CN210886191U - Evaporation vacuum coating equipment - Google Patents
Evaporation vacuum coating equipment Download PDFInfo
- Publication number
- CN210886191U CN210886191U CN201921685693.7U CN201921685693U CN210886191U CN 210886191 U CN210886191 U CN 210886191U CN 201921685693 U CN201921685693 U CN 201921685693U CN 210886191 U CN210886191 U CN 210886191U
- Authority
- CN
- China
- Prior art keywords
- evaporation
- flexible film
- coating
- roller
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The application provides evaporation vacuum coating equipment, and belongs to the technical field of vacuum coating equipment. And the evaporation vacuum coating equipment is used for carrying out double-sided coating on the flexible film. The evaporation vacuum coating equipment comprises a chamber capable of providing a vacuum environment and a coating assembly arranged in the chamber. The coating assembly comprises a first evaporation mechanism, a first cooling main drum, a second evaporation mechanism and a second cooling main drum, wherein the first evaporation mechanism, the first cooling main drum, the second evaporation mechanism and the second cooling main drum are sequentially arranged along a conveying path of the flexible film and are used for coating the first surface of the flexible film. The evaporation vacuum coating equipment can carry out double-sided coating on the flexible film, can carry out coating and cooling firstly, can improve the phenomenon of local deformation of the flexible film, and can also improve the defects of wrinkles, plating blank lines and the like generated on the coating.
Description
Technical Field
The application relates to the technical field of vacuum evaporation equipment, in particular to evaporation vacuum coating equipment.
Background
Vacuum coating refers to the separation of atomic materials in a vacuum chamber from a heating source and striking the atomic materials on the surface of a flexible film to be coated. The cooling roller and the evaporation mechanism are arranged at the same position of the conveying path of the flexible film, namely when the vacuum winding coating equipment is used for coating the flexible film, the front surface of the flexible film at the same position is coated by the evaporation mechanism, and the back surface of the flexible film is tightly adhered to the cooling roller for cooling.
SUMMERY OF THE UTILITY MODEL
The application aims to provide evaporation vacuum coating equipment, which has the advantages that the coating effect of a flexible film is better, the phenomenon of local deformation of the flexible film can be improved, and the defects of wrinkles, plating blank lines and the like generated on a coating can be improved.
In a first aspect, an embodiment of the present application provides an evaporation vacuum coating apparatus for performing double-sided coating on a flexible film. The evaporation vacuum coating equipment comprises a chamber capable of providing a vacuum environment and a coating assembly arranged in the chamber. The coating assembly comprises a first evaporation mechanism, a first cooling main drum, a second evaporation mechanism and a second cooling main drum, wherein the first evaporation mechanism, the first cooling main drum, the second evaporation mechanism and the second cooling main drum are sequentially arranged along a conveying path of the flexible film and are used for coating the first surface of the flexible film.
Carry out the coating film respectively to the first surface and the second surface of flexible film through first coating by vaporization mechanism and second coating by vaporization mechanism, can once only accomplish two-sided coating, the coating film efficiency is higher. During film coating, a first evaporation mechanism can be used for performing first film coating on the first surface of the flexible film, then the first cooling main drum and the second surface of the flexible film are pasted with a roller, and the flexible film after the first film coating is cooled for the first time; and then, a second evaporation mechanism is used for coating a second surface of the flexible film for the second time, the second cooling main drum and the coated first surface of the flexible film are attached to a roller, and the flexible film coated for the second time is cooled for the second time. The coating and cooling are carried out separately, coating and cooling are carried out firstly, the flexible film and the film pasting effect of the cooling main drum are better, and wrinkling and deformation of the flexible film on the cooling main drum are reduced, so that the coating effect of the flexible film is better, the phenomenon of local deformation of the flexible film can be improved, and the defects of wrinkles, plating blank lines and the like on a coating of the flexible film can be improved.
In some possible embodiments, the coating assembly further includes an unwinding mechanism and a winding mechanism, the unwinding mechanism is located at the front end of the conveying path, and the winding mechanism is located at the rear end of the conveying path. Through the arrangement of the unwinding mechanism and the winding mechanism, a longer flexible film can be coated at one time, and the coating efficiency is improved.
In some possible embodiments, the transport path includes a first evaporation path, a first cooling path, a second evaporation path, and a second cooling path along the transport direction. The unwinding mechanism is located at the front end of the first evaporation path, the first evaporation mechanism is located on one side of the first evaporation path, the first cooling path passes through the peripheral surface of the first cooling main drum, the second evaporation mechanism is located on one side of the second evaporation path, the second cooling path passes through the peripheral surface of the second cooling main drum, and the winding mechanism is located at the rear end of the second cooling path.
The coating of the flexible film is realized by limiting the position relationship between the first evaporation mechanism and the first evaporation path and the position relationship between the second evaporation mechanism and the second evaporation path.
In some possible embodiments, the first cooling path is routed after passing through the first cooling main drum, the first vapor deposition mechanism is located below the first vapor deposition path, and the second vapor deposition mechanism is located below the second vapor deposition path.
The conveying direction of the flexible film is changed through the first cooling main drum, so that the first evaporation mechanism is located below the first surface during film coating, and the second evaporation mechanism is located below the second surface, so that the effect of double-sided film coating is better.
In some possible embodiments, the first evaporation path passes through a first unwinding through-roller and a first flattening roller in sequence, the first unwinding through-roller and the first flattening roller are configured to place the flexible film in a horizontal state, and the first evaporation mechanism is disposed between the first unwinding through-roller and the first flattening roller.
When the first surface of the flexible film is coated by the first evaporation mechanism, the flexible film is in a horizontal state, so that the first coating on the first surface is more uniform, and the coating effect is better.
In some possible embodiments, the second evaporation path passes through a first guide roller and a second flattening roller in sequence, the first guide roller and the second flattening roller are configured to make the flexible film in a horizontal state, and the second evaporation mechanism is disposed between the first guide roller and the second flattening roller.
When the second evaporation mechanism is used for coating the second surface of the flexible film, the flexible film is in a horizontal state, so that the second coating on the second surface is more uniform, and the coating effect is better.
In some possible embodiments, the winding device further comprises a winding swing frame assembly, the winding swing frame assembly is arranged between the second cooling main drum and the winding mechanism, and the winding swing frame assembly can rotate to enable the winding swing frame assembly to keep a preset distance from the outermost layer of the flexible film wound on the winding mechanism.
Through the setting of rocker subassembly, conveniently carry out the rolling to the flexible membrane, and can make the face of rolling more level and more smooth.
In some possible embodiments, the rolling pendulum assembly includes a rolling pendulum body, and a first rolling over roller, a rolling flattening roller, a second rolling over roller, and a third rolling over roller installed on the rolling pendulum body and sequentially arranged along the conveying path, and the rolling pendulum body can rotate around the first rolling over roller to keep the third rolling over roller at a preset distance from the outermost layer of the flexible film wound on the rolling mechanism.
The distance between the outermost layer of the flexible film wound on the winding mechanism and the third winding roller can be always kept within a certain range, the length of the free film at the winding position is prevented from changing, and the film surface in the winding process is more smooth.
In some possible embodiments, the chamber has a top wall and opposite first and second side walls, the first side wall being provided with a first viewing window, the first cooling primary drum being provided adjacent to the first side wall. The second side wall is provided with a second window, and the second cooling main drum is arranged close to the second side wall. A third window is arranged on the top wall, and the winding mechanism is arranged close to the top wall.
Through the setting of window, can observe the transport condition and the coating film condition of the flexible membrane of cavity inside to monitor the state of flexible membrane at any time.
In some possible embodiments, the coating assembly further comprises a tension roller, and the conveying path sequentially passes through the first cooling main drum, the tension roller and the second evaporation mechanism.
The first evaporation mechanism carries out first film coating on the first surface of the flexible film to form a first coating, and the second evaporation mechanism carries out second film coating on the second surface of the flexible film to form a second coating. Through the effect of tension roll, the flexible membrane receives the tension the same when carrying out primary coating film and coating film for the second time to can make the thickness of first cladding material and second cladding material unanimous, two-sided coating film is more even, and the coating film effect is better.
The beneficial effects of the evaporation vacuum coating equipment that this application embodiment provided include: can realize double-sided coating to the flexible film at one time, improve coating efficiency. The phenomenon of local deformation of the flexible film can be improved, and the defects of wrinkles, plating blank lines and the like generated on the plating layer of the flexible film can also be improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments are briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive efforts and also belong to the protection scope of the present application.
FIG. 1 is a photograph of a coated layer of a flexible film after being coated on an evaporation vacuum coating apparatus provided in the prior art;
FIG. 2 is a schematic winding diagram of a flexible film on an evaporation vacuum coating apparatus according to an embodiment of the present disclosure;
FIG. 3 is a photograph of a coated flexible film after being coated on an evaporation vacuum coating apparatus provided in an embodiment of the present application;
fig. 4 is a schematic view illustrating a winding of a flexible film on an unwinding mechanism and a first guide assembly according to an embodiment of the present disclosure;
FIG. 5 is a schematic view of a flexible film being wound around a first unwind-pass roll and a first nip roll in a second state as provided by an embodiment of the present application;
FIG. 6 is a schematic view of a flexible film being wound onto a first cooled main drum and a second guide assembly according to an embodiment of the present application;
FIG. 7 is a schematic view of a flexible film being wound around a second cooling main drum, a winding cradle assembly and a winding mechanism according to an embodiment of the present disclosure;
fig. 8 is a schematic view of a first winding of a flexible film on a coating assembly according to an embodiment of the present disclosure.
Icon: 10-evaporation vacuum coating equipment; 100-a chamber; 110-a first side wall; 120-a second sidewall; 130-a top wall; 140-a bottom wall; 111-a first window; 121-a second window; 131-a third window; 200-a coating assembly; 210-a first evaporation mechanism; 220-a second evaporation mechanism; 230-an unwinding mechanism; 240-a first guide assembly; 250-a first cooling primary drum; 260-a second guide assembly; 270-a second cooling primary drum; 280-rolling swing frame components; 290-a winding mechanism; 241-second unwinding pass-roller; 242-a first unwinding nip roll; 243-first unwinding pass-roller; 244-first nip roll; 251-a first contact point; 252-second contact point; 261-a second guide roller; 262-a tension roller; 263-first guide roller; 264-second nip roll; 271-third contact point; 272-fourth contact point; 281-rolling the swing frame body; 282-first wind-up over roller; 283-rolling and flattening rollers; 284-second wind-up over roller; 285-third wrap through; 300-a transport path; 310-a first evaporation path; 320-a first cooling path; 330-second evaporation path; 340-a second cooling path; 350-a winding path; 20-a flexible film; 21-a first surface; 22-second surface.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
In the prior art, when a flexible film is coated, the flexible film in a coating area can be locally deformed, and defects such as folds, coating blank lines and the like are generated on a coating on the flexible film.
The inventors have found through careful study that the reasons for the above problems are: when vacuum coating is evaporated, the cooling roller and the evaporation mechanism are arranged at the same position of the conveying path of the flexible film, one surface of the flexible film at the same position is attached to the cooling main drum for cooling, and the other surface is subjected to high-temperature evaporation coating by the evaporation mechanism. When the flexible film is jointed with the cooling main drum, the jointing state of the flexible film and the cooling main drum is different, and the cooling effect of the flexible film in a better jointing area is different from that of the flexible film in a poorer jointing area; and the flexible film is heated in the process of evaporation coating, the flexible film is influenced by cold and hot alternation, and the flexible film at the evaporation coating area can be locally deformed during coating, so that the coating of the flexible film can generate defects such as folds, coating blank lines and the like as shown in figure 1. Wherein, fig. 1 is a photograph (gray scale processing) of a plated layer of a flexible film after being plated on an evaporation vacuum plating device provided in the prior art.
In order to solve the problems, the inventor provides a new device for the coating mode of the flexible film. When the equipment is used, the flexible film is not simultaneously subjected to evaporation coating and cooling at the same position, but the flexible film is subjected to evaporation coating firstly and then cooled, and the evaporation coating and the cooling of the flexible film are sequentially carried out.
Fig. 2 is a schematic winding diagram of the flexible film 20 provided in this embodiment on the evaporation vacuum coating apparatus 10. Referring to fig. 2, in the present embodiment, the evaporation vacuum coating apparatus 10 is capable of performing double-sided coating on the flexible film 20. The evaporation vacuum coating apparatus 10 includes a chamber 100 and a coating assembly 200 disposed in the chamber 100. Before coating, the flexible film 20 is disposed on the coating module 200 along the conveying path 300, and then the vacuum pump is used to evacuate the air in the chamber 100, so that the chamber 100 is in a vacuum state, and a vacuum environment is provided for the coating module 200, so as to perform evaporation coating on the flexible film 20.
Optionally, the vacuum is applied to a vacuum level of 0.01-0.09Pa in the chamber 100. For example: the degree of vacuum in the chamber 100 is 0.01Pa, 0.03Pa, 0.06Pa, or 0.09 Pa. The chamber 100 has opposing first and second sidewalls 110, 120 and top and bottom walls 130, 140. The first side wall 110 is provided with a first window 111, the second side wall 120 is provided with a second window 121, and the top wall 130 is provided with a third window 131. The number of the first window 111, the second window 121, and the third window 131 is not limited. Through the arrangement of the window, the conveying condition and the coating condition of the flexible film 20 in the chamber 100 can be observed, so that the coating state of the flexible film 20 can be monitored at any time.
For example, the first window 111, the second window 121, and the third window 131 may be made of pressure-resistant transparent plastic or tempered glass. One of the sidewalls of the chamber 100 may be provided with a door that is openable and capable of sealingly engaging the sidewall to place the uncoated flexible membrane 20 into the chamber 100 or to remove the coated flexible membrane 20 from the chamber 100.
Among them, the flexible film 20 is a thin film having a thickness of 2 to 30 μm, for example: the thickness of the flexible film 20 may be 2 μm, 10 μm, 20 μm, or 30 μm. Alternatively, the flexible film 20 may be a PET (Polyethylene terephthalate) flexible film having a thickness of 12 μm and a length of 36000 m.
Further, the material of the flexible film 20 may be a plastic film, a composite film, paper, fabric, or the like. Alternatively, the flexible film 20 provided in the embodiment of the present application is a thin film having a thickness of 2 to 8 μm, for example: the thickness of the flexible film 20 may be 2 μm, 4 μm, 6 μm, or 8 μm. The material of the flexible film 20 may be PET (Polyethylene terephthalate), PEN (Polyethylene naphthalate), PI (Polyimide), PP (Polypropylene), PE (Polyethylene), non-woven fabric, thin paper, or the like.
It should be noted that: the flexible film 20 has two opposite surfaces, namely a first surface 21 and a second surface 22, and when the flexible film 20 is fixed on the coating assembly 200, the first surface 21 is attached to the coating assembly 200 or the second surface 22 is attached to the coating assembly 200.
In order to provide the flexible film 20 and to double-side coat the flexible film 20 (both the first surface 21 and the second surface 22). In the embodiment of the present application, the coating assembly 200 includes a first evaporation mechanism 210, a first cooling main drum 250, a second evaporation mechanism 220, and a second cooling main drum 270, which are sequentially disposed along the conveying path 300 of the flexible film 20.
First coating the first surface 21 of the flexible film 20 by using the first evaporation mechanism 210, then rolling the first cooling main drum 250 and the second surface 22 of the flexible film 20, and cooling the flexible film 20 after the first coating; then, the second evaporation mechanism 220 is used to perform a second film coating on the second surface 22 of the flexible film 20, and then the second cooling main drum 270 is rolled with the coated first surface 21 of the flexible film 20, and the flexible film 20 after the second film coating is cooled for the second time. The coating and cooling are carried out separately, coating and cooling are carried out firstly, the film pasting effect of the flexible film 20 and the cooling main drum is better, and wrinkling and deformation of the flexible film 20 on the cooling main drum are reduced, so that the coating effect of the flexible film 20 is better, the phenomenon that the flexible film 20 is deformed locally can be improved, and the defects that wrinkles, plating blank lines and the like are generated on the coating of the flexible film 20 can be improved as shown in figure 3. Fig. 3 is a photograph of a plated film of a flexible film after being plated on the evaporation vacuum plating apparatus provided in the embodiment of the present application.
The conveying path 300 includes a first evaporation path 310, a first cooling path 320, a second evaporation path 330, a second cooling path 340, and a winding path 350, which are sequentially arranged along the conveying direction of the flexible film 20. The coating assembly 200 includes an unwinding mechanism 230, a first guiding assembly 240, a first cooling main drum 250, a second guiding assembly 260, a second cooling main drum 270, a winding swing frame assembly 280 and a winding mechanism 290, which are sequentially arranged along the conveying direction of the flexible film 20.
The conveying path 300 of the present embodiment corresponds to the structure of the filming assembly 200 for conveying the flexible film 20. That is to say: the unwinding mechanism 230 is located at the front end of the first evaporation path 310, the first evaporation path 310 passes through the circumferential surface of the first guide assembly 240, the first cooling path 320 passes through the circumferential surface of the first cooling main drum 250, the second evaporation path 330 passes through the circumferential surface of the second guide assembly 260, the second cooling path 340 passes through the circumferential surface of the second cooling main drum 270, the winding path 350 passes through the circumferential surface of the winding swing frame assembly 280, and the winding mechanism 290 is located at the rear end of the winding path 350.
The coating assembly 200 further includes a first evaporation mechanism 210 and a second evaporation mechanism 220, wherein the first evaporation mechanism 210 is used for coating the first surface 21 of the flexible film 20, and the second evaporation mechanism 220 is used for coating the second surface 22 of the flexible film 20.
Optionally, the first evaporation mechanism 210 is located at one side of the first evaporation path 310, the first evaporation mechanism 210 is located at one side of the flexible film 20 on the first guide assembly 240, the second evaporation mechanism 220 is located at one side of the second evaporation path 330, and the second evaporation mechanism 220 is located at one side of the flexible film 20 on the second guide assembly 260, so as to perform double-sided film coating on the flexible film 20.
The first evaporation mechanism 210 and the second evaporation mechanism 220 mainly function to evaporate the solid/liquid plating material into a gas state in vacuum by means of resistance heating, medium frequency induction heating or electron beam bombardment, and diffuse the gas state to the surface of the polymer film (flexible film 20) to form a metal layer (plating layer). The plating material is made of various materials, and can be metal targets such as copper, aluminum, zinc, gold, silver and the like.
When the flexible film 20 needs to be fixed by the coating assembly 200, the flexible film 20 is firstly wound on the unwinding mechanism 230, then the flexible film 20 passes through the first guide assembly 240 and is positioned above the first evaporation mechanism 210, and is cooled and conveyed on the first cooling main drum 250, and then the flexible film 20 passes through the second guide assembly 260 and is positioned above the second evaporation mechanism 220, and is cooled and conveyed on the second cooling main drum 270 and is wound on the winding mechanism 290 through the winding swing frame assembly 280, so that the flexible film 20 is arranged on the coating assembly 200, and the film-passing fixation of the flexible film 20 is realized.
In this embodiment, the first cooling main drum 250 is disposed near the first side wall 110, and the conveyance of the flexible film 20 on the first cooling main drum 250 and around the first cooling main drum 250 can be observed from the first window 111 on the first side wall 110; the second cooling main drum 270 is disposed adjacent to the second side wall 120, and the conveyance of the flexible film 20 on the second cooling main drum 270 and around the second cooling main drum 270 can be observed from the second window 121 on the second side wall 120; the rolling mechanism 290 is disposed near the top wall 130, and the rolling of the rolling pendulum assembly 280 and the flexible film 20 on the rolling mechanism 290 can be observed through the third window 131 on the top wall 130.
Referring to fig. 2, the unwinding mechanism 230 is located below the winding mechanism 290, the unwinding mechanism 230 is located at the lower left corner of the chamber 100, and the winding mechanism 290 is located at the upper right corner of the chamber 100, so that the installation of the coating assembly 200 in the chamber 100 is more compact. The first cooling main drum 250 is located at the right side of the chamber 100, the second cooling main drum 270 is located at the left side of the chamber 100, and the flexible film 20 is generally circuitously conveyed from the bottom to the top. In other embodiments, the unwinding mechanism 230 may also be located above the winding mechanism 290, the unwinding mechanism 230 is located at the upper right corner of the chamber 100, and the winding mechanism 290 is located at the lower left corner of the chamber 100. This is not limited in this application.
Fig. 4 is a schematic view illustrating the winding of the flexible film 20 on the unwinding mechanism 230 and the first guiding assembly 240 according to an embodiment of the present disclosure. Referring to fig. 2 and 4, the first guide assembly 240 includes a second unwinding pass roller 241, a first unwinding nip roller 242, a first unwinding nip roller 243 and a first nip roller 244, which are sequentially disposed along the conveying path 300 of the flexible film 20. The front end of the second unwinding roller 241 (the front end of the first evaporation path 310 of the flexible film 20) is the unwinding mechanism 230, and the rear end of the first flattening roller 244 (the rear end of the first evaporation path 310 of the flexible film 20) is the first cooling main drum 250.
The first evaporation path 310 sequentially passes through the second unwinding passing roller 241, the first unwinding flattening roller 242, the first unwinding passing roller 243, and the first flattening roller 244. After the flexible film 20 is unwound, the second surface 22 of the flexible film 20 contacts the circumferential surface of the second unwinding roller 241 and wraps at least a portion of the second unwinding roller 241; then the second surface 22 of the flexible film 20 contacts the circumferential surface of the first unwind nip roller 242 and wraps at least a portion of the first unwind nip roller 242; the first surface 21 of the flexible film 20 is then contacted with the circumferential surface of the first unwind-pass roll 243 and wraps at least a portion of the first unwind-pass roll 243; the second surface 22 of the flexible film 20 is then contacted with the circumferential surface of the first nip roll 244 and wraps at least a portion of the first nip roll 244.
The first unwinding flattening roller 242 may flatten the film surface of the unwound flexible film 20, and may improve the flatness of the film surface of the flexible film 20 before entering the first unwinding roller 243. When the flexible film 20 is conveyed by the first unwinding roller 243 and the first flattening roller 244, the flatness of the film surface of the flexible film 20 is good.
The first evaporation mechanism 210 is located below the first evaporation path 310, and the first evaporation mechanism 210 is located below the flexible film 20 on the first guide assembly 240. The first unwinding roller 243 and the first flattening roller 244 are disposed so that the flexible film 20 is in a horizontal state, and the first evaporation mechanism 210 is disposed between the first unwinding roller 243 and the first flattening roller 244 and below the horizontal flexible film 20. The first unwinding roller 243 and the first flattening roller 244 are arranged to enable the flexible film 20 to be in a horizontal state, the first evaporation mechanism 210 is arranged below the horizontal flexible film 20 conveyed by the first unwinding roller 243 and the first flattening roller 244, the flexible film 20 can be uniformly coated by the first evaporation mechanism 210, and a first coating layer is formed on the first surface 21 of the flexible film 20.
As the flexible film 20 enters between the first unwind-pass roll 243 and the first nip roll 244, the end of the flexible film 20 in contact with the first unwind-pass roll 243 near the first nip roll 244 is at the same level as the end of the flexible film 20 in contact with the first nip roll 244 near the first unwind-pass roll 243.
That is to say: when the flexible film 20 is conveyed on the first unwinding roll 243 and the first flattening roll 244, the flexible film 20 is tangent to both the first unwinding roll 243 and the first flattening roll 244, and the tangents at the two tangents are located on the same horizontal plane, so that the flexible film 20 is in a horizontal state when located between the first unwinding roll 243 and the first flattening roll 244. The center lines of the first unwinding roll 243 and the first flattening roll 244 may not be at the same level, or may be at the same level.
If the center lines of the first unwinding roller 243 and the first flattening roller 244 are not at the same horizontal plane, please continue to refer to fig. 4, alternatively, the first surface 21 of the flexible film 20 is tangent to the upper surface of the first unwinding roller 243, the second surface 22 of the flexible film 20 is tangent to the lower surface of the first flattening roller 244, the upper surface of the first unwinding roller 243 and the lower surface of the first flattening roller 244 are at the same horizontal plane, so as to achieve horizontal conveyance of the flexible film 20, and the first evaporation mechanism 210 is located below the first surface 21.
If the center lines of the first unwinding roller 243 and the first flattening roller 244 are located at the same horizontal plane, in a possible embodiment, please refer to fig. 5, the second surface 22 of the flexible film 20 is tangent to the lower surface of the first unwinding roller 243, the second surface 22 of the flexible film 20 is tangent to the lower surface of the first flattening roller 244, the lower surface of the first unwinding roller 243 and the lower surface of the first flattening roller 244 are located at the same horizontal plane, so as to realize horizontal conveyance of the flexible film 20, and the first evaporation mechanism 210 is located below the first surface 21.
Further, the first flattening roller 244 can also flatten the film surface after the first evaporation so that the flexible film 20 is in a flat state during the evaporation, and after the flexible film 20 enters the first cooling main drum 250, the flexible film 20 and the first cooling main drum 250 can be better attached. Thereby ensuring good heat conduction effect and reducing the phenomena of wrinkling of the film surface, plating empty wires and the like.
Fig. 6 is a schematic view of the winding of the flexible film on the first cooling main drum 250 and the second guiding assembly 260 provided in this embodiment, and fig. 7 is a schematic view of the winding of the flexible film on the second cooling main drum 270, the winding cradle assembly 280 and the winding mechanism 290 provided in this embodiment. Referring to fig. 6 and 7, in the embodiment of the present application, the first cooling main drum 250 and the second cooling main drum 270 may be cooled by a cooling liquid circulation, and the cooling temperature may be-20 ℃.
The first cooling main drum 250 is disposed so as to be able to change the conveying direction of the flexible film 20, and the first vapor deposition mechanism 210 is located below the first surface 21 of the flexible film 20, and the second vapor deposition mechanism 220 is located below the second surface 22 of the flexible film 20. For example: the flexible film 20 is first conveyed from left to right, and after the conveying direction of the flexible film 20 is changed by the first cooling main drum 250, the flexible film 20 is conveyed from right to left.
In the present embodiment, in order to change the conveying direction of the flexible film 20 by the first cooling main drum 250. While the flexible film 20 is being conveyed, the flexible film 20 is conformed on the circumferential surface of the first cooling main drum 250, the cross section of the first cooling main drum 250 is circular, the cross section of the flexible film 20 is linear, and the conformity radian of the linear flexible film 20 to the circular first cooling main drum 250 is 2 pi/3 to 4 pi/3, for example: the flexible film 20 conforms to the first cooling drum 250 at an arc of 2 pi/3, pi, or 4 pi/3. That is, the central angle at which the linear flexible film 20 is attached to the circular first cooling main drum 250 is 120 ° to 240 °, for example: the central angle at which the flexible film 20 is attached to the first cooling main drum 250 is 120 °, 180 °, or 240 ° so as to change the conveying direction of the flexible film 20.
That is to say: the first cooling path 320 bypasses the circumferential surface of the first cooling main drum 250, the first evaporation path 310 is adjacent to the first cooling path 320, the flexible film 20 enters the first cooling path 320 after passing through the first evaporation path 310, the flexible film 20 enters the first cooling main drum 250 after the first surface 21 of the flexible film 20 is coated by the first evaporation mechanism 210, and the second surface 22 of the flexible film 20 contacts the circumferential surface of the first cooling main drum 250 and wraps at least a part of the first cooling main drum 250.
Further, when the second surface 22 of the flexible film 20 wraps at least a portion of the first cooling main drum 250, the wrapping starts at a first contact point 251 (a point at which contact with the circumferential surface of the first cooling main drum 250 is started), and the wrapping ends at a second contact point 252 (a point at which contact with the circumferential surface of the first cooling main drum 250 is ended), wherein the wrapping angle α is 120 ° to 240 °, for example, 120 °, 180 °, or 240 °, with the apex of the angle being the center of the circle where the cooling main drum 250 is located, and the included angle formed between the first contact point 251 and the second contact point 252 being the wrapping angle.
To better convey the flexible film 20, please continue to refer to fig. 2 and 6, the second guiding assembly 260 includes a second guiding roller 261, a tension roller 262, a first guiding roller 263 and a second flattening roller 264, which are sequentially disposed along the conveying path 300 of the flexible film 20, wherein a front end of the second guiding roller 261 (a front end of the second evaporation path 330 of the flexible film 20) is the first cooling main drum 250, and a rear end of the second flattening roller 264 (a rear end of the second evaporation path 330 of the flexible film 20) is the second cooling main drum 270.
The second evaporation path 330 passes through a second guide roller 261, a tension roller 262, a first guide roller 263 and a second flattening roller 264 in sequence. The flexible film 20 first enters the second guide roller 261 from the first cooling main drum 250, the first surface 21 of the flexible film 20 contacts with the circumferential surface of the second guide roller 261, and wraps at least a portion of the second guide roller 261; the second surface 22 of the flexible film 20 is then contacted with the circumferential surface of the tension roller 262 and wraps at least a portion of the tension roller 262; the first surface 21 of the flexible film 20 contacts the circumferential surface of the first guide roller 263 and wraps at least a portion of the first guide roller 263; the first surface 21 of the flexible film 20 contacts the circumferential surface of the second nip roll 264 and wraps at least a portion of the second nip roll 264.
The second evaporation mechanism 220 is located below the second evaporation path 330, and the second evaporation mechanism 220 is located below the flexible film 20 on the second guide assembly 260. The first guide roller 263 and the second flattening roller 264 are configured to make the flexible film 20 in a horizontal state, and the second evaporation mechanism 220 is disposed between the first guide roller 263 and the second flattening roller 264 and below the horizontal flexible film 20. The first guide roller 263 and the second flattening roller 264 are arranged to enable the flexible film 20 to be in a horizontal state, the second evaporation mechanism 220 is arranged below the horizontal flexible film 20 conveyed by the first guide roller 263 and the second flattening roller 264, and the second evaporation mechanism 220 can be used for uniformly coating the flexible film 20 to form a second coating on the second surface 22 of the flexible film 20.
With continued reference to fig. 6, as the flexible film 20 enters between the first guiding roll 263 and the second nip roll 264, the end of the flexible film 20 wrapped around the first guiding roll 263 near the second nip roll 264 is at the same level as the end of the flexible film 20 wrapped around the second nip roll 264 near the first guiding roll 263.
That is to say: when the flexible film 20 is conveyed on the first guide roll 263 and the second flattening roll 264, the flexible film 20 is tangent to both the first guide roll 263 and the second flattening roll 264, and the two tangent positions are located on the same horizontal plane, so that the flexible film 20 is in a horizontal state when being located between the first guide roll 263 and the second flattening roll 264. The centerlines of the first guide roll 263 and the second nip roll 264 may not be in the same horizontal plane, or may be in the same horizontal plane.
A tension roller 262 is provided between the first cooling on the first cooling main drum 250 and the evaporation of the second surface 22 of the flexible film 20. Through the effect of the tension roller 262, the tension between the second guiding roller 261 and the first guiding roller 263 can be cut off, so that when the first evaporation mechanism 210 is used for coating the first surface 21 of the flexible film 20 and the second evaporation mechanism 220 is used for coating the second surface 22 of the flexible film 20, the tension at the coating area of the flexible film 20 is the same, the coating of the first surface 21 and the coating of the second surface 22 can be consistent, the double-sided coating is more uniform, and the coating effect is better.
The second flattening roller 264 can also flatten the film surface after the second evaporation so that the flexible film 20 is in a flat state during the evaporation, and after the flexible film 20 enters the second cooling main drum 270, the bonding effect between the flexible film 20 and the second cooling main drum 270 is better. Thereby ensuring good heat conduction effect and reducing the phenomena of wrinkling of the film surface, plating empty wires and the like.
The second cooling main drum 270 can also change the conveying direction of the flexible film 20. Therefore, the second cooling path 340 goes around after passing through the circumferential surface of the second cooling main drum 270, the second evaporation path 330 is adjacent to the second cooling path 340, the flexible film 20 enters the second cooling path 340 after passing through the second evaporation path 330, the flexible film 20 enters the second cooling main drum 270 after the second surface 22 of the flexible film 20 is coated by the second evaporation mechanism 220, the first surface 21 of the flexible film 20 contacts the circumferential surface of the second cooling main drum 270, and at least a part of the second cooling main drum 270 is wrapped.
Further, when the first surface 21 of the flexible film 20 wraps the second cooling main drum 270, the wrapping starts at the third contact point 271 (the point where the wrapping starts to contact the circumferential surface of the second cooling main drum 270), and the wrapping ends at the fourth contact point 272 (the point where the wrapping ends at the circumferential surface of the second cooling main drum 270), wherein the wrapping angle β is 120 ° to 240 °, for example, 120 °, 180 ° or 240 °, with the apex of the angle being the center of the circle where the cooling main drum 270 is located, and the included angle formed between the third contact point 271 and the fourth contact point 272 being the wrapping angle.
Alternatively, since the first cooling main drum 250 and the second cooling main drum 270 may be changed after the conveying direction of the flexible film 20. Therefore, the first evaporation mechanism 210 and the second evaporation mechanism 220 are located on the same side of the first cooling main drum 250, and the winding mechanism 290 and the second evaporation mechanism 220 are located on the same side of the second cooling main drum 270. Referring to fig. 2, the first evaporation mechanism 210 and the second evaporation mechanism 220 are both located on the left side of the first cooling main drum 250, the second evaporation mechanism 220 and the winding mechanism 290 are both located on the right side of the second cooling main drum 270, after the flexible film 20 is unwound, the first surface 21 of the flexible film 20 faces downward, and the first evaporation mechanism 210 is disposed below the first surface 21 of the flexible film 20 for film coating, so that a first plating layer is formed on the first surface 21. Then, the conveying direction of the flexible film 20 is changed by the first cooling main drum 250, so that the second surface 22 of the flexible film 20 faces downwards, the second evaporation mechanism 220 is arranged below the second surface 22 for coating, and a second coating is formed on the second surface 22, so that the evaporation effect is better.
Referring to fig. 7, when the winding mechanism 290 is used to wind a roll, the winding pendulum assembly 280 has a following movement function along with the increase of the roll, and the winding pendulum assembly 280 can rotate to keep a predetermined distance between the winding pendulum assembly 280 and the outermost layer of the flexible film 20 on the winding mechanism 290, so as to ensure that the film surface is flat in the winding process.
Alternatively, the winding pendulum assembly 280 includes a winding pendulum body 281, and a first winding roller 282, a winding and flattening roller 283, a second winding roller 284, and a third winding roller 285 installed to the winding pendulum body 281, which are sequentially disposed along the conveying path 300 of the flexible film 20, and the winding pendulum body 281 is rotatable around the first winding roller 282 to keep the third winding roller 285 at a predetermined distance from the outermost layer of the wound flexible film 20 on the winding mechanism 290.
The winding path 350 passes through the first winding-up roller 282, the winding-flattening roller 283, the second winding-up roller 284 and the third winding-up roller 285 in sequence. The flexible film 20 first enters the first take-up over-roller 282 from the second cooling main drum 270, the second surface 22 of the flexible film 20 contacts the circumferential surface of the first take-up over-roller 282, and wraps at least a portion of the first take-up over-roller 282; then the first surface 21 of the flexible film 20 is brought into contact with the circumferential surface of the take-up and nip roll 283 and wraps at least a part of the take-up and nip roll 283; the first surface 21 of the flexible film 20 contacts the circumferential surface of the second over-roll 284 and wraps at least a portion of the second over-roll 284; first surface 21 of flexible film 20 contacts the circumferential surface of third take-up roller 285 and wraps at least a portion of third take-up roller 285; and finally into the winding mechanism 290.
The winding and flattening rollers 283 can flatten the wound film surface, and can improve the film surface flatness and the overall winding appearance of the wound flexible film 20. In this embodiment, the main functions of the nip roll and the guide roll are to reduce the free film length of the flexible film 20 and to smoothly convey the flexible film 20. The type of the flattening roll can be a bending roll (an arc-shaped flattening roll), an adhesive tape roll, an open width roll, a threaded roll, a K-shaped roll, a clamping roll or a metal multi-section roll (an arc-shaped flattening roll) and the like can be selected, the flattening roll can also be replaced by a common passing roll with the same function, can be a smooth passing roll, can also be a rough surface passing roll with a certain friction coefficient, and can be replaced completely or combined for replacement.
In one possible implementation, fig. 8 is a schematic diagram of a first winding of the flexible film 20 on the coating assembly 200 according to the present embodiment. Referring to fig. 8, the number of the flattening roll, the unwinding roll, the guiding roll or the winding roll may be increased or decreased in the evaporation vacuum coating apparatus 10, and the structure capable of conveying the flexible film 20 and smoothly performing the coating is within the protection scope of the present application.
In another possible embodiment, the evaporation vacuum coating apparatus 10 may further include an unwinding swing frame assembly (not shown) disposed between the unwinding mechanism 230 and the first guide assembly 240. When the unwinding mechanism 230 is used for unwinding, along with the reduction of coil stock, the unwinding swing frame assembly has a following moving function, and the unwinding swing frame assembly can rotate so that the unwinding swing frame assembly keeps a preset distance with the outermost layer of the wound flexible film 20 on the unwinding mechanism 230, and the film surface in the unwinding process can be guaranteed to be flat.
Optionally, the unwinding swing frame assembly includes an unwinding swing frame body, and a third unwinding passing roller, a second unwinding flattening roller, a fourth unwinding passing roller and a fifth unwinding passing roller which are sequentially arranged along the conveying path 300 of the flexible film 20 and are installed on the unwinding swing frame body, and the unwinding swing frame body can rotate around the third unwinding passing roller to enable the fifth unwinding passing roller to keep a preset distance from the outermost layer of the wound flexible film 20 on the unwinding mechanism 230.
In the present embodiment, unless otherwise specified, the axes of rotation of the winding-related rotating members are arranged substantially parallel or completely parallel, except for the arc-shaped flattening rollers.
In the embodiment of the present application, the flexible film 20 is firstly wound on the unwinding mechanism 230, and sequentially passes through the second unwinding passing roller 241, the first unwinding flattening roller 242, the first unwinding passing roller 243, the position above the first evaporation mechanism 210, the first flattening roller 244, and the first cooling main drum 250 from left to right; through the turning of the first cooling main drum 250, the first cooling main drum 270 passes through the second guide roller 261, the tension roller 262, the first guide roller 263, above the second evaporation mechanism 220, the second flattening roller 264 and from right to left in sequence; the winding is performed by the winding mechanism 290 by the turning of the second cooling main drum 270 and then sequentially passing through the first winding-up roller 282, the winding-up nip roller 283, the second winding-up roller 284, and the third winding-up roller 285 from left to right. The first evaporation mechanism 210 is located below the first surface 21 of the flexible film 20, and the second evaporation mechanism 220 is located below the second surface 22 of the flexible film 20.
After the flexible film 20 is installed in the film penetrating mode, double-sided suspension evaporation vacuum coating is performed, and the method comprises the following steps: the flexible film 20 is unreeled by the unreeling mechanism 230, moves to the position above the first evaporation mechanism 210, is coated on the first surface 21 of the flexible film 20 by the first evaporation mechanism 210, and is cooled by the first cooling main drum 250; and then the second surface 22 of the flexible film 20 is coated by the second evaporation mechanism 220 after moving to the upper side of the second evaporation mechanism 220, and then the second surface is cooled by the second cooling main drum 270, and then the second surface is conveyed by the winding swing frame assembly 280 and enters the winding mechanism 290 for winding. The coating and cooling processes are separately carried out, coating is firstly carried out, then cooling is carried out, double-sided coating is carried out, the coating effect of the flexible film 20 is good, the phenomenon that the flexible film 20 is locally deformed can be improved, and the defects that wrinkles, plating blank lines and the like are generated on the coating of the flexible film 20 can also be improved.
Further, film coating is carried out under the condition that the vacuum degree in the chamber 100 is lower than 0.04Pa, the time from the vacuum pumping of the atmosphere to the vacuum degree of the chamber 100 being lower than 0.04Pa is 30min, the time for cleaning the chamber 100 and re-penetrating the flexible film 20 each time is 15min, the time for opening the chamber 100 to heat and release the vacuum after the film coating is finished each time is 10min, the time for stopping the equipment each time is 55min, the film-moving speed is set to be 500m/min, and each evaporation mechanism can obtain the film on the surface of the flexible film 20 once
Coating of thickness, the target product being the coating on both sides of the flexible film 20
The coating with the thickness is that for the traditional single-side coating equipment, the coating can be finished 40 times on the front and back surfaces, the total time for coating is 5080min, if the evaporation vacuum coating equipment 10 provided by the application is adopted, the coating can be simultaneously finished on the two surfaces every time, and the product is finishedThe front side and the back side need to be coated 20 times, the corresponding total time is 2540min, and the production efficiency is 2 times of that of the traditional equipment on the premise of ensuring good appearance of the coated film surface.
The evaporation vacuum coating equipment 10 provided by the embodiment of the application has the beneficial effects that:
(1) and the double-sided coating can be realized at one time, and the coating efficiency is improved.
(2) The phenomenon that the flexible film 20 is locally deformed can be improved, and defects such as wrinkles and plating blank lines generated on the plating layer of the flexible film 20 can also be improved.
(3) The thickness of the first plating layer on the first surface 21 of the flexible film 20 is consistent with that of the second plating layer on the second surface 22, so that the double-sided plating film is more uniform, and the plating effect is better.
The above description is only a few examples of the present application and is not intended to limit the present application, and various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. An evaporation vacuum coating equipment is used for carrying out double-sided coating on a flexible film, and is characterized by comprising: the coating device comprises a chamber capable of providing a vacuum environment and a coating assembly arranged in the chamber;
the coating component comprises a first evaporation mechanism, a first cooling main drum, a second evaporation mechanism and a second cooling main drum, wherein the first evaporation mechanism, the first cooling main drum, the second evaporation mechanism and the second cooling main drum are sequentially arranged along the conveying path of the flexible film and are used for coating the first surface of the flexible film.
2. The evaporation vacuum coating apparatus according to claim 1, wherein the coating assembly further comprises an unwinding mechanism and a winding mechanism, the unwinding mechanism is located at the front end of the conveying path, and the winding mechanism is located at the rear end of the conveying path.
3. The evaporation vacuum plating apparatus according to claim 2, wherein the conveying path includes, in a conveying direction, a first evaporation path, a first cooling path, a second evaporation path, and a second cooling path, the unwinding mechanism is located at a front end of the first evaporation path, the first evaporation mechanism is located at a side of the first evaporation path, the first cooling path passes through a circumferential surface of the first cooling main drum, the second evaporation mechanism is located at a side of the second evaporation path, the second cooling path passes through a circumferential surface of the second cooling main drum, and the winding mechanism is located at a rear end of the second cooling path.
4. The evaporation vacuum plating apparatus according to claim 3, wherein the first cooling path is detoured after passing through the first cooling main drum, the first evaporation mechanism is located below the first evaporation path, and the second evaporation mechanism is located below the second evaporation path.
5. The evaporation vacuum plating apparatus according to claim 3 or 4, wherein the first evaporation path sequentially passes through a first unwinding through-roller and a first flattening roller, the first unwinding through-roller and the first flattening roller being configured to put the flexible film in a horizontal state, the first evaporation mechanism being disposed between the first unwinding through-roller and the first flattening roller.
6. The evaporation vacuum plating apparatus according to claim 3 or 4, wherein the second evaporation path sequentially passes through a first guide over roller and a second flattening roller, the first guide over roller and the second flattening roller being configured to put the flexible film in a horizontal state, the second evaporation mechanism being disposed between the first guide over roller and the second flattening roller.
7. The evaporation vacuum coating apparatus according to claim 2, wherein the coating assembly further comprises a winding swing frame assembly disposed between the second cooling main drum and the winding mechanism, the winding swing frame assembly being rotatable to maintain the winding swing frame assembly at a predetermined distance from the outermost layer of the flexible film wound on the winding mechanism.
8. The evaporation vacuum coating equipment as claimed in claim 7, wherein the rolling swing frame assembly comprises a rolling swing frame body and a first rolling over roller, a rolling and flattening roller, a second rolling over roller and a third rolling over roller which are arranged on the rolling swing frame body along the conveying path in sequence, and the rolling swing frame body can rotate around the first rolling over roller to enable the third rolling over roller to keep a preset distance from the outermost layer of the flexible film wound on the rolling mechanism.
9. The evaporation vacuum coating apparatus according to any one of claims 2 to 4, wherein said chamber has a top wall and opposing first and second side walls, said first side wall having a first window disposed thereon, said first cooling main drum being disposed adjacent to said first side wall; a second window is arranged on the second side wall, and the second cooling main drum is arranged close to the second side wall; and a third window is arranged on the top wall, and the winding mechanism is arranged close to the top wall.
10. The evaporation vacuum coating apparatus according to any one of claims 1 to 4, wherein the coating assembly further comprises a tension roller, and the transport path passes through the first cooling main drum, the tension roller, and the second evaporation mechanism in this order.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921685693.7U CN210886191U (en) | 2019-10-09 | 2019-10-09 | Evaporation vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921685693.7U CN210886191U (en) | 2019-10-09 | 2019-10-09 | Evaporation vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210886191U true CN210886191U (en) | 2020-06-30 |
Family
ID=71330439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921685693.7U Active CN210886191U (en) | 2019-10-09 | 2019-10-09 | Evaporation vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210886191U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112795895A (en) * | 2021-03-31 | 2021-05-14 | 辽宁分子流科技有限公司 | Vacuum film penetrating mechanism for winding type vacuum film coating machine |
| CN112813400A (en) * | 2021-03-31 | 2021-05-18 | 辽宁分子流科技有限公司 | Double-sided multi-station winding type vacuum coating machine |
| CN113832434A (en) * | 2021-08-30 | 2021-12-24 | 祥博传热科技股份有限公司 | Local vacuum coating device for radiator |
| CN114438456A (en) * | 2021-12-24 | 2022-05-06 | 重庆金美新材料科技有限公司 | Preparation device and preparation process of light and high-conductivity thin film |
| CN114481034A (en) * | 2022-01-04 | 2022-05-13 | 重庆金美新材料科技有限公司 | Preparation method, equipment and system of composite metal foil |
| CN114824179A (en) * | 2022-04-28 | 2022-07-29 | 南昌大学 | Preparation method of solid-state lithium battery |
| CN115287620A (en) * | 2022-07-21 | 2022-11-04 | 上海宝镀真空设备科技有限公司 | Nip roll water-cooled structure |
| CN115652262A (en) * | 2021-02-07 | 2023-01-31 | 厦门海辰储能科技股份有限公司 | Stress reduction mechanism and method of use |
| CN116219388A (en) * | 2022-12-31 | 2023-06-06 | 铜陵市超越电子股份有限公司 | Coating machine for double-sided coating |
-
2019
- 2019-10-09 CN CN201921685693.7U patent/CN210886191U/en active Active
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115652262A (en) * | 2021-02-07 | 2023-01-31 | 厦门海辰储能科技股份有限公司 | Stress reduction mechanism and method of use |
| CN112813400A (en) * | 2021-03-31 | 2021-05-18 | 辽宁分子流科技有限公司 | Double-sided multi-station winding type vacuum coating machine |
| CN112813400B (en) * | 2021-03-31 | 2024-05-24 | 泊肃叶科技(沈阳)有限公司 | Double-sided multi-station winding type vacuum coating machine |
| CN112795895A (en) * | 2021-03-31 | 2021-05-14 | 辽宁分子流科技有限公司 | Vacuum film penetrating mechanism for winding type vacuum film coating machine |
| CN113832434A (en) * | 2021-08-30 | 2021-12-24 | 祥博传热科技股份有限公司 | Local vacuum coating device for radiator |
| CN113832434B (en) * | 2021-08-30 | 2023-12-12 | 祥博传热科技股份有限公司 | Radiator partial vacuum coating device |
| CN114438456A (en) * | 2021-12-24 | 2022-05-06 | 重庆金美新材料科技有限公司 | Preparation device and preparation process of light and high-conductivity thin film |
| WO2023131099A1 (en) * | 2022-01-04 | 2023-07-13 | 重庆金美新材料科技有限公司 | Method, device and system for preparing composite metal foil |
| CN114481034A (en) * | 2022-01-04 | 2022-05-13 | 重庆金美新材料科技有限公司 | Preparation method, equipment and system of composite metal foil |
| CN114824179A (en) * | 2022-04-28 | 2022-07-29 | 南昌大学 | Preparation method of solid-state lithium battery |
| CN115287620A (en) * | 2022-07-21 | 2022-11-04 | 上海宝镀真空设备科技有限公司 | Nip roll water-cooled structure |
| CN115287620B (en) * | 2022-07-21 | 2024-03-29 | 上海宝镀真空设备科技有限公司 | Water-cooled structure of flattening roller |
| CN116219388A (en) * | 2022-12-31 | 2023-06-06 | 铜陵市超越电子股份有限公司 | Coating machine for double-sided coating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210886191U (en) | Evaporation vacuum coating equipment | |
| JP4355032B2 (en) | Thin film forming apparatus and thin film forming method | |
| CN108754446A (en) | A kind of winding type two-sided magnetic control sputtering vacuum coating equipment and film plating process | |
| CN108624861A (en) | The vacuum deposition apparatus of two-sided continuous coating | |
| CN109355634A (en) | The vacuum deposition apparatus of two-sided continuous coating | |
| KR20140118781A (en) | Method for manufacturing functional film and web conveyance device | |
| WO2022047947A1 (en) | Multi-roller vacuum coating device | |
| JP4366450B2 (en) | Thin film forming apparatus and thin film forming method | |
| CN212404258U (en) | Coating assembly and coating device | |
| JP6662048B2 (en) | Method and apparatus for manufacturing double-sided film | |
| WO2021190102A1 (en) | Film coating assembly, film coating device and film coating method | |
| CN208667836U (en) | Winding type two-sided magnetic control sputtering vacuum coating equipment | |
| CN214271026U (en) | Magnetron sputtering coating machine | |
| CN216141612U (en) | Coating device and coating system | |
| BR102020026096A2 (en) | GLUING APPARATUS OF THIN FILM FLOATING IN AIR AND ROLL FLOATING IN AIR OF THE SAME | |
| CN212402875U (en) | Flattening mechanism and flattening device | |
| JP6950867B2 (en) | Lithium thin film manufacturing method and lithium thin film manufacturing equipment | |
| US4844009A (en) | Apparatus for coating webs of material having an open structure in depth | |
| US4826707A (en) | Method for coating webs of material having an open structure in depth | |
| CN113981376B (en) | Coating assembly, coating device and coating method | |
| JP3684941B2 (en) | Coating film forming apparatus and coating film forming method | |
| JP5494466B2 (en) | Wrinkle stretching method and wrinkle stretching apparatus on can roll, and film forming apparatus provided with the same | |
| JPH08134645A (en) | Vacuum treating device for plastic film | |
| CN218345540U (en) | Winding device based on flexible substrate double-sided coating and winding coating equipment | |
| JP6172063B2 (en) | Long resin film surface treatment equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220121 Address after: 361000 201-1, complex building 5, No. 11, Butang Middle Road, torch high tech Zone (Tongxiang) industrial base, Xiamen, Fujian Patentee after: Xiamen Haichen New Energy Technology Co.,Ltd. Address before: 518000 room 508, building 10, Jinpai community, Buji street, Longgang District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Haihan New Energy Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 361000 201-1, complex building 5, No. 11, Butang Middle Road, torch high tech Zone (Tongxiang) industrial base, Xiamen, Fujian Patentee after: Xiamen Haichen Energy Storage Technology Co.,Ltd. Address before: 361000 201-1, complex building 5, No. 11, Butang Middle Road, torch high tech Zone (Tongxiang) industrial base, Xiamen, Fujian Patentee before: Xiamen Haichen New Energy Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |