JP2003031613A - Flip chip mounting body and method of mounting the same - Google Patents
Flip chip mounting body and method of mounting the sameInfo
- Publication number
- JP2003031613A JP2003031613A JP2001211482A JP2001211482A JP2003031613A JP 2003031613 A JP2003031613 A JP 2003031613A JP 2001211482 A JP2001211482 A JP 2001211482A JP 2001211482 A JP2001211482 A JP 2001211482A JP 2003031613 A JP2003031613 A JP 2003031613A
- Authority
- JP
- Japan
- Prior art keywords
- chip mounting
- flip
- solder
- chip
- mounting body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13016—Shape in side view
- H01L2224/13018—Shape in side view comprising protrusions or indentations
- H01L2224/13019—Shape in side view comprising protrusions or indentations at the bonding interface of the bump connector, i.e. on the surface of the bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81193—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8138—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/81385—Shape, e.g. interlocking features
Landscapes
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
- Wire Bonding (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、所定の導電部を設
けた回路基板上にチップを固定し、チップと回路基板と
を電気的に接続するフリップチップ実装体及びフリップ
チップ実装方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flip chip mounting body and a flip chip mounting method for fixing a chip on a circuit board provided with a predetermined conductive portion and electrically connecting the chip and the circuit board. is there.
【0002】[0002]
【従来の技術】従来のフリップチップ実装体及びそのフ
リップチップ実装方法としては、例えば図8に示すよう
に、チップ1の実装面側に設けたハンダ部3を回路基板
4側に設けた導電部5に接続させた装置及び方法があげ
られる。2. Description of the Related Art As a conventional flip-chip mounting body and its flip-chip mounting method, as shown in FIG. 8, for example, a soldering portion 3 provided on the mounting surface side of a chip 1 and a conductive portion provided on the circuit board 4 side are provided. An apparatus and a method connected to No. 5 can be mentioned.
【0003】まず、図8(a)に示すように、チップ1
には、例えばAlからなる電極パッド2を設け、電極パ
ッド2上にはハンダ部3として例えばハンダバンプを形
成する。また、回路基板4には予め導電部5として例え
ば基板電極を形成する。そして、図8(a)に示すよう
に、ハンダバンプにフラックス7を転写する。First, as shown in FIG.
Is provided with an electrode pad 2 made of, for example, Al, and a solder bump, for example, is formed as a solder portion 3 on the electrode pad 2. In addition, for example, a board electrode is previously formed as the conductive portion 5 on the circuit board 4. Then, as shown in FIG. 8A, the flux 7 is transferred to the solder bump.
【0004】次に、図8(b)に示すように、加熱によ
りハンダバンプを溶融させ、フラックス洗浄後、例えば
熱硬化性のエポキシ樹脂等の封止樹脂6をチップ1と回
路基板4のギャップに注入して加熱処理を施すことで硬
化させて、図8(d)に示すようなフリップチップ実装
体を得る。Next, as shown in FIG. 8B, the solder bumps are melted by heating, and after flux cleaning, a sealing resin 6 such as a thermosetting epoxy resin is placed in the gap between the chip 1 and the circuit board 4. It is injected and cured by heat treatment to obtain a flip chip mounting body as shown in FIG.
【0005】[0005]
【発明が解決しようとする課題】ところが、上述のよう
なフリップチップ実装方法においては、ハンダ部を完全
に溶融させるために各ハンダ部の形状が一定にはなりに
くく、チップと回路基板間のギャップを正確に管理する
ことが困難であるという問題点があった。However, in the flip chip mounting method as described above, since the solder portions are completely melted, the shape of each solder portion is unlikely to be constant, and the gap between the chip and the circuit board is small. However, there is a problem that it is difficult to accurately manage.
【0006】また、残留フラックスを洗浄して除去する
フラックス洗浄工程を行うのは、ハンダ部に残留するフ
ラックスが接続信頼性を低下させるためであるが、この
ため工程が複雑化し、不良品の増加を招いたり、工程を
維持するためのランニングコストがかかるとという問題
点があった。また、ハンダ部の表面は酸化しやすいた
め、チップと回路基板との安定した電気的接続ができな
いことがあるという問題点があった。Further, the reason why the flux cleaning step of cleaning and removing the residual flux is carried out is that the flux remaining in the solder portion lowers the connection reliability, but this complicates the process and increases the number of defective products. However, there is a problem in that a running cost is required to maintain the process. Further, since the surface of the solder portion is easily oxidized, there is a problem that stable electrical connection between the chip and the circuit board may not be possible.
【0007】本発明は上記問題点を改善するためになさ
れたものであり、チップと回路基板間のギャップ管理を
容易にするとともに、チップと回路基板との安定した電
気的接続を実現するフリップチップ実装体及びフリップ
チップ実装方法を提供することを目的とするものであ
る。The present invention has been made to solve the above problems, and facilitates management of the gap between the chip and the circuit board, and realizes a stable electrical connection between the chip and the circuit board. An object of the present invention is to provide a mounting body and a flip chip mounting method.
【0008】[0008]
【課題を解決するための手段】請求項1に記載のチップ
実装体は、導電部5を有する回路基板4と、ハンダ部3
を有するチップ1とを備えてなり、前記導電部5と前記
ハンダ部3とが対向して電気的に接続されたフリップチ
ップ実装体において、前記導電部5は、前記チップ1の
有するハンダ部5に少なくとも一部が侵入して前記回路
基板4と前記チップ1とを電気的に接続した突起電極で
あることを特徴とするものである。A chip mounting body according to claim 1 has a circuit board 4 having a conductive portion 5 and a solder portion 3.
In a flip-chip mounting body in which the conductive portion 5 and the solder portion 3 are electrically connected to face each other, the conductive portion 5 includes the solder portion 5 included in the chip 1. At least a part of the electrode is a protruding electrode that electrically connects the circuit board 4 and the chip 1 to each other.
【0009】また、請求項2に記載のフリップチップ実
装体は、請求項1に記載の発明において、前記突起電極
5a、5cは、先端部には少なくとも1つの凸状部51
を備えてなることを特徴とするものである。The flip-chip mounting body according to a second aspect of the present invention is the flip-chip mounting body according to the first aspect of the invention, wherein the protruding electrodes 5a and 5c have at least one convex portion 51 at the tip.
It is characterized by comprising.
【0010】また、請求項3に記載のフリップチップ実
装体は、請求項1又は請求項2に記載の発明において、
前記突起電極5bは、先端部には少なくとも1つの錐状
部53を備えてなることを特徴とするものである。The flip chip mounting body according to a third aspect is the invention according to the first or second aspect,
The protruding electrode 5b is characterized by having at least one conical portion 53 at its tip.
【0011】また、請求項4に記載のフリップチップ実
装体は、請求項1又は請求項2に記載の発明において、
前記突起電極5dは、先端部にはカルデラ状部52を有
してなることを特徴とするものである。The flip chip mounting body according to a fourth aspect of the present invention is the flip-chip mounting body according to the first or second aspect of the invention.
The protruding electrode 5d is characterized in that it has a caldera-like portion 52 at its tip.
【0012】また、請求項5に記載のフリップチップ実
装体は、請求項1乃至請求項4のいずれかに記載の発明
において、前記突起電極5e、5gを、前記ハンダ部3
に侵入した突起部分55と該突起部分55の支持部であ
る土台部54とを別途形成して後、両者を一体化するよ
うに形成することを特徴とするものである。A flip-chip mounting body according to a fifth aspect of the present invention is the flip-chip mounting body according to any one of the first to fourth aspects of the invention, in which the protruding electrodes 5e and 5g are connected to the solder portion 3
It is characterized in that the protruding portion 55 and the base portion 54, which is a supporting portion of the protruding portion 55, are separately formed and then formed so as to be integrated with each other.
【0013】また、請求項6に記載のフリップチップ実
装体は、請求項5に記載の発明において、前記突起部分
55は、スタッドバンプであることを特徴とするもので
ある。According to a sixth aspect of the present invention, in the fifth aspect of the present invention, the protrusion 55 is a stud bump.
【0014】また、請求項7に記載のフリップチップ実
装体は、請求項1乃至請求項5のいずれかに記載の発明
において、前記突起電極5fは、少なくとも前記ハンダ
部3と接触する部分に導電性材料からなる導電層53を
設けてなることを特徴とするものである。Further, in the flip-chip mounting body according to a seventh aspect, in the invention according to any one of the first to fifth aspects, the protruding electrode 5f is conductive at least at a portion in contact with the solder portion 3. A conductive layer 53 made of a conductive material is provided.
【0015】また、請求項7に記載のフリップチップ実
装方法は、チップ1の実装面に設けたハンダ部3と、回
路基板4の表面に設けた導電部5とを対向させて所定の
位置に搭載して電気的に接続させる工程を備えてなるフ
リップチップ実装方法において、前記導電部5として突
起電極5a〜5gを用い、前記チップ1の有するハンダ
部3に前記突起電極5a〜5gを押圧して少なくとも一
部を侵入させて前記ハンダ部3と前記導電部5とを圧着
する工程を含んでなることを特徴とするものである。Further, in the flip-chip mounting method according to the seventh aspect, the solder portion 3 provided on the mounting surface of the chip 1 and the conductive portion 5 provided on the surface of the circuit board 4 are opposed to each other at a predetermined position. In a flip-chip mounting method comprising a step of mounting and electrically connecting, the protruding electrodes 5a to 5g are used as the conductive portion 5, and the protruding electrodes 5a to 5g are pressed against the solder portion 3 of the chip 1. And intruding at least a part thereof to press-bond the solder portion 3 and the conductive portion 5 to each other.
【0016】ここで、突起電極には、凸状部51を少な
くとも有してなる任意の形状のものが含まれ、例えば先
端部以外の部分に凸状部51を有してなるようなものも
含まれる。また、上記のハンダ部3には、任意の形状を
したハンダバンプや、略球形状であるハンダボール等が
含まれる。Here, the protruding electrode includes any shape having at least a convex portion 51, for example, one having a convex portion 51 at a portion other than the tip portion. included. The solder portion 3 includes a solder bump having an arbitrary shape, a substantially spherical solder ball, and the like.
【0017】[0017]
【発明の実施の形態】以下、本発明の実施形態を図面に
基づき説明する。なお、フリップチップ実装体の基本構
成及びそのフリップチップ実装方法の基本方法は、従来
の技術にて示したものと同等であるので、同一箇所には
同一符号を付して共通部分の説明は省略する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. Since the basic structure of the flip-chip mounting body and the basic method of the flip-chip mounting method are the same as those shown in the related art, the same parts are designated by the same reference numerals and the description of common parts is omitted. To do.
【0018】本発明の第1実施形態を図1に基づいて説
明する。図1は、本発明の第1実施形態に係るフリップ
チップ実装体及びフリップチップ実装方法を示す概略断
面図である。A first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic sectional view showing a flip chip mounting body and a flip chip mounting method according to a first embodiment of the present invention.
【0019】以下に、フリップチップ実装方法の説明を
示す。図1(a)及び従来の技術で示したように、チッ
プ1には例えばAlからなる電極パッド2と、ハンダ部
3としてハンダバンプを形成する。The flip chip mounting method will be described below. As shown in FIG. 1A and the related art, an electrode pad 2 made of, for example, Al and a solder bump as a solder portion 3 are formed on the chip 1.
【0020】ここで、電極パッド2の大きさは、例えば
サイズが50〜150μm角、高さは1〜3μmであ
る。ハンダバンプのサイズは、例えば径が50〜150
μm、高さは50μm以上である。Here, the size of the electrode pad 2 is, for example, a size of 50 to 150 μm square and a height of 1 to 3 μm. The size of the solder bump is, for example, 50 to 150 in diameter.
μm, and the height is 50 μm or more.
【0021】ここで、第1実施形態においては、回路基
板4に形成する導電部5としては、図1(d)に示すよ
うに、平板形状の土台部分上に三角柱の一側面を設けた
ような形状であって断面形状が略ホームベース形状であ
る五角形をしており、チップ1側に接続する側の先端部
には鋭角の凸状部51を一定方向に所定長さだけ備えた
構成の突起電極5aを用いており、該突起電極5aを回
路基板4上の所定の位置に形成する。突起電極5aの大
きさは、例えば幅が40〜100μm、高さが20μm
以上、長さは40μm以上で、ハンダ部3に侵入させる
ことができる大きさであればよい。なお、突起電極5a
は、例えばCuからなり一体形成されており、例えば配
線8等により回路基板4内部に存在する回路(図示せ
ず)と接続されている。また、凸状部51から広がる斜
面は、鋭角をなし、略135度以下であることが好まし
い。Here, in the first embodiment, as the conductive portion 5 formed on the circuit board 4, as shown in FIG. 1D, one side surface of the triangular prism is provided on the flat base portion. It has a pentagonal shape with a substantially cross-sectional shape that is a substantially home base shape, and has a convex portion 51 with an acute angle provided at a predetermined length in a certain direction at the tip end on the side connected to the chip 1 side. The protruding electrode 5a is used, and the protruding electrode 5a is formed at a predetermined position on the circuit board 4. The size of the protruding electrode 5a is, for example, 40 to 100 μm in width and 20 μm in height.
As described above, the length may be 40 μm or more and the size that allows the solder to enter the solder portion 3. In addition, the protruding electrode 5a
Is integrally formed of, for example, Cu, and is connected to a circuit (not shown) existing inside the circuit board 4 by, for example, the wiring 8 or the like. Further, the slope extending from the convex portion 51 forms an acute angle and is preferably about 135 degrees or less.
【0022】ここで、突起電極5aを形成する材料は、
Cuを使用しているが、導電性を有する材料であればよ
く、その他にNi、Au、Ag等の金属や導電性ペース
ト等を用いてもよいし、Ni、Au、Ag等の金属と導
電性ペーストとの複合物でもよい。Here, the material forming the protruding electrode 5a is
Although Cu is used, any material having conductivity may be used. In addition, a metal such as Ni, Au, Ag or the like, a conductive paste or the like may be used, or a metal such as Ni, Au, Ag or the like may be conductive. It may be a composite with a conductive paste.
【0023】また、チップ1の回路基板4への搭載は、
ハンダ部3内部に突起電極5aを押圧して所望の量だけ
侵入させるようにして行う。以降の工程は、従来の技術
にて示した方法と同様にして行う。The chip 1 is mounted on the circuit board 4 as follows.
The protrusion electrode 5a is pressed into the solder portion 3 so that a desired amount of the protrusion electrode 5a is penetrated. The subsequent steps are performed in the same manner as the method shown in the conventional technique.
【0024】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、チップ1と回路基板4との
電気的接続をハンダ部3内部に突起電極5aの凸状部5
1を押圧して侵入させるようにして行うため、ハンダ部
3にフラックスを設けたり、フラックス洗浄したりする
工程を必要としないので、チップ1と回路基板4間のギ
ャップ管理を容易にすることができる。また、ハンダ部
3内部の酸化していない部分に突起電極5aを侵入させ
圧着接続するため、チップ1と回路基板4との安定した
電気的接続を実現することができる。In the flip chip mounting body and the flip chip mounting method, the electrical connection between the chip 1 and the circuit board 4 is provided inside the solder portion 3 by the convex portion 5 of the protruding electrode 5a.
Since it is performed by pressing 1 to make it intrude, there is no need to provide a flux to the solder part 3 or a step of cleaning the flux, so that the gap management between the chip 1 and the circuit board 4 can be facilitated. it can. In addition, since the protruding electrode 5a is inserted into the non-oxidized portion inside the solder portion 3 for pressure bonding, stable electrical connection between the chip 1 and the circuit board 4 can be realized.
【0025】また、突起電極5aは、先端部に凸状部5
1を備えているため、ハンダ部3に対して突起電極5a
を凸状部51から広がる斜面に沿うようにして容易に侵
入させることができる。また、突起電極5aは、先端部
に凹状部分を備えず凸状部51から広がる斜面を備えて
おり、ハンダ部3に侵入時には抵抗となりにくい構造で
あるため、せん断方向の力が発生しにくいので、チップ
1に設けた電極パッド2からハンダ部3が外れてしまう
ようなことが少なく、歩留まりの向上も達成できる。ま
た、先端部に凸状部51を備えた突起電極5aのような
形状は、容易に形成することができる。The protruding electrode 5a has a convex portion 5 at the tip.
1 is provided, the protrusion electrode 5a
Can be easily penetrated along the slope extending from the convex portion 51. Further, since the protruding electrode 5a has a sloped surface that does not have a concave portion at its tip end and extends from the convex portion 51, and has a structure that does not easily become a resistance when entering the solder portion 3, a force in the shear direction is less likely to occur. In addition, the solder portion 3 is unlikely to come off from the electrode pad 2 provided on the chip 1, and the yield can be improved. Further, a shape such as the protruding electrode 5a having the convex portion 51 at the tip can be easily formed.
【0026】ここで、次に、導電部5の異なる形状を示
す実施形態を、本発明の第2実施形態乃至第4実施形態
として図2乃至図4に基づいて説明する。なお、第1実
施形態との共通部分の説明は、同一箇所には同一符号を
付して省略する。Next, embodiments showing different shapes of the conductive portion 5 will be described as second to fourth embodiments of the present invention with reference to FIGS. 2 to 4. Note that the description of the same parts as those of the first embodiment will be omitted by giving the same reference numerals to the same parts.
【0027】まず、本発明の第2実施形態を図2に基づ
いて説明する。図2は、本発明の第2実施形態に係るフ
リップチップ実装体を示す概略断面図である。First, a second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a schematic sectional view showing a flip chip mounting body according to the second embodiment of the present invention.
【0028】第2実施形態においては、導電部5として
は、図2(b)に示すように、平板形状の土台部分上に
先端部には凸状部51を含む四角錐状の錘状部53を配
置したような形状の突起電極5bを用いる。In the second embodiment, as the conductive portion 5, as shown in FIG. 2B, a quadrangular pyramidal pyramidal portion including a convex portion 51 at the tip end on a flat plate-shaped base portion. The protruding electrode 5b having a shape in which 53 is arranged is used.
【0029】ここで、突起電極5bの錐状部53には、
四角錐状のものを用いたが、円錐形状や角錐形状等任意
の形状のものでもよい。なお、突起電極5bの大きさ
は、例えば40〜100μm角、高さが20μm以上
で、ハンダ部3に侵入させることができる大きさであれ
ばよい。また、突起電極5bは、例えばCuからなり一
体形成されている。また、錘状部53の傾斜面は、鋭角
をなし、対角斜辺を含む断面では略150度以下である
ことが好ましい。Here, in the conical portion 53 of the protruding electrode 5b,
Although the quadrangular pyramid shape is used, it may have any shape such as a conical shape or a pyramid shape. The size of the bump electrode 5b may be, for example, 40 to 100 μm square, 20 μm or more in height, and the size that allows it to enter the solder part 3. The bump electrode 5b is made of, for example, Cu and is integrally formed. Further, it is preferable that the inclined surface of the conical portion 53 forms an acute angle and that the cross section including the diagonal hypotenuse is approximately 150 degrees or less.
【0030】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、錘状部53を先端部に備え
た突起電極5bを用いることで、ハンダ部3内部の酸化
していない部分に突起電極5bを低い荷重で容易に侵入
させて圧着接続することができ、チップ1と回路基板4
との安定した電気的接続を実現することができる。In the flip chip mounting body and the flip chip mounting method, by using the protruding electrode 5b having the weight-shaped portion 53 at the tip, the protruding electrode 5b is lowered in the non-oxidized portion inside the solder portion 3. It can be easily inserted by pressure and connected by crimping. Chip 1 and circuit board 4
A stable electrical connection with can be realized.
【0031】また、突起電極5bは、先端部に錘状部5
3を備えているため、ハンダ部3に対して突起電極5b
を錘状部53の傾斜面に沿うようにして容易に侵入させ
ることができる。また、突起電極5bは、先端部に凹状
部分を備えず錘状部53の傾斜面を備えており、ハンダ
部3に侵入時には抵抗となりにくい構造であるため、せ
ん断方向の力が発生しにくいので、チップ1に設けた電
極パッド2からハンダ部3が外れてしまうようなことが
少なく、歩留まりの向上も達成できる。また、先端部に
錘状部53を備えた突起電極5bのような形状は、容易
に形成することができる。The protruding electrode 5b has a cone-shaped portion 5 at the tip.
3 is provided, the protruding electrode 5b
Can easily enter along the inclined surface of the weight portion 53. Further, since the protruding electrode 5b does not have a concave portion at the tip and has an inclined surface of the weight portion 53, and has a structure that does not easily become a resistance when entering the solder portion 3, a force in the shearing direction is hard to be generated. In addition, the solder portion 3 is unlikely to come off from the electrode pad 2 provided on the chip 1, and the yield can be improved. Further, a shape such as the protruding electrode 5b having the conical portion 53 at the tip can be easily formed.
【0032】次に、本発明の第3実施形態を図3に基づ
いて説明する。図3は、本発明の第3実施形態に係るフ
リップチップ実装体を示す概略断面図である。Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 3 is a schematic cross-sectional view showing a flip-chip mount body according to the third embodiment of the present invention.
【0033】第3実施形態においては、導電部5として
は、図3(b)に示すように、平板形状の土台部分上に
4個の凸状部51を設けたような形状、例えば断面形状
がクシ歯状であり鋭角の凸状部51を先端に一定方向に
所定長さだけ備えた形状の突起電極5cを用いる。な
お、突起電極5cは例えばCuからなり一体形成されて
いる。突起電極5cの大きさは、例えば幅は80〜15
0μm、高さは18〜40μm、長さは100〜300
μmで、ハンダ部3に侵入させることができる大きさで
あればよい。In the third embodiment, as the conductive portion 5, as shown in FIG. 3B, a shape in which four convex portions 51 are provided on a flat base portion, for example, a cross-sectional shape. The protruding electrode 5c has a comb-like shape and is provided with an acute-angled convex portion 51 at the tip for a predetermined length in a certain direction. The protruding electrode 5c is made of, for example, Cu and is integrally formed. The size of the protruding electrode 5c is, for example, 80 to 15 in width.
0 μm, height 18-40 μm, length 100-300
The size may be μm so that the solder part 3 can be penetrated.
【0034】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、複数個の凸状部51を備え
た突起電極5cを用いることで、突起電極5cとハンダ
部3との接触面積を増大させることができるため、チッ
プ1と回路基板4との安定した電気的接続を実現するこ
とができる。In the flip chip mounting body and the flip chip mounting method, the contact area between the protruding electrode 5c and the solder portion 3 can be increased by using the protruding electrode 5c having the plurality of convex portions 51. Therefore, stable electrical connection between the chip 1 and the circuit board 4 can be realized.
【0035】次に、本発明の第4実施形態を図4に基づ
いて説明する。図4は、本発明の第4実施形態に係るフ
リップチップ実装体を示す概略断面図である。Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 4 is a schematic sectional view showing a flip chip mounting body according to the fourth embodiment of the present invention.
【0036】第4実施形態においては、導電部5として
は、図4に示すように、第2実施形態における突起電極
5bの錘状部53の1部を回路基板4面と略平行にカッ
トし、カットした部分の略中央部にカルデラ状部52を
設けたような形状の突起電極5dを用いる。なお、カル
デラ状部52の上端部は、四角環状を構成する凸状部5
1を含んでいる。In the fourth embodiment, as the conductive portion 5, as shown in FIG. 4, a part of the weight portion 53 of the protruding electrode 5b in the second embodiment is cut substantially parallel to the surface of the circuit board 4. A protruding electrode 5d having a shape in which a caldera-shaped portion 52 is provided in the substantially central portion of the cut portion is used. The upper end of the caldera-shaped portion 52 has a convex portion 5 that forms a square ring shape.
Contains 1.
【0037】なお、カルデラ状部52の大きさは、例え
ば幅が30〜100μm、深さが50μm以下であり、ハ
ンダ部3よりも小さければよい。また、突起電極5dの
大きさは、例えば幅は40〜200μm、長さが40μm
以上、高さが18μm以上で、ハンダ部3に侵入させる
ことができる大きさであればよい。なお、突起電極5d
は、例えばCuからなり一体形成されている。The caldera-like portion 52 may have a width of, for example, 30 to 100 μm and a depth of 50 μm or less, and may be smaller than the solder portion 3. The size of the protruding electrode 5d is, for example, 40 to 200 μm in width and 40 μm in length.
As described above, the height may be 18 μm or more and the size that allows the solder to enter the solder portion 3. The protruding electrode 5d
Is made of, for example, Cu and is integrally formed.
【0038】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、カルデラ状部52を備えた
突起電極5dを用いることで、突起電極5dとハンダ部
3との接触面積を増大させることができるため、チップ
1と回路基板4との安定した電気的接続を実現すること
ができる。In the flip chip mounting body and the flip chip mounting method, the contact area between the protruding electrode 5d and the solder portion 3 can be increased by using the protruding electrode 5d provided with the caldera-like portion 52. A stable electrical connection between the chip 1 and the circuit board 4 can be realized.
【0039】なお、第1実施形態乃至第4実施形態にお
いては、導電部5を単一の材料で形成してもよいし、複
数材料を例えば積層して形成してもよい。In the first to fourth embodiments, the conductive portion 5 may be made of a single material, or a plurality of materials may be laminated, for example.
【0040】次に、導電部5の他の形状を示す実施形態
を、本発明の第5実施形態乃至第7実施形態として図5
乃至図7に基づいて説明する。なお、第1実施形態との
共通部分の説明は、同一箇所には同一符号を付して省略
する。Next, an embodiment showing another shape of the conductive portion 5 will be shown in FIG. 5 as a fifth embodiment to a seventh embodiment of the present invention.
It will be described with reference to FIG. Note that the description of the same parts as those of the first embodiment will be omitted by giving the same reference numerals to the same parts.
【0041】まず、本発明の第5実施形態を図5に基づ
いて説明する。図5は、本発明の第5実施形態に係るフ
リップチップ実装体を示す概略断面図である。First, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic sectional view showing a flip-chip mount body according to the fifth embodiment of the present invention.
【0042】第5実施形態においては、導電部5として
は、図5(b)に示すように、土台部54として平板形
状の例えばCu、Ni、Au等の電極パッドに微小穴
(図示せず)を設け、該微小穴に突起部分55として例
えばCu線、Ni線、Au線等からなる針状の導電体を
嵌入した突起電極5eを用いる。なお、突起部分55の
先端部が凸状部51を構成している。In the fifth embodiment, as the conductive portion 5, as shown in FIG. 5B, the base portion 54 is a flat plate-shaped electrode pad made of, for example, Cu, Ni, Au, or the like, which has micro holes (not shown). ) Is provided, and the protruding electrode 5e in which a needle-shaped conductor made of, for example, a Cu wire, a Ni wire, an Au wire or the like is fitted into the minute hole as the protruding portion 55 is used. It should be noted that the tip portion of the protruding portion 55 constitutes the convex portion 51.
【0043】ここで、土台部54はハンダ部3よりも大
きいサイズであり、周囲の配線(図示せず)に影響を与
えない程度の大きさであればよい。突起部分55は、土
台部54の表面より上部に突出する部分が例えば15〜
50μmであり、ハンダ部3の高さよりも小さければよ
い。また、突起部分55の径は、例えば100μm以下
で、ハンダ部の径よりも小さければよい。Here, the base portion 54 has a size larger than that of the solder portion 3, and may have a size that does not affect the surrounding wiring (not shown). The protruding portion 55 has, for example, 15 to 15 parts protruding upward from the surface of the base part 54.
The height is 50 μm, which is smaller than the height of the solder part 3. Further, the diameter of the protruding portion 55 may be 100 μm or less, for example, and may be smaller than the diameter of the solder portion.
【0044】また、土台部54に設ける微少穴の径は、
突起部分55の径よりも大きく、深さは回路基板4内部
に存在する回路(図示せず)に影響を与えない程度なら
いずれであってもよい。また、微少穴中に挿入する突起
部分55を導電性樹脂等で固定してもよい。Further, the diameter of the minute hole provided in the base portion 54 is
It may be larger than the diameter of the protruding portion 55 and may have any depth as long as it does not affect a circuit (not shown) existing inside the circuit board 4. Further, the protruding portion 55 to be inserted into the minute hole may be fixed with a conductive resin or the like.
【0045】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、土台部54として平板形状
の電極パッドを形成した後に、突起部分55として針状
の導電体を設けて突起電極5eとするので、通常の平板
形状の電極パッドを備えた種々の回路基板4にも突起部
分55を備えた突起電極5eを形成することができる。In the flip-chip mounting body and the flip-chip mounting method, since a flat plate-shaped electrode pad is formed as the base portion 54, a needle-shaped conductor is provided as the protruding portion 55 to form the protruding electrode 5e. It is possible to form the protruding electrode 5e having the protruding portion 55 on various circuit boards 4 having the flat plate-shaped electrode pads.
【0046】また、突起電極5eは、先端部に突起部分
55を備えているため、ハンダ部3に対して突起電極5
eを突起部分55の傾斜面に沿うようにして容易に侵入
させることができる。また、突起電極5eは、先端部に
凹状部分を備えず突起部分55の傾斜面を備えており、
ハンダ部3に侵入時には抵抗となりにくい構造であるた
め、せん断方向の力が発生しにくいので、チップ1に設
けた電極パッド2からハンダ部3が外れてしまうような
ことが少なく、歩留まりの向上も達成できる。また、突
起部分55のような形状は、容易に形成することができ
る。Further, since the protruding electrode 5e is provided with the protruding portion 55 at the tip portion thereof, the protruding electrode 5e with respect to the solder portion 3 is formed.
The e can easily enter along the inclined surface of the protrusion 55. In addition, the protruding electrode 5e does not have a concave portion at the tip and has an inclined surface of the protruding portion 55,
Since the structure is less likely to become a resistance when entering the solder part 3, a force in the shearing direction is unlikely to be generated, so that the solder part 3 is less likely to come off from the electrode pad 2 provided on the chip 1, and the yield is also improved. Can be achieved. Further, the shape like the protruding portion 55 can be easily formed.
【0047】次に、本発明の第6実施形態を図6に基づ
いて説明する。図6は、本発明の第6実施形態に係るフ
リップチップ実装体を示す概略断面図である。第6実施
形態においては、まず、回路基板4表面に所望の凸部、
例えば、第1実施形態における突起電極5aのような断
面が略ホームベース形状の五角形部を例えば熱硬化性の
樹脂ペーストを用いて形成し、加熱処理を施して硬化さ
せる。なお、回路基板4表面に形成する凸部は、この他
に例えばMID技術を用いて作製した回路基板のよう
に、回路基板成型時に一括して形成してもよい。Next, a sixth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic cross-sectional view showing a flip-chip mount body according to the sixth embodiment of the present invention. In the sixth embodiment, first, a desired convex portion on the surface of the circuit board 4,
For example, a pentagonal portion having a substantially home-shaped cross section, such as the bump electrode 5a in the first embodiment, is formed by using, for example, a thermosetting resin paste, and heat treatment is applied to cure the pentagonal portion. In addition, the convex portions formed on the surface of the circuit board 4 may be collectively formed at the time of molding the circuit board, such as a circuit board manufactured by using the MID technique.
【0048】次に、該五角形部の表面に例えばCuの導
電層56を覆って、図6(b)に示すような導電部5で
ある突起電極5fを形成する。ここで、Cuの導電層5
6の厚みは、例えば5〜40μmである。なお、導電層
56の形成には、Cuの他にNiやAu等を用いてもよ
く、Niを導電層56として用いるときは、厚みは例え
ば3μm以上、Auを用いるときは例えば0.02μm以
上である。Next, the surface of the pentagonal portion is covered with a conductive layer 56 of, for example, Cu to form a protruding electrode 5f which is the conductive portion 5 as shown in FIG. 6B. Here, Cu conductive layer 5
The thickness of 6 is, for example, 5 to 40 μm. In addition to Cu, Ni, Au, or the like may be used to form the conductive layer 56. When Ni is used as the conductive layer 56, the thickness is, for example, 3 μm or more, and when Au is used, for example, 0.02 μm or more. Is.
【0049】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、少なくとも表面を導電層5
6で覆って突起電極5fを形成することで、導電部5で
ある突起電極5fの内部までを導電材料で構成する必要
がないので、材料コストを低減した突起電極5fを提供
することができる。In the flip chip mounting body and the flip chip mounting method, the conductive layer 5 is formed on at least the surface.
By forming the protruding electrode 5f by covering it with 6, it is not necessary to form the inside of the protruding electrode 5f which is the conductive portion 5 with a conductive material, so that the protruding electrode 5f with reduced material cost can be provided.
【0050】最後に、本発明の第7実施形態を図7に基
づいて説明する。図7は、本発明の第7実施形態に係る
フリップチップ実装体を示す概略断面図である。Finally, a seventh embodiment of the present invention will be described with reference to FIG. FIG. 7 is a schematic sectional view showing a flip chip mounting body according to the seventh embodiment of the present invention.
【0051】第7実施形態においては、導電部5として
は、図7(b)に示すように、土台部54として平板形
状の例えばCuからなる電極パッド上に、突起部分55
として例えばAuからなるスタッドバンプを設けて突起
電極5gを用いる。ここで、突起部分55の先端部が凸
状部51を構成している。In the seventh embodiment, as the conductive portion 5, as shown in FIG. 7B, the protrusion portion 55 is formed on the electrode pad made of, for example, Cu having a flat plate shape as the base portion 54.
For example, a stud bump made of Au is provided and the protruding electrode 5g is used. Here, the tip portion of the protruding portion 55 constitutes the convex portion 51.
【0052】なお、スタッドバンプの大きさは、例えば
径が50μm以上、高さがハンダ部3の高さ以下である
が、レベリング等により適宜高さ調節を行ってもよい。The size of the stud bump is, for example, 50 μm or more in diameter and less than or equal to the height of the solder portion 3, but the height may be appropriately adjusted by leveling or the like.
【0053】かかるフリップチップ実装体及びフリップ
チップ実装方法においては、土台部54として平板形状
の電極パッドを形成した後に突起部分55としてスタッ
ドバンプを設けて突起電極5gを形成するので、通常の
平板形状の電極パッドを備えた種々の回路基板4にも突
起電極5gを形成することができる。In the flip-chip mounting body and the flip-chip mounting method, since the plate-shaped electrode pad is formed as the base portion 54 and the stud bump is provided as the protruding portion 55 to form the protruding electrode 5g, the normal plate-shaped electrode is formed. The protruding electrodes 5g can be formed on various circuit boards 4 provided with the electrode pads.
【0054】また、突起電極5gは、先端部に突起部分
55としてスタッドバンプを備えているため、ハンダ部
3に対して突起電極5gを容易に侵入させることができ
る。また、突起電極5gは、先端部に凹状部分を備えお
らず、ハンダ部3に侵入時には抵抗となりにくい構造で
あるため、せん断方向の力が発生しにくいので、チップ
1に設けた電極パッド2からハンダ部3が外れてしまう
ようなことが少なく、歩留まりの向上も達成できる。Further, since the protruding electrode 5g is provided with a stud bump as the protruding portion 55 at the tip portion, the protruding electrode 5g can easily enter the solder portion 3. Further, since the protruding electrode 5g does not have a concave portion at its tip and has a structure that does not easily become a resistance when entering the solder part 3, a force in the shearing direction is hard to be generated, and therefore the electrode pad 2 provided on the chip 1 It is less likely that the solder portion 3 will come off, and the yield can be improved.
【0055】ここで、第1実施形態乃至第7実施形態に
おいて、チップ1の回路基板4への搭載は、ハンダ部3
内部に突起電極5a〜5gを押圧して所望の量を侵入さ
せて行うが、例えば、突起電極5a〜5gの先端から突
起電極5a〜5g全体高さの略1/5以上、好ましくは
略1/3以上を侵入させて行う。Here, in the first to seventh embodiments, the chip 1 is mounted on the circuit board 4 by the solder portion 3
The protrusion electrodes 5a to 5g are pressed into the inside to inject a desired amount. For example, about 1/5 or more of the entire height of the protrusion electrodes 5a to 5g from the tip of the protrusion electrodes 5a to 5g, preferably about 1 Perform by injecting / 3 or more.
【0056】[0056]
【発明の効果】上記のように請求項1に記載のフリップ
チップ実装体にあっては、チップ側に設けたハンダ部内
部に、回路基板側に設けた突起電極少なくとも一部が侵
入して前記チップと前記回路基板との電気的接続を行う
ため、前記チップと前記回路基板間のギャップ管理を容
易にするとともに、前記チップと前記回路基板との安定
した電気的接続を実現するフリップチップ実装体を提供
することができた。As described above, in the flip chip mounting body according to the first aspect, at least a part of the bump electrode provided on the circuit board side enters the inside of the solder portion provided on the chip side, and A flip chip mounting body that facilitates gap management between the chip and the circuit board and realizes stable electrical connection between the chip and the circuit board because the chip and the circuit board are electrically connected. Could be provided.
【0057】また、請求項2に記載のフリップチップ実
装体にあっては、請求項1に記載の発明において、少な
くとも凸状部を先端に備えた突起電極を用いることで、
ハンダ部内部の酸化していない部分に前記突起電極を低
い荷重で容易に侵入させて圧着接続することができ、チ
ップと回路基板との安定した電気的接続を実現すること
ができるという効果を奏する。Further, in the flip-chip mounting body according to the second aspect, in the invention according to the first aspect, by using the protruding electrode having at least the convex portion at the tip,
The bump electrode can easily be inserted into the non-oxidized portion inside the solder portion with a low load to perform crimp connection, and stable electrical connection between the chip and the circuit board can be realized. .
【0058】また、請求項3に記載のフリップチップ実
装体にあっては、請求項1又は請求項2に記載の発明に
おいて、錘状部を先端に備えた突起電極を用いること
で、ハンダ部内部の酸化していない部分に前記突起電極
を低い荷重で容易に侵入させて圧着接続することがで
き、チップと回路基板との安定した電気的接続を実現す
ることができるという効果を奏する。Further, in the flip-chip mounting body according to claim 3, in the invention according to claim 1 or 2, the solder portion is provided by using the protruding electrode having the weight-shaped portion at the tip. The protruding electrodes can easily be inserted into the non-oxidized portion of the inside with a low load to be pressure-bonded, and a stable electrical connection between the chip and the circuit board can be realized.
【0059】また、請求項4に記載のフリップチップ実
装体にあっては、請求項1又は請求項2に記載の発明に
おいて、カルデラ状部を備えた突起電極を用いること
で、該突起電極とハンダ部との接触面積を増大させるこ
とができるため、チップと回路基板との安定した電気的
接続を実現することができるという効果を奏する。Further, in the flip-chip mounting body according to the fourth aspect, in the invention according to the first aspect or the second aspect, by using the protruding electrode having the caldera-like portion, Since the contact area with the solder portion can be increased, there is an effect that stable electrical connection between the chip and the circuit board can be realized.
【0060】また、請求項5に記載のフリップチップ実
装体にあっては、請求項1乃至請求項4のいずれかに記
載の発明において、導電体の土台部を形成した後に、こ
の土台部を支持台として導電体の突起部分を設けて突起
電極を形成するので、前記土台部として例えば通常の電
極パッドを備えた種々の回路基板に対して前記突起部分
を設けるだけで、前記突起電極を容易に形成することが
できるという効果を奏する。Further, in the flip chip mounting body according to claim 5, in the invention according to any one of claims 1 to 4, after the base portion of the conductor is formed, the base portion is formed. Since the protruding portion of the conductor is provided as the support to form the protruding electrode, the protruding electrode can be easily formed only by providing the protruding portion on various circuit boards having the usual electrode pads as the base portion. The effect that it can be formed in.
【0061】また、請求項6に記載のフリップチップ実
装体にあっては、請求項5に記載の発明において、突起
部分にはスタッドバンプを用いることで、突起電極を容
易に形成することができるという効果を奏する。Further, in the flip-chip mounting body according to the sixth aspect, in the invention according to the fifth aspect, the protrusion electrode can be easily formed by using the stud bump for the protrusion portion. Has the effect.
【0062】また、請求項7に記載のフリップチップ実
装体にあっては、請求項1乃至請求項5のいずれかに記
載の発明において、少なくとも表面を導電層で覆って突
起電極を形成することで、前記突起電極の内部までを導
電材料で構成する必要がないので、材料コストを低減し
た前記突起電極を提供することができるという効果を奏
する。Further, in the flip-chip mounting body according to claim 7, in the invention according to any one of claims 1 to 5, at least the surface is covered with a conductive layer to form a protruding electrode. Then, since it is not necessary to form the inside of the protruding electrode with a conductive material, it is possible to provide the protruding electrode with reduced material cost.
【0063】また、請求項8に記載のフリップチップ実
装方法にあっては、回路基板側に設ける導電部として突
起電極を用い、チップの有するハンダ部に前記突起電極
を押圧して少なくとも一部を侵入させて前記ハンダ部と
前記導電部とを圧着するので、前記ハンダ部にフラック
スを設けたり、フラックス洗浄したりする工程を必要と
しないので、前記チップと前記回路基板間のギャップ管
理を容易にするとともに、前記チップと前記回路基板と
の安定した電気的接続を実現するフリップチップ実装方
法を提供することができた。Further, in the flip-chip mounting method according to the eighth aspect, the protruding electrode is used as the conductive portion provided on the circuit board side, and the protruding electrode is pressed against the solder portion of the chip so that at least a part of the protruding electrode is pressed. Since the solder part and the conductive part are pressure-bonded by being intruded, there is no need to provide a flux to the solder part or a flux cleaning process, so that the gap between the chip and the circuit board can be easily managed. In addition, it is possible to provide a flip chip mounting method that realizes stable electrical connection between the chip and the circuit board.
【図1】本発明の第1実施形態に係るフリップチップ実
装体及びフリップチップ実装方法を示す概略断面図であ
る。FIG. 1 is a schematic cross-sectional view showing a flip-chip mounting body and a flip-chip mounting method according to a first embodiment of the present invention.
【図2】本発明の第2実施形態に係るフリップチップ実
装体を示す概略断面図である。FIG. 2 is a schematic cross-sectional view showing a flip chip mounting body according to a second embodiment of the present invention.
【図3】本発明の第3実施形態に係るフリップチップ実
装体を示す概略断面図である。FIG. 3 is a schematic cross-sectional view showing a flip chip mounting body according to a third embodiment of the present invention.
【図4】本発明の第4実施形態に係るフリップチップ実
装体を示す概略断面図である。FIG. 4 is a schematic cross-sectional view showing a flip-chip mount body according to a fourth embodiment of the present invention.
【図5】本発明の第5実施形態に係るフリップチップ実
装体を示す概略断面図である。FIG. 5 is a schematic sectional view showing a flip chip mounting body according to a fifth embodiment of the present invention.
【図6】本発明の第6実施形態に係るフリップチップ実
装体を示す概略断面図である。FIG. 6 is a schematic cross-sectional view showing a flip chip mounting body according to a sixth embodiment of the present invention.
【図7】本発明の第7実施形態に係るフリップチップ実
装体を示す概略断面図である。FIG. 7 is a schematic cross-sectional view showing a flip chip mounting body according to a seventh embodiment of the present invention.
【図8】従来例に係るフリップチップ実装体及びフリッ
プチップ実装方法を示す概略断面図である。FIG. 8 is a schematic cross-sectional view showing a flip-chip mounting body and a flip-chip mounting method according to a conventional example.
1 チップ 2 電極パッド 3 ハンダ部 4 回路基板 5 導電部 5a〜5f 突起電極 6 封止樹脂 7 フラックス 8 配線 51 凸状部 52 カルデラ状部 53 錘状部 54 土台部 55 突起部分 56 導電層 1 chip 2 electrode pad 3 Solder part 4 circuit board 5 Conductive part 5a to 5f protruding electrode 6 Sealing resin 7 Flux 8 wiring 51 convex part 52 Caldera-shaped part 53 Conical part 54 Base 55 Projection 56 Conductive layer
───────────────────────────────────────────────────── フロントページの続き (72)発明者 木田 忍 大阪府門真市大字門真1048番地松下電工株 式会社内 Fターム(参考) 5E319 AA03 AB05 AC01 AC16 AC17 CC12 CC33 CD04 GG03 GG09 GG15 5E336 AA04 AA16 BC28 BC37 CC32 CC44 CC55 DD37 DD39 EE01 EE05 GG05 GG16 5F044 KK17 KK18 KK19 LL01 LL04 QQ03 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Shinobu Kida 1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd. Inside the company F-term (reference) 5E319 AA03 AB05 AC01 AC16 AC17 CC12 CC33 CD04 GG03 GG09 GG15 5E336 AA04 AA16 BC28 BC37 CC32 CC44 CC55 DD37 DD39 EE01 EE05 GG05 GG16 5F044 KK17 KK18 KK19 LL01 LL04 QQ03
Claims (8)
有するチップとを備えてなり、前記導電部と前記ハンダ
部とが対向して電気的に接続されたフリップチップ実装
体において、 前記導電部は、前記チップの有するハンダ部に少なくと
も一部が侵入して前記回路基板と前記チップとを電気的
に接続した突起電極であるフリップチップ実装体。1. A flip-chip mounting body comprising a circuit board having a conductive portion and a chip having a solder portion, wherein the conductive portion and the solder portion are electrically connected to face each other. The portion is a flip-chip mounting body that is a protruding electrode that at least partially penetrates into the solder portion of the chip and electrically connects the circuit board and the chip.
1つの凸状部を備えてなる請求項1に記載のフリップチ
ップ実装体。2. The flip chip mounting body according to claim 1, wherein the protruding electrode has at least one convex portion at a tip portion thereof.
1つの錐状部を備えてなる請求項1又は請求項2に記載
のフリップチップ実装体。3. The flip chip mounting body according to claim 1, wherein the protruding electrode has at least one conical portion at a tip portion thereof.
部を有してなる請求項1又は請求項2に記載のフリップ
チップ実装体。4. The flip chip mounting body according to claim 1, wherein the protruding electrode has a caldera-like portion at a tip portion thereof.
た突起部分と該突起部分の支持部である土台部とを別途
形成して後、両者を一体化するように形成する請求項1
乃至請求項4のいずれかに記載のフリップチップ実装
体。5. The projecting electrode is formed so that a projecting portion that has penetrated into the solder portion and a base portion that is a supporting portion of the projecting portion are separately formed, and then the both are integrated.
The flip chip mounting body according to claim 4.
請求項5に記載のフリップチップ実装体。6. The flip chip mounting body according to claim 5, wherein the protruding portion is a stud bump.
部と接触する部分に導電性材料からなる導電層を設けて
なる請求項1乃至請求項5のいずれかに記載のフリップ
チップ実装体。7. The flip chip mounting body according to claim 1, wherein the protruding electrode is provided with a conductive layer made of a conductive material at least in a portion in contact with the solder portion.
路基板の表面に設けた導電部とを対向させて所定の位置
に搭載して電気的に接続させる工程を備えてなるフリッ
プチップ実装方法において、 前記導電部として突起電極を用い、前記チップの有する
ハンダ部に前記突起電極を押圧して少なくとも一部を侵
入させて前記ハンダ部と前記導電部とを圧着する工程を
含んでなるフリップチップ実装方法。8. A flip chip mounting comprising a step of mounting a solder portion provided on a mounting surface of a chip and a conductive portion provided on a surface of a circuit board so as to face each other and electrically connecting them at a predetermined position. In the method, a flip electrode including a step of using a protruding electrode as the conductive portion and pressing the protruding electrode against a solder portion of the chip to intrude at least a part of the solder portion to press-bond the solder portion and the conductive portion. Chip mounting method.
Priority Applications (1)
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---|---|---|---|
JP2001211482A JP2003031613A (en) | 2001-07-12 | 2001-07-12 | Flip chip mounting body and method of mounting the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001211482A JP2003031613A (en) | 2001-07-12 | 2001-07-12 | Flip chip mounting body and method of mounting the same |
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Publication Number | Publication Date |
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JP2003031613A true JP2003031613A (en) | 2003-01-31 |
Family
ID=19046789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001211482A Pending JP2003031613A (en) | 2001-07-12 | 2001-07-12 | Flip chip mounting body and method of mounting the same |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008516422A (en) * | 2004-10-04 | 2008-05-15 | コミツサリア タ レネルジー アトミーク | Device comprising an assembly comprising a plurality of hard conductive microchips, and electrical connection method between such a device and a device comprising a soft conductive protrusion |
US7382050B2 (en) | 2005-04-22 | 2008-06-03 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for producing the same |
JP2008135481A (en) * | 2006-11-27 | 2008-06-12 | Matsushita Electric Works Ltd | Electronic device and its manufacturing method |
WO2009078275A1 (en) * | 2007-12-14 | 2009-06-25 | Sharp Kabushiki Kaisha | Semiconductor device |
JP2010232259A (en) * | 2009-03-26 | 2010-10-14 | Kyocera Corp | Thermoelectric conversion module, optical transmission module, cooling device, power generator, and thermostat |
WO2019054509A1 (en) * | 2017-09-15 | 2019-03-21 | 日立化成株式会社 | Semiconductor element mounting structure, and combination of semiconductor element and substrate |
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2001
- 2001-07-12 JP JP2001211482A patent/JP2003031613A/en active Pending
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2008516422A (en) * | 2004-10-04 | 2008-05-15 | コミツサリア タ レネルジー アトミーク | Device comprising an assembly comprising a plurality of hard conductive microchips, and electrical connection method between such a device and a device comprising a soft conductive protrusion |
US7382050B2 (en) | 2005-04-22 | 2008-06-03 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for producing the same |
US7772697B2 (en) | 2005-04-22 | 2010-08-10 | Panasonic Corporation | Semiconductor device and method for producing the same |
JP2008135481A (en) * | 2006-11-27 | 2008-06-12 | Matsushita Electric Works Ltd | Electronic device and its manufacturing method |
WO2009078275A1 (en) * | 2007-12-14 | 2009-06-25 | Sharp Kabushiki Kaisha | Semiconductor device |
JP2010232259A (en) * | 2009-03-26 | 2010-10-14 | Kyocera Corp | Thermoelectric conversion module, optical transmission module, cooling device, power generator, and thermostat |
WO2019054509A1 (en) * | 2017-09-15 | 2019-03-21 | 日立化成株式会社 | Semiconductor element mounting structure, and combination of semiconductor element and substrate |
CN111095508A (en) * | 2017-09-15 | 2020-05-01 | 日立化成株式会社 | Mounting structure of semiconductor element and combination of semiconductor element and substrate |
KR20200054961A (en) * | 2017-09-15 | 2020-05-20 | 히타치가세이가부시끼가이샤 | Semiconductor device mounting structure and combination of semiconductor device and substrate |
JPWO2019054509A1 (en) * | 2017-09-15 | 2020-10-15 | 日立化成株式会社 | Mounting structure of semiconductor element and combination of semiconductor element and substrate |
US11444054B2 (en) | 2017-09-15 | 2022-09-13 | Showa Denko Materials Co., Ltd. | Semiconductor element mounting structure, and combination of semiconductor element and substrate |
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CN113990793A (en) * | 2021-10-21 | 2022-01-28 | 东莞市中麒光电技术有限公司 | LED chip transfer method |
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