CN102456602A - Inspection apparatus and positioning method for substrate - Google Patents
Inspection apparatus and positioning method for substrate Download PDFInfo
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- CN102456602A CN102456602A CN 201110332017 CN201110332017A CN102456602A CN 102456602 A CN102456602 A CN 102456602A CN 201110332017 CN201110332017 CN 201110332017 CN 201110332017 A CN201110332017 A CN 201110332017A CN 102456602 A CN102456602 A CN 102456602A
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Abstract
The invention provides an inspection apparatus and a positioning method for a substrate. The inspection apparatus comprises a conveying table (20) provided with a free roller (201) used for supporting a substrate and rotated in the way of conveying the substrate along the conveying direction; a drive mechanism (30) used for moving the substrate along the conveying direction; a positioning pin drive part (202) arranged on the end side of the conveying table and used for keeping the positioning pin to be abutting against the substrate and moving the positioning pin along the conveying direction; a reference pin drive part (203) arranged between a checking unit and the positioning pin drive part and used for keeping a reference pin (203a) to be abutting against the substrate and elevating the reference pin; an end surface detection part (204) used for detecting the end surface of the substrate parallel to the conveying direction; and a checking unit (100) used for checking the information of the substrate according to the information of the end surface detected by the end surface detection part.
Description
Technical field
The present invention relates to a kind of testing fixture that is used for for example glass basal plates of flat panel display, semiconductor substrate, printed circuit board (PCB) etc. are checked, handled and the localization method of substrate.
Background technology
In recent years, in the manufacturing of glass substrate, semiconductor substrate, printed circuit board (PCB) (below be called substrate) etc., have and be used for substrate such as is checked at the testing fixture of handling.Testing fixture has and is used for substrate is checked the handling part of processing and is used for from outside to the handling part conveying substrate or from the delivery section of handling part to outside conveying substrate.
Delivery section comprises and is used for supporting substrates and can be along the roller of throughput direction rotation and absorption substrate and the sucker that can move along throughput direction.Delivery section moves the conveying of carrying out substrate through the sucker that makes absorption maintain substrate, and this substrate remains in roller.
But when when substrate has been imported in the outside, delivery section is carried out the position adjustment so that substrate is disposed at the substrate-placing position in the delivery section.In this position adjustment, the location of substrate is adjusted and carried out to the mode that for example makes substrate move to the substrate-placing position to clip substrate from the four sides.
As above-mentioned localization method; Disclose following method: utilize around with the axis rotation of throughput direction quadrature and the roller that can the edge moves back and forth with the horizontal plane direction of throughput direction quadrature, thereby roller is moved back and forth change roller be used to keep substrate holding position adjustment substrate carry seated position (for example with reference to patent documentation 1,2).In this localization method, the seated position of carrying of substrate is changed while can utilize the rotation of roller that substrate is moved along throughput direction.
Patent documentation 1: real the opening of Japan put down the 1-102129 communique
Patent documentation 2: TOHKEMY 2009-13061 communique
But, about patent documentation 1,2 disclosed localization methods, because the roller edge direction vertical with throughput direction moved, therefore between roller and substrate, produce frictional force, might cause substrate and roller between the contact-making surface damage.In addition, in patent documentation 1,2 disclosed localization methods, exist must pair roller drive division to be set and to cause apparatus structure such problem that complicates.
Summary of the invention
The present invention In view of the foregoing makes, and its purpose is to provide a kind of can prevent the damage of substrate and the testing fixture carried and the localization method of substrate with easy structure.
In order to address the above problem and to achieve the goal, the present invention provides a kind of testing fixture, it is characterized in that, comprising: transport platform, and it has the roller that is used for supporting substrates and rotates along the throughput direction of carrying this substrate; Driving mechanism, it is used to make aforesaid substrate to move along above-mentioned throughput direction; The align member drive division, the end side that it is arranged at the input side that leans on aforesaid substrate of above-mentioned transport platform is used to keep with the align member of aforesaid substrate butt and this align member is moved to above-mentioned throughput direction; The end face test section, it is used to detect the end face of the direction parallel with above-mentioned throughput direction of aforesaid substrate; Inspection portion, it is used for carrying out the inspection of aforesaid substrate according to the information of the detected end face of above-mentioned end face test section; And the reference feature drive division, it is arranged between above-mentioned inspection portion and the above-mentioned align member drive division, is used to keep with the reference feature of aforesaid substrate butt and drives this reference feature and this reference feature is gone up and down.
In order to address the above problem and to achieve the goal; The present invention provides a kind of localization method of substrate; It is the localization method of the substrate of testing fixture; This testing fixture has the inspection portion of the inspection that is used for carrying out substrate and is used for carrying the delivery section of putting aforesaid substrate and carrying this substrate, and the localization method of this substrate is characterised in that the localization method of aforesaid substrate comprises: input step; To transport platform input aforesaid substrate, this transport platform has the roller that is used for along the throughput direction rotation of carrying aforesaid substrate; The align member actuation step drives align member, this align member be arranged at above-mentioned transport platform the input side that leans on aforesaid substrate end side and be used for and the aforesaid substrate butt; The substrate fixing step utilizes reference feature and above-mentioned align member to grip aforesaid substrate, and this reference feature is arranged between above-mentioned inspection portion and the above-mentioned align member drive division and is used for and the aforesaid substrate butt; And end face detects step, and the end face of the direction parallel with above-mentioned throughput direction of utilizing the fixing aforesaid substrate of aforesaid substrate fixing step is detected.
About testing fixture of the present invention; Owing to moving to fix, the direction of rotation that makes substrate along free roller carries seated position; And through utilize the sensor end face confirm substrate with the direction of the direction of rotation quadrature of free roller on the position, therefore have and can prevent the damage of substrate and carry such effect with easy structure.
Description of drawings
Fig. 1 is the vertical view of the structure of flat-panel monitor (FPD) testing fixture that schematically shows execution mode of the present invention.
Fig. 2 is the end view of structure that schematically shows the FPD testing fixture of execution mode of the present invention.
Fig. 3 is the stereogram that schematically shows the alignment pin drive division of execution mode of the present invention.
Fig. 4 is the stereogram that schematically shows the alignment pin drive division of execution mode of the present invention.
Fig. 5 is the stereogram that schematically shows the reference pins drive division of execution mode of the present invention.
Fig. 6 is the flow chart of a series of flow process handled of the inspecting substrate of expression execution mode of the present invention.
Fig. 7 is the vertical view of the substrate input during the inspecting substrate that schematically shows execution mode of the present invention is handled.
Fig. 8 is the end view of the substrate input during the inspecting substrate that schematically shows execution mode of the present invention is handled.
Fig. 9 is the end view of the substrate input during the inspecting substrate that schematically shows execution mode of the present invention is handled.
Figure 10 is the end view of the localization process during the inspecting substrate that schematically shows execution mode of the present invention is handled.
Figure 11 is the end view of the localization process during the inspecting substrate that schematically shows execution mode of the present invention is handled.
Embodiment
Below, the execution mode that is used for embodiment of the present invention at length is described in conjunction with accompanying drawing.In addition, the invention is not restricted to following execution mode.In addition, in following explanation, each figure of institute's reference just roughly expresses shape, size and position relation with the degree that can understand content of the present invention.That is, the invention is not restricted to illustrative shape, size and position relation in each figure.
The testing fixture of execution mode of the present invention at first, at length is described with reference to accompanying drawing.In addition, in following explanation, be that example describes with the testing fixture of substrate.In addition, the testing fixture of this execution mode is that the testing fixture of offline model is illustrated, but also can be the testing fixture in line style.
Fig. 1 is the vertical view of the schematic configuration of flat-panel monitor (FPD) testing fixture 1 that schematically shows this execution mode.Fig. 2 is the end view of structure that schematically shows the FPD testing fixture 1 of this execution mode.As shown in Figure 1, FPD testing fixture 1 comprises processing substrate portion 2 and control part 3, and this processing substrate portion 2 is used to detect the defective that is transferred substrate W that come, rectangular, and this control part 3 is used to carry out the control of processing substrate portion 2 integral body.In addition; Processing substrate portion 2 comprises transport platform 12,20,21 and gantry objective table (gantry stage) 10; This transport platform 12,20,21 is used for conveying substrate W; This gantry objective table 10 is arranged on the transport platform 12, and is used to keep inspection unit 100 (inspection portion), this inspection unit 100 (inspection portion) to be used for the defective of mobile substrate W is detected.
Gantry objective table 10 and transport platform 12,20,21 are fixed on this pallet 11 for example shown in Figure 2.Pallet 11 is made up of marble that will be for example block, the higher member of vibration strengths such as framework that steel combine.In addition, at pallet 11 be provided with between the face (for example floor) shock absorption mechanism 13 that is made up of for example spring, hydraulic damper etc. is set.Prevent the vibration of transport platform 12,20,21 and gantry objective table 10 thus further.
Fig. 3, the 4th schematically shows the stereogram of alignment pin drive division 202.Like Fig. 3, shown in 4, alignment pin drive division 202 comprises: be used for the alignment pin 202a of the end face butt of substrate W and can the edge parallel with throughput direction D direction advance and retreat and be used to the 202b of advance and retreat portion that makes alignment pin 202a and throughput direction D mobile abreast.In addition, the 202b of advance and retreat portion is under the control of control part 3 and by being driven.In this driving, use pneumatic cylinder, electro-motor etc. are arranged.
Fig. 5 is the stereogram that schematically shows reference pins drive division 203.As shown in Figure 5, reference pins drive division 203 comprises the lifting unit 203b that is used for going up and down with the substrate W butt and reference pins 203a and can the edge vertical with the throughput direction D direction of benchmark that become the position location of substrate W and is used to drive reference pins 203a and the reference pins 203a edge direction vertical with throughput direction D gone up and down.In addition, lifting unit 203b is under the control of control part 3 and by being driven.In this driving, use pneumatic cylinder, electro-motor etc. are arranged.
Like Fig. 1, shown in 2, the configuration of alignment pin 202a is so long as be in can clamping reference pins 203a and the position of fixing base W gets final product.More preferably alignment pin 202a disposes than the reference pins 203a that is positioned at the outer most edge side with respect to the Width of transport platform 20 in the inner part.In addition, explained that alignment pin and reference pins are respectively 2 situation, but so long as above-mentioned configuration also can be disposed one or more respectively.
In addition, through driving mechanism 30 being arranged at the central authorities of the Width of transport platform, the position of centre of gravity that can keep comprising the substrate W that is imported on the transport platform 20 is carried thereby can carry out stable substrate in interior zone.In addition, as long as wounded substrate W does not carry on ground, then the equipping position of driving mechanism 30 can be position arbitrarily.And, also can whether adsorb the structure that carry the end that keeps substrate W but control substrate W.
In addition, inspection unit 100 replaceable one-tenth such as lower unit: for example be used for reparation unit, the image unit that is used to observe, preserve image that defect part to substrate W carries out that laser radiation reparation, coating are revised etc., be used for implementing to carry out other processing units of processing of measuring unit etc. of the dimensional measurement, film thickness measuring, color measuring etc. of distribution etc. at preposition.That is, processing unit comprises inspection unit, repairs unit, image unit, exposing unit, measuring unit etc.In addition, testing fixture of the present invention also comprises above-mentioned processing unit and substrate W is carried out the structure that each is handled being used for carrying on the platform put substrate W.
In addition, owing to then can form inner space (dust free room) if FPD testing fixture 1 comprises the shell that is used to surround inspection space PR1 and conveying space TR1, TR2, so be preferred.This dust free room is the space that except the pipeline of the input port of substrate W, delivery outlet and bottom, is sealed.Shell has the FFU that is used for sending into to the inner space clean air (below be called pure air) above the inspection unit 100.
FFU is used to see off and has been removed the for example pure air of dust such as particulate.Its result makes particularly and reaches the state that inspection line L 1 periphery (inspection space PR1) becomes the less cleaning of dust near the inspection unit 100.In addition, near inspection unit 100, reach inspection line L1 periphery and concentrate the air of the cleaning of seeing off in dust free room, to form sinking (down flow) afterwards, discharge from exhaust outlet.
Fig. 6 is the flow chart of a series of flow process handled of the inspecting substrate of this execution mode of expression.Fig. 7 is the vertical view of the substrate input during the inspecting substrate that schematically shows this execution mode is handled.Fig. 8, the 9th, the end view of the substrate input during the inspecting substrate that schematically shows this execution mode is handled.Figure 10, the 11st, the end view of the localization process during the inspecting substrate that schematically shows this execution mode is handled.At first, certainly, outside to FPD testing fixture 1 input substrate W (step S 102).Like Fig. 7, shown in 8, the input of substrate W is the substrate W that imports on the arm 40a that is maintained at transfer robot 40 to transport platform 20.Transfer robot 40 descends the arm 40a that maintains substrate W after advancing on the transport platform 20.At this moment, arm 40a gets between the tabular component of transport platform 20.Arm 40a is descended, thereby that kind as shown in Figure 9 make substrate W remain in free roller 201.Make after substrate W is supported on free roller 201, transfer robot 40 breaks away from from transport platform 20 (FPD testing fixture 1).
After substrate W is received in transport platform 20, carry out the localization process of substrate W.At first, as shown in Figure 8, drive reference pins drive division 203 and make reference pins 203a rise (step S 104).Afterwards, drive alignment pin drive division 202 and make alignment pin 202a move (step S106).Shown in figure 10, alignment pin 202a to Fig. 1, the throughput direction D shown in 2 move and with substrate W butt, substrate W is moved to throughput direction D.If utilize moving of alignment pin 202a substrate W is moved, then substrate W and reference pins 203a butt (Figure 11).Substrate W be positioned in one direction pin 202a and reference pins 203a clamping become the state that is fixed.Year seated position of definite substrate W under this state.
If confirm the seated position of carrying of substrate W, then end face test section 204 utilizes end face detecting sensor 204a to come the end face on a limit of the direction of substrate W and clamping direction quadrature alignment pin 202a and reference pins 203a is detected (step S108).End face test section 204 according to the detected information of end face detecting sensor 204a generate with transport platform 20 on the positional information of the end face parallel of substrate W with throughput direction D.End face test section 204 is after generating positional information, to control part 3 output position information (step S110).In addition, positional information is for example from the range information of end face detecting sensor 204a, and control part 3 carries out the position correction of substrate W according to the range information that is obtained.In addition, positional information is a coordinate information, and control part 3 also can carry out the coordinate correction of substrate W according to the coordinate information that is obtained.
After the output of the positional information of end face test section 204, driving mechanism 30 makes substrate W absorption remain in sucker 34 (step S112).Afterwards, alignment pin drive division 202 makes alignment pin 202a move to the direction opposite with throughput direction D, thereby removes alignment pin 202a (step S114) from substrate W.In addition, reference pins drive division 203 descends reference pins 203a, up to dropping to the position (step S116) that the upper end of reference pins 203a at least is lower than the upper end of free roller 201.In addition, the releasing action of alignment pin 202a and the down maneuver of reference pins 203a both can backward be carried out, and also can carry out simultaneously.
After the decline of releasing that positions pin 202a and reference pins 203a, driving mechanism 30 drives drive division 32 and sucker 34 is moved, and makes substrate W to transport platform 12 side shiftings (step S118).Inspection unit 100 is taken the substrate W that on inspection line L1, passes through by microscope 101, and the image that is obtained is resolved (inspection is handled) (step S120).
After the inspection processing of the substrate conveying W of institute finished, control part 3 (step S122:Yes) under the situation of the substrate W with next inspection object was transferred to step S102 and next substrate W is carried out inspecting substrate handle.In addition, control part 3 (step S122:No) under the situation of the substrate W that does not have next inspection object finishes the inspecting substrate processing.
As above-mentioned execution mode; Owing to moving to fix, the direction of rotation that makes substrate along free roller carries seated position; And through utilize the sensor end face confirm substrate with the direction of direction of rotation quadrature on the position, therefore can prevent the damage of substrate and carry with easy structure.Particularly, be accompanied by the maximization of substrate in recent years, deadweight that the substrate pair roller applies becomes big and is easy to generate damage, only therefore utilizes moving and location confirmation on the direction, can produce the effect of the damage that prevents the substrate in the course of conveying effectively.
In addition, the situation as the FPD testing fixture of offline model has been described in this execution mode, but the FPD testing fixture that also goes in line style.For under the situation of line style, owing to be from the transport platform conveying substrate that links with the side different of transport platform 20 with inspection unit 100 sides, the therefore preferred structure that alignment pin 202a is descended or keep out of the way from the upper surface of transport platform 20 of adding.
In addition; When utilizing the sucker conveying substrate; Also can each sucker be replaced to alignment pin and reference pins drive division, utilize alignment pin and reference pins clamping substrate and the fixing seated position of carrying, while and utilize the driving of drive division 32 to keep the state conveying substrate of clamping.
In addition, also can alignment pin drive division and reference pins be provided on the arm of transfer robot, with the seated position of carrying of the state fixing base that remains in arm.At this moment, preferably be provided with and be used for supporting substrates and can be along the free roller of the moving direction rotation of alignment pin at the upper surface of arm.
As above-mentioned, testing fixture of the present invention is applicable to the substrate of carrying the inspection object with easy Stability Analysis of Structures ground.
Description of reference numerals
1, FPD testing fixture; 2, processing substrate portion; 3, control part; 10, gantry objective table; 11, pallet; 12,20,21, transport platform; 13, shock absorption mechanism; 30, driving mechanism; 34, sucker; 40, transfer robot; 40a, arm; 100, inspection unit; 101, microscope; 121,201,211, free roller; 202, alignment pin drive division; 202a, alignment pin; 203, reference pins drive division; 203a, reference pins; 204, end face test section; 204a, end face detecting sensor; L1, inspection line; PR1, inspection space; TR1, TR2, conveying space; W, substrate.
Claims (7)
1. a testing fixture is characterized in that, comprising:
Transport platform, it has the roller that is used for supporting substrates and is rotated with the mode along this substrate of throughput direction conveying;
Driving mechanism, it is used to make aforesaid substrate to move along above-mentioned throughput direction;
The align member drive division, the end side that it is arranged at the input side that leans on aforesaid substrate of above-mentioned transport platform is used to keep with the align member of aforesaid substrate butt and this align member is moved to above-mentioned throughput direction;
The end face test section, it is used to detect the end face of the direction parallel with above-mentioned throughput direction of aforesaid substrate;
Inspection portion, it is used for carrying out the inspection of aforesaid substrate according to the information of the detected end face of above-mentioned end face test section; And
The reference feature drive division, it is arranged between above-mentioned inspection portion and the above-mentioned align member drive division, is used to keep with the reference feature of aforesaid substrate butt and drives this reference feature and this reference feature is gone up and down.
2. testing fixture according to claim 1 is characterized in that,
It is roughly cylindric that above-mentioned align member is, and can be around the central axis rotation of this cylinder.
3. testing fixture according to claim 1 is characterized in that,
The ratio of said reference member leans on the position of top to tilt towards the place ahead of above-mentioned throughput direction with the zone of aforesaid substrate butt at least.
4. testing fixture according to claim 1 is characterized in that,
Above-mentioned driving mechanism has and is used to adsorb the sucker that keeps aforesaid substrate.
5. according to each described testing fixture in the claim 1 to 4, it is characterized in that,
The said reference member is provided with a plurality of,
Above-mentioned align member is positioned at the private side of above-mentioned Width with respect to the reference feature of the outer most edge side of the Width that is positioned at above-mentioned transport platform in a plurality of said reference members.
6. testing fixture according to claim 1 is characterized in that,
Above-mentioned align member drive division is used to drive above-mentioned align member and above-mentioned align member is gone up and down.
7. the localization method of a substrate; It is the localization method of the substrate of testing fixture; This testing fixture has the inspection portion of the inspection that is used for carrying out substrate and is used for carrying the delivery section of putting aforesaid substrate and carrying this substrate, it is characterized in that the localization method of aforesaid substrate comprises:
Input step, to transport platform input aforesaid substrate, this transport platform has the roller that is used for along the throughput direction rotation of carrying aforesaid substrate;
The align member actuation step drives align member, this align member be arranged at above-mentioned transport platform the input side that leans on aforesaid substrate end side and be used for and the aforesaid substrate butt;
The substrate fixing step utilizes reference feature and above-mentioned align member to grip aforesaid substrate, and this reference feature is arranged between above-mentioned inspection portion and the above-mentioned align member drive division and is used for and the aforesaid substrate butt; And
End face detects step, and the end face of the direction parallel with above-mentioned throughput direction of utilizing the fixing aforesaid substrate of aforesaid substrate fixing step is detected.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-242544 | 2010-10-28 | ||
| JP2010242544A JP2012094770A (en) | 2010-10-28 | 2010-10-28 | Inspection device and substrate positioning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102456602A true CN102456602A (en) | 2012-05-16 |
Family
ID=46039632
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120417763 Expired - Fee Related CN202523695U (en) | 2010-10-28 | 2011-10-27 | Inspection device |
| CN 201110332017 Pending CN102456602A (en) | 2010-10-28 | 2011-10-27 | Inspection apparatus and positioning method for substrate |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120417763 Expired - Fee Related CN202523695U (en) | 2010-10-28 | 2011-10-27 | Inspection device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012094770A (en) |
| CN (2) | CN202523695U (en) |
| TW (1) | TW201230230A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103713478A (en) * | 2013-12-31 | 2014-04-09 | 四川聚能核技术工程有限公司 | Pre-alignment device |
| CN104022061A (en) * | 2013-03-01 | 2014-09-03 | 威光自动化科技股份有限公司 | Substrate positioning device |
| CN104973425A (en) * | 2015-06-11 | 2015-10-14 | 杭州长川科技股份有限公司 | Double-tray conveying mechanism of IC optical inspection and sorting system |
| CN106081483A (en) * | 2016-06-01 | 2016-11-09 | 中国建材国际工程集团有限公司 | Device for glass location |
| CN106770364A (en) * | 2017-01-26 | 2017-05-31 | 江苏东旭亿泰智能装备有限公司 | Substrate positioning mechanism, macro inspection apparatus and macro inspection method |
| CN110660693A (en) * | 2018-06-29 | 2020-01-07 | 佳能特机株式会社 | Substrate inspection system and inspection method, electronic device manufacturing system and manufacturing method |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102897507B (en) * | 2012-11-13 | 2015-01-07 | 深圳市华星光电技术有限公司 | Glass substrate position correcting device and method |
| KR101611922B1 (en) * | 2014-05-12 | 2016-04-14 | 참엔지니어링(주) | Apparatus and method for testing a substrate |
| CN107521901A (en) * | 2017-10-12 | 2017-12-29 | 苏州杰锐思自动化设备有限公司 | Display screen pipeline |
| KR20200123349A (en) * | 2019-04-19 | 2020-10-29 | 주식회사 디엠에스 | Guide apparatus for substrate transfer |
| TWI846112B (en) * | 2022-10-27 | 2024-06-21 | 亞克先進科技股份有限公司 | Non mid-mounted driving type rotation device |
-
2010
- 2010-10-28 JP JP2010242544A patent/JP2012094770A/en not_active Withdrawn
-
2011
- 2011-10-27 CN CN 201120417763 patent/CN202523695U/en not_active Expired - Fee Related
- 2011-10-27 TW TW100139109A patent/TW201230230A/en unknown
- 2011-10-27 CN CN 201110332017 patent/CN102456602A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104022061A (en) * | 2013-03-01 | 2014-09-03 | 威光自动化科技股份有限公司 | Substrate positioning device |
| CN103713478A (en) * | 2013-12-31 | 2014-04-09 | 四川聚能核技术工程有限公司 | Pre-alignment device |
| CN103713478B (en) * | 2013-12-31 | 2017-02-01 | 四川聚能核技术工程有限公司 | Pre-alignment device |
| CN104973425A (en) * | 2015-06-11 | 2015-10-14 | 杭州长川科技股份有限公司 | Double-tray conveying mechanism of IC optical inspection and sorting system |
| CN104973425B (en) * | 2015-06-11 | 2017-04-12 | 杭州长川科技股份有限公司 | Double-tray conveying mechanism of IC optical inspection and sorting system |
| CN106081483A (en) * | 2016-06-01 | 2016-11-09 | 中国建材国际工程集团有限公司 | Device for glass location |
| CN106770364A (en) * | 2017-01-26 | 2017-05-31 | 江苏东旭亿泰智能装备有限公司 | Substrate positioning mechanism, macro inspection apparatus and macro inspection method |
| CN110660693A (en) * | 2018-06-29 | 2020-01-07 | 佳能特机株式会社 | Substrate inspection system and inspection method, electronic device manufacturing system and manufacturing method |
| CN110660693B (en) * | 2018-06-29 | 2023-05-12 | 佳能特机株式会社 | Substrate inspection system, inspection method, electronic device manufacturing system, and electronic device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201230230A (en) | 2012-07-16 |
| CN202523695U (en) | 2012-11-07 |
| JP2012094770A (en) | 2012-05-17 |
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Application publication date: 20120516 |