CH707297B1 - Single-piece regulating element for timepiece, has balancer cooperating with spiral having hairspring mounted coaxially on ferrule, where axial extension portion of ferrule is connected to balancer as single-piece - Google Patents

Abstract

The regulating element (41') has a balancer (43') cooperating with a spiral (51') formed in a silicon material layer. The spiral includes a hairspring (53') mounted coaxially on a ferrule (55') having a cavity. The ferrule includes an axial extension portion projecting from the hairspring, where the axial extension portion is carried in another silicon material layer. The axial extension portion of the ferrule is connected to the balancer as a single-piece. The balancer includes a hole prolonging the cavity of the ferrule to receive a balancer axle (49). An independent claim is also included for a method for manufacturing a single-piece regulating element.

Description

Field of the invention

The invention relates to a regulating member and its manufacturing method and, more particularly, to a regulating member of the sprung-balance type.

Background of the invention

The regulating member of a timepiece generally comprises a flywheel called pendulum and a resonator called spiral. These pieces are decisive for the running quality of the timepiece. Indeed, they regulate the movement, that is to say that they control the frequency of the movement.

The balance and the spiral are different in nature which makes the focus of the regulating organ, which includes the own manufacturing of the balance and the spiral and their assembly substantially in resonance, extremely complex.

The balance and the spiral have each been manufactured in various materials in particular to limit the influence of a temperature change without resonance assembly difficulties disappear.

Summary of the invention

The object of the present invention is to overcome all or part of the disadvantages mentioned above by providing a monobloc regulator member which remains insensitive to temperature changes and which is obtained using a manufacturing method which minimizes assembly difficulties.

For this purpose, the invention relates to a one-piece regulating member comprising a balance cooperating with a spiral formed in a layer of silicon-based material and comprising a spiral spring mounted coaxially on a ferrule, the ferrule comprising a an extension part projecting from said spiral spring and which is made in a second layer of silicon-based material characterized in that the portion extending from the shell of the spiral is fixed on the balance.

According to other advantageous embodiments of the invention: the balance has a hole extending the cavity of the shell to receive a balance shaft; the balance shaft is fixed on the balance; the balance shaft is fixed on the balance by driving against a metal coating made at said hole; the section of the cavity of the ferrule is larger than that of the balance hole in order to avoid the greasy contacts between the balance shaft and the cavity of the ferrule; the beam serge is continuous and comprises a device adapted to change the moment of inertia of the balance; the serge is connected to the hub of the balance by at least one arm which is slender in order to allow its axial and / or radial deformation in the event of shock transmitted on the balance; the adaptation device comprises recesses made on the balance rod so as to adjust the inertia of said balance; the recesses comprise a material of greater density than that of the strut of the balance to increase the inertia of said balance; the adaptation device comprises bosses made on the balance rod and comprising a material of greater density than the serge to increase the inertia of said balance; said higher density material is distributed at the serge in the form of a crenellated ring having a succession of studs spaced apart at regular intervals to compensate for the thermal expansion of said material; the balance is made in a third layer of silicon-based material; the inner coil of the spiral spring comprises a Grossmann type curve in order to improve the concentricity of the development of said spiral; the spiral spring comprises at least one portion based on silicon dioxide in order to make it more mechanically strong and to adjust its thermo-elastic coefficient.

More generally, the invention also relates to a timepiece characterized in that it comprises a one-piece regulating member according to one of the preceding variants.

Finally, the invention relates to a method of manufacturing a regulator member comprising the following steps: <tb> a) <SEP> provide a substrate comprising an upper layer and a lower layer of silicon-based materials; <tb> b) <SEP> selectively etching at least one cavity in the upper layer to define the pattern of a first portion of a shell and a first portion of a rocker made of silicon-based material of said member; <tb> c) <SEP> secure, on the etched upper layer of the substrate, an additional layer of silicon-based material; <tb> d) <SEP> selectively etching at least one cavity in the additional layer to continue the pattern of said first parts of the ferrule and the balance, and define the pattern of a spiral spring made of silicon-based material of said member ; <tb> characterized in that it further comprises the following steps: <tb> e) <SEP> selectively etching at least one cavity in the lower layer to define the last portion of the balance made of silicon-based material of said member; <tb> f) <SEP> release the regulating organ of the substrate which makes it possible to obtain a member on three levels of silicon-based materials.

According to other advantageous embodiments of the invention: after step d) step g) is carried out: oxidizing the second portion of silicon-based material of said member to adjust its thermo-elastic coefficient but also to make it mechanically more resistant; before step e), step h) is carried out: selectively depositing at least one metal layer on the lower layer to define the pattern of at least one metal part of said member and / or a second metal part intended to to receive by driving an axis; step h) comprises step i): growing said deposition by successive metal layers at least partially on the surface of the lower layer to form a metal part intended to increase the mass of the rocker made of silicon-based material and / or a second metal part intended to receive by driving an axis; step h) comprises steps j): selectively etching at least one cavity in the lower layer for receiving said at least one metal part and k): growing said deposition by successive metal layers at least partially in said at least one a cavity for forming a metal part intended to increase the mass of the rocker made of silicon-based material and / or a second metal part intended to receive by driving an axis; that step h) comprises the last step 1): polishing the metal deposit; several members are made on the same substrate which allows a series production.

Brief description of the drawings

Other features and advantages will become apparent from the description which is given below, for information only and not limiting, with reference to the accompanying drawings, in which: <tb> figs. 1 to 5 <SEP> represent successive views of the manufacturing method according to the invention; <tb> figs. 6-8 <SEP> represent views of successive steps of alternative embodiments; <tb> fig. <SEP> represents a block diagram of the process according to the invention. <tb> figs. 10 and 11 <SEP> are perspective representations of a one-piece regulator member according to a first embodiment; <tb> figs. 12 and 13 <SEP> are perspective representations of a one-piece regulator member according to a second embodiment; <tb> figs. 14 and 15 <SEP> are perspective representations of a one-piece regulator member according to a third embodiment; <tb> fig. 16 <SEP> is a perspective representation of a one-piece hairspring according to the invention.

Detailed Description of the Preferred Embodiments

The invention relates to a generally annotated method 1 for manufacturing a regulating member 41, 41, 41 for a timepiece movement. As illustrated in FIGS. 1 to 9, the method 1 comprises successive steps intended to form at least one type of member (51, 41) monobloc which can be integrally formed of silicon-based materials.

With reference to FIGS. 1 and 9, the first step 100 is to provide a substrate 3 of the type silicon on insulator (also known by the acronym SOI). The substrate 3 comprises an upper layer 5 and a lower layer 7 each composed of silicon-based material. Between the upper and lower layers 7, an intermediate layer 9 composed of silicon dioxide (SiO 2) can extend.

Preferably in this step 100, the substrate 3 is chosen so that the height of the lower layer 7 corresponds to the height of a portion of the final regulator member 41, 41, 41. In addition, the lower layer 7 must have a sufficient thickness to withstand the forces induced by the method 1. Such a thickness may be for example between 300 and 400 microns.

Preferably, the upper layer 5 is used as spacing means with respect to the lower layer 7. Therefore, the height of the upper layer 5 will be adapted according to the configuration of the regulator member 41, 41 , 41. According to said configuration, the thickness of the upper layer 5 can thus oscillate, for example, between 10 and 200 microns.

In a second step 101, as shown in FIG. 2, cavities 10, 11, 12, 13, 14 and 15 are selectively etched, for example by a deep reactive ion etching process (also known as DRIE), in the upper layer 5 of silicon. Preferably, these cavities 10, 11, 12, 13, 14 and 15 make it possible to form two patterns 17, 19 defining the inner and outer contours of silicon parts of the regulating member 41, 41, 41.

In the example illustrated in FIG. 2, the patterns 17 and 19 are substantially in the form of coaxial cylinders with a circular cross-section, the pattern 17 having a larger diameter than that of the pattern 19. However, advantageously according to the method 1, the etching on the upper layer 5 leaves all freedom on the geometry of the patterns 17 and 19. Thus, in particular, the patterns 17 and 19 are not necessarily circular but, for example, elliptical or comprise a non-circular cavity.

Preferably, material bridges 18 are left in order to maintain the substrate 3 the regulator member 41, 41, 41 during its manufacture. In the example illustrated in FIG. 2, there are four material bridges 18 which remain respectively between each of the consecutive cavities 12, 13, 14 and 15 distributed in an arc around the periphery of the pattern 17.

In a third step 102, as shown in FIG. 3, an additional layer 21 of silicon-based material is added to the substrate 3. Preferably, the additional layer 21 is fixed on the upper layer 5 by means of a fusion welding of silicon (also known by the acronym SFB ). Step 102 advantageously allows the upper layer 5 to be covered by bonding with a very strong adhesion, in particular the upper faces of the patterns 17 and 19 on the lower face of the additional layer 21. The additional layer 21 may, for example, comprise a thickness between 100 and 150 μm.

In a fourth step 103, as shown in FIG. 4, cavities 20, 22 and 24 are selectively etched, for example, by a method of the DRIE type similar to that of step 101, in the additional layer 21 of silicon-based material. These cavities 20, 22 and 24 make it possible to form three patterns 23, 25 and 27 defining the inner and outer contours of silicon parts of the regulating member 41, 41, 41.

In the example illustrated in FIG. 4, the patterns 23 and 25 are substantially in the form of coaxial cylinders with a circular section and, the pattern 27, substantially in the form of a spiral. However, advantageously according to the method 1, the etching on the additional layer 21 leaves complete freedom on the geometry of the patterns 23, 25 and 27. Thus, in particular, the patterns 23 and 25 are not necessarily circular but, for example, elliptical or have a non-circular cavity. It is the same, especially for the cavities 10 and 24 which are not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with an axis 49 of corresponding shape. Finally, each cavity 10, 24 may not be of identical shape.

Preferably, the pattern 23 made in the additional layer 21 is of similar shape and substantially perpendicular to the pattern 19 made in the upper layer 5. This means that the cavities 10 and 24 respectively forming the inner diameter of the patterns 19 and 23 communicate together and are substantially one above the other. In the example illustrated in FIGS. 10 to 15, the units 23 and 19 form the collar 55, 55, 55 of the regulating member 41, 41, 41 which extends in height on the layers 5 and 21.

Preferably, the pattern 25 made in the additional layer 21 is of similar shape and substantially perpendicular to the pattern 17 made in the upper layer 5. In the example shown, the patterns 25 and 17 form part of the serge 47, 47, 47 of the balance 43, 43, 43 of the regulating member 41, 41, 41 which extends in height in particular on the layers 5 and 21. However, it is noted that in the example illustrated in FIG. 4, the material bridges 18 are not reproduced and that the cavity 22 in the additional layer 21 forms a continuous ring, in contrast to the cavities 12, 13, 14 and 15 which open below it in FIG. 4.

Preferably, the patterns 23 and 27 are etched at the same time and form a single piece in the additional layer 21. In the example illustrated in FIGS. 10 to 15, the units 23 and 27 form the spiral spring 53, 53, 53 and the upper part of the collar 55, 55, 55 of the regulating member 41, 41, 41 . We also see that the external curve of the pattern 27 illustrated in FIG. 4 is open. This last characteristic associated with the spacing with respect to the lower layer 7 produced by the pattern 19 makes it possible to embellish said external curve by means of a raquet.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves all freedom on the geometry of the pattern 27. Thus, in particular, the pattern 27 may not have an open external curve but, for example, include on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say without the need for raquetry. The pattern 27 may also comprise an internal turn comprising a Grossmann type curve to improve its concentricity of development as explained in the document EP 1 612 627 incorporated by reference in the present description.

Following this fourth step 103, it is understood that the patterns 23 and 27 etched in the additional layer 21 are only connected by the underside of the pattern 23, with a very strong adhesion, above the pattern 19 engraved with the upper layer 5 (the pattern 19 is itself connected, with a very strong adhesion, to the lower layer 7). The patterns 23 and 27 are therefore no longer in direct contact with the additional layer 21. Similarly, the pattern 25 is no longer in direct contact with the additional layer 21 but only connected, with a very strong adhesion, to the pattern 17 etched of the upper layer 5.

Preferably as shown in broken lines in FIG. 9, the method 1 may comprise a fifth step 104 which consists in oxidizing at least the pattern 27, that is to say the spiral spring 53, 53, 53 of the regulating member 41, 41 , 41 in order to adjust its thermoelastic coefficient but also to make it mechanically more resistant. Such an oxidation step is explained in particular in patent EP 1 422 436 which is incorporated by reference in the present description.

At this stage, that is to say after step 103 or 104, it is understood that the method 1 advantageously provides to produce only the spiral 51 as visible in FIG. 16. Indeed, one of the advantages of the method 1 is to be able to adapt the height of the pattern 19 of the ferrule 55, 55, 55, 55 projecting from the spiral spring 53, 53, 53, 53 Directly by choosing the thickness of the upper layer 5.

When such a product 51, visible in FIG. 16, is desired, it is sufficient to stop the process 1 in step 103 or 104 by providing the intermediate step of forming bridges of material. Such material bridges may in particular be formed either on the pattern 19 during step 101 or on the pattern 27 at the end, for example, of the last turn during step 103. The penultimate step of the method 1 could then consist in removing the lower layer 7, for example, by etching and / or mechanical etching. Finally, in step 106, the hairspring 51 thus obtained would be released.

Advantageously according to the invention, if a regulator member 41, 41, 41 is preferred, after the fourth step 103 or preferably after the fifth step 104, the method 1 may comprise three embodiments A, B and C as shown in fig. 9. However, each of the three embodiments A, B and C ends with the same final step 106 of freeing the substrate 3 the regulator 41, 41, 41 manufactured.

Advantageously, the release step 106 can then be simply performed by providing a force to the regulating member 41, 41, 41 able to break its material bridges 18. This effort can, for example, be generated manually by an operator or by machining.

According to the embodiment A, in a sixth step 105, as shown in FIG. 5, holes 26, 28, 29, 30, 31 and 32 are selectively etched, for example, by a method of the DRIE type similar to that of steps 101 and 103, in the lower layer 7 of silicon-based material. These holes 26, 28, 29, 30, 31 and 32 make it possible to form a pattern 34 defining the inner and outer contours of a silicon part of the regulating member 41.

In the example illustrated in FIG. 5, the pattern 34 is substantially in the form of a four-armed rim. However, advantageously according to the method 1, the etching on the lower layer 7 leaves all freedom on the geometry of the pattern 34. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but for example, elliptical. In addition, the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted to the regulating member.

Preferably, part of the pattern 34 made in the lower layer 7 is of similar shape and substantially perpendicular to the patterns 17 and 25 made respectively in the upper and additional layers 5 and 21. In the example illustrated in FIG. . 5, the pattern 34 forms, with the patterns 17 and 25, the balance 43 of the regulating member 41, the serge 47 therefore extends in height over all of the layers 5, 7 and 21.

In addition, preferably, the cavity 26 of the pattern 34 is substantially in extension of the cavities 10 and 24 forming the inner diameter of the patterns 19 and 23. In the illustrated example, the successive cavities 24, 10 and 26 thus form a inner diameter adapted to receive the balance shaft 49 of the regulating member 41. Finally, it is noted that in the example illustrated in FIG. 5, the bridges of materials 18 are not reproduced in the lower layer 7 and that the cavity 28, in the manner of the cavity 22, forms a continuous ring contrary to the cavities 12, 13, 14 and 15 which are open under it to fig. 5.

Following this sixth step 105, it is understood that the pattern 34 etched in the lower layer 7 is only connected, with a very strong adhesion, to the patterns 17 and 19 etched the upper layer 5. The pattern 34 n is therefore more in direct contact with the lower layer 7.

Following the final step 106 explained above, we thus obtain, using the first embodiment A, a monoblock regulator member 41 integrally formed of silicon-based materials, as can be seen in FIGS. . 10 and 11. It is therefore clear that there is no longer any problem of assembly because it is directly achieved during the manufacture of the regulating member 41. The latter comprises a rocker 43 whose hub 45 is connected firstly radially to the serge 47 by four arms 40, 42, 44 and 46 and, on the other hand, axially to the hairspring 51, the hairspring 51 comprises a hairspring 53 and a shell 55.

As explained above, the serge 47 is formed by the peripheral ring of the pattern 34 of the lower layer 7 but also by the patterns 17 and 25 of the respective upper 5 and additional layers 21.

In addition, the ferrule 55 is formed by the pattern 23 of the additional layer 21 and the pattern 19 of the upper layer 5. Preferably, this pattern 19 is used as spacing means between the spiral 51 and the balance 43 in order to be able, for example, to pit the spiral spring 53 by means of a raquet. The pattern 19 is also useful as a guide means of the hairspring 51 by increasing the height of the shell 55.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves all freedom on the geometry of the spiral spring 53. Thus, in particular, the spiral spring 53 may not have an open external curve but, for example, for example, having on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say without the need for raquetry.

Preferably, the regulating member 41 is adapted to receive a balance shaft 49 through the cavities 24, 10 and 26. Advantageously according to the invention, the regulating member 41 being integral, it is not necessary to fix the balance shaft 49 to the shell 55 and the balance 43 but only to one of the two.

Preferably, the balance shaft 49 is fixed on the hole 26 of the balance beam 43 for example by means of elastic means 48 etched in the hub 45 of silicon. Such elastic means 48 may, for example, take the form of those disclosed in FIGS. 10A to 10E of EP 1 655 642 or those disclosed in FIGS. 1, 3 and 5 of EP 1 584 994, which patents are incorporated by reference in the present description. In addition, preferably, the cavities 24 and 10 have sections of diameter larger than that of the hole 26 to prevent the balance shaft 49 is in bold contact with the ferrule 55.

It is therefore understood that the force of the spiral 51 is subjected to the beam 43 only by the ferrule 55 and vice versa because they are all three integrally formed. The balance shaft 49 thus receives force from the regulating member 41 only through the hub 45 of the balance 43.

According to a second embodiment B, the method 1 comprises, after step 103 or 104, a sixth step 107, as shown in FIG. 6, consisting in implementing a process of the LIGA type (well-known acronym from the German "Röntgenlithographie, Galvanoformung & Abformung"). Such a process comprises a succession of steps making it possible to electrodeposit in a particular form a metal on the lower layer 7 of the substrate 3 with the aid of a photostructured resin. As this process of the LIGA type is well known, it will not be more detailed below. Preferably, the deposited metal may be, for example, gold or nickel or one of their alloys.

In the example illustrated in FIG. 6, step 107 may consist in depositing a crenellated ring 61 and / or a cylinder 63. In the example illustrated in FIG. 6, the ring 61 comprises a series of pads 65 substantially in a circular arc and is intended to advantageously increase the mass of the future beam 43. Indeed, one of the advantages of silicon is its low sensitivity to temperature variations. However, it has the disadvantage of having a low density. A first characteristic of the invention therefore consists in increasing the mass of the rocker 43 with the aid of metal obtained by electroplating in order to increase the inertia of the future rocker 43. However, in order to keep the advantages of silicon, the metal deposited on the lower layer 7 has a spacing between each pad 65 able to compensate for the thermal expansions of the ring 23.

In the example illustrated in FIG. 6, the cylinder 63 is intended to receive, advantageously, by driving a balance shaft 49. Indeed, another disadvantage of silicon lies in its very weak areas of elastic and plastic which makes it very brittle. Another feature of the invention is therefore to achieve the clamping of the balance shaft 49 not against the silicon-based material of the balance 43 but on the inner diameter 67 of the metal cylinder 63 electrodeposited during step 107 Advantageously according to method 1, the cylinder 63 obtained by electroplating leaves full freedom as to its geometry. Thus, in particular, the cavity 67 is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with an axis 49 of corresponding shape.

In a seventh step 108, similar to the step 105 visible in FIG. 5, cavities are selectively etched, for example, by a method of the DRIE type, in the lower layer 7 of silicon-based material. These cavities make it possible to form a rocker pattern similar to the pattern 34 of embodiment A. As illustrated in the example of FIGS. 12 and 13, the pattern obtained may be substantially in the form of four-armed rim. However, advantageously according to the method 1, the etching on the lower layer 7 leaves all freedom on the geometry of the pattern 34. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but for example, elliptical. In addition, the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted to the regulating member.

Preferably, a rocker pattern portion made in the lower layer 7 is of similar shape and substantially perpendicular to the patterns 17 and 25 made respectively in steps 101 and 103 in the upper layers 5 and 21. example illustrated in FIGS. 12 and 13, the pendulum pattern forms, with the patterns 17 and 25 and the metal parts 61 and / or 63, the balance 43 of the regulating member 41, the serge 47 therefore extends in height on the all layers 5, 7 and 21 and metal parts 61 and / or 63.

In addition, preferentially, as in embodiment A, the successive cavities thus form an inside diameter adapted to receive the balance shaft 49 of the regulator member 41. Finally, it can be noted that the material bridges 18 can not be reproduced either in the lower layer 7.

Following this seventh step 108, it is understood that the rocker pattern engraved in the lower layer 7 is only connected, with a very strong adhesion, to the patterns 17 and 19 of the upper layer 5 etched at the same time. step 101. The pendulum pattern is no longer in direct contact with the lower layer 7.

As a result of the final step 106 explained above, using the second embodiment B, a monobloc regulator 41 formed of silicon-based materials with one or two parts is thus obtained. 61, 63 of metal as visible in figs. 12 and 13. It is thus clear that there is no longer any problem of assembly because it is directly carried out during the manufacture of the regulating member 41. The latter comprises a rocker 43 whose hub 45 is connected on the one hand radially to the serge 47 by four arms 40, 42, 44 and 46 and, on the other hand, axially to the spiral 51 , the spiral 51 comprises a spiral spring 53 and a ferrule 55.

As explained above, the serge 47 is formed by the peripheral ring of the pendulum pattern of the lower layer 7 but also by the patterns 25 and 17 of the respective upper 5 and additional layers 21 and, optionally, of the metal part 61. In addition, the shell 55 is formed by the pattern 23 of the additional layer 21 and the pattern 19 of the upper layer 5. Preferably, this pattern 19 is used as spacing means between the spiral 51 and the balance 43 so as to pit the spiral spring 53 with a raquetetterie. The pattern 19 is also useful as a guide means of the hairspring 51 by increasing the height of the shell 55.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves all freedom on the geometry of the spiral spring 53. Thus, in particular, the spiral spring 53 may not have an open external curve but, for example, have on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say say without the need for snowshoeing.

Preferably, the regulator member 41 is adapted to receive a balance shaft 49 in its inside diameter. Advantageously according to the invention, the regulating member 41 being in one piece, it is not necessary to fix the balance shaft 49 to the shell 55 and the balance 43 but only to one of the two.

In the example illustrated in the figures, the balance shaft 49 is preferably fixed to the inner diameter 67 of the metal part 63, for example by driving. In addition, preferably, the cavities 24 and 10 have sections of larger dimensions than the inside diameter 67 of the metal part 63 in order to prevent the balance shaft 49 from being in bold contact with the ferrule 55.

It is therefore understood that the force of the spiral 51 is subjected to the beam 43 only by the ferrule 55 and vice versa because they are all three integrally formed. The balance shaft 49 thus receives force from the regulating member 41 only, preferably, via the metal part 63 of the hub 45 of the balance 43.

In addition, insofar as a metal portion 61 has been deposited, the inertia of the balance 43 is advantageously amplified. Indeed, the density of a metal being much greater than that of silicon, the mass of the balance 43 is increased and, incidentally, also its inertia.

According to a third embodiment C, the method 1 comprises, after step 103 or 104, in a sixth step 109, as shown in FIG. 7, selectively etching cavities 60 and / or 62, for example, by a DRIE-type method, at a limited depth in the lower layer 7 of silicon-based material. These cavities 60, 62 make it possible to form recesses able to serve as containers for at least one metal part. As in the example illustrated in FIG. 7, the cavities 60 and 62 obtained can be respectively ring-shaped and disk. However, advantageously according to the method 1, the etching on the lower layer 7 leaves complete freedom on the geometry of the cavities 60 and 62.

In a seventh step 110, as illustrated in FIG. 8, the method 1 comprises the implementation of a galvanic growth type or LIGA type process for filling cavities 60 and / or 62 in a particular metallic form. Preferably, the deposited metal may be, for example, gold or nickel or one of their alloys.

In the example illustrated in FIG. 8, step 110 may consist in depositing a castellated ring 64 in the cavity 60 and / or a cylinder 66 in the cavity 62. In addition, in the example illustrated in FIG. 8, the ring 64 comprises a series of pads 69 substantially in a circular arc and is intended to advantageously increase the mass of the future beam 43. Indeed, as already explained above, a disadvantage of silicon lies in its low density. Thus, as for embodiment B, a characteristic of the invention therefore consists in increasing the mass of balance 43 with metal obtained by electroplating in order to increase the inertia of the future balance 43. However, in order to keep the advantages of silicon, the metal deposited on the lower layer 7 has a spacing between each pad 69 able to compensate for the thermal expansion of the ring 64.

In the example illustrated in FIG. 8, the cylinder 66 is intended to receive, advantageously, by driving a balance shaft 49. Indeed, as already explained above, an advantageous characteristic according to the invention consists in making the clamping of the balance shaft 49 no not against the silicon-based material but on the inside diameter 70 of the metal cylinder 66 electrodeposited during step 110. Advantageously according to method 1, the cylinder 66 obtained by electroplating leaves full freedom as to its geometry. Thus, in particular, the inner diameter 70 is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with an axis 49 of corresponding shape.

Preferably, the method 1 may comprise, in an eighth step 111, polishing the metal deposit or deposits 64, 66 made during step 110 in order to make them planar.

In a ninth step 112, similar to steps 105 or 108, particularly visible in FIG. 5, cavities are selectively etched, for example, by a method of the DRIE type, in the lower layer 7 of silicon-based material. These cavities make it possible to form a rocker pattern similar to the pattern 34 of embodiment A. As illustrated in the example of FIGS. 14 and 15, the pattern obtained may be substantially in the form of four-armed rim. However, advantageously according to the method 1, the etching on the lower layer 7 leaves all freedom on the geometry of the pattern 34. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but for example, elliptical. In addition, the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted to the regulating member.

Preferably, the pendulum pattern made in the lower layer 7 is of similar shape and substantially perpendicular to the patterns 17 and 25 made respectively in the steps 101 and 103 in the upper and additional layers 5 and 21. In the illustrated example, the balance pattern forms, with the patterns 17 and 25 and the metal parts 64 and / or 66, the balance 43 of the regulating member 41, the serge 47 therefore extends in height on all layers 5, 7 and 21.

In addition, preferentially, as in embodiment A, the successive cavities thus form an inside diameter adapted to receive the balance shaft 49 of the regulator member 41. Finally, it is noted that the material bridges 18 are not reproduced either in the lower layer 7.

Following this ninth step 112, it is understood that the rocker pattern engraved in the lower layer 7 is only connected, with a very strong adhesion, to the patterns 17 and 19 of the upper layer 5 etched at the same time. step 101. The pendulum pattern is no longer in direct contact with the lower layer 7.

Following the final step 106 explained above, thus obtaining a monobloc regulator member 41 formed of silicon-based materials with one or two parts 64, 66 of metal as visible in FIGS. 14 and 15. It is thus clear that there is no longer any problem of assembly because it is directly carried out during the manufacture of the regulating member 41. The latter comprises a rocker 43 whose hub 45 is connected on the one hand radially to the serge 47 by four arms 40, 42, 44 and 46 and, on the other hand, Partly, axially to the hairspring 51, the hairspring 51 comprising a hairspring 53 and a hoop 55.

As explained above, the serge 47 is formed by the peripheral ring of the rocker pattern of the lower layer 7 but also by the patterns 25 and 17 of the respective upper 5 and additional 21 layers and, optionally, of the metal part 64. In addition, the shell 55 is formed by the pattern 23 of the additional layer 21 and the pattern 19 of the upper layer 5. Preferably, this pattern 19 is used as spacing means between the spiral 51 and the balance 43 so as to be able, for example, pit the spiral spring 53 with a raquetetterie. The pattern 19 is also useful as a guide means of the hairspring 51 by increasing the height of the shell 55.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves all freedom on the geometry of the spiral spring 53. Thus, in particular, the spiral spring 53 may not have an open external curve but, for example, have on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say to say without need of raquetterie.

Preferably, the regulator member 41 is adapted to receive a balance shaft 49 in its inside diameter. Advantageously according to the invention, the regulating member 41 being integral, it is not necessary to fix the balance shaft 49 to the shell 55 and the balance 43 but only to one of the two .

Preferably, in the example illustrated in FIGS. 14 and 15, the balance shaft 49 is fixed on the inner diameter 70 of the metal part 66, for example by driving. In addition, preferably, the cavities 24 and 10 have sections of larger dimensions than the internal diameter 70 of the metal portion 66 to prevent the balance shaft 49 is in bold contact with the ferrule 55 .

It is therefore understood that the force of the spiral 51 is subjected to the beam 43 only by the ferrule 55 and vice versa because they are all three integrally formed. The balance shaft 49 thus receives force from the regulating member 41 only, preferably, via the metal part 66 of the hub 45 of the balance 43.

In addition, insofar as a metal portion 64 has been deposited, the inertia of the balance 43 is advantageously amplified. Indeed, the density of a metal being much greater than that of silicon, the mass of the balance 43 is increased and, incidentally, also its inertia.

According to the three embodiments A, B and C, it should be understood that the final regulating member 41, 41 and 41 is thus assembled before being structured, that is to say before be etched and / or modified by electrodeposition. This advantageously makes it possible to minimize the dispersions generated by the current assemblies of a balance with a hairspring.

It should also be noted that the very good structural accuracy of a deep reactive ion etching makes it possible to reduce the starting radius of each of the spiral spring 53, 53, 53, 53, which is that is to say, the outer diameter of their shell 55, 55, 55, 55, which allows the miniaturization of the inner and outer diameters of the ferrule 55, 55, 55, 55 .

Advantageously according to the invention, it is also understood that it is possible that several regulating members 41, 41 and 41 can be made on the same substrate 3 which allows a series production.

Of course, the present invention is not limited to the illustrated example but is susceptible of various variations and modifications that will occur to those skilled in the art. In particular, the patterns 17 and 25 etched in steps 101 and 103 in the layers 5 and 21 may not be limited to a plane surface state but may incorporate at least one ornament in said steps for decorating at least one of the faces. serge 47, 47, 47 which can be useful especially in the case of timepieces of the skeleton type.

It is also possible that the metal parts 63, 66 electrodeposited according to the embodiments B and C are interchanged, that is to say that the projecting portion 63 of the B mode is replaced by the integrated part 66 of the mode C or vice versa (which requires only a slight adaptation of the method 1) or even that the portion 66 integrated in the hub protrudes from the lower layer 7.

According to a similar reasoning, it is also possible for the metal parts 61, 64 electrodeposited in the embodiments B and C to be interchanged, that is to say that the projecting portion 61 of the mode B is replaced by the integrated part 64 of the mode C or vice versa or even that the part 64 integrated in the serge protrudes from the lower layer 7.

In addition, advantageously, the method 1 may furthermore provide, a posteriori of the release step 106, a step of adapting the frequency of the regulating member 41, 41, 41. Such a step could then consist in engraving, for example by laser, recesses 68 able to modify the operating frequency of said regulator member. Such recesses 68, as illustrated in the example of FIGS. 10 and 11, could, for example, be made on one of the peripheral walls of the pattern 34 belonging to the serge 47, 47, 47 and / or on one of the electroplated metal parts 61, 64. Conversely, regulating structures of the flyweight type can also be considered in order to increase the inertia and adjust the frequency.

It can also be provided that a conductive layer is deposited on at least a portion of the regulator member 41, 41, 41 to avoid isochronism problems. Such a layer may be of the type disclosed in EP 1 837 722 incorporated by reference in this specification.

Finally, a polishing step of the type of step 111 can also be performed between step 107 and step 108. It can also be envisaged that a step of producing a metal deposit 63, 66 , of the type obtained by embodiments B or C, is carried out not on the balance but, in the case of the manufacture of the single spiral 51, on the additional layer 21 so as to be able to drive an axis not against the silicon-based material of the inner diameter of the ferrule 55 but against said metal deposit.

Claims (24)

1. Monobloc regulating member (41, 41, 41) comprising a rocker (43, 43, 43) cooperating with a spiral (51, 51, 51) made in a layer of base material of silicon (21), the spiral (51, 51, 51) comprising a spiral spring (53, 53, 53) mounted coaxially on a ferrule (55, 55, 55) having a cavity (24, 10), the ferrule (55, 55, 55) having an axially extending portion (19) projecting from said spiral spring and which is formed in a second layer of silicon-based material (5). ) characterized in that the portion (19) in axial extension of the ferrule (55, 55, 55) is connected to the rocker (43, 43, 43) integrally. 2. Regulator according to claim 1, characterized in that the rocker (43, 43, 43) has a hole (26) extending the cavity (24, 10) of the ferrule (55, 55, 55 ) To receive a balance shaft (49). 3. Control member according to claim 2, characterized in that the rocker (43, 43, 43) is arranged to be fixed on a balance shaft (49). 4. Regulating body according to claim 3, characterized in that the rocker (43, 43) is arranged to be fixed by driving on a balance shaft (49) against a metal coating (63, 66) made at said hole for said hunting. 5. Control member according to one of claims 2 to 4, characterized in that the section of the cavity (24, 10) of the shell (55, 55, 55) is larger than that of the hole (26 , 63, 66) of the balance (43, 43, 43) in order to avoid the fatty contacts between a balance shaft (49) and the cavity (24, 10) of the ferrule (55, 55, 55 ). 6. Regulating body according to one of the preceding claims, characterized in that the serge (47, 47, 47) of the balance (43, 43, 43) is continuous and comprises an adaptation device ( 61, 64, 68) capable of modifying the moment of inertia of the balance. 7. Regulating body according to claim 6, characterized in that the serge (47, 47, 47) is connected to the hub (45, 45, 45) of the balance (43, 43, 43 ) by at least one arm (40, 42, 44, 46, 40, 42, 44, 46, 40, 42, 44, 46) which is slender to allow its axial and / or radial deformation in the event of shock transmitted on the balance (41, 41 ', 41). 8. regulating organ according to claim 6 or 7, characterized in that the adaptation device comprises recesses (60, 68) made on the serge (47, 47) of the balance (43, 43) in order to to be able to adjust the inertia of said balance. 9. regulating organ according to claim 8, characterized in that the recesses (60) comprise a material of greater density than that of the serge (47) of the balance (43) to increase the inertia of said balance. 10. Regulating body according to claim 6 or 7, characterized in that the adaptation device comprises bosses (61) made on the strut (47) of the balance (43) and comprising a material of greater density than the serge (47) to increase the inertia of said balance. 11. Regulating body according to claim 9 or 10, characterized in that said material of greater density is distributed at the level of the serge (47, 47) in the form of a castellated ring (61, 64) having a succession of studs (65, 69) spaced at regular intervals to compensate for the thermal expansion of said material. 12. Regulator according to one of the preceding claims, characterized in that the rocker (43, 43, 43) is formed in a third layer (7) of silicon-based material. 13. Control member according to one of the preceding claims, characterized in that the inner coil of the spiral spring (53, 53, 53) comprises a Grossmann type curve to improve the concentricity of the development of said spiral. 14. Control member according to one of the preceding claims, characterized in that the spiral spring (53, 53, 53) comprises at least one part based on silicon dioxide to make it more mechanically resistant and adjust its thermo-elastic coefficient. 15. Timepiece characterized in that it comprises a regulating member (41, 41, 41) according to one of the preceding claims. 16. A method of manufacturing (1) a monoblock regulating member (41, 41, 41) comprising the following steps: a) providing (100) a substrate (3) having an upper layer (5) and a lower layer (7) of silicon-based materials; b) selectively (101) etching at least one cavity (10, 11) in the upper layer (5) to define the pattern (19) of a first portion (19) of a ferrule (55, 55, 55 ) And a first portion (17) of a rocker (43, 43, 43) of silicon-based material of said member; c) securing (102), on the upper layer (5) etched of the substrate (3), an additional layer (21) of silicon-based material; d) selectively (103) etching at least one cavity (20, 24) in the additional layer (21) to continue the pattern (19, 23) of said first parts of the ferrule (55, 55, 55) and the balance (43, 43, 43), and defining the pattern (27) of a spiral spring (53, 53, 53) of silicon-based materials of said member; characterized in that it further comprises the following steps: e) etching (105, 108, 112) selectively at least one cavity (26, 28, 29, 30, 31, 32) in the lower layer (7) to define the last portion (34) of the balance (43, 43 , 43) of silicon-based materials of said member; f) releasing the one-piece regulating member (41, 41) from the substrate (3). 17. The manufacturing method according to claim 16, characterized in that it further comprises after step d) the following step: g) oxidizing the spiral spring (53, 53, 53) of silicon-based material of said member to adjust its thermo-elastic coefficient but also to make it mechanically more resistant. 18. The manufacturing method according to claim 16 or 17 characterized in that it further comprises, before step e) the following step: h) depositing (107, 110) selectively at least one metal layer (61, 63, 64, 66) on the lower layer (7) to define the pattern of at least a metal portion of said member. 19. Manufacturing method according to claim 18 characterized in that step h) comprises the following phase: i) growing (107) said deposition in successive metal layers at least partially on the surface of the lower layer (7) to form a metal portion (61) for increasing the mass of the balance (43) of materials based of silicon. 20. Manufacturing method according to claim 18 or 19 characterized in that step h) comprises the following phase: i) growing (107) said deposition in successive metal layers at least partially on the surface of the lower layer (7) to form a second metal portion (63) for receiving by driving an axis (49). 21. The manufacturing method according to claim 18 characterized in that step h) comprises the following phases; j) selectively etching (109) at least one cavity (60) in the lower layer (7) for receiving said at least one metal portion; k) growing (110) said metal layer deposition at least partially in said at least one cavity to form a metal portion (64) for increasing the mass of the rocker (43) of silicon-based materials. 22. The manufacturing method according to claim 18 or 21, characterized in that step h) comprises the following phases: j) selectively etching (109) at least one cavity (62) in the lower layer (7) for receiving said at least one metal portion; k) growing (110) said deposition by successive metal layers at least partially in said at least one cavity to form a second metal portion (63) for receiving by driving an axis (49). 23. Manufacturing method according to one of claims 18 to 22, characterized in that step h) comprises the following last phase: I) polishing (111) the metal deposit (61, 63, 64, 66). 24. The manufacturing method according to one of claims 16 to 23, characterized in that several members (41, 41, 41) are formed on the same substrate (3).