CN101576711A - Device and method for preparing optical waveguide in transparent solid material by femtosecond laser - Google Patents
Device and method for preparing optical waveguide in transparent solid material by femtosecond laser Download PDFInfo
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Abstract
The invention provides a device and a method for preparing optical waveguide in a transparent solid material by femtosecond laser. The device comprises a femtosecond laser system, a variable attenuator, a beam splitter, a power meter, a micro objective, a three-dimensional mobile platform and a CCD detector. The preparation method comprises the following steps of: attenuating the pulse energy to a required size by a femtosecond pulse generated by the femtosecond laser system; making the femtosecond pulse vertically incident under the surface of the transparent material by close focusing of the micro objective; preparing the two-dimensional or three-dimensional optical waveguide by utilizing the change of an refractive index generated due to the non-linear action of the femtosecond laser and the material; and optimally preparing the shape and size of the waveguide by adopting the multiple scan writing or writing the two-wire waveguide. The method has a simple process of writing the buried waveguide in the transparent solid material, can conveniently and highly efficiently prepare couplers, beam splitters, and the two-dimensional or three-dimensional waveguide structure for generating the waveguide of a second harmonic and the like, is simple, novel and highly efficient optical waveguide preparation technology, and can be widely applied in the field of integrated optics.
Description
[technical field]:
The invention belongs to the making of the manufacture technology field of optical waveguide and device, particularly two dimension or three-dimensional optical waveguide and device, be specifically related to utilize femtosecond laser in transparent solid material, to make the apparatus and method of optical waveguide.
[background technology]:
Non-linear transparent material such as lithium niobate (LN) and KTP (KTP) etc. have a wide range of applications in integrated optics and photonics field.At present, need make optical waveguide or waveguide array in transparent materials such as LN, KTP in many application of integrated optics, utilization ions diffusion and particle exchanging technology can be good at making waveguiding structure.Though these technology maturations also can be made the waveguide of low transmission loss, they can only make the two-dimensional fundamental form structure on the surface near material, make very difficulty of three-dimensional waveguide.In addition, complex process when using these fabrication techniques waveguides needs to use in the semiconductor fabrication as some technologies such as photoetching, corrosion and diffusions.
Since first femto-second laser came out, femtosecond laser just got more and more people's extensive concerning always.In recent years, it has demonstrated huge application potential at numerous areas such as optical communication, optical storage, biomedicine, Precision Machining.The femtosecond laser peak power is high, can reach 10
15W/cm
2, femtosecond laser will cause very abundant nonlinear effect when propagating in medium, as self-focusing, self-defocusing, filament effect etc.1996, people such as Davis found that femtosecond pulse can bring out variations in refractive index near it focuses on focus in transparent material.Utilize femtosecond laser to carry out waveguide at present and write the technology of system and reach its maturity, femtosecond laser in transparent materials such as crystal, glass, polymkeric substance, all can write direct two dimension or three-dimensional optical waveguide or microstructure.
The utilization femto-second laser is when carrying out the inscription of optical waveguide, and the movement of sample direction can parallel with beam direction (parallel inscription), also can vertical with beam direction (vertical inscription).When adopting parallel inscription mode, inscribe the waveguide meeting and have symmetry and round-shaped preferably, but be subjected to focusing objective len operating distance restriction and make the length limited system that waveguide is inscribed, this kind mode need hang down the microcobjective of numerical aperture (NA≤0..3) so that make that the operating distance of microcobjective is longer as much as possible.When adopting vertical the inscription, waveguide inscription length is unrestricted, yet the waveguide cross sectional shape of inscribing is an elliptical shape, and adopting multiple scaaning to inscribe (repeatedly repeating to inscribe laser spot displacement certain distance when at every turn inscribing) can be so that the waveguide cross section be approaching circular; In addition, also can obtain the waveguide of the approaching circle in cross section by inscribing twin wire waveguide (inscribes two identical and, form the light conductive area) at middle the overlapping region of two waveguides at a distance of the waveguides of certain distance.Adopt multiple scaaning to inscribe and inscribe the cross sectional shape of twin wire waveguide both can optimization waveguide, can also control the size of the sectional dimension of waveguide.Vertical inscription is not subjected to the influence of microcobjective numerical aperture, but adopts high-NA microcobjective (NA is between 0.3～0.65) can improve the laser intensity of focal area, therefore strengthens the nonlinear interaction of femtosecond laser and transparent solid material.Because vertical inscription mode is not subjected to the restriction of microcobjective numerical aperture, and the waveguide length of inscribing is not limited yet, and waveguide shapes and size also have number of ways optimization simultaneously, therefore becomes the most common way of inscribing two dimension or three-dimensional waveguide.
[summary of the invention]:
Technical matters to be solved by this invention is to overcome the complex process of traditional optical waveguide making and the shortcoming that can not make three-dimensional waveguide, and a kind of apparatus and method of utilizing femtosecond laser beam to make two dimension or three-dimensional optical waveguide fast and efficiently in transparent solid material inside are provided.
The present invention adopts vertical inscription mode, by the microcobjective (NA is between 0.3～0.65) of high-NA femtosecond laser is tightened to focus to and wait to inscribe under the transparent solid material sample surfaces, adopt multiple scaaning to inscribe or inscribe the twin wire waveguide and obtain waveguide dimensions and all controlled two dimension or the three-dimensional optical waveguide structure of shape.
The device that utilizes femtosecond laser to make optical waveguide in transparent solid material provided by the invention comprises successively:
Femto-second laser system: be used to provide the femto-second laser pulse of inscribing optical waveguide;
Variable attenuator: inscribe needs according to optical waveguide, be used for the femto-second laser pulse energy of femto-second laser output is decayed;
Beam splitter: be used for the femto-second laser pulse after the variable attenuator decay is carried out beam splitting so that pulsed energy is monitored in real time;
Power meter: femtosecond laser beam by the beam splitter beam splitting after wherein a branch of power meter that is coupled into, be used to monitor the energy of inscribing femto-second laser pulse;
High-NA microcobjective: be arranged on the main optical path of beam splitter back femto-second laser pulse, be used for femto-second laser pulse is tightly focused on;
Three-dimensional mobile platform: be used to place the transparent solid material sample of waiting to inscribe optical waveguide, and accurately control its two dimension or three-dimensional moving by computing machine.
Ccd detector: be used to monitor the spot size that focuses on femtosecond laser beam and in the location of waiting to inscribe in the sample.
A kind of method of using above-described device in transparent solid material, to make optical waveguide, this method comprises:
The first, will wait that the transparent solid material of inscribing optical waveguide is fixed on the three-dimensional mobile platform, three-dimensional mobile platform is by computer controlled automatic;
The second, produce the inscription femto-second laser pulse by the femto-second laser system, and high-octane femto-second laser pulse is decayed through variable attenuator;
Three, with beam splitter with the femto-second laser pulse beam splitting, by the energy size of power meter monitoring pulse, so that cooperates energy to be adjusted to the required energy level of inscription optical waveguide with femto-second laser pulse with described variable attenuator of second step;
Four, the femto-second laser pulse that will adjust energy is tightly focused on by the microcobjective of high-NA (NA=0.3～0.65), the femto-second laser pulse that focuses on vertically waits to inscribe the xy face incident of the transparent solid material of optical waveguide, and the focus of femto-second laser pulse is positioned under the transparent solid material xy surface;
Five, described femtosecond laser is incided transparent material when inner in the 4th step, adopt ccd detector to monitor the location of femtosecond laser focus in waiting to inscribe the transparent material of waveguide;
Six,, the described three-dimensional mobile platform of the first step is moved to produce two dimension or three-dimensional optical waveguide in the xy face or at xyz three dimensions along set path according to the requirement of waiting to inscribe optical waveguide;
Seven, in described optical waveguide inscription process of the 6th step, adopt many times scanning to inscribe or inscribe the twin wire waveguide and optimize the shape and size of inscribing waveguide;
The transparent solid material of indication of the present invention is glass, melts quartz, or nonlinear crystal lithium niobate, KTP, or periodically poled lithium niobate and KTP, or the inorganic salts crystal.
The centre wavelength of the femto-second laser pulse of second step described femto-second laser system generation is that 775～810nm, pulse width are that 50～150fs, repetition frequency are 1～5kHz.
The 3rd step is described to be used to inscribe the femto-second laser pulse of optical waveguide after variable attenuator decay energy is 0.1～100 μ J.
The focus of the 4th step, described focusing femto-second laser pulse of the 5th step is positioned at 100～700 μ m under the transparent solid material surface.
The translational speed of the 6th described three-dimensional mobile platform of step in xy face or xyz space is 1～500 μ m/s.
Advantage of the present invention and good effect:
When utilizing femtosecond laser to inscribe optical waveguide (the vertical inscription), the femtosecond light beam is focused on certain depth under the transparent material surface, can cause its structural change at femtosecond laser focal region material to the non-linear absorption of femtosecond pulse, cause the active region change of refractive.Under suitable inscription parameter condition, the material change of refractive can allow to form optical waveguide, based on this principle, can inscribe out various buried light waveguide structure.Utilize femtosecond laser to inscribe to bury waveguide technology simple,, can make two dimension or three-dimensional wave guide structure easily by the track that accurate control sample moves, thus femtosecond laser to inscribe be a kind of easy, novel and waveguide fabrication technology efficiently.
Compare with traditional surperficial micro-processing technologies such as photoetching, the advantage of femtosecond micro-processing technology is: this technology not only can be on the surface of various materials, and can carry out the little processing of optics in inside; This technology does not need to design special photoetching masterplate, does not need chemical treating process, is applicable to the optical microstructures of the various special designs of processing.Inscribe with femtosecond laser and can make photo-coupler, beam splitter, and in nonlinear crystal or period polarized nonlinear crystal, inscribe the waveguide that is used for efficiently producing second harmonic (SHG) etc.Utilize femtosecond laser to inscribe transparent material and make the making that the technology of optical waveguide can be widely used in integrated optics field optical waveguide, can make the three-dimensional wave guide structure of two dimension or labyrinth etc. easily.
[description of drawings]:
Fig. 1 is two dimension of the present invention or three-dimensional waveguide producing device synoptic diagram;
Fig. 2 is the PPLN waveguide that utilizes waveguide fabrication apparatus and method of the present invention to make.Fig. 2-a is that femtosecond laser is vertically inscribed the synoptic diagram of making the PPLN waveguide, and Fig. 2-b is the sectional view of the twin wire waveguide of making, and Fig. 2-c is the near field hot spot mode chart of the twin wire waveguide of making;
Fig. 3 is based on the second harmonic convert light spectrogram of the PPLN waveguide of Fig. 2 making, and illustration is the spectrogram of fundamental frequency light;
Fig. 4 is the slope efficiency that second harmonic shown in Figure 3 is changed.
Among the figure, 1 femto-second laser, 2 variable attenuators, 3 beam splitters, 4 power meters, 5 microcobjectives, 6 bands are inscribed the transparent solid material of optical waveguide, 7 computer-controlled three-dimensional mobile platforms, 8CCD detector.
[embodiment]:
Now the present invention is described in more detail in conjunction with the accompanying drawings and embodiments, but the invention is not restricted to these embodiment.
The producing device of embodiment 1, optical waveguide
As shown in Figure 1, this producing device comprises successively:
Femto-second laser system 1: be used to provide the femto-second laser pulse of inscribing optical waveguide;
Variable attenuator 2: inscribe needs according to optical waveguide, be used for the high-energy fly secondary laser pulse of femto-second laser output is decayed;
Beam splitter 3: be used for the femto-second laser pulse after the variable attenuator decay is carried out beam splitting;
Power meter 4: femtosecond laser beam by the beam splitter beam splitting after wherein a branch of power meter that is coupled into, be used to monitor the energy of inscribing femto-second laser pulse;
High-NA microcobjective 5: be arranged on the main optical path of beam splitter back femto-second laser pulse, be used for femto-second laser pulse is tightly focused on, the femtosecond pulse of line focus impinges perpendicularly on to be waited to inscribe on the transparent solid material 6;
Three-dimensional mobile platform 7: be used to place the transparent solid material 6 of waiting to inscribe optical waveguide, and by its two dimension of computer control or three-dimensional moving.
Ccd detector 8: be used to monitor the spot size that focuses on femtosecond laser beam and in the location of waiting to inscribe in the sample.
The making of embodiment 2, three-dimensional 1 * 3 beam splitter
Employing centre wavelength be 800nm, pulse width be 50fs, repetition frequency be the femtosecond laser of 1kHz as inscribing laser beam, it is tightly focused on to inscribe in the melting quartz glass produces three-dimensional beam splitter.
Femto-second laser 1 produces centre wavelength 800nm, pulse width is that 50fs, repetition frequency are the femtosecond laser of 1kHz, pulse energy generally can reach the mJ magnitude, about adopting variable attenuator 2 with femtosecond pulse energy attenuation to 0.5 μ J, with beam splitter 3 with the femtosecond laser beam beam splitting, by the energy size of power meter 4 monitoring pulses, so that can employing variable attenuator 2 accurately and timely pulse energy be adjusted to required energy level.The femtosecond laser beam of adjusting energy focuses on by microcobjective 5 (NA=0.45) is tight, the femtosecond laser beam that focuses on impinges perpendicularly on the xy face of melting quartz glass 6, focus on the size of femtosecond hot spot and the location in glass by ccd detector 8 monitorings, focusing on the femtosecond laser beam focus is positioned under the melting quartz glass surface about 200 μ m, melting quartz glass 6 is fixed on the accurate three-dimensional mobile platform 7, the translational speed of three-dimensional mobile platform 7 is 125 μ m/s, moves along the x direction.In order to make 1 * 3 beam splitter, the three-dimensional mobile route of sample preset and by computer control, three waveguide arms of beam splitter are mutually 120 ° in the space, distance between the exit end face waveguide is 100 μ m each other, three-dimensional 1 * 3 beam splitter of inscribing has the single mode transport characteristic at 1.05 mu m wavebands, and splitting ratio is 32: 33: 35%.
The making of embodiment 3, two-dimentional Y type beam splitter
Employing centre wavelength be 775nm, pulse width be 150fs, repetition frequency be the femtosecond laser of 1kHz as inscribing laser beam, it is tightly focused on z cuts in lithium niobate (LN) crystal and inscribe out buried light waveguide, produce two-dimentional Y type beam splitter.
Femto-second laser 1 produces centre wavelength 775nm, pulse width is that 150fs, repetition frequency are the femtosecond laser of 1kHz, pulse energy can reach 0.5mJ, about adopting variable attenuator 2 with femtosecond pulse energy attenuation to 10 μ J, with beam splitter 3 with the femtosecond laser beam beam splitting, by the energy size of power meter 4 monitoring pulses, so that can employing variable attenuator 2 accurately and timely pulse energy be adjusted to required energy level.The femtosecond laser beam of adjusting energy focuses on by microcobjective 5 (NA=0.4) is tight, the femtosecond laser beam that focuses on impinges perpendicularly on the xy face of LN crystal 6, focus on the size of femtosecond hot spot and the location in LN by ccd detector 8 monitorings, focusing on the femtosecond laser beam focus is positioned under the LN crystal 6 surface about 500 μ m, the LN crystal 6 is fixed on the accurate three-dimensional mobile platform 7, the translational speed of three-dimensional mobile platform 7 is 50 μ m/s, moves along the x direction, writes out at once along the buried light waveguide of x direction.The cross section y of making waveguide, the size of z direction are respectively 3 μ m and 20 μ m, and making waveguide is about 1dB/cm in the loss of 632.8nm, and laser spot active region change of refractive is about 6 * 10
-4Wait to inscribe the path movement of sample along the Y type in order to produce Y type beam splitter, to make, the angle of Y type beam splitter two arms is 0.5 °, and the distance of two arms between exit end is 60 μ m, and the beam splitter splitting ratio of inscription is 1.1: 1.
Employing centre wavelength is that 800nm, pulse width are that 100fs, repetition frequency are that the femtosecond laser of 1kHz is as inscribing laser beam, it is tightly focused on z cut in periodically poled lithium niobate (PPLN) crystal and inscribe out buried light waveguide, the waveguide of making can be used for producing SHG.
Femto-second laser 1 produces centre wavelength 800nm, pulse width is that 100fs, repetition frequency are the femtosecond laser of 1kHz, pulse energy generally can reach the mJ magnitude, about adopting variable attenuator 2 with femtosecond pulse energy attenuation to 1 μ J, with beam splitter 3 with the femtosecond laser beam beam splitting, by the energy size of power meter 4 monitoring pulses, so that can employing variable attenuator 2 accurately and timely pulse energy be adjusted to required energy level.The femtosecond laser beam of adjusting energy focuses on by microcobjective 5 (NA=0.4) is tight, the femtosecond laser beam that focuses on impinges perpendicularly on the xy face of PPLN crystal 6, focus on the size of femtosecond hot spot and the location in PPLN by ccd detector 8 monitorings, focusing on the femtosecond laser beam focus is positioned under the PPLN crystal 6 surface about 100 μ m, the PPLN crystal 6 is fixed on the accurate three-dimensional mobile platform 7, the translational speed of three-dimensional mobile platform 7 is 10 μ m/s, move along directions X, inscribe out along the buried light waveguide of x direction.Adopting multiple scaaning to inscribe (repeats to inscribe for 10 times, every time at y direction displacement 0.5 μ m) increase to inscribe the width of waveguide, acquisition is the buried light waveguide of single mode transport at 1550nm, and its waveguide cross-sectional dimensions is 11.7 μ m and 8.7 μ m, and the loss of waveguide is 2.2dB/cm.The waveguide of making is used for the frequency multiplication of 1550nm laser, and the SHG efficient of acquisition is 6 * 10
-3%/W.
Employing centre wavelength is that 800nm, pulse width are that 130fs, repetition frequency are that the femtosecond laser of 5kHz is as inscribing laser beam, it is tightly focused on z cut in period polarized KTP (PPKTP) crystal and inscribe out buried light waveguide, the waveguide of making can be used for producing SHG.
Femto-second laser 1 produces centre wavelength 800nm, pulse width is that 130fs, repetition frequency are the femtosecond laser of 5kHz, pulse energy 200 μ J, about adopting variable attenuator 2 with femtosecond pulse energy attenuation to 2 μ J, with beam splitter 3 with the femtosecond laser beam beam splitting, by the energy size of power meter 4 monitoring pulses, so that can employing variable attenuator 2 accurately and timely pulse energy be adjusted to required energy level.The femtosecond laser beam of adjusting energy focuses on by microcobjective 5 (NA=0.42) is tight, the femtosecond laser beam that focuses on impinges perpendicularly on the xy face of PPKTP crystal 6, focus on the size of femtosecond hot spot and the location in PPKTP by ccd detector 8 monitorings, focusing on the femtosecond laser beam focus is positioned under the PPKTP crystal 6 surface about 200 μ m, the PPKTP crystal 6 is fixed on the accurate three-dimensional mobile platform 7, the translational speed of three-dimensional mobile platform 7 is 50 μ m/s, moves the buried light waveguide of inscribing out along the x direction along the x direction.Adopting multiple scaaning to inscribe (repeats to inscribe for 10 times, every time at y direction displacement 0.8 μ m) increase to inscribe the width of waveguide, acquisition is the buried light waveguide of single mode transport at 1550nm, and its waveguide cross section x, y direction size are respectively 8.1 μ m and 9.3 μ m, and the loss of waveguide is 1dB/cm.The waveguide of making is used for the frequency multiplication of 980nm laser, and the SHG efficient of acquisition is 0.22%/W (0.002%).
Embodiment 6, be used to produce the making of the optical waveguide of second harmonic (SHG)
Employing centre wavelength is that 800nm, pulse width are that 50fs, repetition frequency are that the femtosecond laser of 1kHz is as inscribing laser beam, it is tightly focused on z cut in period polarized KTP (PPLN) crystal and inscribe out the twin wire buried light waveguide, the waveguide of making can be used for producing SHG.
Femto-second laser 1 produces centre wavelength 800nm, pulse width is the femtosecond laser of 50fs, pulse energy generally can reach the mJ magnitude, about adopting variable attenuator 2 with femtosecond pulse energy attenuation to 10 μ J, with beam splitter 3 with the femtosecond laser beam beam splitting, by the energy size of power meter 4 monitoring pulses, so that can employing variable attenuator 2 accurately and timely pulse energy be adjusted to required energy level.The femtosecond laser beam of adjusting energy focuses on by microcobjective 5 (NA=0.4) is tight, the femtosecond laser beam that focuses on impinges perpendicularly on the xy face of PPLN crystal 6, focus on the size of femtosecond hot spot and the location in PPLN by ccd detector 8 monitorings, focusing on the femtosecond laser beam focus is positioned under the PPLN crystal 6 surface about 200 μ m, the PPLN crystal 6 is fixed on the accurate three-dimensional mobile platform 7, the translational speed of three-dimensional mobile platform 7 is 400 μ m/s, moves the buried light waveguide of inscribing out along the x direction along the x direction.Conversion efficiency when being used to produce second harmonic for the waveguide that improves inscription has been inscribed the twin wire waveguide, and the distance of inscribing between the position for the twice 10 μ m of being separated by obtain the buried light waveguide of 1550nm wave band single mode transport at last.The leaded light zone of twin wire waveguide is positioned at the centre in two indentation territories, and its period polarized structure is not destroyed, and nonlinear factor remains unchanged, and helps improving the conversion efficiency of SHG.The waveguide of making is used for the frequency multiplication of 1550nm wave band locked mode psec fiber laser (repetition frequency 6GHz, pulse width 60 psecs), obtained 34.8% conversion efficiency, and the conversion efficiency in body shape crystal is 24.8% under the same terms.
Embodiment 7, be used to produce the making of the optical waveguide of second harmonic (SHG)
Employing centre wavelength is that 800nm, pulse width are that 100fs, repetition frequency are that the femtosecond laser of 1kHz is as inscribing laser beam, it is tightly focused on z cut in period polarized KTP (PPKTP) crystal and inscribe out the twin wire buried light waveguide, the waveguide of making can be used for producing SHG.
Femto-second laser 1 produces centre wavelength 800nm, pulse width is the femtosecond laser of 100fs, pulse energy generally can reach the mJ magnitude, about adopting variable attenuator 2 with femtosecond pulse energy attenuation to 100 μ J, with beam splitter 3 with the femtosecond laser beam beam splitting, by the energy size of power meter 4 monitoring pulses, so that can employing variable attenuator 2 accurately and timely pulse energy be adjusted to required energy level.The femtosecond laser beam of adjusting energy focuses on by microcobjective 5 (NA=0.4) is tight, the femtosecond laser beam that focuses on impinges perpendicularly on the xy face of PPKTP crystal 6, focus on the size of femtosecond hot spot and the location in PPKTP by ccd detector 8 monitorings, focusing on the femtosecond laser beam focus is positioned under the PPKTP crystal 6 surface about 300 μ m, the PPLN crystal 6 is fixed on the accurate three-dimensional mobile platform 7, the translational speed of three-dimensional mobile platform 7 is 100 μ m/s, moves the buried light waveguide of inscribing out along the x direction along the x direction.Conversion efficiency when being used to produce second harmonic for the waveguide that improves inscription has been inscribed the twin wire waveguide, and the distance of inscribing between the position for the twice 14 μ m of being separated by obtain the buried light waveguide of 1064nm wave band single mode transport at last.The leaded light zone of twin wire waveguide is positioned at the centre in two indentation territories, and its period polarized structure is not destroyed, and nonlinear factor remains unchanged, and helps improving the conversion efficiency of SHG.The waveguide of making is used for the frequency multiplication that 1064nm transfers Q Nd:YAG laser (pulse width 5ns, repetition frequency 10Hz), and the SHG efficient of acquisition is 39.6%.
Claims (7)
1, a kind of device that utilizes femtosecond laser to make optical waveguide in transparent solid material is characterized in that this device comprises successively:
Femto-second laser system: be used to provide the femto-second laser pulse of inscribing optical waveguide;
Variable attenuator: inscribe needs according to optical waveguide, be used for the femto-second laser pulse energy of femto-second laser output is decayed;
Beam splitter: be used for the femto-second laser pulse after the variable attenuator decay is carried out beam splitting so that pulsed energy is monitored in real time;
Power meter: femtosecond laser beam by the beam splitter beam splitting after wherein a branch of power meter that is coupled into, be used to monitor the energy of inscribing femto-second laser pulse;
High-NA microcobjective: be arranged on the main optical path of beam splitter back femto-second laser pulse, be used for femto-second laser pulse is tightly focused on;
Three-dimensional mobile platform: be used to place the transparent solid material sample of waiting to inscribe optical waveguide, and accurately control its two dimension or three-dimensional moving by computing machine.
Ccd detector: be used to monitor the spot size that focuses on femtosecond laser beam and in the location of waiting to inscribe in the sample.
2, a kind of method of using the described device of claim 1 to make optical waveguide in transparent solid material is characterized in that this method comprises:
The first, will wait that the transparent solid material of inscribing optical waveguide is fixed on the three-dimensional mobile platform, three-dimensional mobile platform is by computer controlled automatic;
The second, produce femto-second laser pulse by the femto-second laser system, and high-octane femto-second laser pulse is decayed through variable attenuator;
Three, with beam splitter with the femto-second laser pulse beam splitting, by the energy size of power meter monitoring pulse, so that cooperates energy to be adjusted to the required energy level of inscription optical waveguide with femto-second laser pulse with described variable attenuator of second step;
Four, the femto-second laser pulse that will adjust energy is tightly focused on by the high-NA microcobjective of NA=0.3～0.65, the femto-second laser pulse that focuses on vertically waits to inscribe the xy face incident of the transparent solid material of optical waveguide, and the focus of femto-second laser pulse is positioned under the transparent solid material xy surface;
Five, described femtosecond laser is incided transparent material when inner in the 4th step, adopt ccd detector to monitor the femtosecond laser focus in the location of waiting to inscribe in the waveguide transparent solid material sample;
Six,, the described three-dimensional mobile platform of the first step is moved to produce two dimension or three-dimensional optical waveguide in the xy face or at xyz three dimensions along set path according to the requirement of waiting to inscribe optical waveguide;
Seven, in described optical waveguide inscription process of the 6th step, adopt many times scanning to inscribe or inscribe the twin wire waveguide and optimize the shape and size of inscribing waveguide.
3, method according to claim 2, the transparent solid material that it is characterized in that indication of the present invention be glass, melt quartz, or nonlinear crystal lithium niobate, KTP, or periodically poled lithium niobate and KTP, or the inorganic salts crystal.
4, method according to claim 2 is characterized in that the centre wavelength of the femto-second laser pulse of second step described femto-second laser system generation is that 775～810nm, pulse width are that 50～150fs, repetition frequency are 1～5kHz.
5, method according to claim 2 is characterized in that the described energy that is used to inscribe the femto-second laser pulse of optical waveguide after variable attenuator decay of second step is 0.1～100 μ J.
6, method according to claim 2 is characterized in that the focus of the 4th step, described focusing femto-second laser pulse of the 5th step is positioned at 100～700 μ m under the transparent solid material surface.
7, method according to claim 2 is characterized in that the translational speed of described three-dimensional mobile platform of the 6th step is 1～500 μ m/s.
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