CN100487375C - Diamagnetic suspension rotor electrostatic driving micro-gyroscope - Google Patents

Abstract

A reverse magnetic suspension rotor electrostatic driving micro gyro belongs to micro-electromechanical technology field. The invention is composed of an upper stator, a rotor and a lower stator. It takes upper and lower stators rotating capacity polar plates to drive variable-capacitance electrostatic rotating. Charging magnetism to four sectors of public capacity polar plate construction composed of upper and lower stators which are made of permanent-magnet materials and capacity polar plates of upper and lower stators to detect z axle linear acceleration and wind x, y axles angular acceleration. Utilize diamagnetic materials to make rotor chip. Provide a reverse magnetic suspension rotor electrostatic driving micro gyro adopting combination of permanent-magnet and diamagnetic materials to realize self-stabilization suspension, which leaves out static suspension controlling units providing suspension electrostatic coils or capacity polar plates etc. It can detects x, y, z axles linear acceleration and x, y axles angular acceleration simultaneously, which can realize precision positioning of objects, detect linear and angular acceleration or navigate.

Description

Diamagnetic suspension rotor electrostatic driving micro-gyroscope

Technical field

What the present invention relates to is a kind of minisize gyroscopes of field of micro electromechanical technology, specifically is a kind of diamagnetic suspension rotor electrostatic driving micro-gyroscope.

Background technology

Along with the development of MEMS technology, the inertia sensing device becomes the most successful in the past few years, one of most widely used mems device.Mainly be subjected to the driving of auto industry, little processing oscillatory type mechanical gyroscope has obtained extensive studies in the past few years, and performance significantly improves.Meanwhile, be the outstanding symmetrical structure that overcomes the vibrating micromechanical gyro instrument and mode coupling susceptibility to manufacturing defect, temperature variation etc., both can carry out the vibrating micro-gyroscope structural design improves, attempt little gyro of development new structure method on the other hand again, therefore suspension rotor micro gyro has obtained the attention of U.S., day, Ying Dengguo, set about research in early 1990s, and obtained certain achievement in research.

Find through literature search prior art, B.Damrongsak, M.Kraft is at " The 4th IEEE Conf.on sensors " (Nov.2005, the 401-404 page or leaf) delivers " A Micromachined ElectrostaticallySuspended.Gyroscope with Digital Force Feedback " on, propose a kind of little gyro of electrostatic suspension dish type silicon rotor in this article.Its weak point is: need provide the control electrode of suspension electrostatic force electrode and stable X, Y direction position, the technology relative complex.

Summary of the invention

The objective of the invention is provides a kind of diamagnetic suspension rotor electrostatic driving micro-gyroscope at above-mentioned deficiency of the prior art.Compare the conventional electrostatic suspension and saved electrostatic suspension control modules such as suspension electrostatic force coil or capacitor plate are provided, and change into and adopt permanent magnetic material and diamagnetic material to combine, realize diamagnetic suspension rotor electrostatic driving micro-gyroscope from steady suspension, make it adopt the suspension type diamagnetic sensitive mass piece, rely on upper and lower stator antimagnetic rotor to be provided the suspending power and the lateral stability power of balancing gravity, the realization self-stabilization suspends, technology is simpler, and can detect simultaneously and comprise along three axis accelerometers of X, Y, Z axle and around X, Y-axis two shaft angle acceleration.

The present invention is achieved through the following technical solutions.What gyro integral body of the present invention adopted is three-decker, is made of last stator, rotor and following stator three parts.Last stator and following stator are realized electric and mechanical connection by the electrically conducting groove of last stator with the bonding of the wiring copper post of following stator, rotor is suspended in the cavity, adopt disc-like shape, the upper and lower surface of diamagnetic material layer covers the Ti layer respectively in the middle of rotor simultaneously, makes the three form sandwich construction.

Last stator is similar with following stator structure, and the substrate of employing is ferrite, and shape all is square.

Last stator primary structure has: go up that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, rotate capacitor plate and go up stator public capacitance electrode plate structure, the three is positioned at same plane and promptly goes up on the stator lead layer, the plane geometry central distribution be to go up stator public capacitance electrode plate structure, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, first, be uniform-distribution with the rotation capacitor plate on second concentric circumferences respectively successively and go up that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis.Except that primary structure, last stator also comprises: electrically conducting groove, last stator detect the spacing copper post of capacitor plate, arc of X-direction and Y direction linear acceleration, last stator Chiral Materials of Ferrite Substrate, last stator insulation Al ₂O ₃Layer, and go up the stator lead layer.Each main positions relation of forming between the structure is: the electrically conducting groove, last stator detects the capacitor plate and the spacing copper post of arc of X-direction and Y direction linear acceleration, be positioned at that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, the rotation capacitor plate, promptly go up on the stator lead layer on same plane, last stator public capacitance electrode plate structure place, the plane geometry central distribution be to go up stator public capacitance electrode plate structure, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, first, be uniform-distribution with the rotation capacitor plate on second concentric circumferences respectively successively and go up that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, the 3rd, be uniform-distribution with capacitor plate and the spacing copper post of arc that stator detects X-direction and Y direction linear acceleration respectively successively on the 4th concentric circumferences; At the spacing copper post of arc outward, on the four edges parallel direction separately of last stator, the electrically conducting groove is linearly arranged.

Following stator primary structure has following stator to detect the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, rotation capacitor plate and following stator public capacitance electrode plate structure, the three is positioned at same plane and promptly descends on the stator lead layer, stator public capacitance electrode plate structure under being of plane geometry central distribution, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, first, be uniform-distribution with successively respectively on second concentric circumferences the rotation capacitor plate and down stator detect the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis.Except that primary structure, following stator also comprises: lead-in wire electrode, wiring copper post, the spacing copper post of arc, following stator detect the capacitor plate of X-direction and Y direction linear acceleration, following stator Chiral Materials of Ferrite Substrate, following stator insulation Al ₂O ₃Layer, and following stator lead layer.Each main positions relation of forming between the structure is: the lead-in wire electrode, wiring copper post, spacing copper post of arc and following stator detect the capacitor plate of X-direction and Y direction linear acceleration, be positioned at down that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, the rotation capacitor plate, same plane, following stator public capacitance electrode plate structure place is promptly descended on the stator lead layer, stator public capacitance electrode plate structure under being of plane geometry central distribution, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, first, be uniform-distribution with successively respectively on second concentric circumferences the rotation capacitor plate and down stator detect the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, the 3rd, be uniform-distribution with down capacitor plate and the spacing copper post of arc that stator detects X-direction and Y direction linear acceleration respectively successively on the 4th concentric circumferences; At the spacing copper post of arc outward, on the four edges parallel direction separately of following stator, wiring copper post is linearly arranged; At wiring copper post outward, on the four edges parallel direction separately of following stator, the lead-in wire electrode is linearly arranged.

In said structure, last stator public capacitance electrode plate structure and play stator public capacitance electrode plate structure include a center and four fan sections, and four fan sections of upper and lower stator public capacitance electrode plate structure and upper and lower stator detect the Z-direction linear acceleration and be permanent magnetic material around the capacitor plate employing of the angular acceleration of X, Y-axis.Rotor then adopts diamagnetic material to make its substrate, i.e. diamagnetic material layer in the middle of the rotor.

Diamagnetic suspension rotor electrostatic driving micro-gyroscope of the present invention, by the electrically conducting groove of last stator and the PbSn weldering realization bonding of the wiring copper post of following stator, by four fan sections of upper and lower stator public capacitance electrode plate structure and upper and lower stator being detected the Z-direction linear acceleration and magnetizing, make corresponding capacitor plate form the N-S opposite relation of pole polarity one to one simultaneously around the capacitor plate of the angular acceleration of X, Y-axis.Attractive force between them makes that the bonding of going up stator and following stator is tightr.

Rotor of the present invention suspends: the interaction force between rotor and the upper and lower stator is that coercive force provides Z to suspending power for the anti-magnetic stator that suspends, simultaneously also for rotor provides lateral stability power along X, Y direction, and then rotor has been realized the self-stabilization suspension between last stator and following stator.

Rotor rotation principle of the present invention: adopt power transformation to hold the electrostatic rotary drive principle, usually adopt the three-phase dc voltage to drive, the rotation capacitor plate of last stator is divided into three groups, correspondingly play the rotation capacitor plate of stator also to be divided into three groups, apply DC voltage V1 respectively by three groups of rotations of stator capacitor plate on the lead-in wire electrode pair, V2, V3, to applying DC voltage-V1 with three groups of rotations of following stator capacitor plate of the corresponding group of last stator three groups of rotations capacitor plate,-V2,-V3, DC voltage V1, phase differential between V2 and the V3 is 120 degree, therefore when rotor during in the equilibrium position, because the stator drive electrode of last stator and play stator homophase is along the circumference symmetrical distribution and always apply the driving DC voltage of equivalent contrary sign, the clean axial driving force and the clean radial drive power that then act on rotor all are zero, but tangential driving force produces the driving torque to rotor, drives rotor with certain rotating speed rotation.

Input of the present invention: adopt differential capacitance structure, capacitor plate is divided into some groups by required measuring ability, diamagnetic suspension rotor electrostatic driving micro-gyroscope is when work, each group differential capacitance is applied the high-frequency carrier signal of different frequency or many class frequencys, and adopt the public capacitance coupling to export subsequent detection and control circuit to, so just obtain the voltage signal of each linear acceleration and angular acceleration correspondence, by processing to voltage signal, finally obtain acceleration signal, determine that accelerometer is subjected to acceleration, and apply FEEDBACK CONTROL and make rotor remain at the equilibrium position that suspends from steady.

The invention solves the deficiencies in the prior art, adopt the suspension type diamagnetic sensitive mass piece, rely on upper and lower stator antimagnetic rotor to be provided the suspending power and the lateral stability power of balancing gravity, the realization self-stabilization suspends, compare the conventional electrostatic suspension and saved electrostatic suspension control modules such as suspension electrostatic force coil or capacitor plate are provided, technology is simpler.

Description of drawings

Fig. 1 is a general structure synoptic diagram of the present invention

Fig. 2 is stator structure synoptic diagram in the present invention

Fig. 3 is stator structure synoptic diagram under the present invention

Fig. 4 is a rotor structure synoptic diagram of the present invention

Embodiment

Below in conjunction with accompanying drawing one embodiment of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention; provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.

As Fig. 1, what the present invention adopted is three-decker, and by last stator 1, rotor 3 and following stator 2 constitute.Last stator 1 and following stator 2 are realized electric and mechanical connection by bonding, and form cavity, and 3 of rotors are placed in this cavity.

As Fig. 2, last stator 1 comprises: upper right number one electrically conducting groove 4, upper right No. second electrically conducting groove 5, upper right No. three electrically conducting groove 6, upper right No. four electrically conducting groove 7, bottom right number one electrically conducting groove 8, No. second electrically conducting groove 9 in bottom right, No. three electrically conducting groove 10 in bottom right, No. four electrically conducting groove 11 in bottom right, No. five electrically conducting groove 12 in bottom right, No. six electrically conducting groove 13 in bottom right, lower-left number one electrically conducting groove 14, No. second electrically conducting groove 15 in lower-left, No. three electrically conducting groove 16 in lower-left, No. four electrically conducting groove 17 in lower-left, upper left number one electrically conducting groove 18, upper left No. second electrically conducting groove 19, upper left No. three electrically conducting groove 20, upper left No. four electrically conducting groove 21, upper left No. five electrically conducting groove 22, upper left No. six electrically conducting groove 23, the spacing copper post 24 of the upper right arc of last stator, the spacing copper post 25 of last stator bottom right arc, the spacing copper post 26 of last stator lower-left arc, the spacing copper post 27 of the upper left arc lower of last stator, last stator detects the upper right number one capacitor plate 28 of Y direction linear acceleration, last stator detects upper right No. second capacitor plate 29 of Y direction linear acceleration, last stator detects the bottom right number one capacitor plate 30 of X-direction linear acceleration, last stator detects No. second capacitor plate 31 in bottom right of X-direction linear acceleration, last stator detects the lower-left number one capacitor plate 32 of Y direction linear acceleration, last stator detects No. second capacitor plate 33 in lower-left of Y direction linear acceleration, last stator detects the upper left number one capacitor plate 34 of X-direction linear acceleration, last stator detects upper left No. second capacitor plate 35 of X-direction linear acceleration, last stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, the upper right number one rotation of last stator capacitor plate 44, the upper right No. second rotation capacitor plate 45 of last stator, the upper right No. three rotation capacitor plate 46 of last stator, last stator bottom right number one rotation capacitor plate 47, No. second rotation in last stator bottom right capacitor plate 48, No. three rotation in last stator bottom right capacitor plate 49, last stator lower-left number one rotation capacitor plate 50, No. second rotation in last stator lower-left capacitor plate 51, No. three rotation in last stator lower-left capacitor plate 52, the upper left number one rotation of last stator capacitor plate 53, the upper left No. second rotation capacitor plate 54 of last stator, the upper left No. three rotation capacitor plate 55 of last stator, the upper right S of last stator public capacitance pole plate district 56, N district, last stator public capacitance pole plate bottom right 57, S district, last stator public capacitance pole plate lower-left 58, the upper left N of last stator public capacitance pole plate district 59, last stator public capacitance pole plate center 60, last stator lead layer 61, last stator insulation Al ₂O ₃Layer 62, last stator Chiral Materials of Ferrite Substrate 63.Its annexation is: go up stator lead layer 61 and be arranged on stator insulation Al ₂O ₃On the layer 62, last stator insulation Al ₂ O ₃62 on layer is arranged on the stator Chiral Materials of Ferrite Substrate 63; Last stator public capacitance pole plate center 60 is arranged on last stator lead layer 61 and is positioned at the geometric center of stator lead layer 61, last stator public capacitance pole plate center 60 outer periphery be equipped with the upper right S of stator public capacitance pole plate district 56, on N district, stator public capacitance pole plate bottom right 57, on S district, stator public capacitance pole plate lower-left 58, on the upper left N of stator public capacitance pole plate district 59, they are evenly to arrange on the circumference in the center of circle at the center of above stator public capacitance pole plate center 60, and are connected with last stator public capacitance pole plate center 60; The upper right S of last stator public capacitance pole plate district 56, N district, last stator public capacitance pole plate bottom right 57, S district, last stator public capacitance pole plate lower-left 58 and 59 peripheries, last stator public capacitance pole plate upper left N district, the center of above stator public capacitance pole plate center 60 is on the circumference in the center of circle, by being uniform-distribution with the upper right number one rotation of stator capacitor plate 44 clockwise successively, the upper right No. second rotation capacitor plate 45 of last stator, the upper right No. three rotation capacitor plate 46 of last stator, last stator bottom right number one rotation capacitor plate 47, No. second rotation in last stator bottom right capacitor plate 48, No. three rotation in last stator bottom right capacitor plate 49, last stator lower-left number one rotation capacitor plate 50, No. second rotation in last stator lower-left capacitor plate 51, No. three rotation in last stator lower-left capacitor plate 52, the upper left number one rotation of last stator capacitor plate 53, the upper left No. second rotation capacitor plate 54 of last stator, the upper left No. three rotation capacitor plate 55 of last stator, they constitute the capacitor plate structure on first concentric circles that the center that is positioned at above stator public capacitance pole plate center 60 is the center of circle, be referred to as the capacitor plate structure on stator first concentric circles, wherein, the upper right number one rotation of last stator capacitor plate 44, last stator bottom right number one rotation capacitor plate 47, last stator lower-left number one rotation capacitor plate 50 and the upper left number one rotation of last stator capacitor plate 53 are classified as one group, be referred to as first group of rotation of stator capacitor plate, the upper right No. second rotation capacitor plate 45 of last stator, No. second rotation in last stator bottom right capacitor plate 48, the upper left No. second rotation capacitor plate 54 of last stator lower-left No. second rotation capacitor plate 51 and last stator is classified as one group, be referred to as second group of rotation of stator capacitor plate, the upper right No. three rotation capacitor plate 46 of last stator, No. three rotation in last stator bottom right capacitor plate 49, the upper left No. three rotation capacitor plate 55 of last stator lower-left No. three rotation capacitor plate 52 and last stator is classified as one group, is referred to as the 3rd group of rotation of stator capacitor plate; Be positioned at the periphery of the capacitor plate structure on stator first concentric circles, the center of above stator public capacitance pole plate center 60 is on the circumference in the center of circle, by being uniform-distribution with clockwise stator detection Z-direction linear acceleration successively and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, they constitute the capacitor plate structure on second concentric circles that the center that is positioned at above stator public capacitance pole plate center 60 is the center of circle, are referred to as the capacitor plate structure on stator second concentric circles; Be positioned at the periphery of the capacitor plate structure on stator second concentric circles, the center of above stator public capacitance pole plate center 60 is on the circumference in the center of circle, by being uniform-distribution with the upper right number one capacitor plate 28 that stator detects the Y direction linear acceleration clockwise successively, last stator detects upper right No. second capacitor plate 29 of Y direction linear acceleration, last stator detects the bottom right number one capacitor plate 30 of X-direction linear acceleration, last stator detects No. second capacitor plate 31 in bottom right of X-direction linear acceleration, last stator detects the lower-left number one capacitor plate 32 of Y direction linear acceleration, last stator detects No. second capacitor plate 33 in lower-left of Y direction linear acceleration, last stator detects the upper left number one capacitor plate 34 of X-direction linear acceleration, last stator detects upper left No. second capacitor plate 35 of X-direction linear acceleration, they constitute the capacitor plate structure on the 3rd concentric circles that the center that is positioned at above stator public capacitance pole plate center 60 is the center of circle, are referred to as the capacitor plate structure on stator the 3rd concentric circles; Be positioned at the periphery of the capacitor plate structure on stator the 3rd concentric circles, the center of above stator public capacitance pole plate center 60 is on the circumference in the center of circle, by being uniform-distribution with the spacing copper post 24 of the upper right arc of stator clockwise successively, the spacing copper post 25 of last stator bottom right arc, the spacing copper post 26 of last stator lower-left arc, the spacing copper post 27 of the upper left arc lower of last stator, they constitute the spacing Copper column structure on the 4th concentric circles that the center that is positioned at above stator public capacitance pole plate center 60 is the center of circle, be referred to as the spacing Copper column structure on stator the 4th concentric circles, and spacing copper post 24 of the upper right arc of last stator and the spacing copper post 26 of last stator lower-left arc be on to the angular direction, and spacing copper post 25 of last stator bottom right arc and the spacing copper post 27 of the upper left arc lower of last stator are on to the angular direction; Be positioned at the periphery of the spacing Copper column structure on stator the 4th concentric circles, upper right number one electrically conducting groove 4, upper right No. second electrically conducting groove 5, upper right No. three electrically conducting groove 6, upper right No. four electrically conducting groove 7 is positioned at the upper right corner and linearly arranges, bottom right number one electrically conducting groove 8, No. second electrically conducting groove 9 in bottom right, No. three electrically conducting groove 10 in bottom right, No. four electrically conducting groove 11 in bottom right, No. five electrically conducting groove 12 in bottom right, No. six electrically conducting groove 13 in bottom right is positioned at the lower right corner and linearly arranges, lower-left number one electrically conducting groove 14, No. second electrically conducting groove 15 in lower-left, No. three electrically conducting groove 16 in lower-left, No. four electrically conducting groove 17 in lower-left is positioned at the lower left corner and linearly arranges, upper left number one electrically conducting groove 18, upper left No. second electrically conducting groove 19, upper left No. three electrically conducting groove 20, upper left No. four electrically conducting groove 21, upper left No. five electrically conducting groove 22, upper left No. six electrically conducting groove 23 is positioned at the upper left corner and linearly arranges.The upper right S of last stator public capacitance pole plate district 56, N district, last stator public capacitance pole plate bottom right 57, S district, last stator public capacitance pole plate lower-left 58, the upper left N of last stator public capacitance pole plate district 59, last stator public capacitance pole plate center 60, capacitor plate structure on last stator first concentric circles, capacitor plate structure on last stator second concentric circles is identical with capacitor plate structure height on last stator the 3rd concentric circles, and a little less than the spacing Copper column structure on last stator the 4th concentric circles, the height of all electrically conducting grooves also is lower than the spacing Copper column structure that is positioned on stator the 4th concentric circles.

As Fig. 3, following stator 2 comprises: the upper right number one lead-in wire of following stator electrode 64, the upper right No. second lead-in wire electrode 65 of following stator, the upper right No. three lead-in wire electrode 66 of following stator, the upper right No. four lead-in wire electrode 67 of following stator, the upper right No. five lead-in wire electrode 68 of following stator, the upper right No. six lead-in wire electrode 69 of following stator, the upper right No. seven lead-in wire electrode 70 of following stator, the upper right No. eight lead-in wire electrode 71 of following stator, the upper right No. nine lead-in wire electrode 72 of following stator, the upper right No. ten lead-in wire of following stator electrode 73, following stator bottom right number one lead-in wire electrode 74, following stator bottom right No. second lead-in wire electrode 75, following stator bottom right No. three lead-in wire electrode 76, following stator bottom right No. four lead-in wire electrode 77, following stator bottom right No. five lead-in wire electrode 78, following stator bottom right No. six lead-in wire electrode 79, following stator bottom right No. seven lead-in wire electrode 80, following stator bottom right No. eight lead-in wire electrode 81, following stator bottom right No. nine lead-in wire electrode 82, following stator bottom right No. ten lead-in wire electrode 83, following stator lower-left number one lead-in wire electrode 84, following stator lower-left No. second lead-in wire electrode 85, following stator lower-left No. three lead-in wire electrode 86, following stator lower-left No. four lead-in wire electrode 87, following stator lower-left No. five lead-in wire electrode 88, following stator lower-left No. six lead-in wire electrode 89, following stator lower-left No. seven lead-in wire electrode 90, following stator lower-left No. eight lead-in wire electrode 91, following stator lower-left No. nine lead-in wire electrode 92, following stator lower-left No. ten lead-in wire electrode 93, the upper left number one lead-in wire of following stator electrode 94, the upper left No. second lead-in wire electrode 95 of following stator, the upper left No. three lead-in wire electrode 96 of following stator, the upper left No. four lead-in wire electrode 97 of following stator, the upper left No. five lead-in wire electrode 98 of following stator, the upper left No. six lead-in wire electrode 99 of following stator, the upper left No. seven lead-in wire electrode 100 of following stator, the upper left No. eight lead-in wire electrode 101 of following stator, the upper left No. nine lead-in wire electrode 102 of following stator, the upper left No. ten lead-in wire of following stator electrode 103, upper right number one wiring copper post 104, upper right No. second wiring copper post 105, upper right No. three wiring copper post 106, upper right No. four wiring copper post 107, bottom right number one wiring copper post 108, bottom right No. second wiring copper post 109, No. three wiring copper post 110 in bottom right, No. four wiring copper post 111 in bottom right, No. five wiring copper post 112 in bottom right, No. six wiring copper post 113 in bottom right, lower-left number one wiring copper post 114, lower-left No. second wiring copper post 115, No. three wiring copper post 116 in lower-left, No. four wiring copper post 117 in lower-left, upper left number one wiring copper post 118, upper left No. second wiring copper post 119, upper left No. three wiring copper post 120, upper left No. four wiring copper post 121, upper left No. five wiring copper post 122, upper left No. six wiring copper post 123, the spacing copper post 124 of the upper right arc of following stator, the spacing copper post 125 of following stator bottom right arc, the spacing copper post 126 of following stator lower-left arc, the spacing copper post 127 of the upper left arc of following stator, following stator detects the upper right number one capacitor plate 128 of Y direction linear acceleration, following stator detects upper right No. second capacitor plate 129 of Y direction linear acceleration, following stator detects the bottom right number one capacitor plate 130 of X-direction linear acceleration, following stator detects No. second capacitor plate 131 in bottom right of X-direction linear acceleration, following stator detects the lower-left number one capacitor plate 132 of Y direction linear acceleration, following stator detects No. second capacitor plate 133 in lower-left of Y direction linear acceleration, following stator detects the upper left number one capacitor plate 134 of X-direction linear acceleration, following stator detects upper left No. second capacitor plate 135 of X-direction linear acceleration, following stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, the upper right number one rotation of following stator capacitor plate 144, the upper right No. second rotation capacitor plate 145 of following stator, the upper right No. three rotation capacitor plate 146 of following stator, following stator bottom right number one rotation capacitor plate 147, No. second rotation in following stator bottom right capacitor plate 148, No. three rotation in following stator bottom right capacitor plate 149, following stator lower-left number one rotation capacitor plate 150, No. second rotation in following stator lower-left capacitor plate 151, No. three rotation in following stator lower-left capacitor plate 152, the upper left number one rotation of following stator capacitor plate 153, the upper left No. second rotation capacitor plate 154 of following stator, the upper left No. three rotation capacitor plate 155 of following stator, the upper right N of following stator public capacitance pole plate district 156, S district, following stator public capacitance pole plate bottom right 157, N district, following stator public capacitance pole plate lower-left 158, the upper left S of following stator public capacitance pole plate district 159, following stator public capacitance pole plate center 160, following stator lead layer 161, following stator insulation Al ₂O ₃Layer 162, following stator Chiral Materials of Ferrite Substrate 163.Its annexation is: following stator lead layer 161 is arranged on down stator insulation Al ₂O ₃On the layer 162, following stator insulation Al ₂O ₃162 on layer is arranged on down on the stator Chiral Materials of Ferrite Substrate 163; Following stator public capacitance pole plate center 160 is arranged on down on the stator lead layer 161 and is positioned at the geometric center of stator lead layer 161 down, the upper right N of stator public capacitance pole plate district 156 under stator public capacitance pole plate center 160 outer periphery are equipped with down, S district, following stator public capacitance pole plate bottom right 157, N district, following stator public capacitance pole plate lower-left 158, the upper left S of following stator public capacitance pole plate district 159, they are evenly to arrange on the circumference in the center of circle at the center of following stator public capacitance pole plate center 160, and are connected with following stator public capacitance pole plate center 160; In the following upper right N of stator public capacitance pole plate district 156, S district, following stator public capacitance pole plate bottom right 157, N district, following stator public capacitance pole plate lower-left 158,159 peripheries, following stator public capacitance pole plate upper left S district, the center of following stator public capacitance pole plate center 160 is on the circumference in the center of circle, by being uniform-distribution with down the upper right number one rotation of stator capacitor plate 144 clockwise successively, the upper right No. second rotation capacitor plate 145 of following stator, the upper right No. three rotation capacitor plate 146 of following stator, following stator bottom right number one rotation capacitor plate 147, No. second rotation in following stator bottom right capacitor plate 148, No. three rotation in following stator bottom right capacitor plate 149, following stator lower-left number one rotation capacitor plate 150, No. second rotation in following stator lower-left capacitor plate 151, No. three rotation in following stator lower-left capacitor plate 152, the upper left number one rotation of following stator capacitor plate 153, the upper left No. second rotation capacitor plate 154 of following stator, the upper left No. three rotation capacitor plate 155 of following stator, they constitute the capacitor plate structure on first concentric circles that the center that is positioned at following stator public capacitance pole plate center 160 is the center of circle, be referred to as down the capacitor plate structure on stator first concentric circles, wherein, the upper right number one rotation of following stator capacitor plate 144, following stator bottom right number one rotation capacitor plate 147, following stator lower-left number one rotation capacitor plate 150 and the upper left number one rotation of following stator capacitor plate 153 are classified as one group, be referred to as down first group of rotation of stator capacitor plate, the upper right No. second rotation capacitor plate 145 of following stator, No. second rotation in following stator bottom right capacitor plate 148, the upper left No. second rotation capacitor plate 154 of No. second rotation in following stator lower-left capacitor plate 151 and following stator is classified as one group, be referred to as down second group of rotation of stator capacitor plate, the upper right No. three rotation capacitor plate 146 of following stator, No. three rotation in following stator bottom right capacitor plate 149, the upper left No. three rotation capacitor plate 155 of No. three rotation in following stator lower-left capacitor plate 152 and following stator is classified as one group, is referred to as down the 3rd group of rotation of stator capacitor plate; The periphery of the capacitor plate structure under being positioned on stator first concentric circles, the center of following stator public capacitance pole plate center 160 is on the circumference in the center of circle, by being uniform-distribution with play clockwise stator detection Z-direction linear acceleration successively and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, they constitute the capacitor plate structure on second concentric circles that the center that is positioned at following stator public capacitance pole plate center 160 is the center of circle, are referred to as down the capacitor plate structure on stator second concentric circles; The periphery of the capacitor plate structure under being positioned on stator second concentric circles, the center of following stator public capacitance pole plate center 160 is on the circumference in the center of circle, by being uniform-distribution with down the upper right number one capacitor plate 128 that stator detects the Y direction linear acceleration clockwise successively, following stator detects upper right No. second capacitor plate 129 of Y direction linear acceleration, following stator detects the bottom right number one capacitor plate 130 of X-direction linear acceleration, following stator detects No. second capacitor plate 131 in bottom right of X-direction linear acceleration, following stator detects the lower-left number one capacitor plate 132 of Y direction linear acceleration, following stator detects No. second capacitor plate 133 in lower-left of Y direction linear acceleration, following stator detects the upper left number one capacitor plate 134 of X-direction linear acceleration, following stator detects upper left No. second capacitor plate 135 of X-direction linear acceleration, they constitute the capacitor plate structure on the 3rd concentric circles that the center that is positioned at following stator public capacitance pole plate center 160 is the center of circle, are referred to as down the capacitor plate structure on stator the 3rd concentric circles; The periphery of the capacitor plate structure under being positioned on stator the 3rd concentric circles, the center of following stator public capacitance pole plate center 160 is on the circumference in the center of circle, by being uniform-distribution with down the spacing copper post 124 of the upper right arc of stator clockwise successively, the spacing copper post 125 of following stator bottom right arc, the spacing copper post 126 of following stator lower-left arc, the spacing copper post 127 of the upper left arc of following stator, they constitute the spacing Copper column structure on the 4th concentric circles that the center that is positioned at following stator public capacitance pole plate center 160 is the center of circle, be referred to as down the spacing Copper column structure on stator the 4th concentric circles, and spacing copper post of the upper right arc of following stator 124 and the spacing copper post 126 of play stator lower-left arc be on to the angular direction, and the spacing copper post 125 of following stator bottom right arc and the spacing copper post 127 of the upper left arc of following stator are on to the angular direction; The periphery of the spacing Copper column structure under being positioned on stator the 4th concentric circles, upper right number one wiring copper post 104, upper right No. second wiring copper post 105, upper right No. three wiring copper post 106, upper right No. four wiring copper post 107 is positioned at the upper right corner and linearly arranges, bottom right number one wiring copper post 108, bottom right No. second wiring copper post 109, No. three wiring copper post 110 in bottom right, No. four wiring copper post 111 in bottom right, No. five wiring copper post 112 in bottom right, No. six wiring copper post 113 in bottom right is positioned at the lower right corner and linearly arranges, lower-left number one wiring copper post 114, lower-left No. second wiring copper post 115, No. three wiring copper post 116 in lower-left, No. four wiring copper post 117 in lower-left is positioned at the lower left corner and linearly arranges, upper left number one wiring copper post 118, upper left No. second wiring copper post 119, upper left No. three wiring copper post 120, upper left No. four wiring copper post 121, upper left No. five wiring copper post 122, upper left No. six wiring copper post 123 is positioned at the upper left corner and linearly arranges; On the parallel direction of the peripheral corresponding sides of wiring copper post, the upper right number one lead-in wire of following stator electrode 64, the upper right No. second lead-in wire electrode 65 of following stator, the upper right No. three lead-in wire electrode 66 of following stator, the upper right No. four lead-in wire electrode 67 of following stator, the upper right No. five lead-in wire electrode 68 of following stator, the upper right No. six lead-in wire electrode 69 of following stator, the upper right No. seven lead-in wire electrode 70 of following stator, the upper right No. eight lead-in wire electrode 71 of following stator, the upper right No. nine lead-in wire electrode 72 of following stator, the upper right No. ten lead-in wire of following stator electrode 73 is positioned at the upper right corner and linearly arranges, following stator bottom right number one lead-in wire electrode 74, following stator bottom right No. second lead-in wire electrode 75, following stator bottom right No. three lead-in wire electrode 76, following stator bottom right No. four lead-in wire electrode 77, following stator bottom right No. five lead-in wire electrode 78, following stator bottom right No. six lead-in wire electrode 79, following stator bottom right No. seven lead-in wire electrode 80, following stator bottom right No. eight lead-in wire electrode 81, following stator bottom right No. nine lead-in wire electrode 82, following stator bottom right No. ten lead-in wire electrode 83 is positioned at the lower right corner and linearly arranges, following stator lower-left number one lead-in wire electrode 84, following stator lower-left No. second lead-in wire electrode 85, following stator lower-left No. three lead-in wire electrode 86, following stator lower-left No. four lead-in wire electrode 87, following stator lower-left No. five lead-in wire electrode 88, following stator lower-left No. six lead-in wire electrode 89, following stator lower-left No. seven lead-in wire electrode 90, following stator lower-left No. eight lead-in wire electrode 91, following stator lower-left No. nine lead-in wire electrode 92, following stator lower-left No. ten lead-in wire electrode 93 is positioned at the lower left corner and linearly arranges, the upper left number one lead-in wire of following stator electrode 94, the upper left No. second lead-in wire electrode 95 of following stator, the upper left No. three lead-in wire electrode 96 of following stator, the upper left No. four lead-in wire electrode 97 of following stator, the upper left No. five lead-in wire electrode 98 of following stator, the upper left No. six lead-in wire electrode 99 of following stator, the upper left No. seven lead-in wire electrode 100 of following stator, the upper left No. eight lead-in wire electrode 101 of following stator, the upper left No. nine lead-in wire electrode 102 of following stator, the upper left No. ten lead-in wire of following stator electrode 103 is positioned at the upper left corner and linearly arranges.The upper right N of following stator public capacitance pole plate district 156, S district, following stator public capacitance pole plate bottom right 157, N district, following stator public capacitance pole plate lower-left 158, the upper left S of following stator public capacitance pole plate district 159, following stator public capacitance pole plate center 160, capacitor plate structure on following stator first concentric circles, capacitor plate structure on following stator second concentric circles is identical with capacitor plate structure height on following stator the 3rd concentric circles, and a little less than the spacing Copper column structure on following stator the 4th concentric circles, all wiring copper posts of spacing Copper column structure periphery on following stator the 4th concentric circles are higher than spacing Copper column structure on following stator the 4th concentric circles and highly the highest, and the height of the leaded electrode of institute also is lower than spacing Copper column structure on time stator the 4th concentric circles and highly minimum.

As Fig. 4, rotor 3 comprises: rotor number one hole 164, No. second hole 165 of rotor, No. three hole 166 of rotor, No. four hole 167 of rotor, No. five hole 168 of rotor, No. six hole 169 of rotor, No. seven hole 170 of rotor,, No. eight hole 171 of rotor, rotor upper surface Ti layer 172, diamagnetic material layer 173 in the middle of the rotor, rotor lower surface Ti layer 174; Its annexation is: rotor upper surface Ti layer 172 is arranged on the upper surface of the middle diamagnetic material layer 173 of rotor, and rotor lower surface Ti layer 174 is arranged on the lower surface of the middle diamagnetic material layer 173 of rotor.Rotor number one hole 164, No. second hole 165 of rotor, No. three hole 166 of rotor, No. four hole 167 of rotor, No. five hole 168 of rotor, No. six hole 169 of rotor, No. seven hole 170 of rotor,, No. eight hole 171 of rotor be the center of circle with the geometric center of rotor 3, with the certain distance less than rotor radius is radius along circumference by evenly distributing successively clockwise, is embedded in the rotor 3.The external radius of the capacitor plate structure on rotor radius and following stator second concentric circles equates.

Rotor 3 rotation principles of the present invention: adopt power transformation to hold the electrostatic rotary drive principle, usually adopt the three-phase dc voltage to drive, go up first group of rotation of stator capacitor plate by upper right No. eight 71 pairs at the lead-in wire electrode of following stator and apply DC voltage V1, go up second group of rotation of stator capacitor plate by upper right No. seven 70 pairs at the lead-in wire electrode of following stator and apply DC voltage V2, go up the 3rd group of rotation of stator capacitor plate by upper right No. six 69 pairs at the lead-in wire electrode of following stator and apply DC voltage V3, apply DC voltage-V1 by first group of rotation of the upper left 100 pairs of following stators of No. seven lead-in wire electrode of following stator capacitor plate, apply DC voltage-V2 by second group of rotation of the upper left 101 pairs of following stators of No. eight lead-in wire electrode of following stator capacitor plate, apply DC voltage-V3 by the 3rd group of rotation of the upper left 102 pairs of following stators of No. nine lead-in wire electrode of following stator capacitor plate, DC voltage V1, phase differential between V2 and the V3 is 120 degree, therefore when rotor during in the equilibrium position, because the stator drive electrode of last stator and play stator homophase is along the circumference symmetrical distribution and always apply the driving DC voltage of equivalent contrary sign, the clean axial driving force and the clean radial drive power that then act on rotor all are zero, but tangential driving force produces the driving torque to rotor, drives rotor with certain rotating speed rotation.

Input of the present invention adopts differential capacitance structure, capacitor plate is last, shape on the following stator is identical with distribution, they comprise and are positioned at the upper right S of stator public capacitance pole plate district 56, N district, last stator public capacitance pole plate bottom right 57, S district, last stator public capacitance pole plate lower-left 58, the upper left N of last stator public capacitance pole plate district 59, the last stator public capacitance pole plate that last stator public capacitance pole plate center 60 constitutes, and the following upper right N of stator public capacitance pole plate district 156, S district, following stator public capacitance pole plate bottom right 157, N district, following stator public capacitance pole plate lower-left 158, the upper left S of following stator public capacitance pole plate district 159, the following stator public capacitance pole plate that following stator public capacitance pole plate center 160 constitutes; Be used for detecting along the z axis displacement with around X, 16 fan-shaped capacitor plates of Y-axis angular displacement, that is: go up that stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, and stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis down, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis; Be used for detecting along X, 16 fan-shaped capacitor plates of Y-axis displacement of the lines, that is: last stator detects the upper right number one capacitor plate 28 of Y direction linear acceleration, last stator detects upper right No. second capacitor plate 29 of Y direction linear acceleration, last stator detects the bottom right number one capacitor plate 30 of X-direction linear acceleration, last stator detects No. second capacitor plate 31 in bottom right of X-direction linear acceleration, last stator detects the lower-left number one capacitor plate 32 of Y direction linear acceleration, last stator detects No. second capacitor plate 33 in lower-left of Y direction linear acceleration, last stator detects the upper left number one capacitor plate 34 of X-direction linear acceleration, last stator detects upper left No. second capacitor plate 35 of X-direction linear acceleration, and following stator detects the upper right number one capacitor plate 128 of Y direction linear acceleration, following stator detects upper right No. second capacitor plate 129 of Y direction linear acceleration, following stator detects the bottom right number one capacitor plate 130 of X-direction linear acceleration, following stator detects No. second capacitor plate 131 in bottom right of X-direction linear acceleration, following stator detects the lower-left number one capacitor plate 132 of Y direction linear acceleration, following stator detects No. second capacitor plate 133 in lower-left of Y direction linear acceleration, and following stator detects the upper left number one capacitor plate 134 of X-direction linear acceleration, following stator detects upper left No. second capacitor plate 135 of X-direction linear acceleration.Diamagnetic suspension rotor electrostatic driving micro-gyroscope is when work, each group differential capacitance is applied the high-frequency carrier signal of different frequency or many class frequencys, and adopt the public capacitance coupling to export subsequent detection and control circuit to, so just obtain the voltage signal of each linear acceleration and angular acceleration correspondence, by processing to voltage signal, finally obtain acceleration signal, determine that accelerometer is subjected to acceleration, and apply FEEDBACK CONTROL and make rotor remain at the equilibrium position that suspends from steady.It is as follows to provide specific implementation with reference to the electric connecting relation of the effect of each capacitor plate and accelerometer:

One, detect the Z-direction linear acceleration: by the upper right No. nine lead-in wire electrode 72 of following stator, the upper right No. ten lead-in wire of following stator electrode 73, following stator bottom right number one lead-in wire electrode 74, following stator bottom right No. second lead-in wire electrode 75, following stator bottom right No. three lead-in wire electrode 76, following stator bottom right No. four lead-in wire electrode 77, following stator bottom right No. five lead-in wire electrode 78, No. the 6th, following stator bottom right lead-in wire electrode 79 is respectively in last stator detection Z-direction linear acceleration with around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and apply amplitude on the upper right number one capacitor plate 36 of the angular acceleration of Y-axis is Vz, frequency is the high-frequency carrier signal of fz, by following stator lower-left No. nine lead-in wire electrode 92, following stator lower-left No. ten lead-in wire electrode 93, the upper left number one lead-in wire of following stator electrode 94, the upper left No. second lead-in wire electrode 95 of following stator, the upper left No. three lead-in wire electrode 96 of following stator, the upper left No. four lead-in wire electrode 97 of following stator, the upper left No. five lead-in wire electrode 98 of following stator, the upper left No. six lead-in wire electrode 99 of following stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis at following stator, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and applies amplitude around upper left No. second capacitor plate 143 of the angular acceleration of X-axis and is-Vz, frequency is the high-frequency carrier signal of fz, when the external world has when the Z-direction linear acceleration is imported, last stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, rotor 3, following stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, form differential capacitance along Z-direction between the three, accelerometer is when operate in open loop state, by follow-up wireline inspection, just may be by the high frequency carrier voltage signal to corresponding Z direction of principal axis linear acceleration value, during closed loop work, according to testing result and needs, detect the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis at last stator, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, and down stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and applies amplitude respectively around upper left No. second capacitor plate 143 of the angular acceleration of X-axis and equates, opposite polarity DC voltage is controlled at initial rest position with rotor 3;

Two, detect the X-direction linear acceleration: by following stator bottom right No. seven lead-in wire electrode 80, following stator bottom right No. eight lead-in wire electrode 81, following stator lower-left No. three lead-in wire electrode 86, following stator lower-left No. four lead-in wire electrode 87 detects upper left No. second capacitor plate 35 of X-direction linear acceleration at last stator, last stator detects the upper left number one capacitor plate 34 of X-direction linear acceleration and the bottom right number one capacitor plate 130 that following stator detects the X-direction linear acceleration, applying amplitude on No. second capacitor plate 131 in bottom right of following stator detection X-direction linear acceleration is Vx, frequency is the high-frequency carrier signal of fx, by the upper right number one lead-in wire of following stator electrode 64, the upper right No. second lead-in wire electrode 65 of following stator, the upper left No. second lead-in wire electrode 95 of following stator, the upper left No. three lead-in wire electrode 96 of following stator detects No. second capacitor plate 31 in bottom right of X-direction linear acceleration at last stator, last stator detects the bottom right number one capacitor plate 30 of X-direction linear acceleration and the upper left number one capacitor plate 134 that following stator detects the X-direction linear acceleration, applying amplitude on upper left No. second capacitor plate 135 of following stator detection X-direction linear acceleration is-Vx, frequency is the high-frequency carrier signal of fx, as the external world when the X-direction linear acceleration is imported, last stator detects the upper left number one capacitor plate 34 of X-direction linear acceleration and upper left No. second capacitor plate 35 that last stator detects the X-direction linear acceleration, rotor 3, following stator detects electric capacity and the bottom right number one capacitor plate 30 of last stator detection X-direction linear acceleration and No. second capacitor plate 31 in bottom right that last stator detects the X-direction linear acceleration of the bottom right number one capacitor plate 130 of X-direction linear acceleration and No. second capacitor plate 131 threes formation in bottom right that following stator detects the X-direction linear acceleration, rotor 3, following stator detects the upper left number one capacitor plate 134 of X-direction linear acceleration and the electric capacity of the upper left No. second capacitor plate 135 threes formation that following stator detects the X-direction linear acceleration constitutes differential capacitance, equally, accelerometer is when operate in open loop state, by follow-up wireline inspection, just may be by the high frequency carrier voltage signal to corresponding X-direction linear acceleration value, during closed loop work, according to testing result and needs, detect the upper left number one capacitor plate 34 of X-direction linear acceleration and upper left No. second capacitor plate 35 that last stator detects the X-direction linear acceleration at last stator, bottom right number one capacitor plate 130 and following stator that following stator detects the X-direction linear acceleration detect on No. second capacitor plate 131 in bottom right of X-direction linear acceleration, and go up stator and detect the bottom right number one capacitor plate 30 of X-direction linear acceleration and No. second capacitor plate 31 in bottom right that last stator detects the X-direction linear acceleration, upper left No. second capacitor plate 135 that the upper left number one capacitor plate 134 of following stator detection X-direction linear acceleration and following stator detect the X-direction linear acceleration applies amplitude respectively and equates, opposite polarity DC voltage is controlled at initial rest position with rotor 3;

Three, detect the Y direction linear acceleration: by the upper right No. three lead-in wire electrode 66 of following stator, the upper right No. four lead-in wire electrode 67 of following stator, following stator lower-left number one lead-in wire electrode 84, following stator lower-left No. second lead-in wire electrode 85 detects upper right No. second capacitor plate 29 of Y direction linear acceleration at last stator, last stator detects the upper right number one capacitor plate 28 of Y direction linear acceleration and the upper right number one capacitor plate 128 that following stator detects the Y direction linear acceleration, applying amplitude on upper right No. second capacitor plate 129 of following stator detection Y direction linear acceleration is Vy, frequency is the high-frequency carrier signal of fy, by following stator bottom right No. nine lead-in wire electrode 82, following stator bottom right No. ten lead-in wire electrode 83, following stator lower-left No. five lead-in wire electrode 88, following stator lower-left No. six lead-in wire electrode 89 detects No. second capacitor plate 33 in lower-left of Y direction linear acceleration at last stator, last stator detects the lower-left number one capacitor plate 32 of Y direction linear acceleration and the lower-left number one capacitor plate 132 that following stator detects the Y direction linear acceleration, applying amplitude on No. second capacitor plate 133 in lower-left of following stator detection Y direction linear acceleration is-Vy, frequency is the high-frequency carrier signal of fy, as the external world when the Y direction linear acceleration is imported, last stator detects the upper right number one capacitor plate 28 of Y direction linear acceleration and upper right No. second capacitor plate 29 that last stator detects the Y direction linear acceleration, rotor 3, following stator detects electric capacity and the lower-left number one capacitor plate 32 of last stator detection Y direction linear acceleration and No. second capacitor plate 33 in lower-left that last stator detects the Y direction linear acceleration of the upper right number one capacitor plate 128 of Y direction linear acceleration and the upper right No. second capacitor plate 129 threes formation that following stator detects the Y direction linear acceleration, rotor 3, the electric capacity that following stator detects the lower-left number one capacitor plate 132 of Y direction linear acceleration and No. second capacitor plate 133 threes formation in lower-left that following stator detects the Y direction linear acceleration constitutes differential capacitance, equally, accelerometer is when operate in open loop state, by follow-up wireline inspection, just may be by the high frequency carrier voltage signal to corresponding Y direction linear acceleration value, during closed loop work, according to testing result and needs, last stator detects the upper right number one capacitor plate 28 of Y direction linear acceleration, last stator detects upper right No. second capacitor plate 29 of Y direction linear acceleration, upper right number one capacitor plate 128 and following stator that following stator detects the Y direction linear acceleration detect on upper right No. second capacitor plate 129 of Y direction linear acceleration, and the lower-left number one capacitor plate 32 of going up stator detection Y direction linear acceleration, last stator detects No. second capacitor plate 33 in lower-left of Y direction linear acceleration, applying amplitude respectively on No. second capacitor plate 133 in lower-left that the lower-left number one capacitor plate 132 of following stator detection Y direction linear acceleration and following stator detect the Y direction linear acceleration equates, opposite polarity DC voltage is controlled at initial rest position with rotor 3;

Four, detection is around the angular acceleration of X-axis: by the upper right No. nine lead-in wire electrode 72 of stator down, No. the 4th, following stator bottom right lead-in wire electrode 77 detects the Z-direction linear acceleration for last stator and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and applies amplitude around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis is V4, frequency is the high-frequency carrier signal of f4, by the upper right No. ten lead-in wire of following stator electrode 73, No. the 3rd, following stator bottom right lead-in wire electrode 76 detects the Z-direction linear acceleration for last stator and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and applies amplitude around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis and is-V4, and frequency is the high-frequency carrier signal of f4; By the upper left number one lead-in wire of following stator electrode 94, the upper left No. six lead-in wire electrode 99 of following stator detects the Z-direction linear acceleration for stator down and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and applies amplitude around upper left No. second capacitor plate 143 of the angular acceleration of X-axis is V4, frequency is the high-frequency carrier signal of f4, by the upper left No. second lead-in wire electrode 95 of following stator, the upper left No. five lead-in wire electrode 98 of following stator detects the Z-direction linear acceleration for stator down and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and applies amplitude around the upper left number one capacitor plate 142 of the angular acceleration of X-axis and is-V4, frequency is the high-frequency carrier signal of f4, when the external world has when the angular acceleration of X-axis is imported, last stator detects the Z-direction linear acceleration and detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis and last stator, rotor 3, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis and play stator detection Z-direction linear acceleration and the electric capacity that forms between upper left No. second capacitor plate 143 threes of the angular acceleration of X-axis, detect the Z-direction linear acceleration and detect the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis with last stator around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis and last stator, rotor 3, the electric capacity formation differential capacitance that following stator detects the Z-direction linear acceleration and detects the Z-direction linear acceleration and form around upper left number one capacitor plate 142 threes of the angular acceleration of X-axis around No. second capacitor plate in bottom right 139 of the angular acceleration of X-axis and play stator, equally, accelerometer is when operate in open loop state, by follow-up wireline inspection, just may be to accordingly around the X-direction angular acceleration values by the high frequency carrier voltage signal, during closed loop work, according to testing result and needs, detect the Z-direction linear acceleration for last stator and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis and play stator detection Z-direction linear acceleration with around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, and go up that stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and detects the Z-direction linear acceleration and apply amplitude respectively around the upper left number one capacitor plate 142 of the angular acceleration of X-axis equal around No. second capacitor plate in bottom right 139 of the angular acceleration of X-axis and play stator, opposite polarity DC voltage is controlled at initial rest position with rotor 3;

Five, detect angular acceleration around Y-axis: by No. second lead-in wire in stator bottom right electrode 75 down, down No. five lead-in wire in stator bottom right electrode 78 detect the Z-direction linear acceleration for last stator and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, to go up that stator detects the Z-direction linear acceleration and apply amplitude around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis be V5, frequency is the high-frequency carrier signal of f5; By following stator bottom right number one lead-in wire electrode 74, down No. six lead-in wire in stator bottom right electrode 79 detect the Z-direction linear acceleration for last stator and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, go up stator and detect the Z-direction linear acceleration and apply amplitude and be-V5 around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, frequency is the high-frequency carrier signal of f5; By following No. nine lead-in wire in stator lower-left electrode 92, down the upper left No. four lead-in wire electrode 97 of stator give stator down detect the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, down stator to detect the Z-direction linear acceleration and apply amplitude around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis be V5, frequency is the high-frequency carrier signal of f5; By following stator lower-left No. ten lead-in wire electrode 93, the upper left No. three lead-in wire electrode 96 of following stator detects the Z-direction linear acceleration for stator down and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and applies amplitude around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis and is-V5, frequency is the high-frequency carrier signal of f5, when the external world has when the angular acceleration of Y-axis is imported, last stator detects the Z-direction linear acceleration and detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis and last stator, rotor 3, following stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis and play stator detection Z-direction linear acceleration and the electric capacity that forms between No. second capacitor plate 141 threes in lower-left of the angular acceleration of Y-axis, detect the Z-direction linear acceleration and detect the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis with last stator around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis and last stator, rotor 3, the electric capacity formation differential capacitance that following stator detects the Z-direction linear acceleration and detects the Z-direction linear acceleration and form around lower-left number one capacitor plate 140 threes of the angular acceleration of Y-axis around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis and play stator, equally, accelerometer is when operate in open loop state, by follow-up wireline inspection, just may be to accordingly around the Y direction angular acceleration values by the high frequency carrier voltage signal, during closed loop work, according to testing result and needs, detect the Z-direction linear acceleration for last stator and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis and play stator detection Z-direction linear acceleration with around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, and go up that stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and detects the Z-direction linear acceleration and apply amplitude respectively around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis equal around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis and play stator, opposite polarity DC voltage is controlled at initial rest position with rotor 3; Because the differential capacitance that adopts detects and subsequent process circuit is common power transformation and holds testing circuit, this part is not the content that this patent will be protected, so detect and the subsequent process circuit this patent does not describe in detail about the differential capacitance that adopts.

Rotor 3 of the present invention adopts diamagnetic material to make its substrate, is shaped as dish type, and the substrate of last stator 1 and following stator 2 is a ferrite, and shape is square.Simultaneously last stator is detected the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, the upper right S of last stator public capacitance pole plate district 56, N district, last stator public capacitance pole plate bottom right 57, S district, last stator public capacitance pole plate lower-left 58, the upper left N of last stator public capacitance pole plate district 59, and down stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, the upper right N of following stator public capacitance pole plate district 156, S district, following stator public capacitance pole plate bottom right 157, N district, following stator public capacitance pole plate lower-left 158, magnetize in the upper left S of following stator public capacitance pole plate district 159, make stator detect the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, N district, last stator public capacitance pole plate bottom right 57, the upper left N of last stator public capacitance pole plate district 59 direction outside last stator 1, promptly the assembling back is a N utmost point magnetic over against the face of the direction of rotor 3, make stator detect the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, the upper right S of last stator public capacitance pole plate district 56, S district, last stator public capacitance pole plate lower-left 58 direction outside last stator 1, promptly the assembling back is a S utmost point magnetic over against the face of the direction of rotor 3, and make down stator detect the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, the upper right N of following stator public capacitance pole plate district 156, N district, following stator public capacitance pole plate lower-left 158 is direction outside following stator 2, promptly the assembling back is a N utmost point magnetic over against the face of the direction of rotor 3, make down stator detect the Z-direction linear acceleration and around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, S district, following stator public capacitance pole plate bottom right 157, the upper left S of following stator public capacitance pole plate district 159 is direction outside following stator 2, and promptly the assembling back is a S utmost point magnetic over against the face of the direction of rotor 3; Thus, last stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 36 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around upper right No. second capacitor plate 37 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the bottom right number one capacitor plate 38 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 39 in bottom right of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 40 of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around No. second capacitor plate 41 in lower-left of the angular acceleration of Y-axis, last stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 42 of the angular acceleration of X-axis, last stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 43 of the angular acceleration of X-axis, the upper right S of last stator public capacitance pole plate district 56, N district, last stator public capacitance pole plate bottom right 57, S district, last stator public capacitance pole plate lower-left 58, the Z-direction linear acceleration detects with: following stator respectively and around upper right No. second capacitor plate 137 of the angular acceleration of Y-axis in the upper left N of last stator public capacitance pole plate district 59, following stator detects the Z-direction linear acceleration and around the upper right number one capacitor plate 136 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around upper left No. second capacitor plate 143 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around the upper left number one capacitor plate 142 of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 141 in lower-left of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around the lower-left number one capacitor plate 140 of the angular acceleration of Y-axis, following stator detects the Z-direction linear acceleration and around No. second capacitor plate 139 in bottom right of the angular acceleration of X-axis, following stator detects the Z-direction linear acceleration and forms the opposite relation of pole polarity one to one around the bottom right number one capacitor plate 138 of the angular acceleration of X-axis.Attractive force between them makes that the bonding of going up stator 1 and following stator 2 is tightr.Interaction force between rotor 3 and last stator 1 and the following stator 2 is that coercive force provides Z to suspending power for the anti-magnetic stator that suspends, simultaneously also for rotor 3 provides lateral stability power along X, Y direction, and then rotor 3 has been realized the self-stabilization suspension 2 of last stator 1 and following stators.

Process using Micrometer-Nanometer Processing Technology of the present invention (MEMS technology) combines with Precision Machining, specifically: at first be to go up stator 1 and the 2 employing Micrometer-Nanometer Processing Technologies realizations of following stator, pass through sputtering technology sputter one deck insulation Al on Chiral Materials of Ferrite Substrate ₂O ₃Layer, top more afterwards one deck lead-in wire of making prepares capacitor plate, lead-in wire electrode, wiring copper post, the spacing copper post of arc etc. then on trace layer; Four fan sections of upper and lower stator public capacitance electrode plate structure and upper and lower stator detect the Z-direction linear acceleration and what adopt around the capacitor plate of the angular acceleration of X, Y-axis is permanent magnetic material, as cobalt nickel manganese phosphorus (CoNiMnP), neodymium iron boron (NdFeB), what other capacitor plate materials adopted is copper, what the material of lead-in wire electrode adopted is gold, and the material of the spacing copper post of wiring copper post and arc then is to adopt copper; 3 of rotors are to be earlier two surface sputtering Ti of the middle diamagnetic material layer of rotor at substrate, obtain through fine electric spark processing then, what substrate adopted is diamagnetic material, as pyrolytic graphite (Pyrolytic graphite), rotor is put into the cavity of stator 1 and following stator 2 formations the most at last, and obtains diamagnetic suspension rotor electrostatic driving micro-gyroscope by PbSn weldering bonding technology.

Claims (6)

1. diamagnetic suspension rotor electrostatic driving micro-gyroscope, by last stator, rotor and following stator three parts constitute, it is characterized in that: go up that stator is provided with stator detection Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, rotate capacitor plate and go up stator public capacitance electrode plate structure, the three is positioned at same plane and promptly goes up on the stator lead layer, the plane geometry central distribution be to go up stator public capacitance electrode plate structure, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, be uniform-distribution with the rotation capacitor plate on first concentric circumferences, be uniform-distribution with on second concentric circumferences that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis; Rotor then adopts diamagnetic material to make its substrate, i.e. diamagnetic material layer in the middle of the rotor; Following stator is provided with down that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, rotation capacitor plate and following stator public capacitance electrode plate structure, the three is positioned at same plane and promptly descends on the stator lead layer, stator public capacitance electrode plate structure under being of plane geometry central distribution, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, be uniform-distribution with the rotation capacitor plate on first concentric circumferences, be uniform-distribution with down on second concentric circumferences that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis; In said structure, last stator public capacitance electrode plate structure and following stator public capacitance electrode plate structure include a center and four fan sections.

2. diamagnetic suspension rotor electrostatic driving micro-gyroscope according to claim 1, it is characterized in that the described stator of going up also comprises: the electrically conducting groove, go up the spacing copper post of capacitor plate, arc that stator detects X-direction and Y direction linear acceleration, go up the stator Chiral Materials of Ferrite Substrate, go up stator insulation Al ₂O ₃Layer, and go up the stator lead layer; Wherein: the electrically conducting groove, last stator detects the capacitor plate and the spacing copper post of arc of X-direction and Y direction linear acceleration, be positioned at that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, the rotation capacitor plate, promptly go up on the stator lead layer on same plane, last stator public capacitance electrode plate structure place, the plane geometry central distribution be to go up stator public capacitance electrode plate structure, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, be uniform-distribution with the rotation capacitor plate on first concentric circumferences, be uniform-distribution with on second concentric circumferences that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, be uniform-distribution with the capacitor plate of stator detection X-direction and Y direction linear acceleration on the 3rd concentric circumferences, be uniform-distribution with the spacing copper post of arc on the 4th concentric circumferences; At the spacing copper post of arc outward, on the four edges parallel direction separately of last stator, the electrically conducting groove is linearly arranged.

3. diamagnetic suspension rotor electrostatic driving micro-gyroscope according to claim 1, it is characterized in that, described stator down also comprises: lead-in wire electrode, wiring copper post, the spacing copper post of arc, following stator detect the capacitor plate of X-direction and Y direction linear acceleration, following stator Chiral Materials of Ferrite Substrate, following stator insulation Al ₂O ₃Layer, and following stator lead layer; Wherein: the lead-in wire electrode, wiring copper post, spacing copper post of arc and following stator detect the capacitor plate of X-direction and Y direction linear acceleration, be positioned at down that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, the rotation capacitor plate, same plane, following stator public capacitance electrode plate structure place is promptly descended on the stator lead layer, stator public capacitance electrode plate structure under being of plane geometry central distribution, with the plane geometry center be the center of circle by interior four concentric circumferences outward on, be uniform-distribution with the rotation capacitor plate on first concentric circumferences, be uniform-distribution with down on second concentric circumferences that stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis, be uniform-distribution with down the capacitor plate of stator detection X-direction and Y direction linear acceleration on the 3rd concentric circumferences, be uniform-distribution with the spacing copper post of arc on the 4th concentric circumferences; At the spacing copper post of arc outward, on the four edges parallel direction separately of following stator, wiring copper post is linearly arranged; At wiring copper post outward, on the four edges parallel direction separately of following stator, the lead-in wire electrode is linearly arranged.

4. diamagnetic suspension rotor electrostatic driving micro-gyroscope according to claim 1, it is characterized in that, the described stator of going up is to realize electric and mechanical connection by the electrically conducting groove of last stator with the bonding of the wiring copper post of following stator with following stator, and formation cavity, rotor is suspended in the cavity, adopt disc-like shape, the upper and lower surface of diamagnetic material layer covers the Ti layer respectively in the middle of rotor simultaneously, makes middle diamagnetic material layer of rotor and upper and lower surface thereof form sandwich construction.

5. according to claim 1 or 4 described diamagnetic suspension rotor electrostatic driving micro-gyroscopes, it is characterized in that, described stator and the following stator gone up, the substrate of employing is ferrite, and shape all is square.

6. diamagnetic suspension rotor electrostatic driving micro-gyroscope according to claim 1, it is characterized in that, described four fan sections of going up stator public capacitance electrode plate structure, with four fan sections of following stator public capacitance electrode plate structure and on, following stator detects the Z-direction linear acceleration and around X, what the capacitor plate of the angular acceleration of Y-axis adopted is permanent magnetic material, to last, four fan sections of following stator public capacitance electrode plate structure and on, following stator detects the Z-direction linear acceleration and around X, the capacitor plate of the angular acceleration of Y-axis magnetizes, and makes corresponding capacitor plate form the N-S opposite relation of pole polarity one to one.

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