DE60203031D1 - Membranventil - Google Patents

Membranventil

Info

Publication number: DE60203031D1
Authority: DE; Germany
Prior art keywords: diaphragm valve; diaphragm; valve
Prior art date: 2001-07-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE60203031T

Other languages

English (en)

Other versions

DE60203031T2 (de

Inventor

Tomohiro Nakata

Michio Yamaji

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fujikin Inc

Original Assignee

Fujikin Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-07-31

Filing date

2002-06-26

Publication date

2005-03-31

2002-06-26 Application filed by Fujikin Inc filed Critical Fujikin Inc

2005-03-31 Publication of DE60203031D1 publication Critical patent/DE60203031D1/de

2006-03-02 Application granted granted Critical

2006-03-02 Publication of DE60203031T2 publication Critical patent/DE60203031T2/de

2022-06-27 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Fluid-Driven Valves (AREA)
Lift Valve (AREA)
Details Of Valves (AREA)
Valve Housings (AREA)

DE60203031T 2001-07-31 2002-06-26 Membranventil Expired - Fee Related DE60203031T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2001231031A JP4700234B2 (ja)	2001-07-31	2001-07-31	ダイヤフラム弁
JP2001231031		2001-07-31

Publications (2)

Publication Number	Publication Date
DE60203031D1 true DE60203031D1 (de)	2005-03-31
DE60203031T2 DE60203031T2 (de)	2006-03-02

Family

ID=19063142

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60203031T Expired - Fee Related DE60203031T2 (de)	2001-07-31	2002-06-26	Membranventil

Country Status (6)

Country	Link
US (1)	US6786471B2 (de)
EP (1)	EP1281898B1 (de)
JP (1)	JP4700234B2 (de)
KR (1)	KR100480759B1 (de)
DE (1)	DE60203031T2 (de)
TW (1)	TW531620B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4700234B2 (ja) *	2001-07-31	2011-06-15	株式会社フジキン	ダイヤフラム弁
EP1613882A2 (de) *	2003-04-14	2006-01-11	Swagelok Company	Membranventilsitz
US7021750B2 (en)	2003-04-29	2006-04-04	Hewlett-Packard Development Company, L.P.	Image forming devices and valves that may be used in image forming devices
JP3861206B2 (ja)	2003-12-08	2006-12-20	株式会社フジキン	流体制御器
US7686280B2 (en) *	2005-12-28	2010-03-30	Circor Instrumentation Technologies, Inc.	Removable valve seat member for diaphragm valve
EP2003379A1 (de) *	2007-06-12	2008-12-17	Luxembourg Patent Company S.A.	Hochdruckmembranventil mit austauschbarer Sitzanordnung
US20090095935A1 (en) *	2007-10-10	2009-04-16	Wlodarczyk Anthony M	Irrigation valve
EP2224066A1 (de) *	2009-02-25	2010-09-01	Studor S.A.	Entlüftungsventil
JP5243513B2 (ja) *	2010-10-25	2013-07-24	Ｃｋｄ株式会社	流体制御弁の弁座構造
JP5802532B2 (ja) *	2011-12-05	2015-10-28	株式会社フジキン	ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
JP2013119877A (ja) *	2011-12-06	2013-06-17	Fujikin Inc	ダイヤフラム弁
KR101229073B1 (ko) *	2012-03-07	2013-02-04	신흥공업(주)	가스토치용 밸브 어셈블리
JP6002448B2 (ja)	2012-05-31	2016-10-05	株式会社フジキン	ダイヤフラム弁
JP5933370B2 (ja) *	2012-06-29	2016-06-08	株式会社フジキン	ダイヤフラム弁
US9454158B2 (en)	2013-03-15	2016-09-27	Bhushan Somani	Real time diagnostics for flow controller systems and methods
US10983538B2 (en)	2017-02-27	2021-04-20	Flow Devices And Systems Inc.	Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7025915B2 (ja) *	2017-12-18	2022-02-25	株式会社キッツエスシーティー	ダイヤフラムバルブ
WO2019193978A1 (ja) *	2018-04-06	2019-10-10	株式会社フジキン	バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
US11236846B1 (en) *	2019-07-11	2022-02-01	Facebook Technologies, Llc	Fluidic control: using exhaust as a control mechanism
JPWO2021192753A1 (de) *	2020-03-26	2021-09-30
KR102369516B1 (ko) *	2020-06-19	2022-03-03	박래성	분리형 시트부를 구비한 다이어프램 밸브
KR20230085201A (ko)	2020-10-20	2023-06-13	가부시키가이샤 후지킨	다이어프램 밸브
EP4196703A1 (de) *	2020-11-30	2023-06-21	Parker-Hannifin Corporation	Zweiachsige sitzhaltevorrichtung
KR20230012754A (ko)	2021-07-16	2023-01-26	디케이락 주식회사	다이어프램 밸브
US11761547B1 (en) *	2022-04-07	2023-09-19	Horiba Stec, Co., Ltd.	Valve orifice insert

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4867201A (en) *	1989-03-06	1989-09-19	Harsco Corporation	Parallel-motion dual-diaphragm valve
JPH0329515A (ja) *	1989-06-27	1991-02-07	Rohm Co Ltd	矩形波信号発生回路
US5131627A (en) *	1990-10-17	1992-07-21	Nupro Company	Diaphragm valve
JPH086828B2 (ja) *	1991-08-09	1996-01-29	株式会社ベンカン	メタルダイヤフラム弁
US5215286A (en) *	1992-05-26	1993-06-01	Nupro Company	High pressure diaphragm valve
JPH0694142A (ja) *	1992-09-14	1994-04-05	Motoyama Seisakusho:Kk	空気圧作動式メタルダイヤフラム弁
JPH06193747A (ja) *	1992-12-25	1994-07-15	Hitachi Metals Ltd	メタルダイアフラム弁
US5442254A (en)	1993-05-04	1995-08-15	Motorola, Inc.	Fluorescent device with quantum contained particle screen
JP3280119B2 (ja) *	1993-06-02	2002-04-30	清原まさ子	ダイヤフラム弁
JP3017398B2 (ja) *	1994-06-29	2000-03-06	株式会社本山製作所	ダイヤフラム弁構造及びガス配管系
JP2977766B2 (ja) *	1996-07-10	1999-11-15	株式会社ベンカン	リーク弁
US6092550A (en) *	1997-02-03	2000-07-25	Swagelok Marketing Co.	Diaphragm valve seat arrangement
JP4700234B2 (ja) *	2001-07-31	2011-06-15	株式会社フジキン	ダイヤフラム弁

2001
- 2001-07-31 JP JP2001231031A patent/JP4700234B2/ja not_active Expired - Lifetime
2002
- 2002-03-29 TW TW091106363A patent/TW531620B/zh not_active IP Right Cessation
- 2002-04-10 KR KR10-2002-0019446A patent/KR100480759B1/ko active IP Right Grant
- 2002-06-25 US US10/178,501 patent/US6786471B2/en not_active Expired - Lifetime
- 2002-06-26 EP EP02254453A patent/EP1281898B1/de not_active Expired - Lifetime
- 2002-06-26 DE DE60203031T patent/DE60203031T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP1281898A3 (de)	2003-06-04
KR100480759B1 (ko)	2005-04-06
US6786471B2 (en)	2004-09-07
TW531620B (en)	2003-05-11
US20030025099A1 (en)	2003-02-06
JP2003042314A (ja)	2003-02-13
KR20030012811A (ko)	2003-02-12
EP1281898B1 (de)	2005-02-23
EP1281898A2 (de)	2003-02-05
DE60203031T2 (de)	2006-03-02
JP4700234B2 (ja)	2011-06-15

Publication	Publication Date	Title
DE60112639D1 (de)	2005-09-22	Membranventil
DE60203031D1 (de)	2005-03-31	Membranventil
DE50201711D1 (de)	2005-01-13	Mikroventil
DE60236569D1 (de)	2010-07-15	Siliziumoxidmembran
DE60205469D1 (de)	2005-09-15	Ventil
DK1239199T3 (da)	2003-12-01	Ventilindretning
DE50201549D1 (de)	2004-12-23	Rückflussverhinderer
DE50104646D1 (de)	2005-01-05	Ventilanordnung
DE60215261T8 (de)	2009-06-04	Entspannungsventil
DE60105869D1 (de)	2004-11-04	Membranventil
DE50105468D1 (de)	2005-04-07	Klappenscheibenventil
DE60216695D1 (de)	2007-01-25	Entspannungsventil
DE60227906D1 (de)	2008-09-11	Membranpumpe
DE60214081D1 (de)	2006-10-05	Entspannungsventil
DE60218957D1 (de)	2007-05-03	Entspannungsventil
DE60214451T8 (de)	2007-05-10	Druckventil
DE60216848D1 (de)	2007-02-01	Entspannungsventil
DE60125509D1 (de)	2007-02-08	Drucksteuerventil
DE60214088D1 (de)	2006-10-05	Entspannungsventil
DE60203671D1 (de)	2005-05-19	Ventilgehäuse
DK1518067T3 (da)	2019-07-29	Bistabil membranventil
DE10153362B4 (de)	2005-04-28	Membranventil
DE50202766D1 (de)	2005-05-19	Ventilanordnung
DE60107247D1 (de)	2004-12-23	Drucksteuerventil
FR2821914B1 (fr)	2004-02-20	Vanne

Legal Events

Date	Code	Title	Description
2006-04-20	8364	No opposition during term of opposition
2010-04-22	8339	Ceased/non-payment of the annual fee