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CN116480584B - Oil seal and air seal device for dry vacuum pump and rotary machine - Google Patents

Oil seal and air seal device for dry vacuum pump and rotary machine Download PDF

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Publication number
CN116480584B
CN116480584B CN202310322395.6A CN202310322395A CN116480584B CN 116480584 B CN116480584 B CN 116480584B CN 202310322395 A CN202310322395 A CN 202310322395A CN 116480584 B CN116480584 B CN 116480584B
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CN
China
Prior art keywords
oil
seal
rotor
bearing
expansion ring
Prior art date
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Active
Application number
CN202310322395.6A
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Chinese (zh)
Other versions
CN116480584A (en
Inventor
雷晓宏
魏民
雷晓波
彭冲
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Beijing Tongjia Hongrui Technology Co ltd
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Beijing Tongjia Hongrui Technology Co ltd
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Filing date
Publication date
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Priority to CN202310322395.6A priority Critical patent/CN116480584B/en
Publication of CN116480584A publication Critical patent/CN116480584A/en
Priority to PCT/CN2024/083435 priority patent/WO2024199157A1/en
Application granted granted Critical
Publication of CN116480584B publication Critical patent/CN116480584B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005Axial sealings for working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/50Bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/60Shafts

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention relates to an oil seal air sealing device for a dry vacuum pump and a rotary machine, which comprises: the oil-saving device comprises an oil tank cover, lubricating oil, an oil thrower, a lock nut, a bearing fixing seat, a fixing plate, a shaft seal, an o-shaped ring, an expansion ring, a stator and a rotor. The oil seal and air seal device for the dry vacuum pump and the rotary machine has good sealing effect, is suitable for the dry vacuum pump, has a simple sealing structure, is easy to realize, is only designed by sealing on component parts, occupies small space, has no newly added parts, and is easy to process and low in cost.

Description

Oil seal and air seal device for dry vacuum pump and rotary machine
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to an oil seal and air seal device for a dry vacuum pump and a rotary machine.
Background
The vacuum pump is used for pumping out gas molecules from the vacuum chamber, and reducing the gas pressure in the vacuum chamber to achieve the required vacuum degree. The method is mainly applied to the industries of pharmacy and chemical industry, vacuum coating, vacuum drying, surface treatment, vacuum smelting, ceramic manufacturing, food packaging, milking, beverage and the like.
The two axes of the rotor of the vacuum pump are parallel to each other, the rotor is formed by combining impellers and shafts, and tiny gaps are arranged between the impellers, between the impellers and the shell and between the impellers and the wall plates so as to avoid mutual contact. The two rotors are driven by the motor through a pair of synchronous gears to rotate at equal speeds in opposite directions. By means of the mutual engagement of the two impellers, the air inlet and the air outlet of the pump are not directly communicated, the impellers, the shell and the wall plates enclose a closed primitive volume, and the primitive volume is always in a circulation state of air suction, compression, conveying and air exhaust along with the continuous rotation of the impellers, so that air and dust in the cavity are continuously discharged out of the pump to meet the process requirements.
The dry vacuum pump mainly comprises a rotor piece and a stator piece. And is divided into two chambers by a combined sealed oil seal structure. One cavity is a working medium conveying cavity, namely a finished product cavity, and the other cavity is a cooling cavity for providing lubrication for bearings, gears and the like, namely a lubrication cavity. The media of the two cavities need to be sealed and can not be communicated with each other. If the finished product leaks into the lubricating oil cavity, lubricating oil pollution is easy to cause, and the service life of the pump is influenced; if the lubricating oil leaks into the product cavity, environmental pollution is easy to cause, and meanwhile, the service life of the pump is also influenced by insufficient lubricating oil. In order to balance the internal pressure of the two chambers of the product chamber and the lubricating oil chamber, the two chambers also need to be provided with an air passage, and cannot be completely isolated.
In the prior art, the combined sealed oil-sealing gas products are fewer, and particularly face the dry vacuum pump industry, and the main technical problems of the existing sealed products include: poor sealing effect, specific requirements on the use environment, complex sealing structure, large occupied space and high cost.
Therefore, how to overcome the shortcomings of the prior art scheme, to provide a sealing system which has compact structure, good sealing effect and low cost and is suitable for the vacuum pump industry, is a subject to be solved in the technical field.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides an oil seal and air seal device for a dry vacuum pump and a rotary machine. The invention adopts the following technical scheme.
An oil seal gas seal device for a dry vacuum pump and a rotary machine, comprising: the oil-saving device comprises an oil tank cover, lubricating oil, an oil thrower, a lock nut, a bearing fixing seat, a fixing plate, a shaft seal, an o-ring, an expansion ring, a stator and a rotor;
the oil tank cover, the oil thrower, the lock nut, the bearing fixing seat and one side of the fixing plate adjacent to the bearing fixing seat form an oil cavity;
the shaft seal, the o-shaped ring, the expansion ring, the stator, the rotor and one side of the fixing plate adjacent to the shaft seal form a finished product cavity.
Further, the fuel tank cover is fixedly connected with the fixed plate;
the oil slinger is positioned within the lubricant pocket and is secured to the rotor. The inner side surface of the oil tank cover is provided with an inclined plane for guiding lubricating oil thrown out of the oil thrower to the bearing.
Further, the bearing is sleeved on the surface of the rotor, the bearing fixing seat is sleeved on the outer side of the rotor, and the bearing fixing seat is fixed on the fixing plate;
the rotor is located on the surface of one side of the lubricating oil cavity, an external thread is arranged at a position close to the position where the bearing is installed, and the locking nut is sleeved on the external thread and used for fixing the bearing.
Further, the surface of the rotor is provided with a fixed plate step part, and the fixed plate is arranged on the oil seal step part of the rotor;
the surface of the rotor is provided with an oil seal step part, and the shaft seal is arranged on the oil seal step part of the rotor.
Further, an o-shaped ring mounting groove and an expansion ring mounting groove are formed in the surface of the rotor, and the o-shaped ring and the expansion ring are respectively arranged in the o-shaped ring mounting groove and the expansion ring mounting groove.
Further, the stator is of a hollow structure, and the rotor is installed inside the stator.
Further, the fixing plate is provided with a high-pressure air inlet hole, and the space in the high-pressure air inlet hole is communicated with the surface of the rotor.
Further, the expansion rings are made of cast iron, are arranged in parallel, and are respectively arranged in the expansion ring mounting grooves.
Furthermore, non-contact sealing is adopted between the bearing fixing seat and the shaft seal.
Furthermore, the non-contact seal is in a labyrinth seal structure, so that the shaft seal and the bearing fixing seat are combined in a concave-convex mode with small clearance.
The oil seal and air seal device for the dry vacuum pump and the rotary machine has good sealing effect, is suitable for the dry vacuum pump, has a simple sealing structure, is easy to realize, is only designed by sealing on component parts, occupies small space, has no newly added parts, and is easy to process and low in cost.
Drawings
FIG. 1 is a schematic diagram of an oil seal gas seal apparatus for a dry vacuum pump and a rotary machine according to the present invention.
FIG. 2 is a schematic diagram of the seal structure of the sealing device of the present invention.
Fig. 3 is a schematic view of the expander structure of the sealing device of the present invention.
Fig. 4 is a schematic diagram of the oil seal structure of the sealing device of the present invention.
Description of the embodiments
The invention is further described below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present invention, and are not intended to limit the scope of the present invention. It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
Referring to fig. 1, embodiment 1 of the present invention relates to an oil-sealed airtight device for a dry vacuum pump and a rotary machine, comprising: the oil-filled well oil well cover comprises an oil tank cover 1, an oil thrower 3, a lock nut 4, a bearing 5, a bearing fixing seat 6, a fixing plate 7, a shaft seal 8, an o-ring 9, an expansion ring 10, a stator 11 and a rotor 13.
The oil tank cover 1, the oil thrower 3, the lock nut 4, the bearing 5, the bearing fixing seat 6 and one side of the fixing plate 7 adjacent to the bearing fixing seat 6 form an oil cavity 2.
The shaft seal 8, the o-ring 9, the expansion ring 10, the stator 11, the rotor 13 and the side of the fixed plate 7 adjacent to the shaft seal 8 form a finished product cavity 12.
The fuel tank cap 1 is fixedly connected with the fixing plate 7.
The oil slinger 3 is located inside the oil chamber 2 and is secured to the rotor 13. The inner side surface of the oil tank cover 1 is provided with an inclined surface for guiding the lubricating oil thrown out of the oil slinger 3 to the bearing 5.
The bearing 5 is sleeved on the surface of the rotor 13, the bearing fixing seat 6 is sleeved on the outer side of the bearing 5, and the bearing fixing seat 6 is fixed on the fixing plate 7.
The rotor 13 is positioned on the surface of one side of the lubricating oil cavity 2, an external thread is arranged at a position close to the position where the bearing 5 is installed, and the lock nut 4 is sleeved on the external thread and used for fixing the bearing 5.
The surface of the rotor 13 is provided with a fixed plate step part, and the fixed plate 7 is arranged on the oil seal step part of the rotor 13.
The surface of the rotor 13 is provided with an oil seal step part, and the shaft seal 8 is arranged on the oil seal step part of the rotor 13.
An o-shaped ring mounting groove and an expansion ring mounting groove are formed in the surface of the rotor 13, and the o-shaped ring 9 and the expansion ring 10 are respectively arranged in the o-shaped ring mounting groove and the expansion ring mounting groove.
The stator 11 is of a hollow structure, and the rotor 13 is installed inside the stator 11.
During installation, the o-rings 9 and the expansion rings 10 are firstly fixed in the o-ring mounting grooves and the expansion ring mounting grooves of the rotor 13, then the rotor 13 is installed inside the stator 11 and sealed into a manufactured object cavity 12 through the fixing plate 7, then the shaft seal 8 is installed on the rotor 13, the bearing fixing seat 6 is fastened on the fixing plate 7, then the bearing 5 is installed and locked and fixed through the locking nuts 4, the oil thrower disc 3 is fixed on the rotor 13, and the oil tank cover 1 is assembled on the fixing plate 7.
During operation, the rotor 13 drives the oil thrower disc 3, the lock nut 4, the shaft seal 8 and the o-ring 9 to rotate under the supporting action of the bearing 5. The oil tank cover 1, the bearing fixing seat 6, the fixing plate 7, the expansion ring 10 and the stator 11 are all fixed. The lubricating oil cavity 2 is filled with lubricating oil, and the lubricating oil is thrown onto the inclined surface of the oil tank cover 1 under the driving of the oil thrower 3 and enters the bearing 5 for lubrication.
Referring to fig. 2, a schematic diagram of the gas sealing structure of the present invention is shown. The fixed plate 7 is provided with a high-pressure air inlet hole 21, and the space in the high-pressure air inlet hole 21 is communicated with the surface of the rotor 13. Because the gap 22 exists between the rotor 13 and the fixed plate 7, if no air seal exists, a product medium in the product cavity 12 can enter the lubricating oil cavity 2 through the gap 22 during working, so that lubricating oil pollution is caused. In order to balance the internal pressures of the two chambers of the product chamber 12 and the lubricating oil chamber 2, the two chambers also need to be provided with an air passage and cannot be completely isolated, so that the air seal is carried out by adopting the expansion ring 10 at the air seal position, and the high-pressure air inlet hole 21 is reserved on the fixed plate 7 in order to ensure the tightness.
Referring to fig. 3, a schematic diagram of an expander 10 according to the present invention is shown. According to the characteristics of the dry vacuum pump such as working speed and working medium, the air sealing device is selected to adopt an expansion ring sealing mode. The expansion ring sealing is named as a self-expanding sealing ring with a notch, and is a device for sealing by using the blocking and throttling principles. The method comprises the steps of loading a plurality of expansion rings into an annular groove machined in a shaft shoulder, attaching the expansion rings to an inner hole of a stator sealing seat by means of self elasticity, forming pre-tightening sealing at the outer circle part of the expansion rings, and enabling gas to leak downstream only through gaps between the expansion rings and the annular groove. When the sealing device works, the expansion ring 10 is tightly attached to the downstream end face of the expansion ring groove under the action of the pressure difference of the gas at two sides, high-pressure gas entering the gap from the high-pressure gas inlet hole 21 fills the back clearance space, so that the sealing between the outer circle of the expansion ring 10 and the inner hole of the stator sealing seat is further enhanced, and the rest leakage channel only has the notch of the expansion ring 10. Because the cut is small, only a small amount of gas can leak out, and the cut can balance the internal pressure of the two chambers in the pump.
In order to increase the tightness, a plurality of said expander rings 10 may be arranged in parallel, so that after several expander ring seals, a smaller amount of gas may be leaked out.
The expansion ring 10 is made of cast iron material, has high precision, can be automatically compensated after abrasion, and has long service life.
Referring to fig. 4, a schematic diagram of the oil seal structure of the present invention is shown. The lubricating oil seal is divided into two parts, wherein the first part is the seal between the shaft seal 8 and the rotor 13, and the second part is the seal between the bearing fixing seat 6 and the shaft seal 8.
For the seal between the shaft seal 8 and the rotor 13 at the first place, since the shaft seal 8 and the rotor 13 are both rotating parts and keep relatively static, the seal between the two adopts a contact static seal mode, namely, the seal is realized through an o-ring 9.
For the sealing between the second bearing fixing seat 6 and the shaft seal 8, non-contact sealing is adopted, and a sealing device which is not in contact with the shaft and has no friction part is adopted. The labyrinth sealing structure can be adopted, and comprises an oil groove, a labyrinth and other structures, and the purpose of sealing is achieved by utilizing centrifugal force and small clearance.
The labyrinth seal is a concave-convex combined sealing structure with small clearance between the shaft seal 8 and the bearing fixing seat 6, and is particularly suitable for preventing oil leakage of a high-speed shaft.
Radial and axial labyrinth seal play of the present invention is shown in the following table.
Table 1: radial and axial labyrinth seal play
While only the preferred embodiments of the present invention have been described, it should be noted that modifications and variations can be made by those skilled in the art without departing from the technical principles of the present invention, and such modifications and variations should also be regarded as being within the scope of the invention.

Claims (5)

1. An oil seal gas seal device for a dry vacuum pump and a rotary machine, the device comprising: the oil box comprises an oil box cover (1), an oil lubricating cavity (2), an oil thrower (3), a lock nut (4), a bearing (5), a bearing fixing seat (6), a fixing plate (7), a shaft seal (8), an o-ring (9), an expansion ring (10), a stator (11) and a rotor (13);
the oil tank cover (1), the oil thrower (3), the lock nut (4), the bearing (5), the bearing fixing seat (6) and one side of the fixing plate (7) adjacent to the bearing fixing seat (6) form an oil lubrication cavity (2);
the shaft seal (8), the o-shaped ring (9), the expansion ring (10), the stator (11), the rotor (13) and one side of the fixed plate (7) adjacent to the shaft seal (8) form a manufactured cavity (12);
the fixed plate (7) is provided with a high-pressure air inlet hole (21), and the space in the high-pressure air inlet hole (21) is communicated with the surface of the rotor (13);
an o-shaped ring mounting groove and an expansion ring mounting groove are formed in the surface of the rotor (13), and the o-shaped ring (9) and the expansion ring (10) are respectively arranged in the o-shaped ring mounting groove; the expansion rings (10) are made of cast iron, are arranged in parallel and are respectively arranged in a plurality of expansion ring mounting grooves;
the high-pressure air inlet hole (21) is positioned between two adjacent expansion ring mounting grooves;
the expansion ring (10) is provided with a notch, the expansion ring (10) is clung to the downstream end face of the expansion ring mounting groove under the action of gas pressure difference at two sides of the expansion ring, high-pressure gas fills the back clearance space of the expansion ring (10), the sealing between the outer circle of the expansion ring (10) and the inner hole of the stator sealing seat is enhanced, and the notch is used as a leakage channel to enable a small amount of gas to leak out, so that the internal pressure of the dry vacuum pump is balanced through the notch of the expansion ring (10);
the bearing fixing seat (6) and the shaft seal (8) adopt a non-contact labyrinth seal structure, so that a concave-convex combination non-contact labyrinth seal structure with small clearance is arranged between the shaft seal (8) and the bearing fixing seat (6), wherein when the diameter of a shaft is smaller than 50mm, the radial clearance of the non-contact labyrinth seal structure is 0.25mm-0.4mm, the axial clearance is 1mm-2mm, and when the diameter of the shaft is 50mm-200mm, the radial clearance of the non-contact labyrinth seal structure is 0.5mm-1.5mm, and the axial clearance is 2mm-5mm.
2. The oil-sealing and air-sealing device for dry vacuum pumps and rotary machines according to claim 1, characterized in that the tank cap (1) is fixedly connected with the fixing plate (7);
the oil thrower (3) is positioned in the lubricating oil cavity (2) and is fixed on the rotor (13); the inner side surface of the oil tank cover (1) is provided with an inclined plane, and the inclined plane is used for guiding lubricating oil thrown out of the oil thrower (3) to the bearing (5).
3. The oil seal and air seal device for the dry vacuum pump and the rotary machine according to claim 1, wherein the bearing (5) is sleeved on the surface of the rotor (13), the bearing fixing seat (6) is sleeved on the outer side, and the bearing fixing seat (6) is fixed on the fixing plate (7);
the rotor (13) is positioned on the surface of one side of the lubricating oil cavity (2), an external thread is arranged at a position close to the position where the bearing (5) is installed, and the locking nut (4) is sleeved on the external thread and used for fixing the bearing (5).
4. The oil seal and air seal device for a dry vacuum pump and a rotary machine according to claim 1, wherein a fixed plate step is provided on the surface of the rotor (13), and the fixed plate (7) is mounted on the oil seal step of the rotor (13);
the surface of the rotor (13) is provided with an oil seal step part, and the shaft seal (8) is arranged on the oil seal step part of the rotor (13).
5. The oil-sealing and air-sealing device for a dry vacuum pump and a rotary machine according to claim 1, wherein the stator (11) is of a hollow structure, and the rotor (13) is installed inside the stator (11).
CN202310322395.6A 2023-03-29 2023-03-29 Oil seal and air seal device for dry vacuum pump and rotary machine Active CN116480584B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202310322395.6A CN116480584B (en) 2023-03-29 2023-03-29 Oil seal and air seal device for dry vacuum pump and rotary machine
PCT/CN2024/083435 WO2024199157A1 (en) 2023-03-29 2024-03-25 Oil sealing and gas sealing device for dry vacuum pump and rotating machinery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310322395.6A CN116480584B (en) 2023-03-29 2023-03-29 Oil seal and air seal device for dry vacuum pump and rotary machine

Publications (2)

Publication Number Publication Date
CN116480584A CN116480584A (en) 2023-07-25
CN116480584B true CN116480584B (en) 2024-04-05

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CN202310322395.6A Active CN116480584B (en) 2023-03-29 2023-03-29 Oil seal and air seal device for dry vacuum pump and rotary machine

Country Status (2)

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WO (1) WO2024199157A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116480584B (en) * 2023-03-29 2024-04-05 北京通嘉宏瑞科技有限公司 Oil seal and air seal device for dry vacuum pump and rotary machine

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0389080A (en) * 1989-08-30 1991-04-15 Ebara Corp Seal mechanism for vacuum pump lubricating oil
JPH061786U (en) * 1992-06-11 1994-01-14 大晃機械工業株式会社 Screw pump
JP2004116431A (en) * 2002-09-26 2004-04-15 Aisin Seiki Co Ltd Positive displacement vacuum-pump device
JP2004293420A (en) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd Lubricating oil sealing structure of dry pump
CN112682309A (en) * 2020-12-14 2021-04-20 兰州空间技术物理研究所 Effectively reduce lobe pump seal structure of lubricating oil to cavity leakage
CN215860780U (en) * 2021-08-03 2022-02-18 山东博科真空科技有限公司 Multi-protection composite sealing structure for screw vacuum pump
CN219432054U (en) * 2023-03-29 2023-07-28 北京通嘉宏瑞科技有限公司 Oil seal and air seal device for dry vacuum pump and rotary machine

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204692119U (en) * 2015-05-21 2015-10-07 浙江创为真空设备有限公司 Screw vacuum pump composite shaft seal structure
CN113958502A (en) * 2021-10-29 2022-01-21 山东宽量节能环保技术有限公司 Bearing cavity sealing structure for limiting rotation of roots vacuum pump
CN218062664U (en) * 2022-07-28 2022-12-16 中科九微科技有限公司 Sealing structure and vacuum pump with same
CN116480584B (en) * 2023-03-29 2024-04-05 北京通嘉宏瑞科技有限公司 Oil seal and air seal device for dry vacuum pump and rotary machine

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0389080A (en) * 1989-08-30 1991-04-15 Ebara Corp Seal mechanism for vacuum pump lubricating oil
JPH061786U (en) * 1992-06-11 1994-01-14 大晃機械工業株式会社 Screw pump
JP2004116431A (en) * 2002-09-26 2004-04-15 Aisin Seiki Co Ltd Positive displacement vacuum-pump device
JP2004293420A (en) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd Lubricating oil sealing structure of dry pump
CN112682309A (en) * 2020-12-14 2021-04-20 兰州空间技术物理研究所 Effectively reduce lobe pump seal structure of lubricating oil to cavity leakage
CN215860780U (en) * 2021-08-03 2022-02-18 山东博科真空科技有限公司 Multi-protection composite sealing structure for screw vacuum pump
CN219432054U (en) * 2023-03-29 2023-07-28 北京通嘉宏瑞科技有限公司 Oil seal and air seal device for dry vacuum pump and rotary machine

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CN116480584A (en) 2023-07-25
WO2024199157A1 (en) 2024-10-03

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