JP2005001991A - Ozonizer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozonizer in which the interval of a pair of electrodes is uniformly kept and the discharge gap between the pair of electrodes is effectively cooled. <P>SOLUTION: The ozonizer is provided with a cylindrical dielectric electrode 5 and a metallic electrode 6 provided outside the dielectric electrode 5. High voltage is applied between the dielectric electrode 5 and the metallic electrode 6. The inside of the metallic electrode 6 is cooled by cooling water 8. The discharge gap 7 between the dielectric electrode 5 and the metallic electrode 6 is 0.3-0.6mm. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an ozone generator, and more particularly to an ozone generator that can efficiently generate ozone.

  In a general ozone generator, a metal electrode and a dielectric electrode or a pair of dielectric electrodes constitute a discharge electrode, and a minute discharge gap is formed by inserting a spacer between them. Silent discharge is generated in the discharge gap (space) by flowing ozone source gas through the discharge gap between the electrodes and applying a high voltage between the electrodes. Ozone gas is generated by this silent discharge.

  By the way, in an ozone generator using oxygen as a source gas, a metal electrode may be oxidized by silent discharge. Such an ozone generator will be described with reference to FIGS.

  11 and 12 are diagrams illustrating an example of a configuration of a discharge unit of a conventional ozone generator. As shown in FIGS. 11 and 12, the ozone generator includes a dielectric electrode 5 and a metal electrode 6, and a spacer 13 a for forming a discharge gap is inserted between the dielectric electrode 5 and the metal electrode 6. Has been. A conductive film 4 is provided on the inner surface of the dielectric electrode 5.

  11 and 12, the ozone source gas flows into the hermetic container 14 from the gas inlet 11, and then the source gas flows through the discharge gap 7 formed between the dielectric electrode 5 and the metal electrode 6, and the gas outlet 12 is discharged. During this time, when an alternating high voltage is applied between the dielectric electrode 5 and the metal electrode 6 from the high voltage power source 1 via the fuse 2 and the high voltage power supply terminal 3, a silent discharge is formed in the discharge gap 7 and ozone is generated. . The heat generated by the silent discharge is cooled by the cooling water 8 supplied into the metal electrode 6. Thereby, the gas temperature rise of the discharge gap 7 is suppressed, and ozone with high concentration and high yield is obtained.

  In addition, as shown in FIG. 12, an ozone generator is also known in which a pair of dielectric electrodes 5 are inserted into the metal electrode 6 from both sides, and a spacer 13 a is disposed at the center of the metal electrode 6.

  However, the conventional ozone generator as described above has the following problems.

  That is, in the ozone generator shown in FIGS. 11 and 12, since the spacer 13a between the dielectric electrode 5 and the metal electrode 6 is unstable, the uniform discharge gap 7 cannot be maintained, and uniform discharge ignition is performed. Is difficult to form. In this case, the discharge is concentrated in part, and the ozone generator concentration and yield are limited due to ozone decomposition and cooling non-uniformity due to partial temperature rise.

  The present invention has been made in consideration of such points, and an object thereof is to provide an ozone generator capable of generating a uniform discharge between a dielectric electrode and a metal electrode.

  The present invention provides a high voltage that applies a high voltage between one cylindrical electrode, the other electrode provided outside the one electrode and surrounding the one electrode, and the one electrode and the other electrode. An ozone generator characterized in that the other electrode is cooled, the high-voltage power supply is connected to one electrode, and an inductance is arranged in series between the high-voltage power supply and one electrode It is a vessel.

  The present invention provides a high voltage that applies a high voltage between one cylindrical electrode, the other electrode provided outside the one electrode and surrounding the one electrode, and the one electrode and the other electrode. Power supply, the other electrode is cooled, the high-voltage power supply is connected to one electrode, and an inductance is arranged in parallel with one electrode between the high-voltage power supply and one electrode, and this inductance is grounded This is an ozone generator.

  The present invention provides a high voltage that applies a high voltage between one cylindrical electrode, the other electrode provided outside the one electrode and surrounding the one electrode, and the one electrode and the other electrode. A power source, the other electrode is cooled, one electrode is made of a dielectric electrode having a conductive film on the inner surface, the end of the conductive film protrudes outside the end of the other electrode, or on the inner side The ozone generator is arranged to be retracted.

  The present invention provides a high voltage that applies a high voltage between one cylindrical electrode, the other electrode provided outside the one electrode and surrounding the one electrode, and the one electrode and the other electrode. A power source, the other electrode is cooled, one electrode is made of a dielectric electrode having a conductive film on its inner surface, one electrode is connected to a high voltage power source via a high voltage supply, and the high voltage supply is The ozone generator is characterized in that it is disposed at the end of the conductive film and is made of a metallic nonwoven fabric.

  As described above, according to the present invention, a uniform discharge can be generated between one electrode and the other electrode, and thereby high yield and high concentration of ozone can be obtained.

First Embodiment A first embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, the ozone generator has an airtight container 14 having a gas inlet 11 and a gas outlet 12, a cylindrical dielectric electrode 5 provided in the airtight container 14, and an outer side of the dielectric electrode 5. And a metal electrode 6 disposed.

  Among these, the dielectric electrode 5 is provided with a conductive film 4 on its inner surface, and a high voltage power supply 1 is connected to the conductive film 4 via a high voltage supply 3 and a fuse 2. Further, a spacer 13a is interposed between the dielectric electrode 5 and the metal electrode 6, and the discharge gap 7 between the dielectric electrode 5 and the metal electrode 6 is 0.38 to 0.62 mm by the spacer 13a. There is a gap.

  Cooling water is supplied into the metal electrode 6 from the cooling water inlet 9, and the cooling water in the metal electrode 6 flows out from the cooling water outlet 10.

  Next, the spacer 13a will be described with reference to FIGS. As shown in FIGS. 2 (a), 2 (b) and 2 (c), the spacer 13a is obtained by forming the band material in a ring shape and welding the ends. Thus, by forming the spacer 13a in a ring shape and welding the end portions, the spacer 13a can be firmly formed, whereby the gap of the discharge gap 7 can be kept uniform.

  As shown in FIGS. 2A, 2B, and 2C, the spacer 13a protrudes inward in the radial direction and has a plurality of protrusions 17 extending in the width direction of the spacer 13a. Thus, by providing the spacer 13a with a protrusion protruding radially inward, the length of the gap of the discharge gap 7 is stabilized.

  In addition, as shown to Fig.3 (a) (b) (c), you may provide the hemispherical protrusion 18 in the spacer 13a.

  Next, the operation of the present embodiment having such a configuration will be described. First, the ozone source gas flows into the airtight container 14 from the gas inlet 11, passes through the discharge gap 7 between the dielectric electrode 5 and the metal electrode 6, and flows out from the gas outlet 12. At this time, a high voltage is applied to the conductive film 4 from the outside of the airtight container 14 via the fuse 2 and the high-voltage power supply 3 by the high-voltage power supply 1, and a discharge is formed between the dielectric electrode 5 and the metal electrode 6. A circuit is formed. In this case, a silent discharge is formed in the discharge gap 7 and the source gas generates an ozonized gas. Since the ozone concentration and the ozone yield are improved when the gas temperature of the discharge gap 7 is lower, the inside of the metal electrode 6 is cooled by cooling water, and the gas temperature rise of the discharge gap 7 is suppressed.

  According to the present embodiment, since the gap of the discharge gap 7 is 0.3 mm to 0.6 mm, the ozone concentration and the ozone yield are improved. That is, the accuracy of the discharge gap 7 is ± 0.15 mm or less, and the smaller the gap of the discharge gap 7, the higher the yield and the higher the concentration can be obtained. 6 is considered, it is impossible to make the discharge gap 7 0.3 mm or less. Further, it is necessary to cool the discharge gap 7 with the cooling water 8 in the metal electrode 6. In this case, the discharge gap 7 must be shortened, and the gap of the discharge gap 7 needs to be 0.6 mm or less. is there.

  Next, FIG. 10 shows the relationship between the discharge power and the ozone concentration when the source gas is variously changed.

As shown in FIG. 10, when the oxygen concentration of the raw material gas is close to 100%, the ozone concentration is saturated from the point where the discharge power is low, but the ozone concentration is further increased by setting the oxygen concentration to 90 to 97%. It becomes possible. Further, NOx is formed by several percent of nitrogen, and the NOx and a small amount of H ₂ O react to generate nitric acid (HNO ₃ ), which becomes a protective film for the metal electrode 6. This prevents oxidation of the metal electrode 6.

Second Embodiment Next, a second embodiment of the present invention will be described with reference to FIGS.

  In the second embodiment shown in FIGS. 4A and 4B, a pair of dielectric electrodes 5 and 5 are mounted in the metal electrode 6, and the other is the first embodiment shown in FIGS. This is substantially the same as the embodiment.

  As shown in FIG. 4A, a spacer 13a shown in FIGS. 2 and 3 is inserted between each dielectric electrode 5 and the metal electrode 6. As shown in FIG. Further, a spacer 13b is provided between the pair of dielectric electrodes 5 and 5 and the metal electrode 6 as shown in FIG.

  As shown in FIG. 4 (b), the spacer 13 b is obtained by forming the band material in a ring shape and welding the both end portions to form the welded portion 16. The spacer 13b is provided with a protrusion 19 that protrudes inward in the radial direction.

  According to the present embodiment, the spacer 13b can be effectively used by straddling the spacer 13b between the pair of dielectric electrodes 5 and 5.

Third Embodiment Next, a third embodiment of the present invention will be described with reference to FIG. In the third embodiment shown in FIG. 5, an inductance 15 is inserted in series in addition to the fuse 2 between the high-voltage power supply 1 and the high-voltage power supply 3, and the others are shown in FIGS. This is substantially the same as the first embodiment. As shown in FIG. 5, by providing an inductance 15 between the high-voltage power supply 1 and the high-voltage power supply 3, the applied voltage applied to the discharge portion changes, so that the charge capacity of the discharge gap 7 and the dielectric electrode 5 The charge capacity changes and an ozone generator with a good power factor can be realized. Here, the discharge part refers to a part composed of conductive film 4 -dielectric electrode 5 -discharge gap 7 -metal electrode 6.

Fourth Embodiment Next, a fourth embodiment of the present invention will be described with reference to FIG. In the fourth embodiment shown in FIG. 6, an inductance 15 is connected to the fuse 2 in parallel with the discharge part composed of the conductive film 4 -dielectric electrode 5 -discharge gap 7 -metal electrode 6. The others are substantially the same as those of the first embodiment shown in FIGS. By connecting the inductance 15 in parallel with the discharge part, the voltage applied to the discharge part changes, and it becomes possible to prevent the power factor from being lowered due to the short gap of the discharge gap 7.

Fifth Embodiment Next, a fifth embodiment of the present invention will be described with reference to FIG. In the fifth embodiment shown in FIG. 7, the end 4 a on the open side of the dielectric electrode 5 of the conductive film 4 provided on the inner surface of the dielectric electrode 5 is disposed outside the position of the end of the metal electrode 6. The others are substantially the same as those of the first embodiment shown in FIGS. In FIG. 7, the electric field is relaxed to prevent abnormal discharge in the discharge gap 7, and silent discharge is uniformly generated, and a highly efficient ozone generator is possible.

Sixth Embodiment In the sixth embodiment shown in FIG. 8, the position of the conductive film 4 provided on the inner surface of the dielectric electrode 5 is set inside the end portion of the metal electrode 6. In FIG. 8, the electric field is relaxed, abnormal discharge is stopped, and a uniform silent discharge provides a highly efficient ozone generator.

Seventh Embodiment In the seventh embodiment shown in FIG. 9, the high voltage supply 3 is in contact with the end of the conductive film 4 provided inside the dielectric electrode 5, and this high voltage supply 3 is made of a metallic nonwoven fabric. For this reason, the electric field at the end of the conductive film 4 is relaxed, abnormal discharge and creeping discharge are stopped, uniform silent discharge is generated in the discharge gap 7, and a highly efficient ozone generator becomes possible.

The figure which shows 1st Embodiment of the ozone generator by this invention. The figure which shows the spacer in 1st Embodiment of the ozone generator by this invention. The figure which shows the other spacer in 1st Embodiment of the ozone generator by this invention. The figure which shows 2nd Embodiment of the ozone generator by this invention. The figure which shows 3rd Embodiment of the ozone generator by this invention. The figure which shows 4th Embodiment of the ozone generator by this invention. The figure which shows 5th Embodiment of the ozone generator by this invention. The figure which shows 6th Embodiment of the ozone generator by this invention. The figure which shows 7th Embodiment of the ozone generator by this invention. The figure which shows the discharge electric power and ozone concentration at the time of changing raw material gas variously. The figure which shows the conventional ozone generator. The figure which shows the conventional ozone generator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 High voltage power supply 2 Fuse 3 High voltage supply 4 Conductive film 5 Dielectric electrode 6 Metal electrode 7 Discharge gap 9 Cooling water inlet 10 Cooling water outlet 13a Spacer 13b Spacer 14 Airtight container

Claims (4)

One cylindrical electrode;
The other electrode provided around the one electrode outside the one electrode;
A high voltage power source for applying a high voltage between one electrode and the other electrode;
The other electrode is cooled,
An ozone generator, wherein the high-voltage power source is connected to one electrode, and an inductance is disposed in series between the high-voltage power source and the one electrode. One cylindrical electrode;
The other electrode provided around the one electrode outside the one electrode;
A high voltage power source for applying a high voltage between one electrode and the other electrode;
The other electrode is cooled,
An ozone generator, wherein the high-voltage power source is connected to one electrode, an inductance is arranged in parallel with the one electrode between the high-voltage power source and the one electrode, and the inductance is grounded. One cylindrical electrode;
The other electrode provided around the one electrode outside the one electrode;
A high voltage power source for applying a high voltage between one electrode and the other electrode;
The other electrode is cooled,
One electrode is made of a dielectric electrode having a conductive film on its inner surface, and an end of the conductive film protrudes outside the end of the other electrode or is arranged so as to be drawn inward. Generator. One cylindrical electrode;
The other electrode provided around the one electrode outside the one electrode;
A high voltage power source for applying a high voltage between one electrode and the other electrode;
The other electrode is cooled,
One electrode is made of a dielectric electrode having a conductive film on the inner surface, and one electrode is connected to a high-voltage power source via a high-voltage power supply,
An ozone generator characterized in that the high voltage supply electron is disposed at the end of the conductive film and is made of a metallic nonwoven fabric.

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