NL7804706A - CRYOPUMP. - Google Patents

CRYOPUMP.

Info

Publication number: NL7804706A
Authority: NL; Netherlands
Prior art keywords: cryopump
Prior art date: 1978-04-18

Application number

NL7804706A

Other languages

Dutch (nl)

Original Assignee

Balzers Hochvakuum

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-04-18

Filing date

1978-05-02

Publication date

1979-10-22

1978-05-02 Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum

1979-10-22 Publication of NL7804706A publication Critical patent/NL7804706A/en

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

NL7804706A 1978-04-18 1978-05-02 CRYOPUMP. NL7804706A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH411478A CH628959A5 (en)	1978-04-18	1978-04-18	Cryopump with a fitted refrigerating machine

Publications (1)

Publication Number	Publication Date
NL7804706A true NL7804706A (en)	1979-10-22

Family

ID=4270072

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7804706A NL7804706A (en)	1978-04-18	1978-05-02	CRYOPUMP.

Country Status (3)

Country	Link
CH (1)	CH628959A5 (en)
DE (1)	DE2912856A1 (en)
NL (1)	NL7804706A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4295338A (en) *	1979-10-18	1981-10-20	Varian Associates, Inc.	Cryogenic pumping apparatus with replaceable pumping surface elements
US4277951A (en) *	1980-04-10	1981-07-14	Air Products And Chemicals, Inc.	Cryopumping apparatus
DE3046458A1 (en) *	1980-12-10	1982-07-15	Leybold-Heraeus GmbH, 5000 Köln	REFRIGERATOR CRYOSTAT
DE3232324C2 (en) *	1982-08-31	1986-08-28	Leybold-Heraeus GmbH, 5000 Köln	Refrigerator-operated cryopump
US4530213A (en) *	1983-06-28	1985-07-23	Air Products And Chemicals, Inc.	Economical and thermally efficient cryopump panel and panel array
DE58904918D1 (en) *	1989-02-28	1993-08-19	Leybold Ag	A CRYOPUMPUM OPERATED WITH A TWO-STAGE REFRIGERATOR.
US7313922B2 (en) *	2004-09-24	2008-01-01	Brooks Automation, Inc.	High conductance cryopump for type III gas pumping
CH703216A1 (en) *	2010-05-27	2011-11-30	Hsr Ag	A device for preventing the memory effect upon cryopumps.

1978
- 1978-04-18 CH CH411478A patent/CH628959A5/en not_active IP Right Cessation
- 1978-05-02 NL NL7804706A patent/NL7804706A/en not_active Application Discontinuation
1979
- 1979-03-30 DE DE19792912856 patent/DE2912856A1/en not_active Withdrawn

Also Published As

Publication number	Publication date
DE2912856A1 (en)	1979-10-31
CH628959A5 (en)	1982-03-31

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Legal Events

Date	Code	Title	Description
1979-11-12	A1B	A search report has been drawn up
1981-08-03	BC	A request for examination has been filed
1983-06-16	DNT	Communications of changes of names of applicants whose applications have been laid open to public inspection	Free format text: BALZERS AKTIENGESELLSCHAFT
1985-01-01	A85	Still pending on 85-01-01
1987-01-02	BV	The patent application has lapsed