IL81955A - Liquid metal ion source and alloy - Google Patents

Liquid metal ion source and alloy

Info

Publication number: IL81955A
Authority: IL; Israel
Prior art keywords: alloy; metal ion; ion source; liquid metal; liquid
Prior art date: 1986-04-14

Application number

IL81955A

Other languages

English (en)

Other versions

IL81955A0 (en

Original Assignee

Oregon Graduate Center

Hughes Aircraft Co

Us Government

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-04-14

Filing date

1987-03-22

Publication date

1991-07-18

1987-03-22 Application filed by Oregon Graduate Center, Hughes Aircraft Co, Us Government filed Critical Oregon Graduate Center

1987-10-20 Publication of IL81955A0 publication Critical patent/IL81955A0/xx

1991-07-18 Publication of IL81955A publication Critical patent/IL81955A/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Combustion & Propulsion (AREA)
Electron Sources, Ion Sources (AREA)

IL81955A 1986-04-14 1987-03-22 Liquid metal ion source and alloy IL81955A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US06/851,757 US4775818A (en)	1986-04-14	1986-04-14	Liquid metal ion source and alloy

Publications (2)

Publication Number	Publication Date
IL81955A0 IL81955A0 (en)	1987-10-20
IL81955A true IL81955A (en)	1991-07-18

Family

ID=25311605

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL81955A IL81955A (en)	1986-04-14	1987-03-22	Liquid metal ion source and alloy

Country Status (6)

Country	Link
US (1)	US4775818A (de)
EP (1)	EP0263849B1 (de)
JP (1)	JPH07105203B2 (de)
DE (1)	DE3782799T2 (de)
IL (1)	IL81955A (de)
WO (1)	WO1987006407A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5727978A (en) *	1995-12-19	1998-03-17	Advanced Micro Devices, Inc.	Method of forming electron beam emitting tungsten filament
US5962858A (en) *	1997-07-10	1999-10-05	Eaton Corporation	Method of implanting low doses of ions into a substrate
EP1622184B1 (de) *	2004-07-28	2011-05-18	ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH	Emitter für eine Ionenquelle und Verfahren zu deren Herstellung
EP2943769B1 (de)	2013-01-11	2017-11-22	FEI Company	Verfahren zur herstellung einer mikroskopischen struktur mittels eines fokussierten ionenstrahls

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4367429A (en) *	1980-11-03	1983-01-04	Hughes Aircraft Company	Alloys for liquid metal ion sources
JPS59191225A (ja) *	1983-04-15	1984-10-30	Hitachi Ltd	液体金属イオン種合金
JPH0622094B2 (ja) *	1983-11-28	1994-03-23	株式会社日立製作所	液体金属イオン源

1986
- 1986-04-14 US US06/851,757 patent/US4775818A/en not_active Expired - Lifetime
1987
- 1987-03-09 JP JP62501918A patent/JPH07105203B2/ja not_active Expired - Fee Related
- 1987-03-09 EP EP87901979A patent/EP0263849B1/de not_active Expired
- 1987-03-09 DE DE8787901979T patent/DE3782799T2/de not_active Expired - Fee Related
- 1987-03-09 WO PCT/US1987/000454 patent/WO1987006407A2/en active IP Right Grant
- 1987-03-22 IL IL81955A patent/IL81955A/xx not_active IP Right Cessation

Also Published As

Publication number	Publication date
WO1987006407A3 (en)	1987-11-05
IL81955A0 (en)	1987-10-20
US4775818A (en)	1988-10-04
JPS63503021A (ja)	1988-11-02
JPH07105203B2 (ja)	1995-11-13
WO1987006407A2 (en)	1987-10-22
EP0263849A1 (de)	1988-04-20
EP0263849B1 (de)	1992-11-25
DE3782799T2 (de)	1993-04-01
DE3782799D1 (de)	1993-01-07

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Legal Events

Date	Code	Title
1997-06-10	KB	Patent renewed
1999-07-14	HP	Change in proprietorship
2001-07-24	KB	Patent renewed
2006-01-15	MM9K	Patent not in force due to non-payment of renewal fees