Nothing Special   »   [go: up one dir, main page]

EP2835325A4 - Fördersystem - Google Patents

Fördersystem

Info

Publication number
EP2835325A4
EP2835325A4 EP13772486.0A EP13772486A EP2835325A4 EP 2835325 A4 EP2835325 A4 EP 2835325A4 EP 13772486 A EP13772486 A EP 13772486A EP 2835325 A4 EP2835325 A4 EP 2835325A4
Authority
EP
European Patent Office
Prior art keywords
conveyance system
conveyance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13772486.0A
Other languages
English (en)
French (fr)
Other versions
EP2835325B1 (de
EP2835325A1 (de
Inventor
Makoto Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of EP2835325A1 publication Critical patent/EP2835325A1/de
Publication of EP2835325A4 publication Critical patent/EP2835325A4/de
Application granted granted Critical
Publication of EP2835325B1 publication Critical patent/EP2835325B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
EP13772486.0A 2012-04-05 2013-03-07 Fördersystem Active EP2835325B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012086392 2012-04-05
PCT/JP2013/056346 WO2013150859A1 (ja) 2012-04-05 2013-03-07 搬送システム

Publications (3)

Publication Number Publication Date
EP2835325A1 EP2835325A1 (de) 2015-02-11
EP2835325A4 true EP2835325A4 (de) 2016-01-06
EP2835325B1 EP2835325B1 (de) 2018-09-05

Family

ID=49300356

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13772486.0A Active EP2835325B1 (de) 2012-04-05 2013-03-07 Fördersystem

Country Status (7)

Country Link
US (1) US9845193B2 (de)
EP (1) EP2835325B1 (de)
JP (1) JP5880693B2 (de)
KR (1) KR101661633B1 (de)
CN (1) CN104245541B (de)
TW (1) TWI522295B (de)
WO (1) WO2013150859A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2947030A1 (de) * 2014-05-23 2015-11-25 Pesmel Group Oy Regalbediengerät mit zwei Aufnahmeelementen und Verfahren in einem Lagergebäude zum Benutzung des RBG
KR101676718B1 (ko) * 2015-03-12 2016-11-17 주식회사 에스에프에이 스토커
EP3389084B1 (de) * 2015-12-08 2022-03-16 Murata Machinery, Ltd. Fördersystem und förderverfahren
CN105858036A (zh) * 2016-06-12 2016-08-17 广州威能机电有限公司 物料存取系统及控制方法
WO2018003287A1 (ja) 2016-06-27 2018-01-04 村田機械株式会社 搬送システム
JP6589847B2 (ja) * 2016-12-26 2019-10-16 株式会社ダイフク 物品積載設備
SG11201912679WA (en) 2017-06-30 2020-01-30 Murata Machinery Ltd Transport system and transport method
JP6965646B2 (ja) * 2017-09-06 2021-11-10 株式会社ダイフク 搬送車、及び、搬送設備
KR102374029B1 (ko) * 2018-01-10 2022-03-11 무라다기카이가부시끼가이샤 반송 시스템의 제어 방법, 반송 시스템 및 관리장치
CN111886190B (zh) 2018-03-22 2022-06-28 村田机械株式会社 储料器系统
DE202018102001U1 (de) * 2018-04-12 2019-07-15 Aberu Gmbh Vorrichtung zum Bewegen von Ladungsträgern, Adapter zum Aufnehmen von Ladungsträgern sowie Transportwagen zum Aufnehmen und Transportieren von Ladungsträgern
KR101973503B1 (ko) * 2018-07-10 2019-04-29 (주)에스티아이 케미컬 용기 자동이송장치 및 자동이송방법
JP7529039B2 (ja) * 2020-11-12 2024-08-06 村田機械株式会社 保管棚
JP7559620B2 (ja) 2021-03-02 2024-10-02 村田機械株式会社 搬送システム
CN114408452B (zh) * 2022-01-27 2023-08-04 赛美特科技有限公司 一种晶圆运送方法、装置、电子设备及存储介质
CN115009737A (zh) * 2022-05-31 2022-09-06 江苏木盟智能科技有限公司 多场景智能搬运方法、系统、存储介质及智能搬运机器人
CN115818086B (zh) * 2022-12-14 2023-08-08 弥费科技(上海)股份有限公司 晶圆存储库对接天车口的存储调度系统及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009094460A (ja) * 2007-09-20 2009-04-30 Tokyo Electron Ltd 基板の処理装置
WO2011125095A1 (ja) * 2010-04-02 2011-10-13 ムラテックオートメーション株式会社 自動倉庫
WO2011148412A1 (ja) * 2010-05-26 2011-12-01 ムラテックオートメーション株式会社 装置前自動倉庫

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3669057B2 (ja) * 1996-06-03 2005-07-06 アシスト シンコー株式会社 ストッカへの搬送システム
JP3447724B2 (ja) 1997-08-22 2003-09-16 富士重工業株式会社 塵芥収集車の塵芥積込装置
JP2000118607A (ja) 1998-10-12 2000-04-25 Murata Mach Ltd 搬送システム
JP2002060011A (ja) * 2000-08-11 2002-02-26 Murata Mach Ltd 自動倉庫
JP2003188229A (ja) * 2001-12-18 2003-07-04 Hitachi Kasado Eng Co Ltd ウエハ製造システムおよびウエハ製造方法
JP3991852B2 (ja) * 2002-12-09 2007-10-17 村田機械株式会社 天井搬送車システム
WO2004108347A1 (ja) * 2003-06-05 2004-12-16 Hirata Corporation 組立システム、組立ユニット、レイアウト作成装置ならびにレイアウト作成方法
JP2006096427A (ja) * 2004-09-28 2006-04-13 Murata Mach Ltd 物品保管設備
TW200621600A (en) * 2004-12-02 2006-07-01 Murata Machinery Ltd Automatic warehouse
JP2007106528A (ja) * 2005-10-12 2007-04-26 Hitachi Plant Technologies Ltd 階層入出庫式ストッカ装置
JP2007186319A (ja) * 2006-01-16 2007-07-26 Murata Mach Ltd 搬送システム
US8043039B2 (en) 2007-09-20 2011-10-25 Tokyo Electron Limited Substrate treatment apparatus
JP4688000B2 (ja) * 2008-02-06 2011-05-25 株式会社ダイフク 物品収納設備
JP4555881B2 (ja) * 2008-03-18 2010-10-06 株式会社日立国際電気 基板処理装置及び表示方法
JP5493314B2 (ja) 2008-09-05 2014-05-14 村田機械株式会社 被収容物移替システム
JP5284808B2 (ja) * 2009-01-26 2013-09-11 株式会社Ｓｏｋｕｄｏ ストッカー装置及び基板処理装置
US8527088B2 (en) * 2009-03-03 2013-09-03 Murata Machinery, Ltd. Transportation system
JP5321913B2 (ja) 2009-12-07 2013-10-23 株式会社ダイフク 物品保管設備

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009094460A (ja) * 2007-09-20 2009-04-30 Tokyo Electron Ltd 基板の処理装置
WO2011125095A1 (ja) * 2010-04-02 2011-10-13 ムラテックオートメーション株式会社 自動倉庫
WO2011148412A1 (ja) * 2010-05-26 2011-12-01 ムラテックオートメーション株式会社 装置前自動倉庫

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2013150859A1 *

Also Published As

Publication number Publication date
CN104245541B (zh) 2016-03-23
EP2835325B1 (de) 2018-09-05
JPWO2013150859A1 (ja) 2015-12-17
JP5880693B2 (ja) 2016-03-09
US9845193B2 (en) 2017-12-19
TW201402428A (zh) 2014-01-16
KR101661633B1 (ko) 2016-09-30
KR20140137396A (ko) 2014-12-02
WO2013150859A1 (ja) 2013-10-10
TWI522295B (zh) 2016-02-21
CN104245541A (zh) 2014-12-24
EP2835325A1 (de) 2015-02-11
US20150045937A1 (en) 2015-02-12

Similar Documents

Publication Publication Date Title
IL233614A0 (en) anti-rocket system
IL218530A0 (en) Aquaclture system
EP2835325A4 (de) Fördersystem
EP2838803A4 (de) Verpackungssystem
GB201200831D0 (en) Improved positioning system
EP2866252A4 (de) Substrattransportsystem
EP2763161A4 (de) Transportsystem
ZA201407963B (en) Conveyor system
GB201210921D0 (en) Batching system
GB201213846D0 (en) Location system
GB201217418D0 (en) System
SG11201506361WA (en) Conveyance system
EP2904178A4 (de) Haltesystem
EP2870315A4 (de) Steigrohrsystem mit spannung am oberen ende
PL2847065T3 (pl) Instalacja procesowa do jednostek konstrukcyjnych
ZA201500983B (en) Carrying system
ZA201500982B (en) Carrying system
IL217432A0 (en) System
GB2503904B (en) System design
PL2800713T3 (pl) Jednostka transportowa
GB201317698D0 (en) System interface
EP2820638A4 (de) Hilfssystem
GB2498748B (en) Connection system
GB201220312D0 (en) Passerelle system
GB201220319D0 (en) Passerelle system

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20141027

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
RA4 Supplementary search report drawn up and despatched (corrected)

Effective date: 20151208

RIC1 Information provided on ipc code assigned before grant

Ipc: B65G 1/137 20060101ALI20151202BHEP

Ipc: H01L 21/677 20060101ALI20151202BHEP

Ipc: B65G 1/04 20060101AFI20151202BHEP

Ipc: B65G 1/00 20060101ALI20151202BHEP

Ipc: B65G 35/08 20060101ALI20151202BHEP

Ipc: B65G 49/07 20060101ALI20151202BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20161212

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20180321

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1037531

Country of ref document: AT

Kind code of ref document: T

Effective date: 20180915

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602013043196

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20180905

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181205

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181206

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181205

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1037531

Country of ref document: AT

Kind code of ref document: T

Effective date: 20180905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190105

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190105

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602013043196

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

26N No opposition filed

Effective date: 20190606

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20190307

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190307

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20190331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190307

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190307

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20130307

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180905

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IE

Payment date: 20240222

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240220

Year of fee payment: 12