CN106248068A - Double distributed gyroscope of discrete electrodes of adjacent surface and preparation method thereof - Google Patents
Double distributed gyroscope of discrete electrodes of adjacent surface and preparation method thereof Download PDFInfo
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- CN106248068A CN106248068A CN201610635034.7A CN201610635034A CN106248068A CN 106248068 A CN106248068 A CN 106248068A CN 201610635034 A CN201610635034 A CN 201610635034A CN 106248068 A CN106248068 A CN 106248068A
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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Abstract
The present invention proposes double distributed gyroscope of discrete electrodes of a kind of adjacent surface and preparation method thereof, including: monocrystal silicon substrate, center fix support column, miniature resonant, side electrode, adjacent electrode, substrate of glass.Side electrode is multiple, is evenly distributed on the one side of miniature resonant, constitutes and is uniformly distributed formula side electrode；Adjacent electrode is multiple, is evenly distributed on an adjacent surface of miniature resonant, so constitutes and is uniformly distributed formula adjacent electrode；The present invention combines MEMS Bulk micro machining and surface silicon processing technique makes；Different driving, detection mode and different mode of operations are provided, can be operated in the system needing complex control；Utilize adjacent electrode and side electrode are driven respectively and detect, reduce the parasitic capacitance between drive electrode and detecting electrode, improve accuracy of detection.
Description
Technical field
The present invention relates to the minisize gyroscopes of field of micro electromechanical technology, in particular it relates to the double discrete electrodes of a kind of adjacent surface
Distributed gyroscope and preparation method thereof.
Background technology
Gyroscope is a kind of inertia device that can detect carrier angle or angular velocity, at gesture stability and navigator fix etc.
There is very important effect in field.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system is for gyro
The requirement of instrument also to low cost, small size, in high precision, many shaft detection, high reliability, the direction that adapts to various adverse circumstances send out
Exhibition.Therefore, the importance of MEMS microthrust test is self-evident.Especially, micro hemispherical resonator gyro instrument is as MEMS microthrust test
One important research direction, has become as a study hotspot in this field.
For minisize gyroscopes, use full angle to control technology, there is stability height, strong shock resistance, precision
The advantageous characteristic such as height, error are little, before the fields such as Aero-Space, inertial navigation and civilian consumer electronics have a wide range of applications
Scape.The number of electrodes of the gyroscope of design is less at present, limits its application in complex control system；And general top
A set of electrode on spiral shell instrument only one of which face, drives, detects and controls to there is certain parasitic capacitance between electrode and signal is done
Disturb, limit its accuracy of detection.
Based on this, in the urgent need to proposing a kind of new gyroscope arrangement so that it is avoid or reduce above-mentioned influence factor, simultaneously
Extend its range of application.
Through retrieving, Publication No. CN104165623A, the Chinese invention patent application of Application No. 201410389616.2,
The invention provides Double-electrode type micro hemispherical resonator gyro instrument and preparation method thereof inside and outside one, including: monocrystal silicon substrate, in
The heart fixes support column, miniature hemisphere harmonic oscillator, external electrode, external electrode metal welding fishplate bar, substrate of glass, metal lead wire, circular weldering
Drum, external electrode metal connect electrode and Seed Layer in post.This invention may utilize inner and outer electrodes be driven respectively and
Detection, reduces the parasitic capacitance between drive electrode and detecting electrode, improves accuracy of detection；Provide for inner and outer electrodes
Metal lead wire and circular bonding wire dish, it is simple to signal applies and signal extraction.
But above-mentioned patent provide only the structure of the miniature hemisphere gyroscope of internal discrete electrodes and external discrete electrode
Scheme, it is impossible to provide different distribution of electrodes schemes for multiple minisize gyroscopes.
Summary of the invention
For defect of the prior art, it is an object of the invention to provide the double discrete electrodes of a kind of adjacent surface distributed micro-
Gyroscope and preparation method thereof, described gyroscope combines MEMS Bulk micro machining and surface silicon processing technique makes,
It it is the processing technique of a kind of novelty；Different driving, detection mode and different mode of operations can be provided, needs can be operated in multiple
In the system of miscellaneous control.
According to an aspect of the present invention, it is provided that the double distributed gyroscope of discrete electrodes of a kind of adjacent surface, including: single
Support column, miniature resonant, side electrode, adjacent electrode, substrate of glass are fixed in crystal silicon substrate, center；Wherein:
Described side electrode is multiple, and multiple side electrodes are evenly distributed on the one side of miniature resonant, constitutes uniformly
Distributed side electrode；The most described side electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described adjacent electrode is multiple, and multiple adjacent electrodes are evenly distributed on an adjacent surface of miniature resonant, and this is adjacent
Face refers to adjacent with the described side being distributed side electrode, so constitutes and is uniformly distributed formula adjacent electrode；
Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, and another of support column is fixed at described center
End is connected with described miniature resonant；Described adjacent electrode is arranged at the surface of described monocrystal silicon substrate or the table of substrate of glass
Face；Described monocrystal silicon substrate is bonded with described substrate of glass；
Described miniature resonant is used for described as the pendulum of described gyroscope, described side electrode and adjacent electrode
The driving of gyroscope, detect and control.
When gyroscope of the present invention is operated under angular speed pattern, apply alternating current drive signal, described miniature humorous
Apply DC bias signal on oscillator, be uniformly distributed formula side electrode and make needed for described miniature resonant is operated in by electrostatic force
Driven-mode under, the vibration amplitude of driven-mode and frequency keep constant；When being perpendicular to monocrystal silicon substrate outside direction exists
When adding angular velocity, the vibration amplitude of sensed-mode can change, and the size of this vibration amplitude becomes with the size of additional angular velocity
Direct ratio, cause simultaneously described in be uniformly distributed between formula side electrode and described miniature resonant electric capacity change；By adopting
The signal intensity being uniformly distributed described in collection on formula side electrode calculates the size of sensed-mode vibration amplitude, and then calculates additional angle
The size of speed.
Further, the signal intensity that gyroscope collection of the present invention is uniformly distributed on formula adjacent electrode calculates detection mould
The size of state vibration amplitude, and then calculate the size of additional angular velocity, thus reduce and be uniformly distributed posting between formula side electrode
Raw electric capacity, improves accuracy of detection.
Further, gyroscope of the present invention is being uniformly distributed on formula adjacent electrode applying alternating current drive signal, and
Described it be uniformly distributed formula side electrode or be uniformly distributed acquisition testing signal on formula adjacent electrode, it is provided that different driving, detection
And control mode.
Further, the present invention pass through described in be uniformly distributed on formula adjacent electrode signal intensity judge described gyroscope
Duty, under abnormal operating state, is uniformly distributed on formula adjacent electrode applying by control algolithm in part and controls letter
Number, the duty of gyroscope described in scalable, so that described gyroscope normally works.
Further, gyroscope of the present invention can be operated under dynamic balance pattern and full angle pattern, dynamic balance pattern
Directly detecting the size of additional angular velocity, full angle pattern directly detects the size of the additional anglec of rotation.
Preferably, multiple formula adjacent electrodes that are uniformly distributed are evenly distributed in the upside of described miniature resonant, downside, outer
Side or inner side, and it is in adjacent surface with side electrode.
Preferably, multiple be uniformly distributed formula side electrode be evenly distributed in described miniature resonant side, i.e. upside,
Any one side in downside, outside or inboard.
Preferably, the material of described side electrode and described adjacent electrode is boron ion or phosphonium ion doped silicon or is gold
Belong to nickel；When side electrode or adjacent electrode are positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；Work as side
When face electrode or adjacent electrode are positioned in substrate of glass, material is metallic nickel.
Preferably, described gyroscope is annular resonance gyroscope, hemispherical resonant gyro, hemisphere resonant gyroscope
Instrument, cup-shaped resonator gyroscope, disk resonator gyroscope, bird-nest-shaped resonator gyroscope.
Preferably, the material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon, is described gyroscope
Principal vibration body.
Preferably, described monocrystal silicon substrate and the material of substrate of glass are respectively the high resistant of High Resistivity Si or silicon dioxide
Material, highly resistant material is for reducing the signal disturbing between side electrode.
Preferably, it is silicon dioxide or High Resistivity Si that the material of support column is fixed at described center.
In the present invention, described side electrode and adjacent electrode distribution can be used in the control system of complexity, it is achieved full-shape
Degree controls.
The present invention emphasizes be uniformly distributed formula side electrode and be uniformly distributed the multiple minisize gyroscopes knot of formula adjacent surface electrode
Structure, can be suitably used for special drives and detection scheme (as described embodiments), and miniature resonant is not limited solely to miniature
Hemispherical resonant gyro, also can provide different distribution of electrodes schemes for multiple minisize gyroscopes.
The bipolar electrode distribution that adjacent surface of the present invention is discrete, in structure, its electrode is adjacent distributions, rather than
Distribution or inside and outside distribution up and down, and be adjacent surface pair discrete electrodes, be discrete electrodes with other only one of which faces compared with, can
To realize increasingly complex circuit control.
According to another aspect of the present invention, it is provided that the preparation of the double distributed gyroscope of discrete electrodes of a kind of adjacent surface
Method, comprises the steps:
The first step, monocrystal silicon substrate and substrate of glass are carried out, gluing, photoetching, development, boron ion implanting, sputtering,
Degumming process, obtains boron ion or the side electrode of phosphonium ion doped silicon material or adjacent electrode in monocrystal silicon substrate；
Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at list
The groove that the sub-shape of miniature resonant is corresponding is obtained in crystal silicon substrate；
3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making miniature resonant and side electrode or adjacent electricity
Clearance between poles provides sacrifice layer；
4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, with
Making miniature resonant；
5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with
Release miniature resonant, and nubbin is fixed support column as center；
6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make metallic nickel materials
Adjacent electrode or side electrode；
7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, make core and the monocrystalline of substrate of glass
The center alignment of support column is fixed at the center of silicon base, it is achieved two substrates are fixed, thus obtains the double discrete electrodes of adjacent surface and divide
Cloth gyroscope.
Compared with prior art, the present invention has a following beneficial effect:
(1) described gyroscope combines MEMS Bulk micro machining and surface silicon processing technique makes, and is one
Plant novel processing technique；
(2) described gyroscope can provide different driving, detection mode and different mode of operations, is not reducing electrode
In the case of area, add number of electrodes, described gyroscope can be made to be operated in the system needing complex control；
(3) described gyroscope may utilize adjacent electrode and side electrode is driven respectively and detects, and reduces and drives electricity
Parasitic capacitance between pole and detecting electrode, improves accuracy of detection；Can be used in the control system of complexity, it is achieved full angle control
System.
Accompanying drawing explanation
By the detailed description non-limiting example made with reference to the following drawings of reading, the further feature of the present invention,
Purpose and advantage will become more apparent upon:
Fig. 1 (a)-Fig. 1 (c) is the double discrete electrodes distributed miniature hemisphere resonance top of adjacent surface of one embodiment of the invention
Spiral shell instrument structural representation；
Fig. 2 (a)-Fig. 2 (c) is the double discrete electrodes distributed micro loop resonance top of adjacent surface of one embodiment of the invention
Spiral shell instrument structural representation；
Fig. 3 (a)-Fig. 3 (c) is the double distributed miniature disk resonance top of discrete electrodes of adjacent surface of one embodiment of the invention
Spiral shell instrument structural representation；
Fig. 4 (a)-Fig. 4 (c) is the double discrete electrodes distributed miniature hemisphere body resonance of adjacent surface of one embodiment of the invention
Gyroscope arrangement schematic diagram；
Fig. 5 (a)-Fig. 5 (c) is the double distributed miniature multi-ring resonance top of discrete electrodes of adjacent surface of one embodiment of the invention
Spiral shell instrument structural representation；
Fig. 6 (a)-Fig. 6 (c) is the double distributed miniature cup-shaped resonance top of discrete electrodes of adjacent surface of one embodiment of the invention
Spiral shell instrument structural representation；
Fig. 7 (a)-Fig. 7 (g) is the double discrete electrodes distributed miniature hemisphere resonance top of adjacent surface of one embodiment of the invention
The preparation method flow chart of spiral shell instrument；
In figure: 1 is miniature resonant, and 2 for being uniformly distributed formula side electrode, and 3 for being uniformly distributed formula adjacent electrode, 4 is single
Crystal silicon substrate, 5 is substrate of glass, fixes support column centered by 6.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in the technology of this area
Personnel are further appreciated by the present invention, but limit the present invention the most in any form.It should be pointed out that, the ordinary skill to this area
For personnel, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into the present invention
Protection domain.
Embodiment 1
As shown in Fig. 1 (a)-Fig. 1 (c), the present embodiment provides a kind of adjacent surface double distributed miniature hemisphere of discrete electrodes
Resonator gyroscope, including:
One hemispheric miniature resonant 1；
16 are uniformly distributed formula side electrode 2；
16 are uniformly distributed formula adjacent electrode 3；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 1 (a)) with described miniature resonant 1；
It is uniformly distributed formula side electrode 2 described in 16 and is arranged at the surface (as shown in Fig. 1 (b)) of described substrate of glass 5,
And it is evenly distributed in the upside (as shown in Fig. 1 (c)) of described miniature resonant 1；The adjacent electricity of formula it is uniformly distributed described in 16
Pole 3 is arranged at the surface of described monocrystal silicon substrate 4, and is evenly distributed in the outside of described miniature resonant 1 (such as Fig. 1 (a) institute
Show)；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of ball resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, be uniformly distributed formula side electrode 2 for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, described in be uniformly distributed the material of formula adjacent electrode 3 be boron ion or phosphonium ion doped silicon, for institute
State the driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, described monocrystal silicon substrate 4 and the material of substrate of glass 5 be respectively High Resistivity Si and silicon dioxide this
The highly resistant material of sample, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and 16 to be uniformly distributed formula adjacent
Signal disturbing between electrode 3.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center.
In the present embodiment, described micro hemispherical resonator gyro instrument can be operated under angular speed pattern, applies exchange and drives letter
Number, described miniature resonant 1 applies DC bias signal, described in be uniformly distributed formula side electrode 2 and make institute by electrostatic force
Stating miniature resonant 1 to be operated under required driven-mode, the vibration amplitude of driven-mode and frequency keep constant；When being perpendicular to
Monocrystal silicon substrate 4 is in time there is additional angular velocity in direction, and the vibration amplitude of sensed-mode can change, this vibration amplitude big
Little and additional angular velocity size is directly proportional, cause simultaneously described in be uniformly distributed formula side electrode 2 and described miniature resonant 1 it
Between electric capacity change；Sensed-mode can be calculated by being uniformly distributed the signal intensity on formula side electrode 2 described in collection
The size of vibration amplitude, and then calculate the size of additional angular velocity.
In the present embodiment, described micro hemispherical resonator gyro instrument can also gather described in be uniformly distributed on formula adjacent electrode 3
Signal intensity calculate the size of sensed-mode vibration amplitude, and then calculate the size of additional angular velocity, thus reduce described all
Parasitic capacitance between even distributed side electrode 2, improves accuracy of detection.
In the present embodiment, described micro hemispherical resonator gyro instrument can be uniformly distributed on formula adjacent electrode 3 applying described
Alternating current drive signal, and described be uniformly distributed formula side electrode 2 or described in be uniformly distributed on formula adjacent electrode 3 acquisition testing letter
Number, it is provided that different driving, detection and control modes.
In the present embodiment, described micro hemispherical resonator gyro instrument can pass through described in be uniformly distributed on formula adjacent electrode 3
Signal intensity judges the duty of described micro hemispherical resonator gyro instrument, under abnormal operating state, passes through control algolithm
Applying control signal it is being uniformly distributed on formula adjacent electrode 3, the work of micro hemispherical resonator gyro instrument described in scalable described in part
Make state, so that described micro hemispherical resonator gyro instrument normally works.
In the present embodiment, described micro hemispherical resonator gyro instrument also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 2
As shown in Fig. 2 (a)-Fig. 2 (c), the present embodiment provides a kind of adjacent surface double distributed micro loop of discrete electrodes
Resonator gyroscope, including:
One annular miniature resonant 1；
16 are uniformly distributed formula side electrode 2；
16 are uniformly distributed formula adjacent electrode 3；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 2 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface of described monocrystal silicon substrate 4, and it is evenly distributed in the outside (as shown in Fig. 2 (a)) of described miniature resonant 1；16
It is uniformly distributed formula adjacent electrode 3 described in individual and is arranged at the surface (as shown in Fig. 2 (b)) of described substrate of glass 5, and be evenly distributed
Upside (as shown in Fig. 2 (c)) at described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described Micro-ring
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, be uniformly distributed formula side electrode 2 for described micro loop resonator gyroscope driving, detect and control.
In the present embodiment, described in be uniformly distributed the material of formula adjacent electrode 3 be boron ion or phosphonium ion doped silicon, for institute
State the driving of micro loop resonator gyroscope, detect and control.
In the present embodiment, described monocrystal silicon substrate 4 and the material of substrate of glass 5 be respectively High Resistivity Si and silicon dioxide this
The highly resistant material of sample, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and 16 be uniformly distributed the adjacent electricity of formula
Signal disturbing between pole 3.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center.
In the present embodiment, described micro loop resonator gyroscope also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 3
As shown in Fig. 3 (a)-Fig. 3 (c), the present embodiment provides a kind of adjacent surface double distributed miniature disk of discrete electrodes
Resonator gyroscope, including:
One discoidal miniature resonant 1；
16 are uniformly distributed formula side electrode 2；
16 are uniformly distributed formula adjacent electrode 3；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 3 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface of described monocrystal silicon substrate 4, and it is evenly distributed in the outside (as shown in Fig. 3 (a)) of described miniature resonant 1；16
It is uniformly distributed formula adjacent electrode 3 described in individual and is arranged at the surface (as shown in Fig. 3 (b)) of described substrate of glass 5, and be evenly distributed
Upside (as shown in Fig. 3 (c)) at described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature circular
The principal vibration body of dish resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, be uniformly distributed formula side electrode 2 for described miniature disk resonator gyroscope driving, detect and control.
In the present embodiment, described in be uniformly distributed the material of formula adjacent electrode 3 be boron ion or phosphonium ion doped silicon, for institute
State the driving of miniature disk resonator gyroscope, detect and control.
In the present embodiment, described monocrystal silicon substrate 4 and the material of substrate of glass 5 be respectively High Resistivity Si and silicon dioxide this
The highly resistant material of sample, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and 16 be uniformly distributed the adjacent electricity of formula
Signal disturbing between pole 3.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center.
In the present embodiment, described miniature disk resonator gyroscope also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 4
As shown in Fig. 4 (a)-Fig. 4 (c), the present embodiment provides a kind of adjacent surface double distributed miniature hemisphere of discrete electrodes
Body resonator gyroscope, including:
Miniature resonant 1 of one hemisphere bodily form；
16 are uniformly distributed formula side electrode 2；
16 are uniformly distributed formula adjacent electrode 3；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 4 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface (as shown in Fig. 4 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as Fig. 4
Shown in (c))；It is uniformly distributed formula adjacent electrode 3 described in 16 and is arranged at the surface of described monocrystal silicon substrate 4, and divide equably
Cloth is in the outside (as shown in Fig. 4 (a)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of spheroid resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, be uniformly distributed formula side electrode 2 for described miniature hemisphere body resonator gyroscope driving, detect and control.
In the present embodiment, described in be uniformly distributed the material of formula adjacent electrode 3 be boron ion or phosphonium ion doped silicon, for institute
State the driving of miniature hemisphere body resonator gyroscope, detect and control.
In the present embodiment, described monocrystal silicon substrate 4 and the material of substrate of glass 5 be respectively High Resistivity Si and silicon dioxide this
The highly resistant material of sample, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and 16 to be uniformly distributed formula adjacent
Signal disturbing between electrode 3.
In the present embodiment, in the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center.
Embodiment 5
As shown in Fig. 5 (a)-Fig. 5 (c), the present embodiment provides the double discrete electrodes of a kind of adjacent surface distributed miniature multi-ring
Resonator gyroscope, including:
Miniature resonant 1 of annular more than one；
16 are uniformly distributed formula side electrode 2；
16 are uniformly distributed formula adjacent electrode 3；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 5 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface (as shown in Fig. 5 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as Fig. 5
Shown in (c))；It is uniformly distributed formula adjacent electrode 3 described in 16 and is arranged at the surface of described monocrystal silicon substrate 4, and divide equably
Cloth is in the outside (as shown in Fig. 5 (a)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature many
The principal vibration body of ring resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, be uniformly distributed formula side electrode 2 for described miniature multi-ring resonator gyroscope driving, detect and control.
In the present embodiment, described in be uniformly distributed the material of formula adjacent electrode 3 be boron ion or phosphonium ion doped silicon, for institute
State the driving of miniature multi-ring resonator gyroscope, detect and control.
In the present embodiment, described monocrystal silicon substrate 4 and the material of substrate of glass 5 be respectively High Resistivity Si and silicon dioxide this
The highly resistant material of sample, highly resistant material can reduce 16 and be uniformly distributed formula side electrode 2 to be uniformly distributed formula with 16 adjacent
Signal disturbing between electrode 3.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center.
Embodiment 6
As shown in Fig. 6 (a)-Fig. 6 (c), the present embodiment provides the double discrete electrodes of a kind of adjacent surface distributed miniature cup-shaped
Resonator gyroscope, including:
One cup-shaped miniature resonant 1；
16 are uniformly distributed formula side electrode 2；
16 are uniformly distributed formula adjacent electrode 3；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 6 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface (as shown in Fig. 6 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as Fig. 6
Shown in (c))；It is uniformly distributed formula adjacent electrode 3 described in 16 and is arranged at the surface of described monocrystal silicon substrate 4, and divide equably
Cloth is in the outside (as shown in Fig. 6 (a)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature cup
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, be uniformly distributed formula side electrode 2 for described miniature cup-shaped resonator gyroscope driving, detect and control.
In the present embodiment, described in be uniformly distributed the material of formula adjacent electrode 3 be boron ion or phosphonium ion doped silicon, for institute
State the driving of miniature cup-shaped resonator gyroscope, detect and control.
Further, described microthrust test can be provided with metal lead wire, one end of described metal lead wire and side electrode, adjacent
Electrode connects, and the other end of described metal lead wire, as external interface, applies and signal extraction for signal.
In the present embodiment, described monocrystal silicon substrate 4 and the material of substrate of glass 5 be respectively High Resistivity Si and silicon dioxide this
The highly resistant material of sample, highly resistant material can reduce 16 and be uniformly distributed formula side electrode 2 to be uniformly distributed formula with 16 adjacent
Signal disturbing between electrode 3.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center.
Present invention incorporates MEMS Bulk micro machining and surface silicon processing technique makes, be the processing of a kind of novelty
Technique；Gyroscope in the present invention can provide different driving, detection mode and different mode of operations, can be operated in needs
In the system of complex control；Gyroscope in the present invention may utilize adjacent electrode and side electrode is driven respectively and examines
Survey, reduce the parasitic capacitance between drive electrode and detecting electrode, improve accuracy of detection；The adjacent electricity of gyroscope in the present invention
Pole and side electrode provide metal lead wire, it is simple to signal applies and signal extraction.
Embodiment 7
As shown in Fig. 7 (a)-Fig. 7 (g), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
The preparation method of type hemispherical resonant gyro, comprises the steps:
The first step, as shown in Fig. 7 (a), monocrystal silicon substrate 4 is carried out, gluing, photoetching, development, boron ion implanting,
Sputtering, degumming process, to obtain the side electricity of the boron ion doping silicon materials that thickness is 10 μm-50 μm in monocrystal silicon substrate 1
Pole 2；
Second step, as shown in Fig. 7 (b), monocrystal silicon substrate is carried out gluing, photoetching, development, silicon isotropism carve
Lose, remove photoresist, to obtain the hemispherical groove that radius is 300 μm-700 μm in monocrystal silicon substrate 4；
3rd step, as shown in Fig. 7 (c), in monocrystal silicon substrate, deposit thickness is the silicon dioxide of 1 μm-5 μm, for make
Miniature hemisphere harmonic oscillator 1 and electrode gap provide sacrifice layer；
4th step, as shown in Fig. 7 (d), on the basis of the 3rd step, deposit doped diamond or DOPOS doped polycrystalline silicon, and carry out
Chemically mechanical polishing, to make the miniature hemisphere harmonic oscillator 1 that thickness is 1 μm-5 μm；
5th step, as shown in Fig. 7 (e), on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control
Etch period processed, to discharge miniature hemisphere harmonic oscillator 1, supports fixing as the center that radius is 15 μm-35 μm for nubbin
Post 6；
6th step, as shown in Fig. 7 (f), gluing, photoetching, development, electronickelling in substrate of glass 5, remove photoresist, to make height
Degree is the adjacent electrode 3 of the metallic nickel materials of 20 μm-70 μm.
7th step, as shown in Fig. 7 (g), be inverted substrate of glass 5, and be bonded with monocrystal silicon substrate 4, make substrate of glass 5
The core center of fixing support column with the center of monocrystal silicon substrate 4 be directed at, it is achieved two substrates are fixed, thus obtain side
The distributed gyroscope of bipolar electrode of discrete adjacent surface annular.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make various deformation or amendment within the scope of the claims, this not shadow
Ring the flesh and blood of the present invention.
Claims (10)
1. the double distributed gyroscope of discrete electrodes of an adjacent surface, it is characterised in that including: monocrystal silicon substrate, center are solid
Determine support column, miniature resonant, side electrode, adjacent electrode and substrate of glass；Wherein:
Described side electrode is multiple, and multiple side electrodes are evenly distributed on the one side of miniature resonant, and composition is uniformly distributed
Formula side electrode；The most described side electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described adjacent electrode is multiple, and multiple adjacent electrodes are evenly distributed on an adjacent surface of miniature resonant, and this adjacent surface is
Refer to adjacent with the described side of distribution side electrode, so constitute and be uniformly distributed formula adjacent electrode；
Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, described center fix the other end of support column with
Described miniature resonant connects；Described adjacent electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described monocrystal silicon substrate is bonded with described substrate of glass；
Described miniature resonant is used for described micro-top as the pendulum of described gyroscope, described side electrode and adjacent electrode
The driving of spiral shell instrument, detect and control.
The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 1, it is characterised in that described
When gyroscope is operated under angular speed pattern, apply alternating current drive signal, described miniature resonant applies direct current biasing
Signal, is uniformly distributed formula side electrode and makes described miniature resonant be operated under required driven-mode by electrostatic force, drives
The vibration amplitude of mode and frequency keep constant；When being perpendicular to monocrystal silicon substrate and there is additional angular velocity in direction, detect mould
The vibration amplitude of state can change, and the size of this vibration amplitude is directly proportional to the size of additional angular velocity, causes described simultaneously
The electric capacity being uniformly distributed between formula side electrode and described miniature resonant changes；It is uniformly distributed formula side described in gathering
Signal intensity on the electrode of face calculates the size of sensed-mode vibration amplitude, and then calculates the size of additional angular velocity.
The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that described
The signal intensity that gyroscope collection is uniformly distributed on formula adjacent electrode calculates the size of sensed-mode vibration amplitude, and then calculates
The size of additional angular velocity, thus reduce and be uniformly distributed the parasitic capacitance between formula side electrode, improve accuracy of detection.
The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that described
Gyroscope is being uniformly distributed on formula adjacent electrode applying alternating current drive signal, and is uniformly distributed formula side electrode or equal described
Acquisition testing signal on even distributed adjacent electrode, it is provided that different driving, detection and control modes.
The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that pass through
The described signal intensity being uniformly distributed on formula adjacent electrode judges the duty of described gyroscope, at abnormal operating state
Under, it is uniformly distributed on formula adjacent electrode applying control signal by control algolithm in part, the work of gyroscope described in scalable
Make state, so that described gyroscope normally works.
The double distributed gyroscope of discrete electrodes of a kind of adjacent surface the most according to claim 2, it is characterised in that described
Gyroscope can be operated under dynamic balance pattern and full angle pattern, and dynamic balance pattern directly detects the size of additional angular velocity,
Full angle pattern directly detects the size of the additional anglec of rotation.
7., according to the double distributed gyroscope of discrete electrodes of a kind of adjacent surface described in any one of claim 1-6, its feature exists
In, the material of described side electrode and described adjacent electrode is boron ion or phosphonium ion doped silicon or is metallic nickel；Work as side
When electrode or adjacent electrode are positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；When side electrode or
When adjacent electrode is positioned in substrate of glass, material is metallic nickel.
8. according to the double distributed gyroscope of discrete electrodes of a kind of adjacent surface described in any one of claim 1-6, its feature
Being, described monocrystal silicon substrate and the material of substrate of glass are respectively the highly resistant material of High Resistivity Si or silicon dioxide.
9. according to the double distributed gyroscope of discrete electrodes of a kind of adjacent surface described in any one of claim 1-6, its feature
Being, it is High Resistivity Si or silicon dioxide that the material of support column is fixed at described center；
The material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon.
10. the preparation according to the double distributed gyroscope of discrete electrodes of the adjacent surface described in any one of claim 1-9
Method, it is characterised in that comprise the steps:
The first step, monocrystal silicon substrate and substrate of glass are carried out, gluing, photoetching, development, boron ion implanting, sputter, remove photoresist
Technique, obtains boron ion or the side electrode of phosphonium ion doped silicon material or adjacent electrode in monocrystal silicon substrate；
Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at monocrystal silicon
The groove that the sub-shape of miniature resonant is corresponding is obtained in substrate；
3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making between miniature resonant and side electrode or adjacent electrode
Gap provides sacrifice layer；
4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, to make
Miniature resonant；
5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with release
Miniature resonant, and nubbin is fixed support column as center；
6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make the adjacent of metallic nickel materials
Electrode or side electrode；
7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, the core making substrate of glass is silica-based with monocrystalline
The center alignment of support column is fixed at the center at the end, it is achieved two substrates are fixed, thus it is distributed to obtain the double discrete electrodes of adjacent surface
Gyroscope.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980565A (en) * | 2012-11-30 | 2013-03-20 | 上海交通大学 | Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN103322994A (en) * | 2013-08-01 | 2013-09-25 | 东南大学 | Double-wafer integrated silicon-based super-thin micro-hemispherical resonator gyroscope and preparation method thereof |
| CN104165623A (en) * | 2014-08-08 | 2014-11-26 | 上海交通大学 | Internal-external double-electrode type miniature hemispherical resonance gyroscope and preparation method thereof |
| CN105115486A (en) * | 2015-07-17 | 2015-12-02 | 东南大学 | Electrostatic suspension triaxial spherical shell resonance micro-gyroscope and processing method thereof |
| US9719168B2 (en) * | 2012-03-13 | 2017-08-01 | Bei Sensors & Systems Company, Inc. | Gyroscope and devices with structural components comprising HfO2-TiO2 material |
-
2016
- 2016-08-04 CN CN201610635034.7A patent/CN106248068B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9719168B2 (en) * | 2012-03-13 | 2017-08-01 | Bei Sensors & Systems Company, Inc. | Gyroscope and devices with structural components comprising HfO2-TiO2 material |
| CN102980565A (en) * | 2012-11-30 | 2013-03-20 | 上海交通大学 | Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN103322994A (en) * | 2013-08-01 | 2013-09-25 | 东南大学 | Double-wafer integrated silicon-based super-thin micro-hemispherical resonator gyroscope and preparation method thereof |
| CN104165623A (en) * | 2014-08-08 | 2014-11-26 | 上海交通大学 | Internal-external double-electrode type miniature hemispherical resonance gyroscope and preparation method thereof |
| CN105115486A (en) * | 2015-07-17 | 2015-12-02 | 东南大学 | Electrostatic suspension triaxial spherical shell resonance micro-gyroscope and processing method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 王化祥 等: "《传感器原理及应用》", 30 September 2014, 《天津大学出版社》 * |
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