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CN102364325A - System and method for testing bending fatigue reliability of low dimensional conducting material - Google Patents

System and method for testing bending fatigue reliability of low dimensional conducting material Download PDF

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Publication number
CN102364325A
CN102364325A CN2011103027549A CN201110302754A CN102364325A CN 102364325 A CN102364325 A CN 102364325A CN 2011103027549 A CN2011103027549 A CN 2011103027549A CN 201110302754 A CN201110302754 A CN 201110302754A CN 102364325 A CN102364325 A CN 102364325A
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sample
tested
tested conduction
fatigue
conduction sample
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CN102364325B (en
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张广平
徐进
张滨
宋竹满
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Institute of Metal Research of CAS
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Institute of Metal Research of CAS
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Abstract

The invention relates to the establishment of a system and method for testing the bending fatigue reliability of a low dimensional conducting material, in particular to a system and method for testing the bending fatigue reliability of a low dimensional conducting material. The problems that the fatigue life measurement error of the conducting film material is great, the crack initiation life can not be accurately measured and the like existing in the prior art are solved. The test system comprises an electromagnetic driving part, a fatigue loading and measurement part and a detection and recording part. The system provides a function and test method for testing the dynamic bending fatigue properties of various materials, and meanwhile, the resistance variation of tested samples can be monitored, analyzed and recorded in real time. The information such as fatigue life, crack initiation and propagation life and the like of various tested conducting samples can be accurately obtained through the recorded resistances. By using the system, the fatigue property experiment can be carried out on various tested conducting samples simultaneously, the resistance value of each tested conducting sample can be recorded and analyzed in real time, and the experiment is simple and quick to operate.

Description

A kind of bending fatigue reliability test system and method for testing of low dimension conductive material
Technical field
The present invention relates to the fatigue property test system of low dimension conductive material and the foundation of method of testing; Be specially a kind of test macro of bending fatigue reliability of low dimension conductive material, and the germinating of tested sample body internal fissure and the acquisition of extend information and the method for testing of material fatigue life.
Background technology
The low dimension conductive membraneous material is having a wide range of applications in the fields such as electronic information, industry and medical science now, as little/receive microelectronics trigger switch in the electro-mechanical system (MEMS/NEMS), and various angiocarpy bracket is with material etc.The effect of the alternation fatigue load of complicacies such as above-mentioned device bears cyclic bending, stretches or reverses in actual military service process, the fatigue behaviour of understanding conductive film material in the device is very helpful to its design and use life prediction.In case there is crackle to produce, himself electric conductivity must change in the material bodies, and the normal use of this member is brought hidden danger.Therefore, test bending fatigue performance and the crack initiation and the extend information of above-mentioned conductive material, the theoretical research of design of the reliability design in the practical application of conductive film material device, damage tolerance and membraneous material fatigue behaviour is had great importance.
At present; In the semi-girder crooked fatigue experiment; People's resistance of directly measuring between sample chuck and the loading end that adopt more, owing to this type of fatigue experimental approach between semi-girder bend specimen and the loading head inevitably because of contacting the existence in slit, and produce huge contact resistance (kilo-ohm level); The slit that can in the loading procedure of crooked fatigue experiment, contact in addition can constantly change; Cause metering circuit off and on, bring inevitable randomness, therefore often can't accurately measure the resistance value and the situation of change thereof of sample to resistance measurement; Other researchers adopt the high power digital display micro mirror of supporting CCD probe that fatigue testing specimen is carried out Direct observation; But these class methods need the manpower of labor; And experimental result can only obtain the fatigue lifetime of tested conduction sample, still can not get the crack initiation and the extend information of tested conduction sample.
Summary of the invention
The object of the present invention is to provide a kind of low dimension conductive material bending fatigue reliabilities ability test macro and method of testings such as microsize conductive film, silk material of precisely, simply being directed against; This test macro and method of testing can characterize conductive film material fatigue and crack initiation and expansion life-span, the problems such as germinating life-span that solve exist in the prior art big to conductive film material measuring error fatigue lifetime, can't accurately measure crackle.Suffer the probability of bending load effect will be more than suffering other load based on the conductive film material practical work process, this fatigue system and method for testing apply and the corresponding to bending fatigue load of membraneous material military service operating mode tested conduction sample.
Technical scheme of the present invention is:
A kind of bending fatigue reliability test system of low dimension conductive material, this test macro is made up of Electromagnetic Drive part, tired loading and measure portion, detection and recording section three parts;
(1) Electromagnetic Drive part; Comprise digital function generator, power amplifier, electromagnetic transducer; The output terminal of digital function generator connects power amplifier; The output terminal of power amplifier connects electromagnetic transducer, and the output terminal of electromagnetic transducer connects the wedge-shaped slot vibration rod of tired loading and measure portion;
(2) the tired loading and measure portion; Comprise wedge-shaped slot vibration rod, tested conduction sample, specimen holder, micrometer caliper and mircrometer gauge probe; Specimen holder is fixed on the three-dimensional mechanically moving frame, and tested conduction sample is fixed on the two-dimensional stage through the specimen holder fixed mount, and micrometer caliper and mircrometer gauge probe are fixed on the two-dimension optical platform at fatigue test system place by its fixed mount; One end of wedge-shaped slot vibration rod is connected with electromagnetic transducer; The other end of wedge-shaped slot vibration rod is connected with the mircrometer gauge of micrometer caliper probe, has wedge-shaped slot on the wedge-shaped slot vibration rod, and an end of tested conduction sample is fixed on the specimen holder; The other end of tested conduction sample extends in the wedge-shaped slot, and tested conduction sample links to each other with the multi-path digital multimeter through the outer lead that is fixed on the resistance measurement contact chip on the specimen holder;
(3) detection and recording section comprise multi-path digital multimeter and the PC that links to each other with the multi-path digital multimeter; One end of multi-path digital multimeter connects tested conduction sample, and the other end of multi-path digital multimeter links to each other with PC.
The bending fatigue reliability test system of described low dimension conductive material, the mobile amplitude of accurately measuring the wedge-shaped slot vibration rod that the mircrometer gauge that utilizes the micrometer caliper front end to connect is popped one's head in, range ability is 1 μ m~4mm, measuring accuracy is 1 μ m.
The bending fatigue reliability test system of described low dimension conductive material; Specimen holder comprises compressing tablet on jig main body, the anchor clamps, bolt fastener, resistance measurement contact chip; Tested conduction sample is connected through bolt fastener with specimen holder, and the resistance measurement contact chip directly links to each other with tested conduction sample.
The bending fatigue reliability test system of described low dimension conductive material, compressing tablet is that stainless steel material processes on jig main body and the anchor clamps, and entire body is all carried out insulation processing.
The bending fatigue reliability test system of described low dimension conductive material; One end upper surface of jig main body has terraced structure; One end of two resistance measurement contact chips extends the both sides of terraced structure bottom respectively, and an end of tested conduction sample extends the middle part of terraced structure bottom; Compressing tablet is pressed and is located at tested conduction sample and two resistance measurement contact chip tops on the anchor clamps, and engages with the terraced structure of jig main body.
A kind of bending fatigue method for testing reliability that utilizes the low dimension conductive material of said test macro, concrete steps are following:
(1) measures the tensile property of the single shaft of tested conductive material in advance, obtain its tensile stress-strain curve;
(2), select the clamping length of tested conduction sample at the specimen holder end according to sample original length and required semi-girder length;
(3) be fixed on the two-dimensional stage on the optical table through adjusting, adjust the degree of depth that tested conduction sample inserts the wedge-shaped slot vibration rod, make it reach the needed span of experiment;
(4) be fixed on mircrometer gauge and power amplifier on the optical table through adjusting, obtain the corresponding amplitude output of electromagnetic transducer;
(5) utilize the drawing stress-strain data that obtains in advance,, calculate tested conduction sample in corresponding repeated strain ε of bare terminal end root and stress σ value thereof in conjunction with computer finite element simulation;
(6) adopt the multi-path digital multimeter, the resistance value of tested conduction sample is measured and record in real time;
(7) through measuring the real-time resistance value of sample, calculate the sample resistance change rate, obtain the resistance change rate and the relation curve between the fatigue load cycle of executing, thereby draw the fatigue lifetime of sample and the information of crack initiation and expansion.
The bending fatigue method for testing reliability of described low dimension conductive material; In the test process; Digital function generator produces the tired waveform that loads of simulating signal used in the fatigue experiment; Carry out power amplification through power amplifier, electric signal is transferred to electromagnetic transducer, electric signal is become the wedge-shaped slot vibration rod vibrations that mechanical signal drives tired loading and measure portion by electromagnetic transducer;
In the course of work, electromagnetic transducer drives wedge-shaped slot vibration rod generation vertical tremor, produces back and forth vibrations thereby drive tested conduction sample one end that embeds in the wedge-shaped slot; The mircrometer gauge probe is used to limit and measure the displacement of wedge-shaped slot vibration rod, thereby measures the vibrations amplitude of tested conduction sample.
The bending fatigue method for testing reliability of described low dimension conductive material, multi-path digital multimeter are used for detecting in real time the resistance value of tested conduction sample, and give the PC that is used for data recording with signal feedback; In the experimentation, be connected to the resistance measurement contact chip that links to each other with tested conduction sample on the multi-path digital multimeter, gather the resistance value of tested conduction sample in real time with lead, and the situation of change of resistance value; Utilization and specimen holder and multi-path digital multimeter come accurately to measure tested conduction sample changes in resistance value in fatigue process, gather the data in the multi-path digital multimeter in real time through PC, realize the automation collection in the experimentation; When the increment of the resistance of tested conduction sample reach initial resistance 30% the time, be defined as the breakaway poing of tested conduction sample; When tested conduction sample resistance variations arrived infinity, PC stopped record data automatically, and data are before deposited automatically.
The bending fatigue method for testing reliability of described low dimension conductive material; Through the parameter of function generator is set; Make it produce the multiple tired waveform that loads, tested conduction sample is applied from La-La load to the fatigue load of drawing-pressing symmetrical and asymmetric etc. any curve form.
In the bending fatigue reliability test system of low dimension conductive material of the present invention; The low dimension conductive material of indication can be the matrix support to be arranged or do not have conductive single layer or multilayer film, paper tinsel class, two dimensional sheets class material or the silk type conductive material etc. that matrix is supported through what various at present known methods (technology such as physics or chemistry) prepared; The various materials that can use this system to detect are: (1) various metal wire materials; And the outside various conductive filament materials of doing insulation processing, be the silk material that conductive processing was done in the outside perhaps at the empire silk material; Or the various conductive materials that on the insulating body material, prepare, perhaps metallic multilayer membrane material (2) or the metal forming class of various conductions; (3) or the various paper tinsel class material that piezoelectric effect is arranged, or be prepared in the various piezoelectric films on the insulating body material, or have the film of piezoelectric effect, the present invention can be used for measuring its piezoelectric property and estimate its anti-fatigue ability; (4) silk material to be detected is of a size of 2mm to 10 μ m, and film like material total thickness is that 2mm is to 10 μ m; (5) can adopt big span if the intensity of measured material is too high.
Among the present invention, the length of span that (1) is required according to experiment to be measured is chosen the clamping degree of depth of sample and the degree of depth that sample gets into wedge-shaped slot, and the precision of control span is 1 μ m; (2) link chuck and multi-path multimeter are opened function generator, and are set the waveform of choosing; (3) adjusted in concert power amplifier and mircrometer gauge probe makes the required output amplitude of reaching of electromagnetic transducer; (4) open Control Software and begin automatic record data, the time stops experiment when finishing; The strain of sample root size when (5) going out to test through FEM calculation; (6) handle the resistance data of storage, but when resistance is increased to 1.3 times of initial sample just interpretation its fatigue break has taken place.
Characteristics of the present invention are:
1, the present invention applies more the bending fatigue load near the actual military service operating mode of conductive film material to tested conduction sample;
2, accurate to the measurement of tested conduction sample resistance value.Method of testing of the present invention has been broken away from previous method can't solve the indeterminable drawback of the resistance value that causes owing to the contact problems of sample and bending strain fatigue testing specimen anchor clamps; Through the tested conduction sample of the small scale of brand-new design; Specimen preparation is easy, can measure sample resistance value and variation thereof exactly;
3, the present invention realizes sample is applied bending fatigue load arbitrarily through the output waveform parameter of adjustment digital function generator;
4, the testing fatigue scope is wide.It is 0.01~1000Hz that tested conduction sample is applied the fatigue load frequency, applies tired amplitude in 10 μ m~3mm scope, and tired amplitude measurement precision is high;
5, tested conduction specimen preparation is easy.For conductive film material or paper tinsel, the tested conduction sample yardstick that is processed into the size of test macro permission just can be carried out test, after a silk material can directly curve the U type, two ends is fixed on the anchor clamps again, just can carry out tired loading experiment to sample;
6, the present invention can carry out crooked fatigue experiment to many groups of tested conduction samples simultaneously.Utilize a function generator parallelly connected, can drive a plurality of electromagnetic drivers simultaneously with a plurality of power amplifiers.Because the power of each power amplifier can be regulated separately, and noiseless mutually, therefore can do the fatigue experiment of a plurality of various amplitudes simultaneously;
7, the present invention utilizes the multi-path digital multimeter that many groups of tired tested conduction samples are carried out the measurement of resistance, through software measurement data is imported PC again and stores and analyze;
8, the small scale conduction dynamic bending fatigue experimental system that the present invention designed, simple when implementing test, package unit is cheap, is particularly useful for micro-cantilever class micro-member and material;
9, film that the present invention tested or silk material are the matrix support being arranged or do not have conductive single layer or multilayer film, paper tinsel class, two dimensional sheets class material or the silk type conductive material etc. that matrix is supported through various present known methods (technology such as physics and chemistry) preparation.Specifically describe as follows: (1) various metal wire materials, and the outside various conductive filament materials of doing insulation processing are the silk materials that conductive processing was done in the outside at the empire silk material perhaps; Or the various conductive materials that on the insulating body material, prepare, perhaps metallic multilayer membrane material (2) or the metal forming class of various conductions; (3) or the various paper tinsel class material that piezoelectric effect is arranged, or be prepared in the various piezoelectric films on the insulating body material, or have the film of piezoelectric effect, the present invention can be used for measuring its piezoelectric property and estimate its anti-fatigue ability; (4) silk material to be detected is of a size of 2mm to 10 μ m, and film like material total thickness is that 2mm is to 20 μ m; (5) can adopt big span if the intensity of measured material is too high.
In a word; The invention provides to various little/naiio-electro-meclianical systems is with having the matrix support and do not have the conductive film material of matrix support, function and the method for testing that integrated circuit carries out the dynamic bending fatigue performance test with metal, non-metallic interconnect foil material and various conduction silk material, the while can monitor and analytic record the tested sample resistance variations in real time.Can obtain information such as tested conduction sample fatigue lifetime, crack initiation and expansion life-span accurately through the resistance of noting.This system can carry out the fatigue behaviour experiment to a plurality of tested conduction samples simultaneously, and can carry out real time record and analysis to the resistance value of each tested conduction sample simultaneously, the experimental implementation simple and fast.
Description of drawings
Fig. 1 is the synoptic diagram of small scale conductive material dynamic bending fatigue Performance Test System.
Among the figure, 1 digital function generator; 2 power amplifiers; 3 electromagnetic transducers; 4 wedge-shaped slot vibration rods; 5 tested conduction samples; 6 specimen holders; 7 multi-path digital multimeter; The 8PC machine; 9 micrometer calipers; 10 mircrometer gauges probe; 11 wedge-shaped slots.
Fig. 2 (a)-(b) is the wiring layout of tested conduction sample of small scale and anchor clamps.Wherein, Fig. 2 (a) is a front view; Fig. 2 (b) is a sectional view.
Among the figure, the tested conduction sample of 5-1 small scale; The 6-1 jig main body; Compressing tablet on the 6-2 anchor clamps; The 6-3 bolt fastener; 6-4 resistance measurement contact chip.
Fig. 3 is the resistivity of tested conduction sample among the embodiment 1 and loads the relation curve between tired cycle.As wherein flexible life was 77600 weeks, and shown in partial enlarged drawing, fatigue crack is in the germinating of the 71800th week.
Fig. 4 is the wiring layout of tested conduction sample of thin copper wire and anchor clamps.
Among the figure, the tested conduction sample of 5-2 thin copper wire; The 6-1 jig main body; Compressing tablet on the 6-2 anchor clamps; The 6-3 bolt fastener; 6-4 resistance measurement contact chip.
Fig. 5 is the resistance change rate and the relation curve between the fatigue load cycle of executing.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is detailed.
As shown in Figure 1, the bending fatigue reliability test system of low dimension conductive material of the present invention is made up of three parts: (1) Electromagnetic Drive part; (2) the tired loading and measure portion; (3) detection and recording section.
1, Electromagnetic Drive part comprises digital function generator 1, power amplifier 2, electromagnetic transducer 3 etc., is responsible for the driving of fatigue experiment.The output terminal of digital function generator 1 connects power amplifier 2, and the output terminal of power amplifier 2 connects electromagnetic transducer 3, the tired loading of output terminal connection of electromagnetic transducer 3 and the wedge-shaped slot vibration rod 4 of measure portion.In the test process; Earlier by digital function generator 1; Produce the tired waveform that loads of simulating signal used in the fatigue experiment; Process power amplifier 2 carries out power amplification again, and electric signal is transferred to electromagnetic transducer 3, finally by electromagnetic transducer 3 electric signal is become wedge-shaped slot vibration rod 4 vibrations that mechanical signal drives tired loading and measure portion.
2, the tired loading and measure portion; Comprise wedge-shaped slot vibration rod 4, tested conduction sample 5, specimen holder 6, micrometer caliper 9 and mircrometer gauge probe 10 etc.; Be responsible for giving tested conduction sample to apply bending fatigue load, and measure the amplitude of tested conduction sample cantilever beam-ends simultaneously.Specimen holder 6 is fixed on the three-dimensional mechanically moving frame; Tested conduction sample 5 is fixed on the high-precision two-dimensional platform through specimen holder 6 fixed mounts; Its displacement accuracy is 1 μ m; Micrometer caliper 9 and mircrometer gauge probe are fixed on the high-precision two-dimensional optical table at fatigue test system place by its fixed mount, and its displacement accuracy is 1 μ m, and an end of wedge-shaped slot vibration rod 4 is connected with electromagnetic transducer 3; Drive by electromagnetic transducer 3; The other end of wedge-shaped slot vibration rod 4 is connected with the mircrometer gauge probe 10 of micrometer caliper 9, has wedge-shaped slot 11 on the wedge-shaped slot vibration rod 4, and an end of tested conduction sample 5 is fixed on the specimen holder 6 of particular design; The other end of tested conduction sample 5 extends in the wedge-shaped slot 11, and tested conduction sample 5 links to each other with multi-path digital multimeter 7 through the outer lead that is fixed on the resistance measurement contact chip 6-4 on the specimen holder 6.Utilize the amplitude that moves accurate measurement wedge-shaped slot vibration rod 4 of the mircrometer gauge probe 10 of high-precision spiral mircrometer gauge 9 front ends connection, range ability is 1 μ m~4mm, and measuring accuracy is 1 μ m.
In the course of work, electromagnetic transducer 3 drives wedge-shaped slot vibration rod 4 vertical tremor takes place, and produces back and forth vibrations thereby drive tested conduction sample 5 one ends that embed in the wedge-shaped slot 11; Mircrometer gauge probe 10 is used to limit and measure the displacement of wedge-shaped slot vibration rod 4, thereby measures the vibrations amplitude of tested conduction sample 5.
As shown in Figure 2, the wiring layout of tested conduction sample of typical paper tinsel and film class small scale and specimen holder, the bare terminal end of the tested conduction sample of the small scale 5-1 of the small scale conduction specimen holder 6 clamping difformity specifications through particular design; Experiment is made up of compressing tablet 6-2, bolt fastener 6-3, two resistance measurement contact chip 6-4 on jig main body 6-1, the anchor clamps with specimen holder 6; Compressing tablet 6-2 is that stainless steel material processes on jig main body 6-1 and the anchor clamps; And entire body is carried out insulation processing; The tested conduction sample of small scale 5-1 is connected through bolt fastener 6-3 with specimen holder 6, and resistance measurement contact chip 6-4 directly links to each other with the tested conduction sample of small scale 5-1.
The end upper surface of jig main body 6-1 has terraced structure, and the end of two resistance measurement contact chip 6-4 extends the both sides of terraced structure bottom respectively, and the end of the tested conduction sample of small scale 5-1 extends the middle part of terraced structure bottom; Compressing tablet 6-2 presses and is located at small scale tested conduction sample 5-1 and two resistance measurement contact chip 6-4 tops on the anchor clamps, and engages with the terraced structure of jig main body 6-1.
As shown in Figure 4, the wiring layout of typical case silk tested conduction sample of material class and specimen holder, the bare terminal end of the tested conduction sample of the thin copper wire 5-2 through specimen holder 6 clamping difformity specifications; Experiment is made up of compressing tablet 6-2, bolt fastener 6-3, two resistance measurement contact chip 6-4 on jig main body 6-1, the anchor clamps with specimen holder 6; Compressing tablet 6-2 is that stainless steel material processes on jig main body 6-1 and the anchor clamps; And entire body is carried out insulation processing; The tested conduction sample of thin copper wire 5-2 is connected through bolt fastener 6-3 with specimen holder 6, and resistance measurement contact chip 6-4 directly links to each other with the tested conduction sample of thin copper wire 5-2.
3, detection and recording section comprise multi-path digital multimeter 7 and the PC 8 that is attached thereto.
One end of multi-path digital multimeter 7 connects tested conduction sample 5 (as: small scale tested conduction sample 5-1 or the tested conduction sample of thin copper wire 5-2); The other end of multi-path digital multimeter 7 links to each other with PC 8; Multi-path digital multimeter 7 is used for detecting in real time the resistance value of tested conduction sample 5, and gives the PC 8 that is used for data recording with signal feedback.
In the experimentation, be connected to the resistance measurement contact chip 6-4 that links to each other with tested conduction sample 5 on the multi-path digital multimeter 7, gather the resistance value of tested conduction sample 5 in real time with lead, and the situation of change of resistance value.Utilize with specimen holder 6 and multi-path digital multimeter 7 and accurately measure tested conduction sample 5 changes in resistance value in fatigue process, gather the data in the multi-path digital multimeter 7 in real time, realize the automation collection in the experimentation through PC 8.When the increment of the resistance of tested conduction sample 5 reach initial resistance 30% the time, be defined as the breakaway poing of tested conduction sample 5; When tested conduction sample 5 resistance variations arrived infinity, PC 8 stopped record data automatically, and data are before deposited automatically.
The bending fatigue method for testing reliability of low dimension conductive material of the present invention utilizes above-mentioned test macro, and concrete steps are following: (1) is measured the tensile property of the single shaft of tested conductive material in advance, obtains its tensile stress-strain curve; (2), select the clamping length of tested conduction sample at the specimen holder end according to sample original length and required semi-girder length; (3) be fixed on the high-precision two-dimensional platform on the optical table through adjusting, adjust the degree of depth that tested conduction sample inserts the wedge-shaped slot vibration rod, make it reach the needed span of experiment; (4) be fixed on high precision mircrometer gauge and power amplifier on the optical table through adjusting, obtain the corresponding amplitude output of electromagnetic transducer; (5) utilize the drawing stress-strain data that obtains in advance,, calculate tested conduction sample in corresponding repeated strain ε of bare terminal end root and stress σ value thereof in conjunction with computer finite element simulation; (6) adopt the multi-path digital multimeter, the resistance value of tested conduction sample is measured and record in real time; (7) through measuring the real-time resistance value of sample, calculate the sample resistance change rate, obtain the resistance change rate and the relation curve between the fatigue load cycle of executing, thereby draw the fatigue lifetime of sample and the information of crack initiation and expansion.
The present invention goes out maximum stress and the strain that tested conduction sample 5 roots are born with finite element simulation calculation.Through to collecting the data of resistance variations in time, calculate the crack initiation life-span and total fatigue lifetime of tested conduction sample 5.
The present invention utilizes the multi-path digital multimeter to detect and the different resistance value of the record tested conduction sample of small scale in whole fatigue process.Can be through the parameter of function generator be set, make it produce the multiple tired waveform that loads, can apply from La-La load to the fatigue load of drawing-pressing symmetrical and asymmetric etc. any curve form the tested conduction sample of small scale.In conjunction with existing semi-girder bending fatigue test macro, the anchor clamps that match with special-shaped sample that utilize particular design.
The tested conduction sample of the present invention is the silk material that all kinds of conductive films, paper tinsel and the various conductions of substrate and no substrate support are arranged.The membraneous material that the present invention tested is for to be prepared in conductive film and unsupported conductive foil or membraneous material on the flexible base, board through technology such as various physics and chemistry.
Embodiment 1
With thickness is process mechanical buffing of metal nickel foil and the electropolishing of 50 μ m; Tested conduction sample 5 thickness are 34 μ m; It is cut into the tested conduction sample of U type small scale 5-1; And this sample is fixed on the specimen holder 6, choosing the semi-girder effective length is 3mm, the wiring layout of sample and specimen holder 6 devices is as shown in Figure 2.Before fatigue experiment, utilize the unilateral stretching experiment to obtain the tensile stress-strain curve of nickel foil, to obtain the constitutive relation in the finite element analogy, utilizing constitutive relation to calculate the maximum strain of sample root is 1.0921%.Selecting frequency is that the sine wave of 50Hz carries tired waveform as executing, and the sample amplitude is 2mm, adopts tension and compression symmetry fatigue to load.By the real-time resistance value of the sample that records in the fatigue experiment process, calculate the relative change rate of sample resistance, and obtain the resistance change rate and the relation curve (as shown in Figure 3) between the fatigue load cycle of executing; Visible from curve, when the increase of sample resistance change rate is 30%, undergo mutation as the sample resistance change rate; Fatigue load circulation this moment cycle was 71800 weeks, and the unexpected increase of sample resistance value shows the inner crackle generation unstable propagation of germinating of sample; Be defined as the crack initiation life-span; When fatigue load circulation sample generation fatigue break during 80000 weeks, so the total fatigue life of sample was 80000 weeks, and the germinating life-span of fatigue crack was the 70000th week.
Embodiment 2
With diameter is that the drawing fine copper silk of 25 μ m bends to arc, and its two ends are fixed on the anchor clamps 6, and choosing filament semi-girder length is 3.5mm, and wiring layout is as shown in Figure 4.Before fatigue experiment, utilize the unilateral stretching experiment to obtain the tensile stress-strain curve of copper wire, to obtain the constitutive relation in the finite element analogy, utilizing constitutive relation to calculate the maximum strain of sample root is 8.5%.Selecting frequency is that the sine wave of 50Hz carries tired waveform as executing, and the amplitude of sample is 2mm, adopts tension and compression symmetry fatigue to load.Utilize the multi-channel digital multimeter to gather the resistance value of sample in the fatigue experiment process.By the real-time resistance value of the sample that records in the fatigue experiment process; Calculate the relative change rate of sample resistance; And the acquisition resistance change rate and the relation curve (as shown in Figure 5) between the fatigue load cycle of executing; Because the sample effect of fatigue load by bending, silk finally causes it to rupture from root tired intrusion and squeeze-out phenomenon having been occurred by the root of specimen holder 6 clampings.Visible from Fig. 5; When fatigue load circulation cycle was 12500 weeks, the resistance change rate of sample was undergone mutation, and the sample resistance value takes place to increase suddenly; The crackle generation unstable propagation that shows the inner germinating of sample; In the sample generation fatigue break of 88500 whens week, so the total fatigue life of sample was 88500 weeks, and the germinating life-span of fatigue crack was the 12500th week.
Embodiment result shows that the present invention produces the tired waveform that loads through digital function generator, amplifies through power amplifier again, drives electromagnetic transducer and drives the vibrations of wedge-shaped slot vibration rod, drives the tested conduction sample of the small scale that is embedded in the wedge-shaped slot and produces vibrations.The other end of sample is fixed on the anchor clamps of particular design, and anchor clamps are connected with the multi-path digital multimeter, utilizes PC to gather the sample resistance value data that the multi-path digital multimeter is measured in real time again.After accomplishing experiment, utilize the stress-strain diagram that had before obtained, obtain cantilever beam specimen clamping root maximum stress, strain value through finite element simulation calculation.Resistance variations rate curve through noting at last obtains fatigue crack initiation life and sample total fatigue lifetime, thereby has realized the mensuration of microscale conductive material fatigue behaviour.Entire life and crack initiation life-span when the present invention can confirm fatigue experiment more accurately, the experimental implementation simple and fast, and can carry out real-time monitored and analysis to tested conduction sample.

Claims (10)

1. the bending fatigue reliability test system of a low dimension conductive material is characterized in that, this test macro is made up of three parts: (1) Electromagnetic Drive part; (2) the tired loading and measure portion; (3) detection and recording section;
(1) Electromagnetic Drive part; Comprise digital function generator, power amplifier, electromagnetic transducer; The output terminal of digital function generator connects power amplifier; The output terminal of power amplifier connects electromagnetic transducer, and the output terminal of electromagnetic transducer connects the wedge-shaped slot vibration rod of tired loading and measure portion;
(2) the tired loading and measure portion; Comprise wedge-shaped slot vibration rod, tested conduction sample, specimen holder, micrometer caliper and mircrometer gauge probe; Specimen holder is fixed on the three-dimensional mechanically moving frame, and tested conduction sample is fixed on the two-dimensional stage through the specimen holder fixed mount, and micrometer caliper and mircrometer gauge probe are fixed on the two-dimension optical platform at fatigue test system place by its fixed mount; One end of wedge-shaped slot vibration rod is connected with electromagnetic transducer; The other end of wedge-shaped slot vibration rod is connected with the mircrometer gauge of micrometer caliper probe, has wedge-shaped slot on the wedge-shaped slot vibration rod, and an end of tested conduction sample is fixed on the specimen holder; The other end of tested conduction sample extends in the wedge-shaped slot, and tested conduction sample links to each other with the multi-path digital multimeter through the outer lead that is fixed on the resistance measurement contact chip on the specimen holder;
(3) detection and recording section comprise multi-path digital multimeter and the PC that links to each other with the multi-path digital multimeter; One end of multi-path digital multimeter connects tested conduction sample, and the other end of multi-path digital multimeter links to each other with PC.
2. according to the bending fatigue reliability test system of the described low dimension conductive material of claim 1; It is characterized in that; The mobile amplitude of accurately measuring the wedge-shaped slot vibration rod that the mircrometer gauge that utilizes the micrometer caliper front end to connect is popped one's head in, range ability is 1 μ m~4mm, measuring accuracy is 1 μ m.
3. according to the bending fatigue reliability test system of the described low dimension conductive material of claim 1; It is characterized in that; Specimen holder comprises compressing tablet on jig main body, the anchor clamps, bolt fastener, resistance measurement contact chip; Tested conduction sample is connected through bolt fastener with specimen holder, and the resistance measurement contact chip directly links to each other with tested conduction sample.
4. according to the bending fatigue reliability test system of the described low dimension conductive material of claim 3, it is characterized in that compressing tablet is that stainless steel material processes on jig main body and the anchor clamps, and entire body is all carried out insulation processing.
5. according to the bending fatigue reliability test system of the described low dimension conductive material of claim 3; It is characterized in that; One end upper surface of jig main body has terraced structure; One end of two resistance measurement contact chips extends the both sides of terraced structure bottom respectively, and an end of tested conduction sample extends the middle part of terraced structure bottom; Compressing tablet is pressed and is located at tested conduction sample and two resistance measurement contact chip tops on the anchor clamps, and engages with the terraced structure of jig main body.
6. bending fatigue method for testing reliability that utilizes the low dimension conductive material of the said test macro of claim 1 is characterized in that concrete steps are following:
(1) measures the tensile property of the single shaft of tested conductive material in advance, obtain its tensile stress-strain curve;
(2), select the clamping length of tested conduction sample at the specimen holder end according to sample original length and required semi-girder length;
(3) be fixed on the two-dimensional stage on the optical table through adjusting, adjust the degree of depth that tested conduction sample inserts the wedge-shaped slot vibration rod, make it reach the needed span of experiment;
(4) be fixed on mircrometer gauge and power amplifier on the optical table through adjusting, obtain the corresponding amplitude output of electromagnetic transducer;
(5) utilize the drawing stress-strain data that obtains in advance,, calculate tested conduction sample in corresponding repeated strain ε of bare terminal end root and stress σ value thereof in conjunction with computer finite element simulation;
(6) adopt the multi-path digital multimeter, the resistance value of tested conduction sample is measured and record in real time;
(7) through measuring the real-time resistance value of sample, calculate the sample resistance change rate, obtain the resistance change rate and the relation curve between the fatigue load cycle of executing, thereby draw the fatigue lifetime of sample and the information of crack initiation and expansion.
7. according to the bending fatigue method for testing reliability of the described low dimension conductive material of claim 6; It is characterized in that; In the test process, digital function generator produces the tired waveform that loads of simulating signal used in the fatigue experiment, carries out power amplification through power amplifier; Electric signal is transferred to electromagnetic transducer, electric signal is become the wedge-shaped slot vibration rod vibrations that mechanical signal drives tired loading and measure portion by electromagnetic transducer;
In the course of work, electromagnetic transducer drives wedge-shaped slot vibration rod generation vertical tremor, produces back and forth vibrations thereby drive tested conduction sample one end that embeds in the wedge-shaped slot; The mircrometer gauge probe is used to limit and measure the displacement of wedge-shaped slot vibration rod, thereby measures the vibrations amplitude of tested conduction sample.
8. according to the bending fatigue method for testing reliability of the described low dimension conductive material of claim 6, it is characterized in that the multi-path digital multimeter is used for detecting in real time the resistance value of tested conduction sample, and give the PC that is used for data recording signal feedback; In the experimentation, be connected to the resistance measurement contact chip that links to each other with tested conduction sample on the multi-path digital multimeter, gather the resistance value of tested conduction sample in real time with lead, and the situation of change of resistance value; Utilization and specimen holder and multi-path digital multimeter come accurately to measure tested conduction sample changes in resistance value in fatigue process, gather the data in the multi-path digital multimeter in real time through PC, realize the automation collection in the experimentation; When the increment of the resistance of tested conduction sample reach initial resistance 30% the time, be defined as the breakaway poing of tested conduction sample; When tested conduction sample resistance variations arrived infinity, PC stopped record data automatically, and data are before deposited automatically.
9. according to the bending fatigue method for testing reliability of the described low dimension conductive material of claim 6; It is characterized in that; Through the parameter of function generator is set; Make it produce the multiple tired waveform that loads, tested conduction sample is applied from La-La load to the fatigue load of drawing-pressing symmetrical and asymmetric etc. any curve form.
10. according to the bending fatigue method for testing reliability of the described low dimension conductive material of claim 6, it is characterized in that tested conduction sample is the silk material that all kinds of conductive films, paper tinsel or the various conductions of substrate and no substrate support are arranged.
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CN110672926A (en) * 2019-10-24 2020-01-10 河北工业大学 Electrical material conductivity measuring device and measuring system suitable for different working conditions
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