CN201017131Y - Ultrashort pulse laser scanning device - Google Patents
Ultrashort pulse laser scanning device Download PDFInfo
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- CN201017131Y CN201017131Y CNU2006201633498U CN200620163349U CN201017131Y CN 201017131 Y CN201017131 Y CN 201017131Y CN U2006201633498 U CNU2006201633498 U CN U2006201633498U CN 200620163349 U CN200620163349 U CN 200620163349U CN 201017131 Y CN201017131 Y CN 201017131Y
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- optic modulator
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Abstract
The utility model discloses a super-short pulse laser scanning device. The utility model comprises an acousto-optic modulator and a two-dimensional acousto-optic deflector which are equipped on the same optical path; the two-dimensional acousto-optic deflector consists of two acousto-optic deflectors which are equipped perpendicularly; the included angle of the acousto-optic modulator and the acousto-optic deflector is 45 minus/ plus 5 degrees. The modulation frequency of the acousto-optic modulator is that fAOM is equal tof plus or minor10 percent and the distance from f to the two-dimensional acousto-optic deflector is that dis equal to L minor 10 percent. When the acousto-optic deflector is used for two-dimensional scanning on laser, the utility model can compensate the introduced space dispersion and time dispersion when the acousto-optic deflector is used for scanning the super-short pulse laser beam. The utility model has a simple structure and the optical path is easy for adjustment; the utility model is fit for fields such as femtosecond laser storage, imaging and laser micro-processing, etc., in particular fit for random scanning of laser beam.
Description
Technical Field
The utility model belongs to the technical field of laser scanning, concretely relates to ultrashort pulse laser scanning device based on two-dimentional acousto-optic Deflector (Acoustic-Optical Deflector, AOD) has dispersion compensation function, and it is applicable to fields such as femto second laser storage, formation of image and laser micromachining.
Background
Scanning the laser using an acousto-optic deflector is a very promising laser scanning technique. The method is particularly suitable for the fields of femtosecond laser storage, imaging, laser micromachining and the like. However, when the acousto-optic deflector is used for scanning ultra-short pulse laser, the laser beam can generate spatial dispersion and temporal dispersion, thereby influencing the excitation efficiency of multiple photons. Therefore, when scanning ultra-short pulses using an acousto-optic deflector, spatial and temporal dispersion must be compensated for.
At present, a lot of articles and patents are available about compensation methods. Salom é uses an acousto-optic modulator placed at 45 degrees slant in "Ultra-fast random-access scanning in two-photon microscopy using acousto-optical deflectors" (J Neurosci methods.2006 Jun 30 (1-2): 161-174) (ultrafast random scanning of a two-photon microscope based on an acousto-optic deflector, J. Neuroscience methods, pp. 154-174, 2006) while compensating for the spatial dispersion of a two-dimensional acousto-optic deflector. For time dispersion, another pair of prisms is used for compensation. The design of the optical path is complicated. Chinese patent 'a laser scanning device based on two-dimensional acousto-optic deflector' (patent application No.: 200510019130.0). The patent mentions that spatial dispersion compensation and temporal dispersion compensation of a two-dimensional acousto-optic deflector can be achieved simultaneously by placing a prism tilted 45 degrees in the optical path at a suitable distance in front of the two-dimensional acousto-optic deflector. The utility model discloses the device uses an acousto-optic modulator to replace the prism in above-mentioned chinese patent, places suitable position department before two-dimentional acousto-optic deflector, equally can gain better effect, compares with preceding both and has light path simple structure, avoids advantages such as accurate regulation prism incident angle.
Disclosure of Invention
An object of the utility model is to provide an ultrashort pulse laser scanning device, the device can be simultaneously, accurate compensate to the spatial dispersion and the time of laser beam.
The utility model provides a pair of ultrashort pulse laser scanning device, its characterized in that: the device comprises an acousto-optic modulator and a two-dimensional acousto-optic deflector which are positioned on the same optical path, wherein the two-dimensional acousto-optic deflector is composed of two acousto-optic deflectors which are orthogonally arranged, and the included angle between one acousto-optic deflector and the acousto-optic modulator is 45 +/-5 degrees or 135 +/-5 degrees.
The utility model discloses the device can compensate the space dispersion and the time dispersion that two-dimentional acousto-optic deflector introduced simultaneously, improves the focus quality and the many photon of laser beam and arouse efficiency, and the light path is simple to be convenient for adjust, and the transmissivity of laser beam in the system is high. The laser scanning device is suitable for the fields of femtosecond laser storage, imaging, laser micromachining and the like, is particularly suitable for random scanning of laser beams, and is convenient for large-scale industrial popularization and application.
Drawings
Fig. 1 is a schematic diagram of a structure of the two-dimensional scanning device of the present invention.
Fig. 2 (a) is a left side view of fig. 1, and fig. 2 (b), 2 (c), and 2 (d) are different structures that can achieve the same function.
Fig. 3 is an experimental optical path in which laser emitted from a laser device is subjected to dispersion compensation by an acousto-optic modulator and then directly impinges on an optical screen through a two-dimensional acousto-optic deflector to measure the shape of a light spot.
Fig. 4 is an experimental optical path of laser emitted by a laser device directly striking an optical screen to measure the shape of an optical spot after passing through a two-dimensional acousto-optic deflector.
Fig. 5 (a) shows the light spot compensated by the acousto-optic modulator, (b) shows the light spot without compensation by the acousto-optic modulator, and (c) shows the comparison of the light spot edges under the two structures. As can be seen from the comparison graph, the spatial dispersion compensation effect is obvious.
Fig. 6 is a time half-width diagram of the ultrashort pulse laser in different states. The pulse laser with an initial pulse width of 120 fs was stretched to 572 fs after passing through two acousto-optic deflectors (as in the device of fig. 4), and the pulse width was pushed back to 128 fs after compensation by the acousto-optic modulator (as in the device of fig. 3).
FIG. 7 shows the transmission efficiency of the whole system at different frequency points of the two-dimensional acousto-optic deflector, and the transmission rate of the whole system is 50% -70%.
FIG. 8 is a schematic structural diagram of a construction imaging system using a compensated optical path.
Fig. 9 is a full-field scanning picture of the 170 nm fluorescent bead obtained by scanning with the light path set-up microscope shown in fig. 8.
FIG. 10 shows the X, Y and Z axis resolution measurement of a microscope with 170 nm balls as sample.
Fig. 11 is a schematic diagram of an equivalent structure in which a pair of confocal lenses is provided behind the acousto-optic modulator 1.
FIG. 12 is a schematic diagram of one of the configurations in which the acousto-optic modulator 1 is placed laterally.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in fig. 1 and 2 (a), the apparatus of the present invention includes an acousto-optic Modulator (AOM) 1 and a two-dimensional acousto-optic deflector on the same Optical path, and the two-dimensional acousto-optic deflector is composed of two acousto- optic deflectors 2 and 3 placed orthogonally. The included angle between the acousto- optic deflectors 2 and 3 and the acousto-optic modulator 1 is 45 +/-5 degrees or 135 +/-5 degrees. When the included angle between the acousto-optic modulator 1 and the acousto- optic deflectors 2 and 3 is 45 degrees or 135 degrees, the dispersion compensation effect is better. When the acousto-optic debugger 1 uses positive first-order light diffraction, the acousto- optic deflectors 2 and 3 both use negative first-order diffraction light; when the acousto-optic modulator 1 uses negative first order diffracted light, the acousto- optic deflectors 2 and 3 each use positive first order diffracted light.
In addition to the above-described structures, the same object can be achieved by the following three structures, as shown in fig. 2 (b), 2 (c), and 2 (d). When the structure shown in fig. 2 (b) is used, when the acousto-optic modulator 1 uses the positive first order diffracted light, the acousto-optic deflector 2 uses the negative first order diffracted light, and the acousto-optic deflector 3 uses the positive first order diffracted light; when the acousto-optic modulator 1 uses the negative first-order diffraction light, the acousto-optic deflector 2 uses the positive first-order diffraction light, and the acousto-optic deflector 3 uses the negative first-order diffraction light. When the structure shown in fig. 2 (c) is used, when the acousto-optic modulator 1 uses the positive first order diffracted light, the acousto-optic deflector 2 uses the positive first order diffracted light, and the acousto-optic deflector 3 uses the negative first order diffracted light; when the acousto-optic modulator 1 uses the negative first-order diffraction light, the acousto-optic deflector 2 uses the negative first-order diffraction light, and the acousto-optic deflector 3 uses the positive first-order diffraction light. When the structure shown in fig. 2 (d) is used, when the acousto-optic modulator 1 uses the plus first order diffracted light, the acousto- optic deflectors 2 and 3 both use the plus first order diffracted light; when the acousto-optic modulator 1 uses the minus first order diffraction light, the acousto- optic deflectors 2 and 3 use the minus first order diffraction light. When the light path is built, a proper scheme can be selected according to the actual situation.
The modulation frequency of the acousto-optic modulator 1 is f AOM ，f AOM F ± 10%. f. of AOM The larger the amount of spatial compensation, the larger the modulation frequency f AOM And the space compensation effect is optimal when the frequency is not less than f. f meets the requirement of formula I:
wherein f is AOD The center frequency of operation of a single acousto-optic deflector.
Let D be the distance between the acousto-optic modulator 1 and the two-dimensional acousto-optic deflector, D = L ± 10% L. Adjusting the distance D between the acousto-optic modulator 1 and the two-dimensional acousto-optic deflector can adjust the compensation amount of time dispersion, and the two are in a direct proportion relation. When the distance between the acousto-optic modulator 1 and the two-dimensional acousto-optic deflector is larger than L, negative time dispersion is introduced, and when the distance D is L, the time dispersion is completely compensated. L meets the requirements of the formula II,
wherein GDD M Group delay dispersion, f, introduced for all materials in the optical path AOD The center frequency of the acousto-optic deflector, lambda is the wavelength of the incident laser light wave, c is the speed of light, and v is the propagation speed of the ultrasonic wave in the acousto-optic crystal of the acousto-optic modulator.
When the two-dimensional acousto-optic deflector is used for scanning the ultrashort short pulse laser, the device can accurately compensate the space dispersion and the time dispersion which are introduced when the acousto-optic deflector is used for scanning the ultrashort short pulse laser. The maximum transmission efficiency is 10% higher compared to the method using prism compensation.
Example 1
The experimental light path is constructed as shown in fig. 3. Incident laser (with the central wavelength of 800 nm, the bandwidth of 10 nm and the initial pulse width of 120 fs) of the laser 4 passes through the acousto-optic modulator 1 which is obliquely arranged at 45 degrees and is emitted as negative first-order diffraction light, and the modulation frequency of the acousto-optic modulator 1 is 135.7MHz. Because the acousto-optic deflector for the experiment is sensitive to the polarization state of incident light, a 1/2 wave plate 5 is arranged between the acousto-optic modulator 1 and the two-dimensional acousto-optic deflector. The laser beam passes through the 1/2 wave plate 5 and then reaches the two-dimensional acousto-optic deflector with the central working frequency of 96 MHz. The two-dimensional acoustic-optical deflectors each use positive first-order diffracted light, the emitted light impinges on the optical screen 6, and the CCD7 is used to photograph a spot on the optical screen, resulting in the result shown in fig. 5 (a). The laser beam is directly projected to the light screen 6 (as shown in fig. 4) without compensation through the two-dimensional acoustic light deflector to obtain a light spot as shown in fig. 5 (b), and the comparison of the spatial compensation effect can be seen from fig. 5 (c).
The distance D between the acousto-optic modulator 1 and the acousto-optic two- dimensional deflector 2 and 3 is 58 cm, and the fine adjustment D enables the time width of the laser pulse after passing through the compensation system to be pressed back to 128 femtoseconds. The pulse width of the original laser is measured to be 572 femtoseconds after the original laser pulse passes through the two powered acousto-optic deflectors, and the comparison of the time compensation effect can be seen from fig. 6.
Right the utility model discloses the device is surveyed the transmissivity efficiency of laser beam under the different frequency points of reputation deflector work, obtains the experimental result shown in figure 7. The transmittance of the whole system is 50-70%.
Example 2
The spatially and temporally compensated laser beam is directed to a microscope objective 8 (60 times oil lens, NA =1.24 for experiments), and the optical path is shown in fig. 8. The excitation light and the transmitted signal light are reflected by a dichroic mirror 9, and signal detection is performed by a PMT 10. Scanning 170 nm fluorescent bead sample 11 resulted in an experimental picture as shown in fig. 9, analyzing the X and Y axis resolution, and measuring 374 and 385 nm, respectively, as shown in fig. 10 (a) and 10 (b). Z-axis resolution measurements were made using PZT to give a Z-axis minimum resolution of 1.1 microns, as shown in FIG. 10 (c).
For the aom 1, the modulation frequency is often high (e.g., to compensate for the dispersion of a two-dimensional aom deflector with a central operating frequency of 96MHz, the modulation frequency of the aom 1 needs to be loaded to 135.74 MHz). For near infrared or infrared laser, there are some technical difficulties in manufacturing an acousto-optic modulator with a high modulation frequency. The acousto-optic modulator 1 with lower modulation frequency and a group of confocal lenses (12, 13) can be selected to realize the same compensation effect. As shown in fig. 11, confocal first and second lenses 12 and 13 are sequentially disposed between the acousto-optic modulator 1 and the two-dimensional acousto-optic deflector along the optical path. The focal length of the first lens 12 is F1, the focal length of the second lens 13 is F2, the acousto-optic modulator 1 is positioned at the front focal point F1 of the first lens 12, and the frequency of the acousto-optic modulator 1 is F AOM ’，f AOM ' meets the requirements of formula III.
f AOM ′＝f2/f1 f AOM (III)
The two-dimensional acousto-optic deflector is located at the back focus F of the second lens 13 2 ' position apart by D. The diffraction order used by the acousto-optic modulator is opposite in sign to the diffraction order when the public transport lens group is not used. The equivalent optical path structure can realize that the dispersion of the two-dimensional acousto-optic deflector is compensated by using the acousto-optic modulator with lower modulation frequency, and the same compensation effect is achieved. This makes the device easier to implement.
The acousto-optic modulator 1 is typically placed at an angle of 45 degrees to the horizontal (as shown in figures 1 and 2 (a)). Since the incident light and the diffracted light of the acousto-optic modulator may not be coaxial, the height of the light beam may change after exiting the acousto-optic modulator 1 in the above structure, which is inconvenient for system design and integrated packaging. If the acousto-optic modulator 1 is placed in the horizontal direction (as shown in fig. 12), the included angle of 45 +/-5 degrees is formed between the rear two-dimensional acousto-optic deflector and the horizontal plane, and the height of the light beam in the light path is not changed at the moment, so that the light path can be conveniently built.
Claims (7)
1. An ultrashort pulse laser scanning device, its characterized in that: the device comprises an acousto-optic modulator (1) and a two-dimensional acousto-optic deflector which are positioned on the same optical path, wherein the two-dimensional acousto-optic deflector is composed of two acousto-optic deflectors (2 and 3) which are orthogonally arranged, and the included angle between one acousto-optic deflector and the acousto-optic modulator (1) is 45 +/-5 degrees or 135 +/-5 degrees.
2. An ultrashort pulse laser scanning device according to claim 1, wherein: the included angle between one acousto-optic deflector and the acousto-optic modulator (1) is 45 degrees or 135 degrees.
3. Ultrashort pulsed laser scanning device according to claim 1 or 2, characterized in that: the acousto-optic modulator (1) is arranged in the horizontal direction, and the two-dimensional acousto-optic deflector forms an included angle of 45 +/-5 degrees with the horizontal plane.
4. An ultrashort pulse laser scanning device according to claim 1 or 2, wherein: when the two acousto-optic deflectors (2, 3) are the same,
frequency f of the acousto-optic modulator (1) AOM = f ± 10%:
in the formula (I) f AOD The center frequency of the single acousto-optic deflector during operation;
an interval D, D = L + -10% L of the acousto-optic modulator (1) to the two-dimensional acousto-optic deflector, wherein L satisfies the requirement of formula (II),
GDD in formula (II) M Group delay dispersion introduced by all materials in the optical path, wherein lambda is the wavelength of an incident laser light wave, c is the light speed, and v is the propagation speed of the ultrasonic wave in the crystal of the acousto-optic modulator (1).
5. An ultrashort pulse laser scanning device according to claim 3, wherein: when the two acousto-optic deflectors (2, 3) are the same,
frequency f of the acousto-optic modulator (1) AOM = f ± 10%:
in the formula (I) f AOD The center frequency of the single acousto-optic deflector during operation;
an interval D, D = L + -10% L of the acousto-optic modulator (1) to the two-dimensional acousto-optic deflector, wherein L satisfies the requirement of formula (II),
GDD in formula (II) M Group delay dispersion introduced by all materials in the optical path, wherein lambda is the wavelength of an incident laser light wave, c is the light speed, and v is the propagation speed of the ultrasonic wave in the crystal of the acousto-optic modulator (1).
6. Ultrashort pulsed laser scanning device according to claim 4, wherein: confocal first and second lenses (12, 13) are sequentially arranged between the acousto-optic modulator (1) and the two-dimensional acousto-optic deflector along the optical path direction; the focal length of the first lens (12) is F1, the focal length of the second lens (13) is F2, and the acousto-optic modulator (1) is positioned at the front focal point F of the first lens (12) 1 Where the frequency of the acousto-optic modulator (1) is f AOM ’，f AOM ' satisfies the requirement of formula III:
f AOM ′＝f2/f1f AOM (III)
the two-dimensional acousto-optic deflector is located at a distance D from the back focal point F2' of the second lens (13).
7. An ultrashort pulse laser scanning device according to claim 5, wherein: confocal first and second lenses (12, 13) are sequentially arranged between the acousto-optic modulator (1) and the two-dimensional acousto-optic deflector along the optical path direction; the focal length of the first lens (12) is F1, the focal length of the second lens (13) is F2, and the acousto-optic modulator (1) is positioned at the front focal point F of the first lens (12) 1 Where the frequency of the acousto-optic modulator (1) is f AOM ’，f AOM ' satisfies the requirement of formula III:
f AOM ′＝f2/f1f AOM (III)
the two-dimensional acousto-optic deflector is located at a distance D from the back focus F2' of the second lens (13).
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| CNU2006201633498U CN201017131Y (en) | 2006-12-01 | 2006-12-01 | Ultrashort pulse laser scanning device |
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| CNU2006201633498U CN201017131Y (en) | 2006-12-01 | 2006-12-01 | Ultrashort pulse laser scanning device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458493C (en) * | 2006-12-01 | 2009-02-04 | 华中科技大学 | An ultrashort pulse laser scan device |
| CN102458231A (en) * | 2009-06-10 | 2012-05-16 | 特温特大学 | Apparatus and method for photon absorption coefficient measurement |
| CN103033514A (en) * | 2012-12-13 | 2013-04-10 | 华中科技大学 | Multipath scanning and detecting method and device based on acousto-optic deflectors |
| CN109307930A (en) * | 2018-11-05 | 2019-02-05 | 中国科学院苏州生物医学工程技术研究所 | The Two Photon Fluorescence of two-dimensional high speed scanning imagery is carried out using the acousto-optic deflection device combination of two kinds of different velocities of sound |
| CN109374554A (en) * | 2018-12-08 | 2019-02-22 | 山西大学 | A kind of laser frequency scanning means and method |
| WO2019138119A1 (en) * | 2018-01-15 | 2019-07-18 | Leica Microsystems Cms Gmbh | Acousto-optical device and method |
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2006
- 2006-12-01 CN CNU2006201633498U patent/CN201017131Y/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458493C (en) * | 2006-12-01 | 2009-02-04 | 华中科技大学 | An ultrashort pulse laser scan device |
| CN102458231A (en) * | 2009-06-10 | 2012-05-16 | 特温特大学 | Apparatus and method for photon absorption coefficient measurement |
| CN102458231B (en) * | 2009-06-10 | 2014-12-17 | 特温特大学 | Device and method for photon absorption coefficient measurement |
| CN103033514A (en) * | 2012-12-13 | 2013-04-10 | 华中科技大学 | Multipath scanning and detecting method and device based on acousto-optic deflectors |
| CN103033514B (en) * | 2012-12-13 | 2015-07-29 | 华中科技大学 | A kind of multi-channel scanning based on acoustooptic deflector and detection method and device |
| WO2019138119A1 (en) * | 2018-01-15 | 2019-07-18 | Leica Microsystems Cms Gmbh | Acousto-optical device and method |
| CN111630432A (en) * | 2018-01-15 | 2020-09-04 | 莱卡微系统Cms有限责任公司 | Acousto-optic device and method |
| CN111630432B (en) * | 2018-01-15 | 2023-11-28 | 莱卡微系统Cms有限责任公司 | Acousto-optic apparatus and method |
| US11927735B2 (en) | 2018-01-15 | 2024-03-12 | Leica Microsystems Cms Gmbh | Acousto-optical device and method |
| CN109307930A (en) * | 2018-11-05 | 2019-02-05 | 中国科学院苏州生物医学工程技术研究所 | The Two Photon Fluorescence of two-dimensional high speed scanning imagery is carried out using the acousto-optic deflection device combination of two kinds of different velocities of sound |
| CN109307930B (en) * | 2018-11-05 | 2023-09-12 | 中国科学院苏州生物医学工程技术研究所 | Two-photon microscope for two-dimensional high-speed scanning imaging by adopting two acousto-optic deflectors with different sound speeds |
| CN109374554A (en) * | 2018-12-08 | 2019-02-22 | 山西大学 | A kind of laser frequency scanning means and method |
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