus.
It is characterized by providing a plurality of cassette storage sections for pipes
A substrate sorting apparatus according to any one of claims 1 to 4.
Cargo storage equipment equipped with.