JP2995300B1 - Surface improvement method for machine element parts - Google Patents

Abstract

The object of the present invention is to provide a surface improvement method capable of improving a surface defect such as a deteriorated portion or a defective portion of a surface and a surface defect such as surface roughness or surface roughness with high accuracy. . In the present invention, a tool (10) is placed in a reaction chamber (2).
After being placed in 1), the gas phase raw material is intermittently supplied to the reaction chamber (21) under the condition that the crystal growth on the reference surface (13) is minimized. Is applied.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for improving a surface defect such as a defective portion or a deteriorated portion, or a surface roughness or a surface roughness, present on a reference surface of a machine element part such as a tool or a bearing. Things.

[0002]

2. Description of the Related Art Mechanical element parts such as tools and bearings, due to their structure, cause various surface defects such as deterioration of wear and the like and deformation / destruction with long-term use. The mechanical component having the surface defect has a remarkably reduced function and performance. For this reason, when such mechanical element parts are used continuously, desired functions and performances cannot be expected.

Conventionally, such surface defects of mechanical element parts have been dealt with by replacing them with new parts.

[0004] However, in order to exchange a new part, a large number of machine element parts must be prepared in advance, which significantly increases the running cost of a machine to which the machine element parts are applied.

[0005] Therefore, it is desired to develop a countermeasure capable of reducing the running cost.

[0006] On the other hand, in recent years, mechanical components are becoming more sophisticated and finer, and the required accuracy for surface quality is becoming stricter. For this reason, there is a demand for the development of a technology capable of improving surface defects such as surface roughness and surface roughness of mechanical element components at the level of one atom or one atom.

[0007]

By the way, as a surface treatment method for machine element parts, conventionally, a CVD (chem) method has been used.
Ical vapor deposition) method is used. This CVD method is a method in which a gas of a reaction system molecule is supplied onto a heated substrate, and a product is deposited on the substrate by various reactions such as decomposition / reduction / substitution. For example, a hard material such as TiN is deposited. Applied to harden the surface of machine element parts.

[0008] When this CVD method is applied, it is possible to harden the mechanical element parts by the hard material deposited on the surface, and at the same time, it is possible to eliminate defective portions such as small holes existing on the surface. Therefore, it is possible to improve the surface roughness.

However, in the above-mentioned CVD method, when irregularities are present on the surface, the irregularities may be increased. That is, in the CVD method, since crystals generally grow in a step flow mode, if there are irregularities on the surface of the mechanical element component, the crystal growth on the convexities becomes dominant, and the irregularities become more prominent. Results.

[0010] Therefore, CVD is applied to mechanical element parts having deterioration, relatively large defects, or surface roughness.
When the method is applied, a situation in which deterioration, loss, or surface roughness increases is caused, and it becomes difficult to improve these surface defects.

SUMMARY OF THE INVENTION In view of the above circumstances, the present invention is to improve, with high precision, any surface defects such as deteriorated or defective portions of a surface due to use of mechanical element parts and surface defects such as surface roughness and surface roughness. It is an object of the present invention to provide a method for improving a surface that can be performed.

[0012]

SUMMARY OF THE INVENTION The present invention is a method for remedying a surface defect present on a reference surface of a machine element component, comprising the steps of: placing the machine element component in a predetermined reaction chamber; Intermittently supplying a gas-phase raw material to the reaction chamber in order to perform the atomic layer growth method on the mechanical element component under the condition that the crystal growth on the reference surface is minimized. That is, in the present invention, the atomic layer growth method (a
Tomic layer epitaxy is applied to improve surface defects of machine element parts.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings showing one embodiment.

FIG. 7 is a schematic diagram for explaining the principle of the atomic layer growth method applied to the present invention. Hereinafter, the atomic layer growth method will be described first with reference to FIG.

The sample denoted by reference numeral 1 in FIG. 7A has a surface defect 2 on the x-plane serving as a reference surface. Surface defect 2
Is configured to have a pair of y-planes inclined with respect to the x-plane and an x-plane extending between these y-planes.

This sample 1 is placed in a reaction tube (not shown), and a gas-phase raw material is supplied intermittently (in a pulse sequence) under conditions that minimize crystal growth on the x-plane. Here, since the atomic layer growth method positively utilizes the chemical reaction of the surface, it is sensitive to the surface state and has extremely high selectivity to the growth surface. Therefore, the surface temperature of sample 1
By appropriately changing the conditions for supplying the vapor-phase raw material, such as the supply amount of the vapor-phase raw material and the supply time of the vapor-phase raw material, it is possible to select the one that minimizes the crystal growth on the x-plane as described above. .

When the gas-phase raw material is supplied to the reaction tube under these conditions, the growth rate difference depending on the plane orientation causes
As shown in FIG. 7B, crystal growth on the y-plane predominantly proceeds. In addition, the vapor phase raw material supplied to the reaction tube itself stops growth by one layer of molecules (self-stopping mechanism of growth), so that thin film formation can be easily and accurately achieved.
Furthermore, the crystal growth is a two-dimensional island.

As a result, according to the above-mentioned atomic layer growth method, without increasing the irregularities existing on the surface of the sample 1,
As shown in FIG. 7C, it is possible to obtain a flat x-plane at the atomic level.

FIG. 1 shows a method of repairing a tool using this atomic layer growth method.

As shown in FIG. 4, the tool 10 has a columnar base portion 11 and a single projecting portion 12 spirally provided on the outer peripheral surface thereof. The protruding portion 12 is originally formed in a triangular shape having a uniform cross section, and is fixed to the above-described base portion 11 via one side thereof. In the tool 10 to be repaired, as shown in FIG. 2A, various surface defects such as a worn portion, a deformed portion, and a broken portion are generated on the reference surface 13 of the protruding portion 12 with long-term use. Shall be

Hereinafter, a method of repairing a surface defect generated in the projecting portion 12 of the tool 10 will be described.

First, as shown in FIG. 1, a tool 10 is arranged inside a reaction tube 20. In this case, it is preferable that the protruding portion 12 is arranged so that the axis of the base portion 11 extends along the vertical direction so that the entire length region of the protruding portion 12 can come into contact with the internal atmosphere of the reaction chamber 21 formed by the reaction tube 20.

Next, a gas phase raw material is supplied to the reaction chamber 21 in a pulse sequence. At this time, a condition that minimizes crystal growth on the reference surface 13 serving as a repair target surface is selected. For example, as shown in FIG. 3, when the crystal growth per one cycle of the material supply on the surface other than the reference surface 13 is one molecular layer, the crystal growth on the reference surface 13 is about 1/4 molecular layer. Is selected (part of range a in FIG. 3). In this case, when the surface defect to be repaired has a complicated surface, a plurality of conditions may be combined, or the plurality of conditions may be appropriately switched to supply the gas-phase raw material.

When the projecting portion 12 of the tool 10 is formed of TiN, for example, an organic titanium metal and a hydride of nitrogen (ammonia) are alternately supplied as a gaseous raw material in a pulse sequence. When the protrusion 12 of the tool 10 is made of aluminum oxide, the organic aluminum metal and the hydride of oxygen (hydrogen peroxide) are alternately supplied in a pulse sequence.

When the gas-phase raw material is supplied to the reaction tube 20 under these conditions, the above-described feature of the atomic layer growth method causes
In the protruding portion 12, the growth of the crystal other than the reference surface 13 becomes dominant. That is, the crystal grows selectively only in the portion of the tool 12 to be repaired in the projecting portion 12. Therefore, as shown in FIG. 2B, the tool 10 can be repaired without increasing the unevenness existing on the surface, and the tool 10 can be reused. As a result, the running cost of the processing machine to which the tool 10 is applied can be reduced.

Moreover, according to the above method, the tool 10 can be repaired at the atomic level. Therefore, the present invention can be applied to a tool having a microstructure on a micro order or a nano order. In addition, the amount of raw materials used is minimized, which is advantageous in terms of cost for restoration.

Further, according to the above-mentioned method, since the vapor-phase source itself automatically stops the crystal growth in one molecule layer, the control and the operation at the time of restoration do not become complicated.

In the above-described embodiment, the tool 10
Although the method for repairing is described as an example, the repair target is not necessarily limited to the tool. For example, as shown in FIG. 5, a surface defect generated in the rolling element 31 and the inner and outer races 32 and 33 constituting the bearing 30 is repaired, and FIG.
As shown in FIG. 7, the present invention can be applied to a case where a surface defect generated on the outer surface 41 of the structural component 40 is repaired. Further, the present invention is not limited to the repair of mechanical element parts, but can be applied to a case where various surface treatments such as improvement of surface roughness or surface roughness generated in a manufacturing stage or hardening treatment are performed. For example, if a process for forming a TiN layer on the surface of a machine element component is performed by applying the above method, it is possible to improve the surface defect simultaneously with the surface hardening process.

[0029]

As described above, according to the present invention,
Since the atomic layer growth method is applied to the machine element parts under the condition that the crystal growth on the reference surface is minimized, the deterioration and deficiency of the surface due to use, as well as the surface roughness and surface roughness, etc. All of the surface defects can be improved with high accuracy.

Further, according to the present invention, since the surface of the mechanical element component can be improved at the atomic level, the present invention can be applied to a mechanical element component having a microstructure on a micro order or a nano order. It is. Also, the amount of raw materials used is minimized, which is advantageous in terms of cost for surface improvement.

Further, according to the present invention, since the vapor phase source itself automatically stops the growth in one molecule layer, the work for improvement is not complicated.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing a method for improving the surface of a machine element component according to the present invention.

FIGS. 2A and 2B show a surface improvement state of a machine element component by the surface improvement method shown in FIG. 1, wherein FIG. 2A is an enlarged sectional view of a main part showing a state before the improvement, and FIG. It is a principal part expanded sectional view shown.

FIG. 3 is a graph showing an example of supply conditions of a gas-phase raw material applied in the surface improving method shown in FIG.

FIG. 4 is a view showing a tool to which the surface improvement method shown in FIG. 1 is applied.

FIG. 5 is a diagram showing an application example of a surface improvement method according to the present invention.

FIG. 6 is a diagram showing an application example of a surface improvement method according to the present invention.

FIG. 7 is a conceptual diagram for explaining an atomic layer growth method applied to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Tool 13 Reference surface 21 Reaction chamber 30 Bearing 40 Structural parts

Continuation of the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) B23P 6/00 B01J 19/00 C23C 16/04 C23C 16/34 H03K 5/13

Claims (1)

(57) [Claims] 1. A method for improving a surface defect existing on a reference surface of a mechanical element component, the method comprising: disposing the mechanical element component in a predetermined reaction chamber; and growing a crystal on the reference surface. Intermittently supplying a gas-phase raw material to the reaction chamber in order to perform the atomic layer growth method on the mechanical element component under the minimum condition.