CN201569787U - High speed control piezoelectric scanning device - Google Patents
High speed control piezoelectric scanning device Download PDFInfo
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- CN201569787U CN201569787U CN2009202893477U CN200920289347U CN201569787U CN 201569787 U CN201569787 U CN 201569787U CN 2009202893477 U CN2009202893477 U CN 2009202893477U CN 200920289347 U CN200920289347 U CN 200920289347U CN 201569787 U CN201569787 U CN 201569787U
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Abstract
The utility model discloses a high speed control piezoelectric scanning device. The structure of the utility model is that a semiconductor laser device is fixed on a main fixing seat; a main reflection lens is adhered on an elastic hinge bracket; the elastic hinge bracket is bolted on two elliptic elastic outer frames; piezoelectric actuators are embedded in the insides of two elliptic elastic outer frames; the two elliptic elastic outer frames are bolted on the main fixing seat; a distance increasing reflector is adhered in the concave cavity of a distance increasing reflector fixing concave plate and bolted in the cavity of a U-shaped fixing bracket through an unsymmetrical I-shaped beam; the U-shaped fixing bracket is fixed at the lower of the main fixing seat; and a position sensitive detector is fixed in a guide rail of the U-shaped fixing bracket. A mutual reversed driving voltage is applied to the two piezoelectric actuators, and the elliptic elastic outer frames convert shifts of the piezoelectric actuators in an expansion direction to the shifts vertical to the expansion direction after amplified to rotate the elastic hinge bracket, and the deflexion angle of the reflector depends on the driving voltage value. And the scanning device can achieve closed-loop feedback control of the deflexion angle of the main reflector through a real-time detection system for the deflexion angle of the reflector.
Description
Technical field
The utility model belongs to the Beam Control field, is specifically related to a kind of High-speed Control piezoelectric scanning device.
Background technology
The free space optical communication adopts laser communications, have that sense is strong, concentration of energy, do not have co-channel interference and close on the crosstalking of wave band, host-host protocol stack easily, simplicity, broadband property, noiseless, need not advantages such as frequency examining, communication security are good.Scanner is as a Primary Component of free space optical communication, and its performance directly influences the communication quality of free space optical communication.The angle control precision of scanner directly has influence on the channel stability of free space optical communication.Traditional scanner is based on turntable, and response speed is not high, and the resonance frequency of frame is low, causes resonance easily.
Telescope has improved the ability of the remote target of human observation greatly, but after the telescope invention soon, people just find that the dynamic disturbance of atmospheric turbulence is influential to optical observation.The shape of imaging facula is constantly shaken and constantly change to the star picture that the dynamic disturbances of atmospheric turbulence can make the heavy caliber telescope be observed.Scanner is an important devices in the adaptive technique, adopts adaptive optical technique can make optical system have automatic adaptation change of external conditions, remain the ability of works fine state, thereby effectively improves image quality.
Laser radar is as indispensable equipment in the modern military equipment, and energy is measurement target position, motion state and shape accurately, detection, identification, resolution and tracking target.Scanner is one of them very important parts, and it has determined many important parameters such as visual field size, frame frequency, bearing accuracy of laser radar, and the traditional laser scanner based on axle system is arranged has friction, moment of inertia bigger, and sweep frequency is lower.
Summary of the invention
The purpose of this utility model is at the deficiencies in the prior art, a kind of High-speed Control piezoelectric scanning device is provided, this device actuating speed is fast, control accuracy is high, do not have mechanical wear, and one-piece construction is simple, good stability, and volume is little, in light weight, rigidity is high.
The High-speed Control piezoelectric scanning device that the utility model provides is characterized in that: semiconductor laser is fixed in the laser instrument set collar, and laser instrument set collar bolt is in the horizontal guide rail on main holder top; Principal reflection mirror is bonded on the top plan of elastic hinge support, the elastic hinge support is a symmetrical structure, bolt is in a side of two ellipse elasticity housings, and piezo-activator is embedded in the ellipse elasticity housing by pretightning force, and the opposite side of ellipse elasticity housing is fixed on the main holder; Two increase the journey catoptron and are bonded in respectively in two concave shaped cavities that increase journey catoptron spill fixed flat planar, two two ends that increase journey catoptron spill fixed flat planar bolt at two asymmetric i-shaped beamses, i-shaped beams is separately fixed in the U type fixed support two arm guide rails, and U type fixed support passes through the screw bolt of self in the vertical guide rail of main holder bottom; L type fixed support bolt in the support bracket fastened guide rail of U type, the position sensitive detector seat be fixed in the L type support bracket fastened on, the position sensitive detector bolt is on the position sensitive detector seat.
Technique effect of the present utility model is embodied in:
According to the High-speed Control piezoelectric scanner that the utility model is made, its single order resonance frequency can reach 1.9KHz, and the closed-loop control bandwidth reaches 2.5KHz, and the mechanical deflection angle of one dimension direction can reach ± and 1 °.Owing to used the elastic hinge structure, catoptron does not have frictional dissipation in yaw motion, make its long working life, need not to lubricate, can be non-maintaining.The angle control accuracy of system can reach 1 μ rad.The utility model device can satisfy the requirement of free space optical communication, adaptive optics compensation and laser radar.
Description of drawings
Fig. 1 is the utility model embodiment one-piece construction synoptic diagram;
Fig. 2 is the piezoelectric scanner structural representation;
Fig. 3 is ellipse elasticity housing and elastic hinge support assembling synoptic diagram;
Fig. 4 is ellipse elasticity housing and piezo-activator assembling synoptic diagram;
Fig. 5 increases the journey structural representation for light beam;
Fig. 6 is U type fixed support, i-shaped beams, L type fixed support assembling synoptic diagram;
Fig. 7 is L type fixed support and position sensitive detector seat assembling synoptic diagram;
Fig. 8 is the utility model embodiment principle of work synoptic diagram;
Fig. 9 is the utility model embodiment closed-loop control block diagram.
Embodiment
Below by by embodiment the utility model being described in further detail, but following examples only are illustrative, and protection domain of the present utility model is not subjected to the restriction of these embodiment.
As shown in Figure 1, the utility model specifically comprises: main holder 1, laser instrument set collar 2, semiconductor laser 3, piezoelectric scanner, light beam increase journey structure, L type fixed support 13, position sensitive detector seat 14 and position sensitive detector 15.Piezoelectric scanner is by ellipse elasticity housing 4a, 4b, principal reflection mirror 5, elastic hinge support 6, piezo-activator 7a, and 7b forms, light beam increases the journey structure by increasing journey catoptron spill fixed flat planar 8a, 8b, increase journey catoptron 9a, 9b, i- shaped beams 10,11, U type fixed support 12 are formed.
The working method of piezoelectric scanner is at first given two piezo-activator 7a as shown in Figure 2, and 7b applies voltage makes both to identical collapsing length.Then by giving two piezo-activator 7a, 7b applies reverse each other driving voltage, can make two piezo-activator 7a, 7b does reverse each other motion, ellipse elasticity housing 4a, 4b are with piezo-activator 7a, and the telescopic displacement of 7b is converted into the displacement perpendicular to flexible direction after the amplification, elastic hinge support 6 is rotated around axially forming, realize the rotation of principal reflection mirror 5.
Light beam increases journey structure regulative mode as shown in Figure 6, i- shaped beams 10,11 can move in 12 liang of arm guide rails of U type fixed support, U type fixed support 12 can move in main holder 1 bottom vertical guide rail, with i- shaped beams 10,11 are designed to asymmetric screw fixes, and mainly is to install for fear of position sensitive detector seat in U type fixed support 12 guide rails the dead angle to occur, is convenient to the adjusting of feedback light path light beam.Fig. 7 is L type fixed support 13 and position sensitive detector seat 14 assembling synoptic diagram, rotates the angle of regulating feedback beam and position sensitive detector 15 surfaces by cylinder, guarantees the light beam vertical incidence.
Fig. 8 is the utility model embodiment principle of work synoptic diagram, and by adjusting semiconductor laser 3, increasing journey catoptron 9a, the adjusting of feedback light path is realized in 9b, position sensitive detector 15 threes' position, makes the feedback beam can be perpendicular to position sensitive detector surface incident.The laser beam that the semiconductor laser 3 of main holder top sends reflexes to through principal reflection mirror 5 and increases journey catoptron 9a, on the 9b, increase journey catoptron 9a through the two sides, 9b reflexes to position sensitive detector 15 surfaces, when principal reflection mirror 5 deflects, reflected light also can deflect, thereby the facula position that causes being mapped to position sensitive detector 15 is moved, position sensitive detector 15 and its signal acquiring processing system can detect the distance that hot spot moves, thereby can calculate the angle of mirror deflection, the angle calculated and the deflection angle of setting are compared, its error is carried out PID (proportion integration differentiation) control, thereby can realize the closed-loop control of principal reflection mirror 5 deflection angles.
The deflection angle closed-loop control block diagram of High-speed Control piezoelectric scanner as shown in Figure 9.The performing step of closed loop control method is: the deflection of principal reflection mirror 5, the facula position that causes inciding the position sensitive detector surface is moved, the signal that position sensitive detector 15 is surveyed arrives DSP DSP CONTROL circuit through analog to digital conversion circuit, calculate the distance that hot spot moves, thereby can calculate the angle of principal reflection mirror 5 deflections by geometric relationship, the angle calculated and the deflection angle of setting are compared, its angular error is carried out digital PID (proportion integration differentiation) control, to control output signal again through D/A converting circuit and power amplification circuit, be applied to piezo-activator 7a, on the 7b, can realize the closed-loop control of principal reflection mirror 5 deflection angles.
Claims (1)
1. High-speed Control piezoelectric scanning device, it is characterized in that the structure of this device is: semiconductor laser (3) is fixed in the laser instrument set collar (2), and laser instrument set collar (2) bolt is in the horizontal guide rail on main holder (1) top; Principal reflection mirror (5) is bonded on the top plan of elastic hinge support (6), elastic hinge support (6) is that symmetrical structure, difference bolt are at two ellipse elasticity housing (4a, side 4b), piezo-activator (7a, 7b) be embedded in ellipse elasticity housing (4a by pretightning force, 4b), (4a, opposite side 4b) are fixed on the main holder (1) ellipse elasticity housing; Two increase journey catoptron (9a, 9b) be bonded in two respectively and increase journey catoptron spill fixed flat planar (8a, in concave shaped cavity 8b), two increase journey catoptron spill fixed flat planar (8a, 8b) bolt is at the two ends of two asymmetric i-shaped beamses (10,12), i-shaped beams (10,11) is separately fixed in U type fixed support (12) the two arm guide rails, and U type fixed support (12) passes through the screw bolt of self in the vertical guide rail of main holder (1) bottom; L type fixed support (13) bolt in the guide rail of U type fixed support (12), position sensitive detector seat (14) be fixed in L type fixed support (13) on, position sensitive detector (15) bolt is on position sensitive detector seat (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202893477U CN201569787U (en) | 2009-12-18 | 2009-12-18 | High speed control piezoelectric scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202893477U CN201569787U (en) | 2009-12-18 | 2009-12-18 | High speed control piezoelectric scanning device |
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| CN201569787U true CN201569787U (en) | 2010-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009202893477U Expired - Fee Related CN201569787U (en) | 2009-12-18 | 2009-12-18 | High speed control piezoelectric scanning device |
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| CN102368162A (en) * | 2011-10-26 | 2012-03-07 | 中国科学院光电技术研究所 | Large-angle quick reflector tracking system |
| CN102749798A (en) * | 2012-07-11 | 2012-10-24 | 南京美乐影视科技有限公司 | Back projection reflecting system fixing device |
| CN105445284A (en) * | 2015-11-17 | 2016-03-30 | 王丽 | Medical surgical needle laser detection frame |
| CN106735865A (en) * | 2016-12-26 | 2017-05-31 | 西安中科微精光子制造科技有限公司 | A kind of ultrafast laser machining system and method based on closed-loop control |
| CN107014771A (en) * | 2017-03-09 | 2017-08-04 | 南京富岛信息工程有限公司 | A kind of method for improving MEMS near infrared spectrometer resolution ratio |
| CN107064055A (en) * | 2017-03-03 | 2017-08-18 | 南京富岛信息工程有限公司 | A kind of method for improving MEMS near infrared spectrometer absorbance repeatability |
| CN107703614A (en) * | 2016-08-08 | 2018-02-16 | 大连光耀辉科技有限公司 | Laser output equipment and fluorescence microscope |
| WO2019205042A1 (en) * | 2018-04-26 | 2019-10-31 | Hewlett-Packard Development Company, L.P. | Scanner carriage devices to prevent tilting |
| CN110405858A (en) * | 2019-08-27 | 2019-11-05 | 徐州绿源智能科技有限公司 | A kind of wood-worker engraving machine earnings pattern calculates and equipment |
| CN110465685A (en) * | 2019-08-27 | 2019-11-19 | 徐州腾睿智能装备有限公司 | A kind of planar engraving machine and method |
| CN110480059A (en) * | 2019-08-27 | 2019-11-22 | 徐州腾睿智能装备有限公司 | A kind of engraving equipment and method with translation structure |
| CN110496980A (en) * | 2019-08-27 | 2019-11-26 | 徐州腾睿智能装备有限公司 | One kind is based on the high-precision three-dimensional automatic engraving equipment of DSP and method |
| CN110509358A (en) * | 2019-08-27 | 2019-11-29 | 徐州绿源智能科技有限公司 | A kind of vertical engraving machine income parsing of environmental protection and equipment |
| CN110508842A (en) * | 2019-08-27 | 2019-11-29 | 徐州腾睿智能装备有限公司 | A kind of light-duty stereo carving device and method |
| JP2021071582A (en) * | 2019-10-30 | 2021-05-06 | 株式会社リコー | Light deflector, image projection device, head-up display, laser head lamp, head-mounted display, object recognition device, and vehicle |
| CN113050271A (en) * | 2021-03-29 | 2021-06-29 | 成都理想境界科技有限公司 | Scanning actuator, optical fiber scanner and scanning display module |
| CN113156640A (en) * | 2021-03-29 | 2021-07-23 | 成都理想境界科技有限公司 | Scanning actuator, optical fiber scanner and scanning display module |
| WO2022199130A1 (en) * | 2021-03-22 | 2022-09-29 | 深圳市火乐科技发展有限公司 | Galvanometer and projector |
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2009
- 2009-12-18 CN CN2009202893477U patent/CN201569787U/en not_active Expired - Fee Related
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102368162A (en) * | 2011-10-26 | 2012-03-07 | 中国科学院光电技术研究所 | Large-angle quick reflector tracking system |
| CN102749798A (en) * | 2012-07-11 | 2012-10-24 | 南京美乐影视科技有限公司 | Back projection reflecting system fixing device |
| CN105445284A (en) * | 2015-11-17 | 2016-03-30 | 王丽 | Medical surgical needle laser detection frame |
| CN107703614A (en) * | 2016-08-08 | 2018-02-16 | 大连光耀辉科技有限公司 | Laser output equipment and fluorescence microscope |
| CN106735865A (en) * | 2016-12-26 | 2017-05-31 | 西安中科微精光子制造科技有限公司 | A kind of ultrafast laser machining system and method based on closed-loop control |
| CN107064055A (en) * | 2017-03-03 | 2017-08-18 | 南京富岛信息工程有限公司 | A kind of method for improving MEMS near infrared spectrometer absorbance repeatability |
| CN107014771A (en) * | 2017-03-09 | 2017-08-04 | 南京富岛信息工程有限公司 | A kind of method for improving MEMS near infrared spectrometer resolution ratio |
| CN107014771B (en) * | 2017-03-09 | 2019-07-23 | 南京富岛信息工程有限公司 | A method of improving MEMS near infrared spectrometer resolution ratio |
| WO2019205042A1 (en) * | 2018-04-26 | 2019-10-31 | Hewlett-Packard Development Company, L.P. | Scanner carriage devices to prevent tilting |
| US11265438B2 (en) | 2018-04-26 | 2022-03-01 | Hewlett-Packard Development Company, L.P. | Scanner carriage devices to prevent tilting |
| CN110465685A (en) * | 2019-08-27 | 2019-11-19 | 徐州腾睿智能装备有限公司 | A kind of planar engraving machine and method |
| CN110480059A (en) * | 2019-08-27 | 2019-11-22 | 徐州腾睿智能装备有限公司 | A kind of engraving equipment and method with translation structure |
| CN110496980A (en) * | 2019-08-27 | 2019-11-26 | 徐州腾睿智能装备有限公司 | One kind is based on the high-precision three-dimensional automatic engraving equipment of DSP and method |
| CN110509358A (en) * | 2019-08-27 | 2019-11-29 | 徐州绿源智能科技有限公司 | A kind of vertical engraving machine income parsing of environmental protection and equipment |
| CN110508842A (en) * | 2019-08-27 | 2019-11-29 | 徐州腾睿智能装备有限公司 | A kind of light-duty stereo carving device and method |
| CN110405858A (en) * | 2019-08-27 | 2019-11-05 | 徐州绿源智能科技有限公司 | A kind of wood-worker engraving machine earnings pattern calculates and equipment |
| JP2021071582A (en) * | 2019-10-30 | 2021-05-06 | 株式会社リコー | Light deflector, image projection device, head-up display, laser head lamp, head-mounted display, object recognition device, and vehicle |
| JP7338403B2 (en) | 2019-10-30 | 2023-09-05 | 株式会社リコー | Optical deflectors, image projection devices, head-up displays, laser headlamps, head-mounted displays, object recognition devices, and vehicles |
| WO2022199130A1 (en) * | 2021-03-22 | 2022-09-29 | 深圳市火乐科技发展有限公司 | Galvanometer and projector |
| CN113050271A (en) * | 2021-03-29 | 2021-06-29 | 成都理想境界科技有限公司 | Scanning actuator, optical fiber scanner and scanning display module |
| CN113156640A (en) * | 2021-03-29 | 2021-07-23 | 成都理想境界科技有限公司 | Scanning actuator, optical fiber scanner and scanning display module |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100901 Termination date: 20181218 |