CN107132139A - Suspension type rotary quickly positions impression in situ/deepen arc cut test device - Google Patents
Suspension type rotary quickly positions impression in situ/deepen arc cut test device Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
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- G01N2203/008—Residual indentation measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0682—Spatial dimension, e.g. length, area, angle
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Abstract
Impression in situ/deepen arc cut test device is quickly positioned the present invention relates to a kind of suspension type rotary, belongs to electromechanical integration field of precision instruments.Including the quick locating module of suspension type rotary, arc cut test module, micro-nano impression module, in-situ observation module are deepened, micro-nano the impression module and in-situ observation module are integrated on the quick locating module of suspension type rotary；Deepen arc cut test module to be collectively constituted by impression instrument and test specimen support platform, test specimen support platform is made up of shears-type electric lifting platform and electric rotating platform two parts.Advantage is：Structure is novel, with motor-driven fast feed ability, and the other piezoelectricity micro-move device ability of micro/nano level, can accurately determine the mechanical property parameters such as hardness, modulus of elasticity, the delineation drag of test material.Load deflection resolution ratio reaches that micro/nano level, loading force resolution ratio reach micro-ox level.Mechanical behavior and military service behavior for material provide an effective means of testing.
Description
Technical field
The present invention relates to electromechanical integration field of precision instruments, more particularly to a kind of collection precision actuation, loading, signal inspection
Survey, in-situ observation, micro-nano impression, deepen arc cut and test in the precision mechanics test system of one, espespecially a kind of suspension
The quick positioning of formula rotation impression in situ/deepen arc cut test device.
Background technology
Material is as one of three big pillar industries of modern social development, and its Mechanics Performance Testing receives much concern, and is to examine
The necessary means of material mechanical performance.Relative to traditional material mechanical performance measuring technology, such as stretch, compress, bend, turn round
Turn etc., the impression test of micro-nano-scale, cut test gradually come into the sight of researcher, to meet growing material
The test in field needs.
Micro nanometer mechanics measuring technology in situ refers to Mechanics Performance Testing and the profit carried out under micro-nano-scale to material
Load is acted on optical imagery instrument lower material carries out online observation its deform, damage, a kind of measuring technology failed etc..With
Micro-nano impression, micro-nano cut etc. are most representative：In impression test, by indentation load, impression displacement and impression
Curve is analyzed, and can measure the parameters such as hardness, the modulus of elasticity of test specimen, according further to optical imagery instrument to vickers indentation
It is observed the deformation and damage regime that can find that material has occurred and that.Micro-nano cut measuring technology is in impression test technology
A kind of derived micro-nano measuring technology out, it adds precision positioning and displacement inspection on the basis of nano-indenter test
Brake.At present, China does not possess also with above-mentioned technology independent intellectual property right, in addition, the country there is no it is commercialized micro-nano
Impression/scarification tester device, instrument relies on external import, causes domestic correlative study to be in tracking mode, develops a kind of
Integrate impression test, cut test, in-situ observation tester it is extremely urgent.
The content of the invention
Impression in situ/deepen arc cut test dress is quickly positioned it is an object of the invention to provide a kind of suspension type rotary
Put, solve the above mentioned problem of prior art presence.Mechanical testing instrument is the important means of material tests, is material, machinery
Scientific domain develops, the important leverage of scientific and technological progress innovation.The present invention and the main distinction of traditional mechanicses performance testing apparatus exist
In each test module and observation module it is integrated.In addition to traditional impression test, it is integrated with and deepens arc cut module, in tradition
A kind of new mode is provided for Measurement of Material Mechanical Performance on the basis of cut test, is easy to obtain various experiment materials in load
Mechanical behavior and damage mechanisms under lotus effect.In addition, being integrated with the device available for quick rotational positioning, Mechanics Performance Testing
Can be at once to carrying out in-situ observation at test specimen loading after end.The present invention is simple in construction, and measuring accuracy is high, and method of testing is various
Change, in material science, mechanized equipment manufacture, precision optics, biomedical engineering, semiconductor, nanometer engineering, defence and military and boat
The fields such as empty space flight have extremely important application prospect.The present invention using research material Micro Mechanical Properties as object, proposition
Suspension type rotary quickly positions, deepens new technology, the new methods such as the test of arc cut, online observation in situ, micro-nano to China
Zone material Mechanics Performance Testing, Related product exploitation and industrialization, the blank for filling up China's association area are significant.
Topology layout of the present invention belongs to mo(u)ld bottom half structure, and respectively upper suspension formula rotates quick locating module and bottom examination
Sample support platform.Its superstructure assemble in-situ observation module and with micro-nano impression module, can be achieved impression test, original position
Observe the rapid translating and in-situ observation of position.Lower sample support platform is by shears-type electric lifting platform and electric rotating platform two
Part is constituted：Electric rotating platform can realize that the impression during impression test is moved a little certainly, also can be with micro-nano impression module
Collective effect, arc delineation processing is carried out on sample, realizes that arc cut is tested；Shears-type electric lifting platform can realize impression mould
The fast feed of block and the rapid focus of in-situ observation module, it is to avoid the use of multiple drive devices.Shears-type electric lifting platform,
Electric rotating platform, micro-nano impression module are used in conjunction with, and scratch depth is constantly changed in scoring process, and realization is deepened
Arc cut test experiments.Test device is simple in construction, with modular design feature is easy to operate, overall structure rigidity
Height, in material science, mechanized equipment manufacture, precision optics, biomedical engineering, semiconductor, nanometer engineering, defence and military and boat
The fields such as empty space flight have extremely important application prospect.
The above-mentioned purpose of the present invention is achieved through the following technical solutions：
Suspension type rotary quickly positions impression in situ/deepen arc cut test device, including suspension type rotary is quickly fixed
Position module, deepen arc cut test module, micro-nano impression module, in-situ observation module, the micro-nano impression module and
In-situ observation module is integrated on the quick locating module of suspension type rotary；Arc cut test module is deepened by impression instrument 4 and examination
Part support platform is collectively constituted, and test specimen support platform is made up of shears-type electric lifting platform and electric rotating platform two parts；Suspension
Formula rotates quick locating module and is assemblied in by rotational positioning flange 21 on upper backup pad 1, by position rotating axle 27 and axle
Component is rotated around axis direction, and impression instrument 4, metallographic microscope 22 are fixed by impression connecting plate 3, microscope connecting plate 20 respectively
In rotating disk 19, Indentation position or in-situ observation position are quickly positioned at by spring holder 23.
The quick locating module of described suspension type rotary is：Rotating disk 19 passes through rotary part on position rotating axle 27 and axle
Be assemblied on upper backup pad 1, on the axle rotary part include two angular contact ball bearings I, II 26,30, turnbarrel I 29,
Unidirectional flat thrust ball bearing 28, rotational positioning flange 21, bearing (ball) cover 25, spring holder 23 and lifting bolt 24, corner connection
Touch ball bearing II 30 and be assemblied in the periphery of position rotating axle 27, top is contacted with the shaft shoulder, and bottom passes through turnbarrel I 29 and corner connection
Touch ball bearing I 26 and form axially position in the axial direction, bearing outer ring is interference fitted with rotational positioning flange 21；Bearing (ball) cover
25 pairs of bearing outer rings carry out axially position, while being connected through a screw thread with spring holder 23, it are sold by adjusting alignment pin
The shrinkage pool of shaft end on position rotating axle 27 is lived on the crown；Lifting bolt 24 is threaded at the screwed hole of centre of bearing (ball) cover 25,
It is easy to take out bearing (ball) cover 25；Micro-nano impression module and in-situ observation module are assemblied in rotating disk 19, and both are in same
On one horizontal plane, and the central point of pressure head 48 and the complete phase in rotary motion track of the camera lens focus of metallographic microscope 22 of impression instrument 4
Together, the quick positioning of rotating disk 19 is realized by spring holder 23.
Described unidirectional flat thrust ball bearing 28 is inserted on position rotating axle 27, and unidirectionally flat thrust ball bearing 28 is upper
Portion is contacted with the bottom of rotational positioning flange 21, and bottom is contacted with rotating disk 19, and rotating disk 19 is fixed on positioning rotation by screw
In rotating shaft 27, rotating disk 19 and the lower end collective effect of rotational positioning flange 21, the unidirectional flat thrust ball bearing 28 of axial grip make
The 21 times end in contact in its top and rotational positioning flange are fixed, and bottom is contacted with rotating disk 19 and with its synchronous axial system；Unidirectionally
Flat thrust ball bearing 28 adds the contact area of rotating disk 19 and other parts.
The described arc cut test module that deepens is：Impression instrument 4 promotes flexible hinge 52 to make pressure head by piezoelectric stack 46
Part produces accurate displacement, realizes the accurate loading of micro-nano impression module, load signal and displacement signal pass through force snesor
47 and laser displacement sensor 51 be measured；Test specimen support platform is assemblied on base 12 by screw, wherein shears-type electric
Lifting platform controls driving to realize that scissors structure is moved or by the progress hand of manual knob 10 along the z-axis direction by lifting platform motor 9
Dynamic control, realizes the fast feed of impression instrument 4 and the rapid focus of metallographic microscope 22；Electric rotating platform：Rotation platform electricity
Machine 18 is fixed by rotation platform motor support base 33, and the rotation of objective table 5 is realized through Worm Wheel System, and the electronic rotation is put down
The structure of platform is as follows：Rotation platform motor 18 is connected by coupling assembly I 17 with worm shaft 13, drives it to rotate, and is led to
The rotary shaft 36 that Worm Wheel System passes to the rotation of worm shaft 13 electric rotating platform is crossed, band dynamic object stage 5 is rotated, real
The rotating function of existing electric rotating platform；Turbine 6 is connected with rotary shaft 36 by flat key, objective table connecting plate 31 and rotary shaft 36
Connected by spline, so as to realize the transmission of motion；Electric rotating platform passes through bearing block I, II, III 16,7,32 and bearing block
Support block I, II 15,8 is fixed on 14 on rotation platform base, is assemblied in by rotation platform base 14 with shears-type electric lifting platform
Together, shears-type electric lifting platform drives its elevating movement of realization along the z-axis direction.
What described suspension type rotary quickly positioned impression in situ/deepen arc cut test device deepens the survey of arc cut
Method for testing is：After pressure head Specimen, impression instrument is in stress state, and keeps the state constant, electric rotating platform loading
The rotated platform motor 18 of platform 5, which drives, to rotate, so that scribing goes out and changed locus of points identical cut on test specimen, realizes arc
Shape cut test experiments.When carrying out arc scratch experiment, the band of shears-type electric lifting platform and objective table 5 in lifting platform motor 9
The dynamic lower movement occurred along the z-axis direction, makes scratch depth constantly be changed in scoring process, realization deepens the survey of arc cut
Examination.
Impression in situ/deepen arc cut is quickly positioned another object of the present invention is to providing a kind of suspension type rotary to survey
Method for testing, it is characterised in that：The central point of objective table 5 is O, 4 pressure head of impression instrument 48 initial position in objective table in the plane
A is projected as, using O as limit, ray OA is that pole axis sets up polar coordinate system；Carry out impression test automatic rotary transfer point or arc cut
During test experiments, observe from up to down, objective table 5 turns over θ angles clockwise, then now relative polar coordinates of the pressure head on test specimen
Location point is
(ρ,θ)
Wherein, ρ is line segment OA length；
The relative motion arc length of pressure head 48 is
L=ρ θ
When device carries out rotating quick positioning, observe from up to down, the relative initial position of rotating disk 19 turns over α angles clockwise
Spend, the polar coordinate position point of pressure head 48 is
(ρ,α)
Rotating disk 19 rotate arc length be
L=ρ α
Using O as origin, ray OA is x-axis, and OA is y-axis around the ray OA ' that origin rotates counterclockwise 90 degree, and vertical Oxy is put down
It is z-axis upwardly, creates rectangular coordinate system in space；With 48 points of pressure head and Oxy planes vertically upward apart from H and parallel with Oxy
Face on the basis of face, when progress deepens the test of arc cut, objective table relative datum moves upwardly h, then the space of pressure head 48 is sat
Mark is set to
(ρcosθ,ρsinθ,H-h)
Meanwhile, axial force-transverse direction force curve in the deep curve of load-pressure and scoring processes in Indentation Process can be obtained
To the mechanics parameter of the materials such as identation hardness, contact stiffness, modulus of elasticity, scratch hardness, coefficient of friction；
P is loading of pressing in the deep curve of load-pressure, and h is press-in displacement, and four crucial parameters are that maximum press-in is carried respectively
Lotus Pmax, maximum compression distance hmax, remaining compression distance hfWith contact stiffness S=dP/dh, contact stiffness is defined as unloading curve
Top slope；
The unloading part of loading of pressing in-depth curve meets following power function relationship formulas
P=α (h-hf)m
Wherein, α and m is power function fitting parameter, generally to 25%~50% at the top of unloading curve in practical application
Divide and carry out least square fitting, obtain α and m values；
Contact depth between pressure head and test specimen is
Contact area function A can be further obtained, i.e.,
A=f (hc)
For preferable Bo Shi pressure headsVickers indenter
After contact area function is determined, the identation hardness of material is to be represented by
There is following relation in contact stiffness and contact area
In formula, β is the constant relevant with indenter shape, ErTo convert into modulus；For Bo Shi pressure heads, Vickers indenter and tack
Pressure head, β value is respectively 1.034,1.012 and 1.000；
Equivalent modulus ErIntroducing consider the elastic deformation of test specimen and pressure head simultaneously, its springform with test specimen and pressure head
There is following relation between amount, Poisson's ratio
Wherein, E, EiThe respectively modulus of elasticity of test specimen and pressure head material；v、viIt is material for test and pressure head material respectively
Poisson's ratio；
Different from impression test, in scoring processes, rigid pressure head enters Mobile state along surface of test piece and slided；Its extensive use
In thin-film material, coating material, biomaterial, the friction of high polymer material, the research of polishing machine；FNFor cut mistake
Pressure head is applied to the axial force on test specimen, F in journeyLThe cross force being subject to for pressure head, d is the width of remaining cut；
The scoring processes of correspondence conical indenter, scratch hardness is represented by
In formula, q is the parameter relevant with mechanics of materials response；For perfect plasticity deformable material, q ≈ 2；For glutinous bullet modeling
Property material, q ＞ 1；
In cut test process, the coefficient of friction between material and test specimen is obtained by following formula
The beneficial effects of the present invention are：Structure is novel, with motor-driven fast feed ability, and micro/nano level
Other piezoelectricity micro-move device ability, can accurately determine the mechanical property parameters such as hardness, modulus of elasticity, the delineation drag of test material.
The load deflection resolution ratio of the present invention reaches that micro/nano level, loading force resolution ratio reach micro-ox level, and system is imaged by digital micro-analysis
Deformation, damage of the system to material in test carry out in-situ observation.The quick positioning of the achievable in-situ observation module of the present invention, impression
The automatic arc of test module changes point, arc delineation and deepens arc delineation, is that the mechanical behavior of material and military service behavior are carried
An effective means of testing is supplied.The present invention in material science, mechanized equipment manufacture, precision optics, biomedical engineering, partly lead
The fields such as body, nanometer engineering, defence and military and Aero-Space have extremely important application prospect.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this hair
Bright illustrative example and its illustrate to be used to explain the present invention, do not constitute inappropriate limitation of the present invention.
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the structure schematic cross-sectional view of the quick locating module of suspension type rotary of the present invention；
Fig. 3 is the dimensional structure diagram of the quick locating module of suspension type rotary of the present invention；
Fig. 4 is the structural representation of the electric rotating platform of the present invention；
Fig. 5 is the partial schematic sectional view of the electric rotating platform of the present invention；
Fig. 6 is shears-type electric hoistable platform structural representation of the invention；
Fig. 7 is micro-nano impression modular structure schematic diagram of the invention；
Fig. 8 is typical loading of pressing in-press-in displacement relation curve；
Fig. 9 is Indentation Process diagrammatic cross-section；
Figure 10 is typical arc scoring processes schematic diagram.
In figure：1st, upper backup pad；2nd, support column；3rd, impression connecting plate；4th, impression instrument；5th, objective table；6th, turbine；7th, bearing
Seat II；8th, bearing block support block II；9th, lifting platform motor；10th, manual knob；11st, lifting platform motor support base；12nd, base；13、
Worm shaft；14th, rotation platform base；15th, bearing block support block I；16th, bearing block I；17th, coupling assembly I；18th, rotation platform
Motor；19th, rotating disk；20th, microscope connecting plate；21st, rotational positioning flange；22nd, metallographic microscope；23rd, spring holder；
24th, lifting bolt；25th, bearing (ball) cover；26th, angular contact ball bearing I；27th, position rotating axle；28th, unidirectional flat thrust ball bearing；
29th, turnbarrel I；30th, angular contact ball bearing II；31st, objective table connecting plate；32nd, bearing block III；33 rotation platform motor branch
Seat；34th, round nut；35th, turnbarrel II；36th, rotary shaft；37th, angular contact ball bearing III；38th, lifting platform flange；39th, lift
Platform firm banking；40th, lifting arm；41st, lifting platform supporting plate；42nd, coupling assembly II；43rd, impression substrate；44th, pressing plate；45、
Wei Jin mechanisms；46th, piezoelectric stack；47th, force snesor；48th, pressure head；49th, head holder；50th, shutter；51st, laser displacement
Sensor；52nd, flexible hinge；53rd, displacement transducer connecting plate；54th, knob base is adjusted；55th, knob is adjusted.
Embodiment
The detailed content and its embodiment of the present invention is further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 to Fig. 7, suspension type rotary of the invention quickly positions impression in situ/deepen the test of arc cut
Device, overall structure is in distribution up and down, and two parts are assembled together by support column 2 up and down, including suspension type rotary is quick
Locating module, deepen arc cut test module, micro-nano impression module, in-situ observation module, the micro-nano impression module
It is integrated in in-situ observation module on the quick locating module of suspension type rotary；Arc cut test module is deepened by the He of impression instrument 4
Test specimen support platform is collectively constituted, and test specimen support platform is made up of shears-type electric lifting platform and electric rotating platform two parts；It is outstanding
The hanging quick locating module of rotation is assemblied on upper backup pad 1 by rotational positioning flange 21, passes through position rotating axle 27 and axle
Upper component rotates around axis direction, and impression instrument 4, metallographic microscope 22 are consolidated by impression connecting plate 3, microscope connecting plate 20 respectively
It is scheduled in rotating disk 19, Indentation position or in-situ observation position is quickly positioned at by spring holder 23；
The quick locating module of described suspension type rotary is：Rotating disk 19 passes through rotary part on position rotating axle 27 and axle
Be assemblied on upper backup pad 1, on the axle rotary part include two angular contact ball bearings I, II 26,30, turnbarrel I 29,
Unidirectional flat thrust ball bearing 28, rotational positioning flange 21, bearing (ball) cover 25, spring holder 23, angular contact ball bearing II30
The periphery of position rotating axle 27 is assemblied in, top is contacted with the shaft shoulder, and bottom passes through turnbarrel I29 and angular contact ball bearing I26
Axially position is formed in the axial direction, and bearing outer ring is interference fitted with rotational positioning flange 21, and rotary shaft parts are assembled
Get up.Bearing (ball) cover 25 carries out axially position to bearing outer ring, while being connected through a screw thread with spring holder 23, passes through adjustment
Alignment pin makes its plunger withstand the shrinkage pool of shaft end on position rotating axle 27, forms the positioning of the module；The screw thread of lifting bolt 24 connects
At the screwed hole of centre for being connected on bearing (ball) cover 25, it is easy in a device take out bearing (ball) cover 25.Micro-nano impression module and original
Position observation module be assemblied in rotating disk 19, both be in same level XOY on, and the central point of pressure head 48 of impression instrument 4 and
The movement locus of the camera lens focus of metallographic microscope 22 is identical, when the pressure head 48 of impression instrument 4 just carries out impression to test specimen or draws
When trace is tested, rotating disk 19 is positioned by spring holder 23, is fixed in a certain determination position, is smoothed out experiment；
Need to carry out in-situ observation to test specimen after the completion of impression or cut, be now 90 by the quick rotation certain angle present apparatus of rotating disk 19
Degree, reuses spring holder 23 and is positioned at the impression or cut loading position, and now metallography microscope lens head focus is just
Test specimen Indentation position or test specimen scoring position are directed at, in-situ observation is carried out to test specimen, so as to realize the quick rotational positioning of device.
The use of described unidirectional flat thrust ball bearing 28 can strengthen the entirety of suspension type rotary fast-positioning device
Rigidity.Unidirectional flat thrust ball bearing 28 is inserted on position rotating axle 27, the top of unidirectional flat thrust ball bearing 28 and rotation
The bottom of locating flange 21 is contacted, and bottom contacts with rotating disk 19, rotating disk 19 is fixed on position rotating axle 27 by screw,
Rotating disk 19 and the lower end collective effect of rotational positioning flange 21, the unidirectional flat thrust ball bearing 28 of axial grip, make its top with
21 times end in contact of rotational positioning flange are fixed, and bottom is contacted with rotating disk 19 and with its synchronous axial system；Unidirectional flat thrust
The use of ball bearing 28 adds the contact area of rotating disk 19 and other parts, for reducing because of the He of bias suspension impression instrument 4
The structural instability that tilting moment is caused caused by metallographic microscope 22, increase integral rigidity is significant.
The described arc cut test module that deepens is：Impression instrument 4 promotes flexible hinge 52 to make pressure head by piezoelectric stack 46
Part produces accurate displacement, realizes the accurate loading of micro-nano impression module, load signal and displacement signal pass through force snesor
47 and laser displacement sensor 51 be measured；Metallographic microscope 22 is obtained image information display in display by micro imaging system
On device, test analysis is carried out to test material；Test specimen support platform is assemblied on base 12 by screw, wherein shears-type electric liter
Drop platform controls driving to realize that scissors structure is moved or carried out manually by manual knob 10 along the z-axis direction by lifting platform motor 9
Control, realizes the fast feed of impression instrument 4 and the rapid focus of metallographic microscope 22；Electric rotating platform：Rotation platform motor
18 are fixed by rotation platform motor support base 33, and the rotation of objective table 5 is realized through Worm Wheel System, complete right in Indentation Process
Test specimen certainly move a little and carries out arc delineation in scoring processes to test specimen.
The central axis of the pressure head 48 of impression instrument 4 and the center of rotation axis of the electric rotating platform in test specimen support platform
Parallel, parallel distance is ρ, after indentation test terminates, and pressure head 48 exits test test specimen, the rotated platform of rotation platform objective table 5
Motor 18 drives the rotation occurred around rotation axis, moving certainly a little for micro-nano impression module is realized, in changing the locus of points to rotate
Heart axis is origin, with the circular arc of a length of radiuses of ρ.After the Specimen of pressure head 48, the transfixion of impression instrument 4, in loading shape
State, and keep the state constant, the rotated platform motor 18 of electric rotating platform objective table 5, which drives, to rotate, so that in examination
Scribing goes out and changed locus of points identical cut on part, realizes arc cut test experiments.When carrying out arc scratch experiment, scissors
Movement along the z-axis direction occurs under the drive of lifting platform motor 9 for electric lifting platform and objective table 5, makes scratch depth in delineation
During constantly change, realization deepen arc cut test experiments.
Referring to shown in Fig. 4 and Fig. 5, the structure of the electric rotating platform is as follows：Rotation platform motor 18 passes through shaft coupling
Component I 17 is connected with worm shaft 13, drives it to rotate, and the rotation of worm shaft 13 is passed into electricity by Worm Wheel System
The rotary shaft 36 of dynamic rotation platform, band dynamic object stage 5 is rotated, and realizes the rotating function of electric rotating platform；Turbine 6 and rotary shaft
36 are connected by flat key, and objective table connecting plate 31 is connected with rotary shaft 36 by spline, so as to realize the transmission of motion；Electronic rotation
Turn platform to be fixed on 14 on rotation platform base by bearing block I, II, III 16,7,32 and bearing block support block I, II 15,8, lead to
Cross rotation platform base 14 to be assembled together with shears-type electric lifting platform, shears-type electric lifting platform drives it to realize along the z-axis direction
Elevating movement.
The electric rotating platform is assemblied in lifting platform supporting plate 41 by rotation platform base 14, bearing block III32,
Angular contact ball bearing III 37, turbine 6, turnbarrel II 35, objective table connecting plate 31, round nut 34 are assemblied in rotary shaft 36 successively
On, constitute the shaft transmission system of electric rotating platform.The rotary motion of rotation platform motor 18 is turned by turbine and worm transmission
It is changed to the rotary motion of the module rotation platform.
Shown in Figure 6, shears-type electric lifting platform is assemblied on base 12, can be realized by lifting platform motor 9 along z-axis
The automatic controllable lift in direction, can also pass through the control lifting platform realization lifting manipulation manually of manual knob 10.Electric rotating platform
It is assemblied in by rotation platform base 14 in lifting platform supporting plate 41, the rotary motion of rotation platform motor 18 is converted into the change
The rotary motion of deep arc cut test module electric rotating platform.The quick locating module of suspension type rotary passes through position rotating method
Orchid 21 is installed on upper backup pad 1, and its rotational positioning is realized by spring holder 23, and metallography microscope is assembled on position rotating disk
Mirror 22 and impression instrument 4, to realize above-mentioned functions, metallography microscope lens head focal axis line and impression instrument ram axis revolve to positioning
The distance of rotating disk axis is equal, and rotational trajectory is identical, and the quick of metallographic microscope can be achieved after terminating in impression/cut test
Positioning.
Shown in Figure 6, described shears-type electric lifting platform is by lifting platform motor 9, manual knob 10, lifting platform motor branch
Seat 11, shaft coupling group II42, lifting platform flange 38, lifting platform firm banking 39, lifting arm 40 and the portion of lifting platform supporting plate more than 41
It is grouped into.Two composition scissors structures of lifting arm 40 are connected lifting platform firm banking 39 and lifting platform supporting plate 41 by bolt
Get up, lifting platform motor 9 is arranged on lifting platform motor support base 11, is connected through coupling assembly II42 with screw nut device,
Elevating control is carried out to lifting platform by screw pair.Stable height can be provided to adjust and bearing capacity, simple to operate, property
Can be reliable.Automatic controllable lift along the z-axis direction is realized by lifting platform motor 9, can also pass through manual knob 10 and control manually
Lifting platform realizes lifting manipulation, and the control is that the rotary motion of motor is converted into device along z-axis side by ball-screw-transmission
To linear motion realize.
Described metallographic microscope 22 and impression instrument 4 are fixed in rotating disk 19 by connecting plate and screw, itself
The fast feed of impression and microscopical rapid focus can not be realized, but according to motion composition principle, utilizes shears-type electric
The fast lifting of lifting platform can realize above-mentioned functions requirement, it is to avoid impression motor and metallographic microscope motor make
With being that overall structure is simpler, improve the rigidity of impression module, alleviate the entirety of the quick locating module of suspension type rotary
Quality, enhances the integral rigidity of device.
Shown in Figure 7, the micro-nano impression module can substantially be divided into loading unit and detecting signal unit：Loading is single
Member is connected on impression connecting plate 3 by impression substrate 43, and it includes flexible hinge 52, piezoelectric stack 46, force snesor 47, pressure
First 48, the part such as head holder 49.Flexible hinge 52 is fixed by screws on impression substrate 43, and its groove is embedded in piezoelectricity
46 are stacked, force snesor 47 is threadedly attached in the lower end of flexible hinge 52 and the upper end of shutter 50.Piezoelectric stack 46 is in voltage
Output displacement under the excitation of signal, drives flexible hinge 52 and force snesor 47, head holder 49, the pressure head 48 of lower section, real
Existing z-axis direction precision actuation loading；Displacement signal detection unit includes laser displacement sensor 51, displacement transducer connecting plate
53rd, Wei Jin mechanisms 45 and pressing plate 44, laser displacement sensor 51 are fixed on Wei Jin mechanisms 45 by displacement transducer connecting plate 53
On, Wei Jin mechanisms 45 are fixed on impression substrate 43 by pressing plate 44, and control is fixed on the adjustment rotation on adjustment knob base 54
Button 55, realizes the micro-displacement output of Wei Jin mechanisms 45, relative displacement between measurement laser displacement sensor 51 and shutter 50
The detection of displacement signal is realized in change.Load signal detection unit includes force snesor 47, and it is connected on flexible hinge 52 and pressure
Between first 48, the real-time detection of load signal is realized.
What described suspension type rotary quickly positioned impression in situ/deepen arc cut test device deepens the survey of arc cut
Method for testing is：After pressure head Specimen, impression instrument is in stress state, and keeps the state constant, electric rotating platform loading
The rotated platform motor 18 of platform 5, which drives, to rotate, so that scribing goes out and changed locus of points identical cut on test specimen, realizes arc
Shape cut test experiments.When carrying out arc scratch experiment, the band of shears-type electric lifting platform and objective table 5 in lifting platform motor 9
The dynamic lower movement occurred along the z-axis direction, makes scratch depth constantly be changed in scoring process, realization deepens the survey of arc cut
Examination.
The pivot of the pressure head center deviation electric rotating platform of impression instrument, can be achieved impression from moving a little with cut
Arc is delineated；The rotation of electric rotating platform can make pressure head and test specimen occur relative camber cunning around electric rotating platform center
Dynamic, shears-type electric lifting platform can realize movement along the z-axis direction in addition, so the device can carry out deepening arc cut mechanical property
Can test.Pressure head center and camera lens focus are on same movement locus, in situ after impression/deepen arc cut test terminates
Observation Blocks can quickly navigate to impression point or scribing position, and in-situ observation is carried out to test specimen.In the device, suspension type rotary is fast
Fast locating module can only realize the rotary motion around z-axis direction, the fast feed of impression module and in-situ observation module it is quick
Focusing realized by the lifting along the z-axis direction of shears-type electric lifting platform, it is to avoid the use of multiple drive devices, is made whole
Body structure simplifies, and effectively raises the rigidity of impression module, is conducive to the raising of measuring accuracy.
The suspension type rotary of the present invention quickly positions calibration and the test side of impression in situ/deepen arc cut test device
Method is：Power and the displacement in experimentation are recorded with A/D capture cards by force snesor and displacement transducer, is obtained in Indentation Process
The deep curve of load-pressure and axial force-transverse direction force curve, according to mechanics model, you can obtained identation hardness, contact just
The mechanics parameters such as degree, modulus of elasticity, scratch hardness, coefficient of friction.
The suspension type rotary of the present invention quickly positions impression in situ/deepen arc cut method of testing, the central point of objective table 5
For O, the initial position of 4 pressure head of impression instrument 48 in objective table in the plane be projected as A, using O as limit, ray OA builds for pole axis
Vertical polar coordinate system；When carrying out impression test automatic rotary transfer point or arc cut test experiments, observe from up to down, objective table 5
θ angles are turned over clockwise, then now relative polar coordinate position point of the pressure head on test specimen is
(ρ,θ)
Wherein, ρ is line segment OA length；
The relative motion arc length of pressure head 48 is
L=ρ θ
When device carries out rotating quick positioning, observe from up to down, the relative initial position of rotating disk 19 turns over α angles clockwise
Spend, the polar coordinate position point of pressure head 48 is
(ρ,α)
Rotating disk 19 rotate arc length be
L=ρ α
Using O as origin, ray OA is x-axis, and OA is y-axis around the ray OA ' that origin rotates counterclockwise 90 degree, and vertical Oxy is put down
It is z-axis upwardly, creates rectangular coordinate system in space；With 48 points of pressure head and Oxy planes vertically upward apart from H and parallel with Oxy
Face on the basis of face, when progress deepens the test of arc cut, objective table relative datum moves upwardly h, then the space of pressure head 48 is sat
Mark is set to
(ρcosθ,ρsinθ,H-h)
Meanwhile, axial force-transverse direction force curve in the deep curve of load-pressure and scoring processes in Indentation Process can be obtained
To the mechanics parameter of the materials such as identation hardness, contact stiffness, modulus of elasticity, scratch hardness, coefficient of friction；
Referring to shown in Fig. 8 and Fig. 9, P is loading of pressing in the deep curve of load-pressure, and h is press-in displacement, four crucial ginsengs
Amount is maximum loading of pressing in P respectivelymax, maximum compression distance hmax, remaining compression distance hfWith contact stiffness S=dP/dh, contact
Rigidity is defined as slope at the top of unloading curve.
The unloading part of loading of pressing in-depth curve approximately meets following power function relationship formulas
P=α (h-hf)m
Wherein, α and m is power function fitting parameter, generally to 25%~50% at the top of unloading curve in practical application
Divide and carry out least square fitting, obtain α and m values.
Contact depth between pressure head and test specimen is
Contact area function A can be further obtained, i.e.,
A=f (hc)
For preferable Bo Shi pressure headsVickers indenterIndenter shape often deviates preferable feelings
Condition, at this moment needs that area function is modified and calibrated, method refers to GB/T22458-2008.
After contact area function is determined, the identation hardness of material is to be represented by
There is following relation in contact stiffness and contact area
In formula, β is the constant relevant with indenter shape, ErTo convert into modulus.For Bo Shi pressure heads, Vickers indenter and tack
Pressure head, β value is respectively 1.034,1.012 and 1.000.
Equivalent modulus ErIntroducing consider simultaneously test specimen can pressure head elastic deformation, its springform with test specimen and pressure head
There is following relation between amount, Poisson's ratio
Wherein, E, EiThe respectively modulus of elasticity of test specimen and pressure head material；v、viIt is material for test and pressure head material respectively
Poisson's ratio.
Shown in Figure 10, different from impression test, in scoring processes, rigid pressure head enters Mobile state along surface of test piece to be slided
It is dynamic.It is widely used in the frictions of the materials such as thin-film material, coating material, biomaterial, high polymer, polishing machine and ground
In studying carefully.In schematic diagram, FNThe axial force on test specimen, F are applied to for pressure head in scoring processesLThe cross force being subject to for pressure head, d is
The width of remaining cut.
The scoring processes of correspondence conical indenter, scratch hardness is represented by
In formula, q is the parameter relevant with mechanics of materials response.For perfect plasticity deformable material, q ≈ 2；For glutinous bullet modeling
Property material, q ＞ 1.
In cut test process, the coefficient of friction between material and test specimen is obtained by following formula
The preferred embodiment of the present invention is the foregoing is only, is not intended to limit the invention, for the technology of this area
For personnel, the present invention can have various modifications and variations.All any modification, equivalent substitution and improvements made for the present invention etc.,
It should be included in the scope of the protection.
Claims (6)
1. a kind of suspension type rotary quickly positions impression in situ/deepen arc cut test device, it is characterised in that：Including suspension
Formula rotates quick locating module, deepens arc cut test module, micro-nano impression module, in-situ observation module, the micro-nano
Rice impression module and in-situ observation module are integrated on the quick locating module of suspension type rotary；Deepen arc cut test module by
Impression instrument (4) and test specimen support platform are collectively constituted, and test specimen support platform is by shears-type electric lifting platform and electric rotating platform two
Part is constituted；The quick locating module of suspension type rotary is assemblied on upper backup pad (1) by rotational positioning flange (21), by fixed
Component is rotated around axis direction in position rotary shaft (27) and axle, and impression instrument (4), metallographic microscope (22) are connected by impression respectively
Plate (3), microscope connecting plate (20) are fixed in rotating disk (19), and Indentation position is quickly positioned at by spring holder (23)
Or in-situ observation position.
2. suspension type rotary according to claim 1 quickly positions impression in situ/deepen arc cut test device, it is special
Levy and be：The quick locating module of described suspension type rotary is：Rotating disk (19) on position rotating axle (27) and axle by rotating
Part is assemblied on upper backup pad (1), and rotary part includes two angular contact ball bearings I, II (26,30), rotation on the axle
Sleeve I (29), unidirectional flat thrust ball bearing (28), rotational positioning flange (21), bearing (ball) cover (25), spring holder (23)
With lifting bolt (24), angular contact ball bearing II (30) is assemblied in position rotating axle (27) periphery, and top is contacted with the shaft shoulder, under
Portion forms axially position, bearing outer ring and rotation in the axial direction by turnbarrel I (29) and angular contact ball bearing I (26)
Locating flange (21) is interference fitted；Bearing (ball) cover (25) to bearing outer ring carry out axially position, while with spring holder (23)
It is connected through a screw thread, by adjusting the shrinkage pool that alignment pin makes its plunger withstand shaft end on position rotating axle (27)；Lifting bolt
(24) at the screwed hole of centre for being threaded in bearing (ball) cover (25), it is easy to take out bearing (ball) cover (25)；Micro-nano impression mould
Block and in-situ observation module are assemblied in rotating disk (19), and both are on same level XOY, and the pressure head of impression instrument (4)
(48) central point is identical with the rotary motion track of metallographic microscope (22) camera lens focus, real by spring holder (23)
The quick positioning of existing rotating disk (19).
3. suspension type rotary according to claim 2 quickly positions impression in situ/deepen arc cut test device, it is special
Levy and be：Described unidirectional flat thrust ball bearing (28) is inserted on position rotating axle (27), unidirectional flat thrust ball bearing
(28) top is contacted with rotational positioning flange (21) bottom, and bottom is contacted with rotating disk (19), by screw rotating disk
(19) it is fixed on position rotating axle (27), rotating disk (19) and rotational positioning flange (21) lower end collective effect, axial grip
Unidirectional flat thrust ball bearing (28), makes its top and end in contact under rotational positioning flange (21) fixed, bottom and rotation
Disk (19) is contacted and with its synchronous axial system；Unidirectional flat thrust ball bearing (28) adds connecing for rotating disk (19) and other parts
Contacting surface is accumulated.
4. suspension type rotary according to claim 1 quickly positions impression in situ/deepen arc cut test device, it is special
Levy and be：The described arc cut test module that deepens is：Impression instrument (4) promotes flexible hinge (52) to make by piezoelectric stack (46)
Pressure head part produces accurate displacement, realizes the accurate loading of micro-nano impression module, load signal and displacement signal are passed by power
Sensor (47) and laser displacement sensor (51) are measured；Test specimen support platform is assemblied on base (12) by screw, its
Middle shears-type electric lifting platform controls driving to realize that scissors structure is moved or by manual along the z-axis direction by lifting platform motor (9)
Knob (10) is controlled manually, realizes the fast feed of impression instrument (4) and the rapid focus of metallographic microscope (22)；Electronic rotation
Turn platform：Rotation platform motor (18) is fixed by rotation platform motor support base (33), and objective table is realized through Worm Wheel System
(5) rotation, the structure of the electric rotating platform is as follows：Rotation platform motor (18) passes through coupling assembly I (17) and snail
Bar axle (13) is connected, and drives it to rotate, the rotation of worm shaft (13) is passed into electronic rotation by Worm Wheel System
The rotary shaft (36) of platform, band dynamic object stage (5) is rotated, and realizes the rotating function of electric rotating platform；Turbine (6) and rotary shaft
(36) connected by flat key, objective table connecting plate (31) is connected with rotary shaft (36) by spline, so as to realize the transmission of motion；
Electric rotating platform is fixed on rotation platform by bearing block I, II, III (16,7,32) and bearing block support block I, II (15,8)
On base (14), it is assembled together by rotation platform base (14) and shears-type electric lifting platform, shears-type electric lifting platform drives
It realizes elevating movement along the z-axis direction.
5. the suspension type rotary according to claim 1 or 3 quickly positions impression in situ/deepen arc cut test device,
It is characterized in that：Deepening arc cut method of testing is：After pressure head Specimen, impression instrument is in stress state, and keeps being somebody's turn to do
State is constant, and the rotated platform motor (18) of electric rotating platform objective table (5), which drives, to be rotated, so that the scribing on test specimen
Go out automatic rotary during with impression test and change locus of points identical cut, realize arc cut test experiments；When progress arc cut
During experiment, movement along the z-axis direction occurs under the drive of lifting platform motor (9) for shears-type electric lifting platform and objective table (5), makes
Scratch depth constantly changes in scoring process, and realization deepens the test of arc cut.
6. a kind of suspension type rotary quickly positions impression in situ/deepen arc cut method of testing, it is characterised in that：Objective table
(5) central point be O, impression instrument (4) pressure head (48) initial position in objective table in the plane be projected as A, using O as limit,
Ray OA is that pole axis sets up polar coordinate system；Carry out impression test automatic rotary transfer point or during arc cut test experiments, on to
Lower observation, objective table (5) turns over θ angles clockwise, then now relative polar coordinate position point of the pressure head on test specimen is
(ρ,θ)
Wherein, ρ is line segment OA length；
The relative motion arc length of pressure head (48) is
L=ρ θ
When device carries out rotating quick positioning, observe from up to down, rotating disk (19) relative initial position turns over α angles clockwise
Spend, the polar coordinate position point of pressure head (48) is
(ρ,α)
Rotating disk (19) rotate arc length be
L=ρ α
Using O as origin, ray OA be x-axis, OA around origin rotate counterclockwise 90 degree ray OA ' be y-axis, vertical Oxy planes to
Upper is z-axis, creates rectangular coordinate system in space；With pressure head (48) point with Oxy planes vertically upward apart from H and the face parallel with Oxy
On the basis of face, progress deepen arc cut test when, objective table relative datum moves upwardly h, then pressure head (48) space sit
Mark is set to
(ρcosθ,ρsinθ,H-h)
Meanwhile, axial force-transverse direction force curve in the deep curve of load-pressure and scoring processes in Indentation Process can be pressed
The mechanics parameter of the materials such as trace hardness, contact stiffness, modulus of elasticity, scratch hardness, coefficient of friction；
P is loading of pressing in the deep curve of load-pressure, and h is press-in displacement, and four crucial parameters are maximum loading of pressing in respectively
Pmax, maximum compression distance hmax, remaining compression distance hfWith contact stiffness S=dP/dh, contact stiffness is defined as unloading curve top
Portion's slope；
The unloading part of loading of pressing in-depth curve meets following power function relationship formulas
P=α (h-hf)m
Wherein, α and m is power function fitting parameter, generally 25%~50% part at the top of unloading curve is entered in practical application
Row least square fitting, obtains α and m values；
Contact depth between pressure head and test specimen is
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Contact area function A can be further obtained, i.e.,
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For preferable Bo Shi pressure headsVickers indenter
After contact area function is determined, the identation hardness of material is to be represented by
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Equivalent modulus ErIntroducing consider the elastic deformation of test specimen and pressure head simultaneously, its modulus of elasticity, pool with test specimen and pressure head
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Wherein, E, EiThe respectively modulus of elasticity of test specimen and pressure head material；v、viIt is the Poisson of material for test and pressure head material respectively
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Different from impression test, in scoring processes, rigid pressure head enters Mobile state along surface of test piece and slided；It is widely used in thin
In membrane material, coating material, biomaterial, the friction of high polymer material, the research of polishing machine；FNFor in scoring processes
Pressure head is applied to the axial force on test specimen, FLThe cross force being subject to for pressure head, d is the width of remaining cut；
The scoring processes of correspondence conical indenter, scratch hardness is represented by
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In cut test process, the coefficient of friction between material and test specimen is obtained by following formula
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3
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