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ITTO20030626A1 - Vacuometro a ionizzazione. - Google Patents

Vacuometro a ionizzazione.

Info

Publication number
ITTO20030626A1
ITTO20030626A1 IT000626A ITTO20030626A ITTO20030626A1 IT TO20030626 A1 ITTO20030626 A1 IT TO20030626A1 IT 000626 A IT000626 A IT 000626A IT TO20030626 A ITTO20030626 A IT TO20030626A IT TO20030626 A1 ITTO20030626 A1 IT TO20030626A1
Authority
IT
Italy
Prior art keywords
vacuometer
ionization
Prior art date
Application number
IT000626A
Other languages
English (en)
Inventor
Raffaele Correale
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT000626A priority Critical patent/ITTO20030626A1/it
Priority to EP04014546A priority patent/EP1519402B1/en
Priority to DE602004024856T priority patent/DE602004024856D1/de
Priority to JP2004216369A priority patent/JP2005062167A/ja
Priority to US10/910,093 priority patent/US7030620B2/en
Publication of ITTO20030626A1 publication Critical patent/ITTO20030626A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
IT000626A 2003-08-08 2003-08-08 Vacuometro a ionizzazione. ITTO20030626A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT000626A ITTO20030626A1 (it) 2003-08-08 2003-08-08 Vacuometro a ionizzazione.
EP04014546A EP1519402B1 (en) 2003-08-08 2004-06-22 Ionisation vacuum gauge
DE602004024856T DE602004024856D1 (de) 2003-08-08 2004-06-22 Ionisations-Vakuummeter
JP2004216369A JP2005062167A (ja) 2003-08-08 2004-07-23 電離真空計
US10/910,093 US7030620B2 (en) 2003-08-08 2004-08-03 Ionization vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000626A ITTO20030626A1 (it) 2003-08-08 2003-08-08 Vacuometro a ionizzazione.

Publications (1)

Publication Number Publication Date
ITTO20030626A1 true ITTO20030626A1 (it) 2005-02-09

Family

ID=34113444

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000626A ITTO20030626A1 (it) 2003-08-08 2003-08-08 Vacuometro a ionizzazione.

Country Status (5)

Country Link
US (1) US7030620B2 (it)
EP (1) EP1519402B1 (it)
JP (1) JP2005062167A (it)
DE (1) DE602004024856D1 (it)
IT (1) ITTO20030626A1 (it)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100555552C (zh) * 2004-07-30 2009-10-28 清华大学 真空规管
EP1698878A1 (en) * 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
JP4735052B2 (ja) * 2005-05-27 2011-07-27 パナソニック電工株式会社 圧力測定装置
DE112007002399B4 (de) * 2006-12-06 2014-02-06 Inficon Gmbh Elektronenquelle für Vakuumdruckmessgerät
US7768267B2 (en) * 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
CN101126668B (zh) * 2007-09-20 2010-06-16 复旦大学 一种放电气体环境离子真空规管辅助仪器
US8686733B2 (en) * 2007-12-19 2014-04-01 Brooks Automation, Inc. Ionization gauge having electron multiplier cold emission source
EP2252869B1 (en) * 2008-02-21 2018-12-12 MKS Instruments, Inc. Ionization gauge with operational parameters and geometry designed for high pressure operation
DK3517921T3 (da) * 2008-09-19 2021-01-18 Mks Instr Inc Ioniseringsmåler med styring af emissionsstrøm og forspændingspotential
US7906971B2 (en) * 2008-10-14 2011-03-15 Itt Manufacturing Enterprises, Inc. Molecular shield for an ionizaton vacuum gauge
WO2011040625A1 (ja) * 2009-09-29 2011-04-07 有限会社真空実験室 イオン源を有する真空計測装置
US8928329B2 (en) * 2011-07-26 2015-01-06 Mks Instruments, Inc. Cold cathode gauge fast response signal circuit
DE102011055089B4 (de) * 2011-11-07 2014-10-09 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Messvorrichtung
DE102011055084B4 (de) * 2011-11-07 2014-09-18 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Messvorrichtung
ITRM20110630A1 (it) * 2011-11-28 2013-05-29 Hypotheses S R L Trasduttore di pressione denominato lpcb
WO2013119851A1 (en) 2012-02-08 2013-08-15 Brooks Automation, Inc. Ionization gauge for high pressure operation
WO2015114559A1 (en) * 2014-01-31 2015-08-06 Nanotech Analysis S.R.L.S. Miniaturized device for measurements of very low pressure and of gas concentrations
JP6721806B1 (ja) * 2019-09-13 2020-07-15 キヤノンアネルバ株式会社 電離真空計およびカートリッジ
WO2021052600A1 (de) * 2019-09-20 2021-03-25 Inficon ag Vakuumdichte elektrische durchführung
CN113495082B (zh) * 2020-03-19 2022-10-18 清华大学 二次电子发射系数测量装置
DE102020120259B4 (de) 2020-07-31 2024-07-18 Infineon Technologies Ag Gas- oder Druck-Sensormodul mit einem miniaturisierten Aufbau nach dem Prinzip des Franck-Hertz-Experiments

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2605431A (en) 1950-03-30 1952-07-29 Westinghouse Electric Corp Ionization vacuum gauge
JP2662585B2 (ja) * 1989-10-18 1997-10-15 科学技術庁無機材質研究所長 極高真空用真空計
JP2654841B2 (ja) 1990-04-12 1997-09-17 アネルバ株式会社 真空計
FR2679653B1 (fr) 1991-07-23 1993-09-24 Commissariat Energie Atomique Vacumetre a ionisation.
DE4137527A1 (de) 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
JP2676004B2 (ja) * 1993-09-28 1997-11-12 神戸大学長 電離真空計
FR2714966B1 (fr) * 1994-01-11 1996-02-16 Commissariat Energie Atomique Jauge à ionisation munie d'une cathode à micropointes.
FR2736465B1 (fr) * 1995-07-03 1997-08-08 Commissariat Energie Atomique Dispositif d'amorcage et/ou de maintien d'une decharge et jauge a vide a cathode froide comportant un tel dispositif
JPH0968473A (ja) * 1995-08-31 1997-03-11 Ulvac Japan Ltd 熱陰極型真空計
US5872422A (en) * 1995-12-20 1999-02-16 Advanced Technology Materials, Inc. Carbon fiber-based field emission devices
JPH10267780A (ja) 1997-03-27 1998-10-09 Shinko Electric Ind Co Ltd 真空測定用素子及び真空測定用素子の製造方法
US6452167B1 (en) * 1998-05-20 2002-09-17 Sandia National Laboratories Miniature quadrupole mass spectrometer having a cold cathode ionization source
GB9906788D0 (en) * 1999-03-24 1999-05-19 Boc Group Plc Vacuum gauge
JP2000315474A (ja) * 1999-04-30 2000-11-14 Shimadzu Corp 質量分析計
JP4493139B2 (ja) * 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
US6566884B2 (en) * 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge

Also Published As

Publication number Publication date
EP1519402B1 (en) 2009-12-30
JP2005062167A (ja) 2005-03-10
EP1519402A1 (en) 2005-03-30
US7030620B2 (en) 2006-04-18
US20050030044A1 (en) 2005-02-10
DE602004024856D1 (de) 2010-02-11

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