CN208189538U - Substrate board treatment - Google Patents
Substrate board treatment Download PDFInfo
- Publication number
- CN208189538U CN208189538U CN201820610174.3U CN201820610174U CN208189538U CN 208189538 U CN208189538 U CN 208189538U CN 201820610174 U CN201820610174 U CN 201820610174U CN 208189538 U CN208189538 U CN 208189538U
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- Prior art keywords
- medical fluid
- board treatment
- substrate board
- treatment according
- module housing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The utility model relates to a kind of substrate board treatment, the medical fluid coating processes for substrate processed are carried out comprising: medical fluid processing unit handles medical fluid according to the process sequence of regulation；Heating unit accordingly, can obtain the treatment effeciency for improving medical fluid and improve the advantageous effects of the removal efficiency of gas contained in medical fluid by the temperature of medicine liquid heating to prescribed limit during medical fluid is processed by medical fluid processing unit.
Description
Technical field
The utility model relates to a kind of substrate board treatments, more specifically, are related to a kind of substrate board treatment, can
It improves the treatment effeciency of medical fluid and improves the removal efficiency of gas contained in medical fluid.
Background technique
Recently, it is carrying out various for improving the trial of the yield and productivity of semiconductor.
Wherein, face Board level packaging (Panel Level Package；It PLP is) in the PCB for not being used for semiconductor packages
In the case where (printed circuit board), being packaged with cheap expense to the high-performance semiconductor chips more than input and output (will be even
The line for connecing chip and equipment is implanted directly into encapsulation in panel) technology, be evaluated as better than wafer-level packaging (WLP) technique
Technology.
In the technique of manufacture semiconductor packages, along with the painting in medical fluids such as the surface of substrate processed coating resists
Coating process.It is small in the prior art in the size of substrate processed, use following spin coating method: in substrate processed
While central portion coats medical fluid, so that substrate processed rotates, accordingly, medical fluid is coated on the surface of substrate processed.
But becoming large-sized with substrate processed, rotary coating mode is hardly used, and use such as under type
Coating method: so that the gap nozzle and base processed of the fracture pattern with length corresponding with the width of substrate processed
While plate relatively moves, medical fluid is coated on to the surface of substrate processed from gap nozzle.
In addition, there are the following problems if containing gas in the medical fluid for being coated on substrate: medical fluid is difficult to uniform thick
Degree is coated on the surface of substrate, and due to the non-uniform coating of medical fluid, so that coating quality declines.
In particular, in coating processes, if using high viscosity medical fluid (for example, medical fluid with 500cP viscosity above), it can
To prevent the flowing of medical fluid, but there are the following problems: the viscosity of medical fluid is higher, contained in medical fluid due to highly viscous characteristic
The removal efficiency (degassing efficiency) of some gas declines, and the increase of time needed for (degassing) technique that deaerates.
For this purpose, disclosing a kind of following scheme in the prior art: being arranged for excluding the other of gas from medical fluid
Blender removes the gas contained in medical fluid while blender is stirred medical fluid.But have a problem in that in order to
The treating capacity for improving medical fluid, inevitably needs the blender using large capacity, but the size of blender is bigger, is not only more difficult to
Using by equipment making, as small device, and space utilization rate and design freedom are also more reduced.
It is needed excessively moreover, being had the problem that in the way of the degassing of blender when being de-gassed to medical fluid
Time (for example, needing 8 hours when processing 100 liters (liter)), and degassing efficiency is low.
Additionally, there are following problems: the degassing efficiency of medical fluid is lower, to the equipment and route progress for transferring medical fluid
The purge amount of consumed medical fluid when (being removed to the air layer of the inside of equipment and route) is stabilized (so that containing gas
The medical fluid amount that is discharged and discards) more increase, and exist and make cost increase because unnecessarily increasing the usage amount of medical fluid
The problem of.
Accordingly, the various Quality advances for being effectively removed gas contained in medical fluid and making medical fluid are carried out recently
Research, but this is not enough, it is desirable that the exploitation to this.
Utility model content
The purpose of this utility model is to provide a kind of substrate board treatments, can be improved the treatment effeciency of medical fluid, and
Improve the removal efficiency of gas contained in medical fluid.
In addition, the purpose of this utility model is that, it can be improved the degassing efficiency of high viscosity medical fluid, shorten degassing time.
In addition, the purpose of this utility model is that, stabilisation (prewetting prewets) time of equipment can be shortened.
In addition, the purpose of this utility model is that, the usage amount of medical fluid can be reduced, cost is reduced.
In addition, the purpose of this utility model is that, the generation of stain can be prevented, the quality of medical fluid film is improved.
In addition, the purpose of this utility model is that, structure can be simplified, improve space utilization rate and design freedom.
In addition, the purpose of this utility model is that, the spray volume of medical fluid can be equably controlled, so that stability and reliable
Property improve.
A kind of substrate board treatment is provided for realizing the utility model of the purpose of this utility model comprising:
Medical fluid processing unit handles medical fluid according to the process sequence of regulation；Heating unit passes through medical fluid processing unit quilt in medical fluid
By the temperature of medicine liquid heating to prescribed limit during processing.
As described above, following advantageous effects can be obtained according to the utility model: improving the treatment effeciency of medical fluid, and improve
The removal efficiency of gas contained in medical fluid.
In addition, following advantageous effects can be obtained according to the utility model: can be improved not using blender high viscous
The degassing efficiency of medical fluid is spent, degassing time is shortened.
In addition, following advantageous effects can be obtained according to the utility model: reducing the usage amount of medical fluid, reduce cost.
In addition, following advantageous effects can be obtained according to the utility model: shorten to the equipment of supply medical fluid and route into
Row stabilizes the required time, improves treatment effeciency.
In addition, following advantageous effects can be obtained according to the utility model: simplifying structure, improve space utilization rate and design
Freedom degree.
In addition, following advantageous effects can be obtained according to the utility model: preventing the generation of stain, improve medical fluid film
Quality.
In addition, following advantageous effects can be obtained according to the utility model: can equably control the spray volume of medical fluid, make
It obtains stability and reliability improves.
Detailed description of the invention
Fig. 1 is the figure for illustrating substrate board treatment according to the present utility model.
Fig. 2 is the figure for the first embodiment for illustrating the heating unit of substrate board treatment according to the present utility model.
Fig. 3 is the figure for the second embodiment for illustrating the heating unit of substrate board treatment according to the present utility model.
Fig. 4 is the figure of the viscosity change of the medical fluid generated for illustrating the temperature change with medical fluid.
Fig. 5 is the figure for the 3rd embodiment for illustrating the heating unit of substrate board treatment according to the present utility model.
Fig. 6 is the figure for the fourth embodiment for illustrating the heating unit of substrate board treatment according to the present utility model.
Fig. 7 is the figure for illustrating the degassing module of substrate board treatment according to the present utility model.
Fig. 8 and Fig. 9 is another implementation for illustrating the degassing module of substrate board treatment according to the present utility model
The figure of example.
Figure 10 is the figure for illustrating the medical fluid cooling end of substrate board treatment according to the present utility model.
Figure 11 is another embodiment for illustrating the medical fluid cooling end of substrate board treatment according to the present utility model
Figure.
Specific embodiment
Hereinafter, be described in detail referring to preferred embodiment of the attached drawing to the utility model, but the utility model is simultaneously
The non-limitation or restriction for being affected by example.As reference, identical label substantially shows identical element in the present note,
Under such rule, it can be illustrated by the content recorded in reference other accompanying drawings, and can be omitted the art
Technical staff thinks obvious or duplicate content.
Fig. 1 is the figure for illustrating substrate board treatment according to the present utility model, and Fig. 2 is practical according to this for illustrating
The figure of the first embodiment of the heating unit of novel substrate board treatment, Fig. 3 are for illustrating base according to the present utility model
The figure of the second embodiment of the heating unit of plate processing unit.Also, Fig. 4 is produced for illustrating the temperature change with medical fluid
The figure of the viscosity change of raw medical fluid.In addition, Fig. 5 is the heating list for illustrating substrate board treatment according to the present utility model
The figure of the 3rd embodiment of member, Fig. 6 is the 4 for illustrating the heating unit of substrate board treatment according to the present utility model
The figure of embodiment.In addition, Fig. 7 is the figure for illustrating the degassing module of substrate board treatment according to the present utility model, Fig. 8 and
Fig. 9 is the figure for another embodiment for illustrating the degassing module of substrate board treatment according to the present utility model.In addition, figure
10 be the figure for illustrating the medical fluid cooling end of substrate board treatment according to the present utility model, and Figure 11 is for illustrating according to this
The figure of another embodiment of the medical fluid cooling end of the substrate board treatment of utility model.
Referring to figs. 1 to Figure 11, substrate board treatment 1 according to the present utility model includes: medical fluid processing unit 200, is pressed
Medical fluid is handled according to defined process sequence；Heating unit 300 passes through the processed process of medical fluid processing unit 200 in medical fluid
The middle temperature by medicine liquid heating to prescribed limit.
It is intended that improving the treatment effeciency of medical fluid, and improve the removal efficiency of gas contained in medical fluid.
In other words, contain gas if being coated in the medical fluid of substrate, medical fluid is difficult to be coated on base with uniform thickness
There is coating quality decline due to the non-uniform coating of medical fluid in the surface of plate.In particular, in coating processes, if making
With high viscosity medical fluid (for example, medical fluid with 500cP viscosity above), then the flowing of medical fluid can be prevented, but is existed as follows
Problem: the viscosity of medical fluid is higher, due to highly viscous characteristic, under the removal efficiency (degassing efficiency) of gas contained in medical fluid
It drops, the time needed for (degassing) technique that deaerates increases.
In addition, there are the following problems if the degassing efficiency of medical fluid reduces: to the equipment and route for transferring medical fluid
Many times, such as 3-5 days are needed when being stabilized and (being removed to the air layer of the inside of equipment and route), and are deposited
In following problem: increasing the purge amount (so that amount that the medical fluid containing gas is discharged and discards) of medical fluid, because unnecessarily increasing
The usage amount of medical fluid and make cost increase.
In addition, proposing a kind of following scheme in the prior art: the other blender for excluding gas in medical fluid is set,
The gas contained in removal medical fluid while stirring medical fluid in blender.But it has a problem in that improve medical fluid
Treating capacity inevitably needs the blender using large capacity, but the size of blender is bigger, is not only difficult to equipment making
For small device, and space utilization rate and design freedom reduce.Moreover, having following ask in the way of the degassing of blender
Topic: needing excessive time (for example, needing 8 hours when processing 100 liters (liter)) when being de-gassed to medical fluid,
And degassing efficiency is low.
But in the utility model, by the temperature of medical fluid during medical fluid is processed by medical fluid processing unit 200
The temperature of range as defined in being heated to, so as to reduce the viscosity of medical fluid, thus, it is possible to obtain following advantageous effects: shortening
To for transferring medical fluid equipment and route stabilized and (air layer of the inside of equipment and route be removed) when
The time needed, so that the purge amount (so that amount that the medical fluid containing gas is discharged and discards) of medical fluid minimizes.
More specifically, the temperature of medical fluid and the viscosity of medical fluid have correlativity.In particular, the viscosity of medical fluid is with medical fluid
Temperature increase and reduce, handle medical fluid in the case where reducing the state (diluted state) of viscosity of medical fluid, it is accordingly, available as follows
Advantageous effects: shorten to for transferring medical fluid equipment and route the stabilized (pre- that prewets carried out with wet type state
Wetting) the time.
In addition, to contain in medical fluid in the case where reducing the state (diluted state) of viscosity of medical fluid in the utility model
Gas separation, following advantageous effects can be obtained accordingly: even if medicine also can be effectively removed without using other blender
The gas contained in liquid, and improve space utilization rate and design freedom.
As reference, in order to which coating substance (medical fluid) is coated on various objects, can be advised according to desired condition and design
Lattice use substrate board treatment 1 according to the present utility model, the utility model not limited by the type of object and medical fluid or
It limits.
It is configured to medical fluid (for example, PR) being coated on the upper surface of substrate 10 hereinafter, illustrating substrate board treatment 1.It is excellent
Selection of land has the medical fluid of the high viscosity characteristic of 500cP (centipoise, centi-poise) or more in the coating of substrate 10.
Medical fluid processing unit 200 can be formed to supply medical fluid to the various structures of nozzle unit 400, and can
To be made various changes according to desired condition and design specification to the structure of medical fluid processing unit 200.
For example, medical fluid processing unit 200 includes: canister 210, it is used to store medical fluid；Medical fluid supply lines 220 supply
To the medical fluid from canister 210；Filtering module 230 is filtered the medical fluid supplied along medical fluid supply lines 220；It is de-
Gas module 240 is used to exclude the gas G contained in (degassing) medical fluid.
Hereinafter, illustrating during the medical fluid for being stored in canister 210 is supplied to along medical fluid supply line 220 successively
It is handled by filtering module 230 and degassing module 240.According to different situations, can also be arranged in medical fluid processing unit
Except filtering module and degassing module or additional installation filtering module and degassing module.
The medical fluid of liquid is stored in canister 210, be stored in the medical fluid of canister 210 by medical fluid supply lines 220 (for example,
Pipeline) it is supplied to nozzle unit 400.
For example, multiple canisters 210 are connected in form arranged side by side.According to different situations, single canister can be used, this is practical
It is novel not to be limited or restriction by the number of canister and arrangement.
Filtering module 230 is set as being filtered the medical fluid supplied along medical fluid supply lines 220, and medical fluid passed through
Filter module 230 is supplied to nozzle unit 400 after being filtered.
Filtering module 230 may include can to various filters that the foreign matter contained in medical fluid is filtered,
The utility model is not limited or restriction by the type and filter type of the filter used in filtering module 230.
Heating unit 300 is set as medicine liquid heating during medical fluid is processed by medical fluid processing unit 200 extremely
The temperature of prescribed limit.
In this way, being heated to regulation model by the temperature of the processed process herb liquid of medical fluid processing unit 200 in medical fluid
The temperature enclosed, so as to forcibly reduce the viscosity of medical fluid, thus, it is possible to obtain following advantageous effects: shortening to being used for
It transfers equipment and the route of medical fluid to prewet the time so that the progress of wet type state is stabilized, reduces the purge amount of medical fluid.In other words,
Referring to Fig. 4 it is found that the viscosity of medical fluid is reduced as the temperature of medical fluid increases.
For example, referring to Fig. 2, heating unit 300 includes the heater 310 heated in canister 210 to medical fluid.
Heater 310 is configured to be installed on the outside of canister 210 and heat to canister 210, with canister 210
It is heated by heater 310, the medical fluid for being stored in canister 210 is heated.According to different situations, also it is configured to heat
Device is installed on the inside of canister, is directly heated by the heaters in the inside medical fluid of canister.
As another example, referring to Fig. 3, heating unit 300 includes adding on medical fluid supply lines 220 to medical fluid
The heater 320 of heat.
Heater 320 is installed on the outside (or internal) to form the pipeline of medical fluid supply lines 220, and medical fluid is along medical fluid
Supply lines 220 are heated during being supplied to by heater 320.According to different situations, can also be supplied in canister and medical fluid
Heater and the heating to medical fluid progress more than twice are installed respectively to route.
As another example again, referring to Fig. 5, heating unit 300 includes being heated in filtering module 230 to medical fluid
Heater 330.
Heater 330 is installed on the internal or external of filtering module 230, and medical fluid is during passing through filtering module 230
It is heated by heater 330.
In addition, degassing module 240 is set as the gas G for excluding to contain in medical fluid.
Here, the so-called gas G for excluding to contain in medical fluid is defined as, so that the gas G contained in medical fluid is from medical fluid
It separates and removes.
Degassing module 240 can be formed to exclude the various structures of the gas G contained in medical fluid, and the utility model is not
It is limited or restriction by the structure and degassing mode of degassing module 240.
As reference, in the utility model, by being heated medical fluid come so that medical fluid in the treatment process of medical fluid
Viscosity reduce so that the restraining force of the gas contained in medical fluid reduces, thus, it is possible to obtain following favorably imitate
Fruit: so that the gas contained in medical fluid is more quickly and efficiently separated from medical fluid.
Referring to Fig. 6, heating unit 300 includes the heater 340 heated in degassing module 240 to medical fluid.
Heater 340 is installed on the internal or external of degassing module 240, and medical fluid is during through degassing module 240
It is heated by heater 340.At this point, according to the structure of degassing module 240 various changes can occur for the installation site of heater 340
More.
In this way, the viscosity of medical fluid is reduced by being heated in the degasification technique of medical fluid to medical fluid, so as to drop
The restraining force of the gas contained in low medical fluid, therefore following advantageous effects can be obtained: so that the gas contained in medical fluid is more
Quickly and efficiently separated from medical fluid.
For example, referring to Fig. 7, the module 240 that deaerates includes: module housing 242；Membrane tube 244 can be penetrated by gas G
Material is formed, and is configured in the form of through the inside of module housing 242, and medical fluid is supplied to membrane tube 244；Exhaust lay out 246,
It is connected with module housing 242, the gas that will transmit through membrane tube 244 is expelled to the outside of module housing 242.
Module housing 242 can be set in the internal barrel shape with accommodating space, and according to desired condition and
Design specification, the shape and structure of module housing 242 can carry out numerous variations.
Membrane tube 244 is formed by the material that gas G can be penetrated, and is configured in the form of through the inside of module housing 242, and
Medical fluid is supplied along the inside of membrane tube 244.
For example, membrane tube 244 can be formed by doughnut (hollow fiber), doughnut is by cellulose acetate, poly-
Sulfone, polyimides, polyolefin etc. are constituted.According to different situations, membrane tube can be formed by other different materials, this is practical new
Type is not limited or restriction by the material of membrane tube.
According to the difference of desired condition and design specification a variety of changes can occur for the number of membrane tube 244 and arrangement
More.For example, four membrane tubes 244 can be configured at the inside of module housing 242 in the horizontal direction in the form being spaced.
The gas G that exhaust lay out 246 is set as will transmit through membrane tube 244 is expelled to the outside of module housing 242.
For example, exhaust lay out 246 can connect in the upper end of module housing 242, pass through row through the gas G of membrane tube 244
Gas route 246 is discharged.
Preferably, it is connected to the vacuum pressure forming portion 246a that exhaust lay out 246 applies vacuum pressure with exhaust lay out 246
It connects, gas (through the gas of the membrane tube) G excluded from medical fluid is applied in the vacuum pressure sucking of exhaust lay out 246 and arranges
Out.
In addition, heater 340 is configured to heat medical fluid before medical fluid enters membrane tube 244.
In this way, carrying out heating in advance before medical fluid enters membrane tube to reduce the viscosity of medical fluid, medicine can be reduced accordingly
The restraining force of the gas contained in liquid, therefore following advantageous effects can be obtained: so that the gas contained in medical fluid is more efficient
Ground penetrates membrane tube.According to different situations, heater can also be heated module housing, and then medical fluid passes through warmed-up
Module housing and heated.
As reference, in the embodiments of the present invention describing in front and shown in the accompanying drawings, have been illustrated
Medical fluid (inside is run through) is supplied along the inside of membrane tube, outside of the gas contained in medical fluid from the inside of membrane tube to membrane tube is saturating
It crosses, still, according to different situations, is also configured to externally supplying medical fluid (outside is run through) along membrane tube, contains in medical fluid
Inside of some gas from the outside of membrane tube to membrane tube penetrates.
As another example, degassing module is configured to using centrifugal force gas be separated from medical fluid.
More specifically, referring to Fig. 8, degassing module 240' includes: module housing 242', and medical fluid is supplied to module housing
242'；Rotary body 244' makes medical fluid be tightly attached to module housing in the internal rotating of module housing 242' by centrifugal force CF
The inner face of 242'；Exhaust lay out 246', by during the inner face for being tightly attached to module housing 242' in medical fluid from separating liquid medicine
Gas G out is expelled to the outside of module housing 242'.
Module housing 242' can be set in the internal barrel shape with accommodating space, and according to desired condition and
The difference of design specification, the shape and structure of module housing 242' can carry out numerous variations.
Rotary body 244' is installed on the inside of module housing 242' in the form that can be rotated, so that medical fluid is in module housing
242 inner high speed rotation.
Can be used as rotary body 244' enable to medical fluid rotate various rotary body 244', the utility model not by
The limitation or restriction of the type and structure of rotary body 244'.
In this way, making rotary body 244' in the internal rotating of module housing 242', so that medical fluid is tight using centrifugal force CF
It is affixed on the inner face of module housing 242', accordingly, the gas G contained in medical fluid can be made to separate from medical fluid.
In other words, as rotary body 244' rotates and acts on centrifugal force CF to medical fluid, with shape while medical fluid drawout
It is tightly attached to the inner face of module housing 242' at the form of very thin medical fluid layer.At this point, the liquid medical fluid configuration high due to specific gravity
In the outside of medical fluid layer, the low gas configuration of specific gravity is in the inside of medical fluid layer, and therefore, the restraining force of gas G may die down, so
Effectively the gas G contained in medical fluid can be separated from medical fluid.
The gas G that exhaust lay out 246' is set as to separate from medical fluid is expelled to the outside of module housing 242'.
For example, exhaust lay out 246' can connect in the upper-center portion of module housing 242', separated from medical fluid
Gas G be discharged by exhaust lay out 246'.
Preferably, apply the vacuum pressure forming portion 246a' and exhaust lay out 246' of vacuum pressure to exhaust lay out 246'
It is connected, the gas G separated from medical fluid is applied to the vacuum pressure sucking of exhaust lay out 246 and is discharged.
In addition, heater 340 is configured to heat module housing 242'.It is tightly attached to outside module by centrifugal force CF
The medical fluid of the inner face of shell 242' is heated as module housing 242' is heated by heater 340.
In this way, by during medical fluid is tightly attached to the inner face of module housing 242' by centrifugal force CF to medical fluid into
Row heating the restraining force of the gas contained in medical fluid can be made more to reduce accordingly, therefore so that the viscosity of medical fluid reduces
Following advantageous effects can be obtained: so that the gas contained in medical fluid is more efficiently separated out.
As reference, in the embodiments of the present invention aforementioned and shown in the accompanying drawings, it is logical that medical fluid has been illustrated
It crosses the rotary body in module housing internal rotating and is tightly attached to the inner face of module housing, but according to different situations, it can also be with
It excludes other rotary body and rotates module housing, so that the centrifugal force by module housing is tightly attached to medical fluid
The inner face of module housing.
It deaerates module 240 " including: module housing 242 ", medical fluid is supplied to module as another example again referring to Fig. 9
Shell 242 "；The inside of baffle (baff le) 244 ", be set to module housing 242 ", and form the plate of liquid medicine flow
Guide surface；It is come out during the guide surface of exhaust lay out 246 ", by medical fluid along baffle 244 " flows from separating liquid medicine
Gas G be expelled to module housing 242 " outside.
Module housing 242 " can be set in the internal barrel shape with accommodating space, and according to desired condition and
The difference of design specification, module housing 242 " shape and structure can carry out numerous variations.
The inner wall of baffle 244 " module housing 242 is formed in the form of protrusion ", and form the plate of liquid medicine flow
Guide surface.
Here, the guide surface of the so-called plate for forming liquid medicine flow is defined as, forming medical fluid can be thinly to sprawl
The face of the platy morphology for the state flowing opened.
Preferably, along module housing 242 " up and down direction alternately be obliquely configured at side and opposite side in the form of
It is provided with multiple baffles 244 ".More specifically, each baffle 244 " is formed as outside module in mutually different height
Shell 242 " inner wall direction skew to the lower part the inclined plate form of form.
It is illustrated below in module housing 242 " inner wall to be alternately arranged along up and down direction in side and opposite
There are four baffles 244 for the form setting of side ".Baffle 244 " number and arrangement can be according to desired condition and design specification
It is different and numerous variations occur, and baffle can also be formed as by tracing pattern according to different situations.
In this way, medical fluid is along each baffle 244 " guide surface flowed down downwards with the state of thinly drawout, accordingly may be used
So that the gas G contained in medical fluid is separated from medical fluid.Preferably due to which medical fluid is along baffle 244 " guidance surface current
The restraining force of dynamic thickness (thickness of medical fluid layer) thinner gas G is weaker, therefore, can make the gas G contained in medical fluid more
Add and is effectively separated from medical fluid.
The outside of exhaust lay out 246 " the gas G for being set as to separate from medical fluid is expelled to module housing 242 ".
For example, the upper end of exhaust lay out 246 " can connect in module housing 242 ", the gas G separated from medical fluid
Pass through exhaust lay out 246 and " is discharged.
Preferably, to exhaust lay out 246 " the vacuum pressure forming portion 246a for applying vacuum pressure " and exhaust lay out 246 "
Be connected, the gas G separated from medical fluid is applied to exhaust lay out 246 " vacuum pressure sucking and be discharged.
In addition, heater 340 is configured to " heat baffle 244.It " is heated by heater 340, medicine with baffle 244
Liquid is heated along baffle 244 " passing through baffle 244 during flowing ".It, can also be to module according to different situations
Then shell, which heat, to be heated medical fluid by module housing.
" medical fluid is heated during flowing, so that the viscosity of medical fluid in this way, in medical fluid along baffle 244
It reduces, the restraining force of the gas G contained in medical fluid can be made more to reduce accordingly, thus, it is possible to obtain following advantageous effects:
So that the gas G contained in medical fluid is more efficiently separated out.
In addition, nozzle unit 400 is set as the medical fluid handled in medical fluid processing unit 200 being coated on substrate.
Nozzle unit 400 is configured at the top of substrate, obtains the medical fluid supplied from medical fluid supply lines 220 then by medical fluid
(PR) it is coated on the surface of substrate 10.For example, nozzle unit 400 includes the gap nozzle (not shown) of fracture pattern, slit spray
Mouth has length corresponding with the width of substrate 10, and the width of substrate 10 is along the moving direction phase with substrate 10 processed
The width in the direction directly handed over.
Here, can be the whole surface of substrate 10 using the region that nozzle unit 400 coats medical fluid, it is also possible to divide
For the part of multiple unit areas.
As reference, substrate 10 is transferred using base plate transfer portion 100 along the transfer path being previously set.
For example, base plate transfer portion 100 is constructed so that substrate 10 is transferred to be suspended in aerial state.Preferably,
Base plate transfer portion 100 is using the vibrational energy generated by ultrasonic wave so that the state that the substrate suspends is transferred.
In this way, using the vibrational energy generated by ultrasonic wave come so that substrate 10 suspends, it is hereby achieved that following advantageous
Effect: can the suspending power critically to substrate 10 control, to cause because of external contact during transporting substrate 10
Damage and minimizing deformation.
In particular, in using the suspended pattern of vibrational energy generated by ultrasonic wave, due to can be in entire 10 shape of substrate
At uniform suspending power, therefore following advantageous effects can be obtained: coat the coating zone of medical fluid more from nozzle unit 400
It is accurately controlled and keeps the configuration height of the substrate relative to nozzle unit 400.
As reference, in the embodiments of the present invention, the utilization of base plate transfer portion 100 has been illustrated and is produced by ultrasonic wave
Raw vibrational energy comes so that substrate 10 suspends, but according to different situations, and base plate transfer portion can also be by substrate
Bottom surface injection fluid (for example, gas) comes so that substrate suspends.Unlike, it is configured to substrate also to be placed in substrate shifting
The state in portion is sent to be transferred.
More specifically, the purpose that base plate transfer portion 100 is arranged is, is made using the vibrational energy generated by ultrasonic wave
Substrate 10 is obtained to be transferred with the state of suspension.
For example, base plate transfer portion 100 includes multiple oscillating plates, the form that multiple oscillating plates to be spaced from each other configure is only
Vertical segmentation.In the embodiments of the present invention, the multiple oscillating plates for constituting base plate transfer portion are illustrated along transfer substrate
Direction be divided, but according to different situations, what multiple oscillating plates can also intersect along the direction with transfer substrate
Direction is divided.Differently, base plate transfer portion can also only include an oscillating plate.
Here, so-called make the suspension of substrate 10 refer to that substrate 10 separates regulation spacing with the top with oscillating plate 110
Form floats skyborne state, is suspended in the substrate 10 on the top of oscillating plate 110 to adsorb or be supported in along transfer rail
The state for the transfer member 120 that road 122 moves linearly is transferred.
In addition, so-called multiple oscillating plates are referred to that multiple oscillating plates are configured in the form of spaced apart from each other by individual segmentation, by
The suspending power that multiple oscillating plates generate separately acts on substrate 10.
As reference, base plate transfer portion 100 includes loading transferred unit, processing transferred unit, unloading transferred unit, and substrate 10 loads
In loading transferred unit, medical fluid is coated on to the surface of substrate 10 in processing transferred unit, the substrate 10 coated with medical fluid is unloaded at
Carry transferred unit.
It is transferred to processing transferred unit along transferred unit is loaded in the substrate 10 that cleaning processing unit completes cleaning process,
It is transferred to the surface coating medical fluid of the substrate 10 of processing transferred unit.Hereafter, the substrate 10 coated with medical fluid is transferred along unloading
It after portion is transferred, is heated by heat drying unit, makes medical fluid dry accordingly.
Also, transfer member 120 may be configured as transferring along 122 straight line of transfer track.For example, transfer track 122 can be with
It is driven using the principle of linear motor, the permanent magnet of the pole N and the pole S is alternately arranged, and can pass through the line to transfer member 120
The current control of application is enclosed to carry out accurate position control.
In addition, substrate board treatment 1 includes medical fluid cooling end 510, medical fluid cooling end 510 will be coated from nozzle unit 400
The temperature of medical fluid adjust to defined temperature range.
For example, the temperature of medical fluid is adjusted to second temperature by medical fluid cooling end 510, second temperature is more single by heating than medical fluid
The first temperature that member is heated to is low.Preferably, the first temperature is set higher than room temperature.At this point, the first temperature and second temperature
It can be a defined temperature value, or can be set as prescribed limit.
It is intended that the medical fluid coated from nozzle unit 400 is adjusted to be suitable for the Process temperature ranges of technique.It changes
Sentence is talked about, because medical fluid is being heated by the processed period of medical fluid processing unit 200 by heating unit 300,
The temperature of medical fluid is higher than defined temperature range.As described above, medical fluid is difficult if the temperature of medical fluid is higher than defined temperature range
Since the viscosity of medical fluid is low, to generate the flowing of medical fluid, may be decreased coating quality with high viscosity characteristic.
But in the utility model, so that the temperature adjusting of the medical fluid coated from nozzle unit 400 (is adjusted to than first
The low second temperature of temperature) be prescribed limit temperature, can get following advantageous effects accordingly: from nozzle unit 400 coat
Medical fluid can have high viscosity characteristic again, so that the Quality advance of medical fluid film.
Medical fluid cooling end 510,510' can be configured to adjust medicine in various positions according to desired condition and design specification
The temperature of liquid.
For example, referring to Figure 10, medical fluid cooling end 510 be may be disposed on medical fluid supply lines 220, medical fluid supply lines 220
The warmed-up medical fluid of unit 300 is heated to the supply of nozzle unit 400.
As another example, referring to Fig.1 1, medical fluid cooling end 510' is installed on nozzle unit 400, from nozzle unit
Before 400 coating medical fluids, the temperature of medical fluid can be adjusted to defined temperature range.
Medical fluid cooling end 510,510' are using similar to Peltier effect element (Peltier effect device)
Cooling element or using cooling water come the temperature of regulating liquid medicine, the utility model is not by utilizing medical fluid cooling end 510,510'
Limitation or restriction to the mode that fluid temperature is adjusted.
In preceding addressing the embodiments of the present invention shown, medical fluid cooling end 510 has been illustrated, 510' is configured to
The temperature of medical fluid is reduced, but according to different situations, medical fluid cooling end is also configured to improve the temperature or holding of medical fluid
The temperature of medical fluid.
As described above, the preferred embodiment referring to the utility model is illustrated, it is understood that being, if it is affiliated
The those skilled in the art of technical field, the then thought of the utility model that can be recorded in not departing from claims and field
In the range of the utility model is carry out various modifications and is changed.
Label declaration
100: base plate transfer portion 200: medical fluid processing unit
210: canister 220: medical fluid supply lines
230: filtering module 240: degassing module
242: module housing 244: membrane tube
246: exhaust lay out 246a: vacuum pressure forming portion
242': module housing 244': rotary body
246': exhaust lay out 246a': vacuum pressure forming portion
242 ": module housing 244 ": baffle
246 ": exhaust lay out 246a ": vacuum pressure forming portion
300: heating unit 310,320,330,340: heater
400: nozzle unit 510,510': medical fluid cooling end
Claims (20)
1. a kind of substrate board treatment carries out the medical fluid coating processes for substrate processed characterized by comprising
Medical fluid processing unit handles medical fluid according to the process sequence of regulation；
Heating unit is heated to by the processed medical fluid of the medical fluid processing unit.
2. substrate board treatment according to claim 1, which is characterized in that the medical fluid processing unit includes:
Canister is used to store the medical fluid；
Medical fluid supply lines supply the medical fluid from the canister.
3. substrate board treatment according to claim 2, which is characterized in that the heating unit includes:
Heater heats the medical fluid in the canister.
4. substrate board treatment according to claim 2, which is characterized in that the heating unit includes:
Heater heats the medical fluid in the medical fluid supply lines.
5. substrate board treatment according to claim 2, which is characterized in that the medical fluid processing unit includes:
Filtering module is filtered the medical fluid supplied along the medical fluid supply lines.
6. substrate board treatment according to claim 5, which is characterized in that the heating unit includes:
Heater heats the medical fluid in the filtering module.
7. substrate board treatment according to claim 1, which is characterized in that the medical fluid processing unit includes:
Deaerate module, is used to exclude the gas contained in the medical fluid.
8. substrate board treatment according to claim 7, which is characterized in that the heating unit includes:
Heater heats the medical fluid in the degassing module.
9. substrate board treatment according to claim 7, which is characterized in that the degassing module includes:
Module housing；
Membrane tube is formed by the material that gas can penetrate, and is configured in the form of through the inside of the module housing, described
Medical fluid is supplied to membrane tube；
Exhaust lay out is connect with the module housing, will transmit through the gas of the membrane tube to the external row of the module housing
Out.
10. substrate board treatment according to claim 9 characterized by comprising
Vacuum pressure forming portion is connect with the exhaust lay out, applies vacuum pressure to the exhaust lay out.
11. substrate board treatment according to claim 7, which is characterized in that the degassing module includes:
Module housing, the medical fluid are supplied to module housing；
Rotary body, is rotated in the inside of the module housing, makes the medical fluid be tightly attached to the mould by centrifugal force
The inner face of block shell；
Exhaust lay out, the inner face for the module housing being tightly attached in medical fluid during, come out from the separating liquid medicine
Gas be expelled to the outside of the module housing.
12. substrate board treatment according to claim 11 characterized by comprising
Vacuum pressure forming portion is connect with the exhaust lay out, applies vacuum pressure to the exhaust lay out.
13. substrate board treatment according to claim 7, which is characterized in that the degassing module includes:
Module housing, the medical fluid are supplied to module housing；
Baffle, is set to the inside of the module housing, and forms the guide surface of the plate of the liquid medicine flow；
Exhaust lay out, by during the medical fluid is flowed along the guide surface of the baffle from the separating liquid medicine
Gas out is expelled to the outside of the module housing.
14. substrate board treatment according to claim 13, which is characterized in that
It is provided in the form of being alternately obliquely configured at side and opposite side along the up and down direction of the module housing multiple
The baffle.
15. substrate board treatment according to claim 13 characterized by comprising
Vacuum pressure forming portion is connect with the exhaust lay out, applies vacuum pressure to the exhaust lay out.
16. according to claim 1 to the substrate board treatment described in any one of claim 15 characterized by comprising
The medical fluid handled in the medical fluid processing unit is coated on substrate by nozzle unit.
17. substrate board treatment according to claim 16, which is characterized in that the nozzle unit includes:
The gap nozzle of fracture pattern is configured along the direction that the moving direction with the substrate is directly handed over.
18. substrate board treatment according to claim 16 characterized by comprising
Medical fluid cooling end is used to cool down the medical fluid.
19. substrate board treatment according to claim 18, which is characterized in that
The medical fluid cooling end is set to the medical fluid processing unit.
20. substrate board treatment according to claim 18, which is characterized in that
The medical fluid cooling end is set to the nozzle unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2018-0034263 | 2018-03-26 | ||
| KR1020180034263A KR102452090B1 (en) | 2018-03-26 | 2018-03-26 | Substrate treating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208189538U true CN208189538U (en) | 2018-12-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820610174.3U Active CN208189538U (en) | 2018-03-26 | 2018-04-26 | Substrate board treatment |
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| KR (1) | KR102452090B1 (en) |
| CN (1) | CN208189538U (en) |
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| JP2002096021A (en) * | 2000-09-22 | 2002-04-02 | Matsushita Electric Ind Co Ltd | Method of discharging viscous material and method of manufacturing liquid crystal display device |
| JP4608876B2 (en) * | 2002-12-10 | 2011-01-12 | 株式会社ニコン | Exposure apparatus and device manufacturing method |
| JP4975790B2 (en) * | 2009-08-20 | 2012-07-11 | 東京エレクトロン株式会社 | Resist solution supply apparatus, resist solution supply method, program, and computer storage medium |
| JP6107690B2 (en) * | 2013-09-27 | 2017-04-05 | 東京エレクトロン株式会社 | Pretreatment method for filter unit, treatment liquid supply device, filter unit heating device |
| KR101923388B1 (en) * | 2016-07-05 | 2018-11-29 | 주식회사 케이씨텍 | Apparatus of treating substrate with improved photoresist supplying performance |
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| Publication number | Publication date |
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| KR102452090B1 (en) | 2022-10-07 |
| KR20190112370A (en) | 2019-10-07 |
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