JP2017159522A - Liquid discharge head, liquid discharge unit, and liquid discharging device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To quickly attenuate a pressure wave generated in an individual liquid chamber.SOLUTION: A liquid discharge head has: plural nozzles 4 for discharging a liquid; plural individual liquid chambers 6 with which the nozzles 4 are communicated; and a common liquid chamber 10 which is communicated with the plural individual liquid chambers 6. The liquid discharge head comprises a holding substrate 50 as a groove member having plural slit grooves 61 which constitute a flow channel, which can communicate one or plural individual liquid chambers 6 and the common liquid chamber 10 with each other, between the common liquid chamber 10 and the individual liquid chamber 6, and a lid member 80 which covers an opening side of the slit groove 61. The lid member 80 has a damper 81 which faces the slit groove 61 and is restorably deformable, and a damper chamber 82 which is located on a side opposite to the slit groove 61 with the damper 81 interposed therebetween.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a liquid discharge head, a liquid discharge unit, and an apparatus for discharging liquid.

  In the liquid discharge head, when the liquid in the individual liquid chamber is pressurized and discharged, the pressure wave propagates from the individual liquid chamber to the common liquid chamber, and the pressure wave reverses from the common liquid chamber to the other individual liquid chambers. Propagation causes crosstalk such as a change in ejection characteristics of nozzles corresponding to the other individual liquid chambers.

  2. Description of the Related Art Conventionally, there is a common liquid chamber in which a thin film exposed on the surface and a damper member including a thin film and a damper chamber that is in contact with the thickness direction and has a rigidity lower than that of the thin film are disclosed (Patent Literature). 1).

JP 2007-111831 A

  However, in the configuration in which the pressure wave transmitted to the common liquid chamber is attenuated, it takes time until the pressure wave generated in the individual liquid chamber reaches the reservoir and is attenuated. The pressure component propagating to the individual liquid chamber cannot be attenuated.

  Therefore, in particular, when the driving frequency is increased and the pressure wave due to the next discharge is repeatedly propagated before the pressure wave is attenuated in the common liquid chamber, the liquid discharge characteristics due to the pressure fluctuation in the common liquid chamber May vary.

  The present invention has been made in view of the above problems, and an object thereof is to reduce variations in liquid ejection characteristics.

In order to solve the above-described problem, a liquid discharge head according to claim 1 of the present invention includes:
A plurality of nozzles for discharging liquid;
A plurality of individual liquid chambers through which the nozzle communicates;
A common liquid chamber communicating with the plurality of individual liquid chambers,
Between the common liquid chamber and the individual liquid chamber,
A groove member having a plurality of slit grooves forming a flow path through one or more of the individual liquid chambers and the common liquid chamber;
A lid member covering the opening side of the slit groove,
The lid member is configured to include a reversibly deformable damper that faces the slit groove, and a damper chamber that is disposed on the opposite side of the slit groove with the damper interposed therebetween.

  According to the present invention, it is possible to reduce variations in liquid ejection characteristics.

FIG. 3 is an explanatory cross-sectional view along a direction orthogonal to the nozzle arrangement direction of the liquid ejection head according to the first embodiment of the present invention. FIG. 2 is a cross-sectional explanatory view along the nozzle arrangement direction corresponding to the AA line of FIG. 1. It is a plane explanatory drawing similarly equivalent to the BB line of FIG. It is an exploded perspective view similarly. It is the plane explanatory view which similarly saw the damper chamber member of the lid member from the holding substrate side. FIG. 6 is an explanatory plan view of a damper chamber member of a lid member in a liquid ejection head according to a second embodiment of the present invention as viewed from the holding substrate side. FIG. 10 is an explanatory plan view of a damper chamber member of a lid member in a liquid ejection head according to a third embodiment of the present invention as viewed from the holding substrate side. FIG. 10 is a cross-sectional explanatory diagram along a direction orthogonal to a nozzle arrangement direction of a liquid ejection head according to a fourth embodiment of the present invention. It is a plane explanatory view of a lid member similarly. FIG. 10 is a cross-sectional explanatory diagram along a direction orthogonal to a nozzle arrangement direction of a liquid ejection head according to a fifth embodiment of the present invention. It is a cross-sectional explanatory drawing along the direction orthogonal to the nozzle arrangement direction of the liquid ejection head according to the sixth embodiment of the present invention. It is a cross-sectional explanatory drawing along a nozzle arrangement direction. It is principal part plane explanatory drawing of an example of the apparatus which discharges the liquid which concerns on this invention. It is principal part side explanatory drawing of the apparatus. It is principal part plane explanatory drawing of the other example of the liquid discharge unit which concerns on this invention. It is front explanatory drawing of the further another example of the liquid discharge unit which concerns on this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. A liquid discharge head according to a first embodiment of the present invention will be described with reference to FIGS. 1 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, FIG. 2 is a cross-sectional explanatory view along the nozzle arrangement direction corresponding to the AA line of FIG. 1, and FIG. It is a plane explanatory view equivalent to the BB line.

  The liquid discharge head includes a nozzle plate 1, a flow path plate 2, a vibration plate member 3, a piezoelectric element 11 that is a pressure generating unit, a holding substrate 50 that also serves as a groove member, a lid member 80, and a common liquid chamber. A member 70 and a damper member 90 are provided.

  The nozzle plate 1 is formed with a plurality of nozzles 4 for discharging liquid.

  The flow path plate 2 forms, together with the nozzle plate 1 and the vibration plate member 3, an individual liquid chamber 6 that communicates with the nozzle 4, a fluid resistance portion 7 that communicates with the individual liquid chamber 6, and a liquid introduction portion 8 that communicates with the fluid resistance portion 7. Yes. It should be noted that the individual flow passages 5 and 5 constituted by the individual liquid chamber 6, the fluid resistance portion 7 and the liquid introduction portion 8 are separated by a partition wall portion 5A.

  The individual flow path 5 is connected to the common liquid chamber 10 of the common liquid chamber member 70 via the opening 9 of the diaphragm member 3, the opening 51 of the holding substrate 50, and the slit groove 61 of the holding substrate 50. Communicates.

  The vibration plate member 3 is a wall surface member that forms a deformable vibration region (vibration plate) 30 that forms a part of the wall surface of the individual liquid chamber 6. In the present embodiment, the diaphragm member 3 and the channel plate 2 are collectively referred to as the channel member 20.

  A piezoelectric element 11 that can be flexibly deformed integrally with the vibration region 30 is provided on the surface of the vibration member 3 opposite to the individual liquid chamber 6 in the vibration region 30, and a piezoelectric actuator is formed by the vibration region 30 and the piezoelectric element 11. It is composed.

  The piezoelectric element 11 is configured by sequentially laminating a lower electrode, a piezoelectric layer (piezoelectric body), and an upper electrode from the vibration region 30 side. The upper electrode serving as an individual electrode of the piezoelectric element 11 is connected to a drive IC (driver IC) 500.

  The holding substrate 50 includes a slit groove 61 provided in the in-plane direction that forms a flow path through the common liquid chamber 10 and the individual liquid chamber 6, an opening 51 provided in the thickness direction, and a recess 52 that accommodates the piezoelectric element 11. And an opening 53 for accommodating the driver IC 500.

  Here, the independent opening 51 and the slit groove 61 are formed for each individual liquid chamber 6, but one opening 51 and the slit groove 61 correspond to two or more individual liquid chambers 6, or 2 One slit groove 61 may correspond to each individual liquid chamber 6 described above.

  The lid member 80 has a reversibly deformable damper 81 that covers the opening side of the slit groove 61, and has a damper chamber 82 on the opposite side of the slit groove 61 across the damper 81.

  The common liquid chamber member 70 forms the common liquid chamber 10. A damper member 90 that holds a damper 91 that forms a part of the wall surface of the common liquid chamber 10 with a holding member 92 is provided.

  In the liquid discharge head configured as described above, by applying a voltage from the driver IC 500 between the upper electrode and the lower electrode of the piezoelectric element 11, the piezoelectric layer 12 expands in the electrode stacking direction, that is, the electric field direction, and the vibration region 30. Shrink in a direction parallel to the.

  At this time, since the lower electrode side is constrained by the vibration region 30, tensile stress is generated on the lower electrode side of the vibration region 30, and the vibration region 30 bends to the individual liquid chamber 6 side to pressurize the internal liquid. Thus, the liquid is discharged from the nozzle 4.

  Next, details of the damper configuration in the liquid discharge head will be described with reference to FIGS. FIG. 4 is an exploded perspective view of the liquid discharge head, and FIG. 5 is a plan view of the damper chamber member of the lid member as seen from the holding substrate side. In addition, the surface coating in the top view of FIG. 5 is for distinguishing from other area | regions, and does not show a cross section.

  The holding substrate 50 has an opening 51 formed in the thickness direction (stacking direction) from the individual flow path 5 and a slit groove 61 that opens to the common liquid chamber 10 side that communicates with the opening 51.

  A part of the opening 51 and the slit groove 61 is covered with a lid member 80. Therefore, the slit groove 61 includes a portion 61 a covered with the lid member 80 (this portion is referred to as “flow path”) 61 a and a portion 61 b that faces the common liquid chamber 10 without being covered with the lid member 80.

  As shown in FIG. 4, the lid member 80 includes a flexible film 80 </ b> A that becomes the damper 81 and a damper chamber member 80 </ b> B that forms the damper chamber 82.

  The flexible film 80 </ b> A has a portion that becomes the damper 81 and an opening 83 </ b> A that communicates with the common liquid chamber 10. The damper chamber member 80 </ b> B has a recess 80 a that forms the damper chamber 82 and a through hole 80 b that becomes an opening 83 </ b> B that communicates with the common liquid chamber 10.

  The damper 81 faces the opening of the opening 51 of the holding substrate 50 and the opening side of the slit groove 61. Here, the damper 81 is joined to the partition wall 62 between the slit grooves 61. Since the damper 81 is joined to the partition wall portion 62, the lid member 80 is suppressed from vibrating during damping.

  With this configuration, a part of the pressure wave generated in the individual liquid chamber 6 along with the liquid discharge propagates to the slit groove 61 through the fluid resistance portion 7, the liquid introduction portion 8, the opening portion 9, and the opening portion 51. Then, it is transmitted from the slit groove 61 to the common liquid chamber 10.

  At this time, since the damper 81 faces the opening 51 and the slit groove 61, the propagated pressure wave is absorbed or attenuated before reaching the common liquid chamber 10.

  Here, the effect of the damper pressure attenuation on the pressure wave generated from the individual liquid chamber 6 is generated earlier as the distance from the generation source to the damper is shorter, so that the damper 91 is disposed on the wall surface of the common liquid chamber 10. The attenuation effect can be exhibited efficiently at an early stage.

  As a result, even when high frequency driving is performed, the pressure wave can be quickly attenuated, and variations in liquid ejection characteristics can be reduced.

  In the present embodiment, the individual flow path 5 including the individual liquid chamber 6 of the flow path plate 2 is a flow path extending in the in-plane direction of the flow path plate 2, and the opening 51 of the holding substrate 50 is formed on the holding substrate 50. The flow path 61 a of the slit groove 61 is a flow path extending in the in-plane direction of the holding substrate 51 like the individual flow path 5.

  Here, when the individual channel 5, the opening 51, and the channel 61a which is a part of the slit groove 61 are viewed in a three-dimensional channel structure, the individual channels 61a and the channel plate 2 of the holding substrate 51 are individually identified. The flow paths 5 face each other, and the flow path of the opening 51 is connected therebetween. That is, the channel 61 a of the holding substrate 50 can be regarded as a channel that is folded with respect to the individual channel 5.

  In other words, in the configuration of the present embodiment, the flow path 61 a configured by the slit groove 61 covered with the opening 51 and the lid member 80 is provided between the common liquid chamber 10 and the individual liquid chamber 6. In addition, an individual communication path 66 that passes through one (two or more) individual liquid chamber 6 and the common liquid chamber 10 is formed.

  In the individual communication path 66, the flow path 61 a formed by the slit groove 61 is a flow path portion that opens into the common liquid chamber 10 and flows in the direction opposite to the liquid flow direction in the individual liquid chamber 6.

  A member that forms the individual liquid chamber 6 (channel plate 2), a holding substrate 50 that is a member that forms a channel portion (channel 61a) of the individual communication path 66, and a member that forms the common liquid chamber 10. The common liquid chamber members 70 are stacked and have a damper 81 that faces a flow path 61a formed by a slit groove 61 that is a flow path portion.

  That is, when a damper is disposed in the communication path leading to the common liquid chamber 10 in order to attenuate the pressure wave from the individual liquid chamber 6 at an early stage, if the damper action is the same Young's modulus, the wider the damper area becomes larger.

  In this case, when a damper is disposed on the liquid introduction portion 8 of the flow path plate 2 or a damper is disposed on the wall surface of the opening 51 of the holding substrate 50, in order to ensure a wide damper area, The width of the road plate 2 must be increased or the thickness of the holding substrate 50 must be increased. This unnecessarily increases the size of the head.

  Therefore, as in the present embodiment, a flow path portion that flows in a direction opposite to the direction of the liquid flow in the individual liquid chamber 6 is provided in the individual communication path 66 passing between the individual liquid chamber 6 and the common liquid chamber 10. That is, by folding the individual communication path 66 and disposing the damper in the folded flow path portion, it is possible to suppress an increase in the size of the head while securing a large damper area.

  In the present embodiment, the slit groove 61 is not covered by the lid member 80 and is described as an example in which the portion 60b facing the common liquid chamber 10 is formed. However, the slit groove 61 is covered by the lid member 80 ( Only the channel portion 60a) may be used. In this case, for example, a portion corresponding to the portion 60b may be a single recess that is connected in the nozzle arrangement direction.

  Next, a liquid ejection head according to a second embodiment of the present invention will be described with reference to FIG. FIG. 6 is an explanatory plan view of the damper chamber member of the lid member in the liquid discharge head as viewed from the holding substrate side.

  In the present embodiment, the damper chamber member 80B is provided with a groove portion 80c that forms an atmosphere opening path 84 that communicates the damper chamber 82 with the atmosphere.

  Thereby, the damper 81 can be displaced stably, and the reliability is improved.

  Next, a liquid ejection head according to a third embodiment of the invention will be described with reference to FIG. FIG. 7 is an explanatory plan view of the damper chamber member of the lid member in the liquid discharge head as viewed from the holding substrate side.

  In the present embodiment, a groove 80d that is formed in the shape of a snake line that meanders the atmosphere opening path 84 is provided.

  Thereby, water evaporation in the liquid due to the air permeability of the damper 81 can be suppressed.

  Next, a liquid ejection head according to a fourth embodiment of the invention will be described with reference to FIGS. FIG. 8 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, and FIG. 9 is a plan explanatory view of the lid member.

  In the present embodiment, the lid member 80 is provided with a through hole 80 e that becomes the damper chamber 82, one of the damper chambers 82 faces the damper 81 </ b> A that faces the slit groove 61, and the other faces the common liquid chamber 10. A damper 81B which is a second damper is provided.

  Thereby, the damper chamber member 80B of the lid member 80 can be easily manufactured, and the pressure wave reaching the common liquid chamber 10 can be attenuated by the damper 81B.

  Next, a liquid ejection head according to a fifth embodiment of the invention will be described with reference to FIG. FIG. 10 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head.

  In the present embodiment, a damper holding member 8 </ b> C is provided on the peripheral edge of the damper 81.

  Thereby, the handleability (handling property) of the thin-film damper 81 is improved.

  Next, a liquid ejection head according to a sixth embodiment of the present invention will be described with reference to FIGS. FIG. 11 is an explanatory sectional view taken along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, and FIG. 12 is an explanatory sectional view taken along the nozzle arrangement direction.

  In the present embodiment, the width W and the depth H in the short direction (nozzle arrangement direction) of the slit groove 61 are less than the opening diameter of the nozzle 4.

  As a result, the foreign substance 300 that cannot pass through the nozzle 4 does not enter the slit groove 61 and is blocked by the end 80f of the lid member 80, so that the slit groove 61 functions as a filter groove.

  Since the slit groove 61 constitutes a filter groove, even if a part of the slit groove 61 is covered with the foreign material 300, the upstream side of the clogged portion opens into the common liquid chamber 10 to secure the flow path. As a result, the filter can be highly robust.

  Next, an example of an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. FIG. 13 is an explanatory plan view of the main part of the apparatus, and FIG. 14 is an explanatory side view of the main part of the apparatus.

  This apparatus is a serial type apparatus, and the carriage 403 reciprocates in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 spans the left and right side plates 491A and 491B and holds the carriage 403 so as to be movable. The carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 spanned between the driving pulley 406 and the driven pulley 407.

  A liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated is mounted on the carriage 403. The liquid discharge head 404 of the liquid discharge unit 440 discharges, for example, yellow (Y), cyan (C), magenta (M), and black (K) liquids. The liquid ejection head 404 is mounted with a nozzle row composed of a plurality of nozzles arranged in the sub-scanning direction orthogonal to the main scanning direction, and the ejection direction facing downward.

  The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

  The supply mechanism 494 includes a cartridge holder 451 that is a filling unit for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is fed from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

  This apparatus includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412 serving as transport means, and a sub-scanning motor 416 for driving the transport belt 412.

  The conveyance belt 412 adsorbs the paper 410 and conveys it at a position facing the liquid ejection head 404. The transport belt 412 is an endless belt and is stretched between the transport roller 413 and the tension roller 414. The adsorption can be performed by electrostatic adsorption or air suction.

  The transport belt 412 rotates in the sub-scanning direction when the transport roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418.

  Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 that performs maintenance / recovery of the liquid ejection head 404 is disposed on the side of the transport belt 412.

  The maintenance / recovery mechanism 420 includes, for example, a cap member 421 for capping the nozzle surface (surface on which the nozzle is formed) of the liquid ejection head 404, a wiper member 422 for wiping the nozzle surface, and the like.

  The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

  In this apparatus configured as described above, the paper 410 is fed and sucked onto the transport belt 412, and the paper 410 is transported in the sub-scanning direction by the circular movement of the transport belt 412.

Therefore, the liquid ejection head 404 is driven in accordance with the image signal while moving the carriage 403 in the main scanning direction, thereby ejecting liquid onto the stopped paper 410 to form an image.

  Thus, since this apparatus includes the liquid ejection head according to the present invention, a high-quality image can be stably formed.

  Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 15 is an explanatory plan view of the main part of the unit.

  The liquid discharge unit includes a casing portion composed of side plates 491A and 491B and a back plate 491C, a main scanning moving mechanism 493, a carriage 403, and a liquid among the members constituting the liquid discharge device. The discharge head 404 is configured.

  Note that a liquid discharge unit in which at least one of the above-described maintenance and recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit may be configured.

  Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 16 is an explanatory front view of the unit.

  This liquid discharge unit includes a liquid discharge head 404 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

  The flow path component 444 is disposed inside the cover 442. A head tank 441 may be included instead of the flow path component 444. In addition, a connector 443 that is electrically connected to the liquid ejection head 404 is provided above the flow path component 444.

  In the present application, the liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head, and the viscosity becomes 30 mPa · s or less at room temperature, normal pressure, or by heating and cooling. It is preferable. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional materials such as polymerizable compounds, resins, and surfactants, and biocompatible materials such as DNA, amino acids, proteins, and calcium. , Edible materials such as natural pigments, solutions, suspensions, emulsions, and the like. These include, for example, inkjet inks, surface treatment liquids, components of electronic devices and light emitting devices, and formation of electronic circuit resist patterns It can be used in applications such as liquids for use, three-dimensional modeling material liquids, and the like.

  As energy generation sources for discharging liquid, piezoelectric actuators (laminated piezoelectric elements and thin film piezoelectric elements), thermal actuators using electrothermal transducers such as heating resistors, electrostatic actuators consisting of a diaphragm and counter electrode are used. To be included.

  The “liquid ejection unit” is a unit in which functional parts and mechanisms are integrated with a liquid ejection head, and includes an assembly of parts related to liquid ejection. For example, the “liquid discharge unit” includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, and a main scanning movement mechanism with a liquid discharge head.

  Here, the term “integrated” refers to, for example, a liquid discharge head, a functional component, and a mechanism that are fixed to each other by fastening, adhesion, engagement, etc., and one that is held movably with respect to the other. Including. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

  For example, there is a liquid discharge unit in which a liquid discharge head and a head tank are integrated. Also, there are some in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter may be added between the head tank and the liquid discharge head of these liquid discharge units.

  In addition, there is a liquid discharge unit in which a liquid discharge head and a carriage are integrated.

  In addition, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably on a guide member that constitutes a part of the scanning movement mechanism. In some cases, a liquid discharge head, a carriage, and a main scanning movement mechanism are integrated.

  Also, there is a liquid discharge unit in which a cap member that is a part of the maintenance / recovery mechanism is fixed to a carriage to which the liquid discharge head is attached, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. .

  In addition, there is a liquid discharge unit in which a tube is connected to a liquid discharge head to which a head tank or a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid from the liquid storage source is supplied to the liquid discharge head via this tube.

  The main scanning movement mechanism includes a guide member alone. The supply mechanism includes a single tube and a single loading unit.

The “apparatus for ejecting liquid” includes an apparatus that includes a liquid ejection head or a liquid ejection unit and that ejects liquid by driving the liquid ejection head. The apparatus for ejecting a liquid includes not only an apparatus capable of ejecting a liquid to an object to which the liquid can adhere, but also an apparatus for ejecting the liquid into the air or liquid.

  This “apparatus for discharging liquid” may include means for feeding, transporting, and discharging a liquid to which liquid can adhere, as well as a pre-processing apparatus and a post-processing apparatus.

  For example, as a “liquid ejecting device”, an image forming device that forms an image on paper by ejecting ink, a powder is formed in layers to form a three-dimensional model (three-dimensional model) There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that discharges a modeling liquid onto the powder layer.

  Further, the “apparatus for ejecting liquid” is not limited to an apparatus in which significant images such as characters and figures are visualized by the ejected liquid. For example, what forms a pattern etc. which does not have a meaning in itself, and what forms a three-dimensional image are also included.

  The above-mentioned “applicable liquid” means that the liquid can be attached at least temporarily and adheres and adheres, or adheres and penetrates. Specific examples include recording media such as paper, recording paper, recording paper, film, and cloth, electronic parts such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, unless specifically limited, includes everything that the liquid adheres to.

  The material of the above-mentioned “material to which liquid can adhere” is not limited as long as liquid such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics can be adhered even temporarily.

  In addition, the “device for ejecting liquid” includes a device in which the liquid ejection head and the device to which the liquid can adhere move relatively, but is not limited thereto. Specific examples include a serial type apparatus that moves the liquid discharge head, a line type apparatus that does not move the liquid discharge head, and the like.

  In addition, as the “device for ejecting liquid”, other than the above, a treatment liquid coating apparatus that ejects a treatment liquid onto a sheet in order to apply the treatment liquid to the surface of the sheet for the purpose of modifying the surface of the sheet, There is an injection granulation apparatus that granulates raw material fine particles by spraying a composition liquid in which raw materials are dispersed in a solution through a nozzle.

  Note that the terms “image formation”, “recording”, “printing”, “printing”, “printing”, “modeling” and the like in the terms of the present application are all synonymous.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Flow path plate 3 Vibration board member 4 Nozzle 6 Individual liquid chamber 10 Common liquid chamber 11 Piezoelectric element 50 Holding substrate (groove member)
51 Opening 61 Slit Groove 80 Lid Member 81 Damper 81A, 81B Damper 82 Damper Chamber 70 Common Liquid Chamber Member 403 Carriage 404 Liquid Discharge Head 430 Liquid Discharge Unit

Claims (12)

A plurality of nozzles for discharging liquid;
A plurality of individual liquid chambers through which the nozzle communicates;
A common liquid chamber communicating with the plurality of individual liquid chambers,
Between the common liquid chamber and the individual liquid chamber,
A groove member having a plurality of slit grooves constituting a flow path through the individual liquid chamber and the common liquid chamber;
A lid member covering the opening side of the slit groove,
The lid member includes a reversibly deformable damper that faces the slit groove, and a damper chamber that is disposed on the opposite side of the slit groove across the damper. Discharge head. The liquid discharge head according to claim 1, wherein the lid member includes a reversibly deformable damper facing the slit groove and a damper facing the common liquid chamber on the opposite side through the damper chamber. 3. The liquid discharge head according to claim 1, wherein the slit groove has a width in a short side direction that is less than an opening diameter of the nozzle. The liquid ejection head according to claim 1, wherein the slit groove has a depth less than an opening diameter of the nozzle. The liquid discharge head according to claim 1, further comprising a damper holding member that holds a peripheral portion of the damper. The liquid ejection head according to claim 1, wherein the damper chamber communicates with the atmosphere. The flow path constituted by the slit groove is folded with respect to the individual liquid chamber,
The liquid ejection head according to claim 1, wherein the damper faces a portion where the slit groove is folded back. A flow path member in which the plurality of individual liquid chambers are formed and a piezoelectric element is provided on a surface opposite to the side on which the individual liquid chambers are formed;
A holding substrate laminated on the flow path member and having a recess for accommodating the piezoelectric element;
A common liquid chamber member stacked on the holding substrate and forming the common liquid chamber;
The holding substrate also serves as the groove member, and the plurality of slit grooves are formed on a surface of the holding substrate on the common liquid chamber side,
The liquid discharge head according to claim 1, wherein the lid member is disposed between the holding substrate and the common liquid chamber member. A plurality of nozzles for discharging liquid;
A plurality of individual liquid chambers through which the nozzle communicates;
A common liquid chamber communicating with the plurality of individual liquid chambers,
Between the common liquid chamber and the individual liquid chamber, an individual communication path is provided through the one or more individual liquid chambers and the common liquid chamber,
The individual communication path has a flow path portion that opens to the common liquid chamber and through which the liquid flows in a direction opposite to the direction of liquid flow in the individual liquid chamber,
The member forming the individual liquid chamber, the member forming the flow path portion of the individual communication path, and the member forming the common liquid chamber are laminated,
A liquid discharge head having a damper facing the flow path portion.   A liquid discharge unit comprising the liquid discharge head according to claim 1. A head tank for storing liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism for supplying liquid to the liquid discharge head, a maintenance / recovery mechanism for maintaining and recovering the liquid discharge head, and the liquid The liquid discharge unit according to claim 10, wherein the liquid discharge head is integrated with at least one of a main scanning movement mechanism that moves the discharge head in the main scanning direction.   An apparatus for discharging liquid, comprising the liquid discharge head according to claim 1 or the liquid discharge unit according to claim 10 or 11.

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