JP2011183478A - Adsorption apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adsorption apparatus capable of restraining plastic deformation of a porous body. <P>SOLUTION: This adsorption apparatus 1 includes the porous body 3 stuck to a suction surface 2a via an adhesive layer and composed of resin and a stopper 4 projecting the suction surface 2a in the facing direction more than the suction surface 2a. A height from the suction surface 2a of the stopper 4 is the total or less of a thickness regulated by the adhesive layer and the porous body 3 and a thickness of an object 5, and is 70% or more of the thickness regulated by the adhesive layer and the porous body 3. This constitution can reduce pressure applied to the porous body 3 since deformation of the porous body 3 is regulated by the stopper 4. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a suction device that vacuum-sucks an object on a suction surface.

  Conventionally, in the process of processing thin and light sheets and films such as metal foil, plastic film, and green sheet, an adsorption device that vacuum-adsorbs an object on the adsorption surface has been used, and the sheet or film is fixed by this adsorption device. Or being transported. In such an adsorbing device, a sheet-like porous body having air permeability is stuck on the adsorbing surface in order to protect the object or the like (for example, see Patent Document 1).

JP 2001-353788 A

  By the way, when the object is transported by the suction device having the porous body adhered to the suction surface, the porous body is used when the target is sucked at the transport source and when the target is opened at the transport destination. A large pressure may be applied to the porous body by being pressed against the object support material or the like with the object sandwiched therebetween. And when what consists of resin is used as a porous body, a porous body may be plastically deformed by applying the said pressure repeatedly. When such a composition deformation of the porous body occurs, the structure itself of the porous body changes, so that the air permeability of the porous body deteriorates and the adsorption and release operations of the target object become unstable, Wrinkles are formed in the porous body and adsorption cannot be performed.

  An object of this invention is to provide the adsorption | suction apparatus which can suppress the plastic deformation of a porous body in view of such a situation.

  That is, the present invention is an adsorption device for vacuum-adsorbing an object on an adsorption surface, the porous body made of resin adhered to the adsorption surface via an adhesive layer, and the adsorption surface more than the adsorption surface. A stopper protruding in a direction in which the surface faces, and the height of the stopper from the adsorption surface is equal to or less than the sum of the thickness defined by the adhesive layer and the porous body and the thickness of the object, Provided is an adsorption device that is 70% or more of the thickness defined by the adhesive layer and the porous body.

  According to said structure, since a deformation | transformation of a porous body is controlled by a stopper, the pressure concerning a porous body can be made small. Therefore, according to the present invention, plastic deformation of the porous body can be suppressed.

It is a side view which shows the suction head of the suction apparatus which concerns on one Embodiment of this invention. It is a bottom view of the suction head of FIG.

  1 and 2 show a suction head 2 of a suction device 1 according to an embodiment of the present invention. The suction device 1 transports the object 5 by vacuum suction, and includes a suction head 2, a lifting mechanism (not shown) that moves the suction head 2 up and down, and a moving mechanism that moves the suction head 2 in the horizontal direction. (Not shown) and a vacuum pump (not shown) connected to the suction head 2 and the suction path 6. And the lower surface parallel to the horizontal surface in the suction head 2 serves as a suction surface 2 a for sucking the object 5.

  In the present embodiment, the object 5 has a rectangular sheet shape, and the suction surface 2 a has a rectangular shape in accordance with the shape of the object 5. However, the shape of the suction surface 2a is not limited to this, and may be, for example, a polygonal shape such as an octagon or a circular shape.

  The suction surface 2a is provided with a plurality of suction holes 21 in the suction region 20 where the object 5 is to be sucked. In the present embodiment, the suction holes 21 are arranged at equal intervals along the outline of the suction region 20. In the suction head 2, a communication path 22 that connects the suction hole 21 and the suction path 6 is formed. The position and quantity of the suction holes 21 can be appropriately selected according to the type and size of the object 5.

  Moreover, the sheet-like porous body 3 is stuck to the adsorption surface 2a via an adhesive layer (not shown). The porous body 3 of the present embodiment has a cross shape in which four corners of a rectangular shape are cut out when viewed from the bottom, and completely covers the adsorption region 20 on the adsorption surface 2a. The porous body 3 is made of resin.

  The porous body 3 may be any porous material made of resin, and examples thereof include a woven fabric, a nonwoven fabric, a perforated film, and a plastic powder that has been made porous by sintering. A sintered sheet body etc. are mentioned. However, the present invention is particularly effective when a material having a high porosity, a material having a low compression elastic modulus, or a material that easily undergoes plastic deformation is used.

  As the porous body 3, it is preferable to use a sintered sheet body of plastic powder from the viewpoint that pores exist uniformly on the entire surface and uniform adsorption force is easily obtained over the entire surface. In particular, because of the friction between the object and the object for use, a sintered body produced using ultrahigh molecular weight polyethylene powder having an average molecular weight of 500,000 or more from the viewpoint of excellent wear resistance and impact resistance. A bonded sheet is preferred.

  In order to produce a sintered sheet body using ultrahigh molecular weight polyethylene powder, the following method can be used. The first is a method in which the powder is sintered in a state where it is placed in a mold to produce a sintered block, and this sintered block is processed into a sheet by lathe processing. The second is a method in which the powder is sintered in a state of being arranged in a predetermined thickness. Third, a so-called slurry in which the powder is dispersed in a solvent having a boiling point higher than the melting point of ultrahigh molecular weight polyethylene such as liquid paraffin is applied to a metal plate whose surface is subjected to mold release treatment to a predetermined thickness. In this method, the sheet is covered with a sheet and heated to a temperature equal to or higher than the melting point of ultrahigh molecular weight polyethylene to be sintered.

  The thickness of the porous body 3 is preferably 0.05 mm or more and 3.0 mm or less. Although the properties when the porous body 3 is compressed differ depending on the manufacturing method or the like, if the thickness is less than 0.05 mm, it becomes difficult to obtain adhesion with the object 3 when deformed in the thickness direction. If the thickness exceeds 3.0 mm, the deformation amount of the porous body 3 becomes too large. A more preferable thickness of the porous body 3 is 0.1 mm or more and 1.5 mm or less.

  The method of adhering the porous body 3 to the adsorption surface 2a with the adhesive layer is not particularly limited as long as all the suction holes 21 are not completely blocked and the ventilation through them is ensured. For example, a method of fusing by heat, a method of disposing a hot melt sheet on a portion of the porous body 3 excluding a portion corresponding to the suction hole 21 of the adhesive surface 2a, and heat-welding, a suction surface 2a of the porous body 3 A method in which a double-sided tape is disposed and bonded to a portion excluding a portion corresponding to the suction hole 21, and a method in which a pressure-sensitive adhesive is applied in a spot shape over the entire surface of the porous body 3 and bonded while ensuring air permeability. Etc. can be used. As described above, as the adhesive layer for adhering the porous body 3 and the adsorption surface 2a, those having various configurations can be employed.

  Furthermore, in this embodiment, the rectangular plate-shaped stopper 4 is provided in the part which is not covered with the porous body 3 of the four corners of the adsorption | suction surface 2a, and these stoppers 4 protrude below from the adsorption | suction surface 2a. Yes.

  The height of the stopper 4 from the adsorption surface 2a is preferably equal to or less than the sum of the thickness defined by the adhesive layer and the porous body 3 and the thickness of the object 5 (hereinafter simply referred to as “total thickness”). More preferably, it is less than the total thickness. Since it is also assumed that the porous body 3 has a non-uniform thickness, in order to make sure that the porous body 3 is in contact with the object 5 over the entire surface, the porous body 3 is somewhat fixed during adsorption. This is because it is preferable to deform in the thickness direction. For example, the height of the stopper 4 is set so that the stopper 4 is arranged outside the adsorption region 20 and the stopper 4 and the object 5 are not in contact with each other as in the present embodiment, or When the thickness is thick, it may be larger than the thickness of the porous body 3.

  The height of the stopper 4 from the adsorption surface 2 a is preferably 70% or more of the thickness defined by the adhesive layer and the porous body 3. If the height of the stopper 4 is less than 70% of the thickness defined by the adhesive layer and the porous body 3, the amount of deformation of the porous body 3 to be restricted by the stopper becomes too large, and the porous body 3 plastic deformation is likely to occur.

  A particularly preferable height of the stopper 4 is 80% or more of the thickness defined by the adhesive layer and the porous body 3.

  The stopper 4 preferably has a Young's modulus of 10 GPa or more in order to ensure a gap between the other member and the suction surface 2a even when the stopper 4 comes into contact with another member when the suction head 4 is lowered. 50 GPa is more preferable. From such a viewpoint, it is preferable that the stopper 4 is made of, for example, a metal such as stainless steel, iron, copper, or aluminum, or a ceramic material.

  In the adsorption device 1 of this embodiment described above, the deformation in the thickness direction of the porous body 3 can be regulated by the stopper 4. Thereby, the pressure concerning the porous body 3 can be made small and the plastic deformation of the porous body 3 can be suppressed.

  Here, when the height of the stopper 4 is smaller than the thickness defined by the adhesive layer and the porous body 3, for example, a through hole is provided in the center of the porous body 3, and the stopper 4 is disposed in the through hole. May be. However, in this case, if the porous body 3 is deformed more than the level difference from the stopper 4, the stopper 4 hits the object 5. Therefore, it is preferable that the stopper 4 is disposed outside the suction region 20 as in the present embodiment so as not to hit the object 5.

<Modification>
In the above-described embodiment, the rectangular plate-like stoppers 4 are arranged at the four corners of the suction surface 2a. However, the quantity, position, and shape of the stoppers 4 can be appropriately selected. For example, a frame-like stopper may be provided at the peripheral edge of the suction surface 2a.

  Moreover, the stopper 4 should just protrude in the direction which the said adsorption surface 2a faces rather than the adsorption surface 2a, and does not necessarily need to be provided in the adsorption surface 2a. For example, the stopper 4 can be provided on the side surface of the suction head 2 so as to protrude downward from the suction surface 2a.

  EXAMPLES Hereinafter, although an Example is given and this invention is demonstrated in detail, this invention is not restrict | limited to these Examples at all.

Example 1
Ultra high molecular weight polyethylene powder (molecular weight: 5 million, bulk density: 0.47 g / cm ³ , average particle size: 120 μm) is filled in a mold having an inner diameter of 500 mm and a height of 500 mm, and this is put into a metal pressure resistant container. The pressure was reduced to 1000 Pa. Thereafter, heated steam was introduced into the container, and the interior of the container was heated at 160 ° C. and 600 kPa for 5 hours, and then gradually cooled to obtain a cylindrical sintered block. The sintered block was cut to a thickness of 200 μm with a lathe to cut out a sintered sheet body, and this was pressed with a press at 130 ° C. and 300 kPa for 1 hour. Thereafter, the sintered sheet body was cut into a 100 mm square to produce a porous body. Subsequently, a hot melt adhesive (Hirodine manufactured by Yashara Chemical Co., Ltd.) heated to 190 ° C. was sprayed on one side of the porous body while being uniformly dispersed at a pressure of 490 kPa to form a spotted adhesive layer. As a result of setting the application amount of the adhesive to 7 g / m ² , the thickness of the adhesive layer was 5 μm.

  A 200 μm-thick SUS304 plate (Young's modulus: 190 GPa) was cut into 10 mm squares to produce four stoppers.

  An adsorption device having a 100 mm square adsorption surface was prepared, and four stoppers prepared at four corners of the adsorption surface of the adsorption device were fixed with an epoxy-based adhesive. Further, in order to prevent the porous body from interfering with the stopper, the porous body was attached to the adsorption surface of the adsorption device with an adhesive layer after cutting out the four corners of the produced porous body with a 10 mm square, and the porous body and the stopper Was obtained on the adsorption surface.

(Example 2)
An adsorbing device was obtained in the same manner as in Example 1 except that a SUS304 plate having a thickness of 150 μm was used.

(Example 3)
An adsorbing device was obtained in the same manner as in Example 1 except that a SUS304 plate having a thickness of 210 μm was used.

(Example 4)
An adsorbing device was obtained in the same manner as in Example 1 except that the sintered block was cut to a thickness of 500 μm when a porous body was produced, and a SUS304 plate having a thickness of 500 μm was used.

(Comparative Example 1)
An adsorbing device was obtained in the same manner as in Example 1 except that a SUS304 plate having a thickness of 120 μm was used.

(Comparative Example 2)
An adsorbing device was obtained in the same manner as in Example 1 except that a SUS304 plate having a thickness of 240 μm was used.

(test)
<Porosity>
About the porous body in the adsorption apparatus of an Example and a comparative example, a bulk density is calculated | required from volume and weight, and the true density of ultra high molecular weight polyethylene is 0.935 g / cm < ³ >, {1- (bulk density / true density)} The porosity was calculated from the x100 equation. As a result, the porosity of all the porous bodies was 35%.

<Thickness defined by adhesive layer and porous body>
In Examples and Comparative Examples, before attaching the porous body to the adsorption device, it was once attached to the release paper, and the total thickness was measured using a micrometer (minimum scale 0.001 mm) in the vicinity of the four corners. The average value of the four measured values was calculated. The thickness defined by the adhesive layer and the porous body was determined by subtracting the thickness of the release paper from this measured value.

<Adsorption test>
First, the adsorption test of the adsorption apparatus of the Example and the comparative example was performed in the initial state where nothing was worked. In the adsorption test, it was confirmed whether an aluminum foil having a thickness of 10 μm can be adsorbed without wrinkles at a suction amount of 10 L / min.

  Next, an endurance test was performed, and then the same adsorption test as described above was performed. In the durability test, a press for increasing the surface pressure to 5 MPa was performed 1000 times on the adsorption surface provided with the porous body and the stopper.

  Table 1 shows the thicknesses defined by the adhesive layers and the porous bodies, the heights of the stoppers, and the results of the adsorption test in the adsorption apparatuses of Examples and Comparative Examples.

  From Table 1, it can be seen that the adsorption work can be performed without any problem for the examples. On the other hand, in Comparative Example 2, it was confirmed that the suction cannot be performed because the height of the stopper is too large. Further, in Comparative Example 1, the adsorption work was possible at the initial stage, but the porous body was plastically deformed after the durability test assuming continuous operation. As a result, it was confirmed that the air permeability was greatly reduced and adsorption could not be performed, and the effect of using the stopper could not be obtained.

DESCRIPTION OF SYMBOLS 1 Adsorption apparatus 2 Adsorption head 2a Adsorption surface 20 Adsorption area | region 3 Porous body 4 Stopper 5 Target object

Claims (5)

A suction device that vacuum-sucks an object on a suction surface,
A porous body made of a resin attached to the adsorption surface via an adhesive layer;
A stopper projecting in a direction in which the suction surface faces than the suction surface,
The height of the stopper from the adsorption surface is equal to or less than the sum of the thickness defined by the adhesive layer and the porous body and the thickness of the object, and the thickness defined by the adhesive layer and the porous body. The adsorber is 70% or more.   The suction device according to claim 1, wherein the stopper is disposed outside a suction region where the object on the suction surface is to be sucked.   The suction device according to claim 1 or 2, wherein the stopper has a Young's modulus of 10 GPa or more.   The adsorption device according to any one of claims 1 to 3, wherein the resin is ultra high molecular weight polyethylene.   The adsorption device according to claim 4, wherein the porous body is made porous by sintering ultrahigh molecular weight polyethylene powder.

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