JP2592340Y2 - 2-axis photoelectric autocollimator - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION This invention relates to a two-axis photoelectric autocollimator.

[0002]

2. Description of the Related Art FIG. 3 is an overall configuration diagram of a conventional two-axis photoelectric autocollimator.

A conventional two-axis photoelectric autocollimator comprises a reticle 10 disposed at a rear focal position of an objective lens 106.
3, an illumination system for irradiating the focusing screen 103 with light, and two CCD line sensors 110 and 130 arranged at positions conjugate with the focusing screen 103 in the rear optical path of the objective lens 106.
And

A light source 101 and a condenser lens 102 constitute an illumination system, and illuminate a reticle 103. Focusing plate 10
3, a slit 104V for pitching and a slit 104H for yawing orthogonal to the slit 104V for pitching are formed.

The light passing through the reticle 103 is reflected by the semi-permeable membrane 105a of the half prism 105, and
At 06, the light beam becomes a parallel light beam and travels to the external mirror 107. The light reflected by the total reflection film 107a of the external mirror 107 is
The light again enters the objective lens 106 to become convergent light, passes through the semi-permeable membrane 105a of the half prism 105, and then enters the composite prism 108, where it is separated and directed to the light receiving surfaces of the CCD line sensors 110 and 130. .

The light transmitted through the semi-permeable film 108a of the composite prism 108 is applied with power in the Y-axis direction by a cylindrical lens 109H having an arc surface centered on an axis parallel to the X-axis. As a result, the yaw slit 104 is formed on the light receiving surface of the CCD line sensor 130 which is the image forming surface.
The H slit image 111H is obtained as an image elongated in the Y-axis direction.

On the other hand, the semi-permeable membrane 108 of the composite prism 108
The light reflected by a is applied with power in the X-axis direction by a cylindrical lens 109V having an arc-shaped surface centered on an axis parallel to the Y-axis. As a result, the image plane C
On the light receiving surface of the CD line sensor 110, a slit image 111V of the pitching slit 104V is obtained as an image elongated in the Z-axis direction.

FIG. 4 is an overall configuration diagram of another conventional two-axis photoelectric autocollimator.

The two-axis photoelectric autocollimator is shown in FIG.
Unlike the two-axis photoelectric autocollimator described above, two focusing screens 113 and 12 for yawing detection and pitching detection are provided.
3, two illumination systems corresponding to the two focusing plates 113 and 123, and dichroic prisms 115 and 118.

One of the focusing screens 113 has a slit 114H for detecting yawing, and the other focusing screen 123 has a slit 114V for detecting pitching. The focusing screen 113 includes the light source 101 and the condenser lens 10.
2 and the reticle 12
3 is illuminated by an illumination system including a light source 121 and a condenser lens 122.

Each slit 114 of the focusing plates 113 and 123
The light emitted from H and 114V is separated into different wavelength ranges λ ₁ and λ ₂ by the dichroic film 115a of the dichroic prism 115, combined, and travels to the half prism 105. Dichroic prism 115
Is reflected by the semi-permeable membrane 105a of the half prism 105, becomes a parallel light beam by the objective lens 106, and travels to the external mirror 107. Total reflection film 107 of external mirror 107
The light reflected by a is incident on the objective lens 106 again and becomes convergent light, and the semi-permeable film 105a of the half prism 105
, And then enter the dichroic prism 118. The light incident on the dichroic prism 118 is separated by the dichroic film 118a into the above-described wavelength ranges λ ₁ and λ ₂ and travels to the light receiving surfaces of the CCD line sensors 110 and 130, respectively.

When the spectral characteristics of the dichroic prisms 115 and 118 are made identical, the dichroic prism 1
Let λ _{1 be} the wavelength range transmitted through the light source 18 and λ _{2 be} the wavelength range reflected by the dichroic prism 118.
Wavelength region λ exiting slit 114H for yawing detection
The light ₁ forms a slit image 116H for yawing detection on the light receiving surface of the CCD line sensor 130,
The light in the wavelength range λ ₂ that has exited the pitching detection slit 114V of No. 3 forms a pitching detection slit image 116V on the light receiving surface of the CCD line sensor 110.

[0013]

[Problems to be Solved by the Invention] 2 shown in FIG. 3 and FIG.
In the axial photoelectric autocollimator, dedicated CCD line sensors 110 and 130 are used to detect yawing and pitching as described above, so that two processing systems are used in accordance therewith. However, there is a problem that the structure becomes complicated and the manufacturing cost increases.

The present invention has been made in view of such circumstances, and an object thereof is to provide a two-axis photoelectric autocollimator which has a simple structure and can reduce the manufacturing cost.

[0015]

In order to solve the above-mentioned problems, a two-axis photoelectric autocollimator of the present invention is arranged at a focal position of an objective lens, and a reflecting member arranged in front of the objective lens. A target for emitting an X-axis ray and a Y-axis ray through the objective lens; and dividing the X-axis ray and the Y-axis ray reflected by the reflection member and transmitted through the objective lens, and An optical splitting means for splitting the light into a Y-axis light beam, and the X light split by the optical splitting means.
In a two-axis photoelectric autocollimator provided with light-receiving means for receiving an axial ray and a Y-axis ray, the optical paths of the X-axis ray and the Y-axis ray split by the optical splitting means are bent in parallel to each other. Optical path bending means for guiding to the light receiving means.

[0016]

The optical paths of the X-axis light beam and the Y-axis light beam split by the optical splitting means are bent in parallel to each other by the optical path bending means and guided to the light receiving means. Can be detected.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an overall configuration diagram of a two-axis photoelectric autocollimator according to one embodiment of the present invention. The two-axis photoelectric autocollimator includes a reticle 3 disposed at a rear focal position of an objective lens 6, an illumination system for irradiating the reticle 3 with light, and a light path in the rear optical path of the objective lens 6. A CCD line sensor 10 disposed at a position conjugate with the focusing screen 3 and a focusing screen 3
A half prism 5 for reflecting light transmitted through the half mirror 5 to an external mirror 7; and a composite prism 8 for separating reflected light from the external mirror 7 transmitted through the half prism 5 and guiding the reflected light to the light receiving surface of the CCD line sensor 10. It has.

The light source 1 and the condenser lens 2 constitute an illumination system, and illuminate the reticle 3. The focusing screen 3 is formed with a slit 4V for pitching and a slit 4H for yawing orthogonal to the slit 4V for pitching.

The compound prism 8 includes a semi-permeable film 8a for separating light from the external mirror 7, a total reflection surface 8b for reflecting light transmitted through the semi-permeable film 8a in the Y-axis direction, and a semi-permeable film 8a. A total reflection surface 8c for reflecting the light reflected by the Y-axis in the Y-axis direction, and a power X in the Z-axis direction for the light reflected by the total reflection surface 8b.
A cylindrical lens 9H having an arc surface centered on an axis parallel to the axis, and a cylindrical lens having an arc surface centered on an axis parallel to the X axis for applying power in the Z-axis direction to light reflected on the total reflection surface 8c 9V. The light reflected by the total reflection surface 8b and the light reflected by the total reflection surface 8c are parallel to each other, and have the same optical path length to the light receiving surface of the CCD line sensor 10.

The light that has passed through the focusing screen 3 is reflected by the semi-permeable membrane 5a of the half prism 5, becomes a parallel light beam by the objective lens, and travels to the external mirror 7. Total reflection film 7 of external mirror 7
The light reflected by a enters the objective lens 6 again to become convergent light, passes through the semi-permeable membrane 5a of the half prism 5, and then enters the composite prism 8.

The light incident on the composite prism 8 and transmitted through the semi-permeable membrane 8a is reflected on the total reflection surface 8b in the Y-axis direction.
Power is applied in the Z-axis direction by the cylindrical lens 9H. As a result, a slit image 11H of the yawing slit 4H is obtained as an image elongated in the Z-axis direction on the light receiving surface of the CCD line sensor 10, which is an image forming surface.

On the other hand, the light reflected by the semi-permeable film 8a of the composite prism 8 is reflected in the Y-axis direction, and then is applied with power in the Z-axis direction by the cylindrical lens 9V. As a result, a slit image 11V of the pitching slit 4V is obtained as an image elongated in the Z-axis direction on the light receiving surface of the CCD line sensor 10, which is an image forming surface.

The slit image 11 obtained as described above
The amount of movement of the H and the slit image 11V on the light receiving surface of the CCD line sensor 10 is detected by the light receiving element 10a of the CCD line sensor 10.

In the two-axis photoelectric autocollimator of this embodiment, the light receiving surface of the CCD line sensor 10 is arranged parallel to the XZ plane. When yawing θ _H is given to the external mirror 7 in this arrangement, the slit image 11H moves in the X direction, and the slit image 11V moves in the Z direction. C
Focusing on the intersection between the light receiving element 10a of the CD line sensor 10 and the slit images 11H and 11V, that is, the light receiving position, the light receiving position moves when the slit image 11H moves in the X axis direction, but the slit image 11V moves in the Z axis direction. Does not change the light receiving position.

On the other hand, when the pitching θ _V is given to the external mirror 7, the slit image 11H moves in the Z direction, and the slit image 11V moves in the X axis direction. Light receiving element 10a of CCD line sensor 10 and slit images 11H, 11
Focusing on the intersection with V, that is, the light receiving position, when the slit image 11H moves in the Z-axis direction, the light receiving position does not change, but when the slit image 11V moves in the X-axis direction, the light receiving position also moves.

The above description indicates that the CCD line sensor 10 is
This shows that the yawing amount θ _H and the pitching amount θ _V can be detected independently of each other.

According to the two-axis photoelectric autocollimator of this embodiment, two phenomena of yawing and pitching can be detected by one CCD line sensor 10, so that a single processing system is connected to the sensor. As a result, the structure can be simplified, and downsizing and reduction in manufacturing cost can be realized.

FIG. 2 is an overall configuration diagram of a two-axis photoelectric autocollimator according to another embodiment of the present invention. Portions common to the above-described embodiments are denoted by the same reference numerals, and description thereof is omitted.

The two-axis photoelectric autocollimator of this embodiment differs from the two-axis photoelectric autocollimator of the previous embodiment in that two focusing plates for yawing detection and pitching detection are provided. 13, 23, two illumination systems corresponding to the two reticle 13, 23, and each slit 14H, 1 of the reticle 13, 23
A dichroic prism 15 that combines the light emitted from 4V into wavelength ranges λ ₁ and λ ₂ and combines them, and separates the light transmitted through the half prism 5 into the aforementioned wavelength ranges λ ₁ and λ ₂ ,
And a dichroic prism 18 for reflecting light to the light receiving surface of the CCD line sensor 10.

A slit 14H for yawing detection is formed in one focusing screen 13, and a slit 14V for pitching detection is formed in the other focusing screen 23. The reticle 13 is illuminated by an illumination system composed of the light source 1 and the condenser lens 2, and the reticle 23 is illuminated by an illumination system composed of the light source 21 and the condenser lens 22.

The dichroic prism 18 is a dichroic film 18 for separating reflected light from the external mirror 7.
a, a total reflection surface 18b for reflecting light transmitted through the dichroic film 18a in the Y-axis direction, and a dichroic film 18
total reflection surface 18c for reflecting the light reflected by a in the Y-axis direction
It is composed of Total reflection surface 18b and total reflection surface 18c
Are reflected parallel to each other, and the optical path lengths to the light receiving surface of the CCD line sensor 10 are also equal.

Each slit 14H, 1 of the focusing screens 13, 23
The light emitted from the 4V is separated by the dichroic film 15a of the dichroic prism 15 into different wavelength ranges λ ₁ ,
It is synthesized on divided into lambda _2, ha - towards Fupurizumu 5. The light exiting the dichroic prism 15 is reflected by the semi-permeable membrane 5a of the half prism 5, becomes a parallel light beam by the objective lens 6, and travels to the external mirror 7. The light reflected by the total reflection film 7a of the external mirror 7 enters the objective lens 6 again to become convergent light, passes through the semi-permeable film 5a of the half prism 5, and then enters the dichroic prism 18. When the spectral characteristics of the dichroic prisms 15 and 18 are the same, light in the wavelength range λ ₁
Is transmitted through the dichroic film 18a, and the light in the wavelength range λ ₂ is transmitted through the dichroic film 18a of the dichroic prism 18.
Reflected by Here, the light in the wavelength range λ ₁ is light from the slit 14H for yawing detection, and the light in the wavelength range λ ₂ is light from the slit 14V for pitching detection. The light in the wavelength range λ ₁ transmitted through the dichroic film 18a of the dichroic prism 18 is reflected on the total reflection surface 18b in the Y-axis direction, and forms a slit image 16H for yawing detection on the light receiving surface of the CCD line sensor 10. The light in the wavelength range λ ₂ reflected by the dichroic film 18a of the dichroic prism 18 is reflected by the total reflection surface 18c in the Y-axis direction,
A slit image 16V for pitching detection is formed on the light receiving surface of the CD line sensor 10.

According to the two-axis photoelectric autocollimator of this embodiment, the parallel light reflected by the total reflection surface 18b and the total reflection surface 18c reaches the light receiving surface of the CCD line sensor 10 and receives light. The slit image 16H of the slit 14H for yawing detection and the slit image 16V of the slit 14V for pitching detection are connected on the
The amount of movement on the light receiving surface of H, 16V is the CCD line sensor 1
It is detected by the zero light receiving element row 10a, and the same operation and effect as in the first embodiment can be obtained.

In each of the above embodiments, for simplicity of explanation, the CCD line sensor 10 is placed in a plane parallel to the XZ plane.
Is set, but CC is set on any plane other than the XZ plane.
The light receiving surface of the D line sensor 10 may be set. Further, the arrangement angle between the slit image on the light receiving surface of the CCD line sensor 10 and the light receiving element row 10a of the CCD line sensor 10 is set to 45 degrees. The resolution may be changed by arbitrarily setting the arrangement angle by changing the angle.

[0036]

As described above, according to the two-axis photoelectric autocollimator of the present invention, since two phenomena of yawing and pitching can be detected by a single light receiving means, the structure is simplified and the size is reduced. And a reduction in manufacturing cost.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a two-axis photoelectric autocollimator according to an embodiment of the present invention.

FIG. 2 is an overall configuration diagram of a two-axis photoelectric autocollimator according to another embodiment of the present invention.

FIG. 3 is an overall configuration diagram of a conventional two-axis photoelectric autocollimator.

FIG. 4 is an overall configuration diagram of another conventional two-axis photoelectric autocollimator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Light source 2 Condenser lens 3 Focusing plate 4H Slit for yawing 4V Slit for pitching 6 Objective lens 7 External mirror 8 Composite prism 8b, 8c Total reflection surface 10 CCD line sensor

Claims (1)

(57) [Scope of request for utility model registration] 1. A target which is disposed at a focal position of an objective lens and emits an X-axis ray and a Y-axis ray to a reflecting member disposed in front of the objective lens via the objective lens. The X reflected and transmitted through the objective lens
Optical splitting means for splitting an axial light ray and a Y-axial light ray and splitting them into the X-ray light ray and the Y-axial light ray; and a light-receiving means for receiving the X-ray light ray and the Y-axial light ray split by the optical splitting means A biaxial photoelectric autocollimator comprising: an optical path bending unit that bends the respective optical paths of the X-axis light beam and the Y-axis light beam split by the optical splitting unit in parallel with each other and guides them to the light receiving unit. A two-axis photoelectric autocollimator.