JP2013128996A - Transfer robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer robot capable of inhibiting the heating of an arm by radiant heat from a substrate.SOLUTION: The transfer robot includes a first arm having a base end rotatably coupled to an arm base and having a predetermined drive system internally disposed; a second arm having a based end rotatably coupled to an end of the first arm and following the first arm; a hand rotatably coupled to an end of the second arm via a hand base and capable of placing the predetermined substrate thereon, and a reflector disposed between the first arm and second arm, and reflecting heat from the substrate placed on the hand upward.

Description

  The disclosed embodiment relates to a transfer robot.

  2. Description of the Related Art Conventionally, in order to perform a film forming process or the like, there is a transfer robot that transfers an unprocessed substrate and a processed substrate by an arm unit in a vacuum chamber.

  For example, when a substrate after film formation processing is transported using such a transport robot, the substrate may be at a high temperature and may be heated up to the transport robot.

  Therefore, a radiation plate that radiates heat transferred from the substrate through the arm portion by heat conduction is provided on the base end side of the arm portion, and heat is received at a predetermined position in the vacuum chamber so as to face the radiation plate. A transfer robot provided with a plate has been proposed (see, for example, Patent Document 1).

  With this configuration, heat from the substrate is released to the vacuum chamber side so that heat energy is not accumulated in the transfer robot itself.

International Publication Number WO06 / 062183

  However, the above-described technique merely releases the heat after the arm portion has once received the heat from the substrate. That is, in the above-described conventional technology, it has not been possible to prevent the heat from the substrate from being received.

  The arm portion that has received heat from the substrate may expand, or the mechanism of the drive system housed inside the arm portion may be heated to expand. As a result, there is a risk that precise control of the robot may be hindered.

  An object of one embodiment is to provide a transfer robot that can suppress heating of an arm portion due to radiant heat from a substrate.

  A transfer robot according to an aspect of the embodiment includes a first arm having a base end rotatably connected to an arm base, and a predetermined drive system disposed therein, and a base arm on the tip of the first arm. An end portion is rotatably connected, and a second arm driven by the first arm is provided. In addition, the transfer robot is rotatably connected to the tip of the second arm via a hand base so that a predetermined substrate can be placed between the first arm and the second arm. And a reflecting plate that reflects heat from the substrate placed on the hand upward.

  According to one aspect of the embodiment, heating of the arm due to radiant heat from the substrate can be suppressed.

FIG. 1 is a schematic explanatory view of the transfer robot according to the present embodiment as seen from a side cross section. FIG. 2 is an explanatory diagram in plan view of the transfer robot. FIG. 3 is a schematic explanatory view in plan view showing the internal structure of the first arm of the transfer robot. FIG. 4 is a schematic explanatory view in a longitudinal sectional view showing the internal structure of the first arm of the transfer robot.

  Hereinafter, an embodiment of a transfer robot disclosed in the present application will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by embodiment shown below.

  First, a schematic configuration of the transfer robot according to the present embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a schematic explanatory view of the transfer robot according to this embodiment in a side sectional view, and FIG. 2 is an explanatory view of the transfer robot in plan view.

  As shown in FIG. 1, the transfer robot 1 according to the present embodiment includes a horizontal articulated robot including an arm unit 20 including two extendable arms that extend and contract in the horizontal direction, and a body unit 10 that supports the arm unit 20. It is. The transfer robot 1 is installed in the vacuum chamber 30. The vacuum chamber 30 is kept in a reduced pressure state by a vacuum pump or the like.

  The body 10 is a unit provided at the lower part of the arm unit 20 and constitutes a robot body. The body unit 10 includes a lifting device (not shown) in a cylindrical housing 11, and the arm unit 20 can be lifted and lowered along the vertical direction using the lifting device. The casing 11 of the body unit 10 protrudes from the lower part of the vacuum chamber 30 and is located in a space in the support unit 35 that supports the vacuum chamber 30.

  The lifting device disposed in the casing 11 of the body unit 10 includes, for example, a motor, a ball screw, a ball nut, and the like, and lifts and lowers the arm unit 20 by converting the rotational motion of the motor into a linear motion. .

  A flange portion 12 is formed on the upper portion of the housing 11. The transfer robot 1 is installed in the vacuum chamber 30 by fixing the flange portion 12 to the vacuum chamber 30. The flange portion 12 is fixed to the edge portion of the opening portion 31 formed at the bottom portion of the vacuum chamber 30 via a seal member.

  The arm unit 20 is a unit that is connected to the body unit 10 that is a robot body, and includes an arm base 21, a first arm 22, a second arm 23, and a hand base 24. The hand base 24 is provided with a fork-like hand 24a as an end effector capable of holding a substrate 3 such as a glass substrate or a semiconductor wafer (hereinafter sometimes referred to as “workpiece”).

  In the following, the advancing / retreating direction of the hand 24a is defined as the X-axis direction, and the direction orthogonal to the X-axis direction in the horizontal direction is defined as the Y-axis direction. A direction orthogonal to the X-axis direction and the Y-axis direction, that is, a vertical direction is defined as a Z-axis direction.

  Further, in explaining the relative positional relationship between the components of the transfer robot 1, there are cases where directions are indicated in the vertical direction, the left and right directions, and the front and rear directions. It is assumed that it is installed in S. Specifically, in FIGS. 1 and 2, the positive and negative directions of the X-axis are forward and backward of the transfer robot 1, respectively, and the positive and negative directions of the Y-axis are respectively right and left of the transfer robot 1. The positive direction and the negative direction of the Z-axis are assumed to be above and below the transfer robot 1.

  The arm base 21 is rotatably supported with respect to a lifting flange portion (not shown), and the lifting flange is substantially linked to a lifting device provided in the body portion 10. The arm base 21 includes a turning device including a motor, a speed reducer, and the like, and rotates, that is, rotates, using the turning device.

  Specifically, the turning device inputs the rotation of the motor via the transmission belt to the reduction gear whose output shaft is fixed to the body portion 10. Thereby, the arm base 21 rotates in the horizontal direction with the output shaft of the speed reducer as the turning axis. Therefore, the hand 24 a can be directly opposed to the plurality of processing chambers 32 provided on the peripheral wall of the vacuum chamber 30.

  A base end portion of the first arm 22 is rotatably connected to the upper portion of the arm base 21. That is, the connecting shaft P6 on the arm base 21 and the input shaft 510 of the first speed reducer 51 provided at the base end portion of the first arm 22 are integrally connected (see FIG. 4), and the first arm 22 is rotatably connected to the arm base 21 via the first reduction gear 51.

  In addition, the base end portion of the second arm 23 is rotatably connected to the upper end of the first arm 22. That is, the base end connecting shaft P5 of the second arm 23 and the input shaft 520 of the second reduction gear 52 provided at the tip of the first arm 22 are integrally connected via the connecting plate 522 (FIG. 4). The second arm 23 is rotatably connected to the first arm 22 via the second speed reducer 52.

  The transfer robot 1 uses a single motor 53 to synchronize a first reducer 51 provided at the proximal end of the first arm 22 and a second reducer 52 provided at the distal end of the first arm 22. By operating, the tip of the second arm 23 functioning as a link can be linearly moved without incorporating a drive system.

  That is, the transfer robot 1 includes a first arm 22 having a base end rotatably connected to the arm base 21 and a predetermined drive system disposed therein, and a base end on the tip of the first arm 22. And a second arm 23 that is rotatably coupled to follow the first arm 22. That is, the first arm 22 includes the motor 53, the first speed reducer 51, the second speed reducer 52, and the like as a drive system, but the second arm 23 itself does not include the drive system.

  The transfer robot 1 is configured such that the rotation amount of the second arm 23 relative to the first arm 22 is twice the rotation amount of the first arm 22 relative to the arm base 21. For example, when the first arm 22 rotates α degrees relative to the arm base 21, the first arm 22 and the second arm 23 rotate such that the second arm 23 rotates 2α degrees relative to the first arm 22. Thereby, the front-end | tip part of the 2nd arm 23 moves linearly.

  From the viewpoint of preventing contamination in the vacuum chamber 30 and the like, the drive mechanisms such as the first and second speed reducers 51 and 52 and the motor 53 are housed in the first arm 22 maintained at atmospheric pressure. Thereby, even when the transfer robot 1 is placed in a reduced pressure environment such as the vacuum chamber 30, for example, it is possible to prevent the lubricating oil such as grease from drying, and to prevent internal contamination of the vacuum chamber 30 due to dust generation. Can be prevented.

  A hand base 24 is rotatably connected to the upper portion of the tip of the second arm 23. The hand base 24 is a member that moves as the first arm 22 and the second arm 23 rotate. The hand base 24 includes a hand 24 a for holding the substrate 3 at the top.

  Although not shown in FIG. 1, the arm unit 20 includes an auxiliary arm portion 25 that constitutes a link mechanism, as shown in FIG. Here, the arm unit 20 will be described more specifically with reference to FIG.

  The auxiliary arm portion 25 constituting the link mechanism regulates the rotation of the hand base 24 in conjunction with the rotation operation of the first arm 22 and the second arm 23 so that the moving hand 24a always faces in a certain direction. ing.

  That is, as shown in FIG. 2, the auxiliary arm portion 25 includes a first link 25a, an intermediate link 25b, and a second link 25c.

  The base end of the first link 25a is rotatably connected to the arm base 21 via a support shaft P1, and the base end of the intermediate link 25b and the base end of the second link 25c and the support shaft at the front end. It is rotatably connected via P2. Further, the intermediate link 25b is pivotally supported on the same axis as the proximal end connecting shaft P5 that connects the first arm 22 and the second arm 23, and the distal end is connected to the distal end of the first link 25a and the second link. The link 25c and the support shaft P2 are rotatably connected.

  The second link 25c has a proximal end portion rotatably connected to the distal end portion of the intermediate link 25b via a support shaft P2, and a distal end portion connected rotatably to the proximal end portion of the hand base 24 via a support shaft P3. Is done. The hand base 24 has a distal end portion rotatably connected to the distal end portion of the second arm 23 via the support shaft P4, and a proximal end portion rotatable via the distal end portion of the second link 25c and the support shaft P3. It is connected to.

  Thus, the first link 25a forms the first parallel link mechanism (P1-P6-P5-P2) together with the arm base 21, the first arm 22 and the intermediate link 25b. That is, when the first arm 22 rotates about the connection axis P6, the first link 25a and the intermediate link 25b rotate while maintaining a state parallel to the first arm 22 and the arm base 21, respectively.

  The second link 25c forms a second parallel link mechanism (P2-P5-P4-P3) together with the intermediate link 25b, the second arm 23, and the hand base 24. That is, when the second arm 23 rotates about the proximal end connecting shaft P5, the second link 25c and the hand base 24 rotate while maintaining a state parallel to the second arm 23 and the intermediate link 25b, respectively.

  The intermediate link 25b rotates while maintaining a state parallel to the arm base 21 by the first parallel link mechanism. For this reason, the hand base 24 of the second parallel link mechanism also rotates while maintaining a state parallel to the arm base 21. As a result, the hand 24 a attached to the upper portion of the hand base 24 moves linearly while maintaining a state parallel to the arm base 21.

  As described above, the transfer robot 1 can keep the direction of the hand 24a constant by using the two parallel link mechanisms of the first parallel link mechanism and the second parallel link mechanism. Accordingly, for example, a pulley or a transmission belt is provided inside the second arm 23, and dust generation caused by the pulley or the transmission belt is compared with a case where the orientation of the end effector corresponding to the hand 24a is maintained in a certain direction. Can be suppressed. Further, since the rigidity of the entire arm can be increased by the auxiliary arm portion 25, vibration during operation of the hand 24a can be reduced.

  FIG. 3 is a schematic explanatory view in plan view showing the internal structure of the first arm 22 of the transfer robot 1, and FIG. 4 is a schematic explanatory view in vertical section of the first arm 22. As shown in FIGS. 3 and 4, the first arm 22 forms a box-shaped storage portion 221 in which the inside of the arm housing 22 a forming the first arm 22 is maintained at atmospheric pressure. The storage unit 221 includes a first reduction gear 51, a second reduction gear 52, a motor 53, first and second relay pulleys 54a and 54b, a first transmission belt 55, a second transmission belt 56, and the like as a drive system. ing. As shown in FIG. 4, the first relay pulley 54 a is disposed above and below the pulley support 541.

  The first reduction gear 51 is disposed at the proximal end portion of the first arm 22 and rotatably connects the arm base 21 and the first arm 22 via a connecting shaft P6. Moreover, the 2nd reduction gear 52 is arrange | positioned at the front-end | tip part of the 1st arm 22, and connects the 1st arm 22 and the 2nd arm 23 rotatably via the base end connection shaft P5.

  The motor 53 is a drive unit that generates a drive force, and is arranged at the approximate center of the first arm 22. The relay pulleys 54 a and 54 b are both rotatably attached to a shaft body that is arranged in parallel with the output shaft 530 of the motor 53, and are arranged in parallel so as to sandwich the motor 53.

  The first transmission belt 55 transmits the driving force of the motor 53 to the input shaft 510 of the first reduction gear 51. The second transmission belt 56 transmits the driving force of the motor 53 to the input shaft 520 of the second reduction gear 52.

  As shown in the figure, the first transmission belt 55 is stretched around the first pulley 511 and the first relay pulley 54a fixed to the input shaft 510 of the first speed reducer 51. The second transmission belt 56 includes a second pulley 521 fixed to the input shaft 520 of the second speed reducer 52, a drive pulley 53a fixed to the output shaft 530 of the motor 53, a lower side 54a, and a pulley support 542. It is stretched over the relay pulley 54b disposed on the lower side. Thereby, the first transmission belt 55 transmits the driving force of the motor 53 transmitted from the second transmission belt 56 via the first relay pulley 54a to the input shaft 510 of the first reduction gear 51.

  As described above, the transfer robot 1 transmits the driving force of one motor 53 to the first reduction gear 51 and the second reduction gear 52 using the first transmission belt 55 and the second transmission belt 56, respectively. The first arm 22 and the second arm 23 can be operated synchronously.

  In addition, the transfer robot 1 stores the above-described members constituting the drive mechanism in a storage unit 221 in the first arm 22 maintained at atmospheric pressure. Therefore, it is possible to prevent the lubricating oil such as grease from drying in the drive mechanism and to prevent contamination in the vacuum chamber 30 due to dust generation.

  As described above, the transfer robot 1 according to the present embodiment, for example, moves the hand 24 a linearly using the first arm 22 and the second arm 23, so that the other robot connected to the vacuum chamber 30 is used. The substrate 3 is taken out from the vacuum chamber.

  Subsequently, the transfer robot 1 pulls back the hand 24a, and then rotates the arm base 21 around the pivot axis so that the arm unit 20 faces the other vacuum chamber that is the transfer destination of the workpiece. . Then, the transfer robot 1 moves the hand 24a linearly using the first arm 22 and the second arm 23, thereby loading the work into another vacuum chamber that is a work transfer destination. In this way, the transfer robot 1 can perform the transfer operation of the substrate 3 in the vacuum chamber 30.

  In the transfer robot 1 described above, in the present embodiment, the reflector 4 that reflects the heat from the substrate 3 placed on the hand 24a upward is provided between the first arm 22 and the second arm 23. Yes.

  Hereinafter, the reflector 4 will be specifically described. The transfer robot 1 according to this embodiment is installed in the vacuum chamber 30 as described above. For example, when the substrate 3 after the film formation process is transported, the substrate 3 after the film formation process is at a high temperature. Therefore, as shown in FIGS. 1 and 2, the first arm 22 and the body portion 10 are located immediately below the substrate 3 at a position where the hand 24 a is pulled most rearward (leftward direction in FIG. 2) with respect to the transport direction F. Will be located.

  Note that the posture of the transfer robot 1 that takes the position where the hand 24a is pulled most backward is the minimum turning posture, and the turning radius around the connecting axis P6 on the arm base 21 that becomes the turning axis is the smallest.

  As described above, when the transfer robot 1 takes the minimum turning posture, the first arm 22 and the body portion 10 located immediately below the substrate 3 may be heated by the radiant heat from the substrate 3. In addition, it is assumed that the board | substrate 3 becomes high temperature to about 100 to 130 degreeC.

  In particular, in the arm housing 22a of the first arm 22, as described above, the first reduction gear 51, the second reduction gear 52, the motor 53, the first and second relay pulleys 54a and 54b, the first transmission belt. The drive mechanisms such as 55 and the second transmission belt 56 are accommodated. Each of these components may be adversely affected by heating.

  Therefore, in the present embodiment, the reflecting plate 4 is disposed above the first arm 22 and below the second arm 23 to reflect the radiant heat from the substrate 3 upward, and thereby the first arm. 22 and the body part 10 are suppressed as much as possible from being heated by radiant heat.

  As shown in FIGS. 1 and 2, the reflecting plate 4 is a plurality of (two in this embodiment) pins erected on the arm base 21 so as to be located outside the turning area A of the first arm 22. It is supported by the bodies 26, 26.

  Therefore, the reflecting plate 4 turns together with the first arm 22 similarly connected to the arm base 21, and the relative positional relationship with the first arm 22 is constant.

  Here, the turning area A of the first arm 22 will be described. When the transport robot 1 moves the hand 24a straight forward from the posture in FIG. 2 (X direction), the first arm 22 turns clockwise about the connecting axis P6, and is in a position symmetrical with the posture in FIG. (Indicated by a two-dot chain line in FIG. 2). Since the first arm 22 has a predetermined width in a plan view, the swivel region A of the first arm 22 in the present embodiment is the first arm from the initial position A1 of the rear outer edge of the first arm 22. 22 is a region between the movement positions A2 of the front outer edge of the front side.

  Therefore, the pin body 26 cannot be disposed inside the turning area A of the first arm 22. On the contrary, if it is outside the turning area A of the first arm 22, the number of the pin bodies 26 can be set as appropriate.

  Further, as shown in FIG. 1, the pin body 26 is defined to be higher than the thickness of the first arm 22, and holds the reflector 4 between the first arm 22 and the second arm 23. Yes. In the present embodiment, the pin body 26 is fitted into a connection hole formed in the reflection plate 4 to hold the reflection plate 4, but the connection structure and the like are not particularly limited. Needless to say, the upper end of the pin body 26 is defined to a height that does not interfere with the second arm 23.

  As shown in FIG. 2, the reflecting plate 4 is formed in a shape that can cover at least the first arm 22 in which the drive mechanism is built. In the present embodiment, the reflecting plate 4 has a shape that can cover up to the upper surface of the body portion 10 including the arm base 21 that rotatably connects the first arm 22.

  This is because an elevating mechanism for elevating and lowering the arm unit 20 including the first arm 22 and the second arm 23 is disposed in the body portion 10. Further, even if the first arm 22 or the like is heated, the temperature of the body portion 10 is not increased as much as possible so that heat can be released to the body portion 10.

  The specific shape of the reflecting plate 4 may be a simple rectangular shape or a circular shape. However, in order to reduce the weight of the reflecting plate 4, it is preferable that a portion that is considered unnecessary is appropriately cut out. For example, in the present embodiment, as shown in the figure, the front and rear corners on the right side (Y-axis positive direction in FIG. 2) of the rectangular reflector 4 are cut out.

  The reflector 4 is arranged so as not to interfere with the movement locus of the connecting portion that connects the first arm 22 and the second arm 23, specifically, the movement locus L inside the connecting portion.

  That is, the base end connection shaft P5 (see FIG. 4) that forms a connection portion that connects the first arm 22 and the second arm 23 is connected to the front of the transfer robot 1 (the positive direction of the X axis in FIG. 2). It moves while turning around the axis P6.

  Therefore, the edge (upper edge 4a in FIG. 2) facing the right side of the transfer robot 1 in the reflector 4 is a position that does not interfere with the movement locus L of the inner side of the connecting portion, that is, the left peripheral surface of the base end connecting shaft P5. It is prescribed to be On the other hand, an edge of the reflecting plate 4 facing the left side of the transfer robot 1 (a lower edge 4 b in FIG. 2) is defined to be a position that substantially overlaps the left peripheral surface of the body part 10. As a result, the lateral width of the reflecting plate 4 (the width in the Y direction in FIG. 2) is defined.

  Further, in order to cover the upper surface of the body part 10 substantially entirely, the length of the reflector 4 in the front-rear direction (X direction in FIG. 2) is defined to be substantially equal to the diameter of the body part 10. The phrase “substantially equal to the diameter of the body part 10” includes a case where the diameter is the same as the diameter of the flange part 12 formed on the upper part of the casing 11 of the body part 10.

  The shape and arrangement of the reflector 4 according to this embodiment are defined as described above. However, as long as the shape does not interfere with the movement locus L of the connecting portion that connects the first arm 22 and the second arm 23 and can cover at least the first arm 22, it may be set appropriately. Absent.

  As described above, the reflection plate 4 is provided to reflect the radiant heat from the substrate 3 on the hand 24a upward to suppress the influence of the radiant heat on the first arm 22 as much as possible. However, it can be considered that the first arm 22 is heated and the temperature rises.

  Therefore, in the present embodiment, as shown in FIGS. 3 and 4, a plurality of fumaroles are provided in the arm housing 22 a constituting the first arm 22, that is, in the box-shaped storage unit 221 maintained at atmospheric pressure. 61a to 61c and a single exhaust port 62 are provided. Then, the compressed air ejected from the plurality of jet ports 61a to 61c is discharged from the exhaust port 62 as an air flow along the inner wall surface of the arm housing 22a.

  In the present embodiment, the first input shaft 510 of the first speed reducer 51 disposed on one end side of the arm housing 22 a is a hollow shaft, and this hollow shaft is the discharge port 62.

  Further, the second input shaft 520 of the second speed reducer 52 disposed on the other end side of the arm housing 22a is a hollow shaft, and one of the plurality of jet holes 61a to 61c, for example, the first jet port, for example. 61a is provided adjacent to the base end opening 523 of the second input shaft 520 which is a hollow shaft.

  The compressed air jetted from the first jet port 61 a into the second input shaft 520 rises, collides with the connecting plate 522, bounces off, and flows out from the base end opening 523 to the four sides in the storage portion 221. The compressed air supplied from the first jet port 61a is in contact with the inner wall surface of the arm housing 22a until it flows out of the system from the discharge port 62 formed in the first input shaft 510 formed of a hollow shaft. The heat flows away from the arm housing 22a.

  On the other hand, the other plurality of jet holes 61b and 61c are arranged so that the compressed air can be jetted horizontally along the side surface of the arm housing 22a.

  For example, as shown in FIG. 3, the second air inlet 61b is disposed between the second reduction gear 52 and the longitudinal side surface of the arm housing 22a, and the other end side of the arm housing 22a. Compressed air can be ejected toward The compressed air ejected from the second gas outlet 61 b largely bypasses the inside of the storage portion 221 and travels toward the outlet 62. In the meantime, it flows in contact with the inner wall surface of the arm housing 22a and takes heat away from the arm housing 22a.

  In addition, the third air outlet 61c is disposed between the first reduction gear 51 and the motor 53 in the vicinity of the side surface on the long side of the arm housing 22a, and is compressed toward one end of the arm housing 22a. Air can be ejected.

  As described above, the compressed air flow jetted from the plurality of jet ports 61a, 61b, and 61c proceeds in a random direction in the storage portion 221, that is, in the arm housing 22a, and is discharged from the discharge port 62 to the outside of the system. In the meantime, the heat can be taken from a wide area over substantially the entire arm housing 22a to be cooled.

  As described above, in the transfer robot 1 according to the present embodiment, the arm housing 22a of the first arm 22 includes a predetermined drive system therein, while the second arm does not include a drive system, and the first It functions as part of the link that follows the arm. The inner wall surface of the arm casing 22a can be cooled by ejecting compressed air from the plurality of jet openings 61a, 61b, 61c disposed in the arm casing 22a of the first arm 22.

  Thus, in the transfer robot 1 according to the present embodiment, the arm housing 22a can be cooled over a wide area. For this reason, even if the first arm 22 is heated by radiant heat from the high-temperature substrate 3 held by the hand 24a, the heat is efficiently accumulated because the first arm 22 is cooled in a wide area. Can be suppressed.

  Further, inside the arm housing 22a, fins 223 connected to the arm housing 22a are disposed so as to be exposed to compressed air. That is, the heat of the arm housing 22a can be efficiently taken through the fins 223.

  In the present embodiment, as shown in FIG. 3, the fin 223 is positioned facing the motor 53, and the base end is connected to the side surface on the long side of the arm housing 22 a, and obliquely toward the motor 53 side. It is extended. In such a position, the fin 223 is disposed so as to cross the airflow flowing along the flow path of the compressed air, that is, the side surface on the longitudinal side of the arm housing 22a obliquely.

  Therefore, the airflow due to the compressed air does not become a great resistance, and the entire surface of the fin 223 can be brought into contact with the compressed air, so that the heat exchange rate can be improved.

  In addition, arrangement | positioning of the several jet nozzles 61a-61c can be set suitably, and is not limited to embodiment mentioned above. In addition, the shape and arrangement of the fins 223 can be appropriately designed in consideration of the heat exchange rate and the like.

  In the embodiment described above, the transfer robot 1 has been described as a one-arm robot including one arm unit 20. However, the transfer robot 1 may include a plurality of arm units 20 such as a double arm.

  In short, the first arm 22 having a predetermined driving system therein, the second arm 23 not having the driving system and rotatably connected to the first arm 22, the first arm 22, Any structure may be used as long as it includes the reflector 4 disposed between the two arms 23 and reflecting the heat from the substrate 3 placed on the hand 24a.

  In the above-described embodiment, the workpiece to be transported has been described as the substrate 3 such as a glass substrate or a semiconductor wafer. However, the workpiece to be transported may not be the substrate 3 as long as the workpiece has a relatively high temperature. .

  In the above-described embodiment, the example in which the transfer robot 1 is installed in the vacuum chamber 30 has been described. However, the transfer robot 1 is not necessarily limited to the one installed in the vacuum chamber 30. not.

  Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

DESCRIPTION OF SYMBOLS 1 Transfer robot 3 Board | substrate 4 Reflector 10 Body part 21 Arm base 22 1st arm 23 2nd arm 24 Hand base 24a Hand 25a 1st link 25b Intermediate link 25c 2nd link 26 Pin body 51 1st reduction gear 52 2nd deceleration Machine 61a First air outlet 61b Second air outlet 61c Third air outlet 62 Air outlet 510 First input shaft (hollow shaft)
520 Second input shaft (hollow shaft)
523 Base end opening

Claims (6)

A first arm having a base end rotatably connected to the arm base and having a predetermined drive system disposed therein;
A second arm rotatably coupled to a distal end of the first arm and driven by the first arm;
A hand that is rotatably connected to the tip of the second arm via a hand base, and on which a predetermined substrate can be placed;
A reflecting plate disposed between the first arm and the second arm and reflecting heat from a substrate placed on the hand upward;
A transport robot comprising: An intermediate link supported coaxially with a connecting portion between the first arm having a predetermined drive system and the second arm not having a drive system;
A distal end portion is rotatably connected to a distal end portion of the intermediate link, and a proximal end portion is rotatably connected to the arm base, and a first portion is provided between the arm base, the first arm, and the intermediate link. A first link constituting a parallel link mechanism;
A distal end portion and a proximal end portion of the intermediate link are rotatably connected, and a distal end portion is rotatably connected to the proximal end portion of the hand base, so that the second arm, the intermediate link, and the hand base are between. A second link constituting the second parallel link mechanism,
Further comprising
The transfer robot according to claim 1, wherein the hand can be directly moved in conjunction with the turning of the first arm. The reflector is
The transfer robot according to claim 1, wherein the transfer robot is disposed at a position that does not interfere with a movement locus of a connecting portion that connects the first arm and the second arm. The reflector is
The transfer robot according to claim 1, wherein the transfer robot is formed in a shape capable of covering at least the first arm. The reflector is
The transfer robot according to claim 4, wherein the transfer robot is formed in a shape that can cover an upper surface of a robot body that is rotatably provided with the arm base. The reflector is
The transfer robot according to any one of claims 1 to 5, wherein the transfer robot is supported by a plurality of pin bodies erected on the arm base so as to be located outside the turning region of the first arm. .

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