NL2023533A - A light source and a method for use in metrology applications - Google Patents
A light source and a method for use in metrology applications Download PDFInfo
- Publication number
- NL2023533A NL2023533A NL2023533A NL2023533A NL2023533A NL 2023533 A NL2023533 A NL 2023533A NL 2023533 A NL2023533 A NL 2023533A NL 2023533 A NL2023533 A NL 2023533A NL 2023533 A NL2023533 A NL 2023533A
- Authority
- NL
- Netherlands
- Prior art keywords
- gas
- light source
- substrate
- optical fiber
- temperature
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Claims (1)
1. Een inrichting ingericht voor het belichten van een substraat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2023533A NL2023533A (en) | 2019-07-19 | 2019-07-19 | A light source and a method for use in metrology applications |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2023533A NL2023533A (en) | 2019-07-19 | 2019-07-19 | A light source and a method for use in metrology applications |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2023533A true NL2023533A (en) | 2019-08-14 |
Family
ID=67585748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2023533A NL2023533A (en) | 2019-07-19 | 2019-07-19 | A light source and a method for use in metrology applications |
Country Status (1)
| Country | Link |
|---|---|
| NL (1) | NL2023533A (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3851904A1 (en) | 2020-01-15 | 2021-07-21 | ASML Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
| EP3865931A1 (en) | 2020-02-12 | 2021-08-18 | ASML Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
-
2019
- 2019-07-19 NL NL2023533A patent/NL2023533A/en unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3851904A1 (en) | 2020-01-15 | 2021-07-21 | ASML Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
| WO2021144093A1 (en) | 2020-01-15 | 2021-07-22 | Asml Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
| US11372154B2 (en) | 2020-01-15 | 2022-06-28 | Asml Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
| EP3865931A1 (en) | 2020-02-12 | 2021-08-18 | ASML Netherlands B.V. | Method, assembly, and apparatus for improved control of broadband radiation generation |
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