CN108581816B - Three-phase flow dynamic pressure cavitation polishing method and device - Google Patents
Three-phase flow dynamic pressure cavitation polishing method and device Download PDFInfo
- Publication number
- CN108581816B CN108581816B CN201810280953.6A CN201810280953A CN108581816B CN 108581816 B CN108581816 B CN 108581816B CN 201810280953 A CN201810280953 A CN 201810280953A CN 108581816 B CN108581816 B CN 108581816B
- Authority
- CN
- China
- Prior art keywords
- polishing
- platform
- workpiece
- abrasive
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 218
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000002245 particle Substances 0.000 claims abstract description 94
- 239000007788 liquid Substances 0.000 claims abstract description 34
- 238000001125 extrusion Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 11
- 238000007517 polishing process Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 6
- 238000004064 recycling Methods 0.000 claims description 5
- 230000003068 static effect Effects 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009172 bursting Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000005514 two-phase flow Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A three-phase flow hydrodynamic cavitation polishing method is characterized in that a free-form surface workpiece is fixed at the bottom of a polishing solution container through a clamp, a cylindrical polishing tool is not directly contacted with the free-form surface workpiece and is immersed in polishing solution, and a serial-parallel connection polishing platform controls the pose of the polishing tool relative to the workpiece, so that a tiny processing gap is always kept between the tool and the surface of the workpiece; the servo motor drives the cylindrical polishing tool to rotate at a high speed above the workpiece through the connecting device, so that polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool, and the polishing liquid generates extrusion when passing through a wedge-shaped gap between the tool and the workpiece, so that the pressure is improved, and dynamic pressure is generated; abrasive particles are pressed into the surface of the workpiece to generate surface and sub-surface damage, and the surface of the workpiece is polished with extremely high precision. The invention improves the polishing efficiency on the premise of not causing the damage of the surface and the sub-surface.
Description
Technical Field
The invention relates to the technical field of ultra-precision machining, in particular to a three-phase flow hydrodynamic cavitation polishing method and device.
Background
With the development of science and technology, the ultra-precision machining technology is an important development direction of modern manufacturing science and technology and an important foundation of future advanced manufacturing technology. Due to the rise of ultra-precision machining, the surface roughness and the like of most of workpieces are obviously improved at present, and meanwhile, the performance and the reliability of products are also improved. The problem that follows is that the precision requirement of parts in different fields is increasingly higher. In order to obtain higher processing precision and surface quality, ultra-smooth surface processing needs to be realized on the surfaces of precision optical parts and functional crystal materials. The ultra-smooth surface processing technology occupies a very important position in the ultra-precision processing technology, and is an important embodiment of the national technological level and the comprehensive national force. However, in general, in order to remove atomic-level materials, ultra-smooth surface machining uses a small force to machine the surface of a workpiece, the machining time is often long, the machining efficiency is very low, and the machining cost is also high. Therefore, the technical problems to be solved in the field of precision manufacturing are that how to improve the processing efficiency and reduce the processing under the condition of ensuring that the surface and sub-surface damage is not caused.
In order to achieve ultra-smooth surface polishing of these parts, a variety of ultra-smooth surface processing methods have been developed domestically. The existing ultra-smooth surface processing methods can be generally divided into two types, one is to process by directly contacting a processing tool with the surface of a workpiece, such as: grinding, polishing, etc. conventionally using a sanding belt, a grinding wheel, or other flexible material as a tool. This type of machining method utilizes micro-cutting of the workpiece surface by the fine abrasive particles on the tool to remove micro-protrusions on the workpiece surface, thereby achieving a polishing effect. Although the processing efficiency is high, there are certain disadvantages and limitations.
1. Due to different grain diameters of the abrasive grains, the polishing acting force of the abrasive grains on the surface of the tool is not uniform, and the surface and subsurface damage to the workpiece is inevitable.
2. Due to the contact type processing mode of the tool, some workpieces with special appearance structures cannot be processed, such as the inner walls, holes and other parts of the workpieces, and the workpieces cannot be processed due to the fact that the tool is difficult to extend into the workpieces. Another type of machining method does not rely on the machining tool being in direct contact with the workpiece surface for polishing, such as: fluid polishing, electropolishing, chemical polishing, magnetic lapping, and the like. Of this class of processes, fluid polishing is most widely used. The fluid polishing is realized by flushing the surface of a workpiece by high-speed flowing liquid and abrasive particles carried by the liquid. The current two-phase flow polishing method also has some disadvantages:
1. the fluid flow rate is not high and the flow direction is single. The flow velocity of the fluid relative to the surface of the workpiece can not reach a turbulent flow state, but is in a laminar flow state with a single flow direction, so that the impact directions of abrasive particles in the polishing solution are consistent, scratches are generated on the workpiece, and the surface and the subsurface are damaged.
2. Because the flow directions of the abrasive particles are basically consistent, only one layer of abrasive particles attached to the surface of the workpiece plays a polishing role, and the polishing efficiency is low.
3. The recycling efficiency of the abrasive flow is low, abrasive particles are deposited in the machining process, and the polishing effect and efficiency are affected.
Disclosure of Invention
In order to overcome the defect of low polishing efficiency of the conventional polishing method, the invention provides a three-phase flow hydrodynamic cavitation polishing method and a three-phase flow hydrodynamic cavitation polishing device for improving the polishing efficiency on the premise of not causing damage to the surface and the subsurface when a free-form surface workpiece is polished.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a three-phase flow hydrodynamic cavitation polishing method is characterized in that a free-form surface workpiece is fixed at the bottom of a polishing solution container through a clamp, a serial-parallel platform consisting of a three-degree-of-freedom serial platform and a three-rod parallel platform is arranged above the container, and a cylindrical polishing tool and a servo motor are arranged at the tail end of the serial-parallel platform; abrasive flow conveying pumps are arranged on two sides of the polishing solution container and connected with the stirrer on the other side through abrasive flow conveying hoses; the ultrasonic generator is arranged at the tail end of the multi-degree-of-freedom machine; the cylindrical polishing tool is not directly contacted with the free-form surface workpiece and is immersed in the polishing solution, and the serial-parallel connection polishing platform controls the pose of the polishing tool relative to the workpiece, so that a tiny processing gap is always kept between the tool and the surface of the workpiece; the servo motor drives the cylindrical polishing tool to rotate at a high speed above the workpiece through the connecting device, so that polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool, and the polishing liquid generates extrusion when passing through a wedge-shaped gap between the tool and the workpiece, so that the pressure is improved, and dynamic pressure is generated; under the action of dynamic pressure, abrasive particles added into the polishing solution continuously approximate to a horizontal angle to impact a microcosmic convex part on the surface of the workpiece, so that a certain material is removed from the workpiece; the distance and the angle between an ultrasonic bubble generator arranged at the tail end of the mechanical arm and the tool are adjusted, so that the amplitude transformer is aligned with a micro-gap between the tool and a workpiece to work, cavitation bubbles are generated at the tail end of the amplitude transformer, the cavitation bubbles are continuously expanded and compressed under the action of a positive pressure phase and a negative pressure phase of ultrasonic waves, and the cavitation bubbles are collapsed due to the pressure change of a dynamic pressure area when passing through a liquid dynamic pressure area; the polishing solution mixed with the abrasive particles is driven by the energy generated by collapse, the impact speed of the abrasive particles is increased, the impact randomness of the abrasive particles is increased, the polishing efficiency is improved, the workpiece is prevented from being scratched due to flowing in the single direction of the abrasive particles, meanwhile, the workpiece is prevented from being in direct contact with the tool, the abrasive particles are pressed into the surface of the workpiece to cause surface and sub-surface damage, and the extremely-high-precision polishing of the surface of the workpiece is realized.
Furthermore, in order to avoid the deposition of abrasive particles in the polishing solution during the polishing process, the stirrer and two abrasive particle flow delivery pumps arranged on two sides of the polishing solution container are connected into an abrasive particle flow circulating system by using an abrasive particle flow delivery hose.
Furthermore, the surface of the cylindrical polishing tool is smooth or provided with a groove, the free-form surface workpiece is fixed at the bottom of the polishing solution container through a clamp, and the tool and the workpiece are completely immersed in the polishing solution mixed with the abrasive particles; the three-rod parallel platform is arranged on a Z-direction guide rail of the three-degree-of-freedom series platform to form a series-parallel platform, the polishing tool is arranged at the tail end of the series-parallel mechanism, the position of the polishing tool is controlled by the series platform along the direction X, Y, Z, and the parallel platform controls the posture of the polishing tool, so that the posture of the polishing tool relative to a workpiece can be accurately controlled.
Furthermore, the tool keeps a micro gap above the workpiece, meanwhile, the servo motor drives the polishing tool to rotate at a high speed, the polishing solution mixed with the abrasive particles rotates together under the action of the high-speed rotation of the tool, and the pressure is increased due to extrusion when the polishing solution passes through the wedge-shaped gap between the tool and the workpiece, so that dynamic pressure is generated; under the action of dynamic pressure, abrasive grains added into the polishing liquid continuously approximate to a horizontal angle to impact a microcosmic convex part on the surface of the workpiece, so that a certain amount of material is removed from the workpiece.
The ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm through the connecting device, and the multi-degree-of-freedom mechanical arm continuously adjusts the pose of the amplitude transformer of the ultrasonic generator relative to the dynamic pressure area, so that cavitation bubbles generated at the tail end of the amplitude transformer just pass through the dynamic pressure area. When the ultrasonic bubble generator works, the tail end of the amplitude transformer generates a large amount of cavitation bubbles, the cavitation bubbles continuously expand and contract under the action of a positive pressure phase and a negative pressure phase of ultrasonic waves, and the cavitation bubbles are quickly collapsed due to pressure change of a dynamic pressure area when passing through a liquid dynamic pressure area.
The abrasive particle flow circulating system consists of two abrasive particle flow conveying pumps, a stirrer and an abrasive particle flow conveying hose. The two abrasive flow conveying pumps are respectively arranged on two sides of the polishing platform and are connected with the stirrer on the other side through abrasive flow conveying hoses. The liquid-solid two-phase abrasive particle flow circulating system can effectively prevent abrasive particles from being deposited at the bottom of the polishing solution container, and improves the recycling efficiency of abrasive particle flow, so that the polishing efficiency is improved.
A three-phase flow hydrodynamic cavitation polishing device comprises a three-degree-of-freedom serial platform, a three-rod parallel platform, polishing liquid mixed with abrasive particles, an abrasive particle flow conveying pump, an abrasive particle flow conveying hose, a stirrer, a multi-degree-of-freedom mechanical arm, a workpiece, a polishing liquid container, a clamp, a servo motor, a coupler, a polishing tool and an ultrasonic bubble generator, wherein the three-degree-of-freedom serial platform arranged above the polishing liquid container mainly comprises X, Y, Z-direction guide rails, and the three-direction guide rails are respectively driven by motors and used for controlling the position of the polishing tool; the three-rod parallel platform consists of a movable platform and a static platform, wherein the movable platform consists of three telescopic rods and is used for controlling the posture of the polishing tool; the three-rod parallel platform is arranged on a Z-direction guide rail of the three-degree-of-freedom series platform to form a series-parallel series-parallel platform, and the polishing tool is connected with the servo motor and arranged at the tail end of the series-parallel mechanism, so that the polishing tool and a workpiece rotate at a high speed while maintaining a micro gap, and a dynamic pressure area is generated; the free-form surface workpiece is fixed at the bottom of the polishing solution container through a clamp and is completely immersed in the polishing solution mixed with the abrasive particles; the two abrasive flow conveying pumps are respectively arranged on two sides of the polishing solution container and connected with the stirrer on the other side through an abrasive flow conveying hose so as to avoid abrasive deposition in the polishing process; the ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm through the connecting device, so that cavitation bubbles generated at the tail end of the amplitude transformer of the ultrasonic generator just pass through the dynamic pressure area.
The polishing tool is a cylindrical polishing tool, the cylindrical polishing tool is connected with the servo motor through a connecting device and is arranged at the tail end of the three-rod parallel platform, and the surface of the tool is grooved or smooth.
The two abrasive flow conveying pumps are respectively arranged on two sides of the polishing platform and are connected with the stirrer and the polishing solution container through abrasive flow conveying hoses; the abrasive particle flow circulating system continuously circularly stirs and conveys the abrasive particle flow in the polishing container in the polishing process.
The invention has the following beneficial effects: the polishing efficiency is improved on the premise of not causing damage to the surface and the sub-surface.
Drawings
FIG. 1 is a schematic view of the overall structure of a three-phase hydrodynamic cavitation polishing apparatus according to the present invention.
FIG. 2 is a schematic view of a partial structure of the three-phase hydrodynamic cavitation polishing apparatus of the present invention.
In the figure, a 1-Z direction guide rail motor, a 2-X direction guide rail motor, a 14-Y direction guide rail motor, a 3-Y direction guide rail, a 4-X direction guide rail, a 5-static platform, a 6-movable platform, a 7-polishing solution mixed with abrasive particles, an 8(11) -abrasive particle flow delivery pump, a 9-abrasive particle flow delivery hose, a 10-stirrer, a 12-Z direction guide rail, a 13-multi-degree-of-freedom mechanical arm, a 15-workpiece, a 16-polishing solution container, a 17-workpiece clamp, an 18-telescopic rod, a 19-telescopic rod motor, a 20-servo motor, a 21-coupler, a 22-cylindrical polishing tool with a groove, a 23-coupler and a 24-ultrasonic bubble generator.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1 and 2, a three-phase hydrodynamic cavitation polishing method, a free-form surface workpiece is fixed at the bottom of a polishing solution container through a clamp, a serial-parallel platform composed of a three-degree-of-freedom serial platform and a three-rod parallel platform is arranged above the container, and a cylindrical polishing tool and a servo motor are arranged at the tail end of the serial-parallel platform; abrasive flow conveying pumps are arranged on two sides of the polishing solution container and connected with the stirrer on the other side through abrasive flow conveying hoses; the ultrasonic generator is arranged at the tail end of the multi-degree-of-freedom machine; the cylindrical polishing tool is not directly contacted with the free-form surface workpiece and is immersed in the polishing solution, and the serial-parallel connection polishing platform controls the pose of the polishing tool relative to the workpiece, so that a tiny processing gap is always kept between the tool and the surface of the workpiece; the servo motor drives the cylindrical polishing tool to rotate at a high speed above the workpiece through the connecting device, so that polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool, and the polishing liquid generates extrusion when passing through a wedge-shaped gap between the tool and the workpiece, so that the pressure is improved, and dynamic pressure is generated; under the action of dynamic pressure, abrasive particles added into the polishing solution continuously approximate to a horizontal angle to impact a microcosmic convex part on the surface of the workpiece, so that a certain material is removed from the workpiece; the distance and the angle between an ultrasonic bubble generator arranged at the tail end of the mechanical arm and the tool are adjusted, so that the amplitude transformer is aligned with a micro-gap between the tool and a workpiece to work, cavitation bubbles are generated at the tail end of the amplitude transformer, the cavitation bubbles are continuously expanded and compressed under the action of a positive pressure phase and a negative pressure phase of ultrasonic waves, and the cavitation bubbles are collapsed due to the pressure change of a dynamic pressure area when passing through a liquid dynamic pressure area; the polishing solution mixed with the abrasive particles is driven by the energy generated by collapse, the impact speed of the abrasive particles is increased, the impact randomness of the abrasive particles is increased, the polishing efficiency is improved, the workpiece is prevented from being scratched due to flowing in the single direction of the abrasive particles, meanwhile, the workpiece is prevented from being in direct contact with the tool, the abrasive particles are pressed into the surface of the workpiece to cause surface and sub-surface damage, and the extremely-high-precision polishing of the surface of the workpiece is realized.
Furthermore, in order to avoid the deposition of abrasive particles in the polishing solution during the polishing process, the stirrer and two abrasive particle flow delivery pumps arranged on two sides of the polishing solution container are connected into an abrasive particle flow circulating system by using an abrasive particle flow delivery hose.
Furthermore, the surface of the cylindrical polishing tool is smooth or provided with a groove, the free-form surface workpiece is fixed at the bottom of the polishing solution container through a clamp, and the tool and the workpiece are completely immersed in the polishing solution mixed with the abrasive particles; the three-rod parallel platform is arranged on a Z-direction guide rail of the three-degree-of-freedom series platform to form a series-parallel platform, the polishing tool is arranged at the tail end of the series-parallel mechanism, the position of the polishing tool is controlled by the series platform along the direction X, Y, Z, and the parallel platform controls the posture of the polishing tool, so that the posture of the polishing tool relative to a workpiece can be accurately controlled.
Furthermore, the tool keeps a micro gap above the workpiece, meanwhile, the servo motor drives the polishing tool to rotate at a high speed, the polishing solution mixed with the abrasive particles rotates together under the action of the high-speed rotation of the tool, and the pressure is increased due to extrusion when the polishing solution passes through the wedge-shaped gap between the tool and the workpiece, so that dynamic pressure is generated; under the action of dynamic pressure, abrasive grains added into the polishing liquid continuously approximate to a horizontal angle to impact a microcosmic convex part on the surface of the workpiece, so that a certain amount of material is removed from the workpiece.
The ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm through the connecting device, and the multi-degree-of-freedom mechanical arm continuously adjusts the pose of the amplitude transformer of the ultrasonic generator relative to the dynamic pressure area, so that cavitation bubbles generated at the tail end of the amplitude transformer just pass through the dynamic pressure area. When the ultrasonic bubble generator works, the tail end of the amplitude transformer generates a large amount of cavitation bubbles, the cavitation bubbles continuously expand and contract under the action of a positive pressure phase and a negative pressure phase of ultrasonic waves, and the cavitation bubbles are quickly collapsed due to pressure change of a dynamic pressure area when passing through a liquid dynamic pressure area.
The abrasive particle flow circulating system consists of two abrasive particle flow conveying pumps, a stirrer and an abrasive particle flow conveying hose. The two abrasive flow conveying pumps are respectively arranged on two sides of the polishing platform and are connected with the stirrer on the other side through abrasive flow conveying hoses. The liquid-solid two-phase abrasive particle flow circulating system can effectively prevent abrasive particles from being deposited at the bottom of the polishing solution container, and improves the recycling efficiency of abrasive particle flow, so that the polishing efficiency is improved.
A three-phase flow dynamic pressure cavitation polishing device comprises a 1-Z direction guide rail motor, a 2-X direction guide rail motor, a 3-Y direction guide rail, a 4-X direction guide rail, a 5-static platform, a 6-moving platform, 7-polishing liquid mixed with abrasive particles, 8(11) -an abrasive particle flow delivery pump, 9-an abrasive particle flow delivery hose, 10-a stirrer, a 12-Z direction guide rail and 13-a multi-degree-of-freedom mechanical arm, 14-Y direction guide rail motor, 15-free curved surface workpiece, 16-polishing solution container, 17-workpiece clamp, 18-telescopic rod, 19-telescopic rod motor, 20-servo motor, 21-coupler, 22-cylindrical polishing tool with groove, 23-coupler and 24-ultrasonic bubble generator. (ii) a The free-form surface workpiece 15 is fixed at the bottom of a polishing liquid container 16 through a workpiece clamp 17 and is completely immersed in the polishing liquid 7 mixed with abrasive particles; the three-degree-of-freedom series platform mainly comprises an X-direction guide rail 4, a Y-direction guide rail 3 and a Z-direction guide rail 12 and is arranged above a polishing solution container 16, and the guide rails in the three directions are respectively driven by guide rail motors 1, 2 and 14; the three-rod parallel platform mainly comprises a static platform 5 and a movable platform 6, wherein the movable platform 6 mainly comprises three telescopic rods 18. The three-rod parallel platform is arranged at the tail end of the Z-direction guide rail 12 of the three-degree-of-freedom series platform to form a series-parallel platform. A grooved cylindrical polishing tool 22 is connected to a servo motor 20 and installed at the end of the serial-parallel hybrid mechanism, so that the polishing tool rotates at a high speed while maintaining a micro gap with a workpiece, generating a dynamic pressure region. Two abrasive flow delivery pumps 8 and 11 are respectively arranged at two sides of a polishing solution container 16 and connected with an agitator 10 at the other side through an abrasive flow delivery hose 9, so as to avoid abrasive deposition in the polishing process. The ultrasonic bubble generator 24 is attached to the distal end of the multi-degree-of-freedom mechanical arm 13.
When the three-phase flow hydrodynamic cavitation polishing device works, the serial-parallel connection polishing platform controls the pose of the cylindrical polishing tool relative to the workpiece, so that a tiny processing gap is always kept between the polishing tool and the surface of the workpiece, and the tool and the workpiece are completely immersed in the polishing solution. The servo motor drives the cylindrical polishing tool to rotate at a high speed, so that the polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool to generate dynamic pressure. Abrasive particles in the polishing solution continuously pass through the machining gap under the action of dynamic pressure flow, impact the microcosmic convex part on the surface of the workpiece at an approximately horizontal angle, and form certain material removal on the workpiece. The ultrasonic bubble generating mechanism continuously adjusts the pose of the amplitude transformer relative to the dynamic pressure area, so that cavitation bubbles generated at the tail end of the amplitude transformer just pass through the liquid dynamic pressure area. Due to the pressure change of the dynamic pressure area, cavitation cloud bursting is promoted, energy generated by bursting drives the polishing liquid mixed with the abrasive particles, the impact speed of the abrasive particles is increased, the impact randomness of the abrasive particles is increased, the polishing efficiency is improved, the workpiece is prevented from being scratched by the flowing of the abrasive particles in the single direction, and the high-precision polishing of the surface of the workpiece is realized. Along with the polishing, the abrasive particle flow circulating system circularly conveys the abrasive particles in the polishing container, so that the abrasive particles in the polishing solution are prevented from being deposited. The three-phase flow dynamic pressure cavitation polishing device mainly comprises a series-parallel connection polishing platform, an abrasive particle flow circulating system, an ultrasonic bubble generating mechanism, a workpiece, a polishing liquid container, a clamp, a polishing tool and polishing liquid mixed with abrasive particles.
The series-parallel connection polishing platform consists of a three-rod parallel connection platform and a three-degree-of-freedom series connection platform. The three-degree-of-freedom series platform mainly comprises X, Y, Z-direction guide rails, the three-rod parallel platform is arranged on the Z-direction guide rail of the three-degree-of-freedom series platform, and the guide rails in the three directions are respectively driven by a motor; the three-rod parallel platform mainly comprises a movable platform and a static platform, wherein the movable platform mainly comprises three telescopic rods, the cylindrical polishing tool is connected with the servo motor through a connecting device and is arranged at the tail end of the three-rod parallel platform, and the surface of the tool can be provided with a groove or can be smooth. The tandem stage controls the position of the tool in direction X, Y, Z and the parallel stage controls the attitude of the tool, allowing the attitude of the polishing tool relative to the workpiece to be precisely controlled.
The tool keeps a micro-gap above the workpiece, the servo motor drives the polishing tool to rotate at a high speed, the polishing solution mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool, and the polishing solution passes through the wedge-shaped gap between the tool and the workpiece to generate extrusion, so that the pressure is increased, and dynamic pressure is generated. Under the action of dynamic pressure, abrasive grains added into the polishing liquid continuously approximate to a horizontal angle to impact a microcosmic convex part on the surface of the workpiece, so that a certain amount of material is removed from the workpiece.
The ultrasonic bubble generating mechanism consists of an ultrasonic bubble generator and a multi-degree-of-freedom mechanical arm. The ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm through a connecting device, and the ultrasonic bubble generator is not limited to the mechanical arm and can be any device capable of adjusting the tail end pose of the ultrasonic generator. The multi-degree-of-freedom mechanical arm continuously adjusts the pose of the ultrasonic generator amplitude transformer relative to the dynamic pressure area, so that cavitation bubbles generated at the tail end of the amplitude transformer just pass through the dynamic pressure area. When the ultrasonic bubble generator works, the tail end of the amplitude transformer generates a large amount of cavitation bubbles, the cavitation bubbles continuously expand and contract under the action of a positive pressure phase and a negative pressure phase of ultrasonic waves, and the cavitation bubbles are quickly collapsed due to pressure change of a dynamic pressure area when passing through a liquid dynamic pressure area.
The material removal is a comprehensive result of the change of the motion state and distribution of the abrasive particles caused by liquid dynamic pressure and cavitation collapse, the polishing efficiency is improved, the damage to the surface and the sub-surface of the workpiece is avoided, and the effect of uniform and consistent polishing is achieved.
The abrasive particle flow circulating system consists of two abrasive particle flow conveying pumps and a stirrer. The two abrasive flow delivery pumps are respectively arranged on two sides of the polishing platform and are connected with the stirrer and the polishing solution container through abrasive flow delivery hoses. The abrasive flow circulating system continuously carries out circulating stirring and conveying on abrasive flow in the polishing container in the polishing process, abrasive particles are prevented from being deposited at the bottom of the polishing liquid container, the recycling efficiency of the abrasive flow is improved, and therefore the polishing efficiency is improved.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.
Claims (6)
1. A three-phase flow hydrodynamic cavitation polishing method is characterized in that: the free-form surface workpiece is fixed at the bottom of the polishing solution container through a clamp, a series-parallel hybrid platform consisting of a three-degree-of-freedom series platform and a three-rod parallel platform is arranged above the polishing solution container, and the cylindrical polishing tool and the servo motor are arranged at the tail end of the series-parallel hybrid platform; abrasive flow conveying pumps are arranged on two sides of the polishing solution container and connected with a stirrer at one end of the polishing solution container through an abrasive flow conveying hose; the ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm; the cylindrical polishing tool is not directly contacted with the free-form surface workpiece and is immersed in the polishing solution, and the serial-parallel hybrid platform controls the pose of the polishing tool relative to the free-form surface workpiece, so that a tiny processing gap is always kept between the polishing tool and the surface of the free-form surface workpiece; the servo motor drives the cylindrical polishing tool to rotate at a high speed above the free-form surface workpiece through the connecting device, so that the polishing solution mixed with the abrasive particles rotates together under the action of the high-speed rotation of the polishing tool, and the polishing solution generates extrusion when passing through a wedge-shaped gap between the polishing tool and the free-form surface workpiece, so that the pressure is improved, and dynamic pressure is generated; under the action of dynamic pressure, abrasive particles added into the polishing solution continuously impact the microcosmic convex part on the surface of the free-form surface workpiece at a horizontal angle to form a certain material removal on the free-form surface workpiece; the distance and the angle between an ultrasonic bubble generator arranged at the tail end of the multi-degree-of-freedom mechanical arm and a polishing tool are adjusted, so that an amplitude transformer is aligned with a micro-gap between the polishing tool and a free-form surface workpiece to work, a large amount of cavitation bubbles are generated at the tail end of the amplitude transformer, the cavitation bubbles are continuously expanded and compressed under the action of a positive pressure phase and a negative pressure phase of ultrasonic waves, and the cavitation bubbles are broken and extinguished due to the pressure change of a dynamic pressure region when passing through a liquid dynamic pressure region; the polishing solution mixed with the abrasive particles is driven by the energy generated by collapse, the impact speed of the abrasive particles is increased, the impact randomness of the abrasive particles is increased, the polishing efficiency is improved, the condition that the free-form surface workpiece is scratched by the unidirectional flow of the abrasive particles is avoided, meanwhile, the polishing tool is prevented from being in direct contact with the free-form surface workpiece, the abrasive particles are pressed into the surface of the free-form surface workpiece to generate surface and sub-surface damage, and the extremely-high-precision polishing of the surface of the free-;
in order to avoid the deposition of abrasive particles in the polishing solution in the polishing process, an abrasive particle flow conveying hose is used for connecting a stirrer and two abrasive particle flow conveying pumps arranged on two sides of a polishing solution container into an abrasive particle flow circulating system; the ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm through the connecting device, and the multi-degree-of-freedom mechanical arm continuously adjusts the pose of the amplitude transformer of the ultrasonic bubble generator relative to the dynamic pressure area, so that cavitation bubbles generated at the tail end of the amplitude transformer just pass through the dynamic pressure area.
2. The three-phase hydrodynamic cavitation polishing method of claim 1, wherein: the surface of the cylindrical polishing tool is smooth or provided with a groove, the free-form surface workpiece is fixed at the bottom of the polishing solution container through a clamp, and the polishing tool and the free-form surface workpiece are completely immersed in the polishing solution mixed with the abrasive particles; the three-rod parallel platform is arranged on a Z-direction guide rail of the three-degree-of-freedom serial platform to form a serial-parallel platform, the polishing tool is arranged at the tail end of the serial-parallel platform, the position of the polishing tool is controlled by the three-degree-of-freedom serial platform along the direction X, Y, Z, and the posture of the polishing tool is controlled by the three-rod parallel platform, so that the posture of the polishing tool relative to a free-form surface workpiece can be accurately controlled.
3. The three-phase hydrodynamic cavitation polishing method of claim 1, wherein: the abrasive flow circulating system is composed of two abrasive flow conveying pumps, a stirrer and an abrasive flow conveying hose, wherein the two abrasive flow conveying pumps are respectively installed on two sides of the polishing platform and connected with the stirrer at one end of the polishing platform through the abrasive flow conveying hose, and the liquid-solid two-phase abrasive flow circulating system can effectively prevent abrasive particles from being deposited at the bottom of the polishing liquid container, so that the recycling efficiency of abrasive flow is improved, and the polishing efficiency is improved.
4. An apparatus for the three-phase hydrodynamic cavitation polishing process of claim 1, wherein: the device comprises a three-degree-of-freedom series platform, a three-rod parallel platform, polishing liquid mixed with abrasive particles, an abrasive particle flow delivery pump, an abrasive particle flow delivery hose, a stirrer, a multi-degree-of-freedom mechanical arm, a free-form surface workpiece, a polishing liquid container, a clamp, a servo motor, a coupler, a polishing tool and an ultrasonic bubble generator, wherein the three-degree-of-freedom series platform arranged above the polishing liquid container mainly comprises X, Y, Z-direction guide rails, and the three-direction guide rails are respectively driven by the motor and used for controlling the position of the polishing tool; the three-rod parallel platform consists of a movable platform and a static platform, wherein the movable platform consists of three telescopic rods and is used for controlling the posture of the polishing tool; the three-rod parallel platform is arranged on a Z-direction guide rail of the three-degree-of-freedom series platform to form a series-parallel platform, and the polishing tool is connected with the servo motor and arranged at the tail end of the series-parallel platform, so that the polishing tool and the free-form surface workpiece rotate at a high speed while maintaining a micro gap to generate a dynamic pressure area; the free-form surface workpiece is fixed at the bottom of the polishing solution container through a clamp and is completely immersed in the polishing solution mixed with the abrasive particles; the two abrasive flow conveying pumps are respectively arranged on two sides of the polishing solution container and connected with a stirrer at one end of the polishing solution container through an abrasive flow conveying hose so as to avoid abrasive deposition in the polishing process; the ultrasonic bubble generator is arranged at the tail end of the multi-degree-of-freedom mechanical arm through the connecting device, so that cavitation bubbles generated at the tail end of the amplitude transformer of the ultrasonic bubble generator just pass through the dynamic pressure area.
5. The apparatus of claim 4, wherein: the polishing tool is a cylindrical polishing tool, the cylindrical polishing tool is connected with the servo motor through a connecting device and is arranged at the tail end of the three-rod parallel platform, and the surface of the polishing tool is grooved or smooth.
6. The apparatus of claim 4 or 5, wherein: the two abrasive flow conveying pumps are respectively arranged on two sides of the polishing platform and are connected with the stirrer and the polishing solution container through abrasive flow conveying hoses; the abrasive particle flow circulating system continuously circularly stirs and conveys the abrasive particle flow in the polishing container in the polishing process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810280953.6A CN108581816B (en) | 2018-04-02 | 2018-04-02 | Three-phase flow dynamic pressure cavitation polishing method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810280953.6A CN108581816B (en) | 2018-04-02 | 2018-04-02 | Three-phase flow dynamic pressure cavitation polishing method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108581816A CN108581816A (en) | 2018-09-28 |
| CN108581816B true CN108581816B (en) | 2021-02-26 |
Family
ID=63624092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810280953.6A Active CN108581816B (en) | 2018-04-02 | 2018-04-02 | Three-phase flow dynamic pressure cavitation polishing method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108581816B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201905215D0 (en) * | 2019-04-12 | 2019-05-29 | Rolls Royce Plc | A method and apparatus for finishing a surface of a component |
| CN109940485A (en) * | 2019-04-26 | 2019-06-28 | 四川天府珞埔三维科技有限公司 | A kind of artificial tooth automatically grinding repair system |
| CN110405620B (en) * | 2019-05-24 | 2021-02-26 | 浙江工业大学 | High-precision homogenizing polishing device based on micro-nano gas phase and Lorentz force |
| CN110340747B (en) * | 2019-05-30 | 2021-02-19 | 浙江工业大学 | Bubble-controlled micro-ultrasonic sphere emission profiling array polishing method and device |
| CN110340748A (en) * | 2019-05-30 | 2019-10-18 | 浙江工业大学 | A kind of rotary ultrasonic method processes the method and device of micro- hemisphere cavity plate array |
| CN111015496B (en) * | 2019-10-31 | 2024-05-07 | 浙江工业大学 | Vertical linear hydrodynamic polishing device |
| CN113263391B (en) * | 2021-06-01 | 2022-11-22 | 中国科学院长春光学精密机械与物理研究所 | Optical element surface roughness processingequipment |
| CN113601320B (en) * | 2021-07-28 | 2022-06-07 | 浙江大学 | Floating non-contact type ultrasonic-enhanced flexible sub-aperture polishing device and method |
| US11839944B2 (en) | 2021-07-28 | 2023-12-12 | Zhejiang University | Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method |
| CN113695991A (en) * | 2021-09-07 | 2021-11-26 | 成都极致智造科技有限公司 | Ion beam polishing device for optical element |
| CN113681440B (en) * | 2021-09-24 | 2022-11-08 | 义乌工商职业技术学院 | Hydraulic polishing equipment for processing cylindrical workpiece |
| CN114473720B (en) * | 2022-01-27 | 2023-10-27 | 大连理工大学 | Lens array optical element polishing method and device |
| CN116619221B (en) * | 2023-05-09 | 2024-08-27 | 浙江大学 | Gap self-adaptive non-contact polishing device and method |
| CN116900898B (en) * | 2023-09-13 | 2024-01-05 | 内蒙古东景生物环保科技有限公司 | Grinder capable of working at universal angle |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015065747A1 (en) * | 2013-10-29 | 2015-05-07 | United Technologies Corporation | Systems and methods for finishing flow elements |
| CN104786154B (en) * | 2015-02-03 | 2017-07-07 | 浙江工业大学 | A kind of ultrasonic cavitation bubble aids in fluid polishing processing method and device |
| CN104786155B (en) * | 2015-02-03 | 2023-07-25 | 浙江工业大学 | Ultrasonic-assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device |
| CN104972404B (en) * | 2015-02-03 | 2017-03-15 | 浙江工业大学 | A kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device |
| CN105252405B (en) * | 2015-09-22 | 2017-08-18 | 浙江工业大学 | A kind of inner cylinder face air-flow aids in abrasive Flow polishing processing method |
| CN105108631B (en) * | 2015-09-22 | 2017-11-07 | 浙江工业大学 | A kind of variable curvature section inner cylinder air-flow aids in abrasive Flow polishing processing device |
-
2018
- 2018-04-02 CN CN201810280953.6A patent/CN108581816B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108581816A (en) | 2018-09-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108581816B (en) | Three-phase flow dynamic pressure cavitation polishing method and device | |
| CN108581817B (en) | Method and device for Fenton-assisted three-phase flow hydrodynamic cavitation polishing of SiC optical curved surface | |
| CN102672554B (en) | Method and device for polishing small-bore optical element | |
| CN111716157B (en) | Polishing method and device for complex structure | |
| CN108705411B (en) | Pressure-adjustable floating polishing device | |
| CN102689246A (en) | Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass | |
| CN108972302B (en) | Non-resonant vibration auxiliary polishing device and method | |
| CN110000622B (en) | Device and method for chemical magnetic particle composite grinding of inner surface of pipe | |
| CN113601320B (en) | Floating non-contact type ultrasonic-enhanced flexible sub-aperture polishing device and method | |
| CN111070073B (en) | Inner cylindrical surface hydrodynamic cavitation reinforcing abrasive flow polishing system | |
| CN111716159A (en) | Polishing method and device for free-form surface | |
| CN104999370A (en) | Grinding Machine | |
| CN105252405A (en) | Airflow-assisted abrasive flow polishing method for internal cylindrical surface | |
| CN114515979B (en) | Magnetorheological polishing device for high-precision polishing | |
| CN115179178B (en) | Water jet strengthening and polishing integrated system and method for blade of impeller | |
| CN111070024A (en) | H30 vertical precise spherical surface machining device and operation method | |
| CN104972404B (en) | A kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device | |
| CN112548243B (en) | Crankshaft system and method for electrolytic ultrasonic magnetic particle composite grinding and finishing | |
| CN209936704U (en) | Ultrasonic cavitation auxiliary jet polishing system | |
| CN210615995U (en) | Ultrasonic vibration assisted magnetorheological ultra-precise polishing device | |
| CN211540529U (en) | Multi-station high-precision small metal piece double-sided magnetorheological polishing machine | |
| CN110170887A (en) | A kind of laser couples burnishing device with magnetorheological fluid | |
| CN109759905A (en) | A kind of Magnetorheological Polishing system of processing | |
| CN215789037U (en) | Vibration-assisted magnetic shear thickening and polishing device | |
| CN110757258B (en) | Method for machining inner spiral raceway of lead screw nut |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |