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CN112448610A - Piezoelectric driving deep sea propulsion device and working method thereof - Google Patents

Piezoelectric driving deep sea propulsion device and working method thereof Download PDF

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Publication number
CN112448610A
CN112448610A CN202011154547.9A CN202011154547A CN112448610A CN 112448610 A CN112448610 A CN 112448610A CN 202011154547 A CN202011154547 A CN 202011154547A CN 112448610 A CN112448610 A CN 112448610A
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rectangular pyramid
piezoelectric ceramic
vibrating beam
piezoelectric
rectifying cover
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CN112448610B (en
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刘瑞
金家楣
赵恒�
王亮
于鹏鹏
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods

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Abstract

The invention discloses a piezoelectric driving deep sea propulsion device and a working method thereof, wherein the piezoelectric driving deep sea propulsion device comprises a piezoelectric vibrator, an upper rectifying cover and a lower rectifying cover; the piezoelectric vibrator comprises a metal matrix and four piezoelectric ceramic pieces, wherein the metal matrix is in a diamond shape and is formed by fixedly connecting four vibration beams and two V-shaped connectors, and the fixedly connected parts of the vibration beams on two sides form two actuating heads; the four piezoelectric ceramic plates are respectively stuck on the inner sides of the four vibrating beams and are polarized along the thickness direction, and the polarization direction is outward; the upper rectifying cover and the lower rectifying cover are both streamlined, and two ends of the upper rectifying cover and the lower rectifying cover are correspondingly stuck on the two V-shaped connecting heads. The actuator moves forwards or backwards by applying driving signals with 90-degree phase difference to the piezoelectric ceramic plates, and the voltage of the piezoelectric ceramic plates on the same side can be changed to turn. The invention greatly reduces the volume of the underwater vehicle, reduces the complexity of the structure and simultaneously avoids the influence of a strong magnetic field on the propeller.

Description

Piezoelectric driving deep sea propulsion device and working method thereof
Technical Field
The invention relates to the field of ultrasonic motors, in particular to a piezoelectric driving deep sea propulsion device and a working method thereof.
Background
With the development of social economy, the application value of the unmanned underwater vehicle in the civil field is more prominent, and the unmanned underwater vehicle plays an important role in safe search and rescue, environmental protection and educational and scientific research activities. The exploration function of the unmanned underwater vehicle can help human beings to further explore the sea, and the unmanned underwater vehicle can substitute manpower to explore in deep sea exploration. Through the unmanned underwater vehicle, information obtained by scientific research personnel from deep sea can be quickly converted into scientific research achievements, and the innovative development of ocean science and technology in China is promoted. The function of the unmanned underwater vehicle in the military field is very remarkable, and with the development of scientific technology, the weapon equipment is continuously updated, and the mode of marine operation is historically revolutionary. The unmanned underwater vehicle has strong information monitoring and reconnaissance functions and is an excellent weapon for carrying out anti-submarine battles. The conventional underwater vehicle propulsion device mainly utilizes an electromagnetic motor to provide power, and under the deep sea environment, the structure is complex and the size is too large due to the deep sea pressure, so that the development of miniaturization of the deep sea underwater vehicle is not facilitated.
Disclosure of Invention
The invention aims to solve the technical problem of providing a piezoelectric driving deep sea propulsion device and a working method thereof aiming at the defects in the background technology.
The invention adopts the following technical scheme for solving the technical problems:
a piezoelectric drive deep sea propulsion device comprises a piezoelectric vibrator, an upper rectifying cover and a lower rectifying cover;
the piezoelectric vibrator comprises a metal substrate and first to fourth piezoelectric ceramic pieces;
the metal matrix is rhombic and comprises a first connector, a second connector and first to fourth vibrating beams;
the first connector and the second connector are identical in structure and respectively comprise a first inclined rectangular pyramid and a second inclined rectangular pyramid; the first oblique rectangular pyramid and the second oblique rectangular pyramid respectively comprise a bottom surface and first to fourth oblique surfaces; the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, and the vertex angles of the first oblique rectangular pyramid and the second oblique rectangular pyramid are fixedly connected, the second inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, and a V-shaped gap is formed between the third inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid;
the first to fourth vibrating beams are strip-shaped, have the same structure and respectively comprise first to fourth side surfaces, a first end surface and a second end surface, wherein the first to fourth side surfaces are sequentially and vertically connected, the first side surface is parallel to the third side surface, and the second side surface is parallel to the fourth side surface; the angle of an included angle between the first end face and the first side face is a preset first angle threshold value, and the first angle threshold value is larger than 90 degrees; the angle between the second end face and the first side face is a preset second angle threshold value, and the second angle threshold value is smaller than 90 degrees;
the first side surfaces of the first vibrating beam and the third vibrating beam are arranged in parallel, and the first side surfaces of the second vibrating beam and the fourth vibrating beam are arranged in parallel; the first end surfaces of the first vibrating beam and the second vibrating beam are positioned on the same plane, and the first end surfaces of the third vibrating beam and the fourth vibrating beam are positioned on the same plane; one end of the first vibrating beam, which is far away from the first end surface of the first vibrating beam, is fixedly connected with one end of the fourth vibrating beam, which is far away from the first end surface of the fourth vibrating beam, so that a first actuating head is formed; one end of the second vibrating beam, which is far away from the first end surface of the second vibrating beam, is fixedly connected with one end of the third vibrating beam, which is far away from the first end surface of the third vibrating beam, so that a second actuating head is formed;
the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid of the first connecting joint are fixedly connected with the first end surfaces of the first vibrating beam and the second vibrating beam respectively; the bottom surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid of the second connector are respectively and correspondingly fixedly connected with the first end surfaces of the third vibration beam and the fourth vibration beam;
the first to fourth piezoelectric ceramic plates are correspondingly arranged on the third side surfaces of the first to fourth vibrating beams, and are polarized along the thickness direction and outward in the polarization direction;
the piezoelectric vibrators are centrosymmetric;
the upper rectifying cover and the lower rectifying cover are identical in structure and respectively comprise a cover body, a first connecting piece and a second connecting piece, wherein the cover body is an arc panel and is in an oval shape with two ends cut off, and the first connecting piece and the second connecting piece are fixedly connected with two ends of the cover body respectively;
the first connecting piece of the upper rectifying cover is fixedly connected with the second inclined surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid in the first connector, and the second connecting piece of the upper rectifying cover is fixedly connected with the second inclined surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid in the second connector; the first connecting piece of the lower rectifying cover is fixedly connected with the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid in the first connecting head, and the second connecting piece of the lower rectifying cover is fixedly connected with the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid in the second connecting head; and the openings of the upper rectifying cover and the lower rectifying cover are opposite.
As a further optimization scheme of the piezoelectric driving deep sea propulsion unit, the first connecting piece and the second connecting piece in the upper rectifying cover and the lower rectifying cover are V-shaped panels with the same structure.
The invention also discloses a working method of the piezoelectric driving underwater deep sea propulsion device, which comprises the following processes:
if the propulsion device needs to move forwards, a first signal is applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, a second signal is applied to the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, the first signal and the second signal are adjusted to enable the first signal and the second signal to have a pi/2 difference in time phase and the same voltage, a first-order bending vibration symmetric mode and a first-order bending vibration antisymmetric mode of the piezoelectric vibrator are excited, the two modes are superposed to enable mass points of the first actuating head and the second actuating head to generate elliptical motion tracks with opposite directions, and the surrounding water body is stirred to form eddy currents with the same directions as the elliptical motion directions of the first actuating head and the second actuating head, so that thrust is generated; if the propelling device needs to move backwards, the first signal and the second signal are adjusted to have a phase difference of-pi/2 on the time phase and the voltages are the same;
if the propelling device needs to turn, adjusting the voltage of the driving signals on the first piezoelectric ceramic chip and the fourth piezoelectric ceramic chip to be larger than the voltage of the driving signals on the second piezoelectric ceramic chip and the third piezoelectric ceramic chip; if the propelling device needs to turn reversely, the voltage of the driving signals on the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet is adjusted to be larger than the voltage of the driving signals on the first piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects:
the invention can realize open structural design of the underwater vehicle in deep sea by utilizing the principle of piezoelectric driving, greatly reduce the volume of the underwater vehicle, reduce the complexity of the structure and simultaneously avoid the influence of a strong magnetic field on a propeller. Provides a new and more effective mode for deep sea propulsion.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of a piezoelectric vibrator in the present invention;
FIG. 3 is a schematic view of the structure of a metal substrate according to the present invention;
FIG. 4 is a schematic view of the upper fairing in the present invention;
fig. 5 is a schematic view showing the polarization directions and applied electric signals of the first to fourth piezoelectric ceramic sheets according to the present invention;
FIG. 6 is a schematic view of the first and second longitudinal vibration modes of the actuator head of the present invention;
FIG. 7 is a schematic view of the first and second transverse modes of vibration of the actuator head during operation of the present invention;
FIG. 8 is a schematic view of the change of state of the present invention in operation;
fig. 9 is a schematic view of the present invention in operation in a turning direction.
In the figure, 1-piezoelectric vibrator, 1.1-metal base, 1.2-piezoelectric ceramic piece, 2-lower rectifying cover, 3-upper rectifying cover, 1.1.1-first vibrating beam, 1.1.2-second vibrating beam, 1.1.3-third vibrating beam, 1.1.4-fourth vibrating beam, 1.1.5-first actuating head, 1.1.6-second actuating head, 1.1.7-first connecting head, 1.1.8-second connecting head, 3.1-first connecting piece, 3.2-cover body and 3.3-second connecting piece.
Detailed Description
The technical scheme of the invention is further explained in detail by combining the attached drawings:
the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, components are exaggerated for clarity.
As shown in figure 1, the invention discloses a piezoelectric driven deep sea propulsion device, which comprises a piezoelectric vibrator, an upper rectifying cover and a lower rectifying cover.
As shown in fig. 2, the piezoelectric vibrator includes a metal base and first to fourth piezoelectric ceramic pieces.
As shown in fig. 3, the metal substrate is diamond-shaped and includes a first connector, a second connector, and first to fourth vibration beams;
the first connector and the second connector are identical in structure and respectively comprise a first inclined rectangular pyramid and a second inclined rectangular pyramid; the first oblique rectangular pyramid and the second oblique rectangular pyramid respectively comprise a bottom surface and first to fourth oblique surfaces; the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, and the vertex angles of the first oblique rectangular pyramid and the second oblique rectangular pyramid are fixedly connected, the second inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, and a V-shaped gap is formed between the third inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid;
the first to fourth vibrating beams are strip-shaped, have the same structure and respectively comprise first to fourth side surfaces, a first end surface and a second end surface, wherein the first to fourth side surfaces are sequentially and vertically connected, the first side surface is parallel to the third side surface, and the second side surface is parallel to the fourth side surface; the angle of an included angle between the first end face and the first side face is a preset first angle threshold value, and the first angle threshold value is larger than 90 degrees; the angle between the second end face and the first side face is a preset second angle threshold value, and the second angle threshold value is smaller than 90 degrees;
the first side surfaces of the first vibrating beam and the third vibrating beam are arranged in parallel, and the first side surfaces of the second vibrating beam and the fourth vibrating beam are arranged in parallel; the first end surfaces of the first vibrating beam and the second vibrating beam are positioned on the same plane, and the first end surfaces of the third vibrating beam and the fourth vibrating beam are positioned on the same plane; one end of the first vibrating beam, which is far away from the first end surface of the first vibrating beam, is fixedly connected with one end of the fourth vibrating beam, which is far away from the first end surface of the fourth vibrating beam, so that a first actuating head is formed; one end of the second vibrating beam, which is far away from the first end surface of the second vibrating beam, is fixedly connected with one end of the third vibrating beam, which is far away from the first end surface of the third vibrating beam, so that a second actuating head is formed;
the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid of the first connecting joint are fixedly connected with the first end surfaces of the first vibrating beam and the second vibrating beam respectively; the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid of the second connector are fixedly connected with the first end surfaces of the third vibrating beam and the fourth vibrating beam respectively.
The first to fourth piezoelectric ceramic pieces are correspondingly arranged on the third side surfaces of the first to fourth vibrating beams, and are polarized along the thickness direction of the first to fourth vibrating beams, and the polarization direction of the first to fourth piezoelectric ceramic pieces faces outwards.
The piezoelectric vibrators are centrosymmetric.
As shown in fig. 4, the upper rectifying cover and the lower rectifying cover have the same structure and both comprise a cover body, a first connecting piece and a second connecting piece, wherein the cover body is an arc-shaped panel and is in an elliptical shape with two ends cut off, and the first connecting piece and the second connecting piece are fixedly connected with two ends of the cover body respectively;
the first connecting piece of the upper rectifying cover is fixedly connected with the second inclined surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid in the first connector, and the second connecting piece of the upper rectifying cover is fixedly connected with the second inclined surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid in the second connector; the first connecting piece of the lower rectifying cover is fixedly connected with the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid in the first connecting head, and the second connecting piece of the lower rectifying cover is fixedly connected with the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid in the second connecting head; and the openings of the upper rectifying cover and the lower rectifying cover are opposite.
In the upper rectifying cover and the lower rectifying cover, the first connecting piece and the second connecting piece are preferably arranged to be V-shaped panels with the same structure.
The invention also discloses a working method of the piezoelectric driving underwater deep sea propulsion device, which comprises the following processes:
if the propulsion device needs to move forwards, a first signal is applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, a second signal is applied to the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, the first signal and the second signal are adjusted to have a pi/2 difference in time phase and have the same voltage, as shown in fig. 5, a first-order bending vibration symmetry mode (as shown in fig. 6) and a first-order bending vibration antisymmetric mode (as shown in fig. 7) of the piezoelectric vibrator are excited, the two modes are superposed to enable mass points of the first actuating head and the second actuating head to generate elliptical motion tracks with opposite directions, as shown in fig. 8, the surrounding water body is stirred to form eddy currents with the same elliptical motion directions of the first actuating head and the second actuating head, and then thrust is generated; if the propelling device needs to move backwards, the first signal and the second signal are adjusted to have a phase difference of-pi/2 on the time phase and the voltages are the same;
if the propelling device needs to turn, adjusting the voltage of the driving signals on the first piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet to be larger than the voltage of the driving signals on the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet, as shown in fig. 9; if the propelling device needs to turn reversely, the voltage of the driving signals on the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet is adjusted to be larger than the voltage of the driving signals on the first piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only illustrative of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (3)

1. A piezoelectric drive deep sea propulsion unit is characterized by comprising a piezoelectric vibrator, an upper rectifying cover and a lower rectifying cover;
the piezoelectric vibrator comprises a metal substrate and first to fourth piezoelectric ceramic pieces;
the metal matrix is rhombic and comprises a first connector, a second connector and first to fourth vibrating beams;
the first connector and the second connector are identical in structure and respectively comprise a first inclined rectangular pyramid and a second inclined rectangular pyramid; the first oblique rectangular pyramid and the second oblique rectangular pyramid respectively comprise a bottom surface and first to fourth oblique surfaces; the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, and the vertex angles of the first oblique rectangular pyramid and the second oblique rectangular pyramid are fixedly connected, the second inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid are on the same plane, and a V-shaped gap is formed between the third inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid;
the first to fourth vibrating beams are strip-shaped, have the same structure and respectively comprise first to fourth side surfaces, a first end surface and a second end surface, wherein the first to fourth side surfaces are sequentially and vertically connected, the first side surface is parallel to the third side surface, and the second side surface is parallel to the fourth side surface; the angle of an included angle between the first end face and the first side face is a preset first angle threshold value, and the first angle threshold value is larger than 90 degrees; the angle between the second end face and the first side face is a preset second angle threshold value, and the second angle threshold value is smaller than 90 degrees;
the first side surfaces of the first vibrating beam and the third vibrating beam are arranged in parallel, and the first side surfaces of the second vibrating beam and the fourth vibrating beam are arranged in parallel; the first end surfaces of the first vibrating beam and the second vibrating beam are positioned on the same plane, and the first end surfaces of the third vibrating beam and the fourth vibrating beam are positioned on the same plane; one end of the first vibrating beam, which is far away from the first end surface of the first vibrating beam, is fixedly connected with one end of the fourth vibrating beam, which is far away from the first end surface of the fourth vibrating beam, so that a first actuating head is formed; one end of the second vibrating beam, which is far away from the first end surface of the second vibrating beam, is fixedly connected with one end of the third vibrating beam, which is far away from the first end surface of the third vibrating beam, so that a second actuating head is formed;
the bottom surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid of the first connecting joint are fixedly connected with the first end surfaces of the first vibrating beam and the second vibrating beam respectively; the bottom surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid of the second connector are respectively and correspondingly fixedly connected with the first end surfaces of the third vibration beam and the fourth vibration beam;
the first to fourth piezoelectric ceramic plates are correspondingly arranged on the third side surfaces of the first to fourth vibrating beams, and are polarized along the thickness direction and outward in the polarization direction;
the piezoelectric vibrators are centrosymmetric;
the upper rectifying cover and the lower rectifying cover are identical in structure and respectively comprise a cover body, a first connecting piece and a second connecting piece, wherein the cover body is an arc panel and is in an oval shape with two ends cut off, and the first connecting piece and the second connecting piece are fixedly connected with two ends of the cover body respectively;
the first connecting piece of the upper rectifying cover is fixedly connected with the second inclined surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid in the first connector, and the second connecting piece of the upper rectifying cover is fixedly connected with the second inclined surfaces of the first inclined rectangular pyramid and the second inclined rectangular pyramid in the second connector; the first connecting piece of the lower rectifying cover is fixedly connected with the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid in the first connecting head, and the second connecting piece of the lower rectifying cover is fixedly connected with the fourth inclined surfaces of the first oblique rectangular pyramid and the second oblique rectangular pyramid in the second connecting head; and the openings of the upper rectifying cover and the lower rectifying cover are opposite.
2. The piezoelectric deep sea propulsion device according to claim 1, wherein the first and second connectors of the upper and lower fairing are V-shaped panels having the same structure.
3. The working method of the piezoelectric driven underwater deep sea propulsion device according to claim 1, comprising the following processes:
if the propulsion device needs to move forwards, a first signal is applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, a second signal is applied to the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, the first signal and the second signal are adjusted to enable the first signal and the second signal to have a pi/2 difference in time phase and the same voltage, a first-order bending vibration symmetric mode and a first-order bending vibration antisymmetric mode of the piezoelectric vibrator are excited, the two modes are superposed to enable mass points of the first actuating head and the second actuating head to generate elliptical motion tracks with opposite directions, and the surrounding water body is stirred to form eddy currents with the same directions as the elliptical motion directions of the first actuating head and the second actuating head, so that thrust is generated; if the propelling device needs to move backwards, the first signal and the second signal are adjusted to have a phase difference of-pi/2 on the time phase and the voltages are the same;
if the propelling device needs to turn, adjusting the voltage of the driving signals on the first piezoelectric ceramic chip and the fourth piezoelectric ceramic chip to be larger than the voltage of the driving signals on the second piezoelectric ceramic chip and the third piezoelectric ceramic chip; if the propelling device needs to turn reversely, the voltage of the driving signals on the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet is adjusted to be larger than the voltage of the driving signals on the first piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet.
CN202011154547.9A 2020-10-26 2020-10-26 Piezoelectric driving deep sea propulsion device and working method thereof Active CN112448610B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213281A (en) * 1988-06-30 1990-01-17 Nec Corp Vibrating motor using piezoelectric elements
CN102437786A (en) * 2011-10-18 2012-05-02 哈尔滨工业大学 Surface mount type square four-footed rotational ultrasonic motor vibrator
CN103746598A (en) * 2014-01-27 2014-04-23 哈尔滨工业大学 Paster longitudinal vibration composite dual-feet piezoelectric supersonic motor vibrator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213281A (en) * 1988-06-30 1990-01-17 Nec Corp Vibrating motor using piezoelectric elements
CN102437786A (en) * 2011-10-18 2012-05-02 哈尔滨工业大学 Surface mount type square four-footed rotational ultrasonic motor vibrator
CN103746598A (en) * 2014-01-27 2014-04-23 哈尔滨工业大学 Paster longitudinal vibration composite dual-feet piezoelectric supersonic motor vibrator

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