CN210774624U - On-line Taeman-Green disk-forming detection interferometer measuring device - Google Patents
On-line Taeman-Green disk-forming detection interferometer measuring device Download PDFInfo
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- CN210774624U CN210774624U CN201921949708.6U CN201921949708U CN210774624U CN 210774624 U CN210774624 U CN 210774624U CN 201921949708 U CN201921949708 U CN 201921949708U CN 210774624 U CN210774624 U CN 210774624U
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Abstract
The utility model provides an online taiman-green becomes a set and detects interferometer measuring device, a serial communication port, include: the device comprises a laser light source, a beam expanding system, a polarizer, an analyzer, two 1/4 glass slides, a polarization splitting prism, a plane reference mirror, a spherical lens to be measured and processed into a disc, a spherical standard mirror, an imaging mirror group and a photoelectric sensor CCD. The expanded parallel light is divided into reference light and test light through the light splitting element, the test light is converged into standard spherical waves through the standard lens and is coincided with the curvature center of the lens to be tested, and the original light path returns to the interference light path to form coherent light beams with the reference light. The optical path utilizes an asymmetric Thyman-Green interference optical path to detect the finished lens, has the advantages of compact structure and easy miniaturization, and simultaneously meets the requirement of large-batch lens detection, so that the detection process is simpler and more convenient, and the problem of detection of spherical lenses without taking the spherical lenses off the disk is solved.
Description
Technical Field
The utility model belongs to the technical field of the light wave interference measurement detects, especially, relate to an online spherical surface interferometer, the spherical surface interferometer of curvature radius deviation, astigmatic deviation, the local deviation of specially adapted online nondestructive examination spherical surface lens.
Background
The optical interference is detected in a unit level of nanometer wavelength, has recognized high precision, and can be divided into sample plate type contact measurement and interferometer type non-contact measurement according to the measurement mode by more or less applying the optical interference method to measure the flatness error of the element in the modern high-precision detection field. The detection of the optical element is mainly to ensure the surface quality, the early factory production is guided by Newton's rings and is also called a template method, but the method is limited by the experience of operators, is easy to be mixed with subjective errors or judgment errors caused by fatigue personnel, the yield of products is reduced from the source, and the method is contact measurement, so that the standard template and the smoothness of a detected lens are easy to damage, scrapping is caused, and the production cost is increased.
At present, in order to ensure the measurement precision, the most used is interferometer type non-contact measurement, and compared with sample plate type contact measurement, the interferometer type non-contact measurement has higher sensitivity and accuracy and higher efficiency, does not damage a measurement surface, and is widely applied to various fields of precision and ultra-precision machining measurement and real-time measurement and control. The classical interference light path can be divided into multi-beam interference and double-beam interference, the multi-beam interference is most known as Michelson interference, the double-beam interference is known as Taemann-Green interference and Fizeau interferometer, wherein the Taemann-Green interference is classical symmetrical (equal-path) interference, namely a reference light path and a test light path are separated, in practical application, the light path is more applied to measuring plane mirrors, and spherical lenses can be theoretically tested. The Fizeau interference optical path is just opposite, the non-equal-distance interference of the common optical path is utilized, the measuring range depends on the coherence property of a light source and the related aperture of a standard lens, the interferometer is generally provided with the standard lenses with different specifications according to the actual needs of various factories, and a guide rail with a certain length is needed to realize the movement of the lens to be measured, so that the spherical center of the reference surface is coincided with the curvature center of the lens to be measured.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the restriction of symmetrical light path has been abolished to the online taiman-Green one-tenth dish detection interferometer scheme that the scheme provided, interferes and the measuring range that the taiman-Green interferometer was extended to standard camera lens through introducing the polarization, realizes the interferometric of non-uniform distance, makes its characteristics such as high accuracy, low cost, the compact structure that have other interferometers.
The utility model discloses specifically adopt following technical scheme:
an on-line Taeman-Green complete set detection interferometer measuring device, comprising: the device comprises a laser light source, a beam expanding system, a polarizer, a polarization analyzer, two 1/4 glass slides, a polarization splitting prism, a plane reference mirror, a spherical lens to be measured and processed into a disc, a spherical standard mirror, an imaging mirror group and a photoelectric sensor CCD; the laser light source, the beam expanding system and the polarizer are sequentially arranged on the light path on the left side of the polarization beam splitter prism from left to right; the second 1/4 glass slide, the spherical standard mirror and the spherical lens to be processed into a disc are sequentially arranged on the light path on the right side of the polarization beam splitter from left to right; the plane reference mirror and the first 1/4 glass slide are sequentially arranged on a light path above the polarization beam splitter from top to bottom; the polarization analyzer, the imaging lens group and the photoelectric sensor CCD are sequentially arranged on a light path below the polarization beam splitter prism from top to bottom.
Preferably, the device further comprises a light homogenizing device arranged on the light path between the analyzer and the imaging lens group.
Preferably, the light beam emitted by the laser light source is expanded and collimated by the beam expanding system and then is divided into two beams of light at the inclined plane of the polarization beam splitter; the reference light is reflected by the plane reference mirror to form standard plane waves, the test light is reflected back to the deviated test wavefront by the spherical lens to be tested, meets the standard plane waves at the polarization beam splitter prism and generates interference.
Preferably, the test light is converted from plane waves to standard spherical waves after passing through the spherical standard mirror, and a convergence point of the standard spherical waves is superposed with the center of the curvature radius of the spherical lens to be tested and returns along the original optical path.
Preferably, the reference light and the test light respectively pass through the first 1/4 glass slide and the second 1/4 glass slide in the optical path twice, and then phase retardation is generated, so that the original S polarized light or P polarized light is converted into P polarized light or S polarized light.
Preferably, the polarizer is used for adjusting the light intensity of the reference light and the test light to be equal; the analyzer is used for changing two beams of light into two beams of light with the same polarization direction after the S polarized light and the P polarized light meet at the polarization splitting prism to generate interference.
Preferably, a plurality of spherical lenses to be subjected to disc forming processing are rotationally and symmetrically distributed on a spherical mold head of the mold; the tail part of the mould is hinged and fixed on the bracket; and the support is also provided with a displacement compensation mechanism.
Preferably, a central spherical lens and a plurality of edge spherical lenses are distributed on the spherical mold head; the tail part of the mould is hinged and fixed on the bracket through a ball joint.
Preferably, the displacement compensation mechanism is driven by three stepping motors whose output directions are orthogonal to each other.
The utility model discloses and preferred scheme's main characterized in that: the expanded parallel light is divided into reference light and test light through a light splitting element, the test light is converged into standard spherical waves through a standard lens and is superposed with the curvature center of the lens to be tested, and the original light path returns to an interference light path to form coherent light beams with the reference light. The optical path utilizes an asymmetric Thyman-Green interference optical path to detect the finished lens, has the advantages of compact structure and easy miniaturization, and simultaneously meets the requirement of large-batch lens detection, so that the detection process is simpler and more convenient, and the problem of detection of spherical lenses without taking the spherical lenses off the disk is solved.
Compared with the prior art, the utility model and preferred scheme thereof, it is showing the advantage and lies in: (1) the light path structure is compact, the measuring mode is simple, and the miniaturization is easy; (2) the online detection of the disklike spherical lens can be met, the efficiency is high, and the processing precision of the disklike spherical lens can be improved.
Drawings
The invention will be described in further detail with reference to the following drawings and detailed description:
fig. 1 is a schematic view of the overall structure, optical path and detection principle of the embodiment of the present invention;
fig. 2 is a schematic view of the distribution of spherical lenses to be measured on a spherical mold head according to an embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a moving condition of a curvature center of a spherical lens to be measured according to an embodiment of the present invention after rotation;
FIG. 4 is a schematic view of a mold and a bracket according to an embodiment of the present invention;
in the figure: 1-a laser light source; 2-a beam expanding system; 3-a polarizer; 4-an analyzer; 5-first 1/4 slide; 6-second 1/4 slide; 7-a polarization beam splitter prism; 8-a planar reference mirror; 9-molding; 10-spherical standard mirror; 11-a light evening device; 12-an imaging mirror group; 13-photosensor CCD.
Detailed Description
In order to make the features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail as follows:
as shown in fig. 1, the apparatus of the present embodiment includes: the device comprises a laser light source 1, a beam expanding system 2 with a certain multiplying power, a polarizer 3, a polarization analyzer 4, two 1/4 glass slides, a semi-transparent semi-reflective cubic polarization splitting prism 7, a plane reference mirror 8, a spherical lens to be processed into a disc, a high-precision spherical standard mirror 10, an imaging mirror group 12, a light homogenizing device 11 and a photoelectric sensor CCD 13; the laser light source 1, the beam expanding system 2 and the polarizer 3 are sequentially arranged on a light path at the left of the polarization beam splitter prism 7 from left to right; the second 1/4 glass slide 6, the spherical standard mirror 10 and the spherical lens to be processed into a disc are sequentially arranged on the light path at the right side of the polarization beam splitter prism 7 from left to right; the plane reference mirror 8 and the first 1/4 glass slide 5 are sequentially arranged on a light path above the polarization beam splitter prism 7 from top to bottom; the analyzer 4, the imaging lens group 12, the light uniformizing device 11 and the photoelectric sensor CCD13 are sequentially arranged on a light path below the polarization beam splitter prism 7 from top to bottom.
The light beam emitted by the laser light source 1 is expanded and collimated by the beam expanding system 2 and then is subjected to amplitude splitting at the inclined plane of the polarization beam splitter prism 7 to form two beams of light; the reference light is reflected by the plane reference mirror 8 to form standard plane waves, the test light is reflected back to the deviated test wavefront by the spherical lens to be tested, meets the standard plane waves at the polarizing beam splitter prism 7 and generates interference.
After passing through the spherical standard lens 10, the test light is converted from plane waves into standard spherical waves, and the convergence point of the standard spherical waves coincides with the center of the curvature radius of the spherical lens to be tested and returns along the original optical path.
After the reference light and the test light respectively pass through the first 1/4 glass slide 5 and the second 1/4 glass slide 6 in the light path twice, phase delay is generated, so that the original S polarized light or P polarized light is converted into P polarized light or S polarized light.
The polarizer 3 is used for adjusting the light intensity of the reference light and the test light to be equal so as to improve the contrast of the stripes; the analyzer 4 is configured to change the two beams of light into two beams of light having the same polarization direction after the S-polarized light and the P-polarized light meet at the polarization splitting prism 7, so as to generate interference.
The dodging device 11 is used to eliminate interference of some background noise and improve the contrast of the fringes.
After the interference is generated, the image is imaged into the photoelectric sensor CCD13 through the imaging lens group 12, and is transmitted into a computer for display through an image acquisition card.
As shown in fig. 2 and 4, in the present embodiment, a plurality of spherical lenses to be processed into a disk are rotationally and symmetrically distributed on the spherical mold head of the aluminum mold 9, including a central spherical lens and a plurality of edge spherical lenses. The tail part of the mould 9 is hinged and fixed on the bracket through a ball joint.
As shown in fig. 3, when measuring the edge spherical lens, the center of the curvature radius of the edge spherical lens may slightly shift, so that the optical path provided by the above device is deviated, and in order to correct the displacement, the bracket is further provided with a displacement compensation mechanism, wherein the displacement compensation mechanism may be driven by a lead screw through three stepping motors with mutually orthogonal output directions, so that when measuring the edge spherical lens, the convergence point of the standard spherical wave and the center of the curvature radius of the spherical lens to be measured may still be ensured to coincide. The mechanism ensures that the interference fringes of the lenses at different positions can be automatically presented without excessive manual operation.
The correction is realized by the following calculation method, wherein the deflection angle α of the spherical die head facing the light path is set to be 0:
when α =0, the axial offset distance △ X =0 and the radial offset distance △ Z =0 of the spherical lens to be measured;
when α ≠ 0, the axial offset distance of the spherical lens to be measured is as follows:
radial offset distance:
h is the distance from a hinge point to the top of the spherical mold head, D is the sum of the thicknesses of the spherical mold head and the spherical lens to be measured, and R is the curvature radius of the spherical lens to be measured;
and the displacement compensation mechanism adjusts the axial and radial positions of the spherical mold head according to △ X and △ Z, so that the standard spherical wave convergence point coincides with the center of the curvature radius of the spherical lens to be measured.
The above mechanism may be controlled by a computer system for calculation and regulation.
The above mechanism may be controlled by a computer system for calculation and regulation.
The present invention is not limited to the above preferred embodiments, and other various online Taeman-Green disk-forming interferometer measuring devices can be obtained by anyone who can obtain the same results from the teaching of the present invention.
Claims (9)
1. An on-line Taeman-Green complete set detection interferometer measuring device, comprising: the device comprises a laser light source, a beam expanding system, a polarizer, a polarization analyzer, two 1/4 glass slides, a polarization splitting prism, a plane reference mirror, a spherical lens to be measured and processed into a disc, a spherical standard mirror, an imaging mirror group and a photoelectric sensor CCD; the laser light source, the beam expanding system and the polarizer are sequentially arranged on the light path on the left side of the polarization beam splitter prism from left to right; the second 1/4 glass slide, the spherical standard mirror and the spherical lens to be processed into a disc are sequentially arranged on the light path on the right side of the polarization beam splitter from left to right; the plane reference mirror and the first 1/4 glass slide are sequentially arranged on a light path above the polarization beam splitter from top to bottom; the polarization analyzer, the imaging lens group and the photoelectric sensor CCD are sequentially arranged on a light path below the polarization beam splitter prism from top to bottom.
2. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 1, wherein: the optical system also comprises a light homogenizing device arranged on an optical path between the analyzer and the imaging lens group.
3. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 1, wherein: the light beam emitted by the laser light source is expanded and collimated by the beam expanding system and then is subjected to amplitude splitting at the inclined plane of the polarization beam splitter prism to form two beams of light; the reference light is reflected by the plane reference mirror to form standard plane waves, the test light is reflected back to the deviated test wavefront by the spherical lens to be tested, meets the standard plane waves at the polarization beam splitter prism and generates interference.
4. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 3, wherein: and the test light is converted from plane wave to standard spherical wave after passing through the spherical standard lens, and the convergence point of the standard spherical wave is superposed with the center of the curvature radius of the spherical lens to be tested and returns along the original optical path.
5. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 3, wherein: the reference light and the test light respectively pass through the first 1/4 glass slide and the second 1/4 glass slide in the light path twice, and then phase delay is generated, so that original S polarized light or P polarized light is converted into P polarized light or S polarized light.
6. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 3, wherein: the polarizer is used for adjusting the light intensity of the reference light and the test light to be equal; the analyzer is used for changing two beams of light into two beams of light with the same polarization direction after the S polarized light and the P polarized light meet at the polarization splitting prism to generate interference.
7. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 4, wherein: a plurality of spherical lenses to be subjected to disc forming processing are rotationally and symmetrically distributed on a spherical mold head of the mold; the tail part of the mould is hinged and fixed on the bracket; and the support is also provided with a displacement compensation mechanism.
8. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 7, wherein: a central spherical lens and a plurality of edge spherical lenses are distributed on the spherical mold head; the tail part of the mould is hinged and fixed on the bracket through a ball joint.
9. The on-line Taeman-Green disk-forming detection interferometer measurement device of claim 8, wherein: the displacement compensation mechanism is driven by three stepping motors with mutually orthogonal output directions.
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| CN110646172A (en) * | 2019-11-13 | 2020-01-03 | 福建师范大学 | Online Taeman-Green disk-forming detection interferometer measuring device and method |
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