CN204825041U - Vacuum coating machine work piece dish and box integral insulation coupling device - Google Patents
Vacuum coating machine work piece dish and box integral insulation coupling device Download PDFInfo
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- CN204825041U CN204825041U CN201520564360.4U CN201520564360U CN204825041U CN 204825041 U CN204825041 U CN 204825041U CN 201520564360 U CN201520564360 U CN 201520564360U CN 204825041 U CN204825041 U CN 204825041U
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Abstract
The utility model relates to a mechanical equipment makes the field, vacuum coating machine work piece dish and box integral insulation coupling device under work piece dish that concretely relates to needs work piece dish and operating mode, vacuum evaporation coating film, the vacuum ion plating and the vacuum multi sphere filming equipment of vacuum box integral insulation and the box integral insulation operating mode, include: box base, cross -over block, place work piece dish track, fastener insulating cylinder, stainless steel faced washer, stainless steel soket head cap screw, prevent the ionization collets, the utility model discloses the device can let work piece dish and vacuum box integral insulation have the reliability more, simultaneously will be extremely convenient effective to the maintenance maintenance of insulating parts, owing to adopted specific technology, can ionization sparking phenomenon not take place in the space between the insulating parts, and consequently, the device has the convenience of security, reliability and maintenance.
Description
Technical field
The utility model relates to mechanical means and manufactures field, is specifically related to need the vacuum plating unit workpiece plate under the workpiece plate of the operating mode of workpiece plate and vacuum chamber integral insulation, vacuum vapor plating, vacuum ion membrane plating and vacuum multi sphere filming equipment and casing integral insulation operating mode and casing integral insulation coupling unit.
Background technology
Due to the needs that vacuum plating special process and device security operate, vacuum plating unit is according to different plated film modes normal just workpiece plate and vacuum chamber integral insulation, like this can on workpiece plate biasing, some processes workpiece plate bias voltage is even greater than 5000V, if vacuum chamber can not will bring huge hidden danger to the safety operation of the coating quality of product and equipment with workpiece plate integral insulation, Given this, excellent insulating Design and manufacture must be carried out, at present, domestic most equipment work-piece dish and casing insulate and often adopt ceramic bearing supporting workpiece to carry out from the mode transfered from one department to another, this mode can play good insulating effect at the use initial stage, but with the increase of equipment use working hour, between ceramic bearing supporting seat and ceramic bearing, gap is clogged by the dust produced in abrasive material or plated film, will strike sparks during the work of workpiece plate biasing, to insulation security will be huge challenge, strike sparks simultaneously and the fastening piece of fastening ceramic bearing may be caused to damage, such ceramic bearing will be difficult to dismounting after damaging, therefore one can either superior isolation, the insulation system can being convenient to again maintaining is extremely urgent.
Utility model content
For solving currently available technology problem, equipment work-piece dish is placed in certain tracks by the utility model, and track and vacuum chamber use insulating material and insulating Design to reach a kind of vacuum plating unit workpiece plate and the casing integral insulation coupling unit of the object of workpiece plate and vacuum chamber integral insulation.
The technical scheme that the utility model is adopted for achieving the above object is: a kind of vacuum plating unit workpiece plate and casing integral insulation coupling unit, it is characterized in that comprising: cabinet base, cross-over block, place work piece dish track, fastening piece insulating cylinder, stainless steel faced washer, stainless steel socket head cap screw, anti-ionization collets, described workpiece plate is placed in orbit, track is connected by stainless steel socket head cap screw with casing, with the cross-over block isolation of 15-30mm tetrafluoroethylene between track and cabinet base, socket head cap screw is threaded with cabinet base through fastening piece insulating cylinder and locks, stainless steel faced washer is lined with under socket head cap screw, fastening piece insulating cylinder top is compressed by anti-ionization collets and fastening piece insulating cylinder shrink-fit, prevent ionization sparking from damaging stainless steel screw.
Preferably, above all tolerance clearances are no more than 3mm;
Preferably, described cross-over block thickness is 15-30mm.
The utility model has following beneficial effect: the utility model device can allow workpiece plate and vacuum chamber integral insulation more have reliability, simultaneously will be extremely effectively convenient for the maintaining of insulating element, owing to have employed specific technique, ionization spark phenomenon can not be there is in space between insulating element, therefore, this device has the convenience of security, reliability and maintaining.
Accompanying drawing explanation
Fig. 1 is the utility model Facad structure schematic diagram;
In figure: 1-cabinet base; 2-cross-over block; 3 place work piece dish tracks; 4-fastening piece insulating cylinder; 5-stainless steel faced washer; 6-stainless steel socket head cap screw; The anti-ionization collets of 7-.
Embodiment
Workpiece plate is placed in orbit, track is connected by stainless steel socket head cap screw (6) with casing, isolate with 15-30mm teflon insulation cushion block (2) between track (3) and cabinet base (1), socket head cap screw (6) to be threaded with cabinet base through fastening piece insulating cylinder (4) and to lock, socket head cap screw (6) underlay stainless steel faced washer (5), prevent fastening piece insulating cylinder (5) unbalance stress deformed damaged in locked process, fastening piece insulating cylinder (5) top is compressed by anti-ionization collets (7) and fastening piece insulating cylinder (5) shrink-fit, prevent ionization sparking from damaging stainless steel screw.
Guarantee workpiece plate and casing integral insulation, place work piece dish track (3) and cabinet base (1) integral insulation must be guaranteed, place work piece dish track (3) connects fastening with cabinet base (1) by stainless steel socket head cap screw (6), between place work piece dish track (3) and cabinet base (1), flat contact surface all uses the cross-over block of polytetrafluoroethylmaterial material (2) to insulate, stainless steel socket head cap screw (6) need be locked by the threaded hole on the circular hole of place work piece dish track and cabinet base (1) face, insulation between stainless steel socket head cap screw (6) and place work piece dish track (3) adopts the fastening piece insulating cylinder (4) of polytetrafluoroethylmaterial material to insulate, must guarantee that insulating cylinder passes circular hole on place work piece dish track (3) as figure, stainless steel socket head cap screw (6) installs stainless steel faced washer (5) additional, guarantee fastening piece insulating cylinder (4) uniform stressed, damage when not locked by stainless steel socket head cap screw (6), anti-ionization collets (7) are installed additional in fastening piece insulating cylinder (4) upper end, guarantee that stainless steel socket head cap screw (6) is not damaged by the ionization sparking in coating process
The above; be only the utility model preferably embodiment; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; be equal to according to the technical solution of the utility model and utility model design thereof and replace or change, all should be encompassed within protection domain of the present utility model.
Claims (3)
1. a vacuum plating unit workpiece plate and casing integral insulation coupling unit, it is characterized in that comprising: cabinet base, cross-over block, place work piece dish track, fastening piece insulating cylinder, stainless steel faced washer, stainless steel socket head cap screw, anti-ionization collets, described workpiece plate is placed in orbit, track is connected by stainless steel socket head cap screw with casing, with the cross-over block isolation of 15-30mm tetrafluoroethylene between track and cabinet base, socket head cap screw is threaded with cabinet base through fastening piece insulating cylinder and locks, stainless steel faced washer is lined with under socket head cap screw, fastening piece insulating cylinder top is compressed by anti-ionization collets and fastening piece insulating cylinder shrink-fit, prevent ionization sparking from damaging stainless steel screw.
2. a kind of vacuum plating unit workpiece plate according to claim 1 and casing integral insulation coupling unit, is characterized in that above all tolerance clearances are no more than 3mm.
3. a kind of vacuum plating unit workpiece plate according to claim 1 and casing integral insulation coupling unit, is characterized in that described cross-over block thickness is 15-30mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520564360.4U CN204825041U (en) | 2015-07-30 | 2015-07-30 | Vacuum coating machine work piece dish and box integral insulation coupling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520564360.4U CN204825041U (en) | 2015-07-30 | 2015-07-30 | Vacuum coating machine work piece dish and box integral insulation coupling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204825041U true CN204825041U (en) | 2015-12-02 |
Family
ID=54682660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520564360.4U Active CN204825041U (en) | 2015-07-30 | 2015-07-30 | Vacuum coating machine work piece dish and box integral insulation coupling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204825041U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110832751A (en) * | 2017-06-26 | 2020-02-21 | 法雷奥电机设备公司 | Mechanical assembly with electrical insulation between a rotating electrical machine and its electronic components |
-
2015
- 2015-07-30 CN CN201520564360.4U patent/CN204825041U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110832751A (en) * | 2017-06-26 | 2020-02-21 | 法雷奥电机设备公司 | Mechanical assembly with electrical insulation between a rotating electrical machine and its electronic components |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |