CN108630542A - Semiconductor structure and forming method thereof - Google Patents
Semiconductor structure and forming method thereof Download PDFInfo
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- CN108630542A CN108630542A CN201710160284.4A CN201710160284A CN108630542A CN 108630542 A CN108630542 A CN 108630542A CN 201710160284 A CN201710160284 A CN 201710160284A CN 108630542 A CN108630542 A CN 108630542A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 56
- 150000002500 ions Chemical class 0.000 claims abstract description 201
- 239000000758 substrate Substances 0.000 claims abstract description 108
- 239000010410 layer Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 24
- 239000002019 doping agent Substances 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 238000010276 construction Methods 0.000 claims description 10
- 238000002513 implantation Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000011065 in-situ storage Methods 0.000 claims description 7
- 239000002356 single layer Substances 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 3
- 238000002955 isolation Methods 0.000 description 17
- 230000000694 effects Effects 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 7
- 229910052733 gallium Inorganic materials 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 7
- 230000005669 field effect Effects 0.000 description 6
- 229910052732 germanium Inorganic materials 0.000 description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 6
- 230000007704 transition Effects 0.000 description 5
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 229910003978 SiClx Inorganic materials 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
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- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
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- 229910052796 boron Inorganic materials 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
A kind of semiconductor structure of present invention offer and forming method thereof, the forming method of the semiconductor structure includes：Substrate is provided；Gate structure is formed on the substrate；Lightly doped district is formed in the substrate of the gate structure both sides；It is formed after lightly doped district, forms source and drain heavily doped region in the substrate positioned at the gate structure both sides, the Doped ions concentration of the source and drain heavily doped region is more than the Doped ions concentration of the lightly doped district；It is formed after the source and drain heavily doped region, transoid doped region is formed in the lightly doped district of part, and the transoid doped region is located between the source and drain heavily doped region and remaining lightly doped district, the Doped ions type of the transoid doped region is different from the Doped ions type of source and drain heavily doped region.The reliability for the semiconductor structure that the present invention is formed is improved.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, more particularly to a kind of semiconductor structure and forming method thereof.
Background technology
With the rapid development of semiconductor technology, the characteristic size of semiconductor structure constantly reduces so that integrated circuit
Integrated level is higher and higher, and higher requirements are also raised for this performance to device.
Currently, as the size of Metal-Oxide Semiconductor field-effect transistor (MOSFET) constantly becomes smaller.In order to adapt to
The reduction of process node can only constantly shorten the channel length of MOSFET field-effect tube.The shortening of channel length, which has, increases core
The benefits such as the tube core density of piece, the switching speed for increasing MOSFET field-effect tube.
However, with the shortening of device channel length, device source electrode between drain electrode at a distance from also shorten therewith, so
Grid is deteriorated to the control ability of raceway groove, and the difficulty of grid voltage pinch off (pinch off) raceway groove is also increasing so that sub- valve
It is worth leaky, i.e. short-channel effect (SCE：Short-channel effects) become a most important technical problem.
Therefore, in order to preferably adapt to the scaled requirement of device size, semiconductor technology gradually starts from plane
Transistor transient from mosfet transistor to the three-dimensional with more high effect, such as fin field effect pipe (FinFET).
FinFET has good channel controllability.
However, the reliability for the semiconductor structure that the prior art is formed is to be improved.
Invention content
Problems solved by the invention is to provide a kind of semiconductor structure and forming method thereof, improves the reliable of semiconductor structure
Property.
To solve the above problems, the present invention provides a kind of forming method of semiconductor structure, including：Substrate is provided；Institute
It states and forms gate structure in substrate；Lightly doped district is formed in the substrate of the gate structure both sides；It is formed after lightly doped district,
Source and drain heavily doped region, the Doped ions concentration of the source and drain heavily doped region are formed in the substrate positioned at the gate structure both sides
More than the Doped ions concentration of the lightly doped district；It is formed after the source and drain heavily doped region, in the lightly doped district of part
Transoid doped region is formed, and the transoid doped region is located between the source and drain heavily doped region and remaining lightly doped district, it is described anti-
The Doped ions type of type doped region is different from the Doped ions type of source and drain heavily doped region.
Optionally, when the Doped ions type of the source and drain heavily doped region is p-type, the Doped ions of the transoid doped region
Type is N-type；Alternatively, when the Doped ions type of the source and drain heavily doped region is N-type, the Doped ions of the transoid doped region
Type is p-type.
Optionally, include the step of formation lightly doped district in the substrate of the gate structure both sides：To being located at the grid
The substrate of pole structure both sides carries out that ion implanting is lightly doped, and forms the lightly doped district.
Optionally, to positioned at the substrate of the gate structure both sides carrying out that ion implanting is lightly doped in the step of, ion note
It is 15 degree to 30 degree to enter direction and the angle of base top surface normal.
Optionally, include the step of formation transoid doped region in the lightly doped district of part：To the part of lightly doped district
Substrate carries out transoid ion implanting, forms the transoid doped region.
Optionally, in the step of carrying out transoid ion implanting to the part of substrate of lightly doped district, ion implanting direction and base
The angle of bottom top surface normal is 5 degree to 20 degree.
Optionally, the bottom of the transoid doped region is flushed with the bottom of the lightly doped district；Alternatively, the transoid doping
The bottom in area is less than the bottom of the lightly doped district.
Optionally, the Doped ions of the transoid doped region are p-type ion；Transoid is carried out to the part of substrate of lightly doped district
In the step of ion implanting, the technological parameter of the transoid ion implanting includes：The ion of the transoid ion implanting is B ions
When, the implantation dosage of the B ions is 1.0E13atom/cm2To 1.0E15atom/cm2, Implantation Energy is 0.5kev to 5kev.
Optionally, the Doped ions of the transoid doped region are N-type ion；Transoid is carried out to the part of substrate of lightly doped district
In the step of ion implanting, the technological parameter of the transoid ion implanting includes：The ion of the transoid ion implanting be As from
The implantation dosage of the As ions or P ion is 1.0E13atom/cm when sub either P ion2To 1.0E15atom/cm2, note
It is 1kev to 15kev to enter energy.
Optionally, the step of forming the source and drain heavily doped region include：Part of the etching positioned at the gate structure both sides
Substrate forms groove；The source and drain epi dopant layer for filling the groove is formed, in situ mix is carried out to the source and drain epi dopant layer
Reason is lived together, the source and drain heavily doped region is formed.
Optionally, the Doped ions of the source and drain heavily doped region are p-type ion；The processing step of the original position doping treatment
In, to a concentration of 6E20atom/cm of the p-type ion of source and drain epi dopant layer doping3To 1.8E21atom/cm3。
Optionally, formed lightly doped district the step of after, formed source and drain heavily doped region the step of before, the forming method
Further include：Side wall is formed on the side wall of the gate structure.
Optionally, the step of forming the transoid doped region include：It is parallel on the direction of substrate surface on edge, removal portion
The part of substrate progress transoid ion implanting for the lightly doped district that remaining side wall exposes is lightly doped described for the side wall for dividing width
Transoid doped region is formed in area.
Optionally, the width dimensions for along being parallel on the direction of substrate surface, removing partial width side wall 15nm extremely
Within the scope of 50nm.
Optionally, it is dry etching in the technique for along being parallel on the direction of substrate surface, removing the side wall of partial width
Technique；The parameter of the dry etch process includes：Etching gas is CH3F、N2And O2Mixed gas, CH3The gas stream of F
Amount is 8sccm to 50sccm, N2Gas flow be 100sccm to 500sccm, O2Gas flow be 5sccm to 200sccm,
Pressure is 10mtorr to 200mtorr, and etch period is 4s to 50s, and RF power is 50 to 500W, and voltage is 30V to 100V.
Optionally, the side wall includes single layer structure or laminated construction；The material of the side wall includes：Silicon nitride, carbon
One or more of silicon nitride and silicon oxide carbide.
Optionally, the substrate includes substrate and multiple discrete fins on the substrate；In the substrate
The step of upper formation gate structure includes：It is developed across the gate structure of the fin, the gate structure covers the fin
Atop part and side wall.
Correspondingly, the present invention also provides a kind of semiconductor structures, including：Substrate；Gate structure in the substrate；
Lightly doped district in the substrate of the gate structure both sides；Source and drain in the substrate of the gate structure both sides is heavily doped
The Doped ions concentration in miscellaneous area, the source and drain heavily doped region is more than the Doped ions concentration being lightly doped；Described in part
Transoid doped region in lightly doped district, and the transoid doped region be located at the source and drain heavily doped region and the lightly doped district it
Between, the Doped ions type of the transoid doped region is different from the Doped ions type of source and drain heavily doped region.
Optionally, the bottom of the transoid doped region is flushed with the bottom being lightly doped；Alternatively, the transoid doped region
Bottom be less than the lightly doped district bottom.
Optionally, the substrate includes substrate and multiple discrete fins on the substrate；The grid knot
Structure covers partial sidewall and the top of the fin across the fin；The lightly doped district is located at the gate structure two
In the fin of side；The source and drain heavily doped region is located in the fin of the gate structure both sides；The transoid doped region is located at institute
In the part fin for stating lightly doped district.
Compared with prior art, technical scheme of the present invention has the following advantages：
In the technical solution of the forming method of semiconductor structure provided by the invention, the step of the source and drain heavily doped region is formed
After rapid, form transoid doped region in the lightly doped district of part, and the transoid doped region be located at the source and drain heavily doped region and
Between remaining lightly doped district, the Doped ions type of the Doped ions type of the transoid doped region and the source and drain heavily doped region
It is different.Due to that can occur positioned at the high concentration ion of source and drain heavily doped region and between the Doped ions of the transoid doped region
Phase counterdiffusion reduces the Doped ions concentration of the source and drain heavily doped region, so that the source and drain heavily doped region and described
Doped ions concentration gradient between lightly doped district reduces, i.e., is easy between the source and drain heavily doped region and the lightly doped district
Formed graded transition junction, so as to improve semiconductor structure gate induced drain Leakage Current the problem of, improve semiconductor structure
Reliability.
In alternative, the bottom of the transoid doped region is flushed with the bottom of the lightly doped district or the transoid
The bottom of doped region is less than the bottom of the lightly doped district so that the Doped ions of the source and drain heavily doped region are mixed with the transoid
The Doped ions generation in miscellaneous area is fully spread, and to reduce the Doped ions concentration of the source and drain heavily doped region, and then is dropped
Low Doped ions concentration gradient between the source and drain heavily doped region and the lightly doped district, therefore further improve and partly lead
The problem of gate induced drain Leakage Current of body structure.
Description of the drawings
Fig. 1 to Fig. 3 is a kind of corresponding cross-sectional view of each step of method for forming semiconductor structure；
Fig. 4 to Figure 17 is the corresponding cross-section structure signal of one each step of embodiment forming method of semiconductor structure of the present invention
Figure.
Specific implementation mode
Reliability according to the semiconductor structure of background technology formation is to be improved.In conjunction with a kind of shape of semiconductor structure
It is analyzed at the process reason to be improved to the reliability of semiconductor structure.
Fig. 1 to Fig. 3 is a kind of corresponding cross-sectional view of each step of method for forming semiconductor structure.
With reference to figure 1, substrate is provided；The substrate includes：Substrate 100 has multiple discrete fins on the substrate 100
110；Isolation structure 120 is formed on the substrate 100 that the fin 110 exposes, the isolation structure 120 covers the fin
110 partial sidewall, and 120 top of the isolation structure is less than 110 top of the fin；It is developed across the fin 110
Gate structure 130, the gate structure 130 cover the atop part and side wall of the fin 110；In the gate structure 130
Both sides formed side wall 150；After the step of forming side wall 150, lightly doped district (not shown) is formed in the fin 110.
With reference to figure 2, etching is positioned at the fin 110 of 130 both sides of gate structure, the fin in 130 both sides of the gate structure
Groove 160 is formed in 110.
With reference to figure 3, form the source and drain epi dopant layer 170 for filling the groove 160 (with reference to figure 2), to the source and drain outside
Prolong doped layer 170 and carry out doping treatment in situ, forms source and drain doping area (not shown).
The reliability of above-mentioned the formed semiconductor structure of forming method is to be improved.
It is found through analysis, the reason for causing semiconductor structure reliability to be improved includes：It is mixed due to forming the source and drain
The ion concentration adulterated in the step of miscellaneous area is higher so that the ion concentration ladder between the source and drain doping area and lightly doped district
It spends larger, is easy to form abrupt junction between the source and drain doping area and the lightly doped district, partly be led so as to cause being formed by
Body structure is susceptible to gate induced drain Leakage Current phenomenon, and the reliability in turn resulting in semiconductor structure to be improved is asked
Topic.
The semiconductor structure can both be used for forming input and output device (IO Device), can also be used to form core
Heart device (Core Device), since the operating voltage of input and output device is higher than the operating voltage of core devices, input
It is even more serious that the problem of gate induced drain electric leakage, occurs for output device.
Further analysis, causes the higher reason of Doped ions concentration in the source and drain doping area to include：To the source
In the step of leakage epi dopant layer 170 carries out doping treatment in situ, the Doped ions of generally use higher concentration, described in reduction
The stress release that source and drain epi dopant layer 170 generates, and improve the lattice defect on 170 surface of source and drain epi dopant layer.Due to
The ion original position doping treatment that higher concentration is carried out to the source and drain epi dopant layer 170, accordingly results in the source to be formed
The Doped ions concentration for leaking doped region is higher.
In order to solve the above technical problem, the present invention provides a kind of forming methods of semiconductor structure, including：Base is provided
Bottom；Gate structure is formed on the substrate；Lightly doped district is formed in the substrate of the gate structure both sides；Formation is lightly doped
After area, source and drain heavily doped region, the doping of the source and drain heavily doped region are formed in the substrate positioned at the gate structure both sides
Ion concentration is more than the Doped ions concentration of the lightly doped district；It is formed after the source and drain heavily doped region, it is described light in part
In doped region formed transoid doped region, and the transoid doped region be located at the source and drain heavily doped region with residue lightly doped district it
Between, the Doped ions type of the transoid doped region is different from the Doped ions type of source and drain heavily doped region.
Technical solution provided by the invention is lightly doped after the step of forming the source and drain heavily doped region described in part
Transoid doped region is formed in area, and the transoid doped region is located between the source and drain heavily doped region and remaining lightly doped district, institute
The Doped ions type for stating transoid doped region is different from the Doped ions type of source and drain heavily doped region so that the source and drain weight
Phase counterdiffusion occurs for the Doped ions of the Doped ions of doped region and the transoid doped region, heavily doped to reduce the source and drain
The Doped ions concentration in miscellaneous area；Since the Doped ions concentration of the source and drain heavily doped region is reduced so that the source and drain weight
Doped ions concentration gradient between doped region and the lightly doped district is reduced, i.e., in the source and drain heavily doped region and described
It is easy to form graded transition junction between lightly doped district, the problem of so as to improve gate induced drain Leakage Current.
To make the above purposes, features and advantages of the invention more obvious and understandable, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
Fig. 4 to Figure 17 is the corresponding cross-section structure signal of one each step of embodiment forming method of semiconductor structure of the present invention
Figure.
With reference to figure 4, substrate is provided.Wherein Fig. 4 is along the cross-sectional view on 210 extending direction of fin.
The present embodiment by taking the semiconductor structure that is formed is fin field effect pipe as an example, the substrate include substrate 200 and
Multiple fins 210 on substrate 200.In other embodiments of the present invention, the semiconductor structure of formation is planar structure, phase
It answers, the substrate is planar substrate.
In the present embodiment, the substrate 200 include be used to form core devices first area I and be used to form input it is defeated
Go out the second area II of device.In other embodiments of the present invention, the substrate can also only include first area or second
One kind in region, the semiconductor structure being correspondingly formed are core devices or input and output device.
In the present embodiment, the material of the substrate 200 is silicon.In other embodiments of the present invention, the material of the substrate
Can also be germanium, SiGe, silicon carbide, GaAs or gallium indium.In other embodiments, the substrate can also be insulator
On silicon substrate or insulator on germanium substrate.
In the present embodiment, the material of the fin 210 is silicon.In other embodiments of the present invention, the material of the fin
Can also be germanium, SiGe, silicon carbide, GaAs or gallium indium.
In the present embodiment, isolation structure 220, the isolation structure are also formed on the substrate 200 that the fin 210 exposes
220 cover the partial sidewall of the fin 210, and 220 top of the isolation structure is less than 210 top of the fin.
The isolation structure 220 can play the role of the adjacent fin of electric isolation 210.
In the present embodiment, the material of the isolation structure 220 is silica.In other embodiments of the present invention, it is described every
Material from structure can also be silicon nitride or silicon oxynitride.
It in the present embodiment, is formed after the isolation structure 220,210 table of fin that can also expose in isolation structure 220
Face forms grid oxide layer (not shown), and the material of the grid oxide layer is silica.
With reference to figure 5 and Fig. 6, gate structure 230 is formed on the substrate.Wherein Fig. 5 is extended along perpendicular to fin 210
Cross-sectional view on direction, Fig. 6 are along the cross-sectional view being parallel on 210 extending direction of fin.
In the present embodiment, the gate structure 230 across positioned at first area I fin 210 and be located at second area
The fin 210 of II, and the covering of the gate structure 230 is positioned at the partial sidewall of the fin 210 of first area I and top and position
Partial sidewall in the fin 210 of second area II and top.
The gate structure 230 is polysilicon gate construction or metal gate structure.In the present embodiment, the gate structure
230 be the polysilicon gate construction in pseudo- grid technique.
The step of forming the gate structure 230 include：Form the grid layer for covering the fin 210；In the grid
Patterned hard mask 240 is formed on layer；It is grid layer described in mask etching with the hard mask 240, forms the grid knot
Structure 230；Retain the hard mask 240 being located on 230 top of the gate structure.
With reference to figure 7 and Fig. 8, offset side wall 250 is formed on the side wall of the gate structure 230.Wherein Fig. 7 is along vertical
Cross-sectional view on 210 extending direction of fin, Fig. 8 are along the cross-section structure being parallel on 210 extending direction of fin
Schematic diagram.
Position of the offset side wall 250 for lightly doped district defined in subsequent technique.
The offset side wall 250 includes single layer structure or laminated construction.The material of the offset side wall 250 includes：Nitrogen
One or more of SiClx, silicon oxide carbide and carbonitride of silicium.In the present embodiment, the material of the offset side wall 250 is
Silicon nitride.
With reference to figure 9, lightly doped district 251 is formed in the substrate of 230 both sides of the gate structure.Wherein Fig. 9 is along parallel
Cross-sectional view on 210 extending direction of fin.
The lightly doped district 251 provides impurity concentration gradient for the source and drain heavily doped region being subsequently formed, and reduction finishes and ditch
Electric field between road area can prevent the generation of hot carrier.
The step of forming the lightly doped district 251 include：Substrate positioned at 230 both sides of the gate structure is gently mixed
Heteroion injects, and forms the lightly doped district 251.Specifically, to the progress of fin 210 positioned at 230 both sides of the gate structure
Ion implanting is lightly doped, forms the lightly doped district 251.
Specifically, the injection ion that ion implanting is lightly doped be p-type ion when, the p-type ion include boron, gallium or
Person's indium；When the injection ion that ion implanting is lightly doped is N-type ion, the N-type ion includes phosphorus, arsenic or antimony.
In described the step of ion implanting is lightly doped, the angle of ion implanting direction and base top surface normal can neither
It is excessive can not be too small, the effect of control ion implanting direction and base top surface angle is the lightly doped district in order to make to be formed
251 close to semiconductor structure channel region.If the angle is excessive, it will cause the shadowing effect of semiconductor structure is more tight
Weight；If the angle is too small, the depth of ion implanting can be caused inadequate.In the present embodiment, the ion implanting of being lightly doped
In step, ion implanting direction and the angle of base top surface normal are 15 degree to 30 degree.
In conjunction with reference to figures 10 to Figure 12, formed after lightly doped district 251, in the base positioned at 230 both sides of the gate structure
Source and drain heavily doped region 280 is formed in bottom, the Doped ions concentration of the source and drain heavily doped region 280 is more than the lightly doped district 251
Doped ions concentration.
The step of below with reference to attached drawing to forming source and drain heavily doped region 280, is described in detail.
With reference to figure 10, side wall 260 is formed on the side wall of the gate structure 230.
In the present embodiment, the side wall 260 is formed on the offset side wall 250 on 230 side wall of gate structure.It is described
The effect of side wall 260 is the position for defining the source and drain heavily doped region being subsequently formed.
The side wall 260 includes single layer structure or laminated construction.The material of the side wall 260 includes：Silicon nitride, carbon oxygen
One or more of SiClx and carbonitride of silicium.In the present embodiment, the material of the side wall 260 is silicon nitride.
With reference to figure 11, etching forms groove 270 positioned at the part of substrate of 230 both sides of the gate structure.
The groove 270 provides Process ba- sis to be subsequently formed the source and drain heavily doped region.
In the present embodiment, the step of forming the groove 270, includes：Portion of the etching positioned at 230 both sides of the gate structure
Divide fin 210, forms the groove 270.
The shape of the groove 270 can be inverted trapezoidal or rectangular.In the present embodiment, the shape of the groove 270 is
Rectangular, the shape for the source and drain heavily doped region being subsequently formed accordingly is also rectangular.
The technique of part of substrate of the etching positioned at 230 both sides of the gate structure includes：Dry etch process or wet method
Etching technics.In the present embodiment, using dry etch process etching positioned at the part of substrate of 230 both sides of the gate structure, shape
At the groove 270.
With reference to figure 12, the source and drain epi dopant layer for filling the groove 270 is formed, the source and drain epi dopant layer is carried out
Doping treatment in situ forms the source and drain heavily doped region 280.
The Doped ions concentration of the source and drain heavily doped region 280 is more than the Doped ions concentration of the lightly doped district 251.This
In embodiment, the technique for forming the source and drain epi dopant layer for filling the groove 270 is selective epitaxial growth process.
In the present embodiment, in order to reduce the larger stress generated when source and drain epitaxial growth, and prevent from using ion implanting
Technique causes lattice defect, using source and drain epi dopant layer described in doping treatment in situ.It is mixed in the original position doping treatment step
Heteroion concentration is higher.For example, when the Doped ions of the source and drain heavily doped region 280 are p-type ion, the original position doping treatment
Processing step in, to the source and drain epi dopant layer doping p-type ion a concentration of 6E20atom/cm3Extremely
1.8E21atom/cm3.Therefore, the Doped ions concentration for the source and drain heavily doped region 280 being correspondingly formed is higher.
Specifically, when the Doped ions of the doping treatment in situ are p-type ion, the p-type ion include boron, gallium or
Indium；When the Doped ions of the original position doping treatment are N-type ion, the N-type ion includes phosphorus, arsenic or antimony.
In conjunction with reference to figures 13 to Figure 15, formed after the source and drain heavily doped region 280, the shape in the lightly doped district of part
At transoid doped region 261, and the transoid doped region 261 be located at the source and drain heavily doped region 280 and remaining lightly doped district 251 it
Between, the Doped ions type of the transoid doped region 261 is different from the Doped ions type of the source and drain heavily doped region 280.
The step of below with reference to attached drawing to forming transoid doped region 261, is described in detail.
With reference to figure 13 side wall 260 of partial width is removed along being parallel on the direction of substrate surface.
In the present embodiment, the effect for removing the side wall 260 of partial width is so that remaining side wall 260 is for defining follow-up shape
At the position of the transoid doped region.
Along being parallel on the direction of substrate surface, the width dimensions of removal partial width side wall 260 can neither be excessive
It cannot be too small.If the width dimensions for removing partial width side wall 260 are excessive, it can make the position of transoid doped region being subsequently formed
Set it is closer from channel region, so as to cause semiconductor structure resistance increase；If removing the width dimensions mistake of partial width side wall 260
It is small, then the depth that the Doped ions for the transoid doped region being subsequently formed inject can be made inadequate.In the present embodiment, it is parallel on edge
On the direction of substrate surface, the width dimensions of removal partial width side wall 260 are within the scope of 15nm to 50nm.
In order to preferably control the width dimensions of removal partial width side wall 260, part is removed using dry etch process
The side wall 260 of width；The parameter of the dry etch process includes：Etching gas is CH3F、N2And O2Mixed gas,
CH3The gas flow of F is 8sccm to 50sccm, N2Gas flow be 100sccm to 500sccm, O2Gas flow be
5sccm to 200sccm, pressure are 10mtorr to 200mtorr, and etch period is 4s to 50s, and RF power is 50 to 500W, electricity
Pressure is 30V to 100V.
With reference to figure 14, transoid ion implanting is carried out to the part of substrate of the lightly doped district 251 of the exposing of remaining side wall 260,
Transoid doped region 261 is formed in the lightly doped district 251.
The effect of the transoid doped region 261 is to reduce the Doped ions concentration of the source and drain heavily doped region 280 so that institute
It states and forms graded transition junction between source and drain heavily doped region 280 and the lightly doped district 251, to alleviate gate induced drain Leakage Current
The problem of.
Specifically, since the transoid doped region 261 is located at the source and drain heavily doped region 280 and the lightly doped district 251
Between so that the Doped ions of the high-concentration dopant ion of the source and drain heavily doped region 280 and the transoid doped region 261 occur
Phase counterdiffusion, to reduce the Doped ions concentration of the source and drain heavily doped region 280.
If the semiconductor structure does not form the transoid doped region, since the source and drain heavily doped region is gently mixed with described
The Doped ions concentration gradient in miscellaneous area is larger, causes to form mutation between the source and drain heavily doped region and the lightly doped district
Knot, to cause gate induced drain Leakage Current the problem of, are even more serious.In the present embodiment, by the source and drain heavy doping
The problem of graded transition junction being formed between area 280 and the lightly doped district 251, improving gate induced source electrode Leakage Current.
In the present embodiment, in the lightly doped district 251 formed transoid doped region 261 the step of include：To remaining side wall
The part fin 210 of 260 lightly doped districts 251 exposed carries out transoid ion implanting, forms the transoid doped region 261.
In the step of transoid ion implanting being carried out to the part of substrate of lightly doped district 251, ion implanting direction and substrate top
The angle of portion's surface normal can neither it is excessive can not be too small.If the angle is too small, the depth of transoid ion implanting can be caused
Degree is inadequate；If the angle is excessive, the shadowing effect of semiconductor structure can be caused more serious.In the present embodiment, ion note
It is 5 degree to 20 degree to enter direction and the angle of base top surface normal.
Mixing for the source and drain heavily doped region 280 is adjusted by controlling the ion implanting depth of the transoid doped region 261
Heteroion concentration.The ion implanting depth of the transoid doped region 261 is bigger, then the Doped ions of the transoid doped region 261
It is bigger with the diffusion of the source and drain heavily doped region 280, so that the Doped ions concentration of the source and drain heavily doped region 280
The degree of reduction is bigger.The ion implanting depth of the transoid doped region 261 cannot be too small, otherwise the source and drain can be caused heavily doped
The degree that the Doped ions concentration in miscellaneous area 280 reduces is too small, thus the problem of also will produce gate induced drain Leakage Current.Cause
This, in the present embodiment, the bottom of the transoid doped region 261 is less than the bottom of the lightly doped district 251.In other realities of the invention
It applies in example, the bottom of the transoid doped region 261 can also be flushed with the bottom of the lightly doped district 251 (with reference to figure 15).
When the Doped ions type of the source and drain heavily doped region 280 is p-type, the Doped ions of the transoid doped region 261
Type is N-type；Alternatively, when the Doped ions type of the source and drain heavily doped region 280 is N-type, the transoid doped region 261 is mixed
Heteroion type is p-type.
The Doped ions of the transoid doped region 261 are p-type ion；Transoid is carried out to the part of substrate of lightly doped district 251
In the step of ion implanting, the technological parameter of the transoid ion implanting includes：The ion of the transoid ion implanting is B ions
When, the implantation dosage of the B ions is 1.0E13atom/cm2To 1.0E15atom/cm2, Implantation Energy is 0.5kev to 5kev.
The Doped ions of the transoid doped region 261 are N-type ion；The part fin 210 of lightly doped district 251 is carried out instead
In the step of type ion implanting, the technological parameter of the transoid ion implanting includes：The ion of the transoid ion implanting is As
Ion either P ion when the As ions or the implantation dosage of P ion be 1.0E13atom/cm2To 1.0E15atom/cm2,
Implantation Energy is 1kev to 15kev.
In conjunction with reference to figure 16 and Figure 17, formed after the transoid doped region 261, the forming method further includes：It is formed
Cover the etching stop layer 290 of the fin 210 and the gate structure 230；It is formed after the etching stop layer 290,
Ion implanting processing is carried out to the source and drain heavily doped region 280.
It, can also be in institute after the step of carrying out ion implanting processing to the source and drain heavily doped region 280 in the present embodiment
It states 280 top of source and drain heavily doped region and forms conductive plunger, the etching stop layer 290 provides to be subsequently formed the conductive plunger
Process ba- sis.The material of the etching stop layer 290 is silicon nitride.
In the present embodiment, the purpose that ion implanting processing is carried out to the source and drain heavily doped region 280 is to reduce half formed
The contact resistance of conductor structure, to improve the electric property of the semiconductor structure.
Correspondingly, the present invention also provides a kind of semiconductor structure, with reference to figure 14, the semiconductor structure includes：Substrate；Position
In the gate structure 230 in the substrate；Lightly doped district 251 in the substrate of 230 both sides of the gate structure；Positioned at institute
State the source and drain heavily doped region 280 in the substrate of 230 both sides of gate structure, the Doped ions concentration of the source and drain heavily doped region 280
More than it is described be lightly doped 251 Doped ions concentration；Transoid doped region 261 in the part lightly doped district 251, and institute
Transoid doped region 261 is stated between the source and drain heavily doped region 280 and the lightly doped district 251, the transoid doped region 261
Doped ions type it is different from the Doped ions type of the source and drain heavily doped region 280.
Semiconductor structure provided in this embodiment is described in detail below with reference to attached drawing 14.
The present embodiment by taking the semiconductor structure that is formed is fin field effect pipe as an example, the substrate include substrate 200 and
Multiple fins 210 on substrate 200.In other embodiments of the present invention, the semiconductor structure of formation is planar structure, phase
It answers, the substrate is planar substrate.
In the present embodiment, the substrate 200 include be used to form core devices first area I and be used to form input it is defeated
Go out the second area II of device.In other embodiments of the present invention, the substrate can also only include first area or second
One kind in region, the semiconductor structure being correspondingly formed are core devices or input and output device.
In the present embodiment, the material of the substrate 200 is silicon.In other embodiments of the present invention, the material of the substrate
Can also be germanium, SiGe, silicon carbide, GaAs or gallium indium.In other embodiments, the substrate can also be insulator
On silicon substrate or insulator on germanium substrate.
In the present embodiment, the material of the fin 210 is silicon.In other embodiments of the present invention, the material of the fin
Can also be germanium, SiGe, silicon carbide, GaAs or gallium indium.
In the present embodiment, also there is isolation structure 220, the isolation structure on the substrate 200 that the fin 210 exposes
220 cover the partial sidewall of the fin 210, and 220 top of the isolation structure is less than 210 top of the fin.
The isolation structure 220 can play the role of the adjacent fin of electric isolation 210.
In the present embodiment, the material of the isolation structure 220 is silica.In other embodiments of the present invention, it is described every
Material from structure can also be silicon nitride or silicon oxynitride.
In the present embodiment, the gate structure 230 covers the partial sidewall of the fin 210 across the fin 210
The top and.
The gate structure 230 is polysilicon gate construction or metal gate structure.In the present embodiment, the gate structure
230 be the polysilicon gate construction in pseudo- grid technique.
In the present embodiment, the semiconductor structure further includes：Offset side wall on 230 side wall of the gate structure
250.The offset side wall 250 is used to define the position of the lightly doped district 251.
The offset side wall 250 includes single layer structure or laminated construction.The material of the offset side wall 250 includes：Nitrogen
One or more of SiClx, silicon oxide carbide and carbonitride of silicium.In the present embodiment, the material of the offset side wall 250 is
Silicon nitride.
In the present embodiment, the lightly doped district 251 is located in the fin 210 of 230 both sides of the gate structure.It is described gently to mix
The effect in miscellaneous area 251 is to provide impurity concentration gradient for the source and drain heavily doped region 280, reduces the electricity between knot and channel region
, prevent the generation of hot carrier.
Specifically, the injection ion that ion implanting is lightly doped be p-type ion when, p-type ion include boron, gallium or
Indium；When the injection ion that ion implanting is lightly doped is N-type ion, N-type ion includes phosphorus, arsenic or antimony.
In the present embodiment, the semiconductor structure further includes：Side wall 260 on 250 side wall of the offset side wall.Institute
State position of the side wall 260 for defining the source and drain heavily doped region 280.
The side wall 260 includes single layer structure or laminated construction.The material of the side wall 260 includes：Silicon nitride, carbon oxygen
One or more of SiClx and carbonitride of silicium.In the present embodiment, the material of the side wall 260 is silicon nitride.
In the present embodiment, the source and drain heavily doped region 280 is located in the fin 210 of 230 both sides of the gate structure, described
Transoid doped region 261 is located in the part fin 210 of the lightly doped district 251.
The effect of the transoid doped region 261 is to reduce the Doped ions concentration of the source and drain heavily doped region 280 so that institute
It states and forms graded transition junction between source and drain heavily doped region 280 and the lightly doped district 251, to alleviate gate induced drain Leakage Current
The problem of.
Specifically, since the transoid doped region 261 is located at the source and drain heavily doped region 280 and the lightly doped district 251
Between so that the Doped ions of the high-concentration dopant ion of the source and drain heavily doped region 280 and the transoid doped region 261 occur
Phase counterdiffusion, to reduce the Doped ions concentration of the source and drain heavily doped region 280.
Specifically, the source and drain heavily doped region is adjusted by controlling the ion implanting depth of the transoid doped region 261
280 Doped ions concentration.The ion implanting depth of the transoid doped region 261 is bigger, then the transoid doped region 261 is mixed
The diffusion of heteroion and the source and drain heavily doped region 280 is bigger so that the doping of the source and drain heavily doped region 280 from
The degree that sub- concentration reduces is bigger.Therefore, in the present embodiment, the bottom of the transoid doped region 261 is less than the lightly doped district
251 bottom.In other embodiments of the present invention, the bottom of the transoid doped region 261 can also be with the lightly doped district 251
Bottom flush (with reference to figure 15).
Specifically, when the Doped ions type of the source and drain heavily doped region 280 is p-type, the transoid doped region 261 is mixed
Heteroion type is N-type；Alternatively, when the Doped ions type of the source and drain heavily doped region 280 is N-type, the transoid doped region
261 Doped ions type is p-type.
Although present disclosure is as above, present invention is not limited to this.Any those skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (20)
1. a kind of forming method of semiconductor structure, which is characterized in that including：
Substrate is provided；
Gate structure is formed on the substrate；
Lightly doped district is formed in the substrate of the gate structure both sides；
It is formed after lightly doped district, forms source and drain heavily doped region, the source and drain in the substrate positioned at the gate structure both sides
The Doped ions concentration of heavily doped region is more than the Doped ions concentration of the lightly doped district；
It is formed after the source and drain heavily doped region, forms transoid doped region in the lightly doped district of part, and the transoid is mixed
Miscellaneous area is located between the source and drain heavily doped region and remaining lightly doped district, the Doped ions type of the transoid doped region with it is described
The Doped ions type of source and drain heavily doped region is different.
2. the forming method of semiconductor structure as described in claim 1, which is characterized in that the doping of the source and drain heavily doped region
When ionic type is p-type, the Doped ions type of the transoid doped region is N-type；
Alternatively, when the Doped ions type of the source and drain heavily doped region is N-type, the Doped ions type of the transoid doped region is
P-type.
3. the forming method of semiconductor structure as described in claim 1, which is characterized in that the base in the gate structure both sides
The step of formation lightly doped district, includes in bottom：Substrate positioned at the gate structure both sides is carried out that ion implanting, shape is lightly doped
At the lightly doped district.
4. the forming method of semiconductor structure as claimed in claim 3, which is characterized in that being located at the gate structure both sides
Substrate the step of carrying out that ion implanting is lightly doped in, the angle of ion implanting direction and base top surface normal be 15 degree extremely
30 degree.
5. the forming method of semiconductor structure as described in claim 1, which is characterized in that the shape in the lightly doped district of part
Include at the step of transoid doped region：Transoid ion implanting is carried out to the part of substrate of lightly doped district, forms the transoid doping
Area.
6. the forming method of semiconductor structure as claimed in claim 5, which is characterized in that the part of substrate of lightly doped district into
In the step of row transoid ion implanting, ion implanting direction and the angle of base top surface normal are 5 degree to 20 degree.
7. the bottom of the forming method of semiconductor structure as described in claim 1, the transoid doped region is lightly doped with described
The bottom in area flushes；Alternatively, the bottom of the transoid doped region is less than the bottom of the lightly doped district.
8. the forming method of semiconductor structure as claimed in claim 5, which is characterized in that the doping of the transoid doped region from
Son is p-type ion；In the step of transoid ion implanting being carried out to the part of substrate of lightly doped district, the work of the transoid ion implanting
Skill parameter includes：When the ion of the transoid ion implanting is B ions, the implantation dosage of the B ions is 1.0E13atom/
cm2To 1.0E15atom/cm2, Implantation Energy is 0.5kev to 5kev.
9. the forming method of semiconductor structure as claimed in claim 5, which is characterized in that the doping of the transoid doped region from
Son is N-type ion；In the step of transoid ion implanting being carried out to the part of substrate of lightly doped district, the work of the transoid ion implanting
Skill parameter includes：The ion of the transoid ion implanting be As ions either P ion when the As ions or P ion note
It is 1.0E13atom/cm to enter dosage2To 1.0E15atom/cm2, Implantation Energy is 1kev to 15kev.
10. the forming method of semiconductor structure as described in claim 1, which is characterized in that form the source and drain heavily doped region
The step of include：
Etching forms groove positioned at the part of substrate of the gate structure both sides；
The source and drain epi dopant layer for filling the groove is formed, doping treatment in situ, shape are carried out to the source and drain epi dopant layer
At the source and drain heavily doped region.
11. the forming method of semiconductor structure as claimed in claim 10, which is characterized in that the source and drain heavily doped region is mixed
Heteroion is p-type ion；It is described original position doping treatment processing step in, to the source and drain epi dopant layer doping p-type from
A concentration of 6E20atom/cm of son3To 1.8E21atom/cm3。
12. the forming method of semiconductor structure as described in claim 1, which is characterized in that formed lightly doped district the step of it
Afterwards, before the step of forming source and drain heavily doped region, the forming method further includes：
Side wall is formed on the side wall of the gate structure.
13. the forming method of semiconductor structure as claimed in claim 12, which is characterized in that form the transoid doped region
Step includes：
Along being parallel on the direction of substrate surface, the side wall of partial width is removed, the lightly doped district that remaining side wall is exposed
Part of substrate carries out transoid ion implanting, and transoid doped region is formed in the lightly doped district.
14. the forming method of semiconductor structure as claimed in claim 13, which is characterized in that be parallel to substrate surface on edge
On direction, the width dimensions of partial width side wall are removed within the scope of 15nm to 50nm.
15. the forming method of semiconductor structure as claimed in claim 13, which is characterized in that be parallel to substrate surface on edge
On direction, the technique for removing the side wall of partial width is dry etch process；The parameter of the dry etch process includes：Etching
Gas is CH3F、N2And O2Mixed gas, CH3The gas flow of F is 8sccm to 50sccm, N2Gas flow be
100sccm to 500sccm, O2Gas flow be 5sccm to 200sccm, pressure is 10mtorr to 200mtorr, when etching
Between be 4s to 50s, RF power be 50 to 500W, voltage be 30V to 100V.
16. the forming method of semiconductor structure as claimed in claim 12, which is characterized in that the side wall includes single layer structure
Or laminated construction；The material of the side wall includes：One or more of silicon nitride, carbonitride of silicium and silicon oxide carbide.
17. the forming method of semiconductor structure as described in claim 1, which is characterized in that the substrate include substrate and
Multiple discrete fins on the substrate；
The step of formation gate structure includes on the substrate：It is developed across the gate structure of the fin, the grid knot
Structure covers the atop part and side wall of the fin.
18. a kind of semiconductor structure, which is characterized in that including：
Substrate；
Gate structure in the substrate；
Lightly doped district in the substrate of the gate structure both sides；
Source and drain heavily doped region in the substrate of the gate structure both sides, the Doped ions concentration of the source and drain heavily doped region
More than the Doped ions concentration being lightly doped；
Transoid doped region in the lightly doped district of part, and the transoid doped region be located at the source and drain heavily doped region with
Between the lightly doped district, the Doped ions type of the Doped ions type of the transoid doped region and the source and drain heavily doped region
It is different.
19. semiconductor structure as claimed in claim 18, which is characterized in that gently mixed with described the bottom of the transoid doped region
Miscellaneous bottom flushes；Alternatively, the bottom of the transoid doped region is less than the bottom of the lightly doped district.
20. semiconductor structure as claimed in claim 18, which is characterized in that the substrate include substrate and be located at the lining
Multiple discrete fins on bottom；
The gate structure covers partial sidewall and the top of the fin across the fin；
The lightly doped district is located in the fin of the gate structure both sides；
The source and drain heavily doped region is located in the fin of the gate structure both sides；
The transoid doped region is located in the part fin of the lightly doped district.
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| CN111613672A (en) * | 2019-02-22 | 2020-09-01 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor structure and forming method thereof |
| CN111613672B (en) * | 2019-02-22 | 2023-09-15 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor structure and forming method thereof |
| CN111725067A (en) * | 2019-03-21 | 2020-09-29 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor structure and forming method thereof |
| CN113327855A (en) * | 2020-02-28 | 2021-08-31 | 中芯国际集成电路制造（天津）有限公司 | Semiconductor structure and forming method thereof |
| CN113327855B (en) * | 2020-02-28 | 2022-07-26 | 中芯国际集成电路制造（天津）有限公司 | Semiconductor structure and forming method thereof |
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