Nothing Special   »   [go: up one dir, main page]

FI20116113A - Lateral connected bulk wave filter with improved pass band characteristics - Google Patents

Lateral connected bulk wave filter with improved pass band characteristics Download PDF

Info

Publication number
FI20116113A
FI20116113A FI20116113A FI20116113A FI20116113A FI 20116113 A FI20116113 A FI 20116113A FI 20116113 A FI20116113 A FI 20116113A FI 20116113 A FI20116113 A FI 20116113A FI 20116113 A FI20116113 A FI 20116113A
Authority
FI
Finland
Prior art keywords
vibration layer
frequency band
filter
wave filter
coupled
Prior art date
Application number
FI20116113A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI124732B (en
Inventor
Johanna Meltaus
Tuomas Pensala
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20116113A priority Critical patent/FI124732B/en
Priority to KR1020147015834A priority patent/KR101977334B1/en
Priority to EP12847501.9A priority patent/EP2777153B1/en
Priority to US14/357,220 priority patent/US9219466B2/en
Priority to PCT/FI2012/051096 priority patent/WO2013068652A1/en
Priority to CN201280066944.8A priority patent/CN104205632B/en
Priority to JP2014540529A priority patent/JP2015502065A/en
Publication of FI20116113A publication Critical patent/FI20116113A/en
Application granted granted Critical
Publication of FI124732B publication Critical patent/FI124732B/en
Priority to JP2018052320A priority patent/JP6564096B2/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/0211—Means for compensation or elimination of undesirable effects of reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter (70) comprising a vibration layer (73) for carrying bulk acoustic waves, electrode means (71, 72, 74) comprising a first electrode (71) coupled to the vibration layer (73) for exciting to the vibration layer (73) at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode (72) coupled to the vibration layer (73) for sensing the filter pass signal, the first and second electrodes (71, 72) being laterally arranged with respect to each other, and an acoustic reflector structure (75) in acoustic connection with the vibration layer(73). According to the invention, the reflector structure (75) is adapted to acoustically isolate the vibration layer (73) from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.
FI20116113A 2011-11-11 2011-11-11 Lateral connected bulk wave filter with improved passband characteristics FI124732B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20116113A FI124732B (en) 2011-11-11 2011-11-11 Lateral connected bulk wave filter with improved passband characteristics
KR1020147015834A KR101977334B1 (en) 2011-11-11 2012-11-09 Laterally coupled bulk acoustic wave filter with improved passband characteristics
EP12847501.9A EP2777153B1 (en) 2011-11-11 2012-11-09 Laterally coupled bulk acoustic wave filter with improved passband characteristics
US14/357,220 US9219466B2 (en) 2011-11-11 2012-11-09 Laterally coupled bulk acoustic wave filter with improved passband characteristics
PCT/FI2012/051096 WO2013068652A1 (en) 2011-11-11 2012-11-09 Laterally coupled bulk acoustic wave filter with improved passband characteristics
CN201280066944.8A CN104205632B (en) 2011-11-11 2012-11-09 There is the lateral formula bulk accoustic wave filter of improved pass-band performance
JP2014540529A JP2015502065A (en) 2011-11-11 2012-11-09 Transversely coupled bulk acoustic wave filter with improved passband characteristics
JP2018052320A JP6564096B2 (en) 2011-11-11 2018-03-20 Transversely coupled bulk acoustic wave filter with improved passband characteristics

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20116113 2011-11-11
FI20116113A FI124732B (en) 2011-11-11 2011-11-11 Lateral connected bulk wave filter with improved passband characteristics

Publications (2)

Publication Number Publication Date
FI20116113A true FI20116113A (en) 2013-05-12
FI124732B FI124732B (en) 2014-12-31

Family

ID=48288592

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20116113A FI124732B (en) 2011-11-11 2011-11-11 Lateral connected bulk wave filter with improved passband characteristics

Country Status (7)

Country Link
US (1) US9219466B2 (en)
EP (1) EP2777153B1 (en)
JP (2) JP2015502065A (en)
KR (1) KR101977334B1 (en)
CN (1) CN104205632B (en)
FI (1) FI124732B (en)
WO (1) WO2013068652A1 (en)

Families Citing this family (132)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI123640B (en) * 2010-04-23 2013-08-30 Teknologian Tutkimuskeskus Vtt Broadband acoustically connected thin film BAW filter
JP6603012B2 (en) * 2014-05-21 2019-11-06 太陽誘電株式会社 Duplexer
US20160079958A1 (en) * 2014-05-30 2016-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising vertically extended acoustic cavity
KR101625444B1 (en) * 2015-03-05 2016-06-13 (주)와이솔 Filter module
KR101923572B1 (en) 2015-03-16 2018-11-29 가부시키가이샤 무라타 세이사쿠쇼 Seismic wave device and manufacturing method thereof
JP6916176B2 (en) * 2015-10-21 2021-08-11 コーボ ユーエス，インコーポレイティド Resonant structure with enhanced shear and longitudinal mode reflections of acoustic vibrations
CN106385242B (en) * 2016-09-12 2018-11-09 重庆大学 GHz silicon substrate ScAlN film Resonators and preparation method thereof
JP6784331B2 (en) * 2017-06-23 2020-11-11 株式会社村田製作所 Elastic wave device, high frequency front end circuit and communication device
CN110710106B (en) * 2017-07-04 2023-10-31 京瓷株式会社 Elastic wave device, demultiplexer, and communication device
CN107525610B (en) * 2017-08-10 2020-02-07 中北大学 FBAR micro-pressure sensor based on shear wave mode excited in thickness direction
JP2019047363A (en) * 2017-09-04 2019-03-22 株式会社村田製作所 Elastic wave device, high frequency front end circuit, and communication apparatus
JP6725083B2 (en) * 2017-09-27 2020-07-15 株式会社村田製作所 Elastic wave device and method of manufacturing elastic wave device
JP2019102883A (en) * 2017-11-29 2019-06-24 株式会社村田製作所 Elastic wave device, high frequency front end circuit and communication device
US11323089B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
US10637438B2 (en) 2018-06-15 2020-04-28 Resonant Inc. Transversely-excited film bulk acoustic resonators for high power applications
US11996827B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with periodic etched holes
US10601392B2 (en) 2018-06-15 2020-03-24 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
US12088281B2 (en) 2021-02-03 2024-09-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US11929731B2 (en) 2018-02-18 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
US12040779B2 (en) 2020-04-20 2024-07-16 Murata Manufacturing Co., Ltd. Small transversely-excited film bulk acoustic resonators with enhanced Q-factor
US11323090B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US11509279B2 (en) 2020-07-18 2022-11-22 Resonant Inc. Acoustic resonators and filters with reduced temperature coefficient of frequency
US10756697B2 (en) 2018-06-15 2020-08-25 Resonant Inc. Transversely-excited film bulk acoustic resonator
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US20220116015A1 (en) 2018-06-15 2022-04-14 Resonant Inc. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US10998877B2 (en) 2018-06-15 2021-05-04 Resonant Inc. Film bulk acoustic resonator fabrication method with frequency trimming based on electric measurements prior to cavity etch
US10868513B2 (en) 2018-06-15 2020-12-15 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
US11323095B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Rotation in XY plane to suppress spurious modes in XBAR devices
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US12021496B2 (en) 2020-08-31 2024-06-25 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US10992283B2 (en) 2018-06-15 2021-04-27 Resonant Inc. High power transversely-excited film bulk acoustic resonators on rotated Z-cut lithium niobate
US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US11349450B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11916539B2 (en) 2020-02-28 2024-02-27 Murata Manufacturing Co., Ltd. Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
US11228296B2 (en) 2018-06-15 2022-01-18 Resonant Inc. Transversely-excited film bulk acoustic resonator with a cavity having a curved perimeter
US11949402B2 (en) 2020-08-31 2024-04-02 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US10917072B2 (en) 2019-06-24 2021-02-09 Resonant Inc. Split ladder acoustic wave filters
US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US11201601B2 (en) 2018-06-15 2021-12-14 Resonant Inc. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US12095446B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US11349452B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US11728785B2 (en) 2018-06-15 2023-08-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator using pre-formed cavities
US11171629B2 (en) 2018-06-15 2021-11-09 Resonant Inc. Transversely-excited film bulk acoustic resonator using pre-formed cavities
US11996825B2 (en) 2020-06-17 2024-05-28 Murata Manufacturing Co., Ltd. Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators
US11329628B2 (en) 2020-06-17 2022-05-10 Resonant Inc. Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US11323091B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US12113512B2 (en) 2021-03-29 2024-10-08 Murata Manufacturing Co., Ltd. Layout of XBARs with multiple sub-resonators in parallel
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US10790801B2 (en) 2018-09-07 2020-09-29 Vtt Technical Research Centre Of Finland Ltd Loaded resonators for adjusting frequency response of acoustic wave resonators
US10630256B2 (en) * 2018-09-07 2020-04-21 Vtt Technical Research Centre Of Finland Ltd Two-stage lateral bulk acoustic wave filter
US10756696B2 (en) 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter
US11677377B2 (en) 2018-12-26 2023-06-13 Skyworks Solutions, Inc. Multi-layer piezoelectric substrate with grounding structure
US11146241B2 (en) 2019-02-08 2021-10-12 Vtt Technical Research Centre Of Finland Ltd Low loss acoustic device
DE112020001227T5 (en) 2019-03-14 2022-02-10 Resonant Inc. Transversally excited acoustic film resonator with half-wave dielectric layer
US11901873B2 (en) * 2019-03-14 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with partial BRAGG reflectors
WO2020206433A1 (en) 2019-04-05 2020-10-08 Resonant Inc. Transversely-excited film bulk acoustic resonator package and method
TWI748497B (en) * 2019-06-12 2021-12-01 美商特拉華公司 Electrode-defined unsuspended acoustic resonator
US12034423B2 (en) 2019-06-27 2024-07-09 Murata Manufacturing Co., Ltd XBAR frontside etch process using polysilicon sacrificial layer
US10911021B2 (en) 2019-06-27 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with lateral etch stop
US10862454B1 (en) 2019-07-18 2020-12-08 Resonant Inc. Film bulk acoustic resonators in thin LN-LT layers
US11329625B2 (en) 2019-07-18 2022-05-10 Resonant Inc. Film bulk acoustic sensors using thin LN-LT layer
WO2021025004A1 (en) * 2019-08-08 2021-02-11 国立大学法人東北大学 Elastic wave device
US11088670B2 (en) 2019-09-11 2021-08-10 Vtt Technical Research Centre Of Finland Ltd Loaded series resonators for adjusting frequency response of acoustic wave resonators
US11223341B2 (en) 2019-10-22 2022-01-11 Vtt Technical Research Centre Of Finland Ltd Suppressing parasitic sidebands in lateral bulk acoustic wave resonators
US20210273629A1 (en) 2020-02-28 2021-09-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with multi-pitch interdigital transducer
JP6947867B2 (en) * 2020-03-24 2021-10-13 デクセリアルズ株式会社 Bulk wave resonator and bandpass filter
US20220116020A1 (en) 2020-04-20 2022-04-14 Resonant Inc. Low loss transversely-excited film bulk acoustic resonators and filters
US11811391B2 (en) 2020-05-04 2023-11-07 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with etched conductor patterns
US11469733B2 (en) 2020-05-06 2022-10-11 Resonant Inc. Transversely-excited film bulk acoustic resonators with interdigital transducer configured to reduce diaphragm stress
CN111669146A (en) * 2020-05-06 2020-09-15 河源市众拓光电科技有限公司 Back silicon etching type shear wave filter and preparation method thereof
US12074584B2 (en) 2020-05-28 2024-08-27 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes
US10992282B1 (en) 2020-06-18 2021-04-27 Resonant Inc. Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
US11742828B2 (en) 2020-06-30 2023-08-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with symmetric diaphragm
US11482981B2 (en) 2020-07-09 2022-10-25 Resonanat Inc. Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
US11264969B1 (en) 2020-08-06 2022-03-01 Resonant Inc. Transversely-excited film bulk acoustic resonator comprising small cells
US11671070B2 (en) 2020-08-19 2023-06-06 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators using multiple dielectric layer thicknesses to suppress spurious modes
US11271539B1 (en) 2020-08-19 2022-03-08 Resonant Inc. Transversely-excited film bulk acoustic resonator with tether-supported diaphragm
US11848662B2 (en) * 2020-09-11 2023-12-19 Raytheon Company Tunable monolithic group III-nitride filter banks
CN112054781B (en) * 2020-09-11 2021-10-08 广东广纳芯科技有限公司 High-performance resonator with double-layer homodromous interdigital transducer structure
US11894835B2 (en) 2020-09-21 2024-02-06 Murata Manufacturing Co., Ltd. Sandwiched XBAR for third harmonic operation
US11728784B2 (en) 2020-10-05 2023-08-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
US11405017B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Acoustic matrix filters and radios using acoustic matrix filters
US11405019B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Transversely-excited film bulk acoustic resonator matrix filters
US11929733B2 (en) 2020-10-05 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator matrix filters with input and output impedances matched to radio frequency front end elements
US11658639B2 (en) 2020-10-05 2023-05-23 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator matrix filters with noncontiguous passband
US11476834B2 (en) 2020-10-05 2022-10-18 Resonant Inc. Transversely-excited film bulk acoustic resonator matrix filters with switches in parallel with sub-filter shunt capacitors
US11463066B2 (en) 2020-10-14 2022-10-04 Resonant Inc. Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
CN112350681A (en) * 2020-10-21 2021-02-09 武汉大学 Frequency-adjustable film bulk acoustic resonator
US12119806B2 (en) 2020-10-30 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with spiral interdigitated transducer fingers
US12003226B2 (en) 2020-11-11 2024-06-04 Murata Manufacturing Co., Ltd Transversely-excited film bulk acoustic resonator with low thermal impedance
US11496113B2 (en) 2020-11-13 2022-11-08 Resonant Inc. XBAR devices with excess piezoelectric material removed
US12028039B2 (en) 2020-11-13 2024-07-02 Murata Manufacturing Co., Ltd. Forming XBAR devices with excess piezoelectric material removed
US11405020B2 (en) 2020-11-26 2022-08-02 Resonant Inc. Transversely-excited film bulk acoustic resonators with structures to reduce acoustic energy leakage
US11239816B1 (en) 2021-01-15 2022-02-01 Resonant Inc. Decoupled transversely-excited film bulk acoustic resonators
US12126318B2 (en) 2021-01-15 2024-10-22 Murata Manufacturing Co., Ltd. Filters using decoupled transversely-excited film bulk acoustic resonators
US12113510B2 (en) 2021-02-03 2024-10-08 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip
US12126328B2 (en) 2021-03-24 2024-10-22 Murata Manufacturing Co., Ltd. Acoustic filters with shared acoustic tracks
US20220337210A1 (en) 2021-04-16 2022-10-20 Resonant Inc. Transversely-excited film bulk acoustic resonator fabrication using wafer-to-wafer bonding
US12057823B2 (en) 2021-05-07 2024-08-06 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with concentric interdigitated transducer fingers
US12075700B2 (en) 2021-05-07 2024-08-27 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator fabrication using polysilicon pillars
US20230006640A1 (en) 2021-06-30 2023-01-05 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced substrate to contact bump thermal resistance
CN113381724B (en) * 2021-07-02 2024-05-24 中国科学院上海微系统与信息技术研究所 Bulk acoustic wave resonator and method for manufacturing the same
US20230105034A1 (en) * 2021-10-04 2023-04-06 Skyworks Solutions, Inc. Assembly with piezoelectric layer with embedded interdigital transducer electrode
WO2024203457A1 (en) * 2023-03-30 2024-10-03 日東電工株式会社 Baw resonator and electronic apparatus
DE102023203157A1 (en) 2023-04-05 2024-10-10 Robert Bosch Gesellschaft mit beschränkter Haftung Acoustic wave resonator
DE102023203155A1 (en) 2023-04-05 2024-10-10 Robert Bosch Gesellschaft mit beschränkter Haftung Acoustic wave resonator
DE102023203147A1 (en) 2023-04-05 2024-10-10 Robert Bosch Gesellschaft mit beschränkter Haftung Acoustic wave resonator
DE102023203143A1 (en) 2023-04-05 2024-10-10 Robert Bosch Gesellschaft mit beschränkter Haftung Acoustic wave resonator
DE102023203158A1 (en) 2023-04-05 2024-10-10 Robert Bosch Gesellschaft mit beschränkter Haftung Acoustic wave resonator and method for producing an acoustic wave resonator
DE102023203145A1 (en) 2023-04-05 2024-10-10 Robert Bosch Gesellschaft mit beschränkter Haftung Acoustic wave resonator, high-frequency component
US20240339981A1 (en) * 2023-04-10 2024-10-10 Rf360 Singapore Pte. Ltd. Acoustic devices including acoustic mirrors co-optimized for longitudinal and shear wave reflection, and related method of fabrication

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6107721A (en) * 1999-07-27 2000-08-22 Tfr Technologies, Inc. Piezoelectric resonators on a differentially offset reflector
GB0014963D0 (en) * 2000-06-20 2000-08-09 Koninkl Philips Electronics Nv A bulk acoustic wave device
JP3944372B2 (en) * 2001-09-21 2007-07-11 株式会社東芝 Piezoelectric thin film vibrator and frequency variable resonator using the same
DE10262056B4 (en) * 2002-11-07 2008-08-28 Infineon Technologies Ag BAW resonator with acoustic reflector and filter circuit
KR100745932B1 (en) * 2003-02-21 2007-08-02 가부시키가이샤 히다치 고쿠사이 덴키 Substrate-processing apparatus and method of producing semiconductor device
EP1702407A1 (en) * 2003-10-06 2006-09-20 Philips Intellectual Property & Standards GmbH Resonator structure and method of producing it
EP1673860B1 (en) * 2003-10-06 2009-11-18 Nxp B.V. Ladder-type thin-film bulk acoustic wave filter
DE602004013534D1 (en) 2004-03-09 2008-06-19 Infineon Technologies Ag Acoustic volume wave filter and method for avoiding unwanted side passages
JP2005318547A (en) * 2004-03-30 2005-11-10 Sanyo Electric Co Ltd Bulk wave device
WO2005096494A1 (en) * 2004-03-31 2005-10-13 Matsushita Electric Industrial Co., Ltd. Acoustic mirror type thin film bulk acoustic resonator, and filter, duplexer and communication apparatus comprising the same
US8058768B2 (en) 2005-05-27 2011-11-15 Triquint Semiconductor, Inc. Bulk acoustic wave resonator device
WO2007036897A2 (en) * 2005-09-30 2007-04-05 Nxp B.V. Improvements in or relating to thin-film bulk-acoustic wave (baw) resonators
WO2007060557A1 (en) 2005-11-25 2007-05-31 Nxp B.V. Bulk acoustic wave resonator device
DE102005061344A1 (en) * 2005-12-21 2007-06-28 Epcos Ag Resonant bulk acoustic wave resonator
US7684109B2 (en) * 2007-02-28 2010-03-23 Maxim Integrated Products, Inc. Bragg mirror optimized for shear waves
US8512800B2 (en) 2007-12-04 2013-08-20 Triquint Semiconductor, Inc. Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
CN101997513B (en) * 2009-08-20 2014-04-02 上海华为技术有限公司 Multi-coupling filter
FI123640B (en) * 2010-04-23 2013-08-30 Teknologian Tutkimuskeskus Vtt Broadband acoustically connected thin film BAW filter
FI20106063A (en) * 2010-10-14 2012-06-08 Valtion Teknillinen Acoustically coupled wide-band thin film BAW filter

Also Published As

Publication number Publication date
JP2015502065A (en) 2015-01-19
EP2777153A4 (en) 2015-12-23
US20140312994A1 (en) 2014-10-23
FI124732B (en) 2014-12-31
EP2777153B1 (en) 2021-08-18
WO2013068652A1 (en) 2013-05-16
US9219466B2 (en) 2015-12-22
CN104205632B (en) 2017-03-01
CN104205632A (en) 2014-12-10
KR101977334B1 (en) 2019-05-10
EP2777153A1 (en) 2014-09-17
KR20140101773A (en) 2014-08-20
JP6564096B2 (en) 2019-08-21
JP2018129839A (en) 2018-08-16

Similar Documents

Publication Publication Date Title
FI20116113A (en) Lateral connected bulk wave filter with improved pass band characteristics
EP4068627A4 (en) Bulk acoustic wave resonator having electrode having gap layer, and filter and electronic device
EP4087130A4 (en) Bulk acoustic resonator with bottom electrode as gap electrode, and filter and electronic device
SG10201909039VA (en) Acoustic wave device with multi-layer interdigital transducer electrode
WO2013165706A3 (en) Multi-frequency ultra wide bandwidth transducer
WO2013165705A3 (en) Ultra wide bandwidth transducer with dual electrode
EP4027517A4 (en) Bulk acoustic wave resonator with piezoelectric layer having insert structure, and filter and electronic device
EP2679993A3 (en) SAW array sensor
EP2590326A3 (en) Duplexer, filter and communication module
FR3056812B1 (en) SOUND BARRIER SUPPORT STRUCTURE
EP2737626A4 (en) Bulk acoustic wave resonator and duplexer using bulk acoustic wave resonator
EP2511702A3 (en) Electromechanical transducer and photoacoustic apparatus
WO2021053401A3 (en) Transducer structure for an acoustic wave device
EP4092910A4 (en) Bulk acoustic wave resonator having gap layer on electrode and manufacturing method therefor, filter, and electronic device
JP2015531306A5 (en)
SG10202012058XA (en) Laterally Excited Bulk Wave Device With Acoustic Mirrors
ATE432554T1 (en) ACOUSTIC WAVE FILTER AND COMMUNICATION UNIT
SG10202011547VA (en) Bulk Acoustic Wave Resonator On Surface Acoustic Wave Device
TW200703897A (en) Surface acoustic wave apparatus
EP4113838A4 (en) Bulk acoustic wave resonator with electrode having void layer, filter and electronic device
MX2014005737A (en) Ultrasound cutting device.
EP4027519A4 (en) Bulk acoustic wave resonator and manufacturing method therefor, filter and electronic device
EP3979496A4 (en) Bulk acoustic resonator having separated additional structure and top electrode, filter, and electronic device
WO2014146828A3 (en) Sensor assembly and method for detecting the surroundings of a vehicle
EP3905520A4 (en) Bulk acoustic wave resonator having asymmetric electrode thickness, filter, and electronic device

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 124732

Country of ref document: FI

Kind code of ref document: B

PC Transfer of assignment of patent

Owner name: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY