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NL1015507A1 - Organisch anti-reflecterend polymeer en bereiding hiervan. - Google Patents

Organisch anti-reflecterend polymeer en bereiding hiervan.

Info

Publication number
NL1015507A1
NL1015507A1 NL1015507A NL1015507A NL1015507A1 NL 1015507 A1 NL1015507 A1 NL 1015507A1 NL 1015507 A NL1015507 A NL 1015507A NL 1015507 A NL1015507 A NL 1015507A NL 1015507 A1 NL1015507 A1 NL 1015507A1
Authority
NL
Netherlands
Prior art keywords
preparation
organic anti
reflective polymer
reflective
polymer
Prior art date
Application number
NL1015507A
Other languages
English (en)
Other versions
NL1015507C2 (nl
Inventor
Min-Ho Jung
Sung-Eun Hong
Ki-Ho Baik
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Publication of NL1015507A1 publication Critical patent/NL1015507A1/nl
Application granted granted Critical
Publication of NL1015507C2 publication Critical patent/NL1015507C2/nl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C317/00Sulfones; Sulfoxides
    • C07C317/16Sulfones; Sulfoxides having sulfone or sulfoxide groups and singly-bound oxygen atoms bound to the same carbon skeleton
    • C07C317/22Sulfones; Sulfoxides having sulfone or sulfoxide groups and singly-bound oxygen atoms bound to the same carbon skeleton with sulfone or sulfoxide groups bound to carbon atoms of six-membered aromatic rings of the carbon skeleton
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F20/00Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C08F20/02Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
    • C08F20/52Amides or imides
    • C08F20/54Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide
    • C08F20/58Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide containing oxygen in addition to the carbonamido oxygen, e.g. N-methylolacrylamide, N-acryloylmorpholine
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C303/00Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
    • C07C303/26Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids
    • C07C303/28Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids by reaction of hydroxy compounds with sulfonic acids or derivatives thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Paints Or Removers (AREA)
  • Materials For Photolithography (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Polymerisation Methods In General (AREA)
  • Polymerization Catalysts (AREA)
NL1015507A 1999-06-26 2000-06-23 Organisch anti-reflecterend polymeer en bereiding hiervan. NL1015507C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019990024469A KR100327576B1 (ko) 1999-06-26 1999-06-26 193nm ArF광을 이용한 초미세 패턴 형성 공정에서 반사방지막으로 사용할 수 있는 유기 반사방지 중합체 및 그의 제조방법
KR19990024469 1999-06-26

Publications (2)

Publication Number Publication Date
NL1015507A1 true NL1015507A1 (nl) 2000-12-28
NL1015507C2 NL1015507C2 (nl) 2001-04-09

Family

ID=19595632

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1015507A NL1015507C2 (nl) 1999-06-26 2000-06-23 Organisch anti-reflecterend polymeer en bereiding hiervan.

Country Status (10)

Country Link
US (1) US6956091B2 (nl)
JP (1) JP4276359B2 (nl)
KR (1) KR100327576B1 (nl)
CN (2) CN1292009C (nl)
DE (1) DE10028487A1 (nl)
FR (1) FR2795416B1 (nl)
GB (1) GB2351498B (nl)
IT (1) IT1320210B1 (nl)
NL (1) NL1015507C2 (nl)
TW (1) TWI280965B (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100515485B1 (ko) * 2002-08-28 2005-09-15 주식회사 동진쎄미켐 I-라인 포토레지스트용 유기반사방지막 조성물
KR100787854B1 (ko) * 2006-08-16 2007-12-27 주식회사 동진쎄미켐 아크릴계 포토레지스트 모노머, 폴리머 및 이를 포함하는포토레지스트 조성물
KR100960464B1 (ko) * 2007-08-09 2010-05-28 주식회사 하이닉스반도체 반사방지막용 중합체, 이를 포함하는 반사방지막 조성물 및이를 이용한 패턴 형성방법
WO2014179100A1 (en) * 2013-04-30 2014-11-06 3M Innovative Properties Company Process for preparing poly(benzoxazines)
CN103351465B (zh) * 2013-07-15 2015-09-09 京东方科技集团股份有限公司 光刻胶单体、光刻胶及它们的制备方法、彩色滤光片
EP3058013B1 (en) 2013-10-16 2018-01-31 3M Innovative Properties Company Benzoxazine polymerization

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE527163A (nl) * 1953-03-11 1954-03-31
CS150825B1 (nl) * 1971-02-11 1973-09-17
JPS5116551B1 (nl) * 1971-03-08 1976-05-25
JPS4963419A (nl) * 1972-10-18 1974-06-19
JPS5736283B2 (nl) * 1973-01-25 1982-08-03
JPS536394A (en) * 1976-07-08 1978-01-20 Fuji Photo Film Co Ltd Functional high polymers
DE3100077A1 (de) * 1981-01-03 1982-08-05 Hoechst Ag, 6000 Frankfurt Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters
CS226911B1 (en) * 1981-10-28 1984-04-16 Jaroslav Kahovec Polymere polydonor komplexons and method of their manufacture polymere polydonor
US4822718A (en) * 1982-09-30 1989-04-18 Brewer Science, Inc. Light absorbing coating
US5674648A (en) * 1984-08-06 1997-10-07 Brewer Science, Inc. Anti-reflective coating
JPH0725197B2 (ja) * 1986-11-17 1995-03-22 富士写真フイルム株式会社 記録材料
JP2740837B2 (ja) 1987-01-30 1998-04-15 コニカ株式会社 多色転写画像形成方法
GB8812172D0 (en) * 1988-05-23 1988-06-29 Int Paint Plc Marine antifouling paint
JPH0376707A (ja) * 1989-08-21 1991-04-02 Fuji Photo Film Co Ltd 機能性高分子の製法
JPH03120550A (ja) * 1989-10-04 1991-05-22 Fuji Photo Film Co Ltd 記録材料
JPH03144649A (ja) * 1989-10-31 1991-06-20 Fuji Photo Film Co Ltd 記録材料用組成物
JP3196361B2 (ja) * 1991-12-25 2001-08-06 日立化成工業株式会社 塗料用樹脂組成物及び海中構造物用防汚塗料
KR0140908B1 (ko) * 1995-01-20 1998-06-15 박흥기 액정 디스플레이 칼라필터용 안료분산 포토 레지스트 조성물
KR0163016B1 (ko) * 1996-08-23 1998-12-15 한형수 컬러필터용 감광성 착색조성물
KR100254060B1 (ko) * 1997-05-22 2000-06-01 김성용 초정밀 패턴 인쇄회로기판(pcb)용 감광액 조성물
KR100194100B1 (ko) * 1997-05-22 1999-06-15 김성용 인쇄회로기판(pcb)용 감광액 조성물에 사용되는 아크릴 공중합수지 및 이의 제조방법
TW457403B (en) 1998-07-03 2001-10-01 Clariant Int Ltd Composition for forming a radiation absorbing coating containing blocked isocyanate compound and anti-reflective coating formed therefrom

Also Published As

Publication number Publication date
FR2795416A1 (fr) 2000-12-29
KR100327576B1 (ko) 2002-03-14
IT1320210B1 (it) 2003-11-26
CN1699436A (zh) 2005-11-23
KR20010003933A (ko) 2001-01-15
CN1292009C (zh) 2006-12-27
GB0014258D0 (en) 2000-08-02
US20030208018A1 (en) 2003-11-06
ITTO20000612A1 (it) 2001-12-22
CN1309749C (zh) 2007-04-11
DE10028487A1 (de) 2001-02-01
US6956091B2 (en) 2005-10-18
GB2351498A (en) 2001-01-03
CN1290712A (zh) 2001-04-11
TWI280965B (en) 2007-05-11
GB2351498B (en) 2004-09-08
NL1015507C2 (nl) 2001-04-09
FR2795416B1 (fr) 2004-04-09
JP4276359B2 (ja) 2009-06-10
JP2001031721A (ja) 2001-02-06
ITTO20000612A0 (it) 2000-06-22

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20010206

PD2B A search report has been drawn up
MM Lapsed because of non-payment of the annual fee

Effective date: 20150701