JP2002210573A - Device for laser beam marking - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for laser beam marking fθ lens of which is easily replaced by a user. SOLUTION: The device is characterized by the fact that the lens 6 is fitted to a head base plate 8 via a fitting member 20 for the fθlens removably from outside, and the maximum rotatable angles of a first and second galvanoscanners 4 and 5 are fixed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marking device capable of marking characters, figures, and the like on the surface of a workpiece using laser light output from a laser oscillator.

[0002]

2. Description of the Related Art Recently, metals, resins, ceramics, semiconductors,
Various characters and figures such as serial number, lot number, manufacturing time, bar code, logo, company name, trademark, standard certification mark, character design, etc. are printed on the surface of the workpiece made of various materials such as paper and glass. There has been proposed a laser marking device that performs marking such as.

In such a conventional laser marking device, a laser oscillator for generating a laser beam and a laser beam generated by the laser oscillator are used to process a workpiece.
And a scanner head for scanning in two vertical and horizontal directions substantially orthogonal to each other along the surface of the scanner.
The scanner head includes a first galvano scanner on which laser light is incident, a second galvano scanner on which reflected light from the first galvano scanner is incident, and fθ on which reflected light from the second galvano scanner is incident. Lens. Then, the laser light incident on the scanner head is totally reflected by a mirror driven (vibrated) at a predetermined speed provided in the first and second galvano scanners, so that the laser light is reflected on the surface of the workpiece (work). Scanning can be performed in two vertical and horizontal directions which are substantially orthogonal to each other. The maximum rotation angle (swing angle: oscillation angle) of each mirror of each galvano scanner is generally the same, so that the scanning range of the laser beam is formed to be substantially square. Have been.

The laser light totally reflected by the mirror of the second galvano scanner is condensed by an fθ lens so that the focal length is the same at any position on the surface of the object to be processed. Is formed. This f
The θ lens is a lens whose scanning distance is a value obtained by multiplying the focal length by the swing angle of the laser light, the scanning distance changes according to the focal length, and the scanning range of the laser light, that is, marking is performed on the workpiece. Range changes. Further, the diameter of the focused beam of the laser beam can be changed depending on the focal length of the fθ lens. That is, when the focal length of the fθ lens is reduced, the marking becomes finer and the scanning range becomes smaller. When the focal length of the fθ lens is increased, the marking becomes thicker and the scanning range becomes larger. In addition,
The fθ lens is composed of a plurality of lenses. For ease of handling and prevention of damage, the fθ lens is mounted (interior) inside a substantially cylindrical housing and integrated. Is generally supplied as an fθ lens.

[0005]

In recent years, various types of fθ lenses having different focal lengths have been supplied, and the range of marking on the processing surface of the processing object, the characters to be marked, or There is a demand for replacing the fθ lens of the laser marking device on the side of the user having the laser marking device depending on the thickness of the figure.

However, in the conventional laser marking apparatus, there is no interest in replacing the fθ lens, and two galvanometer scanners and the fθ lens are attached to one head substrate. The lens has a problem that the two galvano scanners disposed above the fθ lens cannot be removed unless the two galvano scanners are removed from the head substrate first. That is, in the conventional laser marking device, the scanner head must be disassembled in order to replace the fθ lens,
There has been a problem that a great deal of labor and time are required.

Further, in the conventional laser marking device, the f.theta.
Since the maximum rotation angle of each of the mirrors of the two galvano scanners is controlled in accordance with the focal length of the θ lens, when replacing the fθ lens, two mirrors are required depending on the focal length of the fθ lens. It is necessary to adjust the maximum rotation angle of each mirror of the galvano scanner, but there is a problem that it is extremely difficult for the user to perform this adjustment.

Accordingly, there is a need for a laser marking device that allows the user to easily replace the fθ lens.

The present invention has been made in view of the above points, and has as its object to provide a laser marking apparatus that allows a user to easily replace an fθ lens.

[0010]

In order to achieve the above object, a laser marking apparatus according to the present invention according to claim 1 is characterized in that an fθ lens is attached to a head substrate via an fθ lens mounting member. And the maximum rotation angle of the first and second galvanometer scanners is fixed. By adopting such a configuration, the fθ lens mounting member can easily replace the fθ lens, and the fθ lens can be replaced by fixing the maximum rotation angles of the first and second galvanometer scanners. This eliminates the need to adjust the maximum rotation angle. Therefore, the user can easily and reliably exchange the fθ lens.

Further, the laser marking device according to the present invention according to claim 2 is characterized in that, in claim 1, the fθ lens mounting member is formed individually for each type of fθ lens. By adopting such a configuration, the user can more easily and reliably exchange the fθ lens on the user side.

The laser marking device of the present invention according to claim 3 is characterized in that, in claim 1, the fθ lens mounting member is formed so as to be commonly used regardless of the type of fθ lens, The point is that the mounting position of the fθ lens with respect to the lens mounting member is formed so as to be controllable for each type of fθ lens. By adopting such a configuration, the user can more easily and reliably replace the fθ lens on the user side.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments shown in the drawings.

FIGS. 1 to 6 show an embodiment of a laser marking apparatus according to the present invention. FIG.
FIG. 2 is a partially cut front view showing the main part of the internal structure of the scanner head, FIG. 3 is a partially cut side view showing the main part of the internal structure of the scanner head, and FIG. 4 is a main part of the internal structure of the scanner head. FIG. 5 is a bottom view of FIG. 2, and FIG. 6 is a bottom view of the head substrate.

As shown in FIG. 1, a laser marking device 1 according to the present embodiment has a laser oscillator 2 and a scanner head 3 connected to the right side of the laser oscillator 2. Note that the laser oscillator 2 and the scanner head 3 may be connected using an optical fiber (not shown).

The laser oscillator 2 is provided with an output mirror, an aperture, a shutter, a laser medium such as a YAG rod, a laser excitation lamp, a reflection mirror, and the like, which are not shown, on a substrate, as in the prior art, and covers these with a cover. The detailed description is omitted.

As shown in FIGS. 2 to 5, the other scanner head 3 has a first galvano scanner 4 on which at least a laser beam LB output from the laser oscillator 2 is incident.
And a second galvano scanner 5 on which the reflected light from the first galvano scanner 4 is incident, and an fθ lens 6 on which the reflected light from the second galvano scanner 5 is incident (FIG. 5).
And The first galvano scanner 4, the second galvano scanner 5, and the fθ lens 6 are detachably attached to one head substrate 8 from the outside.

The first and second galvano scanners 4,
5 is a mirror (galvanometer mirror) 4a, 5a
scanner rotating shafts 4b for rotating and driving a and 5a.
5b having a main body 4c. Then, the scanner rotation shafts 4b and 5b and the mirrors 4a and 5a
Are connected by mirror holders 4d and 5d, respectively. Each of the main bodies 4c, 5c has a small-diameter portion 4ca, 5ca and a large-diameter portion 4cb, 5cb located on the mirror 4a, 5a side.
And a large-diameter portion 4c.
A known drive mechanism (not shown) for rotating the scanner rotation shafts 4b and 5b is provided inside the b and 5cb. The drive mechanism is electrically connected to control means (not shown), and drives the scanner rotation shafts 4b and 5b in accordance with a control command sent from the control means, thereby driving the scanner rotation shafts 4b and 5b at the distal ends thereof. The mirrors 4a and 5a attached via the mirror holders 4d and 5d can be driven (vibrated) at a predetermined speed. Further, in the present embodiment, the rotation angles of the scanner rotation shafts 4b and 5b rotated by the control command sent from the control means are fixed at predetermined angles, for example, about ± 13 °, respectively. The maximum rotation angle (swing angle: vibration angle) of the mirrors 4a, 5a of the first and second galvanometer scanners 4, 5, more specifically, the first and second galvanometer scanners 4, 5, is fixed to, for example, about ± 13 °. ing.

The fθ lens 6 includes a plurality of lenses,
A lens holder 9 for integrally holding the plurality of lenses
It is composed of The lower part shown in the lower part of FIG. 2 has a large diameter, and the upper part shown in the upper part of FIG. 2 has a small-diameter stepped cylindrical shape, and a plurality of lenses are held therein. A part of the outer peripheral surface of the fθ lens 6 located in the vicinity of the front end shown in the lower part of FIG.
A male screw 10 is formed for use in attaching and detaching. Note that the size of the male screw 10 is different even if the type of the fθ lens 6, that is, the specification (focal length, pupil position, incident beam diameter, maximum beam swing angle, etc.) of the fθ lens 6 is different.
Generally, they are formed in the same size.

The head substrate 8 is formed in a substantially box shape with a hollow inside, and a laser introduction hole 11 penetrates the left wall of the head substrate 8 shown in the left side of FIG. Is formed. The laser introduction hole 11 has its axis centered on a laser beam LB output from the laser oscillator 2.
Are formed so that they can pass through. The laser introduction hole 11
A beam expander unit for expanding the beam diameter of the laser beam LB output from the laser oscillator 2 or one end of an optical fiber (neither is shown) is mounted in the inside as necessary according to the design concept or the like. It is connected to the laser oscillator 2 via these beam expander units or optical fibers.

A first scanner mounting hole 12 (FIG. 3) is formed in the upper wall of the head substrate 8 shown in the upper part of FIG. The outer periphery of a portion of the small diameter portion 4ca of the main body 4c of the first galvano scanner 4 located on the mirror 4a side is fitted into the first scanner mounting hole 12. The outer peripheral surface located on the large-diameter portion 4cb side of the small-diameter portion 4ca of the main body 4c of the first galvano scanner 4 (the outer peripheral surface exposed above the outside of the head substrate 8) has the first
The scanner fixing holder 13 is fixed. The first scanner fixing holder 13 is provided with a plurality of through holes (not shown) penetrating in the thickness direction, and fixing screws 14 (FIGS. 3 and 4) inserted into the through holes are provided. The first galvano scanner 4 is fixed to the head substrate 8 by being screwed into the upper surface of the head substrate 8. Then, in a state where the first galvano scanner 4 is fixed to the head substrate 8, the center of the mirror 4 a of the first galvano scanner 4 is positioned at the center of the laser beam LB input from the laser oscillator 2. Positioned inside,
The incident angle of the laser beam LB to the mirror 4a is a predetermined angle,
For example, it is formed to be about 45 °.

As shown in FIG. 3, the first scanner mounting hole 12 is formed to be inclined, and the scanner rotation shaft 4 b of the first galvano scanner 4 is used for the laser beam LB output from the laser oscillator 2. The laser light LB can be arranged to be inclined at a predetermined inclination angle, for example, about 20 ° around the optical axis of the laser beam LB with respect to the reference plane including the optical axis.

That is, in this embodiment, since the laser beam LB is horizontally incident on the mirror 4a of the first galvano scanner 4, the inclination angle of the first scanner mounting hole 12 in this embodiment is As shown in FIG. 3, when viewed from the upstream side of the laser beam LB incident on the mirror 4a of the first galvano scanner 4, the vertical plane including the optical axis of the laser beam LB is used as a reference plane around the optical axis of the laser beam LB. In this case, the rotation angle is set to about 20 ° in the counterclockwise direction. With such a configuration, the mirrors 4a, 4a of the first and second galvanometer scanners 4, 5 are respectively provided.
Both minimization of the area of 5a and minimization of the distance between the centers of the two mirrors 4a and 5a can be achieved easily and reliably.

On the right wall of the head substrate 8 shown on the right side in FIG. 2, a second scanner mounting hole 15 is formed so as to penetrate in the thickness direction. The second scanner mounting hole 15 has a small-diameter portion 5ca of the main body 5c of the second galvano scanner 5.
The outer peripheral portion of the portion located on the mirror 5a side is fitted.
Then, the small diameter portion 5 of the main body 5c of the second galvano scanner 5
outer peripheral surface (head substrate 8) located on the large diameter portion 5cb side of
A second scanner fixing holder 16 is fixed to the outer peripheral surface exposed to the outside right of the scanner. The second scanner fixing holder 16 is provided with a plurality of through holes (not shown) penetrating in the thickness direction, and fixing screws 17 inserted into the through holes are provided on the right end face of the head substrate 8. The second galvano scanner 5 is fixed to the head substrate 8 by being screwed. Then, when the second galvano scanner 5 is fixed to the head substrate 8, the center of the mirror 5 a of the second galvano scanner 5 is positioned at the center of the reflected light LBA (FIG. 3) from the mirror 4 a of the first galvano scanner 4. The mirror 5 is positioned inside the head substrate 8 so as to be positioned.
a is a predetermined angle, for example, 9
Scanner rotation axis 4b of first galvano scanner 4 from 0 °
Is formed so as to be about half of a value obtained by subtracting the inclination angle of 20 °.

The second scanner mounting hole 15 is provided so that the axis of the scanner rotating shaft 5 b of the second galvano scanner 5 is the laser beam L input from the laser oscillator 2 to the scanner head 3.
As shown in FIG. 3, the axis of the scanner rotation axis 5b of the second galvano scanner 5 is positioned obliquely right above the center of the mirror 4a of the first galvano scanner 4, as shown in FIG. It is formed so that it may be located.

Therefore, the mirror 5a of the second galvano scanner 5 of the present embodiment is configured so that the reflected light LBA from the first galvano scanner 4 can be totally reflected vertically downward.

That is, the laser marking device 1 of this embodiment converts the laser beam LB output from the laser oscillator 2 to the scanner head 3 into the first and second galvanometer scanners 4 and 5 disposed on the scanner head 3. Vertical (along a direction orthogonal to the laser beam LB output from the laser oscillator 2) substantially orthogonal to each other along the laser beam LB output from the laser oscillator 2 by the respective mirrors 4a and 5a.
The scanning is performed in two directions in the horizontal direction (the direction along the laser beam LB output from the laser oscillator 2), and the scanning is output to the fθ lens 6 disposed vertically below.

An fθ lens mounting hole 18 is formed in the lower wall of the head substrate 8 shown in the lower part of FIG. The fθ lens mounting hole 18 is formed in a stepped manner by a large-diameter portion 18a having an opening outside shown in the lower part of FIG. 2 and a small-diameter portion 18b communicating with the inside shown in the upper part of FIG. As shown in FIG. 6, a plurality of, in this embodiment, four female screws 19 are formed on the outer surface of the lower wall of the head substrate 8. The large diameter portion 18a of the fθ lens mounting hole 18 is individually formed for each type of the fθ lens 6, specifically, for each specification (focal length, pupil position, incident beam diameter, maximum beam swing angle, etc.) of the fθ lens 6. Fθ lens mounting member 20 is provided.

As shown in FIG. 5, the fθ lens mounting member 20 is formed in a cylindrical shape having an outer diameter substantially in the shape of a square. An annular groove 21 for fitting into the lens mounting hole 18 is formed. The inside diameter of the fθ lens mounting member 20 at the base end shown in the upper part of FIG. 2 is formed smaller than the inner diameter at the tip part shown in the lower part of FIG. A female screw 22 is formed on the inner peripheral surface of the.
Then, by screwing the male screw 10 of the fθ lens 6 into the female screw 22, the fθ lens 6 can be detachably fixed inside the fθ lens mounting member 20. Further, in the vicinity of the four corners of the fθ lens attachment member 20, through holes (not shown) penetrating along the axial direction.
A fixing screw 2 is inserted through the through hole.
3 (FIG. 5) is screwed into a female screw 19 (FIG. 6) formed on the lower wall of the head substrate 8, whereby the fθ lens mounting member 20 is fixed to the head substrate 8.

That is, the laser marking device 1 of the present embodiment is configured such that the fθ lens 6 is detachably attached to the head substrate 8 via the fθ lens mounting member 20 from the outside. Therefore, by attaching and detaching the fixing screw 23, the attachment and detachment of the fθ lens attachment member 20 to and from the head substrate 8 can be easily performed independently from the outside of the scanner head 3.

The fθ lens mounting member 20 has an f
The θ lens 6 may be attached either before or after the fθ lens attachment member 20 is attached to the head substrate 8.

The shape and dimensions of the fθ lens mounting member 20 depend on the type of the fθ lens 6 to be mounted therein, specifically, the specifications of the fθ lens 6 (focal length, pupil position, incident beam diameter, maximum beam swing angle, etc.). ). FIGS. 7 to 11 show other examples of the fθ lens 6 and the fθ lens mounting member 20 used for the fθ lens 6. In addition,
Reference numerals 6A, 6B, 6C, 6D,
6E denotes another type of fθ lens, which is denoted by reference numerals 20A and 20A.
Reference numerals B, 20C, 20D, and 20E indicate the fθ lens mounting members.

As shown in FIGS. 2 to 5, the first and second galvano scanners 4 and 5 are covered by a protective cover 25 which is divided into an upper cover 25a and a lower cover 25b. This protective cover 25 is a lower cover 25
b is fixed to the head substrate 8 by attaching it to the outer surface of the lower wall of the head substrate 8 from below. Of course, the laser introduction hole 11 and the fθ lens attachment member 20 of the head substrate 8 are not covered with the protective cover 25 and are formed so as to be exposed to the outside.

Next, the operation of the present embodiment having the above-described configuration will be described.

According to the laser marking device 1 of this embodiment, the laser beam LB output from the laser oscillator 2
As shown by an arrow A in FIG. 1, the laser beam is output almost horizontally from the right side of the laser oscillator 2 toward the scanner head 3. The laser beam LB input to the scanner head 3 is transmitted to the optical path of the laser beam LB output from the laser oscillator 2 by the mirror 4a of the first galvano scanner 4 disposed on the optical path of the laser beam LB. The reflected light LBA totally reflected in the orthogonal direction and totally reflected by the mirror 4a is:
Scanning is performed with a polarization angle twice as large as the maximum rotation angle of the mirror 4a. At this time, since the scanner rotation axis 4b of the first galvano scanner 4 is disposed with an inclination angle of about 20 ° around the optical axis of the laser light LB, the reflected light L
BA changes the angle of the optical path of the reflected light LBA with an inclination angle of about 20 ° with respect to the horizontal plane containing the laser light LB.

Next, the mirror 4a of the first galvano scanner 4
The reflected light LBA totally reflected by the mirror 5a of the second galvano scanner 5 is totally reflected by the mirror 5a of the second galvano scanner 5, is totally reflected vertically downward on a vertical plane including the optical path of the reflected light LBA, and has a maximum rotation angle of the mirror 5a. Is scanned with a polarization angle that is twice as large.

Next, the mirror 5a of the second galvano scanner 5
Reflected light LBB totally reflected by the fθ lens 6 is condensed by the fθ lens 6 so that the focal length is the same at any position on the surface of the processing object 26 indicated by the imaginary line in FIG.
The scanning range reaches the surface of the processing target 26 so as to have a substantially square shape, and predetermined marking can be performed.

Further, according to the laser marking device 1 of the present embodiment, the scanner head 3, specifically, the head substrate 8
The user can easily replace the fθ lens 6 attached to the camera.

Here, the replacement operation of the fθ lens 6 will be described in detail.

The replacement operation of the fθ lens 6 is started when the user removes the fθ lens mounting member 20 attached to the head substrate 8 of the scanner head 3. The detachment of the fθ lens mounting member 20 from the head substrate 8 is performed by loosening the fixing screw 23 fixing the fθ lens mounting member 20 to the head substrate 8 from outside the scanner head 3 using a wrench (not shown). 8 can be easily performed.

That is, by removing the fixing screw 23 (FIG. 5) from the head substrate 8, the fθ lens mounting member 2 is removed.
Numeral 0 can move in a direction away from the scanner head 3, more specifically, in a direction away from the fθ lens mounting hole 18 formed in the lower wall of the head substrate 8. Then, the fθ lens mounting member 20 is manually attached to the scanner head 3.
Moving in the direction away from the fθ lens mounting member 2
Fθ formed in the lower wall of the head substrate 8
The fθ lens mounting member 20 fixed to the head substrate 8 is detached from the head substrate 8 together with the fθ lens 6, detaching from the large diameter portion 18 a of the lens mounting hole 18, and the removal of the fθ lens 6 is completed.

Next, the annular groove 21 of the fθ lens mounting member 20 on which the fθ lens 6 to be exchanged is mounted is inserted into the large diameter portion 1 of the fθ lens mounting hole 18 formed in the lower wall of the head substrate 8.
8a is manually fitted and positioned. Then, with the annular groove 21 fitted in the large-diameter portion 18a, the fixing bolt 23 is inserted into a through hole (not shown) of the fθ lens mounting member 20, and the fixing screw 23 is formed on the lower wall of the head substrate 8. It is screwed into the female screw 19 (FIG. 6). Furthermore, female screw 1
9 is tightened using a wrench (not shown), whereby the fθ lens mounting member 20 on which the fθ lens 6 is mounted is attached to the head substrate 8, and the mounting of the fθ lens 6 to be replaced is completed. .

At this time, since the maximum rotation angles of the mirrors 4a and 5a of the first and second galvanometer scanners 4 and 5 are fixed, it is necessary to adjust the maximum rotation angle when the fθ lens 6 is replaced. Absent. Conventionally, each time the fθ lens 6 is replaced, the maximum rotation angle of each of the mirrors 4a and 5a of the two galvanometer scanners 4 and 5 is controlled so that the scanning range is maximized according to the specifications of the fθ lens 6. However, in the present invention, by fixing the rotation angles of the mirrors 4a and 5a, the f.theta.
The maximum rotation angle of each of the mirrors 4a and 5a of the two galvanometer scanners 4 and 5 cannot be controlled in accordance with the focal length of the θ lens 6, and the scanning range is slightly narrowed depending on the type of the fθ lens 6, No practical problems arise.

The replacement of the fθ lens mounting member 20 is as follows.
This can be performed with the fθ lens 6 removed from the fθ lens mounting member 20 first.

As described above, according to the laser marking device 1 of the present embodiment, the fθ lens 6 is detachably attached to the head substrate 8 via the fθ lens mounting member 20 from the outside, Since the maximum rotation angle of the second galvanometer scanners 4 and 5 is fixed, the user can easily and reliably exchange the fθ lens 6 on the user side.

Further, according to the laser marking device 1 of the present embodiment, the replacement of the fθ lens 6 can be performed with the protective cover 25 attached to the base substrate 8. That is, the fθ lens 6 can be easily replaced from the outside without disassembling the scanner head 3.

Further, according to the laser marking apparatus 1 of the present embodiment, the fθ lens mounting members 20 are individually formed for each type of the fθ lens 6, so that the head substrate 8 of the fθ lens 6 having different specifications is provided. Of the mounting position with respect to the mirrors 5a and f of the second galvano scanner 5
Control of the distance from the θ lens 6 can be easily performed.

FIG. 12 shows a modified example of the fθ lens mounting member 20.

The fθ lens mounting member 20a shown in FIG.
Is formed so that it can be commonly used regardless of the type of the fθ lens 6, specifically, the specification of the fθ lens 6.
Commonly usable f is provided on the tip end surface of the lens mounting member 20a.
A positioning ring 28 for controlling the amount of screwing of the male screw 10 of the fθ lens into the female screw 22 of the θ lens mounting member 20a is provided.

The positioning ring 28 is formed for each type of fθ lens 6, and the fθ lens mounting member 20
When the fθ lens 6 is attached to the head substrate 8 via a, for example, the thickness of the positioning ring 28 is set according to the specifications of the fθ lens 6 (particularly, the pupil position, the incident beam diameter, the maximum beam swing angle, etc.). Thus, the distance between the fθ lens 6 and the mirror 5a of the second galvano scanner 5 can be controlled within a predetermined range according to the specifications of the fθ lens 6.

The other structure of the fθ lens mounting member 20a is the same as that of the fθ lens mounting member 20 described above, and a detailed description thereof will be omitted.

Then, by adopting such a configuration, the fθ lens mounting member 2 formed so as to be commonly used.
The lens 6 can be replaced with the fθ lens 6 in a state where the lens 0a is attached to the head substrate 8. At this time, the positioning ring 2
8 can easily control the positioning of the mounting position of the fθ lens 6 having different specifications with respect to the head substrate 8.

Therefore, the replacement of the fθ lens 6 can be performed more easily and reliably on the user side.

Further, since the fθ lens mounting member 20a itself can be used in common, compared to the case where the fθ lens mounting member 20 is individually formed for each type of the fθ lens 6, only the positioning ring 28 is required. Although the number of parts is increased, the positioning ring 28 can be formed easily and easily, and the amount of the material is not so large, so that the cost can be reduced as a whole. This cost reduction effect increases as the number of types of the fθ lens 6 increases.

The present invention is not limited to the above embodiment, but can be variously modified as needed.

[0056]

As described above, according to the laser marking device of the first aspect of the present invention, the fθ lens mounting member can easily replace the fθ lens,
In addition, by fixing the maximum rotation angle of the second galvano scanner, it is possible to obtain an extremely excellent effect that it is not necessary to adjust the maximum rotation angle when replacing the fθ lens. Therefore, an extremely excellent effect is achieved such that the user can easily and reliably exchange the fθ lens.

Further, according to the laser marking device of the present invention according to the second aspect, there is an extremely excellent effect that the user can easily and reliably exchange the fθ lens.

Further, according to the laser marking apparatus of the present invention, there is provided an extremely excellent effect that the user can easily and reliably exchange the fθ lens.

[Brief description of the drawings]

FIG. 1 is an external view of a laser marking device according to an embodiment of the present invention.

FIG. 2 is a partially cut front view showing a main part of an internal structure of the scanner head shown in FIG. 1;

FIG. 3 is a partially cut-away side view showing a main part of an internal structure of the scanner head shown in FIG. 1;

FIG. 4 is a plan view showing a main part of an internal structure of the scanner head shown in FIG. 1;

FIG. 5 is a bottom view of FIG. 2;

FIG. 6 is a bottom view of the head substrate shown in FIG. 2;

FIG. 7 is a partially cut front view showing another example of the fθ lens and the fθ lens mounting member used for the fθ lens.

FIG. 8 is a partially cut front view showing still another example of the fθ lens and the fθ lens mounting member used therefor.

FIG. 9 is a partially cut front view showing still another example of the fθ lens and the fθ lens mounting member used for the fθ lens.

FIG. 10 is a partially cut front view showing still another example of the fθ lens and the fθ lens mounting member used therefor.

FIG. 11 is a partially cut front view showing still another example of the fθ lens and the fθ lens mounting member used therefor.

FIG. 12 is a front view showing a modified example of the fθ lens attachment member.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 laser marking device 2 laser oscillator 3 scanner head 4 first galvano scanner 4 a mirror (of first galvano scanner) 5 second galvano scanner 5 a (of second galvano scanner) mirror 6 fθ lens 8 head substrate 18 fθ lens mounting hole 19 Female screw 20, 20a fθ lens mounting member 21 Annular groove 22 Female screw 23 Fixing screw 28 Positioning ring LB Laser beam

Claims (3)

[Claims] 1. A laser oscillator, a first galvano scanner on which at least laser light output from the laser oscillator is incident, a second galvano scanner on which reflected light from the first galvano scanner is incident, and the second galvanometer A scanner head fixed to one head substrate on which an fθ lens on which reflected light from the scanner is incident is provided, and the laser beam is directed in two directions, vertically and horizontally, substantially orthogonal to each other along the surface of the workpiece A laser marking device that scans and marks the surface of the object to be processed, wherein the fθ lens is detachably attached to the head substrate from the outside via an fθ lens mounting member,
A laser marking device wherein the maximum rotation angles of the first and second galvanometer scanners are fixed. 2. The laser marking device according to claim 1, wherein the fθ lens mounting member is formed individually for each type of the fθ lens. 3. The fθ lens mounting member is formed so as to be commonly used regardless of the type of the fθ lens, and the mounting position of the fθ lens with respect to the fθ lens mounting member is different for each type of the fθ lens. The laser marking device according to claim 1, wherein the laser marking device is formed so as to be controllable.