EP1483785A1 - Method and apparatus for integrated chemical mechanical polishing of copper and barrier layers - Google Patents

Abstract

A method of polishing a plurality of layers on a surface of a semiconductor wafer includes polishing a first layer such as copper using a polishing solution on a first portion of polishing pad and polishing another layer as a barrier layer using a polishing solution on another portion of polishing pad. Different or identical solutions may be used for each layer. The different portions of polishing pad, likewise, are preferably suited to polish a corresponding wafer layer. The different portions of polishing pad may be located on the same pad or on different pads. Also claimed are two different supply lines of polishing solutions to a single polishing pad.

Description

METHOD AND APPARATUS FOR INTEGRATED CHEMICAL MECHANICAL POLISHING OF COPPER AND BARRIER LAYERS

INVENTORS: Homayoun Talieh, Bulent M. Basol, Douglas W. Young, Yuchun Wang and

Tuan Truong

RELATED APPLICATIONS [0001] This is a continuation-in-part U.S. Ser. No. 10/346,425 filed January 17, 2003

(NT-278-US) and U.S. Ser. No. 10/199,471 filed July 19, 2002 (NT-258-US), all incorporated herein by reference.

[0002] This application claims priority to U.S. Prov. No. 60/417,544 filed October 10,

2002 (NT-278-P2) and U.S. Prov. No. 60/365,001 filed March 13, 2002 (NT-237-P), all incoφorated herein by reference.

FIELD [0003] The invention relates to the field of chemical mechanical polishing. More particularly, the invention relates to a method and apparatus for integrated polishing of both copper and barriers layers.

BACKGROUND

[0004] Conventional semiconductor devices generally include a semiconductor substrate, usually a silicon substrate, and a plurality of sequentially formed dielectric interlayers such as silicon dioxide and conductive paths or interconnects made of conductive materials. Copper and copper alloys have recently received considerable attention as interconnect conductor because of their superior electromigration and low resistivity characteristics. The interconnects are usually formed by filling copper in features or cavities etched into the dielectric interlayers by a metallization process. The preferred method of copper metallization process is electroplating. In an integrated circuit, multiple levels of interconnect networks laterally extend with respect to the substrate surface. Interconnects formed in sequential interlayers can be electrically connected using vias or contacts. [0005] In a typical process, first an insulating interlayer is formed on the semiconductor substrate. Patterning and etching processes are performed to form features such as trenches, vias or dual damascene structures in the insulating layer. Then, copper is electroplated to fill all the features. However, the plating process results in a copper layer within the features, as well as on the substrate surface. The excess copper overburden on the surface is then removed before the subsequent processing step.

[0006] Conventionally, after patterning and etching, the insulation layer is first coated with a barrier layer, typically, a tantalum or tantalum/tantalum nitride composite layer. The barrier layer coats the vias and the trenches as well as the top surface of the insulation layer to ensure good adhesion and acts as a barrier material to prevent diffusion of the copper into the semiconductor devices and tlirough the insulation layer. Next a seed (conductive) layer, which is often a copper layer, is deposited on the barrier layer. The seed layer forms a conductive material base for copper film growth during the subsequent copper deposition. As the copper film is electroplated, the copper layer quickly fills the vias but coats the wide trench and the surface in a conformal manner. When the deposition process is continued to ensure that the trench is also filled, a thick copper layer or overburden is formed on the substrate. Conventionally, after the copper plating, a CMP (Chemical Mechanical Polishing) process is employed to globally planarize and reduce the thickness of the copper layer down to the level of the surface of the barrier layer. To electrically isolate the copper filled features, the barrier layer is then removed by another CMP step.

[0007] Chemical mechanical polishing (CMP) of semiconductor wafers for VLSI (Very

Large Scale Integration) and ULSI (Ultra Large Scale Integration) applications has important and broad application in the semiconductor industry. CMP is a semiconductor wafer flattening and polishing process that combines chemical removal of layers such as insulators and metals with mechanical buffering of a wafer surface. CMP is also used to flatten/polish wafers after crystal growing and during the wafer fabrication process, and is a process that provides global planarization of the wafer surface. For example, during the integrated circuit fabrication process, CMP is often used to flatten/polish the profiles that build up in multilevel metal interconnection schemes. Achieving the desired flatness of the wafer surface must take place without contaminating the desired surface. Also, the CMP process must avoid polishing away portions of the functioning circuit parts. [0008] Conventional systems for the chemical mechanical polishing of semiconductor wafers will now be described. One conventional CMP process requires positioning a wafer on a holder rotating about a first axis and lowered onto a polishing pad rotating in to the opposite direction about a second axis. The wafer holder presses the wafer against the polishing pad during the planarization process. A polishing solution such as a polishing agent or slurry is typically applied to the polishing pad during the polishing of the wafer. The content of the polishing solution depends on the nature of the material to be removed during the CMP. For example, if the material is metallic, the polishing solution may be composed any one or more of abrasives, oxidizers, complexing reagents (etching chemicals), inhibitors and/or surfactants. The oxidizer in the polishing solution oxidizes the surface of the metallic material while the oxidized metallic material is removed chemically and mechanically by abrasion due to the friction with the pad or the abrasive powder or both. Etching chemicals can be used to increase the polishing rate of the metallic material.

[0009] In another conventional CMP process, a wafer holder positions and presses a wafer against a belt shaped polishing pad while the pad is moved continuously in the same linear direction relative to the wafer. The so called belt shaped polishing pad is movable in one continuous path during this polishing process. These conventional polishing processes may further include a conditioning station positioned in the path of the polishing pad for conditioning the pad during polishing. Factors that need to be controlled to achieve the desired flatness and planarity may include polishing time, pressure between the wafer and pad, speed of rotation, slurry particle size, polishing solution feed rate, the chemistry of the polishing solution, and pad material.

[0010] Although the CMP processes described above are widely used and accepted in the semiconductor industry, challenges remain. Due to the differences in the properties of materials used for copper, barrier and other layers which need to be subjected to polishing, conventional systems often include different polishing solutions and different types of polishing pads for the differing layers. This often means that a copper layer must be polished using one pad while a barrier layer must be removed using an entirely different pad. Also, the differences in pad materials and polishing solution composition may cause unintended side effects such as erosion and dishing into layers other than the one being polished. This increases the time, cost, defect rate and complexity in the polishing process. [001 1] Specifically, the art of polishing has attempted to solve the problem of polishing a copper layer above a barrier layer of tantalum It should be noted that all descriptions made with reference to Ta-barπer is applicable to a TaN barrier and to a Ta/TaN stack [0012] The CMP tools of prior art are complex and expensive machines An integrated polishing method and apparatus that serves to effectively polish both tantalum and copper to reduce the cost and complexity and shorten the time required for the polishing of a semiconductor wafer is needed

SUMMARY

[0013] The invention overcomes the identified limitations with conventional chemical mechanical polishing and provides a technique for polishing multiple layers of a workpiece [0014] In one or more embodiments of the invention, a plurality of layers of a semiconductor wafer is polished using the same pad This is achieved by supplying different polishing solutions when polishing each layer of a differing composition In one embodiment, a copper layer is first polished using a first polishing solution delivered to the pad Afterwards, a barrier layer of the same wafer is polished using a second polishing solution delivered onto the same pad After each layer is polished, both the pad and/or wafer may be cleaned by using a rinse with or without a subsequent blow or spinning process to remove excess solution In an alternate embodiment, the copper and barrier layer removal may be performed in an integrated CMP system using multiple polishing pads or multiple portions of a single polishing pad Further, multiple polishing solutions may be combined with multiple polishing pads to optimise polishing efficiency

[0015] In other embodiments of the invention, a plurality of layers of a semiconductor wafer is polished using different polishing solutions in different CMP stations In one embodiment, a copper layer is first polished using a first polishing solution delivered to a pad in a first CMP station Afterwards, a barrier layer of the same wafer is polished using a second polishing solution in a second CMP station

BRIEF DESCRIPTION OF THE DRAWINGS [0016] Figure 1A illustrates a cross-section of a semiconductor wafer before depositing a copper layer on it, [0017] Figure IB illustrates a cross-section of the semiconductor wafer shown in Figure

1A, wherein a planar conductive layer has been deposited on top of the wafer,

[0018] Figure 1C illustrates a cross-section of the semiconductor wafer in Figure IB after polishing the copper layer in accordance with one or more embodiments of the invention,

[0019] Figure ID illustrates a cross-section of layers of the semiconductor wafer in Figure

1 C after polishing the barrier layer in accordance with one or more embodiments of the invention,

[0020] Figure I E is a flowchart of one or more embodiments of the invention which use two different polishing solutions on the same pad,

[0021] Figure IF is a flowchart of one or more embodiments of the invention which use three different polishing solutions on the same pad,

[0022] Figure 2 illustrates a cross-section of the semiconductor wafer shown in Figure

1 A, wherein a thick conductive layer has been deposited on top of the wafer,

[0023] Figure 3 is a flowchart of at least one embodiment of the invention using separate polishing solution lines,

[0024] Figure 4 is a flowchart of at least one embodiment of the invention using separate polishing solution lines,

[0025] Figure 5 is a flowchart of at least one embodiment of the invention using a component line and oxidizer line,

[0026] Figures 6A-B illustrate a side view and a plan view of a polishing station configured in accordance with one or more embodiments of the invention,

[0027] Figures 7 A-B illustrate a detailed view of wafer polishing using a single pad according to one or more embodiments of the invention,

[0028] Figure 8 depicts a block diagram of an integrated CMP system having multiple

CMP stations, according to one or more embodiments of the invention, and

[0029] Figure 9 is a flowchart of an embodiment of method of polishing copper and barnei layers of a semiconductor wafer using an integrated CMP system having multiple CMP stations, such as the CMP system described with reference to Figure 8 DETAILED DESCRIPTION

[0030] The invention is directed to a method and apparatus for chemical mechanical polishing of multiple layers of a workpiece such as a semiconductor wafer. The various techniques described herein may involve a single polishing pad or multiple polishing pads. Additionally, the techniques may involve a single polishing solution or multiple polishing solutions. Further, a single portion of a polishing pad or multiple portions of a single polishing pad (each portion having a different composition) may be utilized. The term "polishing pad" is interchangeable with the terms "polishing member" and "polishing belt". The terms "wafer", "semiconductor wafer", "workpiece", and "substrate" are interchangeable. [0031] In one embodiment, a first type of polishing solution is supplied for polishing a first layer such as a copper layer. Once the endpoint of the copper layer is reached, the supply of the first type of polishing solution is stopped and the wafer and the pad are rinsed. In the context of this application, the endpoint can be described as having been achieved when a given layer is removed from the top of the underlying layer and the underlying layer is exposed. A second type of polishing solution is then supplied for polishing a second layer such as a barrier layer on the same pad. In another embodiment a first type of polishing solution is supplied on the pad to polish the copper layer partially at high speed. A second type of polishing solution is then supplied to remove the rest of the copper layer. Yet a third type of polishing solution is subsequently used to remove the barrier layer.

[0032] With respect to the polishing solution used, the polishing solution can be either various polishing agents without abrasive particles or slurries with abrasive particles, depending upon the type of pad used for polishing and the desired type of polishing. For example, the polishing pad can contain abrasives embedded in the front side of the pad with polishing agents that do not contain abrasive particles being introduced, or can use a polishing pad that does not contain such embedded abrasives and instead uses a slurry, or can use some other combination of belt, slurry and/or polishing agents. The polishing solution may include a chemical that oxidizes the material that is then mechanically removed from the wafer, as is described further hereinafter, as well as may contain abrasive particles made from colloidal silica or fumed silica. The polishing agent or slurry generally grows a thin layer of silicon dioxide or oxide on the front surface of the wafer, and the buffering action of the pad mechanically removes the oxide. As a result, high profiles on the wafer surface are removed until an extremely flat surface is achieved. [0033] Referring back to the first embodiment, after reaching the endpoint of the copper layer polishing, supply of the first type of polishing solution is discontinued so that polishing of the barrier layer commences with the second type of polishing solution. All of these and other embodiments use the same pad to polish both copper and barrier layers. The apparatus for performing these and other embodiments couple and control the necessary polishing solution lines in tandem. In an aspect of the invention, polishing solution lines are embodied in a polishing solution distribution system.

[0034] In discussing the invention, various references will be made to specific copper layers, barrier layers, polishing solutions, pads and other components. Such reference is by way of illustration only as it should be readily understood that any form, manner and type of layers, polishing solutions, pads and other components can be substituted as appropriate for the desired application, polishing system and/or wafer. For instance, in the description, both the deposited copper layer and the underlying seed layer are often referred to as the copper layer while the barrier layer is referred to as the tantalum layer. Such description depends on the composition of the wafer used and the layers currently being processed and should not be considered to limit the invention in any manner.

[0035] Also, in describing the invention, references to the "same pad" may also include different sections of one pad and in all instances "same type of pad" refers to a similar composition of pad throughout the pad's various sections, if any. Like reference numerals will be used to designate like elements and like structures when describing the various figures. [0036] Figure 1A illustrates a portion of an exemplary substrate 11 that usually includes a silicon wafer. The illustrated portion of substrate 1 1 includes a patterned insulating layer 14 or field comprising a dielectric material. Cavities 16 or features such as trenches and vias are formed in the insulating layer 14 by etching away portions of the insulating layer using well known techniques. The features 16 may expose portions of the substrate surface. A barrier layer 15 such as Ta or TaN or Ta/TaN stacked layer is formed in the cavities 16 and on top surface 17 of the insulating layer or field surface. The barrier layer may have a thickness on the order of 200- 300 A. Although it is not shown in the Figures la-le, the barrier layer 15 is lined with a thin copper seed layer to initiate copper growth on the barrier layer. A planar conductive layer 12, such as a copper layer, is formed, using an ECMD (Electrochemical Mechanical Deposition) process, over the copper seed layer. For example, the thickness of the copper layer 12 is about 1000 A.

[0037] Figures IB exemplifies a beginning substrate having a planar copper layer that is produced using an ECMD process. An example ECMD process is disclosed in US patent No. 6, 176,992 entitled "Method and apparatus for electro-chemical mechanical deposition" issued January 23, 2001 and commonly owned by the assignee of the present application. Use of a substrate with a planar copper layer as a beginning substrate is just for the purpose of exemplification. The inventive process, as will be shown in Figure 2, can also use beginning substrates having a thick conformal copper layer that is produced using a conventional electrodeposition process such as ECD (Electro Chemical Deposition) and is within the scope of the present invention.

[0038] Figures 1C and ID exemplify later stages of the polishing process of such beginning samples that are shown in Figures IB and 2. The polishing process of the present invention uses a single polishing belt or pad (abrasive or non-abrasive) throughout the polishing process.

[0039] In accordance with the invention, the barrier layer 15 and copper layer 12 are polished using the same polishing pad or belt (not shown). The pad first polishes and removes copper layer 12 from the wafer 1 1 until reaching its "endpoint" and then removes the barrier layer 15 up to its "endpoint". For purposes of describing the various embodiments of the invention, the endpoint of the copper layer 12 may be defined as the first instance along the layer 12 when the barrier layer 15 is reached during polishing. Likewise, the endpoint of the barrier layer 15 may be defined as the first instance at which the top 17 of field 14 is reached during polishing. It should be noted that after the endpoint for copper and barrier removal, a predetermined amount of over-polish may be carried out in either or both cases to eliminate any possible residues of materials on the wafer surface. The copper layer 12 is polished by a pad (not shown) by delivering onto the pad a first type of polishing solution (described below). The chemical reactions in the first type of polishing solution in conjunction with the mechanical abrasive action of the pad upon copper layer 12 removes copper layer 12. The removal of copper layer 12 occurs until its endpoint is reached, which is defined as the start of barrier layer 15 beneath it. The resulting wafer 1 1 is shown in Figure lC. The barrier layer 15 and the features 16 remain while the copper layer 12 has been removed up to level of the barrier layer 15. [0040] After polishing the copper, the wafer surface and the pad surface are briefly cleaned using a cleaning fluid such as water When cleaning, the wafer surface and the pad surface may or may not be separated, but if separated the wafer surface and the pad surface can then be separately cleaned, and this type of cleaning can be done in cleaning referred to hereafter After cleaning, the wafer surface may or may not be spun to remove excess solution, but the excess solution on the pad is preferably blown off making its surface ready to receive a different chemistry At this point, a second type of polishing solution may be disposed onto the same pad Then, using the second type of polishing solution, barrier layer 15 is polished until the top surface 17 of the field 14 is reached This polishing action creates a planaπzed surface of the wafer 1 1 , as shown in Figure ID Each of the features 16 are now electrically isolated from one another and the top surface is flat and planar for future processing Figure IE is a flowchart of one or more embodiments of the invention In the chemical mechanical polishing process 10 of semiconductor wafers, an individual wafer (or even, a group of wafers if a parallel polishing system is implemented) must first be positioned for polishing (block 100) on the pad The positioning may be achieved by means of a carrier head or housing, which positions a wafer in a close proximity to the polishing pad (see Figure 6A) Next in process 10, a first type of polishing solution is supplied for copper layer polishing (block 1 10) During the process, the first type of chemical polishing solution is disposed between the copper layer 12 and the polishing pad so as to chemically and mechanically polish the copper while the wafer is pressed against the pad As the wafer is pressed against the polishing pad, the movement of the polishing pad relative to the wafer provides the mechanical action on the copper surface 12

[0041] This mechanical action in combination with the chemical reaction of the polishing solution polishes the copper surface Rotation of the carrier head assists in the polishing solution delivery and as well as in obtaining uniform polishing rates across the copper layer Chemical mechanical polishing with the first type of polishing solution (which is particularly well suited to the polishing of copper) continues until the endpoint of the copper layer 12 is reached (checked at block 120) Once the coppei layer 12, end-point is reached (once the barrier layer 15 has been exposed), and optional over-polish is done, the first type of polishing solution is cleaned off (block 130) The cleaning of the polishing solution off the pad may be achieved using a high pressure rinse with DI water and or air blow method (see below) Also, the wafer 1 1 itself may separately be cleaned by rinsing with DI water and then have the DI water removed by spinning the wafer, with the wafer typically still being wet, but not having excess DI water disposed thereon.

[0042] Once the polishing solution of the first type is cleaned off, a second type of polishing solution, one that is better suited to polishing of the barrier layer than the first type of polishing solution, is supplied for barrier layer 15 polishing (block 140). The second type of polishing solution is disposed on the polishing pad and the polishing of the barrier layer is performed. The polishing of the barrier layer using the second type of polishing solution continues until the endpoint of the barrier layer 15 is reached (checked at block 150). Once the barrier layer endpoint is reached (once the top surface 17 of the field region 14 is reached), the second type of polishing solution is switched off (block 160). Removal of the polishing solution from the pad may be achieved by a high pressure rinse and/or air blow method similar or identical with that used to clean off the first type of polishing solution. The wafer 1 1 is then rinsed and spun top remove excess solution.

[0043] The chemical mechanical polishing of the wafer 1 1 is considered complete and the wafer is ready for the next processing step. The next wafer (or group of wafers) can then be loaded (block 170). The process 10 then repeats with the new wafer (or group) in accordance with blocks 100 tlirough 160.

[0044] In one embodiment, a novel feature of the invention is that the same pad is used for both the copper and barrier layers 12 and 15, respectively. Furthermore, a cleaning step is performed in between to avoid complications of non-compatibility between a first polishing solution and a second polishing solution. The types of pads available for such polishing may vary widely. Such pads include fixed abrasive pads and nonabrasive pads, depending on the desired polishing effect and chemical solution used. Either pad may be used for polishing both the copper and barrier layers, but in each case, the composition of the polishing solutions used may or not be the same.

[0045] In the example of process 10, the copper layer 12 may be a planar copper film.

Note that in this context, "planarized thin" copper film may indicate a film that is planar with a thickness on the order of less than 3000 angstroms. The polishing pad may be a fixed abrasive type pad such as MWR66 pad from 3M Corporation. For such a fixed abrasive pad, the polishing solution for polishing copper could be an abrasive free solution such as the CPS-08 solution also from 3M Corporation, although a solution with an abrasive therein can also be used In order to polish tantalum on the same pad, a modified polishing solution available from EKC (Polishing solution 9030) together with a reduced abrasive of 2% or less (down from the typical 5%) may be used, although other polishing solutions, with or without abrasives can be used The modification of the EKC 5 solution includes an increase in the pH of the solution from 4 0 to 5 5 The increased pH may be achieved, for instance, by adding ammonium hydroxide or hydioxylamine If the pad used is to be a regular polymeric pad, such as Thomas West 711, then the same polishing solutions, CPS-08 solution and a modified EKC with 2% abrasive, for copper and tantalum, respectively, can still be used One advantage of using a small amount of to abrasive (2% rather than 5%) is that the by products left on the pad can be cleaned relatively easily A very high abrasive content can cause handling problems in terms of slurry left on the pad If particles and chemicals cannot be cleaned off the pad pioperly, it may affect the copper polishing step that follows the barrier polishing step Further, a polishing solution with no abrasive particles can also be used with a nonabrasive 15 polymeric pad in situations where the polishing solution is very active

[0046] The above piocess can also be performed using more than two polishing solutions, for example using two different polishing solutions for the copper polishing and one polishing solution for the barrier layer polishing This process can also be implemented using the CMP apparatus shown in Figuies 6A-B Figure IF is a flowchart 20 describing a CMP process embodiment using three polishing solutions on the same pad In the chemical mechanical polishing process 70 of semiconductor wafers, an individual wafer (or even, a group of wafers if a parallel polishing system is implemented) must first be positioned for polishing (block 700) on the pad as described above Next in process 70, a first type of copper polishing solution is supplied for fast copper layer polishing (block 710) Chemical mechanical polishing with the first type of copper polishing solution (which rapidly polishes the copper) continues until the endpoint of the copper layer 12 is reached (checked at block 720) The first type of copper polishing solution is turned off and subsequently the cleaning of the wafer and the pad is carried out (block 730) The cleaning of the polishing solution from the pad is achieved using a high pressure rinse with DI water and/oi air blow method Block Also, the wafer 1 1 itself may be cleaned by rinsing with DI water and then spinning the wafei After the use of first type of copper polishing solution, a second type of copper polishing solution is delivered onto the pad to remove the remaining copper residues left on the baπ ier layer that is on the top surface of the field (block 740). Alternately, the first polishing step may be timed to remove most of the copper using the first type of copper polishing solution, leaving behind only 500-2000 angstrom thick layer, which is then polished off using the second type of copper polishing solution. The second type of copper polishing solution typically has a lower polishing rate than the first type of copper polishing solution, and it leaves behind a smoother copper surface with less number of defects.

[0047] Once the second type of copper polishing solution is turned off and cleaned off

(block 750), a third type of polishing solution for the polishing of the barrier layer 15 is delivered on the pad (block 760) and the polishing of the barrier layer is performed. The polishing of the barrier layer using the third type of polishing solution continues until the endpoint of the barrier layer 15 is reached (checked at block 770). Once the barrier layer endpoint is reached (once the top surface 17 of the field region 14 is reached), the third type of polishing solution is turned off, and the pad and the wafer are cleaned (block 780). Removal of the remains of the polishing solution from the pad may be achieved by a high pressure rinse with DI water and following air blow method similar or identical with that used to clean off the copper polishing solutions. The wafer 11 may also be rinsed and spun. With barrier removed, the chemical mechanical polishing of the wafer 11 is considered complete and the wafer ready for the next processing step. The next wafer (or group of wafers) can then be loaded (block 790). The process 70 then repeats with the new wafer (or group) in accordance with blocks 700 through 790 shown in Figure IF. As seen from the given description, in this approach, the same pad is used to remove both the copper 12, and the barrier 15, layers by using multiple polishing solutions. As in the previous approach fixed abrasive pads and regular pads or polymeric pads can be used for this purpose. Either pad may be used for polishing both the copper and barrier layers, but in each case, the composition of the polishing solutions used may or not be the same.

[0048] In the example of process 70, the polishing pad may be a fixed abrasive type of pad such as MWR66 pad from 3M Corporation. The first type of copper polishing solution may be an abrasive free solution with high removal rate, such as the CPS-1 1 solution also from 3M Corporation. The copper removal rate of the CPS-1 1 solution is approximately 4000 A per minute at about 1 psi of pressure applied to the wafer surface by the pad. After polishing with the CPS- 1 1 , there maybe some copper residues left on the barrier layer or certain thickness of copper may be intentionally left on the surface. Such residues may be polished off using the second type of copper polishing solution that should work mainly on the remaining residues but should have minimum etching effect on the copper that is in the features This way dishing may be minimized

[0049] The second type of copper polishing solution may be an abrasive free solution with low copper removal rate, such as the CPS-12 solution from 3M Corporation The copper removal rate of the CPS-12 solution is approximately 1000 A per minute and removes copper residues from the top of the barrier layer In order to polish tantalum on the same pad, the modified polishing solution available from EKC together with a reduced abrasive of 2% or less may be used as discussed before As in the pievious case, the modification of the EKC solution includes an inciease in the pH of the to solution from 4 0 to about 5 5 The increase of pH may be achieved, for instance, by adding ammonium hydroxide or hydroxylamine Again, if the pad used is to be a regular polymeric pad, such as Thomas West 71 1, then the same polishing solutions, CPS-1 1, CPS-12 and a modified EKC with 2% abrasive, for copper and tantalum polishing, respectively, can still be used Figure 2 illustrates another beginning substrate to exemplify the process of the present invention Figure 2 exemplifies a beginning substrate 1 1 ' having a conformal copper layer that may be produced using a conventional electrodeposition process such as ECD (Electro Chemical Deposition) Figure 2 illustrates a portion of an exemplary substrate 1 1 ' that usually includes a silicon wafer The illustrated portion of substrate 1 1 ' includes a patterned insulating layer 14' or a dielectric material Cavities 16' or features such as trenches and vias are formed in the insulating layer 14' by etching away portions of the insulating layer using well known techniques A barrier layer 15' such as Ta or TaN or Ta TaN stacked layer is formed in the cavities 16' and on top suiface 17' of the insulating layer 14' The barrier layer may have a thickness on the order of 100-300 A or even less Although it is not shown, the barrier layer 15' is lined with a thin copper seed layei to initiate copper growth on the barrier layer

[0050] Copper layer 12' is formed, using a conventional conformal deposition process, over the copper seed layer For example in a typical semiconductor device, the conductive layer 12' is foπned by depositing copper to a thickness that is about 1 5-2 00 times the depth of the features 16' In accordance with the principles of the present invention, the copper layer 12' and the barrier layer 15' of the wafer 1 1 ' may be polished away using the above or below described embodiments as in the case of polishing the wafer 1 1 with planar copper layer 12 Various stages of the polishing process also progresses as exemplified in Figures 1C and ID above. For the purpose of clarification, the following embodiments will be described in connection with the Figures 1A-D for the case of polishing planar copper layer and the underlying Ta-barrier layer. However, the same embodiments can be applied to the copper layer 12' and the underlying Ta barrier layer described in connection with Figure 2. The only difference is the thickness of the copper layer in the latter case, in which the described processes may take more time than the polishing of the thinner planar layer. Considering the difference between the thicknesses of copper layers in Figures IB and 2, it will be appreciated that a processing approach shown in Figure 3 using two different polishing solutions would be better suited for processing the thin copper layer and the barrier layer of Figure IB, and a processing approach using three polishing solution chemistries would be more appropriate for the removal of the thicker copper layer and barrier layer of Figure 2. Alternately, two polishing solutions may be used for the thicker copper, but pressure on the wafer may be increased to increase the removal rate of the first solution until a certain thickness of copper (such as two thirds) is removed. Then the pressure may be reduced, still using the first solution to remove the remaining copper. The second solution is then used to polish the barrier layer.

[0051] Figure 3 is a flowchart of at least one embodiment of the invention using separate polishing solution lines. Process 20 is one way of implementing process 10 (of Figure IE) using two separate polishing solution lines. A wafer (or group of wafers) is positioned for polishing (block 200). Then, a first polishing solution line, polishing solution line #1 , is turned on in order to supply polishing solution to the polishing pad (block 210), see also Figures 6A-B. The polishing solution supplied by the polishing solution line #1 (for instance, CPS-08) would be used to polish the copper layer 12 down to its endpoint. The polishing solution line #1 would be turned (kept) on until the copper endpoint is reached (checked at block 220). Once the copper endpoint is reached, polishing solution line #1 is turned off (block 230). In order to clean the pad off the polishing solution from line #1 , the head holding the wafer may be lifted above the pad and a de-ionized (DI) water rinse is applied to the wafer which then bounces off the wafer surface and falls onto the pad (block 235). Also, the wafer 1 1 is spun and, if desired, excess solution removed by blowing a fluid such as air (block 235).

[0052] Once the pad and wafer 1 1 are cleaned, polishing solution line #2 is turned on

(block 240). The polishing solution supplied by the polishing solution line #2 would be used to polish the barrier layer 15 (such as tantalum) from the wafer The polishing solution line #2 would be turned (kept) on until the baiπer layer 15 endpoint is reached (checked at block 250) Once the endpoint is reached, polishing solution line #2 is turned off (block 255) In order to clean the pad and wafer 1 1 of the polishing solution from line #2, the head holding the wafer is now lifted above the pad and a DI water rinse is applied to the wafer 1 1 (block 260) Then wafer can be spun to remove excess solution The water from the rinse bounces off the wafer 1 1 and falls onto the pad thereby cleaning it Then the pad is blown to remove excess solution Once the pad and wafer 11 are cleaned, the next wafer (or gioup) is loaded (block 270) and process 20 is repeated from block 200 on for the newly loaded wafer(s)

[0053] Figure 4 is a flowchart of at least one embodiment ol the invention using separate polishing solution lines Process 30 is anothei polishing process using the same pad and two separate polishing solution lines A wafer (or group of wafers) such as wafer 1 1 is positioned for polishing (block 300) Then, both polishing solution lines, polishing solution line #1 and polishing solution line #2, are turned on in order to supply polishing solution to the polishing pad (block 3 10), see also Figures 6 A-B The components supplied by the polishing solution lines 1 and 2 would be used to polish the copper layer 12 from the wafer 1 1 The polishing solution line #1 supplies an oxidizer (such as hydrogen peroxide), a complexing reagent and inhibitor Polishing solution line #2 supplies a complexing reagent and inhibitor but no oxidizer [0054] Complexing reagents include chemicals such as organic acids and amines while the inhibitor is typically benzotπazolc (BTA) Complexing reagents work to increase the rate of etching/polishing, while the inhibitor decreases this rate The inhibitor settles in the region of the features 16 The inhibitor protects the surface of the copper in the features so that the complexing reagent does not exceedingly polish into these regions This helps to prevent dishing by ensuring a low static etching rate of the polishing solution even in the absence of mechanical action by the pad Even though both polishing solution lines are on, the components supplied by polishing solution line #2 would not have adverse impact on the polishing of copper since the components of each line share many commonalties There is thus limited chance of interactions between the polishing solutions of the two lines The removal (polishing) rate of copper increases with the concentration of oxidizer in the polishing solution and reaches a peak The removal of barrier layer material such as tantalum howevei, is less dependent on oxidizer concentration and depends more upon mechanical abrasion [0055] The above rinse step between copper and tantalum polishing for the same wafer is to ensure minimum interaction between the two types of the polishing solutions However, if the two polishing solutions are compatible, no rinse or clean is needed between copper and tantalum polishing, that is, the same wafer is polished all the way from copper to tantalum without a rinse step in between, except that the polishing solution line is switched from copper polishing solution to tantalum polishing solution In another option when single step polishing solution is used to polish both copper and tantalum, the two polishing solutions can be simplified into a single polishing solution line

[0056] The polishing solution lines #1 and #2 would be turned (kept) on until the copper endpoint is reached (checked at block 320) Once the endpoint is ieached, polishing solution line #1 is turned off (block 330) Since the polishing solutions in polishing solution lines #1 and #2 are somewhat compatible, a DI rinse cleaning and then spinning of the wafer or air blowing on the pad to remove the previous solution and DI rinse are optional but may not be needed Polishing solution line #2 would thus remain on The polishing solution supplied by the polishing solution line #2 would be used to polish the barrier (tantalum) layer 15 from the wafer 1 1 Once the tantalum endpoint is reached, polishing solution line #2 is turned off (block 355) In order to clean the wafer of the polishing solution from line #2, a DI water rinse and subsequent spinning to remove excess solution is applied (block 360) Once the wafer and pad are cleaned, the next wafer (or group) is loaded (block 370) and process 30 is repeated from block 300 on for the newly loaded wafer(s)

[0057] Figure 5 is a flowchart of at least one embodiment of the invention using a component line and oxidizer line Process 40 is another polishing process using the same pad and two separate lines, one containing polishing solution and the other, an oxidizer A wafer (or group of wafers) is positioned for polishing (block 400) Then, both lines, the polishing solution line and oxidizer line, are turned on in order to supply polishing solution and oxidizer to the polishing pad (block 410) The components supplied by the polishing solution line and the oxidizer line would be used to polish the coppei layer 12 from the wafei The polishing solution line supplies a complexing reagent and inhibitor The oxidizer line supplies an oxidizer such as hydrogen peroxide The removal (polishing) of copper increases with the increasing oxidizer concentration and reaches a peak The removal of tantalum however, is less dependent on oxidizer concentration and depends more upon mechanical abrasion [0058] The polishing solution line and oxidizer line would be turned (kept) on until the copper endpoint is reached (checked at block 420). Once the endpoint is reached, the oxidizer line is turned off (block 430). Since the solutions in the polishing solution and oxidizer lines are somewhat compatible, a DI rinse and spin of the wafer and air blowing of the pad may not be needed. The polishing solution line would still remain on. The polishing solution supplied by the polishing solution line would then be used to polish the tantalum layer down to its endpoint (the top of the field). Once the tantalum endpoint is reached, polishing solution line is turned off (block 455). Some over-polishing beyond the endpoint may be used to clear possible residue. In order to clean the wafer, a DI water rinse is applied to the wafer while the wafer is spinning (block 460). This also impacts upon and cleans the pad. Once the pad and wafer are cleaned, the next wafer (or group) is loaded (block 470) and process 40 is repeated from block 400 on for the newly loaded wafer(s).

[0059] Figures 6A-B illustrate a side view and a plan view of a polishing station configured in accordance with one or more embodiments of the invention. The wafer polishing station 50 includes a number of polishing components and a wafer housing 540 or wafer carrier head. The wafer housing 540 securely positions a wafer 550 so that a front face 560 of the wafer is fully exposed. The polishing station 50 includes a polishing pad 510 for polishing the front face 560, a mechanism (not shown) for driving the polishing pad 510 in a bi-directional linear or reciprocating (forward and reverse) motion, and a support plate 520 for supplying a fluid support to the back side of the pad 510 as the pad 510 polishes the exposed wafer surface 560. Bidirectional linear motion is also known as reverse linear motion. The underside of the polishing pad 510 may be additionally attached to a flexible but firm material (not shown) for supporting the pad 510. The polishing pad 510 is used to polish both copper and barrier (e.g. tantalum) layers of face 560. The use of a single pad for both layers of exposed wafer surface 560 eliminates the need for separate use of multiple pads and also, perhaps, of multiple polishing stations. The polishing pad 510 may be abrasive free such as a polymeric pad or may be a fixed abrasive pad. Since tantalum and copper layers have differing characteristics, if the same pad is to be used for polishing both, different polishing solutions would have to be used. It is noted that a bi-directional linear polisher as described is preferably used as the polishing station 50, such as described in U.S. Patent No. 6,103,628 and U.S. Patent Application No. 09/684,059, both of which are hereby expressly incoφorated herein by reference. When used as such, the polishing pad is preferably a belt that has a portion of the belt in the processing area that moves in a bidirectional direction, which may or may not contain fixed abrasives thereon, and which is preferably levitated in a polishing area above a platen support Further, the belt may be incrementally moved, so that the same belt, but a different portion of the belt (which different portion may or may not overlap with the previously used portion in the processing area) is used at different times, which different times may or may not be distinguished by the type of processing solution being used

[0060] Though the above-described type of polishing station is presently preferred, the present invention, howevei, is not limited to using such a polishing station Rathci, the processes described herein can be used with other CMP polishing stations, including those that use a linearly rotating belt, a stationary polishing pad with a moving wafer, a rotating polishing pad that moves against a stationary or rotating wafer, or others Further, pads that are thin with little rigidity, as well as pads that are thicker or more rigid can be used, depending upon the desired effect There may or may not be supporting plates behind the pads [0061] The polishing solutions and rinsing solution used during the polishing are preferably supplied to both sides of the polishing station 50 that uses a bi-directional linear polisher by two or more polishing solution lines, such as line #1 and line #2 In at least one embodiment of the invention, polishing solution line #1 comprises a left-side supply line 12 and right side supply line 51 1 Similarly, polishing solution line #2 comprises a left-side supply line 514 and right side supply line 513 Supply lines 51 1 and 513 supply the right side of the polishing station 50 while supply lines 512 and 514 supply the left-side of the polishing station 50 Although not shown in the Figures 6A-B and 7A-B, it will be appreciated that the polishing station may have more than two polishing solution lines such as line #3 (not shown) that is similarly configured and furnished with separate supply lines as the othei lines #1 and #2 This configuration having the line #3 may be used with the embodiment described in connection with Figure IF Alternately, the number of nozzles may be kept the same but valves may be used to bring different polishing solutions through the same nozzles Various ways of achieving this are apparent to those skilled in the art

[0062] Polishing of the wafer 550 will now be described in accordance with various embodiments of the invention In one embodiment, after the wafer 550 is loaded into housing 540 and positioned over-polishing station 50, polishing solution line #1 is turned on to supply polishing solution to the right and left sides of the pad 510. In turning on polishing solution line #1, right side supply line 51 1 and left side supply line 512 will be actively providing polishing solution to the pad 510. Right side supply line 513 and left side supply line 514 would be off. The pad 510 is driven by mechanism 530 and this motion, coupled with the chemical reactiveness of the polishing solution from polishing solution line #1 upon the surface 560 of wafer 550, serves to polish copper from surface 560. It should be noted that for the system of Figure 6A and 6B the polishing solution delivery can also be coupled with the motion of the pad. For example, polishing solution may be delivered from nozzle 51 1 as the pad moves to the left and delivered from nozzle 512 when the pad is moving to the right In this way, the delivered polishing solution is always moved towards the wafer by the moving pad. Waste of polishing solution is minimized. Once the copper endpoint is reached, the polishing solution line #1 will be turned off. This entails cutting off or deactivating supply lines 51 1 and 512. [0063] To remove the remaining polishing solution from the front surface 560 of the wafer 550 and the pad 510, a de-ionized water nozzle injects water to the wafer surface when the wafer is lifted above the pad. The water is bounced off the wafer onto the pad surface and cleans both the wafer and pad surface. Wafer may preferably be rotated during this cleaning step. After water spray, a blower 580 blows air onto the pad 510 to remove excess solution. Next, polishing solution line #2 will be turned on, and thus right side supply line 513 and left side supply line 514 would be actively providing polishing solution to the right and left sides, respectively, of pad 510. The polishing solution supplied in polishing solution line #2 is designed for the polishing of the barrier (e.g. tantalum) layer. The motion of pad 510 and polishing solution from polishing solution line #2 against the surface 560 serves to polish tantalum from the surface 560 of wafer 550. Once the tantalum endpoint is reached, polishing solution line #2 is turned off (supply lines 513 and 514 are deactivated), the pad is cleaned (using rinser 570) and excess solution is removed using blower 580) and the next wafer is loaded into housing 540 for polishing. Rinser 570 and blower 580 may be implemented in a variety of ways including by use of high-pressure nozzles.

[0064] Exemplary types of polishing solutions and pads suitable for such polishing have been discussed above. In some embodiments of the invention, polishing solution line #1 would supply a complexing reagent, an inhibitor and an oxidizer. Polishing solution line #2 would supply a complexing reagent and inhibitor, but no oxidizer or very low concentration of oxidizer. In such embodiments, both polishing solution lines #1 and #2 could be turned on (and hence all four supply lines 51 1, 512, 513 and 514 would be on) during the polishing of copper After copper polishing, polishing solution line #1 could be turned off, leaving active (on) only supply lines 513 and 514 of polishing solution line #2 In yet other embodiments, polishing solution line #2 would carry the complexing reagent and inhibitor while polishing solution line #1 would carry just the oxidizer Again, both lines #1 and #2 could be turned on during copper polishing and then polishing solution line #1 could be turned off for tantalum polishing [0065] Figures 7A-B illustrate a detailed view of wafer polishing using a pad as described in the above embodiments Referring back to Figui e IB wafer 1 1 that is to be polished has plurality of layers, including a copper layer 12 and a barrier layer 15 Prior to polishing, an exposed front face 645 will expose the copper layer 12 to polishing first After the copper layer 12 has been polished, the resulting wafer 11 will expose the barrier layer 15 laying underneath (see Figure IC) The wafer 1 1 is positioned so that its front face 645 abuts against the surface of a polishing pad 640

[0066] With reference to Figure 7A, which shows the polishing station in polishing mode, the polishing solutions are supplied on both sides of the polishing pad 640 by two polishing solution lines, line #1 and line #2 In at least one embodiment of the invention, polishing solution line #1 comprises a left side supply line 612 and right-side supply line 61 1 Similarly, polishing solution line #2 comprises a left side supply line 614 and right-side supply line 613 Supply lines 611 and 613 supply the right-side of the polishing pad 640 while supply lines 612 and 614 supply the left side of the polishing pad 640

[0067] In one embodiment, a polishing solution from line #1 containing a chemicals that oxidize and chemically mechanically remove copper layer 12 of surface 645 is supplied between the wafer 1 1 and the polishing pad 640 After copper layer 12 is polished, polishing solution line #1 is turned off The wafer 1 1 is raised above the pad 640 as shown in Figure 7B While the wafer 11 is in the position shown in Figure 7B, a deionized water rinse (containing 0-0 01% corrosion inhibitor) from rinser 670 cleans the polishing solution from the wafer 1 1 and then cleans the polishing solution from the pad 640 by bouncing off of the wafei 1 1 (upon its front surface 645) and onto the pad The water which cleans the pad may remain on the pad which may adversely dilute the next polishing solution The blower 680 blows an onto the pad to minimize the dilution of the next polishing solution [0068] After cleaning, the wafer 1 1 returns to the position shown in Figure 7A Then polishing solution line #2 is turned on supplying polishing solution to polish barrier layer 15, which becomes exposed after copper layer 12 is polished off The action of pad 640 together with polishing solution from polishing solution line #2 acts to polish layer 15 from wafer 1 1 The wafer may then be returned to the position of Figure 7A for a final rinse to the wafer 1 1 and pad 640 In other embodiments of the invention, polishing solution line # 1 and polishing solution line #2 may be both turned on initially In such a case, polishing solution line #1 would contain the same components carried by polishing solution #2 but would also carry an additional oxidizer component Both polishing solution lines #1 and #2 would polish copper layei 12 After copper layer 12 is polished, polishing solution line #1 is turned off leaving polishing solution line #2 on Polishing solution line #2, which carries no oxidizer or very low concentration of oxidizer, would polish barrier layer 15 In still other embodiments of the invention, polishing solution line #2 would carry the components for polishing (such as complexing reagent and an inhibitor) while polishing solution line #1 carries only the oxidizer Again, in such a case, polishing solution lines #1 and #2 would be on during the polishing of copper layer 12, and then the oxidizer line (polishing solution line #1) would be turned off during polishing of barrier layer 15 thereafter When both lines are on in this manner, good mixing on the pad of the oxidizer from polishing solution line #1 and the components fiom line #2 would be needed in order to ensure a uniform distnbution of the whole solution on the pad [0069] In one or more embodiments of the invention, the polishing pad is described as being composed of one typo, either fixed abrasive or polymeric In alternate embodiments of the invention, it may be possible to also partition or section a single pad into one or more fixed abrasive sections and one or more polymeric sections As each section of the pad is needed for best process performance for chemical mechanical polishing of a specific layer on the wafer, the pad may be advanced or retracted to place the appropnate section of the pad in position to polish the wafer Thus, a fixed abrasive section could be used when polishing the copper layer while a softer polymeric sections could be used in polishing the barrier layer The reciprocal motion and the specific design of the preferred system in Figure 6A allows such flexibility [0070] As previously stated, the polishing techniques described herein may be performed using a single polishing pad in a single CMP station or using multiple polishing pads in multiple CMP stations As described above, in one embodiment, copper layer and barrier layer removal may be performed in the same CMP station. In the embodiment, removal of the copper layer may be performed before barrier layer removal. According to this process sequence, in a first step, bulk copper may be removed down to barrier layer using a fixed abrasive polishing pad. In this copper removal step the polishing solution may or may not contain particles. In a second step, the fixed abrasive polishing pad may be used in combination with a polishing solution with solid particles to remove the remaining copper layer from the surface of the barrier layer while a down force is applied to the workpiece. This downforce may be a relatively low down force. Following these steps, the barrier layer is removed. Removal of the barrier layer may utilize a portion of the polishing pad that is made a soft polymer. That is, the polishing pad may have one portion that has a fixed abrasive and a second portion that is made of a soft polymer. A tantalum selective polishing solution may be delivered to the polishing pad to remove the barrier layer while a low down force is applied to the work piece.

[0071] In another embodiment, removal of the copper and barrier layers may be performed using an integrated CMP system (integrated CMP tool) on separate polishing pads. In an embodiment of the invention, the different pads are located in separate CMP stations within the same one tool. An exemplary CMP station suitable for use in the integrated CMP system is described above with reference to Fig. 6A and also with reference to "Advanced Chemical Mechanical Polishing System with Smart Endpoint Detection", U.S. Ser. No. 10/346,425 filed January 17, 2003 (NT-278-US), incoφorated herein by reference. By incoφorating multiple CMP stations into one integrated tool it is possible to make improvements in differential polishing of copper and barrier layers.

[0072] Figure 8 depicts a block diagram of an integrated CMP system 800 having multiple CMP stations, according to an embodiment of the invention. In the embodiment depicted, the integrated CMP system 800 has a first CMP station 810 and a second CMP station 820. In the first CMP station 810, in a first polishing sequence, the copper layer is removed using a first polishing pad (not shown) and a first polishing solution. In one aspect of the invention, the first polishing pad is a fixed abrasive polishing pad and the first polishing solution contains abrasive and/or lubricating particles. In this aspect, the abrasive particles may act as a lubricant for polishing when combined with the fixed abrasive polishing pad. Abrasive particles are solid particles in a slurry. During the first polishing sequence, the wafer is lowered onto the first polishing pad and the first polishing solution is delivered onto the first polishing pad. The first polishing pad is moved over the support plate (see Figure 6A) while a fluid pressure is applied under the first polishing pad. Once the copper layer is removed down to the barrier layer on the surface of the wafer (see Figure IC), a barrier layer removal process (second polishing sequence) is performed in the second CMP station 820. The second CMP station 820 has a second polishing pad (not shown) and uses a second polishing solution. The second polishing pad may be a polymeric / non-fixed abrasive polishing pad. For example, the second polishing pad may be made of a soft polymeric material such as polyurethane. In one aspect of the invention, a selective polishing solution is used as the second polishing solution during the barrier layer removal process. In this aspect, the selective polishing solution is delivered onto a polymeric polishing pad suitable for barrier material removal and the pad is moved for polishing. A fluid pressure may be applied under the second polishing pad. Using these techniques may minimize the stress on the wafer and resulting delamination. These techniques also may minimize dishing and scratches. The use of two CMP stations in the integrated CMP system is exemplary only. Integrated CMP systems with additional CMP stations are also contemplated. [0073] Figure 9 is a flowchart of an embodiment of a method of polishing copper and barrier layers of a semiconductor wafer using an integrated CMP system having multiple CMP stations, such as the CMP system described with reference to Figure 8. At step 910, a first layer of a semiconductor wafer is polished using a polishing solution on a first portion of polishing pad. In one embodiment, the first layer is comprised of copper. At step 920, a second layer of the semiconductor wafer is polished using a polishing solution on a second portion of polishing pad. In one embodiment, the second layer is comprised of tantalum. It shall be understood that more than two layers can be polished, and more than two portions of polishing pad may be used. The polishing solutions used to polish the different layers may be the same polishing solution or different polishing solutions. The different portions of polishing pad may be located on the same polishing pad or on different polishing pads. The respective polishing solution and polishing pad are preferably designed and/or suited for polishing a particular layer of the wafer. For example, the solution and pad may be suited to polish copper, or suited to polish a barrier layer, such as tantalum.

[0074] In accordance with the present invention, only one wafer is generally polished during a single time. Although the present invention is adapted to polish a single wafer at one time, one skilled in the art may modify the preferred embodiment of the invention in order to polish multiple wafers at one time. It is to be understood that in the foregoing discussion and appended claims, the terms "wafer surface" and "surface of the wafer" include, but are not limited to, the surface of the wafer prior to processing and the surface of any layer formed on the wafer, including oxidized metals, oxides, spun on glass, ceramics, etc. Further, while the above discusses primarily the polishing of two layers, one metal layer (such as copper) and barrier layer such as Ta, any number and manner of to layers may be polished using the techniques described herein such as a fixed abrasive pad by supplying number of polishing solutions as appropriate for each of those layers. It shall be understood that removing a layer from the surface of a semiconductor wafer is synonymous with polishing a layer on the surface of the semiconductor wafer. In the various methods described herein, the terms "block" and "step" both refer to a processing step.

[0075] Although various preferred embodiments of the present invention have been disclosed for illustrative puφoses, those skilled in the art will appreciate that various modifications, additions and/or substitutions are possible without departing from the scope and spirit of the present invention as disclosed in the claims.

Claims

1. A method of polishing a plurality of layers on a surface of a semiconductor wafer, the method comprising the steps of: polishing a first layer using a polishing solution on a first portion of polishing pad; and polishing another layer using a polishing solution on another portion of polishing pad.

2. A method according to claim 1 , wherein the polishing solution used to polish the first layer is different from the polishing solution used to polish the another layer.

3. A method according to claim 2, wherein the first layer is copper and the polishing solution used to polish the first layer is suitable for polishing copper and wherein the another layer is a barrier layer and the polishing solution used to polish the another layer is suitable for polishing the barrier layer.

4. A method according to claim 1, wherein the first portion of polishing pad and the another portion of polishing pad are portions located on different polishing pads.

5. A method according to claim 2, wherein the first portion of polishing pad and the another portion of polishing pad are portions located on different polishing pads.

6. A method according to claim 1, wherein the first layer is copper and the first portion of polishing pad is suitable for polishing copper and wherein the another layer is a barrier layer and the another portion of polishing pad is suitable for polishing the barrier layer.

7. A method according to claim 3, wherein the first layer is copper and the first portion of polishing pad is suitable for polishing copper and wherein the another layer is a barrier layer and the another portion of polishing pad is suitable for polishing a barrier layer.

8. A method according to claim 2, further comprising the step of cleaning the polishing solution used to polish the first layer from the wafer and the first portion of polishing pad before polishing the another layer.

9. A method according to claim 8, further comprising the steps of: supplying the polishing solution used to polish the first layer to the first portion of polishing pad; and supplying the polishing solution used to polish the another layer to the another portion of polishing pad after the polishing solution used to polish the first layer is cleaned off.

10. A method according to claim 1, wherein the polishing of the first layer and the polishing of the another layer are performed using reverse linear polishing and by moving a portion of polishing pad with respect to a support platen, the support platen being used to support the portion of polishing pad by supplying fluid to a back side of the portion of polishing pad.

11. A method according to claim 1, further comprising the step of polishing said first layer using another polishing solution.

12. A method of polishing a first and second layers on a surface of a semiconductor wafer, the method comprising the steps of: polishing said first layer using a first polishing solution on a pad; and polishing said second layer using a second polishing solution on the same said pad.

13. A method according to claim 12, further comprising the step of cleaning said first polishing solution from said wafer and said pad before polishing said second layer.

14. A method according to claim 13, wherein said first polishing solution is cleaned off after an endpoint of said first layer is reached.

15. A method according to claim 13, further comprising the steps of: supplying said first polishing solution to said pad; and supplying said second polishing solution to said pad after said first polishing solution is cleaned off.

16. A method according to claim 13, wherein said second polishing solution is cleaned off after an endpoint of said second layer is reached.

17. A method according to claim 13, wherein said cleaning said first polishing solution includes: raising said wafer from said pad; rinsing said surface of said wafer with a rinsing solution; removing excess rinsing solution after rinsing; and lowering said wafer to said pad.

18. A method according to claim 12, wherein said polishing of first and second layers is performed using reverse linear polishing.

19. A method according to claim 12, wherein said polishing said first layer using said first polishing solution continues until a first layer endpoint is reached; and wherein said polishing said second layer using said second polishing solution continues until a second layer endpoint is reached.

20. A method according to claim 12, further comprising polishing said first layer using another polishing solution.

21. An integrated semiconductor wafer processing system including a plurality of processing stations, comprising: a first polishing pad to polish a first layer of a semiconductor wafer; and another polishing pad to polish another layer of the semiconductor wafer.

The integrated semiconductor wafer processing system of claim 21, further comprising a first polishing solution line to deliver a polishing solution to the first polishing pad, and another polishing solution line to deliver a polishing solution to the another polishing pad

The integrated semiconductor wafer processing system of claim 22, wherein the polishing solution delivered to the fust polishing pad is different fiom the polishing solution delivered to the another polishing pad

The integrated semiconductor wafer processing system of claim 23, wherein the first polishing pad is a fixed abrasive polishing pad and the polishing solution delivered to the first polishing pad includes abrasive particles

The integrated semiconductor wafer processing system of claim 21, wherein the another polishing pad is a polymeric polishing pad without fixed abrasives

The integrated semiconductor wafer processing system of claim 23, wherein the polishing solution delivered to the another polishing pad is a barrier layer removal slurry comprising about 0 1% to about 5% abrasive particles, barrier removal chemical, and a pH adjusting component, wherein the solution has a pH between 7 and 12

The integrated semiconductor wafer processing system of claim 23, wherein the polishing solution delivered to the another polishing pad is a slurry comprising abrasive particles concentration from about 1% to about 2%, wherein the abrasive particles are selected from the group consisting of fumed silica, colloidal silica and cena, hydroxylamine, a corrosion inhibitor, and a pH adjusting component selected from the group consisting of KOH, NaOH, NH₄OH and TMAH, wherein the solution has a pH between about 9 and about 10.

28. The integrated semiconductor wafer processing system of claim 21, further comprising: a first CMP station which comprises the first polishing pad; and another CMP station which comprises the another polishing pad.

29. The integrated semiconductor wafer processing system of claim 21, wherein the first polishing pad and the another polishing pad polish the wafer using reverse linear motion.

30. A chemical mechanical polishing device for polishing a surface of a semiconductor wafer, comprising: a polisher that includes a single pad that polishes a first layer and a second layer of the surface of the wafer; and a polishing solution distribution system providing a first polishing solution to said single pad for polishing said first layer during a first interval and a second polishing to solution to said single pad during a second interval for polishing said second layer.

31. A chemical mechanical polishing device according to claim 30, wherein said pad is a fixed abrasive pad.

32. A chemical mechanical polishing device according to claim 31, wherein said first and second polishing solutions do not contain any abrasive particles.

33. A chemical mechanical polishing device according to claim 31 , wherein said first and second polishing solutions contain less than 5% abrasive particles.

34. A chemical mechanical polishing device according to claim 30, wherein the chemical mechanical device is a reverse linear chemical mechanical polisher. A chemical mechanical polishing device according to claim 30, further comprising a system to clean the pad and the wafer between the first and second intervals

A chemical mechanical polishing device according to claim 30, wherein said first layer comprises copper and said second layer comprises tantalum

A chemical mechanical polishing device according to claim 30, wherein said first polishing solution compπses an oxidizer, a complexing reagent, and a corrosion inlubitor and said second polishing solution comprises a complexing reagent and a coπosion inhibitor

A chemical mechanical polishing device according to claim 30, wherein the second polishing solution is a barrier layer removal slurry comprising about 0 1% to about 5% abrasive particles, barrier removal chemical, and a pH adjusting component, wherein the solution has a pH between 7 and 12

A chemical mechanical polishing device according to claim 30, wherein the second polishing solution is a slurry comprising abrasive particles concentration from about 1% to about 2%, wherein the abrasive particles are selected from the group consisting of fumed silica, colloidal silica and cena, hydroxylamine, a corrosion inhibitor, and a pH adjusting component selected from the group consisting of KOH, NaOH, NH₄OH and TMAH, wherein the solution has a pH between about 9 and about 10

A chemical mechanical polishing device according to claim 30, wherein said single pad includes a first portion and a second portion, said first portion suitable to polish said fust layer and said second portion suitable to polish said second layer