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Lee et al., 2017 - Google Patents

Enhanced optical and electrical properties of ITO/Ag/AZO transparent conductors for photoelectric applications

Lee et al., 2017

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Document ID
3860900482275589679
Author
Lee G
Park W
Kim J
Publication year
Publication venue
International Journal of Photoenergy

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Snippet

The enhancement of the optical and electrical properties of TCO films was investigated by depositing different layers of AZO (100 nm), Ag (5 nm)/AZO (95 nm), and ITO (45 nm)/Ag (5 nm)/AZO (50 nm) upon n‐Si substrate at room temperature by magnetron sputtering method …
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    • H01L31/04—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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    • H01L31/18—Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO

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