JP2003303875A - Stage apparatus for micromachining - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage apparatus for micromachining which makes the precisely moving operation of a movable table smooth, enables automatic position shift correction and is made small-sized and lightweight as a whole. <P>SOLUTION: The apparatus has the movable table 1 which is arranged movably in an arbitrary direction on the same plane, a table holding mechanism 2 which allows the movable table 1 to move and applies an original-position returning force to the movable table 1, and an electromagnetic driving means 4 which applies a moving force to the movable table 1. The electromagnetic driving means 4 is equipped with a plurality of driven magnets 6 mounted on the movable table 1 and a driving coil 7 which applies an electromagnetic driving force to the movable table 1 by the respective driven magnets 6. To the electromagnetic driving means 4, a control means 21 is added which controls the operation of the electromagnetic driving means 4. This control means 21 is provided with a position information arithmetic circuit (arithmetic part) 27 which specifies position information on the table 1 according to information from the plurality of position detection sensors and outputs it to the outside. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision machining stage device, and more particularly to a precision machining stage device used for wiring work and inspection thereof in a semiconductor manufacturing process such as IC and LSI.

[0002]

2. Description of the Related Art Conventionally, in the semiconductor industry and the like, IC and L
In order to arrange and hold an object to be processed in a precision processing field in a production process such as SI, a precision processing stage device provided with a movable table capable of precise movement is often used.

In this case, in order to precisely move the movable table to an arbitrary position on the XY plane, usually, the movable table is first moved in the X direction by the X-direction moving mechanism, and then (or simultaneously), In many cases, the movable table and the X-direction moving mechanism as a whole are provided with a moving body holding mechanism having a double structure in which the Y-direction moving mechanism moves the Y-direction. And
In this case, the X-direction and Y-direction moving mechanisms are:
In many cases, a combination of a drive motor such as a stepping motor and a precision drive mechanism is individually equipped.

On the other hand, in order to carry out the precise movement of the movable table in units of microns, it is necessary to control the output of the driving means while grasping the amount of change during the movement in real time. For this reason, a method in which a drive motor is provided with encoders for detecting the number of revolutions and the like in each of the X-direction and Y-direction drive mechanisms, and each precision drive means is individually drive-controlled based on the rotation information obtained here. There are many things to prepare.

[0005]

However, the above-mentioned conventional example is provided with a moving body holding mechanism having a double structure as a moving mechanism for a movable table, and as a sensor for detecting position information for position control. Since the encoder for detecting the number of revolutions and the like are connected to the drive motor, the entire apparatus becomes large and heavy, which results in poor portability. Further, in the above-mentioned conventional example, there has been a problem that the response of the entire device at the time of driving operation is poor due to the size increase and the weight increase of the device.

On the other hand, when the movable table is driven in a non-contact manner, information about the amount of movement of the movable table in the two-dimensional plane (XY plane) is detected, for example, in the X and Y directions. A method is conceivable in which reflected laser light from a bar code set in the direction is received by an optical sensor, counted, integrated, and the position change is calculated. However, in such a method, what continuously changes is measured intermittently, and therefore it is inaccurate for measuring a minute change.

[0007]

It is an object of the present invention to improve the inconvenience of the conventional example, and in particular, to detect in real time highly accurate information on the moving direction and moving distance of the movable table, and based on this, the movable table. It is an object of the present invention to provide a precision machining stage device that enables precise movement in a predetermined direction and at the same time reduces the size and weight of the entire device.

[0008]

In order to achieve the above-mentioned object, in the invention according to claim 1, first, a movable table arranged so as to be movable in an arbitrary direction from the origin on the XY plane, and A table holding mechanism that allows the movable table to move in a plane within a predetermined range and holds the movable table and has an original position returning function (original position returning force); and a main body that supports the table holding mechanism, The main body includes electromagnetic drive means for applying a moving force to the movable table, and table drive control means for controlling the operation of the electromagnetic drive means.

The electromagnetic drive means has a plurality of driven magnets fixedly mounted at a predetermined position on the movable table side, and coil sides arranged so as to face the driven magnets. On the other hand, it is provided with a drive coil that electromagnetically applies a predetermined drive force along the predetermined movement direction of the movable table described above, and a fixed plate that holds the drive coil in a fixed position.

Further, two position detection sensors of capacitance detection type are arranged at a predetermined interval in correspondence with at least one end of the movable table in the direction along the X axis and the Y axis from the center of the movable table. Installed (total of four position detection sensors). Then, the capacitance detection electrode portion of each of the position detection sensors is mounted on the main body portion described above, and the common electrode portion provided corresponding to this is mounted on the movable table side described above.

Further, a predetermined calculation is performed on the basis of predetermined information output from each of the above-mentioned four position detecting sensors, the moving direction of the movable table and the amount of change thereof are specified and externally output as position change information. A configuration is adopted in which a calculation unit is provided side by side with the table drive control means.

Therefore, according to the invention of claim 1,
First, the electromagnetic driving means operates to generate an electromagnetic force between the driving coil on the fixed plate side and the driven magnet on the movable table side provided in the electromagnetic driving means. Is moved in the direction.

In this case, since the movable table is held by the table holding mechanism while being allowed to move in any direction within the same plane, the movable table moves smoothly in a predetermined direction without moving up and down. , For example, a position where the original position return force of the table holding mechanism described above and the electromagnetic force of the electromagnetic drive means are balanced (that is, the movement stop position of the transfer destination)
Stop at.

On the other hand, each of the two position detection sensors in the X direction and the Y direction detects the capacitance change in real time as the movable table moves, and outputs the information to the arithmetic unit. The computing unit identifies the moving direction and the moving amount of the movable table based on the four sensor information.

In this case, for example, when there is no change in the capacitance of the two position detecting sensors mounted ahead in the X-axis direction, it means that the movable table has moved along the Y-axis (without rotating). The movement direction is determined by the increase / decrease in the capacitance of the pair of position detection sensors in the Y-axis direction, and the movement amount is specified by the change amount in the capacitance of the position detection sensor in the Y-axis direction.

If both the X-axis direction ahead and Y-axis direction ahead position detection sensors detect the same capacitance change, it means that the movable table has moved in the 45 ° direction (without rotating operation). However, the movement direction is directly determined by the pattern of increase / decrease in the capacitance of each position detection sensor, and the movement amount is specified by the change amount of the capacitance of each position detection sensor.

Furthermore, when the two position detecting sensors forming a pair output different capacitance changes, it means that the movable table has rotated, and at the same time, the change in capacitance of the two position detecting sensors of one side is detected. When the difference is equal to the difference in capacitance change between the other two position detection sensors, it means normal rotation. In this case, the rotation direction of the movable table is determined by the pattern of increase / decrease in the capacity of each position detection sensor, and the movement amount thereof is specified by the change amount of the capacity of each position detection sensor.

The specification of the movement direction by the capacitance change pattern of each position detection sensor and the relationship between the change amount of the capacitance of each position detection sensor and the movement amount of the movable table are, for example, experimentally specified in advance and mapped. It may be converted into a memory and stored in a memory or the like, and the positional deviation or the like may be determined based on this.

As described above, according to the first aspect of the invention, since each position detecting sensor is constituted by the capacitance detecting electrode portion and the common electrode portion and arranged as described above, the space occupied by each position detecting sensor is increased. The area can be made smaller (thinner), and in this respect, it is possible to downsize the entire apparatus equipped with this, and since the plurality of position detection sensors are arranged as described above, the movable table can be placed in the same plane. It is possible to detect movements and rotations in arbitrary directions at the same time, and output predetermined information corresponding to the information obtained by the multiple position detection sensors. The operator can quickly and accurately make correction operations, etc. while confirming the actual state on the way and the final result on the predetermined display section. There is an advantage to say.

According to a second aspect of the present invention, two position detecting sensors are provided on the movable table at a predetermined distance from the center of the movable table in correspondence with both ends in the directions along the X axis and the Y axis. It is characterized in that a total of eight position detection sensors are provided around the entire circumference of the movable table (the stage device for precision machining according to claim 1 described above has a position along the X axis and the Y axis). Equipped with a total of four position detection sensors limited to one end of the direction). Other configurations are the same as the invention described in claim 1 described above.

Therefore, according to the invention of claim 2,
In addition to having the same function as that of the invention described in claim 1, the capacitance obtained by the position detection sensors provided at one end and the other end of the arithmetic unit in the direction along the X axis (or Y axis). Since it is possible to take the difference of data (including the case where it is converted into a voltage signal) and process this as position information after movement in the direction along the X axis (or Y axis), for example Can cancel the electrical noise that intrudes (external noise elimination function), and even if the movable table physically moves up and down and the capacity of each position detection sensor changes, This can be canceled out, and as a result, the measured value itself outputs the predetermined capacity data with double sensitivity (a state in which the absolute value including the change is added because the decreased amount is further subtracted). And in that respect the whole device can be used Even in bad locations of the boundary has the advantage that relatively accurately operate without being affected.

According to a third aspect of the present invention, in the precision machining stage device according to the second aspect, the movable table is disposed corresponding to both ends in the direction along the X axis and the Y axis from the center of the movable table. Of the two position detection sensors, the two position detection sensors arranged at both ends in the direction along the X-axis or the Y-axis are adopted as one. .

Even in this case, it is possible to obtain a device having substantially the same function as that of the invention described in claim 2 by the predetermined arithmetic processing and the like. In this case, the amount of movement information in the direction in which the number of position detection sensors is reduced actually decreases, but, for example, the electrode area of the position detection sensor at one position detection sensor is increased, or By performing predetermined signal processing (such as doubling the amount of change at the location), it is possible to obtain a device having substantially the same function as that of the invention described in claim 2.

According to a fourth aspect of the present invention, in the precision machining stage device according to the first, second or third aspect, the table holding mechanisms are arranged on the same circumference of the movable table at predetermined intervals. And at least three table-side rod-shaped elastic members having the same length and set in a hanging state downward from the peripheral end portion, and each table-side rod-shaped elastic member provided corresponding to each table-side rod-shaped elastic member. At least three rod-shaped elastic members on the main body side having the same length, which are arranged on the same circumference and are held on the same circumference, and one end portion is held by the main body portion and the other end portion is set in a hanging state; And a relay member that integrally connects the other ends of the rod-shaped elastic members on the main body side. Then, at least three sets (six in total) of the rod-shaped elastic members constituted by this are formed by the rod-shaped elastic members of the same strength, such as piano wires, respectively.

Therefore, according to the invention of claim 4,
In addition to having the same function as the invention according to claim 1, 2 or 3, the table holding mechanism is configured as described above. For example, when the movable table slides in the same direction, Since all the rod-shaped elastic members are elastically deformed into the same shape, the height position of the movable table is always set to be constant.

That is, when the movable table moves in a plane, the three rod-shaped elastic members on the main body side are elastically deformed in a state where the end portions are held, but the three rod-shaped elastic members on the table side are in the same state. Elastic deformation occurs (in the opposite direction). Therefore, the height position of the movable table remains unchanged, and instead, the height position of the relay member commonly supported by both rod-shaped elastic members changes.

In other words, the relay member absorbs the change in the height position caused by the deformation of the rod-shaped elastic members, whereby the movable table slides in the same plane without changing in the height direction as a whole. You can move. When the electromagnetic driving force is released, the movable table returns to the original position in a straight line by the spring action of each rod-shaped elastic member (actuation of the original position return function).

Further, even when the movable table is rotationally driven in the same plane, for the same reason, the movable table is rotated in the same plane while maintaining substantially the same height as a whole. . Also in this case, when the electromagnetic driving force is released, the movable table returns to the original position in a straight line by the spring action of each rod-shaped elastic member (actuation of the original position returning function). In the operation of each of these parts, since there is no frictional part at all, smooth planar movement of the movable table is realized in a stable state.

According to a fifth aspect of the present invention, in the precision machining stage apparatus according to the first aspect, the movable table is provided with an auxiliary table which is opposed to the movable table at a predetermined interval and is parallel to the movable table. The mechanism is configured to hold the movable table via the auxiliary table.

A plurality of driven magnets having the above-mentioned electromagnetic drive means fixedly mounted at a predetermined position of at least one of a movable table and an auxiliary table, and a coil arranged so as to face each of the driven magnets. A drive coil that has a side and electromagnetically applies a predetermined drive force to each of the driven magnets along a predetermined movement direction of the movable table, and a fixing that holds the drive coil in a fixed position. And a plate.

Further, two position detection sensors are arranged at a predetermined distance from at least one end in the direction along the X axis and the Y axis from the center of the auxiliary table. Then, the capacitance detection electrode portion of each of the position detection sensors is provided on the main body portion, and the common electrode portion provided corresponding to this is provided on the auxiliary table side. Other configurations are the same as the invention described in claim 1 described above.

Therefore, according to the invention of claim 5,
In addition to having the same function as that of the invention described in claim 1, the electromagnetic drive means is further configured to apply a plane moving force to the movable table via the auxiliary table and corresponds to the peripheral end portion of the auxiliary table. Since each position detection sensor is equipped, there is a structural margin and the space around the drive coil, which is the main part of the electromagnetic drive means, can be set large, so heat can be dissipated even when the drive coil is used continuously for a long time. Can be effectively executed.

According to a sixth aspect of the present invention, in the precision machining stage apparatus according to the second aspect, the movable table is provided with an auxiliary table which is opposed to the movable table at a predetermined interval and is parallel to the movable table, and the table holding is performed. The mechanism is configured to hold the movable table via the auxiliary table.

A plurality of driven magnets, each of which has the electromagnetic driving means fixedly mounted at a predetermined position of at least one of a movable table and an auxiliary table, and a coil arranged so as to face each of the driven magnets. A drive coil that has a side and electromagnetically applies a predetermined drive force to the driven magnets in a predetermined movement direction of the movable table, and a fixed plate that holds the drive coil in a fixed position. And a configuration including.

Further, two position detecting sensors are arranged at a predetermined interval from both ends of the auxiliary table in the direction along the X axis and the Y axis from the center of the auxiliary table. Then, the capacitance detection electrode portion of each of the position detection sensors is provided on the main body portion, and the common electrode portion provided corresponding to this is provided on the auxiliary table side. The other structure is the same as that of the invention described in claim 2.

Therefore, according to the invention of claim 6,
In addition to having the same function as that of the invention described in claim 2, the electromagnetic drive means is further configured to apply a plane movement force to the movable table via the auxiliary table, and each position detection sensor is provided in the auxiliary table. Since it is mounted on the surface (lower surface side portion) opposite to the electromagnetic drive means, there is a structural margin, and the space around the drive coil forming the essential part of the electromagnetic drive means can be set large, so that the drive coil The heat dissipation function can be enhanced.

According to a seventh aspect of the present invention, in the precision machining stage device according to the sixth aspect, one end and the other end of a direction ahead from the center of the auxiliary table along the X axis and the Y axis. Among the two position detection sensors arranged corresponding to the above, one of each of the two position detection sensors arranged at each end of the direction destination along the axis of either the X axis or the Y axis is provided. And the configuration is adopted.

Even in this case, it is possible to obtain the one having substantially the same function as that of the invention described in claim 2 by the predetermined arithmetic processing and the like. In this case, the amount of movement information in the direction in which the number of position detection sensors is reduced actually decreases, but, for example, the electrode area of the position detection sensor at one position detection sensor is increased, or By performing predetermined signal processing (such as doubling the amount of change at the location), it is possible to obtain a device having substantially the same function as that of the invention described in claim 6.

According to the invention of claim 8, in the stage device for precision machining according to claim 5, 6 or 7 described above,
A table holding mechanism, at least three table-side rod-shaped elastic members of the same length, which are arranged at a predetermined interval on the same circumference of the auxiliary table and are set in a hanging state downward from the peripheral end portion, The table-side rod-shaped elastic members are provided so as to correspond to the table-side rod-shaped elastic members and are arranged on the same circumference outside the table-side rod-shaped elastic members. One end portion is held by the main body portion and the other end portion is in a hanging state. The main body side rod-shaped elastic members having the same length are set, and a relay member integrally connecting the other ends of the table-side and body-side rod-shaped elastic members is provided. Further, at least three sets (six in total) of the rod-shaped elastic members constituted by this are formed by the rod-shaped elastic members of the same strength, such as piano wires, respectively.

Therefore, according to the invention of claim 8,
In addition to having the same function as that of the invention described in claim 5, 6 or 7, the table holding mechanism is configured as described above. For example, when the movable table slides in the same direction, Since all the rod-shaped elastic members are elastically deformed equally, the height position of the auxiliary table (that is, the movable table) is always set to be constant (similarly to the case of the invention described in claim 4).

According to a ninth aspect of the present invention, in the precision machining stage device according to any one of the first to eighth aspects, the magnetic pole side end surface portion of the driven magnet is closely opposed to the driven magnet. A braking plate made of a non-magnetic metal member is arranged, and this braking plate is fixedly mounted on the fixed plate side.

Therefore, according to the invention of claim 9,
In addition to having the same function as the invention according to any one of claims 1 to 8 described above, further, when the auxiliary table or the movable table equipped with the driven magnet makes an abrupt movement, the driven table is driven. Electromagnetic braking force (eddy current brake) with a magnitude proportional to the moving speed between the magnet and the braking plate
Occurs, the sudden movement of the auxiliary table or the movable table is suppressed, and the auxiliary table or the movable table gradually and smoothly moves. Therefore, in the capacitance detection electrode portion of each position detection sensor, the change in the capacitance can be detected more accurately in real time. In this case, the driven magnet has both functions as a part of the electromagnetic drive means and as a magnetic flux generation source for eddy current braking with respect to the braking plate.

According to a tenth aspect of the present invention, in the precision machining stage device according to the second, third, sixth or seventh aspect, the capacitance detecting electrode portions of the plurality of pairs of position detecting sensors are connected to the above-mentioned X-axis and The configuration is such that they are arranged at positions symmetrical with respect to the Y axis. Therefore, in the invention according to claim 10, the above-mentioned claim 2 or 6
In addition to having the same function as the described invention, further, when the movable table moves normally, the rate of increase or decrease (or absolute value) of the capacitance change detected by each of the two position detection sensors becomes the same. Therefore, the data obtained together with the operation of the movable table can be processed in a short time, and therefore, the abnormality of the operation of the movable table can be quickly captured and output to the outside.

According to an eleventh aspect of the present invention, in the precision machining stage apparatus according to any one of the first to tenth aspects, the table drive control means controls the movable table output from the arithmetic section. A position deviation calculating function for calculating a deviation from the reference position information of the moving destination set in advance based on the position information, and a moving destination set in advance by driving the electromagnetic driving means based on the calculated position deviation information. The table position correction function for setting and controlling the movable table at the reference position is provided.

Therefore, the invention according to claim 11 has the same function as that of each of the inventions according to claims 1 to 10, and further, the movable table is positioned for some reason during the transfer or at the final transfer destination. When a deviation occurs, the position deviation calculation function of the table drive control means operates based on the actual table position information specified by the above-mentioned calculation unit, whereby the degree of the position deviation is calculated, and at the same time the table position correction is performed. The function is activated and the movable table is transferred to a predetermined target position. That is, since the movable table itself is transferred while the positional deviation is corrected by the positional deviation calculating function and the table position correcting function of the table drive control means, the movable table is automatically and highly accurately moved to a predetermined target position. Be transferred to. In this case, the correction of the displacement in the moving direction by the table position correction function is performed by specifically adjusting the magnitude of the drive current supplied to each drive coil of the table drive control means (that is, the magnitude of the electromagnetic drive force). It is executed by

[0046]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.

[0047]

[First Embodiment] A first embodiment of the present invention is shown in FIGS. First, in FIGS. 1 to 18, reference numeral 1 indicates a movable table, and reference numeral 2 indicates a table holding mechanism. The table holding mechanism 2 is arranged in the lower part of FIG. 1, allows the movable table 1 to move in any direction within the same plane, and applies a return force to the original position of the movable table 1. It is configured to hold the movable table 1 in a state (state having a function of returning to the original position).

The table holding mechanism 2 is supported by a case main body 3 as a main body. Case body 3
In the present embodiment, as shown in FIG. 1, the box is formed in a box shape having an open upper portion and a lower portion. Appendix No. 4 shows an electromagnetic drive means. The electromagnetic driving means 4 has a main part held on the case body 3 side and has a function of urging a moving force to the movable table 1 described above. Reference numeral 3A indicates a driving means holding portion that is provided so as to project around the inner wall portion of the case body 3.
The electromagnetic drive means 4 is arranged between the auxiliary table 5 and the movable table 1 in this embodiment.

An auxiliary table 5 is connected to the movable table 1 in parallel with the movable table 1 at a predetermined interval. The table holding mechanism 2 described above is mounted on the side of the auxiliary table 5 and configured to hold the movable table 1 via the auxiliary table 5.

The electromagnetic drive means 4 is composed of four square driven magnets 6 fixedly mounted on the auxiliary table 5 at predetermined positions, and a cross-shaped coil facing each of the driven magnets 6. A terrace-shaped drive coil 7 that has a side and electromagnetically applies a predetermined driving force to the driven magnets 6 along a predetermined movement direction of the movable table 1 described above, and the terrace-shaped drive coil 7 is held at a fixed position, and a fixed plate 8 mounted on the movable table 1 side of the auxiliary table 5 described above is provided. Of these, the terrace driving coil 7 and the fixed plate 8 constitute a main part of the electromagnetic driving means 4.

Further, a braking plate 9 made of a non-magnetic metal member is individually provided close to the magnetic pole surface of the driven magnet 6 on the end surface side of the above-mentioned terraced driving coil 7 on the side of the driven magnet 6 described above. It is arranged. This braking plate 9 is in a state of being fixed to the above-mentioned fixed plate 8 side.

This will be described in more detail below. [Movable Table and Auxiliary Table] First, in FIGS. 1 to 4, the movable table 1 is formed, for example, in a circular shape, and the auxiliary table 5 is formed in a quadrangular shape. The auxiliary table 5 is arranged in parallel with the movable table 1 so as to face the movable table 1 at a predetermined interval, and is integrally connected to the movable table 1 described above through a connecting column 10 at the center thereof.
Therefore, this movable table can move integrally and rotate integrally while maintaining the parallel state with the auxiliary table 5.

The connecting column 10 is a connecting member for connecting the movable table 1 and the auxiliary table 5 as described above, and is formed in a cross-section having a collar portion 10A, 10B at both ends, and both ends thereof are formed. A positioning hole 1 formed at the center of each of the movable table 1 and the auxiliary table 5 at the center of the outer side of the part.
Protrusions 10a and 10b that engage with a and 5a are provided.

The movable table 1 and the auxiliary table 5
Is positioned by the projections 10a and 10b and the flange portions 10A and 10B, and is fixed and integrated with the connecting column 10. In this embodiment, an adhesive is used for this integration, but it may be partially joined by welding, or the protrusions 10a, 10b may be positioned in the positioning holes 1a,
You may press fit in 5a and may integrate other parts by an adhesive agent or welding.

Further, the movable table 1 or the auxiliary table 5
Either one of them may be detachably fixed to the collar portion 10A or 10B of the connecting column 10 described above by screwing. In this case, it is advisable to drive several knock pins between the two engaging with each other for positioning and fixing after screwing (not shown). This is convenient because the movable table 1 and the auxiliary table 5 can be integrated more effectively.

[Table Holding Mechanism] In the present embodiment, the table holding mechanism 2 holds the movable table 1 and holds the movable table 1 in any direction on the same plane without changing its height position. The auxiliary table 5 is also provided with a function that allows it to be freely moved, and this is executed through the auxiliary table 5.

The table holding mechanism 2 is an application of a link mechanism to a three-dimensional space as a whole, and is a piano wire (movable table 1 and auxiliary table) as two rod-shaped elastic members installed at predetermined intervals. (Any other member may be used as long as it is a rod-shaped elastic member having a sufficient rigidity to support the table 5), and four sets are prepared in advance corresponding to the corners around the end of the auxiliary table 5. Then, the four sets of piano wires are divided into the four corners of the quadrangular relay plate 2G for each set and are planted in the upward direction. And four piano wires 2A located inside (table side)
The auxiliary table 5 is held from below and the relay plate 2G is swingably suspended from the main body 3 by the four piano wires 2B located on the outer side (main body side).

That is, in the present embodiment, at least four table holding mechanisms 2 are arranged on the same circumference of the auxiliary table 5 at predetermined intervals and are set in a hanging state downward from the peripheral end portion. Of the table-side rod-shaped elastic members (table-side piano wires 2A) having the same length, and arranged on the same circumference outside the table-side rod-shaped elastic members provided corresponding to the table-side rod-shaped elastic members. A body-side rod-shaped elastic member (body-side piano wire 2B) of the same length, which is provided and has one end held by the body (case body 3) described above and the other end set in a suspended state, and the table side and It is configured by a relay member (relay plate 2G) that integrally connects the other ends of the rod-shaped elastic members on the main body side.

Here, each of the four sets of eight rod-shaped elastic members is formed of a rod-shaped elastic member having the same strength, such as a piano wire, as described above, and the rod-shaped elastic members constituting each set are mutually connected. The distances S between them are set to be the same.

As a result, the auxiliary table 5 (that is, the movable table 1) is connected to the relay plate 2G and each of the four piano wires 2.
It is held in the air in a stable manner by A and 2B, and its movement in the horizontal plane can be freely moved in any direction while maintaining the same height position as described later. Rotational movement in the same plane is possible in almost the same manner.

This will be described in more detail. The table holding mechanism 2 described above includes the table-side piano wire 2A, which is four rod-shaped elastic members, which are planted downward from the four corners of the peripheral end portion of the auxiliary table 5, respectively, and the table-side piano wires 2A. A relay plate 2G as a relay member that is commonly provided at the lower end of the piano wire 2A in FIG. 1, and the above-mentioned table-side piano wire (table-side rod-shaped elastic member) configured to suspend the relay plate 2G from the main body side. Material) 2A
And a main body side piano wire (main body side rod-shaped elastic member) 2B which is four rod-shaped elastic members mounted on the outside of the.

The upper ends of the four piano wires 2A on the table side in FIG. 1 are fixed to the auxiliary table 5 and the lower ends thereof are fixed to the relay plate 2G. Reference numerals 5A and 5B
Indicates downward projections provided at two locations on the lower surface side of the auxiliary table 5. The fixed position of the table-side piano wire 2A is set by the downward protrusions 5A and 5B. Each of the piano wires 2A and 2B as the rod-like elastic members is provided with an appropriate rigidity sufficient to support the movable table 1 and the auxiliary table 5 as described above.

As a result, the movable table 1 described above is
First, the auxiliary table 5 is supported on the relay plate 2G by the inner four piano wires 2A on the table side,
Within the elastic limit of the four table-side piano wires 2A (with the function of returning to the original position), the parallel movement and the in-plane rotation of the four piano wires are allowed according to the principle of the link mechanism.

On the other hand, since the relay plate 2G is suspended from the main body side projecting portion 3B by the four outer table side piano wires 2B on the relay plate 2G, it is parallel to the case main body 3. Movement and in-plane rotation are also allowed.

Therefore, when the auxiliary table 5 (that is, the movable table 1) moves or rotates in the same plane by being biased by an external force (for example, an electromagnetic driving force), it will be described later with reference to FIG.
As shown in, the piano wires 2A and 2B on the table side and the case body side are elastically deformed at the same time, and the relay plate 2G moves up and down while maintaining the parallel state. That is, when the auxiliary table 5 (that is, the movable table 1) moves or rotates in the plane by an external force, the change in the height position is absorbed by the relay plate 2G. As a result, the movable table 1 is moved by each piano wire 2 even if it is moved by being biased by an external force.
It is possible to move while maintaining the same height in any direction within the elastic limits of A and 2B.

Here, the piano wires 2A and 2B on the table side and the case body side have the same diameter and the same elastic strength, and the lengths L of their exposed portions are exactly the same. Is set to. In addition, as shown in FIGS. 1 and 3, the piano wires 2A and 2B are arranged symmetrically at the corners of the auxiliary table 5 and in the vicinity thereof, as shown in FIGS. If the equipment is installed in a different position, the equipment position is not necessarily limited to that shown in FIGS. Also,
Each piano wire 2A, 2B on the table side and the case body side
As for the arrangement of, for example, they may be arranged at positions symmetrical with respect to the X axis and the Y axis, respectively.

Then, as described above, each piano wire 2A,
By arranging 2B, elastic stress is uniformly generated in each of the piano wires 2A and 2B when the movable table 1 is moved, so that the movable table 1 including the return of the original position of the movable table 1 in the same plane. It is possible to obtain an advantage that it can move smoothly vertically and horizontally including rotation.

In this way, the table holding mechanism 2 described above is used.
Then, for example, when the auxiliary table 5 slides in the same direction as a whole, all the piano wires 2A and 2B of each set are deformed in the same manner. In this case, since the main body side piano wire 2B is elastically deformed in a state where the end portion is held,
Similarly, the height position of the auxiliary table 5 does not change due to the deforming operation of the table side piano wire 2A that elastically deforms, and instead, the height position of the relay plate 2G commonly supported by both piano wires 2A and 2B changes. .

In other words, the relay plate 2G absorbs the variation of the height position caused by the deformation of the piano wires 2A and 2B, and thus the auxiliary table 5 (that is,
The movable table 1) slides in the same plane without changing its height as a whole. In this case, when the driving force is released from the auxiliary table 5,
Is returned to the original position in a straight line by the spring action of each piano wire 2A, 2B (execution of the original position return function).

Further, even when the auxiliary table 5 (that is, the movable table 1) is rotationally driven in the same plane, the auxiliary table 5 (that is, the movable table 1) as a whole has substantially the same height for the same reason. Therefore, the rotation operation is performed in the same plane while maintaining the above-mentioned value. In this case as well, when the driving force is released, the auxiliary table 5 returns to the original position along with the movable table 1 in a straight line by the spring action of the piano wires 2A and 2B. Here, in the present embodiment, the case where four sets and eight piano wires 2A and 3A are equipped as the rod-shaped elastic members is illustrated, but three sets and six piano wires may be used. In this case, the three sets of six piano wires are the four sets of eight piano wires 2 described above.
Even after removing any one set of A and 2B, or after removing any one set of the above four sets of eight piano wires 2A and 2B, the remaining three sets and six piano wires are evenly arranged. It may be a reworked one.

[Electromagnetic Driving Means] Between the movable table 1 and the auxiliary table 5, as described above, the auxiliary table 5 is provided.
An electromagnetic drive means 4 for urging a predetermined moving force to the movable table 1 through the above is provided (see FIG. 1).

The electromagnetic drive means 4 is, as described above,
In this embodiment, four driven magnets mounted on the auxiliary table 5 (in this embodiment, permanent magnets are used)
6, four pad-shaped drive coils 7 that apply a predetermined electromagnetic force to the movable table 1 in a predetermined moving direction via the driven magnets 6, and hold the respective pad-shaped drive coils 7. And a fixed plate 8 for

As shown in FIG. 1, the fixed plate 8 is mounted on the movable table 1 side of the auxiliary table 5 (between the auxiliary table 5 and the movable table 1), and the periphery thereof is fixed to the case body 3. Equipped. Here, the fixing plate 8 may be configured such that only the left and right ends of FIG. 1 are fixedly mounted on the case body 3. A through hole 8A is formed in the central portion of the fixed plate 8 to allow the parallel movement of the connecting column 10 within a predetermined range. In this embodiment, the through hole 8A has a circular shape, but may have a rectangular shape or another shape.

As described above, the entire periphery of the fixing plate 8 is held by the main body side protruding portion 3. In this case, the fixing plate 8 and the main body side protruding portion 3A may be integrated with a knock pin or the like after screwing, or may be integrated with welding or the like in order to make the integration robust. By doing so, there is an advantage that the fixed plate 8 can smoothly cope with displacement and movement in units of micron (μ) of the movable table without causing positional displacement with respect to the case body 3. Occurs.

As shown in FIGS. 2 and 3, the above-mentioned four driven magnets 6 are permanent magnets each having a quadrangular surface facing the drive coil. On the XY plane consisting of the orthogonal X and Y axes,
They are arranged and fixed on the X axis and the Y axis at positions equidistant from the center. At a position facing the four driven magnets 6, there is a cross-shaped coil side in the central portion, and an electromagnetic wave is applied to each of the driven magnets 6 along a predetermined moving direction of the movable table 1 described above. The field-shaped driving coil 7 that applies a predetermined driving force to the four driven magnets 6 described above.
Is fixedly installed at a fixed position on the fixed plate 8 in correspondence with the above.

In this case, the directions of the four driven magnets 6 are
In this embodiment, the magnetic poles on the side facing the D-shaped drive coil 7 are set to the N pole on the X axis and the S pole on the Y axis (see FIGS. 2 and 3). . Therefore, the electromagnetic force generated between the current that is passed in the vertical or horizontal direction of the cross-shaped coil side and the driven magnet 6 is always unified in the X-axis direction or the Y-axis direction, and the resultant force is always the same. It is set to the maximum value. Therefore, the generated electromagnetic force can be efficiently output as a driving force for the movable table 1, which is convenient.

Further, the size of the above-mentioned terrace-shaped drive coil 7 is set such that the area of the cross-shaped coil side inside has the maximum movement range of the driven magnet 6 described above. . Therefore, the electromagnetic force generated between the four driven magnets 6 is generated by the auxiliary table through the driven magnets 6 because the grid-shaped driving coil 7 is fixed at a fixed position on the fixed plate 8. As a moving force in a predetermined direction with respect to 5, it is surely output.

[Rectangular Driving Coil] The rectangular driving coil 7 forming the main part of the electromagnetic driving means 4 is actually four independent small rectangular coils 7a as shown in FIG. , 7b, 7c, 7d.

Then, by switching the energization direction of each of the small rectangular coils 7a to 7d from the outside by an operation control system which will be described later, for example, the current flowing in the cross-shaped portion inside the grid-shaped drive coil 7 is changed vertically. It becomes possible to energize (including the forward or reverse direction) only in one of the direction and the lateral direction, whereby the Fleming's left-hand rule is applied to the corresponding driven magnets 6. Accordingly, it is possible to output an electromagnetic force (reaction force) that presses each driven magnet 6 in a predetermined direction.

Therefore, the four small rectangular coils 7a to 7d
By combining the directions of the electromagnetic force generated in the crosswise coil side portion located inside the above-mentioned rice-shaped drive coil 7, the energization state in either the vertical direction or the horizontal direction is set, The electromagnetic driving force in a predetermined direction is output to the corresponding driven magnet 6 by. Then, by the resultant force of the electromagnetic driving forces generated in the above-mentioned four driven magnets 6, a moving force is urged to the above-mentioned auxiliary table 5 in an arbitrary direction including a rotational operation on the XY axes. It has become so.

A series of energization control methods for these four small rectangular coils 7a to 7d will be described in detail in the description section (FIGS. 6 and 8) of the program storage unit 22 described later.
Further, the four small rectangular coils 7a to 7d may be hollow coils, but may be filled with a conductive magnetic member such as ferrite inside. Reference numeral 9 indicates a braking plate fixedly provided on the side of the D-shaped drive coil 7 so as to closely face the driven magnet 6.

[Position Information Detection Means] The movement state of the auxiliary table 5 (that is, the movable table 1) driven by the electromagnetic drive means 4 is detected by the position information detection means 25.

As shown in FIG. 6, the position information detecting means 25 includes a capacitance sensor group 26 having a plurality of capacitance type capacitance detection electrodes in the present embodiment, and this capacitance sensor group 26.
And a position information calculation circuit 27 as a calculation unit which converts the capacitance components of the plurality of changed sensor portions detected in step S1 into a voltage and performs a predetermined calculation and sends the calculated position information to the table drive control means 21 described later. Has become.

Of these, the position information arithmetic circuit (arithmetic unit) 27
Is a plurality of changes detected by the capacitance sensor group 26 described above.
Signal conversion that individually converts the capacitive components of the
The conversion circuit unit 27A and the signal conversion circuit unit 27
The voltage signals from the multiple changed sensor parts are
X direction position signal V indicating the position on the XY coordinates by calculation _X
And Y direction position signal V_YConverted to the above capacity
Predetermined based on all information detected by the sensor group 26
Position signal calculation time to calculate and output as rotation angle signal θ
It is constituted by the road portion 27B.

As shown in FIGS. 1 to 4, the capacitance sensor group 26 having a plurality of capacitance detection electrodes described above faces the lower surface portion around the auxiliary table 5 and has the main body side protruding portion 3B. Eight prism-shaped capacitance detection electrodes 26X ₁ , 26X ₂ , 26X ₃ , 2 arranged on the upper surface at predetermined intervals.
6X ₄ , 26Y ₁ , 26Y ₂ , 26Y ₃ , 26Y ₄ , and
Corresponding to this, it is constituted by a relatively wide common electrode (not shown) continuously provided on the lower surface portion around the auxiliary table 5 described above.

Therefore, in the case of the position detecting sensor,
Actually, each capacitance detection electrode 26X ₁, 26X₂, 26
X₃, 26X_Four, 26Y₁, 26Y₂, 26Y₃, 26
Y_FourAnd a common electrode (not shown)
However, here, for convenience, the capacitance detection electrode 26X₁, 26
X₂, 26X₃, 26X_Four, 26Y₁, 26Y₂, 26
Y₃, 26Y_FourShould be treated as a position sensor.
It

Each capacitance detection electrode (position detection sensor) 2
6X ₁ , 26X ₂ , 26X ₃ , 26X ₄ , 26Y ₁ , 2
Of 6Y ₂ , 26Y ₃ , and 26Y ₄ , two capacitance detection electrodes (position detection sensors) 26X ₁ and 26X ₂ are provided at the right end of FIGS. 2 and 3 at predetermined intervals along the vertical direction. To the other two capacitance detection electrodes (position detection sensor) 2
6X _3, 26X ₄ is 2, it is equipped at a predetermined distance along the upper and lower left portion of FIG.

Further, each capacitance detection electrode 26X₁, 26
X₂, 26X₃, 26X_Four, 26Y ₁, 26Y₂, 26
Y₃, 26Y_FourOf the two, two capacitance detection electrodes (position detection
26Y₁, 26Y₂Is the left and right of the upper end of Figs.
Along with the other two, the other two capacity detectors are installed.
Output electrode (position detection sensor) 26Y₃, 26Y_FourFigure 2
It is equipped at the lower end of Fig. 3 along the left and right with a predetermined interval.
ing.

That is, the above eight capacitance detection electrodes (position detection sensors) 26X ₁ , 26X ₂ , 26X ₃ , 26X ₄ ,
In the present embodiment, 26Y ₁ , 26Y ₂ , 26Y ₃ , and 26Y ₄ are arranged at positions symmetrical with respect to the X axis and the Y axis, respectively, as shown in FIGS. 2 to 4 and 7. Has been done. It should be noted that the arrangement of the capacitance detection electrodes need not necessarily be line-symmetrical with respect to the X axis and the Y axis.

Then, for example, the above-mentioned auxiliary table 5
When the movable table 1 (that is, the movable table 1) is urged by the electromagnetic drive means 4 to move in the direction of arrow F (upper right direction in the figure) as shown in FIG. 7A, in the present embodiment, the auxiliary table is used. One of the position detection sensors 26X ₁ , 26X ₂ (26Y ₁ , 26Y ₂ ) located on both sides (and in the vertical direction) of 5 and the other position detection sensor 26X ₃ , 26X ₄ (26Y ₃ ,
26Y ₄ ), the changed capacitance component is detected by the signal conversion circuit 27A, and then the position signal calculation circuit 27
It is sent to B, and the above-mentioned converted voltages are inputted by the position signal arithmetic circuit 27B and differentially output as the X-direction position signal V _X and the Y-direction position signal V _Y (as described later). There is.

Further, when the auxiliary table 5 is biased by the electromagnetic drive means 4 and is rotated in the direction of the arrow as shown in FIG. 7B, in this embodiment, each part is operated in the same manner as described above. It operates and functions in the same manner, and the changed capacitance component is voltage-converted and differentially output as a predetermined rotation angle signal θ (as described later).

Here, as the auxiliary table 5 (movable table 1) moves, each of the eight capacitance detection electrodes (position detection sensors) detects the capacitance change in real time, and this is detected by a position information calculation circuit (calculation unit). Send to 27. The position information calculation circuit (calculation unit) 27 specifies the movement direction and the movement amount of the movable table based on the eight sensor information. Reference numeral 27 a is a position information arithmetic circuit (arithmetic unit) 27.
3 shows an output terminal for externally outputting information relating to the moving direction and the moving amount of the movable table specified in.

In this case, for example, when there is no change in the capacitance of the total of four position detection sensors provided corresponding to the respective ends of the auxiliary table 5 in the Y-axis direction, the movable table is moved along the X-axis. (There is no rotation operation), the movement direction is judged by the increase / decrease in the capacity of the four position detection sensors in the X-axis direction, and the movement amount is changed by the position detection sensor in the X-axis direction. Specified by the capacity value.

When the position detecting sensors in both the X-axis direction and the Y-axis direction detect the same capacitance change, it means that the movable table has moved in the 45 ° direction (without rotating operation), The movement direction is directly determined by the pattern of increase / decrease in the capacitance of each position detection sensor, and the movement amount is specified by the change amount of the capacitance of each position detection sensor.

Furthermore, when the two position detection sensors forming a pair arranged at the same position output different capacitance changes, it means that the movable table is rotating, and at the same time, two position detections of one of them are performed. When the difference in capacitance change between the sensors and the difference in capacitance change between the other two position detection sensors are equal, it means normal rotation. The rotation direction of the movable table is determined by a pattern of increase / decrease in capacity of each position detection sensor, and the movement amount thereof is specified by the amount of change in capacity of each position detection sensor.

Here, the specification of the movement direction based on the capacitance change pattern of each position detection sensor and the relationship between the change amount of the capacitance of each position detection sensor and the movement amount of the movable table are, for example, experimentally specified in advance. Alternatively, it may be configured to be mapped and stored in a memory or the like, and the positional deviation or the like may be determined based on this. This is convenient because the calculation processing can be speeded up.

Further, in the present embodiment, for example, FIG.
Noise that is simultaneously applied to each of the left and right (and up and down) capacitance detection electrodes is output as a differential output (for example, a difference in capacitance change detected by the capacitance detection electrodes arranged at one end and the other end in the X-axis direction). Taken by: external noise elimination function), and at the same time, the measured values are converted into voltage and the changes are added together and output. Therefore, the position information of the auxiliary table 5 (movable table 1) can be highly sensitive. It has the advantage that it can be output.

[Operation Control System] In the present embodiment, in the electromagnetic drive means 4 described above, the movable table 1 described above is controlled by individually driving and controlling the plurality of terrace drive coils 7 described above.
An operation control system 20 for restricting the movement or rotation of is also provided (see FIG. 6).

As shown in FIG. 6, this operation control system 20 individually drives each of the plurality of terrace driving coils 7 of the electromagnetic driving means 4 in accordance with a predetermined control mode to drive the movable table 1 in a predetermined manner. Table drive control means 21 for controlling the movement in the direction, and the moving direction and rotation direction of the movable table 1 described above that is provided in parallel with the table drive control means 21.
And a program storage unit 22 that stores a plurality of control programs according to a plurality of control modes whose operation amounts and the like are specified, and a data storage unit 23 that stores predetermined data and the like used when executing each of these control programs. It has and.

The table drive control means 21 is provided with an operation command input section 24 for instructing a predetermined control operation for each of the plurality of terrace drive coils 7. Further, the above-mentioned position information of the movable table 1 during and after the movement is detected by the above-mentioned position information detecting means 25 and is sent to the table drive control means 21 by highly sensitive arithmetic processing as described later. It is like this.

In the present embodiment, the above-mentioned table drive control means 21 operates based on the command from the operation command input section 24, and a predetermined control mode is set in the program storage section 2.
A main control unit 21A that controls the energization of a predetermined current to each of the plurality of terrace driving coils 7 selected from 2 and four predetermined terrace driving in accordance with the control mode set by the main controller 21A. .. and a coil selection drive control section 21B for controlling the drive of the coils 7, 7, ... Simultaneously and individually.

Further, the main control section 21A also has a function of calculating the position of the movable table 1 described above based on the input information from the position information detecting means 25 for detecting the table position or performing other various calculations at the same time. ing. Code 4
Reference numeral G denotes a power supply circuit section for supplying a predetermined current to each of the plurality of terrace driving coils 7 of the electromagnetic driving means 4 described above.

Further, the table drive control means 21 is
The information from the above-mentioned position information detecting means 25 is input, a predetermined calculation is performed, and based on this, the operation command input unit 24 is preliminarily calculated.
The position deviation calculating function for calculating the deviation from the reference position information of the moving destination set in step 3, and the electromagnetic drive means 4 is driven based on the calculated position deviation information to move the movable position to the preset reference position of the moving destination. A table position correction function for controlling the transfer of the table 1 is provided. Regarding the position deviation calculating function and the table position correcting function in the table drive control means 21, a specific example of the control operation (FIGS. 17 to 3).
0) will be described in detail later.

Therefore, in this embodiment, when the moving direction of the movable table 1 is deviated due to disturbance or the like,
The movable table 1 is transferred and controlled in a predetermined direction while correcting the deviation, and thus the movable table 1 is quickly and accurately transferred to a preset target position.

[Program Storage Unit] The table drive control means 21 described above operates in accordance with a predetermined control program (a predetermined energization pattern and a predetermined control mode which is a selected combination thereof) stored in the program storage unit 22 in advance. The four drive coils 7 of the drive means 4 are individually driven and controlled.

That is, in the program storage unit 22 described above, in the present embodiment, there are four basic energization patterns for executing the above-mentioned four rectangular drive coils 7, 7 ,. The program is stored (see FIGS. 6 and 8).

FIG. 8 shows the terrace drive coil 7 (on the stator side).
4 kinds of energization patterns A, B, C, D for the four rectangular small coils 7a, 7b, 7c, 7d, and the directions of the currents generated at the cross-shaped portions of the respective rectangular drive coils at that time, and corresponding thereto The directions of the electromagnetic driving force (thrust) generated in the driven magnet (permanent magnet) 6 on the mover side are shown.

In FIG. 8, in the case of the energization pattern A, the counterclockwise current is supplied to the small rectangular coils 7a and 7b, and the clockwise current is supplied to the small rectangular coils 7c and 7d. As a result, the magnetic flux output to the outside is entirely added or canceled at the cross-shaped coil side portion located in the central portion, and as a result, only the current I _{A in} the positive direction of the X axis is applied. It will be in the same state as.

In the energization pattern B, the energization of each of the small rectangular coils 7a to 7c is individually controlled as shown in the drawing.
As a result, a state equivalent to that in which only the negative direction current I _{B on} the X axis is applied. In the energization pattern C, the rectangular small coils 7a to 7c are individually energized as shown in the figure, and the state is equivalent to that in which only the current I _{C in} the positive direction of the Y axis is energized. Similarly, the energization pattern D
Then, as shown in the drawing, the respective rectangular small coils 7a to 7c are individually controlled to be energized, whereby a state equivalent to that in which only the current I _{D in} the negative direction of the Y axis is energized is obtained. The above four energization patterns A, B, C, D are executed based on a predetermined control program stored in the program storage unit 22 in advance.

Further, the white arrows disclosed in FIG. 8 indicate the electromagnetic drive generated between the driven magnet (permanent magnet) 6 on the mover side corresponding to these energization patterns A, B, C and D. The direction of force (thrust) is shown respectively.

In this case, the corresponding electromagnetic force is generated by the Fleming's left-hand rule on the side of the energizing coil of the grid-shaped drive coil 7, but the grid-shaped drive coil 7 must be fixed on the fixed plate 8. The reaction force is generated as an electromagnetic driving force (thrust) toward the driven magnet (permanent magnet) 6 side. The white arrow disclosed in FIG. 8 indicates the reaction force (electromagnetic driving force). Therefore, the direction of this reaction force (electromagnetic driving force) is reversed depending on the types of the magnetic poles N and S of the driven magnet 6.

Further, in the program storage unit 22, the movable table 1 is placed in the positive and negative directions of the X axis and the positive and negative directions of the Y axis on the XY plane assumed to be the center of the fixed plate 8 as the origin. First to fourth control modes for moving in two directions, fifth to eighth control modes for moving the movable table 1 in predetermined directions within each quadrant set on the XY plane, and a movable table. Each operation program for each of the ninth to tenth control modes for rotating 1 in the clockwise direction or the counterclockwise direction at a predetermined position is stored.

FIGS. 9 to 13 respectively show the above-mentioned first
The following is an example of the functions of the respective rectangular shape drive coils 7 and the operating states of the auxiliary table (movable table 1) that occur when the operating programs according to the tenth to tenth control modes are executed.

FIGS. 9A and 9B show the state when the first control mode is executed. As shown in this figure, in this first control mode, the two grid-shaped drive coils 7 and 7 on the X-axis are energized and controlled by the method of the current pattern D, respectively, and the two grid-shaped drive coils on the Y-axis are controlled. 7,7
Are energized by the method of the current pattern C. In FIG. 9A, symbols N and S indicate the types of magnetic poles of each driven magnet (permanent magnet) 6.

As a result, in the first control mode, the arrows F _X1, F are applied to the driven magnets (permanent magnets) 6.
Electromagnetic driving force is generated in the directions of _X2, F _{X3, and} F _X4 , whereby the auxiliary table 5 is driven in the positive direction (arrow + F _X ) on the X axis.

FIG. 9B shows each of the terrace driving coils 7,
The direction when the same electromagnetic driving force is generated on 7, ...
This is illustrated on the −Y coordinate. Therefore, when the auxiliary table 5 is transferred in the positive direction on the X axis,
It is important to generate a driving force of the same magnitude in each of the terrace driving coils 7, 7 on the Y axis.

In the case of the second control mode, the auxiliary table 5 is moved in the negative direction (not shown) on the X-axis, so that the respective coil drive coils 7, 7, ... Are energized. The current pattern may be set exactly opposite to that in the case of the above-mentioned first control mode. That is, in this second control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are controlled by the method of the conduction pattern C, and the two terrace-shaped drive coils 7 and 7 on the Y-axis are respectively controlled. Energization pattern D
Energization is controlled by this method. As a result, the auxiliary table 5 is smoothly transferred in the negative direction on the X axis (not shown).

FIGS. 10A and 10B show a state when the third control mode is executed. As shown in this figure, in this third control mode, the two grid drive coils 7 and 7 on the X-axis are each energized and controlled by the method of the energization pattern A, and the two grid drive coils on the Y-axis are controlled. 7,
7, the energization is controlled by the method of energization pattern B.

As a result, in this third control mode, the arrows F _Y1, F _Y are applied to each driven magnet (permanent magnet) 6.
Electromagnetic driving force is generated in the directions of _Y2, F _{Y3, and} F _Y4 , and thereby the auxiliary table 5 is driven in the positive direction (arrow + F _Y ) on the Y axis.

FIG. 10B shows each of the terrace driving coils 7,
The direction of the resultant force when the same electromagnetic driving force is generated in 7, ... is illustrated on the XY coordinates. From this, Y
When transferring the auxiliary table 5 in the positive direction on the axis,
In particular, it is important to generate a driving force of the same magnitude in each of the terrace driving coils 7, 7 on the X axis.

In the case of the fourth control mode, the auxiliary table 5 is moved in the negative direction on the Y-axis (not shown), so that the respective coil drive coils 7, 7, ... Are energized. The energization pattern may be set exactly opposite to that in the case of the above-mentioned third control mode. That is, in this second control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are energized and controlled by the method of the energization pattern B, and the two terrace-shaped drive coils 7 and 7 on the Y-axis are respectively controlled. Energization pattern A
Energization is controlled by this method. As a result, the auxiliary table 5 is smoothly transferred in the negative direction on the Y axis (not shown).

FIGS. 11A and 11B show the state when the fifth control mode is executed. As shown in this figure, in this fifth control mode, energization control is performed on the two terrace-shaped drive coils 7 and 7 on the X-axis by the method of energization pattern D, and the two terrace-shaped drive coils on the Y-axis are controlled. 7,
7, the energization is controlled by the method of energization pattern B.

As a result, in the fifth control mode, X
For the two driven magnets (permanent magnets) 6 on the axis, an electromagnetic driving force is generated in the directions of arrows F _X1, F _X3 , and for the two driven magnets (permanent magnets) 6 on the Y axis. Arrow F _Y2,
Electromagnetic driving force is generated in the direction of F _Y4 , which causes XY
The auxiliary table 5 is driven from the center point on the axis toward the first quadrant (arrow F _XY ).

FIG. 11 (B) shows each of the terrace driving coils 7,
The direction of the resultant force when the same electromagnetic driving force is generated in 7, ... is illustrated on the XY coordinates. From this, X
When the auxiliary table 5 is driven in the direction from the center point on the Y axis toward the first quadrant (arrow F _XY ), the value of the current supplied to each of the terrace driving coils 7, 7 ,. It can be seen that the moving direction can be changed by appropriately setting the size. The magnitude of the energizing current is set and controlled by the main controller 21A described above.

In the case of the sixth control mode, the auxiliary table 5 is transferred from the center point on the XY axes in the direction of the third quadrant (not shown).
The energization pattern for energizing 7, ... Can be set completely opposite to that in the case of the fifth control mode described above. That is, in the sixth control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are controlled by the method of the conduction pattern C, and the two terrace-shaped drive coils 7 and 7 on the Y-axis are respectively controlled. Energization is controlled by the method of energization pattern A. As a result, the auxiliary table 5 is smoothly transferred from the center point on the XY axes toward the third quadrant (not shown).

FIGS. 12A and 12B show the state when the seventh control mode is executed. As shown in this figure, in this seventh control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are each energized and controlled by the method of energization pattern C, and the two terrace-shaped drive coils on the Y-axis are controlled. 7,
7, the energization is controlled by the method of energization pattern B.

As a result, in the seventh control mode, X
For the two driven magnets (permanent magnets) 6 on the axis,
Mark-F_X1,-F_X3The electromagnetic driving force is generated in the direction of
For the two driven magnets (permanent magnets) 6 of
_Y2,F_Y4Electromagnetic driving force is generated in the direction of
-From the center point on the Y axis toward the second quadrant (arrow
F _YX) And the auxiliary table 5 is driven toward
It

FIG. 12B shows each of the terrace driving coils 7,
The direction of the resultant force when the same electromagnetic driving force is generated in 7, ... is illustrated on the XY coordinates. From this, X
When the auxiliary table 5 is driven in the direction from the center point on the Y coordinate toward the second quadrant (arrow F _YX ), the value of the current supplied to each of the terrace driving coils 7, 7 ,. By appropriately setting the size, the moving direction can be changed. The magnitude of the energizing current is set and controlled by the main controller 21A described above.

In the case of the eighth control mode, the auxiliary table 5 is transferred from the center point on the XY axes in the direction of the fourth quadrant (not shown).
The energization pattern for energizing 7, ... Can be set completely opposite to that in the case of the seventh control mode described above. That is, in the eighth control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are controlled by the method of the conduction pattern D, and the two terrace-shaped drive coils 7 and 7 on the Y-axis are respectively controlled. Energization is controlled by the method of energization pattern A. As a result, the auxiliary table 5 is smoothly transferred from the center point on the XY axes toward the fourth quadrant (not shown).

FIGS. 13A and 13B show the state when the ninth control mode is executed. As shown in this figure, in this ninth control mode, the auxiliary table 5
(Ie, the movable table 1) is rotated by a predetermined angle θ. In this control operation, the auxiliary table 5 having no central axis is circularly moved counterclockwise within a predetermined allowable range. It enables the stationary operation in.

That is, in the ninth control mode shown in FIG. 13 (A), the grid drive coil 7 on the positive axis of the X-axis is driven by the method of the energization pattern A to drive the grid on the negative axis of the X-axis. The energization pattern B is applied to the coil 7 by the energization pattern B, the energization pattern D is applied on the Y-axis positive axis by the energization pattern D, and the energization drive coil 7 on the Y-axis negative axis is applied by the energization pattern C. , Respectively, energization is controlled.

As a result, in the ninth control mode, the driven magnets (permanent magnets) 6 corresponding to the terrace driving coils 7, 7, ... Direction F _Y1 , −F _X2 , − that is orthogonal to each axis along the direction
Electromagnetic driving force is generated toward F _Y3 or F _X4 , respectively.

Therefore, as disclosed in FIG. 13 (A), the magnitude of the electromagnetic driving force generated in each driven magnet (permanent magnet) 6 is controlled to be the same magnitude P, so that the auxiliary Even if the table 5 does not have a central axis within a predetermined allowable range, the table 5 makes a circular motion in the counterclockwise direction and can be stationary at a predetermined position.

In this case, the stop position after the circular movement is the balance point (the position rotated by a predetermined angle θ) between the overall electromagnetic driving force and the original position restoring force due to the spring action of the table holding mechanism 2 described above, The position is experimentally specified in advance as a relationship between the set rotation angle and the electromagnetic driving force described above, and is graphically (mapped) in a searchable manner and stored in the data storage unit 23 described above.

FIG. 13B shows each of the terrace driving coils 7,
The direction when the same electromagnetic driving force is generated on 7, ...
This is illustrated on the −Y coordinate. As a result, the auxiliary table 5 (that is, the movable table 1) rotates counterclockwise by the predetermined angle θ with the center point O on the XY coordinates as the center of rotation and stops. In this case, the size of the rotation angle θ that sets the stop position after rotation is determined by
By appropriately setting and controlling the magnitude of the same current value applied to 7, ..., The rotation angle θ is determined.
The magnitude of the energizing current is set and controlled by the main controller 21A described above.

In the tenth control mode, the auxiliary table 5 (that is, the movable table 1) is rotated clockwise. Therefore, in the tenth control mode, the direction of the same current supplied to each of the above-mentioned terrace driving coils 7, 7, ... May be set in the opposite direction.

That is, the grid drive coil 7 on the positive axis of the X-axis
Is the energization pattern B, the grid drive coil 7 on the negative axis of the X axis is the energization pattern A, the grid drive coil 7 on the positive axis of the Y axis is the energization pattern C, and Y The energization control of each of the grid-shaped drive coils 7 on the negative axis of the shaft is performed by the method of energization pattern D.
As a result, the auxiliary table 5 is smoothly rotated clockwise by a predetermined angle θ on the XY coordinates (not shown).

The table drive control means 21 is provided with the operation programs related to the respective energization patterns and the respective control operations.
It is stored so as to be output to the operation program storage unit 22 provided side by side. Then, the table drive control means 21
Any one of the above-mentioned operation programs is selected based on a command from the operation command input unit 24, and the electromagnetic drive means 4 is driven and controlled based on the selected one.

[Braking Plate] As shown in FIG. 14, a metal braking plate made of a non-magnetic member is provided at the end face portion of each of the above-mentioned four terrace driving coils 7 facing the driven magnets 6. 9 is fixedly provided in the state of being insulated from the surroundings, facing and close to the magnetic pole surface of each driven magnet 6.

Each of the braking plates 9 has a function of gently moving the auxiliary table 5 (movable table 1) while suppressing the sudden movement of the auxiliary table 5 (movable table 1). There is. Here, FIG.
FIG. 1A is a partial sectional view showing a portion of the braking plate 9 shown in FIG. Further, FIG. 14B shows a plan view taken along the line AA of FIG. 14A.

That is, when the auxiliary table 5 or the movable table 1 equipped with the four driven magnets 6 makes a sudden movement, the driven magnets 6 and the braking plates 9 corresponding thereto are Electromagnetic braking (eddy current braking) works during. As a result, the auxiliary table 5 (that is, the movable table 1) is prevented from abruptly moving and gradually moves.

FIGS. 15 (A) and 15 (B) show the electromagnetic braking (
It shows the occurrence of current brake). This figure smells
The braking plate 9 faces the north pole of the driven magnet 6.
It is fixed to the end of the vertical drive coil 7. Now
The speed of the auxiliary table 5 is V to the right in the figure.₁Move rapidly with
Then, the metal braking plate 9 (fixed
The relative velocity V is the same in the left direction in the figure. ₂(= V₁)so
It will move rapidly. This allows for braking play
The velocity V is in accordance with Fleming's right-hand rule₂To
Proportional electromotive force E_VIndicates the direction shown in FIG. 15 (B) (in the figure,
(Upward), which causes left-right symmetry in the direction of the arrow
Eddy current flows.

Next, the electromotive force E_VFrom the N pole to the area where
Since there is a magnetic flux of
(Electromotive force E in the braking plate 9_VDirection) with eddy currents
In the meantime, according to Fleming's left-hand rule, a predetermined moving force f₁
Occurs in the braking plate 9 (to the right in the figure)
It On the other hand, the braking plate 9 is fixed on the fixed plate 8.
Therefore, the moving force f ₁Reaction force f₂Is driven magnet 6
It is generated as a braking force on the upper side, and its direction is the moving force f.₁Orientation
The opposite of the above. That is, this braking force f₂Is the driven magnet
The first sudden movement direction of stone 6 (ie auxiliary table 5)
Is in the opposite direction, and its size is
Since the size is proportional to the moving speed of the rule 5,
The abrupt movement of the auxiliary table 5 causes an appropriate braking force f.₂To
Therefore, it is restrained and moves smoothly in a stable state.
Become. The same applies to the other braking plate 9 as well.
Braking force f₂Occurs.

For this reason, in the auxiliary table 5 having the driven magnet 6, reciprocating movement is likely to occur at the stop location during, for example, abrupt stop operation, but the operation is affected by the braking force f ₂ . It will be moderately restrained and will move smoothly and gently. Therefore, as a whole, each of the braking plates 9 effectively functions and a device in which the movement of the auxiliary table 5 (movable table 1) is stable can be obtained. Further, even when the auxiliary table 5 vibrates slightly in a reciprocating manner due to the vibration from the outside, the reciprocating minute vibration similarly functions and is effectively suppressed.

Further, as shown in FIG. 16, each braking plate 9 made of a metal made of a non-magnetic member and mounted on the end face portion of each terrace-shaped drive coil has a relationship with each terrace-shaped drive coil 7 as shown in FIG. A secondary side circuit of the transformer is configured, and is short-circuited via a predetermined low resistance r (which causes an eddy current loss).

In FIG. 16, K ₁ is a primary winding representing the terrace drive coil 7, and K ₂ is a secondary winding corresponding to the braking plate 9. FIG. 16A shows a state where the secondary winding portion is short-circuited via the electric resistance component (low resistance r: eddy current loss occurs) in the braking plate 9. The other parts to which the braking plate 9 is attached are also in the same state. In addition, FIG. 16B shows a state in which the braking plate 9 is not provided (a state in which the secondary winding portion is open).
Indicates.

For this reason, each of the terrace driving coils 7 forming the primary side circuit in this case is short-circuited on the secondary side even if there is a large resistance due to the inductance component of the coil at the time of rising at startup (transient state). The effect can be effectively reduced, and at this point, a relatively large current can be applied from the time of start-up.
The electromagnetic driving force can be output more quickly than in the case where the braking plate 9 is not provided between the driven magnet and the driven magnet.

Further, each of the braking plates 9 also has a function of radiating the heat generated when each of the terrace driving coils 7 is driven. In this respect, an increase in resistance at high temperatures and a decrease in the energizing current value (that is, a decrease in the electromagnetic driving force) that occur with the continuous operation of the drive coil 7 are effectively suppressed and the energizing current is set to a substantially constant level for a long time. Therefore, current control from the outside with respect to the electromagnetic drive force output from the electromagnetic drive means can be continued in a stable state, and secular change (dielectric breakdown due to heat) can be effectively suppressed. Thus, the durability and reliability of the entire device can be improved in this respect.

Although the above-described braking plate 9 is provided in each of the terrace driving coils 7 in the present embodiment, it is applicable to two or more or all the terrace driving coils 7. It may be configured to be covered with one braking plate.

[Table Position Correction Control] FIG. 1 shows an example of correction control in drive control of the movable table (particularly the table position correction function of the table drive control means).
This will be described in detail based on the flowcharts of FIGS. This correction control (feedback control)
Is executed by the table drive control means 21 based on the position information detected by the position information detection means 25 described above.

(1) Setting of control mode and its correspondence (see FIG. 2)
2 to 23) As described above, in the first embodiment, ten types of control modes are prepared in advance as drive control modes for the movable table 1 (auxiliary table 5). The operator then selects the desired control mode from these,
A numerical value for designating the control mode and a target value of the movement command are input (command) to the main control section 21A via the operation command input section 24, and the CPU provided in the main control section 21A of the table drive control means 21 uses the CPU. At the time of arithmetic control, processing such as specification of a necessary control mode is executed (see FIG. 6).

The target value is either the movement amount or the rotation amount. Whether the target value is the amount of movement or the amount of rotation is automatically determined by the processing on the CPU side based on the specified control mode, so at the stage of the input operation by the operator, the dimension (distance or distance distinction) is determined. ) Need not be specified, and since the directionality of the movement amount and the rotation amount is automatically determined, it is not necessary to consider signs (+ and − symbols) when inputting the target value.

The general format of the table movement command that the operator should input to the main control unit 21A via the operation command input unit 24 is "M, B", and the first numerical value "M" specifies the control mode. Command or the next numerical value "B" is a numerical value for designating the movement amount or the rotation amount. Here, the value of M is a natural number from 1 to 10, the value of B is an arbitrary real number, and the sign is positive.

As described above, in the first embodiment,
Four grid-shaped drive coils 7 are provided. After that, as shown in FIGS. 9A to 13A, it is necessary to clearly distinguish the positions of the grid-shaped drive coils 7. , The machine-shaped origin (origin on XY coordinates: same below) is used as the coil 7A, which is arranged in the positive direction on the Y-axis, and the coil-shaped drive coil 7 is arranged on the X-axis with respect to the mechanical origin. The coiled drive coil 7 arranged in the coil 7B, the coiled drive coil 7 arranged in the negative direction on the Y axis with the machine origin as the reference, and the coil 7C with the machine origin as the negative direction on the X axis. The rice-shaped drive coil 7 arranged in the above will be referred to as a coil 7D.

Therefore, when the operator inputs a table movement command to the main control unit 21A via the operation command input unit 24 composed of a keyboard or the like, the CPU provided in the main control unit 21A firstly makes a table movement command. "M, B"
After reading and temporarily storing (FIG. 22: Step S
1), it is determined whether or not the value of the numerical value M forming the command is 1 (in short, whether or not the control mode selected by the operator is the first control mode) (FIG. 2).
2: Step S2).

If the determination result of step S2 is "true", it means that the operator has selected the first control mode. Therefore, the CPU stores the excitation mode memory for specifying the excitation direction of the coil 7A. A switch setting C is stored in the register R (A) in order to execute the above-described excitation mode (energization pattern) C of FIG. 8 for the coil 7A.

Similarly, in the excitation mode storage register R (B) for specifying the excitation direction of the coil 7B, the excitation mode (energization pattern) D shown in FIG.
Switch setting D, and coil 7C
Excitation mode storage register R (C) for specifying the excitation direction of
Switch setting C to execute the excitation mode (energization pattern) C of FIG. 8 for the coil 7C, and the excitation mode storage register R (D) for specifying the excitation direction of the coil 7D is set to the coil 7D. On the other hand, in order to execute the excitation mode (energization pattern) D of FIG.
Each is stored (FIG. 22: step S3). This setting is a setting for moving the movable table 1 (auxiliary table 5) in the positive direction along the X axis. 17 to 18 show the results of the movement.

When the determination result of step S2 is "false", the CPU determines the control mode selected by the operator based on the value of M in the same manner as described above, and the excitation mode storage register. The switch setting corresponding to the selected control mode is stored in each of R (A) to excitation mode storage register R (D) (FIGS. 22 to 23: step S).
4 to step S21).

Next, the CPU determines whether the value of M indicating the control mode is, for example, 4 or less (FIG. 23: step S2).
2) It is determined whether it is 5 or more and 8 or less, or 9 or more (FIG. 23: step S23).

When the determination result of step S22 shown in FIG. 23 is "true", in short, the value of M is 4 or less and the table movement command is the linear movement along the X axis or the Y axis (first Control mode to fourth control mode), the CPU multiplies the reference drive voltage E1 for linear movement by the movement amount B and uses the common drive voltage to excite the coils 7A to 7D. And stores this value in the drive voltage storage register E as the initial value of the drive voltage (FIG. 23: step S24).

Here, the movable table 1 is a piano wire 2A,
Since it is driven within the elastic limit of 2B, the force required to move the movable table 1 is proportional to the amount of movement of the movable table 1. Therefore, by multiplying the target movement amount B by the reference drive voltage E1 for linear movement, it is possible to obtain the drive voltage required to move the movable table 1 by the movement amount B. However, the reference drive voltage E1 for linear movement moves the movable table 1 by a unit amount (for example, 1 [mm]) when the four coils 7A to 7D are simultaneously driven to urge the movable table 1 in the same direction. Each coil 7 required when making
It is a drive voltage for every A to 7D.

If the determination result of step S22 in FIG. 23 is "false" and the determination result of step S23 is "true", in short, the value of M is 5 or more and 8 or less, and the table movement command is issued. Is found to be a linear movement (fifth control mode to eighth control mode) that intersects the X-axis or the Y-axis by 45 °, for example, the CPU sets the reference driving voltage E1 for the linear movement to the movement amount B. And √2 to obtain a common drive voltage to be used for exciting the coils 7A to 7D, and this value is stored in the drive voltage storage register E as an initial value of the drive voltage (FIG. 23: step S25).

When the table movement command is X-axis or Y-axis 4
In the case of linear movement intersecting 5 °, the directions of the urging forces obtained by the coils facing each other across the movement direction intersect by 90 °, and a part of the urging force is offset. Therefore, in order to move the movable table 1 in the same minimum movement unit as in the case of the linear movement along the X axis or the Y axis described above, the force required to move the auxiliary table (movable table 1), that is, , The common drive voltage to be used for exciting the coils 7A to 7D needs to be multiplied by √2.

If both the determination results of step S22 and step S23 in FIG. 23 are "false",
In short, when it is determined that the value of M is 9 or 10 and the table movement command is the rotational movement around the machine origin (the ninth control mode or the tenth control mode),
The CPU multiplies the reference drive voltage E2 for rotational movement by the rotation amount B to obtain a common drive voltage to be used for exciting the coils 7A to 7D, and stores this value in the drive voltage storage register E as the initial value of the drive voltage. Store (FIG. 23: Step S
26). Similar to the above, the reference drive voltage E2 for rotational movement
Are the coils 7A to 7D required when the movable table 1 is rotated by a unit amount (for example, 1 °) when the four coils 7A to 7D are simultaneously driven to bias the movable table 1 in the same direction. Drive voltage for each.

(2) Sensor Information Calculation Processing (Present Position Determining Operation: FIG. 24, FIG. 30) First, the CPU of the main control portion 21A causes the previous cycle X coordinate storage register Xp, the previous cycle Y coordinate storage register Yp, Each value of the previous cycle rotation angle storage register θp is initialized to “0” (FIG. 24: step S27). At this point, the movable table 1 is located on the machine origin, and as a result, the previous cycle X coordinate storage register Xp and the previous cycle Y coordinate storage register Y are obtained.
The current position of the movable table 1 and the current rotation angle are stored in the previous cycle rotation angle storage register θp.

Next, the CPU controls the coil selection drive control unit 2
1B and the electromagnetic driving means 4 are driven, and the switch settings (excitation modes of the coils 7A to 7D) stored in the excitation mode storage register R (A) to the excitation mode storage register R (D) and the drive voltage storage register E are stored. The excitation of each of the drive coils 7A to 7D is started based on the drive voltage stored in (FIG. 24: Step S28), and the processing of SUB (A) relating to the detection of the current position and the rotation angle of the movable table 1. Is started (see FIG. 24: step S29, FIG. 30).

The CPU, which has started the processing relating to the detection of the current position and the rotation angle, first outputs the output voltages X _{1 to} X ₄ and the capacitances corresponding to the capacitance changes of the capacitance detection electrodes (position detection sensors) 26X _{1 to} 26X _4. Electrode (position detection sensor)
Output voltage Y ₁ corresponding to the capacitance change of 26Y _{1 to} 26Y ₄
~ Y ₄ is an A / D converter (Fig. 6: signal conversion circuit 27A)
(FIG. 30: Step T1), and the voltage deviation Vx is obtained by subtracting the output voltage “X ₃ + X ₄ ” from the output voltage “X ₁ + X ₂ ” (FIG. 30: Step T2). The position signal calculation circuit unit 27B is actually in charge of the calculation process of the voltage deviation Vx based on a command from the CPU (FIG. 6).
reference).

Here, the capacitance detection electrode (position detection sensor)
26X ₁ and the capacitance detection electrode (position detection sensor) 26X ₂ are electrodes that increase the capacitance when the movable table 1 moves in the positive direction of the X axis, and the capacitance detection electrode 26X ₃ and the capacitance detection electrode 26X ₄ are movable. Since the table 1 is an electrode that reduces the capacitance when it moves in the positive direction of the X axis (see FIG. 17).
See to 18), based on the sign and magnitude of the voltage deviation Vx obtained by subtracting the output voltage "X ₃ + X _4" from the output voltage "X ₁ + X _2", in the X-axis direction relative to the machine zero movable table The movement amount and the movement direction of 1 can be obtained.

[0169] Further, CPU calculates a voltage deviation Vy obtained by subtracting the output voltage "Y ₃ + Y ₄ 'from the output voltage" Y ₁ + Y ₂ "(FIG. 30: step T3). Similar to the above-described calculation processing of the voltage deviation Vx, the position signal calculation circuit section 27B is actually in charge of the calculation processing of the voltage deviation Vy (see FIG. 6).

Here, the capacitance detection electrode 26Y₁And capacity detection
Electrode 26Y₂The movable table 1 moves in the positive direction of the Y-axis
Is an electrode that increases the capacitance when
6Y ₃And capacitance detection electrode 26Y_FourThe movable table 1 is the Y-axis
Is an electrode that reduces the capacitance when moving in the positive direction
(See FIG. 19), the output voltage “Y₁+ Y₂Output from
Voltage "Y₃+ Y_FourAnd sign of voltage deviation Vy
Auxiliary table in the Y-axis direction based on the machine origin
Obtain the movement amount and movement direction of Bull 5 (movable table 1)
be able to.

Then, the CPU outputs the output voltage "X ₁ + X ₄
+ Y ₁ + Y ₄ ”to output voltage“ X ₂ + X ₃ + Y ₂ +
The voltage deviation Vθ obtained by subtracting “Y ₃ ” is obtained (FIG. 30: step T4). Here, the capacitance detection electrodes 26X ₁ , 26X ₄ ,
26Y ₁ and 26Y ₄ are electrodes that reduce the capacitance when the movable table 1 rotates counterclockwise, as shown in FIG. 7B, for example. In addition, the capacitance detection electrode 26
X ₂ , 26X ₃ , 26Y ₂ and 26Y ₃ are movable tables 1
Is an electrode that increases the capacity when rotated counterclockwise (see FIG. 7B and FIG. 21). Therefore, from the output voltage "X ₁ + X ₄ + Y ₁ + Y ₄ " to the output voltage "X ₂ + X ₃
The rotation amount and the rotation direction of the movable table 1 can be obtained based on the sign and the magnitude of the voltage deviation Vθ obtained by subtracting “+ Y ₂ + Y ₃ ”.

In this embodiment, the correspondence between the movement amount of the auxiliary table 5 (movable table 1) and the voltage deviation Vx in the X-axis direction with respect to the mechanical origin, and the Y-axis direction with respect to the mechanical origin. Between the movement amount of the auxiliary table 5 (movable table 1) and the voltage deviation Vy, and the rotation amount of the auxiliary table 5 (movable table 1) and the voltage deviation Vy.
The correspondence relationship with θ is the ROM configuring the data storage unit 23.
Since it is stored in advance in the CPU, the CPU determines the voltage deviation Vx,
By searching the map of the data storage unit 23 based on the current values of the voltage deviation Vy and the voltage deviation Vθ, the current positions x and y of the auxiliary table 5 (movable table 1) and the current rotation angle θ can be obtained. (FIG. 30: Step T5).

At the same time, the determined current position x, y of the auxiliary table 5 (movable table 1) and the current rotation angle θ are configured to be displayed on a display or the like (not shown). The operator may always be provided with the necessary information.

Instead of the search process using the map, an arithmetic expression for obtaining x, y, θ based on the values of Vx, Vy, Vθ is stored, and Vx, Vy, V is added to this arithmetic expression.
It is technically possible to substitute the current value of θ to obtain the values of x, y, θ.

The CPU which has completed the processing of "SUB (A)" in this way determines the current position x, y of the movable table 1 and the current rotation angle θ obtained in the processing of "SUB (A)". The current cycle X coordinate storage register Xn, the current cycle Y coordinate storage register Yn, and the current cycle rotation angle storage register θn are stored (FIG. 24: step S30).

(3) Position shift calculation function and table position correction function <In the case of linear feed in the direction along the X axis: FIGS. 24 and 2
5, FIG. 17 to FIG. 18> Next, the CPU of the main controller 21A
Is a deviation between the numerical value stored in the previous cycle X coordinate storage register Xp and the numerical value stored in the current cycle X coordinate storage register Xn (that is, the movable table 1 in the immediately preceding one processing cycle).
Amount of movement in the X-axis direction) and the previous cycle Y coordinate storage register Y
Deviation between the numerical value stored in p and the numerical value stored in the current cycle Y coordinate storage register Yn (in short, the amount of movement of the movable table 1 in the Y-axis direction during the immediately preceding one processing cycle) and the previous cycle rotation angle storage register The deviation between the numerical value stored in θp and the numerical value stored in the current cycle rotation angle storage register θn (that is, the rotation amount of the movable table 1 in the immediately preceding one processing cycle) is obtained.

Further, the CPU determines whether or not the value obtained by adding the absolute values of the three deviations is below the movement stop determination value ε1 (set value) (that is, the movement based on the urging force of the coils 7A to 7D). It is determined whether or not the linear movement and the rotational movement of the table 1 are completed (FIG. 24: step S3).
1).

When the determination result of step S31 in FIG. 24 is "false", it means that the movable table 1 is in the process of linear movement or rotational movement at that time. In this case, the CPU stores the current cycle X coordinate storage register Xn, the current cycle Y coordinate storage register Yn, and the current cycle in the previous cycle X coordinate storage register Xp, the previous cycle Y coordinate storage register Yp, and the previous cycle rotation angle storage register θp, respectively. After updating and storing the value of the rotation angle storage register θn (FIG. 24: step S3
2) Return to the processing of step S29 again and repeat the processing of steps S29 to S32 in the same manner as above, and complete the linear movement and rotational movement of the movable table 1 based on the biasing forces of the coils 7A to 7D. Wait to do.

Finally, when the determination result of step S31 becomes "true" and it is confirmed that the linear movement or the rotational movement of the movable table 1 based on the biasing forces of the coils 7A to 7D is completed, The CPU determines whether or not the value of the numerical value M is 1 or 2, that is, the current table movement command is X.
It is determined whether or not the linear feed in the direction along the axis (first control mode or second control mode) has been performed (FIG. 25:
Step S33).

When the determination result of step S33 in FIG. 25 is "true", the current table movement command is X.
It means that the feed was straight in the axial direction. In this case, the CPU executes the arithmetic expression “(B−x) ² + (0−y) ² ” to obtain a value corresponding to the position deviation between the current position of the movable table 1 and the target position, This value is the allowable value ε2
It is determined whether or not it is within the range of (setting value) (FIG. 25:
Step S35). Here, the symbol B indicates the designated movement amount on the X axis. Also, "0" indicates that the designated movement amount on the Y axis is zero.

The position deviation between the current position of the movable table 1 and the target position is actually "(B-x) ² + (0-
y) ² ”, but it is not necessary to find the square root, but the allowable value ε is obtained by squaring the allowable position deviation value.
Since it suffices to set it as 2, in the present embodiment, unnecessary calculation processing is omitted and “(B−x) ² + (0−
y) ² ”value is used as it is to perform the determination process relating to the presence or absence of the positional deviation.

Normally, in the process of step S3 shown in FIG. 22 (in the case of the first control mode) or the process of step S5 in the same figure (in the case of the second control mode), the excitation mode storage register R (A) to the excitation mode is registered. In accordance with the excitation mode (energization pattern) set in the storage register R (D) and the drive voltage E obtained in step S24 shown in FIG.
~ If the coil 7D is excited, the movable table 1 should move along the X axis from the mechanical origin by the amount of movement B. However, there are variations in performance among the coils 7A to 7D, or a plurality of pianos. If there is a difference in rigidity between the lines 2A and 2B, the movable table 1 may not be properly moved to the target position.

Therefore, if the determination result of step S35 in FIG. 25 is "false" and it is clear that there is an unacceptable positional deviation between the current position of the movable table 1 and the target position, The CPU further includes a movable table 1
The absolute value of the current position y, that is, the absolute value of the positional deviation amount in the direction orthogonal to the moving direction of the movable table 1, is the allowable value ε3.
It is determined whether or not it is within the range of (setting value) (FIG. 25:
Step S36). This is the execution of the position shift determination function by the table drive control means 21 (hereinafter the same).

If the determination result of step S36 in FIG. 25 is "false", it means that an unacceptable positional deviation has occurred in the direction orthogonal to the moving direction of the movable table 1, and therefore the CPU Further, based on whether or not the value of the current position y exceeds 0, it is determined whether the positional deviation in the direction orthogonal to the moving direction exists on the left side or the right side of the moving direction (FIG. 25). : Step S37).

More specifically, when the table movement command is linear feed in the positive direction of the X axis (first control mode), y> 0 and a positional deviation exists on the left side of the movement direction. If the table movement command is linear feed in the negative direction of the X-axis (second control mode), y> 0 and the positional deviation exists on the right side of the movement direction. Means This is the first execution (hereinafter the same) of the positional deviation calculation function by the table drive control means 21.

In each case, the driving force of the coil 7C is equal to that of the coil 7A.
9A, or the driving force of the coil 7A is relatively smaller than the driving force of the coil 7C, the feeding balance is lost and the movable table 1 is moved to the movable table 1 in FIG. Is a phenomenon that occurs when the paper is lifted in the direction from the lower end to the upper end of the paper surface. However, at this stage, it is not yet specified whether the phenomenon is caused by the excessive driving force of the coil 7C or the insufficient driving force of the coil 7A.

Therefore, when the determination result of step S37 in FIG. 25 is "true", that is, the table movement command is linear feed in the positive direction of the X axis (first control mode), and the position shift occurs. Is found on the left side of the moving direction, or the table move command is linear feed in the negative direction of the X axis (second control mode) and the positional deviation is on the right side of the moving direction. If found, CPU
Is whether or not the absolute value of the current position x of the movable table 1 exceeds the command value B of the movement amount (that is, the driving force applied to the movable table 1 by the coils 7A to 7D is excessive as a whole). Or is it too small) (step S38 in FIG. 25). This is a specific execution of the positional deviation calculation function by the table drive control means 21 (hereinafter the same).

If the result of the determination in step S38 of FIG. 25 is "true", then the coils 7A to 7D are
Since there is a high possibility that the driving force applied to the movable table 1 is excessively large as a whole (that is, the driving force of the coil 7C is also excessive), the CPU supplies the driving voltage to the coils 7A, 7B, and 7D. While maintaining the current state, only the drive voltage for the coil 7C is adjusted to a minute correction value ΔE.
Then, correction is performed to weaken and reduce the driving force of the coil 7C (FIG. 25: step S39). This is the execution of the table position correction function by the table drive control means 21 (hereinafter the same).

On the other hand, when the determination result of step S38 in FIG. 25 is "false", when the driving force applied to the movable table 1 by the coils 7A to 7D is too small as a whole, the coil 7A Since it is highly possible that the driving force is too small, the CPU uses the coils 7B and 7
C, while the drive voltage for the coil 7D is maintained as it is, only the drive voltage for the coil 7A is increased by a minute correction value ΔE, and the correction for increasing the drive force by the coil 7A is executed (FIG. 25: step S40). This is the execution of the table position correction function by the table drive control means 21 (hereinafter the same).

When the result of the determination in step S37 of FIG. 25 is "false", that is, the table movement command is X.
When it is found that the positional deviation exists on the right side of the movement direction when the axis is linearly fed in the positive direction (first control mode), or when the table movement command is a straight line in the negative direction of the X axis. If it is found that the position deviation is on the left side in the movement direction in the feed (second control mode), the CP
U indicates whether or not the absolute value of the current position x of the movable table 1 exceeds the command value B of the movement amount (that is, the driving force applied to the movable table 1 by the coils 7A to 7D is excessive as a whole. It is determined whether it exists or is too small) (FIG. 25: step S41).

If the result of the determination in step S41 in FIG. 25 is "true", then the coils 7A to 7D are
The driving force applied to the movable table 1 is excessively large as a whole, that is, the driving force of the coil 7A is excessively large, and the movable table 1 is pushed down in the direction from the upper end to the lower end of the paper surface in FIG. 9A. Since the possibility is high, the CPU weakens only the drive voltage for the coil 7A by the minute correction value ΔE while keeping the drive voltage for the coil 7B, the coil 7C, and the coil 7D in the current state, and
A correction for reducing the driving force by A is executed (FIG. 25:
Step S42).

On the other hand, when the determination result of step S41 in FIG. 25 is "false", the driving force applied to the movable table 1 by the coils 7A to 7D is too small as a whole, that is, the driving force of the coil 7C. It is highly possible that the driving force becomes too small and the movable table 1 is pushed down in the direction from the upper end to the lower end of the paper surface in FIG. 9 (A).
The CPU enhances only the drive voltage for the coil 7C by the minute correction value ΔE while keeping the drive voltage for the coil 7A, the coil 7B, and the coil 7D in the current state, and executes the correction for increasing the drive force by the coil 7C (FIG. 25). : Step S43).

On the other hand, when the determination result of step S36 is "true", in short, there is no positional deviation in the direction orthogonal to the moving direction of the movable table 1, and the movable table 1 simply moves along the X axis. If it is found that the coil has moved excessively or excessively, the driving force of the coil 7A and the coil 7C
It is considered that there is no problem in the balance of the driving force of.

Therefore, in this case, the CPU determines whether or not the absolute value of the current position x of the movable table 1 exceeds the command value B of the movement amount, that is, the CPU is given to the movable table 1 by the coils 7A to 7D. It is determined whether the driving force that is present is excessive as a whole or is too small as a whole (FIG. 25: Step S44), and if it is determined that the driving force is excessive, the drive voltage for the coils 7A to 7D is determined. The correction is performed by weakening all of the values by 1/4 of the minute correction value ΔE to reduce the feed driving force in the X-axis direction as a whole (FIG. 25: step S45).

If it is judged to be too small,
A correction for increasing all the driving voltages for the coils 7A to 7D by ¼ of the minute correction value ΔE to increase the driving force for the feed in the X-axis direction is executed (FIG. 25: step S46). In this embodiment, the correction value when the drive voltages for the coils 7A to 7D are simultaneously corrected is set to ¼ of ΔE. However, this is the amount of movement when the correction is applied to a single coil and the coils 7A to 7D. This is a measure for substantially matching the movement amount when all 7D are simultaneously corrected.

Thus, in step S39 of FIG.
When any one of the correction processing in step S40, step S42, step S43, step S45, or step S46 is performed, the CPU performs SU in the same manner as described above.
After the process of B (A) is executed and the new current positions x and y and the rotation angle θ of the auxiliary table 5 (movable table 1) corresponding to the correction result are obtained (FIG. 25: step S34), the figure is redrawn. In step S35, the determination process of step S35 determines whether or not the positional deviation is allowed.

If the positional deviation is not allowable, the same processing as described above is repeatedly executed until the determination result of step S35 in FIG. 25 finally becomes "true", and the X-axis direction and the Y-axis direction are obtained. Keep the position deviation of within the allowable range.

The above is the feedback control of the movable table 1 when the table movement command is linear feed in the X-axis direction (first control mode or second control mode). In this way, the auxiliary plate 5 (movable plate 1)
Fig. 1 shows an example of a smooth movement of X in the positive direction of the X-axis.
7 to FIG.

<In the case of linear feed in the direction along the Y-axis:
26, 19> Steps S47 to S in FIG.
The processing up to 60 is performed when the value of M is 3 or 4 and the current table movement command is linear feed in the direction along the Y axis (third control mode or fourth control mode). The process regarding the positional deviation correction will be described. In this case, the substantial processing algorithm is the step S3 of FIG.
Since it is the same as the processing from step 3 to step S46, detailed description will be omitted and only the phenomenon aspect will be briefly described.

Step S51 in FIG. 26 shows a process for determining whether the positional deviation of the movable table 1 in the direction orthogonal to the moving direction is on the left side or the right side of the moving direction. Specifically, when the table movement command is linear feed in the positive direction of the Y-axis (third control mode), it means that x> 0 and the positional deviation exists on the right side of the movement direction. If the table movement command is linear feed in the negative direction of the Y axis (fourth control mode), x
When> 0, the positional deviation exists on the left side in the moving direction.

In any case, the driving force of the coil 7D is equal to that of the coil 7B.
Is relatively larger than the driving force of the coil, or the coil 7B
10 is relatively smaller than the driving force of the coil 7D, the feeding balance is lost and the movable table 1 is moved to the position shown in FIG.
In (A), it is a phenomenon caused by being pushed in the direction from the left end to the right end of the paper surface.

When the determination result of step S52 becomes "true" under the condition that the determination result of step S51 in FIG. 26 is "true", it is given to the movable table 1 by the coils 7A to 7D. It is highly possible that the driving force being applied is excessive as a whole, that is, the driving force of the coil 7D is also excessive. In such a case, the CPU maintains only the drive voltage for the coil 7A, the coil 7B, and the coil 7C in the present state, and only the drive voltage for the coil 7D is slightly corrected by
Correction is performed to weaken only E and reduce the driving force by the coil 7D (FIG. 26: step S53).

If the determination result in step S52 in FIG. 26 is "false", the coils 7A to 7D are
Since there is a high possibility that the driving force applied to the movable table 1 by the whole is too small (that is, the driving force of the coil 7B is also too small), the CPU supplies the driving voltage to the coils 7A, 7C, and 7D. While maintaining the current state, only the drive voltage for the coil 7B is adjusted to a minute correction value ΔE.
Then, the correction for increasing the driving force by the coil 7B is executed (FIG. 26: step S54).

On the other hand, when the table movement command is linear feed in the positive direction of the Y-axis (third control mode) and x <0, it means that the positional deviation exists on the left side of the movement direction. Further, if the table movement command is linear feed in the negative direction of the Y-axis (fourth control mode) and x <0, it means that the positional deviation exists on the right side of the movement direction.

In both cases, the driving force of the coil 7B is equal to that of the coil 7D.
The driving force of the coil is relatively large, or the coil 7D
10 is relatively smaller than the driving force of the coil 7B, the feeding balance is lost and the movable table 1 is moved to the position shown in FIG.
In (A), it is a phenomenon caused by being pushed in the direction from the right end to the left end of the paper surface.

When the result of the determination in step S55 is "true" under the condition that the result of the determination in step S51 in FIG. 26 is "false", the auxiliary table 5 (movable table 1) is moved by the coils 7A to 7D. It is highly possible that the driving force given to () is excessive as a whole (that is, the driving force of the coil 7B is also excessive).
A correction for reducing the driving force by the coil 7B is executed by weakening only the driving voltage for the coil 7B by the minute correction value ΔE while keeping the driving voltage for the coils 7A, 7C, and 7D as it is (FIG. 26: step S5).
6).

Also, the determination result of step S55 is "false".
In this case, it is highly possible that the driving force applied to the auxiliary table 5 (movable table 1) by the coils 7A to 7D is too small as a whole (that is, the driving force of the coil 7D is too small). Therefore, the CPU increases the drive voltage for the coil 7D by the minute correction value ΔE while maintaining the drive voltage for the coil 7A, the coil 7B, and the coil 7C at the current state, and executes the correction for increasing the drive force by the coil 7D ( FIG. 26: Step S57).

On the other hand, the determination result of step S50 is "true".
In short, in short, there is no positional deviation in the direction orthogonal to the moving direction of the movable table 1, and simply the movable table 1
Is found to have moved excessively or excessively along the Y axis, it is considered that there is no problem in the balance between the driving force of the coil 7B and the driving force of the coil 7D.

Therefore, in this case, the CPU determines whether or not the absolute value of the current position y of the movable table 1 exceeds the command value B of the moving amount, that is, it is given to the movable table 1 by the coils 7A to 7D. It is determined whether the existing driving force is excessive or excessive as a whole (FIG. 26: step S58). If it is determined to be excessively large, all the driving voltages for the coils 7A to 7D are weakened by ¼ of the minute correction value ΔE, and the driving force for the Y-axis feed is reduced as a whole. Perform correction (Fig. 2
6: Step S59). If it is determined to be too small, all of the drive voltages for the coils 7A to 7D are increased by 1/4 of the minute correction value ΔE to increase the drive force for the Y-axis feed as a whole. Correction is executed (FIG. 26: Step S60).

The above is the feedback control of the movable table 1 when the table movement command is linear feed in the Y-axis direction (third control mode or fourth control mode). As a result, FIG. 19 shows a state in which the Y axis smoothly moves in the positive direction. The form of movement is almost the same as that in FIG. 18 described above, except that the direction is different. In the figure, the hatched portion of the cross hatched line (x state) indicates the sensor region where the sensor capacitance is increased, and the simple hatched portion indicates the sensor region where the sensor capacitance is decreased.

<In the case of linear feed in the direction along “y = x”: FIG. 27> Steps S61 to S in FIG.
The processing up to 74 is a linear feed (fifth control mode or sixth control mode) in which the value of M is 5 or 6 and the current table movement command is in the direction along "y = x". The processing relating to the positional deviation correction in the case of In this case, the substantial processing algorithm is the above-described steps S33 to S46 of FIG. 25 and step S4 of FIG.
Since it is the same as the processing from 7 to step S60, detailed description will be omitted and only the phenomenon aspect will be briefly described.

When the auxiliary table 5 (movable table 1) is moved to an appropriate position in this mode, the values of the x and y components of the moving position are (B / √2, 2) based on the mechanical origin.
B / √2) or (−B / √2, −B / √2). In addition, since there is no possibility that the movable table 1 will move to another quadrant against the table movement command, as shown in step S63 of FIG. And using the absolute values (| x |, | y |) of the x and y components of the actual movement position and the absolute values (B / √2, B / √2) of the x and y components of the target position. It is possible to determine whether or not there is a positional deviation between the target position and the movement position.

Further, whether or not the actual moving direction of the movable table 1 is proper is determined by the machine origin and the actual moving position x,
It can be determined by comparing the magnitude relationship between the slope y / x of the straight line connecting y and the slope 1 of the straight line "y = x" (FIG. 2).
7: Step S64). That is, if the deviation between the numerical values y / x and the numerical value 1 is within the range of ε4 (set value), the moving direction of the movable table 1 is proper, and the difference between the numerical values y / x and the numerical value 1 is set. If the deviation exceeds the range of ε4, it is determined that the moving direction of the auxiliary table 5 (movable table 1) is inaccurate.

Step S65 in FIG. 27 shows a process for determining whether the positional deviation of the movable table 1 in the direction orthogonal to the moving direction is on the left side or the right side of the moving direction. Specifically, the table movement command is “y =
In the case of linear feed in the positive direction along "x" (fifth control mode), y / x> 1 means that the positional deviation exists on the left side of the movement direction, and the table movement Even when the command is the linear feed in the negative direction of “y = x” (sixth control mode), it means that the position deviation is on the left side in the moving direction with y / x> 1.

In either case, the total sum of the driving forces of the coils 7A and 7C is relatively larger than the total sum of the driving forces of the coils 7B and 7D, or the coils 7B and 7D.
This is a phenomenon in which the feeding balance is lost because the sum of the driving forces of (3) is relatively smaller than the sum of the driving forces of the coils 7A and 7C.

Specifically, in the case of the fifth control mode in which the feed is applied in the positive direction along the line "y = x", the movable table 1 moves from the lower end to the upper end of the paper surface in FIG. 11 (A). In the case of the sixth control mode in which the phenomenon is caused because the movable table 1 is pushed up in the direction, and is fed in the negative direction along the straight line of "y = x", the movable table 1 in FIG. This phenomenon occurs because the paper is pushed down in the direction from the upper end to the lower end of the paper surface.

When the result of the determination in step S66 is "true" under the situation in which the result of the determination in step S65 in FIG. 27 is "true", the coils 7A through 7
It is highly possible that the driving force given to the auxiliary table 5 (movable table 1) by D is excessively large as a whole (that is, the total driving force of the coils 7A and 7C is also excessive). In such a case, the CPU has the coil 7B and the coil 7
While keeping the driving voltage for D as it is, the driving voltage for the coils 7A and 7C is set to √2 / of the small correction value ΔE.
Correction is performed to weaken the strength by 2 times and reduce the driving force of the coils 7A and 7C (FIG. 27: step S67).

When the determination result of step S66 in FIG. 27 is "false", the driving force applied to the movable table 1 by the coils 7A to 7D is too small as a whole (that is, the coil 7B is It is highly possible that the total driving force of the coil 7D is too small. In such a case, the CPU increases the drive voltage for the coils 7B and 7D by √2 / 2 times the minute correction value ΔE while keeping the drive voltage for the coils 7A and 7C at the current state.
Correction for increasing the driving force by the coils 7B and 7D is executed (FIG. 27: step S68).

Incidentally, in the processing of steps S67 and S68 in FIG. 27, the reason why the minute correction value ΔE is multiplied by √2 is that the biasing force obtained by the coil is lost due to the crossing of the moving direction. This is to compensate for Further, the minute correction value ΔE is divided by the numerical value 2 because the correction movement amount when the number of coils to be adjusted is two and the correction movement amount when the number of coils to be adjusted is one This is to make the and substantially match.

On the other hand, when the table movement command is y / x <1 in the linear feed in the positive direction (fifth control mode), it means that the positional deviation exists on the right side of the movement direction. Also, when the table movement command is "y = x" and y / x <1 in the linear feed in the negative direction (sixth control mode), the positional deviation exists on the right side of the movement direction. Means that. In either case, the sum of the driving forces of the coils 7B and 7D is relatively larger than the sum of the driving forces of the coils 7A and 7C, or the coils 7A and 7C are
This is a phenomenon in which the feeding balance is lost because the total driving force of C is relatively smaller than the total driving force of the coils 7B and 7D.

When the determination result of step S69 is "true" under the situation where the determination result of step S65 in FIG. 27 is "true", it is given to the movable table 1 by the coils 7A to 7D. There is a high possibility that the driving force present as a whole is excessive (that is, the sum of the driving forces of the coils 7B and 7D is also excessive). In such a case, C
The PU weakens the drive voltage for the coils 7B and 7D by weakening the drive voltage for the coils 7B and 7D by √2 / 2 times the minute correction value ΔE while keeping the drive voltage for the coils 7A and 7C as it is. Correction is performed (FIG. 27: step S70).

When the determination result of step S69 is "false", the driving force applied to the movable table 1 by the coils 7A to 7D is too small as a whole (that is, the coil 7A and the coil 7C have It is highly likely that the total driving force is too small). In such a case, CPU
Is to increase the drive voltage for the coils 7A and 7C by √2 / 2 times the minute correction value ΔE while maintaining the drive voltage for the coils 7B and 7D at the current state.
And the correction for increasing the driving force by the coil 7C is executed (FIG. 27: step S71).

On the other hand, when the determination result of step S64 in FIG. 27 is "true", in short, the moving direction of the movable table 1 is proper, and the movable table 1 simply follows the straight line of y = x. If it is found that the movement is excessive or excessive, it is considered that there is no problem in the balance between the sum of the driving forces of the coils 7A and 7C and the sum of the driving forces of the coils 7B and 7D.

Therefore, in this case, the CPU determines whether or not the value corresponding to the square of the moving amount of the movable table 1 exceeds the square of the command value B, that is, is given to the movable table 1 by the coils 7A to 7D. It is determined whether the driving force being applied is too large or too small as a whole (FIG. 27 :).
Step S72).

When it is determined that the value is excessive, all of the drive voltages for the coils 7A to 7D are weakened by √2 / 4 of the minute correction value ΔE, and along the straight line of "y = x". Correction is performed to reduce the driving force for feeding as a whole (FIG. 27: step S73). If it is determined to be too small, all of the driving voltages for the coils 7A to 7D are strengthened by √2 / 4 of the minute correction value ΔE to drive the feed along the straight line “y = x”. Correction is performed to increase the force as a whole (FIG. 27: Step S7).
4).

It should be noted that the reason why the minute correction value ΔE is multiplied by √2 in the processing of steps S73 and S74 in FIG. 27 is that the urging force obtained by the coil is insufficient due to the urging force being crossed with the moving direction. In addition, when the number of coils to be adjusted is four, the correction movement amount and the number of coils to be adjusted are one or two. This is for making the corrected movement amount of 1 substantially match.

The above is the auxiliary table 5 (movable table 1) in the case where the table movement command is the linear feed along the "y = x" (fifth control mode or sixth control mode).
Is the feedback control for. The result after movement in this case is shown in FIG. In FIG. 20, cross diagonal lines (×
The hatching of (state) indicates the sensor area where the sensor capacity has increased, and the mere hatched portion indicates the sensor area where the sensor capacity has decreased.

<In the case of straight line feed along "y = -x":
28> In the processing from step S75 to step S88 in FIG. 28, the value of M is 7 or 8, and the current table movement command is linear feed along "y = -x" (seventh control mode). Alternatively, it is a process relating to the positional deviation correction in the case of the eighth control mode).

The substantial processing algorithm is the above-described steps S33 to S46 of FIG. 25, and FIG.
27 from step S47 to step S60 of FIG.
Since it is the same as the processing of steps S61 to S74 of No. 3, detailed description thereof will be omitted, and only the phenomenon side will be briefly described.

In this case, the table movement command is "y =-
In the case of linear feed (seventh control mode) in the -X, + Y directions (second quadrant) along "x", y / x> -1 and the positional deviation exists on the left side in the moving direction. Also, when the table movement command is linear feed (eighth control mode) in the + X, -Y directions (fourth quadrant) of "y = -x", y / x> -1. Means that the position shift exists on the left side in the moving direction.

In each case, the total sum of the driving forces of the coils 7B and 7D is relatively larger than the total sum of the driving forces of the coils 7A and 7C, or the coils 7A and 7C.
This is a phenomenon in which the feeding balance is lost because the total driving force of C is relatively smaller than the total driving force of the coils 7B and 7D.

When the result of the determination in step S80 is "true" under the condition that the result of the determination in step S79 is "true", it is given to the auxiliary table 5 (movable table 1) by the coils 7A to 7D. It is highly possible that the driving force being applied is excessively large as a whole (that is, the total sum of the driving forces of the coils 7B and 7D is also excessive).
Is to reduce the drive voltage for the coils 7B and 7D by √2 / 2 times the minute correction value ΔE while keeping the drive voltage for the coils 7A and 7C at the current state.
Then, the correction for reducing the driving force of the coil 7D is executed (FIG. 28: Step S81).

If the determination result of step S80 in FIG. 28 is "false", the driving force applied to the auxiliary table 5 (movable table 1) by the coils 7A to 7D is too small as a whole ( That is, the coil 7
Since the total sum of the driving forces of A and the coil 7C is too small), the CPU slightly corrects the driving voltages for the coils 7A and 7C while keeping the driving voltages for the coils 7B and 7D in the current state. Correction is performed by increasing the value ΔE by √2 / 2 times and increasing the driving force of the coils 7A and 7C (FIG. 28: step S82).

On the other hand, the table movement command is "y =-
When y / x <-1 in the linear feed (seventh control mode) in the -X, + Y directions (second quadrant) along "x", the positional deviation must be on the right side of the moving direction. Means that the table movement command is + X, − along “y = −x”.
Linear feed in Y direction (4th quadrant) (8th control mode)
Even if y / x <-1, the positional deviation is on the right side in the moving direction.

In either case, the total sum of the driving forces of the coils 7A and 7C is relatively larger than the total sum of the driving forces of the coils 7B and 7D, or the coils 7B and 7C are the same.
This is a phenomenon in which the feeding balance is lost because the total driving force of D is relatively smaller than the total driving force of the coils 7A and 7C.

When the result of the determination in step S83 is "true" under the condition that the result of the determination in step S79 in FIG. 28 is "true", the auxiliary table 5 (movable table 1) is moved by the coils 7A to 7D. It is highly possible that the driving force given to () is excessively large as a whole (that is, the total sum of the driving forces of the coils 7A and 7C is too large). While maintaining the current state, the driving voltage for the coils 7A and 7C is weakened by √2 / 2 times the minute correction value ΔE, and the correction for reducing the driving force of the coils 7A and 7C is executed (FIG. 28: step S84). .

If the determination result of step S83 in FIG. 28 is "false", the coils 7A to 7D are
It is highly possible that the driving force given to the movable table 1 by the whole is too small (that is, the total sum of the driving forces of the coils 7B and 7D is too small).
Is to increase the drive voltage for the coils 7B and 7D by √2 / 2 times the minute correction value ΔE while maintaining the drive voltage for the coils 7A and 7C at the current state.
Then, the correction for increasing the driving force by the coil 7D is executed (FIG. 28: Step S85).

On the other hand, when the determination result of step S78 in FIG. 28 is "true" (in short, the moving direction of the auxiliary table 5 is appropriate, and the auxiliary table 5 is simply y).
If it is found that the movement is excessive or too small along the straight line of = −x), there is a problem in the balance between the sum of the driving forces of the coils 7A and 7C and the sum of the driving forces of the coils 7B and 7D. Not considered.

Therefore, in this case, the CPU determines whether or not the value corresponding to the square of the movement amount of the auxiliary table 5 (movable table 1) exceeds the square of the command value B (that is, the coil 7).
It is determined whether the driving force applied to the movable table 1 by A to the coil 7D is excessively large as a whole or is small as a whole (FIG. 28: Step S).
86).

When it is determined that the value is excessive, all the drive voltages for the coils 7A to 7D are weakened by √2 / 4 of the minute correction value ΔE, and "y = -x".
The correction for reducing the driving force of the feed along the straight line is executed (FIG. 28: Step S87). If it is determined to be too small, all the drive voltages for the coils 7A to 7D are strengthened by √2 / 4 of the minute correction value ΔE, and the feed along the straight line of “y = −x” is performed. Correction for increasing the driving force as a whole is executed (FIG. 28: Step S).
88).

The above is the feedback control of the movable table 1 in the case where the table movement command is the linear feed (the seventh control mode or the eighth control mode) along "y = -x".

<Case of Rotation in the Same Plane: FIG. 29>
In the processing from step S90 to step S93 in FIG. 29, the value of M is 9 or 10, and the current table movement command is rotation around the mechanical origin (9th control mode or 10th control mode). This is processing relating to rotational misalignment correction (positional deviation correction) in the case.

In this case, the CPU of the main control portion 21A subtracts the value of the rotation angle B input as the target value from the absolute value of the current rotation angle θ, and the rotation angle deviation between the two is the allowable value ε.
It is determined whether it is within the range of 5 (setting value) (see FIG. 2).
9: Step S90). Then, when the rotation angle deviation between the two exceeds the allowable value ε5, it is further determined whether or not the absolute value of the actual rotation angle θ exceeds the target rotation angle B (FIG. 29: Step S91).

Here, when the absolute value of the rotation angle θ exceeds the rotation angle B of the target value, the CPU weakens all the drive voltages for the coils 7A to 7D by 1/4 of the minute correction value ΔE. Correction is performed in the direction of decreasing the absolute value of the rotation angle θ (FIG. 29: step S92). When the absolute value of the rotation angle θ is less than the target rotation angle B,
The CPU performs correction in the direction of increasing the absolute value of the rotation angle θ by strengthening all the drive voltages for the coils 7A to 7D by ¼ of the minute correction value ΔE (FIG. 29: step S93).

When the correction process of either step S92 or step S93 of FIG. 29 is performed in this manner, the CPU executes the process of SUB (A) in the same manner as described above and responds to the correction result. After obtaining a new rotation angle θ of the movable table 1 (FIG. 29: step S89), it is determined again in step S90 whether or not the rotation angle deviation is allowable. Then, when the deviation of the rotation angle is not allowable, the same processing as described above is repeatedly executed until the determination result of step S90 of FIG. 29 finally becomes “true”, and the deviation of the rotation angle falls within the allowable range. Hold.

The above is the feedback control of the movable table 1 when the table movement command is the rotation around the mechanical origin (the ninth control mode or the tenth control mode). As a result, FIG. 21 shows a state where the auxiliary table 5 smoothly rotates in the counterclockwise direction by θ °. In the figure, the cross hatching (x state) indicates the sensor area where the sensor capacity is increased, and the simple hatched area indicates the sensor area where the sensor capacity is decreased.

Finally, step S3 of FIG.
5 (in the case of the first control mode or the second control mode),
Step S49 of FIG. 26 (in the case of the third control mode or the fourth control mode), step S63 of FIG. 27 (in the case of the fifth control mode or the sixth control mode), step S77 of the FIG. Control mode or the eighth control mode) and step S90 (in the ninth control mode or the tenth control mode) of FIG. When the positional deviation and the rotational deviation are eliminated, the CPU causes the coils 7A to 7
The drive voltage for D is maintained as it is to secure the position and orientation of the movable table 1, and the operation command input unit 2
A standby state for waiting for the input of the reset signal from 4 is entered (FIG. 29: step S94). Processing and the like for the work on the movable table 1 are executed during this period.

Then, the operator inputs the operation command input section 24.
When a reset command is input to the CPU of the main control unit 21A by operating, the CPU detects the reset signal in the determination processing of step S94 in FIG. 29, outputs a command to the coil selection drive control unit 21B, and outputs the command to the coils 7A to 7C. The excitation for 7D is released (FIG. 29: step S95), and the movable table 1 is returned to the original position.

[Overall Operation of First Embodiment] Next, the overall operation of the first embodiment will be described.

In FIG. 6, when an operation command for moving the movable table 1 to a predetermined position is input from the operation command input section 24, the main control section 21A of the table drive control means 21 as described above, operates. , Which immediately operates to select the reference position information of the movement destination from the data storage unit 23 based on the operation command, and at the same time selects the control program for the predetermined control mode corresponding thereto from the operation program storage unit 22. Then, the coil selection drive control section 21B is energized to drive and control the four rectangular drive coils 7 of the electromagnetic drive means 4 based on a predetermined control mode.

As already described, the movable table 1 is moved to the X position.
A command to move to a predetermined position in the positive direction of the axis is input from the operation command input unit 24, and based on this, the entire apparatus operates so as to transfer the movable table 1 along the positive direction of the X axis. The state is shown in FIGS. In this case, the first control mode shown in FIG. 9 is selected as the control mode, and accordingly, each of the four rectangular drive coils 7 is selected.
Indicates that the energization pattern was selected in the state shown in FIG. 9 and operated according to this.

In this case, in the above-mentioned table holding mechanism 4, the auxiliary table 5 is moved by the electromagnetic drive means 4 as shown in FIGS.
When biased to the right in FIG. 18, the auxiliary table 5 (and the movable table 1) moves against the elastic force of each of the piano wires 2A and 2B. The auxiliary table 5 (and the movable table 1) has a balance point (moving target position) between the elastic restoring force of each of the piano wires 2A and 2B and the electromagnetic driving force of the electromagnetic driving means 4 applied to the auxiliary table 5. Stop at.

17 to 18, the symbol T indicates the distance traveled. In addition, in FIG. 18, the shaded portion indicates the portion where the capacitance component of the other capacitance detection electrodes 26X ₃ and 26X ₄ described above has decreased due to the movement of the auxiliary table 5,
The cross-hatched portion is the one capacitance detection electrode 26X ₁ described above,
The part where the capacity component of 26 × ₂ is increased is shown. In FIG. 18, when there is no displacement in the Y-axis direction (X
Movement in the direction along the axis) is shown.

On the other hand, during operation, the auxiliary table is
If the movement position of the bull 5 deviates from the target position,
Without this capacitance detection electrode 26X₁, 26X₂, 26X₃，
26X _FourLocation information based on the information of the increase and decrease of the capacity component of
In the information calculation circuit (calculation unit) 27, as described above,
The position after the movement is detected (specified), and then the position information
Based on the table drive control means 21, the positional deviation calculator is used.
Function is activated and the misalignment is calculated here, the test is performed immediately.
If the cable position correction function is activated, the position shifts as described above.
Preventive feedback control has been implemented.
It Then, from this state, the voltage is applied to the auxiliary table 5.
When the electromagnetic driving force is released, the auxiliary table 5
It is returned to its original position by being urged by the elastic return force of the wire 2A, 2B.
Return (Actual return function of table holding mechanism 4)
line).

In the above series of operations, the moving operation of the auxiliary table 5 (and the movable table 1) is normally performed rapidly regardless of whether the electromagnetic driving force application control or the opening control is performed. In such a case, the auxiliary table 5 (and the movable table 1) repeatedly reciprocates due to inertial force and spring force at the stop position at the movement destination or at the stop position at the time of returning to the original position. However, in the present embodiment, such reciprocal reciprocating motion is suppressed by the electromagnetic braking (eddy current brake) generated between the braking plate and the driven magnet as described above, and the smooth movement toward the predetermined position is achieved. However, the stop is controlled in a stable state.

Even when an operation command for moving the movable table 1 to a predetermined position other than the above is input from the operation command input unit 24, as in the case described above, the main operation of the table drive control means 21 is performed. The control unit 21A immediately operates,
Based on the operation command, the reference position information of the moving destination is selected from the data storage unit 23, and at the same time, the operation program storage unit 2 is selected.
The control program corresponding to the predetermined control mode is selected from 2. Subsequently, the coil selection drive control unit 2
1B is energized, and the four rectangular drive coils 7 of the electromagnetic drive means 4 are drive-controlled based on a predetermined control mode.

Also in this case, similarly to the case described above, with respect to the positional deviation of the auxiliary table 5 (and the movable table 1), the positional deviation calculating function and the table position correcting function operate to move the position as described above. Feedback control for preventing deviation is performed. At the same time, a braking operation is performed by the braking plate for a sudden movement, the auxiliary table 5 (movable table 1) moves smoothly toward a predetermined position, and the stop control is performed in a stable state.

[Operations / Effects, etc. of First Embodiment] As described above, in the first embodiment, the heavy-duty double-structure XY axis movement holding mechanism that is conventionally required is used. The auxiliary table 5 (movable table 1) can be smoothly moved or rotated in any direction on the XY plane while maintaining the same height position (within a predetermined range) from the center position. Therefore, according to the first embodiment described above, it is possible to reduce the size and weight of the entire apparatus, significantly improve portability in this respect, and reduce the number of parts as compared with the conventional example. Becomes
In this respect, durability can be remarkably improved, and productivity can be improved because no skill is required for adjustment during assembly.

Even if the auxiliary table 5 (movable table 1) equipped with a driven magnet changes its operation suddenly, the driven magnet 6 and the braking plate 9 made of a non-magnetic metal member as described above. Electromagnetic braking between (eddy current braking)
As a result, the movable table can be prevented from abruptly moving, and can move smoothly in a predetermined direction in a stable state.

The braking plate 9 has a simple structure in which it is individually mounted on the grid-shaped drive coil 7 while facing the driven magnets 6, and the electromagnetic drive means 4 for generating an electromagnetic drive force is also assisted. Since the driven magnet 6 mounted on the table 5 and the fixed-shaped drive coil 7 mounted on the fixed plate 8 facing the driven magnet 6 are opposed to the magnet, the size and weight of the entire apparatus can be reduced. It will be possible.

Further, this braking plate 9 constitutes a circuit equivalent to the secondary side circuit of the transformer in relation to the drive coil, and through the electric resistance component (causing eddy current loss) of the braking plate. Construct a shorted form. Therefore, the grid-shaped drive coil 7 that constitutes the primary side circuit in this case can pass a relatively large current as compared with the case where the secondary side circuit is in the open state, which causes the driven magnet described above. It is possible to output a relatively large electromagnetic force as compared with the case where the braking plate is not provided.

The braking plate 9 also functions as a heat radiating plate, and in this respect, it is possible to effectively suppress the radial change (dielectric breakdown due to heat) due to the continuous operation of the terrace drive coil 7, which is a point. Also in the above, the durability of the entire apparatus can be increased, and by extension, the reliability of the entire apparatus can be improved.

Further, since the capacitance sensor group 26 of the position information detecting means 25 is equipped as described above, the movable table can be moved and rotated in the X and Y directions on the XY coordinates. It becomes possible to easily and continuously detect the change in the position of the movable table as a capacitance change in minute units, and at this point, even when the movable table moves in micron units, the moving distance information can be detected with high accuracy, At the same time, with respect to the positional deviation, feedback control at the time of moving control of the movable table is possible as described above (execution of the positional deviation calculating function and the table position correcting function by the table drive control means 21).
Has become.

Further, as described above, in this embodiment, as the sensor portion of the position information detecting means 25, the capacitance sensor group 26 having a plurality of capacitance type detection electrodes is provided (see FIG. 6), and The auxiliary table 5 and case body 3
Since it is arranged in the gap space between the main body side protruding portion 3B,
The space volume occupied by the capacitance sensor group 26 can be reduced, and in this respect, there is an advantage that the entire device can be downsized.

Further, in the first embodiment, the case where the driven magnet 6 is mounted on the auxiliary table 5 has been illustrated, but the driven magnet 6 is mounted on the movable table 1 side and is opposed to this. Then, each of the above-mentioned terrace drive coils 7 may be arranged at a predetermined position on the fixed table 8. In addition, the above-mentioned respective terrace driving coils 7 are provided in a state of penetrating the fixed table 8, and facing the respective terrace driving coils 7, both the movable table 1 side and the auxiliary table 5 side are described above. The driven magnet 6 may be equipped.

Further, in the above first embodiment, the case where the drive coil 7 is provided as the drive coil is illustrated, but the drive coil is not necessarily limited to the drive coil in the present invention, and the drive coil is equivalently provided. Other types of drive coils may be used as long as they function.

In the above embodiment, when the auxiliary table 5 (movable table 1) is moved, as described above, the capacitance sensor group 26 is detected and specified by the position information arithmetic circuit (arithmetic unit) 27. Since the position deviation calculating function and the table position correcting function of the table drive control means 21 act on the basis of the position information, the position deviation of the auxiliary table 5 (movable table 1) is immediately detected and the position deviation is corrected. The auxiliary table 5 (movable table 1) is automatically and highly accurately transferred to a predetermined target position.

Here, in the position information arithmetic circuit (arithmetic unit) 27 as the arithmetic unit described above, the actual position after movement is detected (specified) as described above.
The current position information may be externally output and displayed on a predetermined display unit (not shown). In this way, there is an advantage that the operator can quickly correct the transfer position while confirming the actual state during the moving operation of the auxiliary table 5 (movable table 1) and the final result and the like. .

In this case, the current position display system for displaying the information on the current position of the auxiliary table 5 (movable table 1) by a display unit (not shown) and the position deviation correcting function of the table drive control means 21 described above, It is also possible to coexist with a position shift automatic correction method by linking the table position correction functions.

Regarding the positional deviation information, the table drive control means 21 switches between the current position display method and the automatic positional deviation correction method, or one of them is selectively operated. You may comprise.

[0271]

Second Embodiment This is shown in FIGS. 31 to 32. In the second embodiment shown in FIGS. 31 to 32, the auxiliary table 5 equipped in the first embodiment is deleted, the movable table 31 is directly held by the table holding mechanism 2, and the table drive control means is provided. The feature is that the movable table 31 is directly driven by 21.

31 to 32, reference numeral 31 denotes a rectangular movable table. This movable table 31
Has a circular flat work surface 31A on its upper surface. or,
At the peripheral edge of the lower surface (rear surface) of this movable table 31 in FIG. 31, a square-shaped spacer 31B having a flat surface with a predetermined width is provided, and the lower surface portion is commonly used for the capacitive position detection sensor. The electrode 31Ba is provided. Further, facing the common electrode 31Ba, the same capacitance detecting electrodes 26X ₁ and 26X as the capacitance detecting electrodes in the first embodiment described above are provided.
₂ , 26X ₃ , 26X ₄ , 26Y ₁ , 26Y ₂ , 26Y
₃ , 26Y ₄ are arranged on the upper surface of the driving means holding portion (main body side protruding portion) 33A, which will be described later, similarly to the case of the above-described first embodiment, and thereby, Similarly, four sets of position detection sensors are arranged corresponding to the peripheral edge of the lower surface (bottom surface) of the movable table 31 in FIG.

Reference numeral 2 indicates a table holding mechanism having the same structure as the table holding mechanism in the above-described first embodiment. The table holding mechanism 2 is arranged in the lower portion in FIG. 31 as in the first embodiment described above, allows the movable table 31 to move in an arbitrary direction within the same plane, and also allows the movable table 31 to move. The movable table 31 is held in a state in which the original position return force can be applied to the movable table 31.

That is, in the second embodiment, the movable table 31 has the case main body 3 through the table holding mechanism 2 arranged inside the case main body 33 as the main body.
It is supported by 3 as described above.

The table holding mechanism 2 has the above-mentioned first structure.
Similar to the table holding mechanism 2 in the embodiment, four rod-shaped elastic members 2A and 2B installed at a predetermined interval are set as one set and four sets are prepared in advance corresponding to the peripheral end portion of the movable table 31, Four sets of rod-shaped elastic wire rods 2A and 2B are divided into four corner portions of a relay plate 2G serving as a rectangular relay member for each set, and are planted in the upward direction. Here, as the rod-shaped elastic members 2A and 2B, piano wires are used in the present embodiment, but other members may be used as long as they are rod-shaped elastic members having an appropriate rigidity sufficient to support the movable table 31.

Then, the movable table 31 is held from below by the four table-side rod-shaped elastic members (table-side piano wires) 2A located inside, and the four body-side rod-shaped elastic members located outside the main body ( The relay member 2G is swingably suspended from the case body 33 by the main body side piano wire) 2B.

As a result, the movable table 31 can move in any direction within the same plane without changing the height position as in the case of the above-described first embodiment, and at the same time within the allowable range. It is also possible to rotate with.

In the present embodiment, the case main body (main body) 33 is formed in a box-like shape whose upper and lower parts are open, as shown in FIG. Reference number 34 indicates an electromagnetic drive means. The electromagnetic drive means 34 is formed in the same manner as the electromagnetic drive means 4 in the first embodiment described above, and is arranged below the movable table 31 in FIG.
It is held on the third side and has a function of urging a moving force to the movable table 31 described above.

Reference numeral 33A indicates a driving means holding portion (main body side protruding portion) which is provided so as to project around the inner wall portion of the case main body 33. The electromagnetic driving means 34 described above is held by the case body 33 via the driving means holding portion 33A. The upper surface of the drive means holding portion 33A in FIG. 31 is a flat surface, and the capacitance detecting electrodes 26X ₁ ,
26X ₂ , 26X ₃ , 26X ₄ , 26Y ₁ , 26Y ₂ ,
26Y ₃ and 26Y ₄ are equipped in the same manner as in the case of the first embodiment described above. Correspondingly, a common electrode 31Ba formed in a mouth shape is provided on the peripheral edge of the lower surface (back surface) of the movable table 31 in FIG. 31, as described above.

As in the case of the above-described first embodiment, the electromagnetic drive means 34 includes four driven magnets 6 fixedly mounted at predetermined positions on the lower surface portion of the movable table 31 in FIG. 31, and the respective driven magnets. It has a cross-shaped coil side arranged to face the drive magnet 6, and electromagnetically applies a predetermined drive force to each driven magnet 6 along the predetermined movement direction of the movable table 31 described above. The terrace driving coil 7 and the fixed plate 3 for holding the terrace driving coil 7 at a fixed position.
8 and.

Of these, the fixed plate 38 is set in parallel with the movable table 31 at a predetermined interval, is arranged below the movable table 31 in FIG. 31, and the periphery thereof holds the driving means of the case body 33. It is held by the portion 33A.

Further, as in the case of the above-described first embodiment, the braking plate 9 made of a non-magnetic metal member is provided on the end face side of the above-mentioned driven magnet 6 side of the terrace drive coil 7.
Are individually arranged close to the magnetic pole surface of the driven magnet 6.

In this embodiment, the braking plate 9 is fixed to the end face portion of the terrace driving coil 7, and is fixed to the side of the fixing plate 38 via the terrace driving coil 7. . The braking plate 9
With respect to the above, it may be configured to be fixed to the fixing plate 38 via another spacer member (not shown) while maintaining the state of being in contact with the end face portion of the terrace driving coil 7. This point is the same as in the case of the first embodiment described above.

As described above, the movable table 31 is held by the four table side piano wires 2A as the table side rod-like elastic members located inside. Code 3
Reference numeral 1C shows four table-side leg portions projecting downward from the lower surface of the movable table 31 in FIG. 31 for engaging with the four table-side piano wires 2A. The movable table 31 is connected to and held by the four table-side piano wires 2A via the four table-side leg portions 31C.

Here, these four table side leg portions 31C
Is a length that allows the exposed length L to be the same as the main body side piano wire 2B as the four main body side rod-shaped elastic members having the four table side piano wires 2A located inside described above on the outside. Is set to

Through holes 38A having a predetermined size are formed at the four corners of the fixing plate 38 described above. Although the through hole 38A is formed in a quadrangular shape in the present embodiment, the through hole 38A may have any other shape such as a circle as long as it has a size that allows the operation of the movable table 31 described above. Good.

The four table-side leg portions 31C described above are individually inserted through the through holes 38A, whereby the movable table 1 located in the upper portion of FIG.
Is held by four table-side piano wires 2A of the table holding mechanism 2 located in the lower part of the figure.

In the second embodiment, the bar-shaped elastic members forming the main part of the table holding mechanism 2 are the total of four table-side piano wires 2A and four body-side piano wires 2B. Although the case where it is constructed by four sets of eight piano wires 2A and 2B is illustrated, it may be constructed by three sets and six piano wires. Other configurations and operations thereof are the same as those in the above-described first embodiment.

Even in this case, the second embodiment has the same effects as the first embodiment described above, and in particular, the auxiliary table 5 equipped in the first embodiment described above is deleted. Since the movable table 31 is directly held by the table holding mechanism 2 and the movable table 31 is directly driven by the table drive control means 21, the structure is simplified, and the size and weight can be reduced accordingly. .

Since the weight on the movable table 1 side is reduced as described above, the durability of the table holding mechanism 2 can be improved and the portability of the entire apparatus can be improved. Since the work process of connecting and assembling the auxiliary table 5 to the movable table 31 is not necessary, there is an advantage that productivity and maintainability can be remarkably improved and the cost of the entire apparatus can be reduced.

Further, the four sets of position detecting sensors effectively function to rapidly detect and output the movement information of the movable table 31 as in the case of the above-described first embodiment, and based on this, the table is detected. The drive control means 21 operates to directly feedback-control the movable table 31 via the driven magnet, whereby the movable table 31 is smoothly transferred to a predetermined position, and the reciprocating movement at the stop position is also performed by the braking plate. It is suppressed and controlled to stop at a predetermined position with high accuracy.

[0292]

[Third Embodiment] This third embodiment is different from the first embodiment shown in FIGS. 1 to 30 in that the capacitance sensor group 26 includes eight capacitance detection electrodes. On the other hand, it is characterized in that it is equipped with four capacitance detection electrodes (see FIG. 33A).

This will be described more specifically. First, FIG.
As shown in FIG. 3 (A), in the third embodiment, the auxiliary table 5 is located at at least one end portion in the direction along the X axis from the central portion (for example, the end portion in the positive direction of the X axis). Two capacitance detection electrodes 26X ₁ and 26X ₂ are arranged along the end of the table 5 at a predetermined interval. Similarly, in the third embodiment, at least one end (for example, Y) from the center of the auxiliary table 5 in the direction along the Y-axis.
Two capacitance detection electrodes 26Y ₁ and 26Y ₂ are arranged at a predetermined interval along the positive side of the axis).

Then, each of these capacitance detection electrodes 26
X ₁ , 26X ₂ , 26Y ₁ and 26Y ₂ are mounted on the main body side as in the case of FIGS. 1 to 3, and are formed in a common shape having a predetermined width at a position facing them in common. Electrodes are provided around the lower end of the auxiliary table 5 described above, as in the case of the first embodiment (not shown). A position detection sensor is formed by the common electrode and the capacitance detection electrodes 26X ₁ , 26X ₂ , 26Y ₁ and 26Y ₂ described above.

Here, each capacitance detection electrode 26X ₁ , 26X
₂ , 26Y ₁ and 26Y ₂ may form an essential part of each corresponding position detection sensor, and here, each capacitance detection electrode 26
It is assumed that X ₁ , 26X ₂ , 26Y ₁ and 26Y ₂ are treated as position detection sensors (state including the common electrode) (the same applies to the following embodiments).

Also in the third embodiment, the arithmetic processing system in the case of the first embodiment (see FIG. 6) is used as it is, and the information output from each of the four position detection sensors is used. Based on the table driving means, a calculation unit is provided which performs a predetermined calculation based on the specified movement direction and specifies the movement direction and movement amount (change amount) of the auxiliary table 5 (movable table 1) and outputs it as position information. . Other configurations are almost the same as those of the first embodiment shown in FIGS. 1 to 30 described above.

Here, in the third embodiment described above,
Deleted capacitance detection electrodes 26X ₃ , 26X ₄ and 26Y
The information from ₃ , 26Y ₄ is processed as no information, and the arithmetic processing equivalent to that in the case of the first embodiment described above is executed.

Therefore, in the third embodiment, the noise removal function of the arithmetic unit in the first embodiment described above is not provided (the other capacitance detection electrode for canceling noise is not provided), and it is described above. It has substantially the same operational effect as in the case of the first embodiment, and further, since the information output from the entire position detection sensor is smaller than that in the case of the first embodiment described above, it is necessary for position correction. In this respect, the auxiliary table 5 described above is used because the calculation processing of the information to be processed becomes faster.
It is possible to more quickly execute the positional deviation correction when the (movable table 1) is moved.

Further, in the third embodiment, the eight capacitance detection electrodes 26X ₁ , 26X ₂ , 26X ₃ , 26X ₄ , 26 provided in the first embodiment described above are provided.
Of Y ₁ , 26Y ₂ , 26Y ₃ and 26Y ₄ , the capacitance detection electrodes 26X ₃ and 26X ₄ at the negative X-axis end and the capacitance detection electrodes 26Y ₃ and 26Y ₄ at the negative Y-axis end are Although the case where the capacitance detection electrodes 26X ₁ and 26X _{2 in} the positive direction of the X-axis and the capacitance detection electrodes 26Y ₁ and 26Y ₂ in the positive direction of the Y-axis are deleted by leaving them, Is equivalent.

Next, FIG. 33 (B) shows the same contents as in the case of the above-described third embodiment, in the above-mentioned second embodiment (FIGS. 31 to 32: an example in which the auxiliary table 5 is deleted). The following is an example of the case where

In the case of FIG. 33 (B) as well, it is possible to obtain substantially the same effects as the effects of the second embodiment described above, and further, the third embodiment shown in FIG. 33 (A) described above. As in the case of the embodiment, it is possible to obtain the precision machining stage device capable of executing the positional deviation correction more quickly.

[0302]

[Fourth Embodiment] This fourth embodiment is the same as the first embodiment shown in FIGS.
Eight capacitance detection electrodes (position detection sensors) 26X ₁ , 26X ₂ , 26X ₃ , 26X provided in the capacitance sensor group 26
_{In place of 4} , 26Y ₁ , 26Y ₂ , 26Y ₃ , 26Y ₄ , six capacitance detection electrodes (position detection sensors) 26X ₁ ,
It is characterized in that it is equipped with 26X ₃ , 26Y ₁ , 26Y ₂ , 26Y ₃ and 26Y ₄ (see FIG. 34 (A)).

This will be described in more detail. First, FIG. 34 (A)
In the fourth embodiment, as shown in FIG.
Of the two position detection sensors respectively provided corresponding to both ends in the direction along the X-axis and the Y-axis from the center part of the above, they are provided at both ends in the direction along the X-axis. Each of the two position detection sensors "26X ₁ , 26X ₂ " and "26X ₁
Instead of X _3, 26X ₄ ", equipped with one of the position detection sensor, respectively" 26X ₁ "and" 26X ₃ ".

Then, each of these position detecting sensors "2
6X ₁ "and" 26X ₃ ', was placed at the end center of the corresponding auxiliary table 5 as shown. In this case, each of the position detection sensors "26X ₁ " and "26X ₁ "
" ₃ " does not necessarily have to be arranged in the center. Other configurations are exactly the same as those of the first embodiment shown in FIGS. 1 to 30 described above.

Here, in the above-described fourth embodiment, the information from the deleted capacitance detection electrodes 26X ₂ and 26X ₄ is processed as no information, and the same calculation as in the above-described first embodiment is performed. Processing is to be executed.

Also in this way, it is possible to obtain a precision machining stage device having substantially the same functions as in the case of the first embodiment described above. In this case, as the amount of information,
In reality, the amount of movement information (position change information) in the direction in which the number of position detection sensors is decreased is small, but, for example, increasing the electrode area of the position detection sensor at one position detection sensor. Or, by performing predetermined signal processing (such as doubling the amount of change in the location), it is possible to obtain a precision machining stage device having substantially the same operational effects as in the case of the first embodiment described above. it can.

In the fourth embodiment, each of the two position detecting sensors "26X ₁ , 26X ₂ " and "26X ₃ , 26" arranged at both ends in the direction along the axis of the X-axis.
Of the X ₄ ", each" 26X ₂ "and" 26X ₄ "
There were examples of deleting a "26X _1" and "26
X ₂ ”may be deleted. Further, in this case, two position detection sensors "26X ₁ , 26X ₃ " or "26X ₂ , 26" arranged at both ends in the direction along the axis of the X-axis.
X ₄ ”was deleted, but two position detection sensors“ 26 ”each provided at both ends in the direction along the axis of the Y-axis.
_One of “Y ₁ , 26Y ₃ ” or “26Y ₂ , 26Y ₄ ” may be the target of deletion.

Next, FIG. 34B shows the above-mentioned FIG.
An example in which the same contents as in the fourth embodiment shown in (A) are applied to the above-described second embodiment (FIGS. 31 to 32: an example in which the auxiliary table 5 is deleted) will be described.

Also in the case of FIG. 34 (B), in addition to the same effects as the effects of the second embodiment described above, a fourth effect shown in FIG. 34 (A) is obtained.
As in the case of the above embodiment, it is possible to obtain a precision machining stage device capable of performing positional deviation correction more quickly.

Here, in each of the above-described first to fourth embodiments, an example is disclosed in which the table holding mechanism has four pairs (eight) of piano wires and is arranged at the corners. The table holding mechanism has three pairs of piano wires (six)
However, it may be five or more. Furthermore, each set of piano wire 2
A and 2B do not have to be provided close to each other as long as they are arranged correspondingly.

The correction control method (FIGS. 22 to 30) disclosed in the first embodiment is an example, and the present invention is not necessarily limited to the method illustrated in FIGS. 22 to 30. Any other method may be used as long as the correction control can be performed equally.

Furthermore, in each of the above-described embodiments, the case where the drive coil is equipped with the D-shaped drive coil is illustrated, but the present invention does not necessarily limit the drive coil to the D-shaped drive coil. Other types of drive coils may be used as long as they function in an equivalent manner in cooperation. Further, in each of the above embodiments, the case where the permanent magnet is used as the driven magnet has been illustrated, but an electromagnet may be used as the driven magnet.

Further, in each of the first to second and fourth embodiments among the above-described respective embodiments, the capacitance detection electrodes 26X ₁ , 26X ₂ , 26X ₃ , 26X ₄ and 26Y ₁ , 26Y of the respective position detection sensors are used. ₂ , 26Y ₃ , 26Y ₄ or capacitance detection electrodes 26X ₁ , 26X ₃ and 26Y ₁ , 26Y
_{The case where 2} , 26Y ₃ and 26Y ₄ are arranged at positions symmetrical to each other with respect to the X axis or the Y axis is shown as an example, but this is merely an example, and the capacitance detection electrodes of the respective position detection sensors are not shown. The arrangement position does not have to be a position symmetrical about the X axis or the Y axis.

[0314]

Since the present invention is constituted and functions as described above, according to this, in the invention according to claim 1, first,
A movable table for precision machining can be precisely and smoothly moved in a predetermined direction on the same plane (without changing the height position) or returned to its original position, and an elastic member is used as a table holding mechanism. Since it is equipped with a three-dimensional structure that is used, the double structure sliding mechanism that was required in the conventional example is not required when moving in the X and Y directions, so special precision machining is not required. As a result, processing and assembling work can be greatly improved, and the overall size and weight of the device can be reduced. Also, since there are no sliding points, small vibrations due to friction are reduced and smooth movement operations can be executed.

Further, since the table drive control means and the position detection sensor are partially fixed to each other by directly utilizing the back surface of the movable table as described above, the entire apparatus can be downsized, and the table can be held. As described above, since the mechanism adopts a structure that is extremely lightweight by applying a link mechanism as described above, it is possible to reduce the size and weight of the entire device in this respect, and the portability is improved. Can be increased.

Further, in the invention described in claim 1, since a plurality of capacitance detection type sensors are provided on the same surface as the position detection sensor as described above, when the movable table slightly moves, it moves in a predetermined direction. Even if it is a rotation operation or a rotation operation, the same position detection sensor can simultaneously capture it as a minute change in capacitance, so that the actual movement information of the movable table can be easily and highly accurately detected. Further, since the electromagnetic driving means can set the moving force of the table to an arbitrary large or small size by controlling the energization of the current, it becomes possible to control the minute movement, and at this point, the movable table is precisely moved in the predetermined direction. Made it possible.

Furthermore, since the position information of the movable table obtained by the plurality of position detecting sensors is output to the outside, the operator in charge of the moving operation of the movable table is informed of the middle result and the final result. An unprecedented advantage that the movable table can be transferred to a predetermined target position with high accuracy, since a corrective operation can be performed surely and quickly while confirming the actual state using a display means or the like. It is possible to provide a precision machining stage device.

According to the second aspect of the invention, there are two position detections on the movable table, corresponding to one end and the other end of the direction from the center of the movable table along the X axis and the Y axis. It is characterized in that the sensors are arranged at a predetermined interval, and a total of eight position detection sensors are provided around the entire circumference of the movable table. Equipped with a total of four position detection sensors limited to one end in the direction along the axis and the Y-axis). Other configurations are the same as the invention described in claim 1 described above.

Therefore, according to the invention of claim 2,
In addition to having the same function as the invention described in claim 1, the difference between the information of one and the other position detection sensors provided in the direction along the X-axis (or Y-axis) in the calculation unit is calculated. Is treated as change information in the X-axis (or Y-axis) direction, it is possible to cancel electrical noise from the outside (execution of the external noise elimination function), and for some reason the movable table physically moves up and down. Even if the capacitance of each position detection sensor changes due to movement, this can be canceled (execution of the external noise elimination function). When processing the detected information,
Since the difference in capacitance change is taken, as a result, it is possible to detect the prescribed capacitance data with double the sensitivity (the state in which the absolute value of the change amount is added). Also has the advantage of operating relatively accurately without being affected by it.

According to a third aspect of the present invention, in the precision machining stage device according to the second aspect, the movable table is provided at one end and the other end of the direction along the X-axis and the Y-axis from the center of the movable table. Of the two position detection sensors arranged correspondingly, the two position detection sensors arranged at each end in the direction along the axis of either the X axis or the Y axis shall be one. , Is adopted. Even in this case, it is possible to obtain the one having substantially the same function as that of the invention described in claim 2 by the predetermined arithmetic processing and the like. In this case, the amount of movement information in the direction in which the number of position detection sensors is reduced actually decreases, but, for example, the electrode area of the position detection sensor at one position detection sensor is increased, or By performing predetermined signal processing (such as doubling the amount of change at the location), it is possible to obtain a device having substantially the same function as that of the invention described in claim 2.

According to the invention of claim 4, in the stage device for precision machining according to claim 1, 2 or 3, the table holding mechanism is arranged on the same circumference of the movable table at a predetermined interval. And at least three table-side rod-shaped elastic members having the same length and set in a hanging state downward from the peripheral end portion, and each table-side rod-shaped elastic member provided corresponding to each table-side rod-shaped elastic member. At least three rod-shaped elastic members on the main body side having the same length, which are arranged on the same circumference and are held on the same circumference, and one end portion is held by the main body portion and the other end portion is set in a hanging state; And a relay member that integrally connects the other ends of the rod-shaped elastic members on the main body side. Then, at least three sets (six in total) of the rod-shaped elastic members constituted by this are formed by the rod-shaped elastic members of the same strength, such as piano wires, respectively.

Therefore, in the invention described in claim 4,
In addition to having the same function as the invention according to claim 1, 2 or 3, the table holding mechanism is configured as described above. For example, when the movable table slides in the same direction, Since all the rod-shaped elastic members are elastically deformed into the same shape, the height position of the movable table is always set to be constant.

That is, when the movable table moves in a plane, the three rod-shaped elastic members on the main body side are elastically deformed with the ends held, but the three rod-shaped elastic members on the table side are also in the same state. Elastic deformation occurs (in the opposite direction). Therefore, the height position of the movable table remains unchanged, and instead, the height position of the relay member commonly supported by both rod-shaped elastic members changes.

In other words, the relay member absorbs the change in the height position caused by the deformation of the rod-like elastic members, whereby the movable table slides in the same plane without changing in the height direction as a whole. You can move. When the electromagnetic driving force is released, the movable table returns to the original position in a straight line by the spring action of each rod-shaped elastic member (actuation of the original position return function).

Also, when the movable table is rotationally driven in the same plane, for the same reason, the movable table is rotated in the same plane while maintaining substantially the same height as a whole. . Also in this case, when the electromagnetic driving force is released, the movable table returns to the original position in a straight line by the spring action of each rod-shaped elastic member (actuation of the original position returning function). In the operation of each of these parts, since there is no frictional part at all, smooth planar movement of the movable table is realized in a stable state.

According to a fifth aspect of the invention, in the precision machining stage device according to the first aspect, the movable table is provided with an auxiliary table which is opposed to the movable table at a predetermined interval and is parallel to the movable table, and the table holding is performed. The mechanism is configured to hold the movable table via the auxiliary table.

A plurality of driven magnets having the above-mentioned electromagnetic drive means fixedly mounted at a predetermined position of at least one of a movable table and an auxiliary table, and a coil arranged so as to face each of the driven magnets. A drive coil that has a side and electromagnetically applies a predetermined drive force to each of the driven magnets along a predetermined movement direction of the movable table, and a fixing that holds the drive coil in a fixed position. And a plate.

Further, two position detection sensors are arranged at a predetermined interval at least at one end of the auxiliary table in the direction along the X-axis and the Y-axis from the center of the auxiliary table.
Then, the capacitance detection electrode portion of each of the position detection sensors is provided on the main body portion, and the common electrode portion provided corresponding to this is provided on the auxiliary table side. Other configurations are the same as the invention described in claim 1 described above.

Therefore, according to the invention of claim 5,
In addition to having the same function as that of the invention described in claim 1, the electromagnetic drive means is further configured to apply a plane moving force to the movable table via the auxiliary table and corresponds to the peripheral end portion of the auxiliary table. Since each position detection sensor is equipped, there is a structural margin and the space around the drive coil, which is the main part of the electromagnetic drive means, can be set large, so heat can be dissipated even when the drive coil is used continuously for a long time. Can be effectively executed. In this respect, it is possible to provide an unprecedented excellent precision machining stage device that can enhance the durability of the drive coil and thus the entire device.

According to a sixth aspect of the present invention, in the precision machining stage device according to the second aspect, the movable table is provided with an auxiliary table which faces the movable table at a predetermined interval and which is parallel to the movable table, and which holds the above-mentioned table. The mechanism is configured to hold the movable table via the auxiliary table.

A plurality of driven magnets having the above-mentioned electromagnetic driving means fixedly mounted at a predetermined position of at least one of a movable table and an auxiliary table, and a coil arranged so as to face each of the driven magnets. A drive coil that has a side and electromagnetically applies a predetermined drive force to the driven magnets in a predetermined movement direction of the movable table, and a fixed plate that holds the drive coil in a fixed position. And a configuration including.

Further, two position detection sensors are respectively arranged at predetermined intervals at one end and the other end in the direction along the X axis and the Y axis from the center of the auxiliary table. Then, the capacitance detection electrode portion of each of the position detection sensors is provided on the main body portion, and the common electrode portion provided corresponding to this is provided on the auxiliary table side. The other structure is the same as that of the invention described in claim 2.

Therefore, according to the invention of claim 6,
In addition to having the same function as the invention described in claim 2, the electromagnetic drive means is further configured to apply a plane moving force to the movable table via the auxiliary table, and each position detection sensor is provided on the auxiliary table portion. Since there is room in the structure, the space around the drive coil, which is the main part of the electromagnetic drive means, can be set large, so that effective heat dissipation can be performed even when the drive coil is continuously used for a long time. You can In this respect, similarly to the invention described in claim 5 described above, it is possible to provide an unprecedented excellent precision machining stage device that can enhance the durability of the drive coil and hence the entire device.

According to a seventh aspect of the present invention, in the precision machining stage device according to the sixth aspect, one end and the other end of the auxiliary table in the direction along the X-axis and the Y-axis from the center of the auxiliary table. Among the two position detection sensors arranged corresponding to the above, one of each of the two position detection sensors arranged at each end of the direction destination along the axis of either the X axis or the Y axis is provided. And the configuration is adopted.

Even in this case, it is possible to obtain the one having substantially the same function as that of the invention described in claim 6 by the predetermined arithmetic processing and the like. In this case, the amount of movement information in the direction in which the number of position detection sensors is reduced actually decreases, but, for example, the electrode area of the position detection sensor at one position detection sensor is increased, or By performing predetermined signal processing (such as doubling the amount of change at the location), it is possible to obtain a device having substantially the same function as that of the invention described in claim 6.

According to the eighth aspect of the invention, in the precision machining stage device according to the fifth, sixth or seventh aspect,
A table holding mechanism, at least three table-side rod-shaped elastic members of the same length, which are arranged at a predetermined interval on the same circumference of the auxiliary table and are set in a hanging state downward from the peripheral end portion, The table-side rod-shaped elastic members are provided so as to correspond to the table-side rod-shaped elastic members and are arranged on the same circumference outside the table-side rod-shaped elastic members. One end portion is held by the main body portion and the other end portion is in a hanging state. The main body side rod-shaped elastic members having the same length are set, and a relay member integrally connecting the other ends of the table-side and body-side rod-shaped elastic members is provided. Further, at least three sets (six in total) of the rod-shaped elastic members constituted by this are formed by the rod-shaped elastic members of the same strength, such as piano wires, respectively.

Therefore, according to the invention of claim 8,
In addition to having the same function as that of the invention described in claim 5, 6 or 7, the table holding mechanism is configured as described above. For example, when the movable table slides in the same direction, Since all the rod-shaped elastic members are elastically deformed equally, the height position of the auxiliary table (that is, the movable table) is always set to be constant (similarly to the case of the invention described in claim 4).

According to a ninth aspect of the present invention, in the precision machining stage device according to any one of the first to eighth aspects, the non-magnetic metal is closely faced to the end face portion of the driven magnet. Arrange a braking plate consisting of members,
This braking plate is fixedly mounted on the fixed plate side.

Therefore, according to the invention of claim 9,
In addition to having the same function as the invention according to any one of claims 1 to 8 described above, further, when the auxiliary table or the movable table equipped with the driven magnet makes an abrupt movement, the driven table is driven. Electromagnetic braking force (eddy current brake) with a magnitude proportional to the moving speed between the magnet and the braking plate
Occurs, the sudden movement of the auxiliary table or the movable table is suppressed, and the auxiliary table or the movable table gradually and smoothly moves. Therefore, in the capacitance detection electrode portion of each position detection sensor, the change in the capacitance is
It is possible to detect in a more accurate and stable state in real time (by eliminating repetitive minute fluctuations), and it is possible to improve the reliability of the entire apparatus.

According to a tenth aspect of the present invention, in the precision machining stage device according to the second, third, sixth or seventh aspect, the capacitance detecting electrode portions of the plurality of pairs of position detecting sensors are connected to the above-mentioned X-axis and The configuration is such that they are arranged at positions symmetrical with respect to the Y axis.

Therefore, the invention according to claim 10 has the same function as that of the invention according to claim 2, 3, 6 or 7 described above, and further, when the movable table moves normally. Since the increase / decrease rate (or the absolute value) of the capacitance change detected by each of the position detection sensors is the same, it is possible to quickly determine an abnormality in the operation of the movable table, and to detect the displacement of the movable table. On the other hand, there is an effect that it is possible to perform the positional deviation correction control having a quick response.

In the eleventh aspect of the present invention, in the precision machining stage apparatus according to any one of the first to tenth aspects, the table drive control means is movable from the arithmetic section. Based on the position information of the table, a position deviation calculating function for calculating a deviation from the reference position information of the destination to be moved, and the electromagnetic driving means driven based on the calculated position deviation information are set in advance. A table position correction function for setting and controlling the movable table at the reference position of the moving destination is provided.

Therefore, the invention according to claim 11 has a function equivalent to that of the invention according to any one of claims 1 to 10 described above, and further, during the transfer operation or the final transfer. If the movable table is misaligned for some reason, the misalignment calculation function of the table drive control means immediately operates based on the position information specified by the above-mentioned calculation unit to calculate the degree of misalignment. Then, based on the calculated positional deviation information, the table position correcting function is activated to surely correct and transfer the movable table to the predetermined target position of the moving destination through the electromagnetic driving means to control the setting. That is, according to the invention of claim 11, the movable table is automatically corrected even if a displacement occurs during the transfer thereof and is transferred to a predetermined target position with high accuracy, which is an unprecedented precision. A processing stage device can be provided.

[Brief description of drawings]

FIG. 1 is a partially omitted schematic cross-sectional view showing a first embodiment of the present invention.

FIG. 2 is a partially cutaway plan view of FIG.

3 is a schematic cross-sectional view taken along the line AA of FIG.

FIG. 4 is a partially cutaway bottom view of FIG. 1 seen from below.

FIG. 5 is an explanatory diagram showing a positional relationship between the D-shaped drive coil disclosed in FIG. 1, a driven magnet, and a braking plate.

FIG. 6 is a block diagram showing a relationship between each component of FIG. 1 and its operation control system.

7 is a diagram showing an operation example of an auxiliary table (movable table) that is operated by being biased by the operation control system disclosed in FIG.
FIG. 7 (A) is an explanatory view showing a case where the auxiliary table (movable table) is moved in the direction of 45 ° in the upper right direction, FIG. 7 (B).
FIG. 6 is an explanatory view showing a case where an auxiliary table (movable table) is rotated by an angle θ.

FIG. 8 is a chart showing four energization patterns (energization programs are stored in a program storage unit in advance) for energizing the four rectangular small coils of the rectangular drive coil disclosed in FIGS. 1 to 4 and their functions. Is.

9 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils, and FIG.
Is an explanatory view showing the first control mode and the operation of the auxiliary table (movable table) in the X-axis (positive) direction, and FIG. 9B is an explanation showing the relationship between the magnitude of the driving force and the action point in this case. It is a figure.

10 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace drive coils.
10A is an explanatory diagram showing the third control mode and the operation of the auxiliary table (movable table) in the Y-axis (positive) direction, FIG.
(B) is an explanatory view showing the relationship between the magnitude of the driving force and the point of action in this case.

11 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils.
FIG. 11A is an explanatory diagram showing the fifth control mode and the operation of the auxiliary table (movable table) in the first quadrant direction on the XY coordinates, and FIG. 11B is the magnitude and action of the driving force in this case. It is explanatory drawing which shows the relationship with a point.

12 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils.
FIG. 12A is an explanatory diagram showing the seventh control mode and the operation of the auxiliary table (movable table) in the second quadrant direction on the XY coordinates, and FIG. 12B is the magnitude and action of the driving force in this case. It is explanatory drawing which shows the relationship with a point.

13 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils.
FIG. 13A is an explanatory diagram showing the ninth control mode and the case where the auxiliary table (movable table) is rotated around the origin on the XY coordinates, and FIG. 13B is the magnitude of the driving force in this case. It is explanatory drawing which shows the relationship with an action point.

FIG. 14 is a diagram showing a positional relationship between the braking plate disclosed in FIG. 1, four terrace-shaped drive coils and driven magnets,
FIG. 14A is a partial cross-sectional view showing the structure of the portion including the braking plate, and FIG. 14B is a plan view taken along the line AA in FIG. 14A.

15A and 15B are diagrams showing a braking force generation principle of the braking plate disclosed in FIG. 1, FIG. 15A is an enlarged partial sectional view showing a braking plate portion of FIG. 1, and FIG.
It is explanatory drawing which shows the generation | occurrence | production state of the eddy current braking which arises in the braking plate seen along the AA line in (A).

16 is a diagram showing an electrical relationship between the terrace drive coil and the braking plate disclosed in FIG. 1, and FIG. 16 (A) is an equivalent circuit showing a state in which both are connected;
(B) is an equivalent circuit showing the state of the terrace drive coil when there is no braking plate.

FIG. 17 is an explanatory diagram showing an example in which the auxiliary table moves along the X axis in the overall operation example of the first embodiment disclosed in FIG. 1;

FIG. 18 is an explanatory diagram showing an example of the operation of the auxiliary table portion in FIG. 17 when seen in a plan view.

FIG. 19 is an explanatory diagram showing an example in which the auxiliary table moves along the Y axis.

FIG. 20 is an explanatory diagram showing an example when the auxiliary table moves along a straight line of “y = x”.

FIG. 21 is an explanatory diagram showing an example in which the auxiliary table is rotated by an angle θ around the origin.

FIG. 22 is a flowchart showing a “control mode and movement amount specifying step” which is a part of the control operation of the first embodiment.

FIG. 23 is a part of the control operation of the first embodiment shown in FIG. 22;
5 is a flowchart showing a continuation of the “control mode and movement amount specifying step” in FIG.

FIG. 24 is a flowchart showing a “step of determining the current position of the table” which is a part of the control operation of the first embodiment.

FIG. 25 is a flowchart showing a “correction operation in the case of linear feed along the X axis” which is a part of the control operation of the first embodiment.

FIG. 26 is a flowchart showing a “correction operation in the case of linear feed along the Y axis” which is a part of the control operation of the first embodiment.

FIG. 27 is a part of the control operation of the first embodiment, “y =
6 is a flowchart showing a "correction operation in the case of a straight line feed along a straight line of x".

FIG. 28 is a part of the control operation of the first embodiment, “y =
6 is a flowchart showing "correction operation in the case of linear feed along a straight line of -x".

FIG. 29 is a flowchart showing a “correction operation at the time of rotational movement around the origin” which is a part of the control operation of the first embodiment.

30 is a flow chart showing "SUB (A): sensor detection information calculation processing step" in FIG.

FIG. 31 is a partially omitted schematic cross-sectional view showing a second embodiment of the present invention.

32 is a partially cutaway plan view of FIG. 31. FIG.

33 is a diagram showing an example of another embodiment of the present invention, and FIG.
3A shows a partially omitted schematic explanatory view showing the third embodiment, and FIG. 33B shows an example in which the same contents as the third embodiment are applied to the second embodiment described above. It is the schematic explanatory drawing which abbreviate | omitted.

34 is a diagram showing an example of another embodiment of the present invention, and FIG.
4A shows a partially omitted schematic explanatory view showing the fourth embodiment, and FIG. 34B shows an example in which the same contents as the fourth embodiment are applied to the second embodiment described above. It is the schematic explanatory drawing which abbreviate | omitted.

[Explanation of symbols]

1, 31 Movable table 2 Table holding mechanism 2A, 2B Piano wire as a rod-shaped elastic member 3,33 Case body 3B as a main body 3B Main body side protrusion 4, 34 Electromagnetic drive means 5 Auxiliary table 6 Driven magnet 7 Tab shape drive Coil 8, 38 Fixed plate 9 Braking plate 20 Operation control system 21 Table drive control means 21A Main control unit (with built-in CPU) 25 Position information detection means 26 Capacitive sensor group 26X ₁ , 26X ₂ , 26X ₃ , 26X ₄ , 26Y ₁ ，
26Y ₂ , 26Y ₃ , 26Y ₄ Capacitance detection electrode 27 which is a main part of the position detection sensor 27 Position information calculation circuit (calculation section) 27A Signal conversion circuit section 27B Position signal calculation circuit section 31Ba Common electrode

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G05D 3/12 H01L 21/02 Z H01L 21/02 B23Q 1/18 A (72) Inventor Yoshio Kano Tokyo 4-26-1-103 Ukima, Kita-ku (72) Inventor Jun-ichi Onozaki 1-19-43 Higashi-Oizumi, Nerima-ku, Tokyo F-term inside Tamura Manufacturing Co., Ltd. (reference) 2F063 AA03 BA21 BA30 CA09 CA26 CA30 CA34 DA05 DC08 DD06 DD06 HA05 NA06 ZA03 3C048 BB12 DD06 5F031 CA02 HA53 JA09 JA14 JA17 JA28 JA32 JA38 KA06 KA08 LA04 LA08 MA33 5H303 AA06 BB02 BB09 CC02 DD11 DD19 DD24 EE01 EE03 EE07 FF04 FF08 HH02 HH07 KK05 LL03

Claims (11)

[Claims] 1. A movable table arranged so as to be movable in an arbitrary direction from an origin on an XY plane, and allows the movable table to move within a predetermined range while holding the movable table. A table holding mechanism having a function of returning to the original position, a main body supporting the table holding mechanism,
An electromagnetic drive unit that is mounted on the main body and applies a moving force to the movable table, and a table drive control unit that controls the operation of the electromagnetic drive unit are provided. A plurality of driven magnets that are fixedly installed at positions, and coil sides that are arranged so as to face each of the driven magnets, and that are along the predetermined moving direction of the movable table with respect to the respective driven magnets. A drive coil for electromagnetically applying a predetermined drive force and a fixed plate for holding the drive coil in a fixed position are provided, and a direction along the X axis and the Y axis from the central portion of the movable table. Two independent position detection sensors corresponding to at least one end located at the front are arranged at a predetermined interval, and the capacitance detection electrode portion of each position detection sensor is provided in the main body portion. Equipment In addition, the movable table side is equipped with a common electrode portion provided corresponding thereto, and a predetermined calculation is performed based on the information obtained from each of the two position detection sensors to move the movable table. A stage device for precision machining, characterized in that the table drive control means is additionally provided with a calculation part for specifying the change amount thereof and calculating the current position of the movable table and externally outputting this as position information. 2. A movable table disposed so as to be movable in an arbitrary direction from an origin on an XY plane, and allows the movable table to move within a predetermined range while holding the movable table. A table holding mechanism having a function of returning to the original position, a main body supporting the table holding mechanism,
An electromagnetic drive unit that is mounted on the main body and applies a moving force to the movable table, and a table drive control unit that controls the operation of the electromagnetic drive unit are provided. A plurality of driven magnets that are fixedly installed at positions, and coil sides that are arranged so as to face each of the driven magnets, and that are along the predetermined moving direction of the movable table with respect to the respective driven magnets. A drive coil for electromagnetically applying a predetermined drive force and a fixed plate for holding the drive coil in a fixed position are provided, and a direction along the X axis and the Y axis from the central portion of the movable table. Two independent position detection sensors corresponding to the respective one end and the other end are respectively arranged at a predetermined interval, and the capacitance detection electrode portion of each position detection sensor is provided in the main body portion. Equip In addition, a common electrode portion provided corresponding to this is provided on the movable table side, and a predetermined calculation is performed based on the information output from each of the eight position detection sensors to determine the moving direction of the movable table. A calculation unit that specifies the amount of change and calculates the current position of the movable table and externally outputs the current position as position information is attached to the table drive control means, and the calculation unit is detected by each of the position detection sensors. A precision machining stage device that is equipped with a noise elimination function that eliminates noise coming from outside. 3. The stage device for precision processing according to claim 2, wherein the movable table is arranged corresponding to respective end portions of one end of the movable table along the X-axis and the Y-axis and the other end. Of the two position detection sensors described above , the two position detection sensors arranged at each end portion in the direction ahead along either the X-axis or the Y-axis are set as one. A characteristic stage device for precision machining. 4. The stage device for precision processing according to claim 1, 2, or 3, wherein the table holding mechanism is arranged at a predetermined interval on the same circumference of the movable table and is located below a peripheral end portion. At least three table-side rod-shaped elastic members of the same length set in a hanging state toward the table-side rod-shaped elastic members provided corresponding to the table-side rod-shaped elastic members At least three body-side rod-shaped elastic members of the same length, which are arranged on the circumference, one end of which is held by the main body and the other end of which is suspended, and the table-side and main-body-side elastic members. And a relay member integrally connecting the other ends of the rod-shaped elastic members to each other, and at least six rod-shaped elastic members configured by the relay member are rod-shaped elastic members each having the same strength, such as a piano wire. Formation Precision machining stage apparatus characterized by a. 5. A movable table arranged so as to be movable in an arbitrary direction from an origin on an XY plane, and a movable table is allowed to move and the movable table is held and an original position returning function is provided. Table holding mechanism, a main body for supporting the table holding mechanism, an electromagnetic drive means mounted on the main body for applying a moving force to the movable table, and a table drive control for controlling the operation of the electromagnetic drive means. Means for connecting the auxiliary table parallel to the movable table at a predetermined interval and parallel to each other, and the table holding mechanism holds the movable table via the auxiliary table. A plurality of driven magnets fixedly mounted at a predetermined position on at least one of the movable table and the auxiliary table, and each driven magnet. A drive coil having coil sides arranged to face each other and electromagnetically applying a predetermined drive force to the respective driven magnets in a predetermined moving direction of the movable table, and the drive coil. A fixed plate for holding the fixed table at a fixed position, and two independent positions corresponding to at least one end of the auxiliary table in the direction along the X-axis and the Y-axis from the center of the auxiliary table. The detection sensors are arranged at predetermined intervals, the capacitance detection electrode portion of each position detection sensor is mounted on the main body portion, and a common electrode provided corresponding to each capacitance detection electrode is provided on the auxiliary table. Mounted on the side of the movable table, and performs a predetermined calculation based on the information output from each of the four position detection sensors to identify the moving direction of the movable table and its change amount, and Current position calculating unit for external output as calculated by the position information which, precision machining stage apparatus characterized by the features in the table drive control means of Buru. 6. A movable table arranged so as to be movable in an arbitrary direction from an origin on an XY plane, and the movable table is allowed to move within a predetermined range while holding the movable table. A table holding mechanism having a function of returning to the original position, a main body supporting the table holding mechanism,
An electromagnetic drive unit that is mounted on the main body and applies a moving force to the movable table, and a table drive control unit that controls the operation of the electromagnetic drive unit are provided, and face the movable table at a predetermined interval. The auxiliary table is connected in parallel, and the table holding mechanism holds the movable table via the auxiliary table. The electromagnetic drive means is provided at least at a predetermined position of the movable table or the auxiliary table. A plurality of driven magnets that are fixedly installed in the vehicle, and a coil side that is arranged so as to face each of the driven magnets. Of the auxiliary table, and a fixing plate for holding the driving coil in a fixed position. Two independent position detection sensors are respectively arranged at a predetermined interval corresponding to one end and the other end of the direction ahead from the core along the X-axis and the Y-axis. In addition to equipping the main body with the capacitance detection electrode portion of the above, and equipping the auxiliary table side with a common electrode provided corresponding to this capacitance detection electrode, the eight position detection sensors formed by this A calculation unit that performs a predetermined calculation based on the output information to specify the moving direction of the movable table and its change amount, calculates the current position of the movable table, and externally outputs this as position information,
A stage device for precision processing, characterized in that the arithmetic operation unit is provided in addition to the table drive control means, and the calculation unit has a noise elimination function for eliminating noise coming from outside detected by each of the position detection sensors. 7. The precision machining stage device according to claim 6, wherein two position detection sensors are provided corresponding to both ends in a direction along the X axis and the Y axis from the center of the auxiliary table. Precision machining, characterized in that each of the two position detection sensors disposed at one end and the other end of the direction along the axis of either the X axis or the Y axis is one. Stage device. 8. The stage device for precision machining according to claim 5, 6 or 7, wherein said table holding mechanism is arranged at a predetermined interval on the same circumference of said auxiliary table and is located below a peripheral end portion. At least three table-side rod-shaped elastic members of the same length set in a hanging state toward the table-side rod-shaped elastic members provided corresponding to the table-side rod-shaped elastic members At least three body-side rod-shaped elastic members of the same length, which are arranged on the circumference, one end of which is held by the main body and the other end of which is suspended, and the table-side and main-body-side elastic members. And a relay member integrally connecting the other ends of the rod-shaped elastic members to each other, and at least six rod-shaped elastic members configured by the relay member are rod-shaped elastic members each having the same strength, such as a piano wire. Formation Precision machining stage apparatus characterized by a. 9. The precision machining stage device according to claim 1, wherein the braking device is made of a non-magnetic metal member and closely faces a magnetic pole side end surface portion of the driven magnet. A stage device for precision processing, characterized in that a plate is arranged and the braking plate is fixedly mounted on the fixed plate side. 10. The precision machining stage device according to claim 2, 3, 6, or 7, wherein each capacitance detection electrode of each position detection sensor is line-symmetric with respect to the X axis and the Y axis described above. The stage device for precision machining, which is characterized in that it is arranged at the position. 11. The precision machining stage device according to claim 1, wherein the table drive control unit is preset based on position information of the movable table output from the computing unit. Position deviation calculating function for calculating the deviation from the reference position information of the moved destination, and the movable table at the reference position of the preset moving destination by driving the electromagnetic drive means based on the calculated position deviation information. A stage device for precision machining, which is provided with a table position correction function for setting and controlling the.